JP3389498B2 - Control device and program creation method thereof - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for standardizing a control computer program. The present invention relates to a technique for standardizing and simply executing design, modification, modification, etc. of a control computer program. The present invention relates to a plurality of n included in one controlled system.
The present invention relates to a control program for a control device, which is made by combining n control modules for individually controlling the controlled elements and a control module for hierarchically controlling the control modules.

[0002]

2. Description of the Related Art n controlled elements are provided in one "system", and n control modules are provided to individually control the n controlled elements. There is widely used a technique of providing a control module for hierarchically controlling the above control module and controlling the "system" as a whole.

FIG. 2 is a control system diagram schematically showing one system. This FIG. 2 is common to both the prior art and the embodiment of the present invention. In FIG. 2, this system includes a plurality of n controlled elements E (1) to E (n). The controlled elements E (1) to E (3) are combined into one control module M (1).
Controlled by. The control module M (2) controls the controlled elements E (4), E (5), .... Controlled element E (i) ~
The control module M (k) controls E (n). Then, one control module (k + 1) controls the control modules M (1) and M (2),
One control module M (k + 2) controls a plurality of control modules up to (k). Further, one control module M (k + 3) controls the two control modules M (k + 1) and M (k + 2), thereby forming a hierarchical structure.

One communication memory COM is provided so that each of the control modules M (1) to M (k) can access the communication memory COM via the communication lines C (1) to C (k + 3). Is configured. Each of the control modules M (1) to M (k) goes to read the communication addressed to its own module written in the allocated area of the communication memory COM at a predetermined cycle and is allocated to another module. It is configured to write the communication destined for that module to the area.

This will be described by way of example in order to make it easy to understand. If the system is a semiconductor manufacturing apparatus, the controlled element E (1) is the vacuum pump of the first vacuum chamber, and the controlled element E (2) is the internal elevator of the first vacuum chamber. The controlled element E (3) is the pressure valve of the first vacuum chamber. Controlled element E (4)
Is a vacuum pump for a communication chamber with the second vacuum chamber, and the controlled element E (5) is a conveyor belt for this communication chamber. The controlled element E (i) is a product outlet opening / closing door, the controlled element E (n-1) is a product outlet elevator, and the controlled element E (n) is a product outlet carrier.

These controlled elements E (i) to E (n)
Is supervised by the control of one control module M (k + 3), and is hierarchically controlled by each control module M (1) to M (k).
+2) to realize an example continuous semiconductor manufacturing process. That is, a silicon wafer as a material is loaded into the first vacuum chamber, set at a predetermined position, the vacuum degree is increased by the operation of the vacuum pump, the vapor deposition process is performed, and so on. The product (or the semi-finished product) that has undergone the process of is delivered to the product outlet.

Each controlled element has a sensor,
This sensor output information is sent to the control module that controls the controlled element. Each control module executes servo control according to the sensor output information. Then, the information related to the other control module is transmitted to the other control module via the communication memory COM and is transmitted from the other control module.

[0008]

The inventor of the present application has long been engaged in designing a control program for a control system in which a plurality of control modules as illustrated in FIG. 2 controls a plurality of controlled elements. Controlled elements E (1) to E (n)
Are, in some cases, valves, in some cases motor switches, and in other cases robot axes of rotation. Then, each control module has been used with different specifications so as to conform to it.

That is, when designing a control program for one such control system, each controlled element E is controlled.
For each of (1) to E (n), it was necessary to design the control module according to its characteristics and features. For this reason, designing the control program of the control system requires an extremely large number of man-hours, and when it is necessary to change or modify the specifications, a large man-hour such as changing the control program of the control module each time is required. It was supposed to take. In other words, if one of the control modules that is hierarchically combined requires a design change, it will affect the control module above it or the control module below it, and this will affect many control modules. It was supposed to be accompanied by a design change.

Further, even when the controlled element that is used in the past is included in the controlled elements that constitute the newly set controlled system, the designer newly operates the entire controlled system. It is necessary to understand the above and write a program in the light of a series of operations from the first step to the final step. Therefore, even if the past design is diverted, it is necessary to change the programs of the upper and lower control modules accordingly. As a result, in principle, even if the program of the partially controlled element used in the past can be transferred to the program of the new controlled system, it has been limited to only a part.

The present invention has been made in view of such a background, and provides a program control device and a method for creating a control program in which an important part of a program of a control module designed in the past can be used as it is. The purpose is to An object of the present invention is to provide a control device and a control program creating method capable of significantly reducing the number of steps for creating a control program of a control system created by combining control modules. An object of the present invention is to provide a control device and a control program creating method that can rationalize the process of creating a control program. The present invention provides a control device and a method for creating a control program that can incorporate a program of a control module designed in the past with a slight change even when the device to be controlled and the controlled element are different. With the goal. SUMMARY OF THE INVENTION It is an object of the present invention to provide a program control device and a control program creation method that can cope with a change or modification in a controlled element or control condition with a small number of work steps.

[0012]

The first feature of the present invention is to unify the modes of the control modules and the transitions of the modes among all the control modules in the control device for controlling one system. To do. Even if a control module has a mode that is not used among the basic modules, the mode is left provided according to the basic module. Also, the modes and mode transitions will not be extended beyond those provided in the basic module. When it is necessary to expand, another control module is applied to design. All modules of control modules and transitions of modules are unified in at least one closed system. By designing parameters for the mode and the transition of the mode according to the control condition and the condition given by the controlled element, it is possible to design for all control modes.

That is, the present invention comprises a plurality of control modules for respectively controlling a plurality of controlled elements, one or more control modules for hierarchically controlling the plurality of control modules, and a communication means between the control modules. In a control device for controlling one system as a whole, the modes and mode transitions of the control module are unified.

Modes and mode transitions of this control module include a start mode for controlling the start of the corresponding controlled element, and a normal operation mode for directly controlling the normal operation of the controlled element. A stop mode for controlling the stop of the controlled element that can be directly and mutually switched to the normal operation mode, and a mutual and direct transition to the stop mode and directly to the start mode and the controlled element And a reversing mode for controlling the controlled element in a reversing state and a direct transition from the holding mode. The controlled mode can be switched to the stop mode, the normal operation mode or the start mode, and the controlled element can be manually operated. Including a manual control mode for controlling a warning mode that generates the directly be migrated alarm from the hold mode, and a termination mode to end the control of directly to migrate the controlled element from the hold mode.

The start-up modes include a cold start mode for creating a control file and a hot start mode for shifting the cold start mode and writing file data in the RAM.

The normal operation mode includes an origin mode for confirming that the controlled element is at the origin, a restoration mode for returning the sequence of the automatically controlled elements to the state immediately before the interruption of the sequence, and the controlled area. It includes a preparation mode for preparing the element for automatic operation and an operation mode for performing the automatic operation of the controlled element.

The stop mode includes an emergency stop mode for urgently stopping the operation of the controlled element, a deceleration stop mode for gradually stopping the operation of the controlled element, and an operation of the controlled element in the sequence. And a step stop mode for stopping at breaks.

The hold mode includes a CPU stop mode capable of stopping the CPU, a control release mode for releasing the controlled element from control, and a control recovery for returning the controlled element released from control to the control state. Modes, and a diagnostic mode in which the operating conditions of the controlled elements can be computerized and the control specifications can be changed.

The alarm mode includes an abnormal stop mode in which the operation is stopped when an abnormality is detected in the operation of the controlled element, and an emergency stop mode in which an emergency stop is performed according to an external instruction regardless of the operating condition. Including.

The program creating method of the present invention includes a step of copying a plurality of basic modules in which modes and mode transitions are set, and a mode and a mode transition mode of the copied basic modules are fixed. Characterized by including a step of creating a plurality of control modules corresponding to each specification by processing each of the above, and a step of creating a control program of one system by hierarchically combining the plurality of control modules. And

With respect to the basic module, the mode and the mode transition control the activation mode of controlling the activation of the corresponding controlled element and the normal operation of the controlled element which can be directly shifted from the activation mode. A normal operation mode, a stop mode for controlling the stop of the controlled element that can be directly and mutually transferred to the normal operation mode, and a mutual and direct transfer to and from this stop mode, and a direct transfer to the startup mode, and A holding mode for controlling the controlled element to a holding state, a reverse mode for directly shifting from the holding mode and a mutual shift to the stop mode for controlling the controlled element in a reverse state, and a direct mode from the holding mode. It is possible to switch to the normal operation mode or the start mode, as well as to the stop mode A manual control mode for manually controlling the controlled element, an alarm mode for directly shifting from the hold mode to generate an alarm, and an end mode for directly controlling the controlled element and ending the control of the controlled element. Including.

A third aspect of the present invention is a machine-readable recording medium. The feature of the present invention resides in that the recording medium has a start-up mode for controlling the start-up of a corresponding controlled element. A normal operation mode that can directly shift from the startup mode to control the normal operation of the controlled element, a stop mode that can directly and mutually shift to the normal operation mode, and a stop mode that controls the stop of the controlled element, and this stop mode A hold mode in which the controlled element can be placed in a hold state and can be directly and mutually directly transferred to the start mode.
It is possible to make a direct transition from the hold mode and a mutual transition to the stop mode and a reverse mode for controlling the controlled element to a reverse state, and a direct transition from the hold mode and a mutual transition to the stop mode and the normal condition. Mode or the start mode, a manual control mode for manually controlling the controlled element, and an alarm mode for directly issuing an alarm from the hold mode,
A standardized program, which is a control program by setting a numerical value, is recorded, which includes a termination mode in which the control of the controlled element can be terminated by directly shifting from the suspension mode.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a unified mode of the embodiment of the present invention and transition of the mode. FIG. 2 is a control system diagram of one control system in which the present invention is implemented. Although this control system diagram can be configured in various ways,
FIG. 2 schematically shows one easy-to-understand model.

In FIG. 2, this system includes a plurality of n controlled elements E (1) to E (n). This controlled element E
One control module M (1) controls (1) to E (3). The control module M (2) controls the controlled elements E (4), E (5), .... Controlled elements E (i) to E
The control module M (k) controls (n). And
One control module M (k + 1) controls the control modules M (1) and M (2),
One control module M (k + 2) controls a plurality of control modules up to (k). Further, one control module M (k + 3) controls the two control modules M (k + 1) and M (k + 2), thereby forming a hierarchical structure.

One communication memory COM is provided so that each of the control modules M (1) to M (k) can access the communication memory COM via the communication lines C (1) to C (k + 3). Is configured. Each of the control modules M (1) to M (k) goes to read the communication addressed to its own module written in the allocated area of the communication memory COM at a predetermined cycle and is allocated to another module. It is configured to write the communication destined for that module to the area.

The plurality of n controlled elements E (1) to E (E)
How (n) corresponds to a practical device is the same as in the above description of the conventional technique. Although the description is repeated here, it will be described by way of example for clarity. If the system is a semiconductor manufacturing apparatus, the controlled element E (1) is the vacuum pump of the first vacuum chamber, and the controlled element E (2) is the internal elevator of the first vacuum chamber. The controlled element E (3) is the pressure valve of the first vacuum chamber. Controlled element E
(4) is a vacuum pump for a communication chamber with the second vacuum chamber, and the controlled element E (5) is a conveyor belt for this communication chamber. The controlled element E (i) is an opening / closing door at the product outlet, the controlled element E (n-1) is an elevator at the product outlet,
The controlled element E (n) is the product exit carrier.

These controlled elements E (i) to E (n)
Is supervised by the control of one control module M (k + 3), and is hierarchically controlled by each control module M (1) to M (k).
+2) to realize an example continuous semiconductor manufacturing process. That is, a silicon wafer as a material is loaded into the first vacuum chamber, set at a predetermined position, the vacuum degree is increased by the operation of the vacuum pump, the vapor deposition process is performed, and so on. The product (or the semi-finished product) that has undergone the process of is delivered to the product outlet.

Each controlled element has a sensor,
This sensor output information is sent to the control module that controls the controlled element. Each control module executes servo control according to the sensor output information. Then, the information related to the other control module is transmitted to the other control module via the communication memory COM and is transmitted from the other control module.

A feature of the present invention is that the control modules M (1) to M (k + 3 ) have their modes and mode transitions set in a unified manner as shown in FIG. is there. This FIG. 1 is common to all control modules.

This mode and mode transition will be explained. A start mode ST1 for controlling the start of the corresponding controlled element and a normal operation for directly controlling the start mode ST1 to control the normal operation of the controlled element. The mode ST2 and the normal operation mode ST2 can be mutually and directly transferred to the stop mode ST3 that controls the stop of the controlled element, and the stop mode ST3 can be directly and directly transferred to the start mode ST1. A hold mode ST4 capable of controlling the controlled element in a hold state, and a reverse mode ST6 capable of directly shifting from the hold mode ST4 and mutually transiting to a stop mode ST3 to control the controlled element in a reverse state. It is possible to make a direct transition from the hold mode ST4, and a mutual transition to the stop mode ST3. A manual control mode ST5 to manually control the a migratable the controlled element in de ST2 or start mode ST1, the alarm mode ST7 generating an alarm can migrate directly from hold mode ST4, hold mode ST
7 and a termination mode ST8 for terminating control of the controlled element.

More specifically, the start mode ST1 is
Cold start mode st1 for creating a control file
0 and a hot start mode st11 that is transferred from the cold start mode st10 and writes the file data in the RAM. The normal operation mode ST2 is the origin mode st1 for confirming that the controlled element is at the origin.
2, and a restoration mode st13 that returns the sequence of the controlled elements that are automatically operated to the state immediately before the sequence interruption,
It includes a preparation mode st14 for preparing for automatic operation of the controlled element and an operation mode st15 for performing automatic operation of the controlled element. The stop mode ST3 is
An emergency stop mode st16 for urgently stopping the operation of the controlled element, a deceleration stop mode st17 for gradually stopping the operation of the controlled element, and a step stop for stopping the operation of the controlled element at the break of the sequence. Mode st
18 and. The hold mode ST4 includes a CPU stop mode st19 that can stop the CPU, a control release mode st20 that releases the controlled element from control, and a control recovery mode that returns the controlled element released from control to the control state. It includes st21 and a diagnostic mode st22 that can change the control specification while computerizing the operating status of the controlled element. The alarm mode ST7 is an abnormal stop mode st23 that stops the operation when an abnormality is detected in the operation of the controlled element, and an emergency stop mode st that performs an emergency stop according to an external instruction regardless of the operating condition.
24 and 24.

In FIG. 1, for example, when the origin st12 is seen,
"When changing to this state, C in advance
The N flag is ON ”, but this is a condition when the mode transits to the“ origin ”. There are also two conditions when the mode transits to "restoration": "CN flag is ON, OR flag is ON". Similarly, when the mode changes to “preparation”, there are three conditions, “CN flag is ON, OR flag is ON, RS flag is ON”, and when the mode is changed to “Run”, “CN flag is ON”. There are four conditions such as "flag is ON, OR flag is ON, RS flag is ON, RD flag is ON", and when the mode shifts to "reverse", "CN flag is ON,
OR flag is ON, RS flag is ON, RD flag is O
There are four conditions, "N". Here, the CN flag is a fixed position flag, the OR flag is an origin flag,
The RS flag is a restoration flag, and the RD flag is a preparation flag.

In the example shown above, the controlled element E (2) is the elevator inside the chamber. If this elevator is a three-axis elevator, it is possible to replace the controlled element E (2) with a three-axis control system as shown in FIG. That is, the control module M of FIG.
A subordinate control module M ₁ (1) of (1) is newly provided,
This is a control module for three-axis control, and the three axes E ₂ (1), E ₂ (2), and E of the three-axis elevator are controlled under the control module.
₂ (3) can be arranged. Also in this case, the newly provided control module M ₁ (1) is a control mode in which its mode and mode transition are unified.

Although the semiconductor manufacturing apparatus is used in this example, this is an example, and the present invention can be widely applied to a system in which a plurality of controlled elements are hierarchically controlled.

In any of these cases, the control module can be designed by copying the basic module and setting individual parameters based on the specifications in the basic module.

This basic module can be recorded on a floppy disk, CD-ROM, or other storage medium for sale. Based on this basic module, the controller designer can design related control modules and combine them to design a controller for one system.

[0037]

(First Embodiment) A first embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a configuration diagram of a main part of the lathe. FIG. 5 is a control system diagram of the lathe. FIG. 6 is a configuration diagram of a main part of the communication memory. FIG. 7 is a conceptual diagram showing the connection relationship of the control modules. FIG. 8 is a conceptual diagram showing a transfer form of an event code and various flags. FIG. 9 is a conceptual diagram showing a transfer form of the alarm flag and the emergency stop (abnormal stop) flag. The lathe shown in FIG. 4 includes servo motors SM-1, SM-2, SM-3 and a hydraulic cylinder OS-.
1, OS-2, OS-3, and oil valve OV-1. The servo motor SM-1 is for rotating the main shaft and rotates the workpiece. This servo motor SM-1
Is only forward rotation, not reverse rotation. Further, since this servo motor SM-1 is for rotating the workpiece, it does not particularly require control. Servo motor SM
-2 is for X-axis feed of the tool post, and performs normal rotation and reverse rotation. Servo motor SM-3 is for Y-axis feed of the tool post,
Forward rotation and reverse rotation are performed. The hydraulic cylinder OS-1 is for a chuck and drives a chuck that holds a workpiece. The hydraulic cylinder OS-2 is for centering. Hydraulic cylinder O
S-3 is for a blade clamp and is used for gripping the blade. The oil valve OV-1 is used to supply cutting oil to the workpiece.

FIG. 5 is a control system diagram of the lathe shown in FIG. 4, in which the hydraulic cylinder OS- is used as the controlled element E (1).
1, the hydraulic cylinder OS-2 as the controlled element E (2),
Servo motor SM-2 as controlled element E (3), servo motor SM-3 as controlled element E (4), hydraulic cylinder OS-3 as controlled element E (5), controlled element E
The oil valve OV-1 is assigned as (6), and the control module M (1) controls the hydraulic cylinder OS-1.
The control module M (2) controls the hydraulic cylinder OS-2, the control module M (3) controls the servomotors SM-2 and SM-3, and the control module M (4) controls the hydraulic cylinder OS-3. Then, the control module M (5) controls the oil valve OV-1.

Further, the control module M (6) controls the control modules M (1) and M (2), and the control module M (7) controls the control modules M (3), M (4), M.
Control (5). Further, the control module M (8) controls the control modules M (6) and M (7). The control module M (1) to M (8) includes a communication memory COM that can be commonly accessed.

As shown in FIG. 6, the communication memory COM includes the control modules M (1) to M (8) and the communication line C.
Communication is performed via (1) to C (8). Although the communication lines C (1) to C (8) are not shown in FIG. 5, the communication lines C (1) to C (8) are not shown in the control modules M (1) to M (M) as shown in FIG. It is installed between (8) and the communication memory COM. The communication lines C (1) to C (8) are connected to the control modules M (1) to M (8) and the communication memory CO.
It may be a line physically installed between the control module M and the control module M (1) to M (8) or a logical line logically set using a line connecting the control modules M (1) to M (8). Sometimes there is.

In the communication memory COM shown in FIG. 6, each control module M (1) to M (8) has a predetermined cycle,
The allocated area m (1) of this communication memory COM
While going to read the communication addressed to the own module written in m (8), the area m allocated to another module
(I) (i is an integer from 1 to 8) is configured to write the communication addressed to the control module. In this way, each control module M (1) to M
(8) can exchange data with each other. Here, the data is, for example, the hydraulic cylinders OS-1 and OS.
-2, OS-3 or servo motors SM-2, SM-
If it is 3, these are numerical data indicating the position of the actuator to be driven, and are used to judge whether or not the actuator is at the origin or the fixed position.

As shown in FIG. 7, each control module M
(1) to M (8) and the communication memory COM are arranged. The information transmitted and received by each of the control modules M (1) to M (8) includes an event code and various flags in addition to the above-mentioned data. Here, the event code is a code for controlling the transition to each mode in the control modules M (1) to M (8) shown in FIG.
In FIG. 8, white circles (◯) indicate the issuance of event codes and various flags, and black circles (●) indicate the responses to event codes and various flags.

For example, in the case where the uppermost control module M (8) shown in FIGS. 6 and 7 causes the subsequent lower control modules M (1) to M (7) to transit to the respective start modes ST1, The event code indicating that is transferred to the control modules M (6) and M (7) immediately below. Receiving this, the control modules M (6) and M
(7) issues the same event code and outputs the control modules M (1), M (2) and M directly below them.
(3), M (4), and M (5). The response to this event code is the transition completion information, which is transferred from the lower order to the higher order. In this way, it is possible to control the transition from the higher order to the lower order in each mode. In addition, as for the various flags, information is transferred from the higher order to the lower order as in the event code. However, as shown by the broken line in FIG. 8, this does not apply to the event codes and flags exceptionally related to the emergency stop mode st23 and the abnormal stop mode st24. Further, as shown in FIG. 9, issuance of flags relating to the emergency stop mode st23 and the abnormal stop mode st24 (black squares ■ in FIG. 9) and monitoring (white squares □ in FIG. 9) are performed by each control module M.
(1) to M (8) are autonomously distributed.

The operation of the control module of the present invention corresponding to the actual operation of the lathe shown in FIG. 4 will be described. In the present invention, the control modules M (1) to M (8) all have the configuration shown in FIG. 1 in common. Control module M
(8) waits for a start signal in the start mode ST0. When the start signal arrives, the control module M
(8) transits to the start mode ST1. At this time, the control module M (8) has a lower control module M (6).
And issue an event code for transitioning M (7) to the start mode ST1. Upon receiving this event code, the control modules M (6) and M (7) make a transition to the start mode ST1 and send transition completion information to the control module M (8). Similarly, the control modules M (6) and M (7) issue an event code for shifting the lower control modules M (1) to M (5) to the start mode ST1. Upon receiving this event code, the control modules M (1) to M (5) transit to the start mode ST1 and return transition completion information to the control modules M (6) and M (7). further,
The transition completion information is the control modules M (6) and M (7).
To the control module M (8).

In this way, each control module M
(1) to M (8) transit to the start mode ST1. The cold start mode st10 and the hot start mode st11 included in the startup mode ST1 are as already described. Subsequently, the control module M (8) sets the origin mode st of the normal operation mode ST2.
An event code indicating the transition to 12 is issued. This event code is transferred to each control module M (1) to M (8) from the higher order to the lower order.

Here, as a condition for shifting to the origin mode st12, it is required that the fixed position flag (CN flag) is ON. At this time, the controlled elements E (1) -E
Among (6), those required to be in a fixed position are
Controlled element E relating to hydraulic cylinders OS-1, OS-2, OS-3 and servomotors SM-2, SM-3
(1), E (2), E (3), E (4), and E (5). Therefore, the controlled elements E (1), E (2), E
The control modules M (1), M (2), M (3), and M (4) for controlling (3), E (4), and E (5) have respective hydraulic cylinders OS-1, OS-2, OS-2, The current positions of the OS-3 and the servo motors SM-2, SM-3 are detected, the positions are corrected if they are not fixed positions, and the position data is stored in the areas m (1), m (of the communication memory COM. 2), m (3),
Write to m (4).

The control module M (8) monitors the communication memory COM and controls the controlled elements E (1), E (E).
When it is confirmed that the positions of (2), E (3), E (4), and E (5) are fixed positions, the fixed position flag (CN flag)
Is turned on, and the mode is changed to the origin mode st12. at the same time,
The other control modules M (1) to M (7) also transition to the origin mode st12 in response to the fixed position flag being ON. The transition completion information of each control module M (1) to M (7) is returned to the control module M (8).

In this way, each control module M
(1) to M (8) transit to the origin mode st12. Then, the control module M (8) sets the normal operation mode ST
An event code for transitioning to the preparation mode st14 of 2 is issued. This event code is transferred to each of the control modules M (1) to M (7) from the higher order to the lower order.

Here, as a condition for transitioning to the preparation mode st14, it is required that the fixed position flag (CN flag), the origin flag (OR flag), and the restoration flag (RS flag) be ON. At this time, the controlled elements E (1) to
Among E (6), the one that is required to be at the fixed position and the fixed position is the origin is the hydraulic cylinder OS-
1, OS-2, OS-3, servo motor SM-2, SM
-3 controlled elements E (1), E (2), E
(3), E (4), and E (5). Note that the restoration flag (RS flag) is a flag for displaying whether or not the sequence of the temporarily stopped automatic operation is restored to the state immediately before the interruption, and is set to ON at the time of initial activation.

Therefore, the controlled elements E (1), E
(2), E (3), E (4), E (5) control modules M (1), M (2), M (3), M (4)
Detects the current positions of the hydraulic cylinders OS-1, OS-2, OS-3, the servomotors SM-2, SM-3, and corrects the positions if the positions are fixed positions and is not the origin. The position data is stored in the area m of the communication memory COM.
Write to (1), m (2), m (3), m (4).

The control module M (8) monitors the communication memory COM and controls the controlled elements E (1), E (E).
When it is confirmed that the positions (2), E (3), E (4), and E (5) are the fixed positions and the origin, the fixed position flag (CN flag), the origin flag (OR flag), Both the restoration flag (RS flag) is turned ON, and the preparation mode st1
Transition to 4. At the same time, the other control modules M (1)-
M (7) also has the fixed position flag, origin flag, and preparation flag set to O.
When it is N, the state transits to the preparation mode st14.
The transition completion information of each of the control modules M (1) to M (7) is returned from the control modules M (1) to M (7) to the control module M (8).

In this way, each control module M
(1) to M (8) transit to the preparation mode st14. Then, the control module M (8) sets the normal operation mode ST
An event code indicating that the operation mode is changed to the operation mode st15 of 2 is issued. This event code is transferred to each of the control modules M (1) to M (7) from the higher order to the lower order.

Here, as a condition for shifting to the operation mode st15, it is required that the fixed position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are ON. To be done. At this time, among the controlled elements E (1) to E (6), those which are at a fixed position and whose fixed position is the origin and which require setting at the preparatory stage before operation are hydraulic cylinders. OS-1, OS-2, OS-3, servo motor SM-
2, controlled elements E (1), E (2) related to SM-3,
E (3), E (4) and E (5). At this time, the fixed position flag, the origin flag, and the restoration flag are already ON at the stage of the preparation mode st14. Therefore, the servo motors SM-2 and SM-3 have been set in the preparatory stage before the operation.

Further, as a preparatory step before the operation, the hydraulic cylinder OS-1 for driving the chuck is in a state in which the workpiece is chucked, and the hydraulic cylinder OS-2 for core pushing is the workpiece. Of the hydraulic cylinder OS-3 for clamping the tool, the predetermined tool is clamped, and the status data is stored in the areas m (1), m of the communication memory COM.
Write in (2) and m (4).

The control module M (8) monitors the communication memory COM and controls the controlled elements E (1), E (E).
When it is confirmed that the positions of (2), E (3), E (4), and E (5) are fixed positions and are origins, and the setting at the preparatory stage before the operation is completed, The fixed position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are all turned on, and the operation mode st15 is entered. At the same time, the other control modules M (1) to M (7) also transit to the operation mode st15 in response to the fixed position flag, the origin flag, the restoration flag, and the preparation flag being ON. The transition completion information of each of the control modules M (1) to M (7) is obtained from the control modules M (1) to M (7).
It will be replied to (8). In this way, each control module M (1) to M (8) transits to the operation mode st15. When each of the control modules M (1) to M (8) transits to the operation mode st15, the lathe starts cutting the workpiece.

Up to this point, the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 has been described in detail. The control modules M (1) to M (8) shown in FIG.
3, hold mode ST4, manual mode ST5, reverse rotation mode ST6, warning mode ST7, end mode ST8. Further, the stop mode ST3 includes an emergency stop mode s.
There are t16, a deceleration stop mode st17, and a step stop mode st18. The hold mode ST4 has a CPU stop mode st19, a control release mode st20, a control recovery mode st21, and a diagnostic mode st22.
In T7, abnormal stop mode st23, emergency stop mode s
There is t24. The contents of each mode are as described above. Further, the procedure for performing the transition to each mode can be described in the same manner as the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 described above.

As described above, the transition to each mode except the alarm mode ST7 is, as shown in FIG. 8, made from the uppermost control module M (8) to the lower control modules M (6), M.
(7), further lower control modules M (1) to M
This is done by transferring the event code to (5). Various flags are turned on / off by the uppermost control module M (8), and the lower control modules M (1) to M (M)
(7) refers to this flag and executes the transition. Also,
Regarding the abnormal stop mode st23 and the emergency stop mode st24 included in the warning mode ST7, as shown in FIG. 9, the control modules M (1) to M (8) autonomously set the alarm flag and the emergency stop (abnormal stop) flag. Process in a distributed manner.

[0058] will be described (second embodiment) of the present invention a second embodiment with reference to FIGS. 10 to 1 4. FIG. 10 is a configuration diagram of a main part of the semiconductor sorting apparatus. 11 to FIG. 1 4 is a control system diagram of a semiconductor sorting device. The second embodiment of the present invention is an example in which the control module of the present invention is applied to the semiconductor sorting apparatus shown in FIG. Figure 10
The semiconductor sorter shown in FIG. 1 will be briefly described. Semiconductor wafers are transported from the supply elevator 1 to the mounting stage 3 by the tray 2. On the heating stage 4, the semiconductor wafer is heated. At the measurement stage 5, the quality of the heated semiconductor wafer is measured. The semiconductor wafer is moved to the cooling stage 6 and cooled. The cooled semiconductor wafer is accumulated in the buffer stage 7. In the sorting / accommodating stage 8, only those judged to be non-defective by the measuring stage 5 are extracted and accommodated in the accommodating elevator 9 by the tray 2.

Now, the operation of the control module of the present invention corresponding to the actual operation of the semiconductor sorting apparatus shown in FIG. 10 will be described. In the present invention, each control module M (1) -M
All of (110) have the configuration shown in FIG. The control module M (110) waits for a start signal in the start mode ST0. When the start signal arrives, the control module M (110) starts the start mode ST1.
Transition to. At this time, the control module M (110)
Lower control modules M (19), M (39), M (4
6), M (70), M (109) issues an event code for transitioning to the start mode ST1. Control module M (19), M that received this event code
(39), M (46), M (70), M (109) are
While transitioning to the start mode ST1, the transition completion information is returned to the control module M (110). Similarly,
Control modules M (19), M (39), M (46),
M (70) and M (109) are lower control modules M
(18), M (38), M (45), M (65), M
(66), M (67), M (68), M (69), M
(103), M (104), M (105), M (10
6), M (107) and M (108) are in start mode ST1
Issue the event code to transition to. Control module M (18), M that received this event code
(38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7) and M (108) transit to the start mode ST1 and transfer the transition completion information to the control modules M (19) and M (M).
Reply to (39), M (46), M (70), M (109). Furthermore, the transition completion information is the control module M (1
9), M (39), M (46), M (70), M (10
It is returned to the control module M (110) via 9).

Similarly, the control module M (18),
M (38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7) and M (108) are lower control modules M (1
2), M (17), M (32), M (37), M (4
0), M (44), M (47) to M (64), M (7
1) to M (76), M (77), M (100), M (8
1) to M (84), M (101), M (85), M (1
02), M (89) to M (91), M (92) to M (9
An event code for transitioning 9) to the start mode ST1 is issued. The control module M (12), M (17), M (32), M (3
7), M (40), M (44), M (47) to M (6
4), M (71) to M (76), M (77), M (10
0), M (81) to M (84), M (101), M (8
5), M (102), M (89) to M (91), M (9
2) to M (99) make a transition to the start mode ST1 and send the transition completion information to the control modules M (18) and M (M).
(38), M (45), M (65), M (66), M
(67), M (68), M (69), M (103), M
(104), M (105), M (106), M (10
7), and reply to M (108). Furthermore, the transition completion information is the control modules M (19), M (39), M (4
6), M (70), and M (109) to be sent back to the control module M (110).

Similarly, the control module M (12),
M (17), M (32), M (37), M (44), M
(100) and M (102) are lower control modules M
(1) to M (3), M (13) to M (16), M (2
1), M (22), M (33) to M (36), M (4
3), M (78) to M (81), M (86) to M (8
An event code for transitioning 8) to the start mode ST1 is issued. The control modules M (1) to M (3) and M (13) to M (1 that received this event code
6), M (21), M (22), M (33) to M (3
6), M (43), M (78) to M (81), M (8
6) to M (88) make a transition to the start mode ST1 and send the transition completion information to the control modules M (12) and M (M).
(17), M (32), M (37), M (44), M
Reply to (100) and M (102). Further, the transition completion information is the control modules M (18), M (38), M
(45), M (104), M (106) and control modules M (19), M (39), M (46), M (10
It is returned to the control module M (110) via 9).

Similarly, the control modules M (13)-
M (16), M (33) to M (36), M (43) are
Lower control modules M (3) to M (10), M (2
3) Issue an event code for shifting M (30), M (41), and M (42) to the start mode ST1. Control module M that received this event code
(3) to M (10), M (23) to M (30), M (4
1) and M (42) transit to the start mode ST1 and transfer the transition completion information to the control modules M (13) to M (M).
(16), M (33) to M (36), and M (43) are returned. Furthermore, the transition completion information is the control module M (1
7), M (37), M (44) and control module M
(18), M (38), M (45) and control modules M (19), M (39), M (46) are sent back to the control module M (110).

In this way, each control module M
(1) to M (109) transit to the start mode ST1.
The cold start mode st10 and the hot start mode st11 included in the startup mode ST1 are as already described. Subsequently, the control module M (110) issues an event code indicating that the normal operation mode ST2 is changed to the origin mode st12.
This event code is transferred to each of the control modules M (1) to M (109) from the higher order to the lower order.

Here, as a condition for shifting to the origin mode st12, it is required that the fixed position flag (CN flag) is ON. At this time, among the controlled elements, the ones that are required to be in a fixed position relate to the cylinder and the servo motor. Therefore, control modules M (1) to M for controlling the cylinder and the servo motor
(11), M (21) to M (31), M (40) to M
(42), M (47) to M (64), M (72) to M
(84), M (86) to M (91), M (94), M
(96) to M (98) detect the current position of each cylinder and the servo motor, correct the position if it is not a fixed position, and write the position data to a predetermined area of the communication memory COM. . The basic configuration of the communication network memory COM is the same as that of FIG. 6 of the first embodiment of the present invention. In the second embodiment of the present invention, the communication lines C (1) to C (110) and the area m (1) to
m (110).

The control module M (110) monitors the communication memory COM, and when it confirms that the positions of the cylinder and the servomotor as the controlled elements are the fixed positions, the fixed position flag (CN flag) is set. It is turned on, and the origin mode st12 is entered. At the same time, the other control modules M (1) to M (109) also transition to the origin mode st12 in response to the fixed position flag being ON. The transition completion information of each control module M (1) to M (109) is returned to the control module M (110).

In this way, each control module M
(1) to M (109) transit to the origin mode st12. Then, the control module M (8) issues an event code to the effect that the preparation mode st14 of the normal operation mode ST2 is entered. This event code is transferred to each of the control modules M (1) to M (109) from the higher order to the lower order.

Here, as a condition for transiting to the preparation mode st14, it is required that the fixed position flag (CN flag), the origin flag (OR flag), and the restoration flag (RS flag) are ON. At this time, among the controlled elements, those which are required to be at a fixed position and whose fixed position is the origin is related to the cylinder and the servo motor. Note that the restoration flag (RS flag) is a flag for displaying whether or not the sequence of the temporarily stopped automatic operation is restored to the state immediately before the interruption, and is set to ON at the time of initial activation.

Therefore, the control modules M (1) to control the cylinders and servomotors that are the controlled elements.
M (11), M (21) to M (31), M (40) to M
(42), M (47) to M (64), M (72) to M
(84), M (86) to M (91), M (94), M
(96) to M (98) detect the current positions of the cylinder and the servomotor, correct the positions if they are fixed positions and are not the origin, and modify the position data to a predetermined value in the communication memory COM. Write in the area.

The control module M (110) monitors the communication memory COM, and if it confirms that the positions of the cylinder and the servomotor are the fixed position and the origin, the fixed position flag (CN flag), Origin flag (OR
Flag) and restore flag (RS flag) together,
Transition to the preparation mode st14. At the same time, the other control modules M (1) to M (109) also shift to the preparation mode st14 in response to the fixed position flag, the origin flag, and the preparation flag being ON. Each control module M (1) to M
The transition completion information of (109) is the control module M (11
Reply to 0).

In this way, each control module M
(1) to M (110) transit to the preparation mode st14. Then, the control module M (110) issues an event code indicating that the operation mode st15 of the normal operation mode ST2 is entered. This event code goes from the upper order to the lower order in the control modules M (1) to M (109).
Transferred to.

Here, as a condition for shifting to the operation mode st15, it is required that the fixed position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are ON. To be done. At this time, among the controlled elements, it is the controlled elements related to the cylinder and the servomotor that are in a fixed position, the fixed position is the origin, and the setting is required in the preparatory stage before the operation. . At this time, regarding the fixed position flag, the origin flag, and the restoration flag, the preparation mode st14
It has already been turned on at the stage. Therefore, the positions of the cylinder and the servo motor have been set in the preparatory stage before the operation. In addition to this, if there is a necessary measure as a preparatory step before the operation, the state data is written in a predetermined area of the communication memory COM after the necessary measure is taken.

The control module M (110) monitors the communication memory COM, the position of the controlled element is the fixed position and the origin, and the setting at the preparatory stage before the operation is completed. When it is confirmed that the fixed position flag (CN flag), the origin flag (OR flag), the restoration flag (RS flag), and the preparation flag (RD flag) are all turned on, the operation mode st15 is entered. At the same time, the other control modules M (1) to M (109) also turn on the fixed position flag, origin flag, restoration flag, and preparation flag.
In response to this, the operation mode st15 is entered. The transition completion information of each control module M (1) to M (109) is returned to the control module M (110).
In this way, the control modules M (1) to M (11
0) transits to the operation mode st15. When each of the control modules M (1) to M (110) transits to the operation mode st15, the semiconductor sorting apparatus starts sorting of semiconductors.

Up to this point, the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 has been described in detail. The control modules M (1) to M (110) shown in FIG.
There are T3, hold mode ST4, manual mode ST5, reverse rotation mode ST6, warning mode ST7, and end mode ST8. Further, the stop mode ST3 includes an emergency stop mode s.
There are t16, a deceleration stop mode st17, and a step stop mode st18. The hold mode ST4 has a CPU stop mode st19, a control release mode st20, a control recovery mode st21, and a diagnostic mode st22.
In T7, abnormal stop mode st23, emergency stop mode s
There is t24. The contents of each mode are as described above. Further, the procedure for performing the transition to each mode can be described in the same manner as the process from the start mode ST0 to the operation mode st15 of the normal operation mode ST2 described above.

As shown in FIG. 8 of the first embodiment of the present invention, the transition to each mode except the alarm mode ST7 is as follows.
This is done by transferring the event code from the higher order to the lower order. Various flags are the highest level control module M
(110) turns ON / OFF, and the lower control module M
(1) to M (109) execute transition by referring to this flag. Further, regarding the abnormal stop mode st23 and the emergency stop mode st24 included in the alarm mode ST7, as shown in FIG. 9 of the first embodiment of the present invention, an alarm flag and an emergency stop (abnormal stop) flag are set for each control module M ( 1) to M (110) perform processing in an autonomous distributed manner.

[0075]

As described above, according to the present invention,
Since the control module can be unified and used based on the basic module, the important part of the program of the control module designed in the past can be used as it is. Therefore, the number of steps for creating the control program of the control system, which is created by combining the control modules, can be significantly reduced. According to the present invention, the process of creating a control program can be rationalized. According to the present invention, even if the device to be controlled and the controlled element are different, the program of the control module designed in the past can be incorporated by a slight change, and the controlled element or the control condition can be changed or modified. Even if a problem occurs, it can be dealt with by a small work man-hour.

[Brief description of drawings]

FIG. 1 is a diagram showing modes and mode transitions of a unified control module according to an embodiment of the present invention.

FIG. 2 is a system diagram for schematically explaining the configuration of one control system.

FIG. 3 is a diagram illustrating an example in which one of the controlled elements is replaced with a control system of a new hierarchy including a control module.

FIG. 4 is a configuration diagram of main parts of a lathe.

FIG. 5 is a control system diagram of a lathe.

FIG. 6 is a configuration diagram of main parts of a communication memory.

FIG. 7 is a conceptual diagram showing a connection relationship of control modules.

FIG. 8 is a conceptual diagram showing a transfer form of an event code and various flags.

FIG. 9 is a conceptual diagram showing a transfer form of an alarm flag and an emergency stop (abnormal stop) flag.

FIG. 10 is a configuration diagram of a main part of a semiconductor sorting apparatus.

FIG. 11 is a control system diagram of the semiconductor sorting apparatus.

FIG. 12 is a control system diagram of the semiconductor sorting apparatus.

FIG. 13 is a control system diagram of the semiconductor sorting apparatus.

FIG. 14 is a control system diagram of the semiconductor sorting apparatus.

[Explanation of symbols]

1 supply elevator 2 trays 3 mounting stages 4 heating stage 5 measuring stages 6 Cooling stage 7 buffer stage 8 Sorting storage stage 9 Housing elevator E controlled element M control module C communication line COM communication memory

Continuation of front page (56) Reference JP-A-8-110805 (JP, A) JP-A-6-103051 (JP, A) JP-A-6-332686 (JP, A) JP-A-6-114680 (JP , A) JP 9-134341 (JP, A) JP 6-255744 (JP, A) JP 8-185239 (JP, A) JP 4-116006 (JP, A) JP 7-152416 (JP, A) JP 62-139677 (JP, A) JP 61-190607 (JP, A) JP 9-325808 (JP, A) JP 7-182195 (JP, A) JP-A-9-297601 (JP, A) JP-A-7-295614 (JP, A) JP-A-10-91425 (JP, A) Actual development Sho-62-134102 (JP, U) (58) Survey Areas (Int.Cl. ⁷ , DB name) G05B 19/04-19/05 G05B 15/00-15/02 G06F 9/06

Claims (10)

(57) [Claims] 1. A plurality of controlled elementsAnd each has multiple
Multiple control modules with modes and multiple mode transitions
Module and these multiple control modules.
Communication means for communication, The control modules are connected in a hierarchical structure, Each of the lowest level of the control modules is
Controls at least one of the controlled elements and
Bell-level control module is just above the level of control
Controlled by modules to control one system as a whole
A control device, The abovepluralControl moduleEach of the aboveMode and
AndThe aboveMode transitionEach otherUnifiedThe mode
And the configuration of the mode transition is the same as that of the control module.
Common to allA control device characterized by the above. 2. The mode and the mode transition include an activation mode that controls activation of a corresponding controlled element, and a normal operation mode that directly shifts from the activation mode and controls normal operation of the controlled element. A stop mode for controlling the stop of the controlled element that can be directly and mutually transferred to this normal operation mode, and a mutual and direct transition to this stop mode and a direct transfer to the start mode and the controlled element. A holding mode for controlling to a holding state, a reverse mode for directly shifting from the holding mode and a mutual shift to the stop mode for controlling the controlled element to a reverse state, and a direct shift from the holding mode and the aforesaid A hand for manually controlling the controlled element, which can be changed to a stop mode and can be changed to the normal operation mode or the start mode. And the dynamic control mode, the an alarm mode for generating an alarm can each mode to transition control device according to claim 1, further comprising a termination mode to end the control of directly to migrate the controlled element from the hold mode . 3. The control device according to claim 2, wherein the startup mode includes a cold start mode for creating a control file and a hot start mode for shifting the cold start mode and writing file data in a RAM. 4. The normal operation mode includes an origin mode for confirming that the controlled element is at the origin, a restoration mode for returning the sequence of the controlled element to be automatically operated to a state immediately before the sequence interruption, and The control device according to claim 2, comprising a preparation mode for preparing for automatically operating the controlled element and an operation mode for performing automatic operation of the controlled element. 5. The stop mode includes an emergency stop mode for urgently stopping the operation of the controlled element, a deceleration stop mode for gradually stopping the operation of the controlled element, and an operation of the controlled element. The control device according to claim 2, further comprising a step stop mode for stopping at a sequence break. 6. The hold mode is a CPU stop mode capable of stopping the CPU, a control release mode for releasing the controlled element from control, and returning the controlled element released from control to the control state. The control device according to claim 2, comprising a control recovery mode and a diagnostic mode in which the operating conditions of the controlled element are converted into information and the control specifications can be changed. 7. The alarm mode includes an abnormal stop mode in which the operation is stopped when an abnormality is detected in the operation of the controlled element, and an emergency stop mode in which an emergency stop is performed according to an external instruction regardless of the operating condition. The control device according to claim 2, comprising: 8. A plurality of basic modules in which modes and mode transitions are set are duplicated to make all basic modules.
Common modes and mode transitions for modules
Generating a plurality of basic modules having the configuration of
A process of creating a plurality of control modules corresponding to each specification by processing each of the basic modules while fixing the mode of the duplicated basic modules and the mode transition mode, and the plurality of control modules in a hierarchical manner. And a step of creating a control program for one system by combining them, a method for creating a control program. 9. The mode and the mode transition include an activation mode for controlling activation of a corresponding controlled element, and a normal operation mode for directly controlling from this activation mode and controlling normal operation of the controlled element. This normal operation mode can be directly and mutually transited to control the stop of the controlled element, and this stop mode can be mutually and directly transited to the start mode and directly to the controlled element. A holding mode for controlling to a holding state, a reverse mode for directly shifting from the holding mode and a mutual shift to the stop mode for controlling the controlled element to a reverse state, and a direct shift from the holding mode and the aforesaid A hand for manually controlling the controlled element, which can be changed to a stop mode and can be changed to the normal operation mode or the start mode. And the dynamic control mode, the an alarm mode for generating an alarm can each mode to migrate, claim 8, wherein the control program includes a termination mode to end the control of directly to migrate the controlled element from the hold mode How to create. 10.Controls one system as a wholeControl pro
A machine in which the basic modules for creating a gram have been recorded
A machine-readable storage medium, the basic module
Is the corresponding controlled
The activation mode that controls the activation of the element and whether this activation mode
Control the normal operation of the controlled element
Normal operation mode and this normal operation mode
The stop mode that can be set to
Mode and this stop mode can be directly and mutually transferred.
Can directly go to the start mode and hold the controlled element
Hold mode to control state and directly from this hold mode
It is possible to shift to
A reverse mode for controlling the controlled element to a reverse state,
It is possible to directly shift from the hold mode and
Mode and the normal operation mode or
The controllable element can be manually controlled
The manual control mode that
The alarm mode to be generated and the direct transfer from the hold mode.
And an end mode for ending the control of the controlled element
IncludingSee The configuration of these modes and mode transitions is the basic module.
Common to all Machine characterized by
A readable storage medium.