JPH08110805A - Control system for multiple process device - Google Patents

Abstract

PURPOSE: To greatly increase the degree of freedom of increase or decrease of the modules of multiple type process device by decentralizing the functions of a the control system hierarchically. CONSTITUTION: In the control system of multiple type process device constituted by successively providing the process modules unitized by the process functions and conveyance modules for conveyance between the process modules, unit controllers 24 which directly control the individual modules and local controllers 23 which control >=1 unit controller 24 on the basis of instructions from a main controller which totally controls the multiple type process device 12 are interposed between the main controller 12 and the respective modules S1, T1, L1, T2, H, T3, R1, T4, R2, T5, R3, T6, L2, T7, and S2, and those low-order controllers control the respective modules on the basis of the instructions from the main controller 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control system for a multi-process equipment in which modules each of which has a processing function are united.

[0002]

2. Description of the Related Art Conventionally, a multi-step process device has been known as a device for performing a process treatment on a substrate of a semiconductor device or a substrate of a thin film transistor type liquid crystal device. The multiple process equipment is configured by connecting process modules that are unitized according to processing functions such as heating, reaction, and cooling, and a transport module that transports between process modules in series. In addition, a series of processing steps for the substrate is automated.

FIG. 4 shows an example of a multiple process apparatus and a conventional configuration of its control system. The multi-process apparatus includes a cassette module S1 that supplies a substrate to be processed from a loading cassette stand, an atmospheric transfer module T1 that transfers a substrate in the atmosphere by a transfer stand, a substrate preliminary module L1 that performs a pretreatment on the substrate, and a transfer. A vacuum transfer module T2 that transfers the substrate in a vacuum by a robot, a substrate heating module H that heats the substrate, a vacuum transfer module T3 that transfers the substrate in a vacuum by a transfer robot, and a film is formed on the substrate by a CVD method or the like. A reaction module R1 for performing a process, a vacuum transfer module T4 for transferring a substrate in a vacuum by a transfer robot or the like, and a reaction module R for performing a film forming process on the substrate by a CVD method or the like.
2. Vacuum transfer module T5 for transferring a substrate in vacuum by a transfer robot, a reaction module R3 for performing a film forming process on the substrate by a CVD method, etc., vacuum transfer module T6 for transferring a substrate in a vacuum by a transfer robot, etc. Substrate cooling module L2 for cooling the substrate, and atmospheric transfer module T for transferring the substrate in the atmosphere by the transfer stand.
7. A cassette module S2 for loading a substrate on an unloading cassette stand is sequentially connected.

A control system for controlling a series of processing steps by a multi-process apparatus is based on an operation unit 1 which can be operated by a higher-level control system or directly by an operator, and an instruction from the operation unit 1. The respective modules S1, T1, L1, T2, H, T3, R1, T4, R2,
The controller 2 that directly controls the processing operations of T5, R3, T6, L2, T7, and S2, the communication line 3 that connects the operation unit 1 and the controller 2, the controller 2 and each module S1, T1, L1, T2, H, T3, R1, T4, R2, T
5, R3, T6, L2, T7, and S2, respectively, and a control cable 4 for connection.

Therefore, under the control of the controller 2 based on a command from the operation unit 1, the substrate to be processed is transported between the modules from the loading cassette module S1 to the unloading cassette module S2, and a series of processes are performed. Processing is performed.

[0006]

Here, the number of modules of the multiple process apparatus for executing each step is changed in accordance with the number of thin film layers formed on the substrate and the structure of the thin film transistor being changed. . However, the conventional control system as described above has a problem that the degree of freedom for increasing or decreasing the number of modules is small due to the following circumstances.

That is, since the direct control of all modules is collectively performed by one controller 2,
When changing the number of modules, the control program installed in the controller 2 must be changed. Since this control program is complicated and large for controlling all modules, it takes a lot of labor and time to change the program.

Further, since the control cables 4 from each module are all connected to one controller 2, the cable connecting portion provided in the controller 2 is in a complicated state because many control cables 4 are connected. Has become.
Therefore, as the number of modules is changed, the work of connecting a new control cable or removing an unnecessary control cable has become extremely complicated. Further, since the cable connection portion provided in the controller 2 is in a complicated state, daily maintenance work is also difficult.

Further, since one controller 2 is in charge of controlling a large number of modules, each module is not always arranged at a position relatively close to the controller 2. Therefore, the control cable 4 for connecting the added module to the controller 2 may require an extremely long cable, which increases the cost and requires a complicated wiring work.

The present invention has been made in view of the above-mentioned conventional circumstances, and provides a control system in which the degree of freedom for increasing or decreasing the number of modules of a multi-process device is greatly improved by distributing the functions of the control system in layers. The purpose is to provide. Particularly, in the invention described in claim 1, it is an object of the present invention to significantly improve the degree of freedom for increasing and decreasing the number of modules in a multiple-type process device by hierarchizing a control system for controlling a series of modules with a lower controller. To do.

Further, in the invention described in claim 2, in the invention described in claim 1, the control system for controlling the series of modules is hierarchized in three or more stages by the local controller and the unit controller, so The object is to greatly improve the degree of freedom with respect to the increase or decrease of the modules of the continuous process equipment.

According to the invention described in claim 3, in the invention described in claim 2, the local controller is made to take charge of a module of a range related to a predetermined process in a series of processes and is hierarchized. The object is to greatly improve the degree of freedom with respect to the increase or decrease of the modules of the continuous process equipment.

Further, in the invention described in claim 4, in the invention described in claims 1 to 3, a simple structure for exchanging information between the controllers is realized, and the freedom to increase or decrease the number of modules of the multiple process apparatus is realized. The purpose is to significantly improve the degree.

[0014]

In order to achieve the above object, a control system for a multiple process apparatus according to claim 1 of the present invention is a process module unitized for each processing function and a transfer between the process modules. In a control system of a multi-process device which is provided by connecting a transfer module for performing the above, a lower controller is provided between the main controller and the respective modules that collectively control the multi-process device, The lower controller controls each module based on an instruction from the main controller.

According to a second aspect of the present invention, there is provided a control system for a multiple process apparatus according to the first aspect of the present invention, wherein the lower controller directly controls the individual modules. And a local controller that controls one or more unit controllers based on a command from the main controller.

According to a third aspect of the present invention, there is provided a control system for a multiple process apparatus according to the second aspect, wherein the local controller is within a range related to predetermined processing. Is responsible for control of a plurality of modules.

Further, a control system for a multi-process equipment according to a fourth aspect of the present invention is the control system according to the first to third aspects.
In the control system for a multiple process apparatus according to any one of the above items, the information transfer between the controllers is performed by the counterpart controller writing the information in the storage means provided in each controller.

[0018]

According to the control system of the first aspect, each module of the multiple process apparatus is controlled by a hierarchical control system including a main controller and a subordinate controller, and a series of process processes are performed on the substrate to be processed. Give.
According to the control system of the second aspect, each module of the multiple process apparatus is a main controller,
Controlled by a hierarchical control system including a local controller and a unit controller, a series of process processes are performed on a substrate to be processed.

Since the main controller and the local controller and the unit controller, which are subordinate controllers, share the control of the modules, the control program installed in each controller is simple and easy to change. It will be small. In addition, since the control cables from each module are grouped into several and connected to the controller in charge of each, the number of cables connected to each controller is reduced compared to the past, and the cable connection part Is simplified. Further, since the local controller can be arranged relatively freely with respect to each module, a new module can be added without using a long control cable.

According to the control system of the third aspect, in particular, the unit controller is in charge of controlling individual modules, and the local controller is one of the unit controllers in a range related to a predetermined process such as transfer, heating, reaction, cooling and the like. Since it is in charge of control, the control program installed in the unit controller or the local controller is specialized, and design and change, and further maintenance management can be performed easily. According to the control system described in claim 4, since the controller writes information in the storage means of the controller of the other party to exchange information between the controllers, complicated timing control for information transmission is not required. In addition, information transfer between controllers is realized, and smooth process control is realized.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A control system for a multiple process apparatus according to an embodiment of the present invention will be described with reference to the drawings. Since the multiple process apparatus to which the present invention is applied is the same as the above-described conventional example, the same reference numerals are given to the same portions in the following description, and the duplicated description will be omitted. As shown in FIG. 1, the control system according to the present embodiment includes modules S1, T1, L1, T2, H, T3, and
R1, T4, R2, T5, R3, T6, L2, T7, S2 are one main controller 12 and three subordinate controllers 1
It is controlled by a hierarchical control system composed of 3 and 3.

The main controller 12 controls each lower controller 13 in order to control each module based on an instruction from the operation unit 11 which is operated by the upper control system or directly operated by the operator. Therefore, the main controller 12 is operated by the operation unit 11
Is connected to the lower controller 1 via a communication line 14.
3 are connected to the main controller 12 via control cables 15 respectively.

Each subordinate controller 13 is in charge of controlling several modules at once, and directly controls the operation of these modules based on an instruction from the main controller 12. In this embodiment, groups T1, T2, T3, T4, which carry a series of modules as the main processing,
Divided into three groups, T5, T6, T7, groups H, R1, R2, R3 that perform reaction as main processing, and groups L2, S1, L1, S2 that perform substrate preparation processing as main processing. , Each subordinate controller 13 is in charge of these groups one by one. Therefore, the modules belonging to each group are connected to the lower controller 13 in charge of control via the control cable 16.

A memory 17 is provided in the main controller 12 and each subordinate controller 13, and as shown in FIG. 2, the memory 17 stores an area in which a resident program is stored and exchanges information with other controllers. The allocated area is provided. The resident program stored in the memory 17 is for realizing the functions assigned to the controllers 12 and 13, and the main controller 12 and the subordinate controller 13 control each module based on the instruction from the operation unit 11. Since the programs are shared, the resident programs stored in the controllers 12 and 13 are much simpler and smaller than the conventional ones.

Further, since a plurality of lower controllers 13 share and control a series of modules, from this point as well,
The resident program of the lower controller 13 is simplified and downsized. Further, in this embodiment, since the lower-level controller 13 is in charge of controlling a plurality of modules in a predetermined processing range that are grouped, the resident program of the lower-level controller 13 is specialized according to the processing. From this point as well, it is simplified and downsized.

Information is written into the area for exchanging information between the controllers provided in the memory 17 from other controllers via the control cable 15 at any time, so that smooth process processing can be performed as a whole. Information is exchanged between the controllers 12 and 13. In addition,
A dedicated area may be uniquely assigned to each controller as an area for exchanging information, or an area shared by each controller may be provided if an identifier regarding the sender controller is attached to the information. .

In the control system having the above structure, the command from the operation unit 11 is transmitted through the communication line 14 to the main controller 1.
2 is input, the main controller 12 transmits the information necessary for the module control requested by the resident program to the corresponding lower controller 13 via the control cable 15 based on this command. The lower-level controller 13 controls the operation of the actuator of the module in charge by the resident program based on the received information, and controls the information obtained from the sensor of the module in charge so as to perform accurate control. It is transmitted to the main controller 12 via the cable 15. That is, each subordinate controller 13 controls the operation of each module based on an instruction from the main controller 12, causes the processing in each module to cooperate with each other, and loads the cassette to be processed from the loading cassette module S1 to the unloading cassette. A series of process processes up to the module S2 are smoothly performed.

Further, in the above control system, when the number of modules is increased due to a change in processing or the like, a lower controller 13 in charge of the increased modules is added, and this lower controller is used as the main controller 1.
2 and the module may be connected via a control cable. Therefore, it is possible to easily perform the laying work and the connecting work of the control cables at a low cost by using the relatively short cables, and the maintenance of these cables can be easily performed.

Since the control resident program is functionally distributed and specialized, there is almost no need to change the resident program stored in the existing other lower controller 13, and the main controller 1
The resident program stored in 2 need only change the interface portion for the added lower controller. Furthermore, information exchange between controllers is also possible in the memory 17
Since the data is written in, it is not necessary to make a special change in information transfer even if the lower controller 13 is added. In addition, the work of laying such control cables and the work of changing resident programs can be performed easily.
The effect that the control of information exchange is not affected is the same even when the number of modules and lower-level controllers 13 is reduced.

FIG. 3 shows another embodiment of the control system according to the present invention. The control system of the present embodiment includes modules S1, T1, L1, T2,
H, T3, R1, T4, R2, T5, R3, T6, L2, T7,
S2 is controlled by a three-tiered control system including one main controller 12, three local controllers 23, and 15 unit controllers 24 for each module. Therefore, both the local controller 23 and the unit controller 24 are subordinate controllers to the main controller 12.

Each local controller 23 is connected to the main controller 12 via a control cable 25, and each unit controller 24 is connected to each local controller 23 in charge of control via a control cable 26. There is. In addition, each module S
1, T1, L1, T2, H, T3, R1, T4, R2, T5, R
3, T6, L2, T7 and S2 are connected to respective unit controllers 24 in charge of control via a control cable 27.

Each local controller 23 collectively controls several unit controllers 24 (that is, modules) based on an instruction from the main controller 12, and each unit controller 24 directly controls one module in charge. Control. In this embodiment, a series of modules are grouped into groups S1 and T in the order of processing.
1, L1, T2, H and groups T3, R1, T4, R2,
The groups are divided into three groups T5, R3, T6, L2, T7, and S2, and each local controller 23 is in charge of controlling each of these groups.

Also in this embodiment, the main controller 12, each local controller 23, and each unit controller 24 are provided with the memory 17, and as shown in FIG. 2, the memory 17 has an area in which a resident program is stored. And an area allocated for exchanging information with other controllers. The resident programs stored in the memory 17 are the controllers 12, 23, 24 thereof.
In the present embodiment, the main controller 12, the local controller 13, and the unit controller 24 share the control of each module based on the command from the operation unit 11 in order to realize the function imposed on the. However, the resident program stored in each controller 12, 23, 24 is functionally distributed and specialized, and is greatly simplified and miniaturized as compared with the conventional one.

In the control system of this embodiment, the operation unit 11
When a command from the controller is input to the main controller 12 via the communication line 14, the main controller 12 controls the local controller 23 with the information necessary for the module control requested by the resident program based on this command. Transmit via cable 25. Based on the received information, the local controller 13 transmits necessary information via the control cable 26 to the unit controller 24 that controls the operation of the actuator of the corresponding module by the resident program. The operation of the module in charge is directly controlled via 27.

In this embodiment, the control cable 25
Are connected in series to the three local controllers 23, and the control cable 26 is connected in series to the unit controllers 24 belonging to the same group.
The information transmitted from the main controller 12 is selected and received by each local controller 23, and the information transmitted from the local controller 23 is selected and received by each unit controller 24. Therefore, in this embodiment, in addition to the same effects as the above-described embodiment, the number of control cables connecting between the controllers is reduced as compared with the above-mentioned embodiment,
The cost for wiring the control cable is reduced, the laying work is facilitated, and the daily maintenance work is facilitated.

In the present invention, the lower-level controller 13 (the local controller 23, the unit controller 24) can be hierarchized in any number of stages, and is arbitrarily set according to the design need. Also,
If information is exchanged between controllers by a method of writing data to the memory as in the above embodiment, control of information transfer can be facilitated. However, in the present invention, for example, information is transferred to a predetermined destination controller at a timed timing. Transfer, etc.
Various known methods can be adopted. Further, in each of the above embodiments, the modules are shown in a linear arrangement for simplicity, but each module is arranged in various forms according to the layout space and the flow between steps, In response to this, the lower-level controller 13 (local controller 23, unit controller 24) is also arranged in an appropriate positional relationship.

[0037]

As described above, in the invention described in claim 1, since the control system for controlling a series of modules is hierarchized by the lower controller, the control program stored in each controller is simple. The size and size of the control program can be reduced, and the control program can be easily changed in a short time according to the change in the number of modules. In addition, because the lower-level controllers are installed in a hierarchical structure, the control cables from the main controller to the modules are arranged in an organized state, and the cable connections in each controller are also arranged in an organized state. You can easily perform cable laying work and daily maintenance work. Further, in the invention described in claim 2, in addition to the above effect, the local controller can be arranged at a position relatively close to some modules grouped,
The added module can be connected to the controller using a relatively short control cable, which reduces costs and facilitates wiring work. In addition to the above effects, in the invention described in claim 3, the control program stored in the local controller can be specialized to further simplify and downsize, and the control program can be changed according to the change in the number of modules. Further, it can be easily changed within a short time. In addition to the above effects, in the invention described in claim 4, since information is exchanged between the controllers by writing information in the storage means of the controller of the other party, information transfer between the controllers is complicated. Information transfer between controllers can be realized without the need for timing control. Therefore, according to the control system of the multiple process apparatus according to the present invention, the degree of freedom for increasing or decreasing the number of modules of the multiple process apparatus can be significantly improved.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a control system according to an embodiment of the present invention.

FIG. 2 is a conceptual diagram showing a memory content of a controller.

FIG. 3 is a configuration diagram of a control system according to another embodiment of the present invention.

FIG. 4 is a configuration diagram of a conventional control system.

[Explanation of symbols]

 S1 to S2 modules 12 Main controller 13 Lower controller 17 Memory 23 Local controller 24 Unit controller

Claims (4)

[Claims] 1. A control system for a multiple process apparatus comprising a series of process modules unitized by processing function and a transport module for transporting between process modules. A lower-level controller is interposed between a main controller to be controlled by the main controller and each of the modules, and each module is controlled by the lower-level controller based on a command from the main controller. . 2. The subordinate controller comprises a unit controller that directly controls individual modules, and a local controller that controls one or more unit controllers based on an instruction from the main controller. The control system for a multiple process apparatus according to claim 1. 3. The control system for a multiple process apparatus according to claim 2, wherein the local controller is in charge of controlling a plurality of modules in a range related to a predetermined process. 4. The exchange of information between controllers is performed by a counterpart controller writing information in a storage means provided in each controller.
A control system for a multiple process apparatus according to any one of claims 1 to 3.