JPH11305806A - Controller and program preparation method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To utilize the important part of the program of a control module designed in the past as it is by unifying the mode of the control module and the transition of the mode for all the control modules in a controller for controlling one system. SOLUTION: In the system, (n) pieces of elements E(1)-E(n) to be controlled are provided. Then, the control module M(1) controls the elements E(1)-E(3) to be controlled, the control module M(2) controls the elements E(4), E(5),... to be controlled and the control module M(k) controls the elements E(i)-E(n) to be controlled. Then, the control module M(k+1) controls the control modules M(1) and M(2) and the control module M(k+2) controls the plural control modules to the control module (k), and in such a manner, a hierarchical structure is attained. In this controller, for the control modules M(1)-M(k), the mode and the transition of the mode are unified and set.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for standardizing a computer program for control. The present invention relates to a technique for simply executing design, modification, remodeling, and the like of a control computer program by standardizing the program. The present invention provides a method for controlling a plurality of n
The present invention relates to a control program for a control device formed by combining n control modules that individually control the controlled elements and control modules that hierarchically control the control modules.

[0002]

2. Description of the Related Art In one "system", n controlled elements are provided, and n control modules are provided for individually controlling the n controlled elements, and the n control modules are provided. There is widely used a technique for providing a control module for hierarchically controlling the above control modules, and for controlling the “system” as a whole.

FIG. 2 is a control system diagram schematically showing one system. FIG. 2 is common to both the prior art and the embodiment of the present invention. In FIG. 2, this system includes a plurality of n controlled elements E (1) to E (n). The controlled elements E (1) to E (3) are connected to one control module M (1).
Controls. The control module M (2) controls the controlled elements E (4), E (5),... Controlled element E (i) ~
E (n) is controlled by the control module M (k). Then, one control module (k + 1) controls the control modules M (1) and M (2).
One control module M (k + 2) controls a plurality of control modules up to (k). Further, the two control modules M (k + 1) and M (k + 2) have a hierarchical structure such that one control module M (k + 3) controls them.

[0004] One communication memory COM is provided, and each control module M (1) to M (k) can access the communication memory COM through communication lines C (1) to C (k + 3). Is configured. Each of the control modules M (1) to M (k) reads the communication addressed to the own module written in the allocated area of the communication memory COM at a predetermined cycle, and is allocated to another module. It is configured to write the communication addressed to the module to the area.

[0005] This will be described by way of example to make it easier to understand. Now, assuming that this system is a semiconductor manufacturing apparatus, the controlled element E (1) is a vacuum pump of the first vacuum chamber, the controlled element E (2) is an internal elevator of the first vacuum chamber, The controlled element E (3) is a pressure valve of the first vacuum chamber. Controlled element E (4)
Is a vacuum pump for the communication chamber with the second vacuum chamber, and the controlled element E (5) is a transport belt of this communication chamber. The controlled element E (i) is a door at the product outlet, the controlled element E (n-1) is an elevator at the product outlet, and the controlled element E (n) is a transporter at the product outlet.

The controlled elements E (i) to E (n)
Are controlled by the control of one control module M (k + 3), and the control modules M (1) to M (k
+2) to realize an example of a continuous semiconductor manufacturing process. That is, a silicon wafer as a material is loaded into the first vacuum chamber, set at a predetermined position, the degree of vacuum is increased by the operation of a vacuum pump, a vapor deposition process is performed, and so on. The product (or semi-finished product) that has passed through the step is carried out to the product outlet.

Each controlled element has a sensor,
This sensor output information is sent to a control module that controls the controlled element. Each control module executes servo control according to the sensor output information. Then, the information related to the other control module is transmitted to the other control module via the communication memory COM, and transmitted from the other control module.

[0008]

Here, the present inventor has long been engaged in designing a control program for a control system in which a plurality of control modules as shown in FIG. 2 control a plurality of controlled elements. Controlled elements E (1) to E (n)
Is a valve in some cases, a switch of a motor in some cases, and a rotation axis of a robot device in some cases. Then, each control module has a different specification so as to conform to it.

That is, when designing a control program for one such control system, each of the controlled elements E
It is necessary to design a control module in accordance with the characteristics and characteristics for each of (1) to E (n). For this reason, the design of the control program for the control system requires an extremely large number of man-hours, and when the specifications need to be changed or modified, large man-hours such as changing the control program of the control module each time are required. It was supposed to be. In other words, if a design change is required for one of the hierarchically combined control modules, it may affect the higher-level control module or the lower-level control module, and may affect many control modules. The design was to be changed.

In addition, even if the controlled elements constituting the newly set controlled system include the controlled elements used in the past, the designer needs to re-operate the new controlled system. It is necessary to create a program from the first step to the last step in light of a series of operations. Therefore, even if a past design is diverted, it is necessary to change the programs of the upper and lower control modules accordingly. As a result, in principle, even if a partially controlled element program used in the past can be diverted to a new controlled system program, it is limited to only a small part.

The present invention has been made in view of such a background, and provides a program control device and a method of creating a control program that can use an important part of a program of a control module designed in the past as it is. The purpose is to: An object of the present invention is to provide a control device and a method of creating a control program, which can significantly reduce the number of steps for creating a control program of a control system created by combining control modules. An object of the present invention is to provide a control device and a control program creation method that can streamline the control program creation process. An object of the present invention is to provide a control device and a control program creation method capable of incorporating a program of a control module designed in the past with a slight change even when a device to be controlled and a controlled element are different. With the goal. SUMMARY OF THE INVENTION An object of the present invention is to provide a program control device and a control program creation method capable of responding to changes and corrections in controlled elements and control conditions with a small number of man-hours.

[0012]

SUMMARY OF THE INVENTION The first feature of the present invention is to unify the mode of the control module and the transition of the mode for all the control modules in the control device for controlling one system. I do. Even if a certain control module has a mode which is not used among the basic modules, the mode is kept provided according to the basic module. In addition, modes and mode transitions are not expanded beyond those provided in the basic module. When it is necessary to expand, another control module is used for the design. All the modules of the control module and the transitions of the modules are unified in at least one closed system. By setting parameters for the mode and the transition of the mode in accordance with the control condition and the condition given by the controlled element, it is possible to design any control mode.

That is, the present invention comprises a plurality of control modules for controlling a plurality of controlled elements, one or more control modules for hierarchically controlling the plurality of control modules, and communication means between the control modules. In a control device for controlling one system as a whole, the modes of the control module and the transition of the modes are unified.

The modes of the control module and the mode transition include an activation mode for controlling activation of the corresponding controlled element, and a normal operation mode for directly shifting from the activation mode and controlling the normal operation of the controlled element. A stop mode in which the normal operation mode can be shifted directly and directly to control the stop of the controlled element; and a stop mode in which the stop mode can be shifted directly and directly to the start mode and the controlled element can be shifted. A hold mode in which the hold mode is controlled, and a reverse mode in which the stop mode can be directly shifted from the hold mode and the stop mode can be mutually shifted to control the controlled element in the reverse state, and a shift can be made directly from the hold mode. It is possible to make a transition between the stop mode and the normal operation mode or the start mode. Including a manual control mode for controlling a warning mode that generates the directly be migrated alarm from the hold mode, and a termination mode to end the control of directly to migrate the controlled element from the hold mode.

The start mode includes a cold start mode for creating a control file and a hot start mode for shifting from the cold start mode and writing file data to the RAM.

The normal operation mode includes an origin mode for confirming that the controlled element is at the origin, a restoration mode for returning the sequence of the automatically controlled controlled elements to a state immediately before the interruption of the sequence, It includes a preparation mode for preparing for automatic operation of the element and an operation mode for performing automatic operation of the controlled element.

The stop mode includes an emergency stop mode for urgently stopping the operation of the controlled element, a deceleration stop mode for gradually stopping the operation of the controlled element, And a step stop mode for stopping at a break.

The hold mode includes a CPU halt mode capable of stopping a CPU, a control release mode for releasing the controlled element from control, and a control recovery for returning the controlled element released from control to control. And a diagnostic mode in which the operating state of the controlled element is converted into information and the control specification can be changed.

The alarm mode includes an abnormal stop mode in which the operation is stopped when an abnormality is detected in the operation of the controlled element, and an emergency stop mode in which an emergency stop is performed according to an external instruction regardless of the operating condition. Including.

According to the program creation method of the present invention, there are provided a step of duplicating a plurality of basic modules in which modes and mode transitions are set, and a mode in which the modes of the duplicated basic modules and mode transitions are fixed. And a step of creating a plurality of control modules corresponding to each specification by processing each of the specifications, and a step of creating a control program of one system by hierarchically combining the plurality of control modules. And

Here, for the basic module, the mode and the mode transition are a start mode for controlling activation of a corresponding controlled element, and a normal mode can be directly shifted from the start mode to control a normal operation of the controlled element. A normal operation mode, a stop mode that can shift directly and directly to the normal operation mode and controls the stop of the controlled element, and a shift mode that can shift directly and directly to the stop mode and can directly shift to the start mode; A hold mode in which the controlled element is controlled to a hold state, a reverse mode in which the hold mode can be directly shifted and the stop mode can be shifted to each other to control the controlled element in a reverse state, and the hold mode directly. Can be shifted to the stop mode and can shift to the normal operation mode or the start mode. A manual control mode for manually controlling the controlled element, an alarm mode for directly shifting from the hold mode and generating an alarm, and an end mode for directly shifting from the hold mode and terminating the control of the controlled element. Including.

A third aspect of the present invention is a machine-readable recording medium. A feature of the present invention is that the recording medium includes an activation mode for controlling activation of a corresponding controlled element, A normal operation mode which can directly shift from the start mode and controls the normal operation of the controlled element; a stop mode which can shift directly and directly to the normal operation mode and controls the stop of the controlled element; A hold mode that can shift directly and mutually to the start mode and control the controlled element in a hold state mutually and directly;
The reverse mode, which can directly shift from the hold mode and can also shift to the stop mode and control the controlled element to the reverse state, and can shift directly from the hold mode and can shift to the stop mode mutually, A manual control mode capable of shifting to the mode or the start-up mode and manually controlling the controlled element, and an alarm mode for directly shifting from the hold mode and generating an alarm,
And a termination mode in which the control of the controlled element can be terminated directly from the suspension mode, and a standardized program that becomes a control program by setting a numerical value is recorded.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a unified mode and a transition of the mode according to the embodiment of the present invention. FIG. 2 is a control system diagram of one control system in which the present invention is implemented. This control system diagram can be variously configured,
FIG. 2 schematically shows one easy-to-understand model.

In FIG. 2, this system includes a plurality of n controlled elements E (1) to E (n). This controlled element E
One control module M (1) controls (1) to E (3). The control module M (2) controls the controlled elements E (4), E (5),... Controlled elements E (i) to E
(N) is controlled by the control module M (k). And
One control module M (k + 1) controls the control modules M (1) and M (2),
One control module M (k + 2) controls a plurality of control modules up to (k). Further, the two control modules M (k + 1) and M (k + 2) have a hierarchical structure such that one control module M (k + 3) controls them.

One communication memory COM is provided, and each of the control modules M (1) to M (k) can access the communication memory COM through communication lines C (1) to C (k + 3). Is configured. Each of the control modules M (1) to M (k) reads the communication addressed to the own module written in the allocated area of the communication memory COM at a predetermined cycle, and is allocated to another module. It is configured to write the communication addressed to the module to the area.

The plurality of n controlled elements E (1) to E (E)
How (n) corresponds to a practical device is the same as that described in the description of the prior art. Here, the description will be repeated, but for simplicity, description will be given by way of example. Now, assuming that this system is a semiconductor manufacturing apparatus, the controlled element E (1) is a vacuum pump of the first vacuum chamber, the controlled element E (2) is an internal elevator of the first vacuum chamber, The controlled element E (3) is a pressure valve of the first vacuum chamber. Controlled element E
(4) is a vacuum pump for the communication room with the second vacuum chamber, and the controlled element E (5) is a transport belt of this communication room. The controlled element E (i) is an opening / closing door of a product outlet, the controlled element E (n-1) is an elevator of a product outlet,
The controlled element E (n) is a carrier at the product outlet.

These controlled elements E (i) to E (n)
Are controlled by the control of one control module M (k + 3), and the control modules M (1) to M (k
+2) to realize an example of a continuous semiconductor manufacturing process. That is, a silicon wafer as a material is loaded into the first vacuum chamber, set at a predetermined position, the degree of vacuum is increased by the operation of a vacuum pump, a vapor deposition process is performed, and so on. The product (or semi-finished product) that has passed through the step is carried out to the product outlet.

Each controlled element has a sensor,
This sensor output information is sent to a control module that controls the controlled element. Each control module executes servo control according to the sensor output information. Then, the information related to the other control module is transmitted to the other control module via the communication memory COM, and transmitted from the other control module.

The feature of the present invention is that the control modules M (1) to M (k) have their modes and mode transitions unified and set as shown in FIG. . FIG. 1 is common to all control modules.

The mode and the transition of the modes will be described. A start mode ST1 for controlling the start of the corresponding controlled element, and a normal operation for directly shifting from the start mode ST1 and controlling the normal operation of the controlled element. A mode ST2, a stop mode ST3 which can directly and directly transition to the normal operation mode ST2 and controls the stop of the controlled element, and a transition to the stop mode ST3 which can directly and directly transition to the start mode ST1. A reversing mode ST4 that can control the controlled element in a reversing state by allowing the controllable element to be in a reversing state; It is possible to shift directly from the hold mode ST4 and to shift to the stop mode ST3 mutually, thereby enabling normal operation mode. A manual control mode ST5 to manually control the a migratable the controlled element in de ST2 or start mode ST1, the alarm mode ST7 generating an alarm can migrate directly from hold mode ST4, hold mode ST
7 and an end mode ST8 in which the control of the controlled element can be terminated directly.

More specifically, the start mode ST1 includes:
Cold start mode st1 for creating control file
0, and a hot start mode st11 in which the file data is transferred from the cold start mode st10 and the file data is written to the RAM. The normal operation mode ST2 is an origin mode st1 for confirming that the controlled element is at the origin.
2, a restoration mode st13 for returning the sequence of the controlled elements to be automatically operated to the state immediately before the interruption of the sequence,
A preparation mode st14 for preparing for automatic operation of the controlled element and an operation mode st15 for performing automatic operation of the controlled element are included. The stop mode ST3 is
An emergency stop mode st16 for urgently stopping the operation of the controlled element, a deceleration stop mode st17 for gradually stopping the operation of the controlled element, and a step stop for stopping the operation of the controlled element at the break of the sequence Mode st
18 inclusive. The suspension mode ST4 includes a CPU halt mode st19 that can halt the CPU, a control release mode st20 that releases the controlled element from control, and a control recovery mode that returns the controlled element released from control to control. st21 and a diagnostic mode st22 in which the operation status of the controlled element can be converted into information and the control specification can be changed. The alarm mode ST7 includes an abnormal stop mode st23 in which the operation is stopped when an abnormality is detected in the operation of the controlled element, and an emergency stop mode st in which an emergency stop is performed according to an external instruction regardless of the operation state.
24.

In FIG. 1, for example, looking at the origin st12,
While the frame is enclosed, "When changing to this state, C
"N flag is ON", which is a condition when the mode transits to the "origin". Similarly, there are two conditions when the mode transitions to “restoration”: “CN flag is ON, OR flag is ON”. Similarly, when the mode transitions to “prepare”, there are three conditions of “CN flag is ON, OR flag is ON, and RS flag is ON”. There are four conditions that the flag is ON, the OR flag is ON, the RS flag is ON, and the RD flag is ON.
OR flag is ON, RS flag is ON, RD flag is O
N ". Here, the CN flag is a fixed position flag, the OR flag is an origin flag,
The RS flag is a restoration flag, and the RD flag is a preparation flag.

In the above example, it is assumed that the controlled element E (2) is an elevator inside the chamber. Assuming that the elevator is a three-axis elevator, a three-axis control system as shown in FIG. 3 can be replaced in place of the controlled element E (2). That is, the control module M shown in FIG.
A lower control module M ₁ (1) of (1) is newly provided,
This is a control module for three-axis control. Under the control, three axes E ₂ (1), E ₂ (2), E
₂ (3) can be arranged. Also in this case, the newly provided control module M ₁ (1) is a control mode in which the mode and the mode transition are unified.

Although a semiconductor manufacturing apparatus is used in this example, this is an example, and the present invention can be widely applied to a system in which a plurality of controlled elements are controlled in a hierarchical manner.

In any case, the control module can be designed by duplicating the basic module and setting individual parameters based on the specifications in the basic module.

This basic module can be sold after being recorded on a floppy disk, CD-ROM, or other storage medium. The designer of the control device can design a related control module based on the basic module, and can design one control device by combining the control modules.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a configuration diagram of a main part of the lathe. FIG. 5 is a control system diagram of the lathe. FIG. 6 is a configuration diagram of a main part of the communication memory. FIG. 7 is a conceptual diagram showing a connection relationship between control modules. FIG. 8 is a conceptual diagram showing a transfer form of an event code and various flags. FIG. 9 is a conceptual diagram showing a transfer form of an alarm flag and an emergency stop (abnormal stop) flag. The lathe shown in FIG. 4 includes servo motors SM-1, SM-2, SM-3, a hydraulic cylinder OS-
1, OS-2, OS-3, and an oil valve OV-1. The servo motor SM-1 is for rotating the spindle, and rotates the workpiece. This servo motor SM-1
Means only forward rotation and not reverse rotation. In addition, since the servo motor SM-1 is for rotating the workpiece, no special control is required. Servo motor SM
Reference numeral -2 is for X-axis feed of the tool post, and performs forward rotation and reverse rotation. The servo motor SM-3 is for feeding the tool post Y axis,
Perform normal rotation and reverse rotation. The hydraulic cylinder OS-1 is for a chuck, and drives a chuck for gripping a workpiece. The hydraulic cylinder OS-2 is for tailing. Hydraulic cylinder O
S-3 is for a blade clamp, and is used for gripping the blade. The oil valve OV-1 is used for supplying cutting oil to a workpiece.

FIG. 5 is a control system diagram of the lathe shown in FIG. 4, and shows a hydraulic cylinder OS- as a controlled element E (1).
1. Hydraulic cylinder OS-2 as controlled element E (2)
Servo motor SM-2 as controlled element E (3), servo motor SM-3 as controlled element E (4), hydraulic cylinder OS-3 as controlled element E (5), controlled element E
The oil valve OV-1 is assigned as (6), and the control module M (1) controls the hydraulic cylinder OS-1.
The control module M (2) controls the hydraulic cylinder OS-2, the control module M (3) controls the servomotors SM-2 and SM-3, and the control module M (4) controls the hydraulic cylinder OS-3. Then, the control module M (5) controls the oil valve OV-1.

Further, the control module M (6) controls the control modules M (1) and M (2), and the control module M (7) controls the control modules M (3), M (4), M
(5) is controlled. Further, the control module M (8) controls the control modules M (6) and M (7). Further, a communication memory COM that can be commonly accessed by these control modules M (1) to M (8) is provided.

As shown in FIG. 6, the communication memory COM is connected to each of the control modules M (1) to M (8) and the communication line C.
Communication is performed via (1) to C (8). Although the communication lines C (1) to C (8) are not shown in FIG. 5, the communication lines C (1) to C (8) are, as shown in FIG. It is installed between (8) and the communication memory COM. The communication lines C (1) to C (8) are connected to the control modules M (1) to M (8) and the communication memory CO
M or a logical line logically set using a line connecting the control modules M (1) to M (8). There can be.

In the communication memory COM shown in FIG. 6, each of the control modules M (1) to M (8) has a predetermined cycle.
The assigned area m (1) of the communication memory COM
While reading the communication addressed to the own module written to m (8), the area m allocated to the other module is read.
(I) The communication destined for the control module is written in (i is an integer from 1 to 8). Thus, each control module M (1) to M
(8) can exchange data with each other. Here, the data is, for example, the hydraulic cylinders OS-1, OS-1
-2, OS-3 or servo motor SM-2, SM-
If it is 3, these are numerical data indicating the position of the actuator to be driven, and are used to determine whether the actuator is at the origin or a fixed position.

As shown in FIG. 7, each control module M
(1) to M (8) and the communication memory COM are arranged. Information transmitted and received by each of the control modules M (1) to M (8) includes an event code and various flags in addition to the data described above. Here, the event code is a code for controlling a transition to each mode in the control modules M (1) to M (8) shown in FIG.
In FIG. 8, white circles (○) indicate the issuance of event codes and various flags, and black circles (●) indicate responses to the event codes and various flags.

For example, when the uppermost control module M (8) shown in FIGS. 6 and 7 causes the subsequent lower control modules M (1) to M (7) to transition to the respective start modes ST1, The event code indicating that is transferred to the control modules M (6) and M (7) immediately below. Control modules M (6) and M receiving this
(7) issues the same event code and issues control modules M (1), M (2) and M
(3), transfer to M (4), M (5). The response to this event code is transition completion information, and is conversely transferred from lower to higher. In this way, it is possible to control the transition from the upper order to the lower order to each mode. In addition, information on various flags is transferred from the higher order to the lower order similarly to the event code. However, as shown by the broken line in FIG. 8, exceptionally, the event codes and flags relating to the emergency stop mode st23 and the abnormal stop mode st24 are not limited to this. As shown in FIG. 9, the issuance of flags related to the emergency stop mode st23 and the abnormal stop mode st24 (black squares in FIG. 9) and monitoring (white squares in FIG. 9) are performed by each control module M.
(1) to M (8) are performed autonomously and decentralized.

Here, the operation of the control module of the present invention corresponding to the actual operation of the lathe shown in FIG. 4 will be described. In the present invention, all of the control modules M (1) to M (8) have the configuration shown in FIG. 1 in common. Control module M
(8) Waits for a start signal in the start mode ST0. When the start signal arrives, the control module M
(8) makes a transition to the activation mode ST1. At this time, the control module M (8)
And an event code for causing M (7) to transition to the activation mode ST1. The control modules M (6) and M (7) that have received the event code transit to the activation mode ST1, and return transition completion information to the control module M (8). Similarly, the control modules M (6) and M (7) issue an event code for causing the lower control modules M (1) to M (5) to transition to the start mode ST1. The control modules M (1) to M (5) that have received the event code transit to the activation mode ST1, and return transition completion information to the control modules M (6) and M (7). further,
The transition completion information is transmitted to the control modules M (6) and M (7).
To the control module M (8).

Thus, each control module M
(1) to M (8) transition to the start mode ST1. Note that the cold start mode st10 and the hot start mode st11 included in the start mode ST1 are as described above. Subsequently, the control module M (8) sets the origin mode st in the normal operation mode ST2.
An event code for transition to 12 is issued. This event code is transferred to each of the control modules M (1) to M (8) from the higher order to the lower order.

Here, as a condition for transition to the origin mode st12, it is required that the home position flag (CN flag) is ON. At this time, the controlled elements E (1) to E (1) to E
In (6), those that are required to be in fixed positions are:
Controlled element E related to hydraulic cylinders OS-1, OS-2, OS-3 and servo motors SM-2, SM-3
(1), E (2), E (3), E (4) and E (5). Therefore, the controlled elements E (1), E (2), E
(3), control modules M (1), M (2), M (3) and M (4) for controlling E (4) and E (5) are provided with hydraulic cylinders OS-1, OS-2, The current positions of the OS-3 and the servo motors SM-2 and SM-3 are detected, and if the positions are not fixed positions, the positions are corrected, and the position data is stored in the areas m (1), m ( 2), m (3),
Write to m (4).

The control module M (8) monitors the communication memory COM, and controls the controlled elements E (1) and E (1).
When it is confirmed that the positions of (2), E (3), E (4) and E (5) are the home positions, the home position flag (CN flag)
Is turned ON, and the mode transits to the origin mode st12. at the same time,
The other control modules M (1) to M (7) also transition to the origin mode st12 in response to the fact that the home position flag is ON. The transition completion information of each of the control modules M (1) to M (7) is returned to the control module M (8).

Thus, each control module M
(1) to M (8) transition to the origin mode st12. Subsequently, the control module M (8) operates in the normal operation mode ST.
An event code for transition to the second preparation mode st14 is issued. This event code is transferred to each of the control modules M (1) to M (7) from the higher order to the lower order.

Here, as a condition for transition to the preparation mode st14, it is required that the home position flag (CN flag), the origin flag (OR flag), and the restoration flag (RS flag) are ON. At this time, the controlled elements E (1) to
Among the E (6), those which are at a fixed position and the fixed position is required to be the origin are the hydraulic cylinder OS-
1, OS-2, OS-3, servo motor SM-2, SM
-3 related to controlled elements E (1), E (2), E
(3), E (4) and E (5). The restoration flag (RS flag) is a flag for indicating whether or not the temporarily interrupted automatic operation sequence has been restored to the state immediately before the interruption, and is set to ON at the first startup.

Accordingly, the controlled elements E (1), E
(2), control modules M (1), M (2), M (3), M (4) for controlling E (3), E (4), E (5)
Detects the current positions of the hydraulic cylinders OS-1, OS-2, OS-3 and the servomotors SM-2, SM-3, corrects the position if the position is a fixed position and not the origin, The position data is stored in the area m of the communication memory COM.
Write in (1), m (2), m (3), m (4).

The control module M (8) monitors the communication memory COM, and controls the controlled elements E (1) and E (1).
When it is confirmed that the positions of (2), E (3), E (4), and E (5) are the fixed position and the origin, the fixed position flag (CN flag), the origin flag (OR flag), Both the restoration flag (RS flag) is turned ON, and the preparation mode st1
Transition to 4. At the same time, the other control modules M (1) to
M (7) also has the fixed position flag, origin flag, and ready flag of O
In response to N, the mode transits to the preparation mode st14.
The transition completion information of each of the control modules M (1) to M (7) is returned from the control modules M (1) to M (7) to the control module M (8).

In this way, each control module M
(1) to M (8) transition to the preparation mode st14. Subsequently, the control module M (8) operates in the normal operation mode ST.
An event code for transition to the second operation mode st15 is issued. This event code is transferred to each of the control modules M (1) to M (7) from the higher order to the lower order.

Here, the condition for transition to the operation mode st15 is that the home position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are ON. Is done. At this time, among the controlled elements E (1) to E (6), those which are at a fixed position, the fixed position is the origin, and the setting of which is required in a preparation stage before the operation are performed by the hydraulic cylinder OS-1, OS-2, OS-3, servo motor SM-
2, controlled elements E (1), E (2) related to SM-3,
E (3), E (4) and E (5). At this time, the fixed position flag, the origin flag, and the restoration flag are already ON at the stage of the preparation mode st14. Therefore, the setting of the servo motors SM-2 and SM-3 in the preparation stage before the operation is completed.

Further, as a preparatory stage before the operation, the hydraulic cylinder OS-1 for driving the chuck is set in a state where the workpiece is chucked, and the hydraulic cylinder OS-2 for centering is set as the workpiece. , And a predetermined blade is clamped for the hydraulic cylinder OS-3 for blade clamping, and the state data is stored in the areas m (1), m of the communication memory COM.
(2) Write to m (4).

The control module M (8) monitors the communication memory COM, and controls the controlled elements E (1) and E (1).
When it is confirmed that the positions of (2), E (3), E (4), and E (5) are the fixed position, the origin, and that the setting in the preparation stage before the operation is completed, The fixed position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are all turned ON, and the operation mode transits to the operation mode st15. At the same time, the other control modules M (1) to M (7) also transition to the operation mode st15 in response to the ON of the home position flag, the origin flag, the restoration flag, and the preparation flag. The transition completion information of each of the control modules M (1) to M (7) is transmitted from the control module M (1) to M (7).
A reply is sent to (8). Thus, each of the control modules M (1) to M (8) transitions to the operation mode st15. When each of the control modules M (1) to M (8) transitions to the operation mode st15, the lathe starts cutting the workpiece.

The process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 has been described in detail. The control modules M (1) to M (8) shown in FIG.
3, hold mode ST4, manual mode ST5, reverse rotation mode ST6, alarm mode ST7, end mode ST8, and stop mode ST3 includes emergency stop mode s.
t16, a deceleration stop mode st17, and a step stop mode st18. The hold mode ST4 includes a CPU stop mode st19, a control release mode st20, a control recovery mode st21, and a diagnostic mode st22.
In T7, the abnormal stop mode st23 and the emergency stop mode s
There is t24. The contents of each mode are as described above. Further, the procedure for performing the transition to each mode can be described in the same manner as the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 described above.

As described above, the transition to each mode except the alarm mode ST7 is performed by switching from the uppermost control module M (8) to the lower control modules M (6) and M, as shown in FIG.
(7), further lower control modules M (1) to M
This is performed by transferring the event code to (5). The various flags are turned ON / OFF by the uppermost control module M (8), and the lowermost control modules M (1) to M
(7) executes transition by referring to this flag. Also,
Regarding the abnormal stop mode st23 and the emergency stop mode st24 included in the alarm mode ST7, as shown in FIG. 9, each of the control modules M (1) to M (8) autonomously sets an alarm flag and an emergency stop (abnormal stop) flag. Process in a decentralized manner.

(Second Embodiment) A second embodiment of the present invention is shown in FIG.
This will be described with reference to FIG. FIG. 10 is a configuration diagram of a main part of the semiconductor sorting apparatus. 11 to 13 are control system diagrams of the semiconductor sorting device. The second embodiment of the present invention is an example in which the control module of the present invention is applied to the semiconductor sorting device shown in FIG. Briefly describing the semiconductor sorting apparatus shown in FIG. 10, a semiconductor wafer is transported from a supply elevator 1 to a mounting stage 3 by a tray 2. In the heating stage 4, the semiconductor wafer is heated. In the measurement stage 5, the quality of the heated semiconductor wafer is measured. The semiconductor wafer is transferred to the cooling stage 6 and cooled. The cooled semiconductor wafer is stored on the buffer stage 7. In the sorting accommodation stage 8, only the items determined to be non-defective by the measurement stage 5 are extracted and accommodated in the accommodation elevator 9 by the tray 2.

Here, the operation of the control module of the present invention corresponding to the actual operation of the semiconductor sorting apparatus shown in FIG. 10 will be described. In the present invention, each control module M (1) to M
(110) all have the configuration shown in FIG. The control module M (110) waits for a start signal in the start mode ST0. When the start signal arrives, the control module M (110) starts the start mode ST1.
Transitions to. At this time, the control module M (110)
Lower control modules M (19), M (39), M (4
6) Issue an event code for causing M (70) and M (109) to transition to start mode ST1. The control module M (19), M which has received this event code
(39), M (46), M (70), M (109)
While transitioning to the start mode ST1, transition completion information is returned to the control module M (110). Similarly,
Control modules M (19), M (39), M (46),
M (70) and M (109) are the lower control modules M
(18), M (38), M (45), M (65), M
(66), M (67), M (68), M (69), M
(103), M (104), M (105), M (10
6), M (107) and M (108) are set in the start mode ST1
Issue an event code to transition to. The control module M (18), M which has received this event code
(38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7), M (108) transits to the start mode ST1, and transmits the transition completion information to the control modules M (19), M (108).
(39), M (46), M (70), and M (109) are returned. Further, the transition completion information is stored in the control module M (1).
9), M (39), M (46), M (70), M (10
9) is returned to the control module M (110).

Similarly, control module M (18),
M (38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7), M (108) is a lower control module M (1)
2), M (17), M (32), M (37), M (4
0), M (44), M (47) to M (64), M (7
1) to M (76), M (77), M (100), M (8
1) to M (84), M (101), M (85), M (1
02), M (89) to M (91), M (92) to M (9
9) Issue an event code for transitioning to the start mode ST1. The control modules M (12), M (17), M (32), M (3) that have received this event code
7), M (40), M (44), M (47) to M (6
4), M (71) to M (76), M (77), M (10
0), M (81) to M (84), M (101), M (8
5), M (102), M (89) to M (91), M (9)
2) to M (99) make a transition to the activation mode ST1 and also make the transition completion information into the control modules M (18), M
(38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7) Reply to M (108). Further, the transition completion information includes the control modules M (19), M (39), M (4
6) Returned to the control module M (110) via M (70) and M (109).

Similarly, control module M (12),
M (17), M (32), M (37), M (44), M
(100) and M (102) are the lower control modules M
(1) to M (3), M (13) to M (16), M (2
1), M (22), M (33) to M (36), M (4
3), M (78) to M (81), M (86) to M (8)
8) Issue an event code for transitioning to the start mode ST1. Control modules M (1) to M (3) and M (13) to M (1) that have received this event code
6), M (21), M (22), M (33) to M (3
6), M (43), M (78) to M (81), M (8
6) to M (88) make a transition to the start-up mode ST1, and change the transition completion information to the control modules M (12), M (88).
(17), M (32), M (37), M (44), M
(100), reply to M (102). Further, the transition completion information includes the control modules M (18), M (38), M
(45), M (104), M (106) and control modules M (19), M (39), M (46), M (10
9) is returned to the control module M (110).

Similarly, control modules M (13) to
M (16), M (33) to M (36), M (43)
Lower control modules M (3) to M (10), M (2
3) to M (30), M (41), and M (42) issue event codes for transitioning to the start mode ST1. Control module M that has received this event code
(3) to M (10), M (23) to M (30), M (4
1) and M (42) make a transition to the start mode ST1, and also make the transition completion information into the control modules M (13) to M (13).
(16) Reply to M (33) -M (36), M (43). Further, the transition completion information is stored in the control module M (1).
7), M (37), M (44) and control module M
(18), M (38), M (45) and control modules M (19), M (39), M (46) are returned to the control module M (110).

In this way, each control module M
(1) to M (109) transition to the start mode ST1.
Note that the cold start mode st10 and the hot start mode st11 included in the start mode ST1 are as described above. Subsequently, the control module M (110) issues an event code indicating a transition to the origin mode st12 of the normal operation mode ST2.
This event code is transferred from the higher order to the lower order to each of the control modules M (1) to M (109).

Here, as a condition for transition to the origin mode st12, it is required that the home position flag (CN flag) is ON. At this time, among the controlled elements, those that are required to be at fixed positions are related to the cylinder and the servomotor. Therefore, the control modules M (1) to M that control the cylinder and the servomotor
(11), M (21) to M (31), M (40) to M
(42), M (47) to M (64), M (72) to M
(84), M (86) to M (91), M (94), M
(96) to M (98) detect the current position of each cylinder and servo motor, correct the position if the position is not a fixed position, and write the position data to a predetermined area of the communication memory COM. . The basic configuration of the communication network memory COM is the same as that of FIG. 6 of the first embodiment of the present invention. In the second embodiment of the present invention, the communication lines C (1) to C (110) and the area m (1) to
m (110).

The control module M (110) monitors the communication memory COM, and when confirming that the positions of the cylinders and the servomotors as controlled elements are at the fixed positions, sets the fixed position flag (CN flag). It turns on and transits to the origin mode st12. At the same time, the other control modules M (1) to M (109) also transition to the origin mode st12 in response to the fact that the home position flag is ON. The transition completion information of each of the control modules M (1) to M (109) is returned to the control module M (110).

In this way, each control module M
(1) to M (109) transition to the origin mode st12. Subsequently, the control module M (8) issues an event code for transition to the preparation mode st14 of the normal operation mode ST2. This event code is transferred from the higher order to the lower order to each of the control modules M (1) to M (109).

Here, as a condition for transition to the preparation mode st14, it is required that the home position flag (CN flag), the origin flag (OR flag), and the restoration flag (RS flag) are ON. At this time, among the controlled elements, those which are required to be at the fixed position and the fixed position is the origin are related to the cylinder and the servomotor. The restoration flag (RS flag) is a flag for indicating whether or not the temporarily interrupted automatic operation sequence has been restored to the state immediately before the interruption, and is set to ON at the first startup.

Accordingly, the control modules M (1) to M- (1) to control the cylinders and the servomotors as the controlled elements.
M (11), M (21) to M (31), M (40) to M
(42), M (47) to M (64), M (72) to M
(84), M (86) to M (91), M (94), M
(96) to M (98) detect the current position of the cylinder and the servomotor, correct the position if the position is a fixed position and not the origin, and store the position data in a predetermined position in the communication memory COM. Write to the area.

The control module M (110) monitors the communication memory COM, and when confirming that the positions of the cylinder and the servomotor are the fixed position and the origin, the fixed position flag (CN flag), Origin flag (OR
Flag) and the restoration flag (RS flag) are both turned on,
Transition to the preparation mode st14. At the same time, the other control modules M (1) to M (109) also transition to the preparation mode st14 when the home position flag, the origin flag, and the preparation flag are ON. Each control module M (1) to M
The transition completion information of (109) is stored in the control module M (11).
0) is returned.

In this manner, each control module M
(1) to M (110) transition to the preparation mode st14. Subsequently, the control module M (110) issues an event code indicating a transition to the operation mode st15 of the normal operation mode ST2. This event code is transmitted from the upper module to the lower module in each of the control modules M (1) to M (109).
Is forwarded to

Here, the condition for transition to the operation mode st15 is that the home position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are ON. Is done. At this time, among the controlled elements, those which are at a fixed position and the fixed position is the origin, and which are required to be set in a preparation stage before operation are controlled elements related to the cylinder and the servomotor. . At this time, the home position flag, origin flag, and restoration flag are set in the preparation mode st14
It is already ON at the stage. Therefore, the setting of the positions of the cylinder and the servomotor in the preparation stage before the operation is completed. In addition, when there is a necessary measure as a preparatory stage before the operation, the measure is performed, and then the state data is written in a predetermined area of the communication memory COM.

The control module M (110) monitors the communication memory COM, and the position of the controlled element is the fixed position and the origin, and the setting of the preparation stage before the operation is completed. When it is confirmed that all of them are present, the home position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag) and the preparation flag (RD flag) are all turned ON, and the operation mode transits to the operation mode st15. At the same time, the other control modules M (1) to M (109) also turn on the home position flag, origin flag, restoration flag, and preparation flag.
, The operation mode transits to the operation mode st15. The transition completion information of each of the control modules M (1) to M (109) is returned to the control module M (110).
Thus, each of the control modules M (1) to M (11
0) transits to the operation mode st15. When each of the control modules M (1) to M (110) transitions to the operation mode st15, the semiconductor sorting device starts sorting semiconductors.

The process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 has been described in detail. The control module M (1) to M (110) shown in FIG.
T3, hold mode ST4, manual mode ST5, reverse mode ST6, alarm mode ST7, end mode ST8, and stop mode ST3 includes emergency stop mode s.
t16, a deceleration stop mode st17, and a step stop mode st18. The hold mode ST4 includes a CPU stop mode st19, a control release mode st20, a control recovery mode st21, and a diagnostic mode st22.
In T7, the abnormal stop mode st23 and the emergency stop mode s
There is t24. The contents of each mode are as described above. Further, the procedure for performing the transition to each mode can be described in the same manner as the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 described above.

The transition to each mode except the alarm mode ST7 is performed as shown in FIG. 8 of the first embodiment of the present invention.
This is performed by transferring the event code from the upper level to the lower level. Various flags are stored in the uppermost control module M
(110) is turned ON / OFF and the lower control module M
(1) to M (109) execute transition by referring to this flag. As for the abnormal stop mode st23 and the emergency stop mode st24 included in the alarm mode ST7, as shown in FIG. 9 of the first embodiment of the present invention, an alarm flag and an emergency stop (abnormal stop) flag are set in each control module M ( 1) to M (110) process autonomously and decentralized.

[0075]

As described above, according to the present invention,
Since the control module can be integrated and used based on the basic module, the important part of the program of the control module designed in the past can be used as it is. Therefore, the number of steps for creating a control program for a control system created by combining control modules can be significantly reduced. According to the present invention, the process of creating a control program can be streamlined. According to the present invention, even if the device to be controlled and the controlled element are different, the program of the control module designed in the past can be incorporated by a slight change, and the controlled element and the control condition can be changed or modified. Can be dealt with with a small number of work steps.

[Brief description of the drawings]

FIG. 1 is a diagram showing modes and mode transitions of a unified control module according to an embodiment of the present invention.

FIG. 2 is a system diagram for schematically explaining the configuration of one control system.

FIG. 3 is a diagram illustrating an example in which one of the controlled elements is replaced with a control system of a new hierarchy including a control module.

FIG. 4 is a configuration diagram of a main part of a lathe.

FIG. 5 is a control system diagram of a lathe.

FIG. 6 is a configuration diagram of a main part of a communication memory.

FIG. 7 is a conceptual diagram showing a connection relationship between control modules.

FIG. 8 is a conceptual diagram showing a transfer form of an event code and various flags.

FIG. 9 is a conceptual diagram showing a transfer form of an alarm flag and an emergency stop (abnormal stop) flag.

FIG. 10 is a configuration diagram of a main part of a semiconductor sorting device.

FIG. 11 is a control system diagram of the semiconductor sorting device.

FIG. 12 is a control system diagram of the semiconductor sorting device.

FIG. 13 is a control system diagram of the semiconductor sorting device.

FIG. 14 is a control system diagram of the semiconductor sorting device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Supply elevator 2 Tray 3 Mounting stage 4 Heating stage 5 Measurement stage 6 Cooling stage 7 Buffer stage 8 Sorting storage stage 9 Storage elevator E Controlled element M Control module C Communication line COM Communication memory

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[Procedure amendment]

[Submission date] June 30, 1999

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claim 2

[Correction method] Change

[Correction contents]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] Claim 9

[Correction method] Change

[Correction contents]

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] Claim 10

[Correction method] Change

[Correction contents]

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0029

[Correction method] Change

[Correction contents]

The feature of the present invention is that the control modules M (1) to M (k + 3 ) are such that their modes and mode transitions are unified and set as shown in FIG. is there. FIG. 1 is common to all control modules.

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0058

[Correction method] Change

[Correction contents]

(Second Embodiment) A second embodiment of the present invention is shown in FIG.
To be described with reference to FIG 4. FIG. 10 is a configuration diagram of a main part of the semiconductor sorting apparatus. 11 to FIG. 1 4 is a control system diagram of a semiconductor sorting device. The second embodiment of the present invention is an example in which the control module of the present invention is applied to the semiconductor sorting device shown in FIG. Briefly describing the semiconductor sorting apparatus shown in FIG. 10, a semiconductor wafer is transported from a supply elevator 1 to a mounting stage 3 by a tray 2. In the heating stage 4, the semiconductor wafer is heated. In the measurement stage 5, the quality of the heated semiconductor wafer is measured. The semiconductor wafer is transferred to the cooling stage 6 and cooled. The cooled semiconductor wafer is stored on the buffer stage 7. In the sorting accommodation stage 8, only the items determined to be non-defective by the measurement stage 5 are extracted and accommodated in the accommodation elevator 9 by the tray 2.

Claims (10)

[Claims] 1. A plurality of control modules for controlling a plurality of controlled elements, one or more control modules for controlling the plurality of control modules in a hierarchical manner, and communication means between the control modules. A control device for controlling one system, wherein a mode and a mode transition of the control module are unified. 2. The method according to claim 1, wherein the mode and the transition of the mode include: a start mode for controlling activation of a corresponding controlled element; a normal operation mode for directly shifting from the start mode and controlling a normal operation of the controlled element; A stop mode that can shift directly and directly to the normal operation mode and controls the stop of the controlled element; and a stop mode that can shift directly and directly to the stop mode and that can shift directly to the start mode and the controlled element. A holding mode for controlling to a holding state, a reversing mode for directly shifting from the holding mode and a mutual switching with the stop mode for controlling the controlled element to a reversing state, A method for manually controlling the controlled element, which can be shifted to a stop mode and can be shifted to the normal operation mode or the start mode. The control device according to claim 1, further comprising: a dynamic control mode; an alarm mode that can directly shift from the suspension mode to generate an alarm; and an end mode that can directly transition to the suspension mode and end control of the controlled element. . 3. The control device according to claim 2, wherein the start mode includes a cold start mode for creating a control file and a hot start mode for shifting from the cold start mode and writing file data to a RAM. 4. The normal operation mode includes an origin mode for confirming that the controlled element is at the origin, a restoration mode for returning a sequence of the controlled elements to be automatically operated to a state immediately before the interruption of the sequence, The control device according to claim 2, further comprising: a preparation mode for preparing for automatically driving the controlled element; and an operation mode for performing automatic driving of the controlled element. 5. The stop mode includes an emergency stop mode for urgently stopping the operation of the controlled element, a deceleration stop mode for gradually stopping the operation of the controlled element, and an operation of the controlled element. 3. The control device according to claim 2, further comprising: a step stop mode in which the operation is stopped at a break of the sequence. 6. The suspension mode includes a CPU halt mode capable of stopping a CPU, a control release mode for releasing the controlled element from control, and returning the controlled element released from control to control. The control device according to claim 2, further comprising: a control recovery mode; and a diagnostic mode capable of changing an operation state of the controlled element into information and changing a control specification. 7. The alarm mode includes an abnormal stop mode in which the operation is stopped when an abnormality is detected in the operation of the controlled element, and an emergency stop mode in which an emergency stop is performed according to an external instruction irrespective of an operation state. The control device according to claim 2, comprising: 8. A step of duplicating a plurality of basic modules in which modes and mode transitions are set, and processing each of the basic modules while fixing the mode and mode transition modes of the duplicated basic modules. Creation of a control program characterized by including a step of creating a plurality of control modules corresponding to each specification and a step of creating a control program of one system by hierarchically combining the plurality of control modules. Method. 9. The mode and the mode transition include: a start mode for controlling activation of a corresponding controlled element; a normal operation mode for directly shifting from the start mode and controlling a normal operation of the controlled element; A stop mode that can shift directly and directly to the normal operation mode and controls the stop of the controlled element; and a stop mode that can shift directly and directly to the stop mode and that can shift directly to the start mode and the controlled element. A holding mode for controlling to a holding state, a reversing mode for directly shifting from the holding mode and a mutual switching with the stop mode for controlling the controlled element to a reversing state, A method for manually controlling the controlled element, which can be shifted to a stop mode and can be shifted to the normal operation mode or the start mode. 9. The control program according to claim 8, further comprising: a dynamic control mode; an alarm mode that can directly shift from the hold mode and generates an alarm; and an end mode that can shift directly from the hold mode and end control of the controlled element. How to create 10. A machine-readable storage medium on which a basic module for creating a control program is recorded, wherein the basic module controls activation of a corresponding controlled element as a mode and a transition of the mode. A start mode, a normal operation mode that can directly transition from this start mode and controls the normal operation of the controlled element, and a stop mode that can directly and directly transition to the normal operation mode and control the stop of the controlled element. A suspend mode in which the stop mode can be shifted to each other directly and directly to the start mode, and the controlled element is controlled to be in a suspended state;
The reverse mode, which can directly shift from the hold mode and can also shift to the stop mode and control the controlled element to the reverse state, and can shift directly from the hold mode and can shift to the stop mode mutually, A manual control mode capable of shifting to the operation mode or the start-up mode and manually controlling the controlled element; an alarm mode capable of shifting directly from the hold mode to generate an alarm; and an alarm mode capable of shifting directly from the hold mode to the control mode. And a termination mode for terminating control of the control element.