JPH11298185A - Transparent electromagnetic wave shielding material and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve shielding property and transparency by laminating a black layer composed of metal oxide or metal sulfide and a metal thin film layer in order, into an electromagnetic wave shielding pattern shape, on a transparent substratum. SOLUTION: A resist layer having a reverse pattern of an electromagnetic wave shielding pattern shape is formed on a transparent substratum 1. For the transparent substratum 1, transparent material such as glass and acrylic resin is used. A metal thin film layer 3 is formed on the whole surface of a black layer 2 composed of metal oxide or metal sulfide. The resist layer is eliminated together with the black layer 2 and the metal thin film layer 3 which are laminated on the resist layer. Since electromagnetic wave is shielded by the metal thin film layer 3 having the electromagnetic wave shielding pattern shape excellent in conductivity, electromagnetic wave shielding property is improved. By laminating the black layer 2 below the metal thin film layer 3, a transparent board side of a conducting part shows black color, so that metal reflection is not generated and transparency is also excellent.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of arranging various measuring instruments, VDTs, CRTs, and PDPs (plasma display panels) on the front of a display to shield electromagnetic waves radiated from these instruments and to see through a display section. The present invention relates to an electromagnetic wave shielding material that can be used and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, there have been roughly divided into the following two types of electromagnetic wave shielding materials capable of shielding electromagnetic waves and allowing the rear to be seen through.

[0003] One is a fiber mesh method in which a conductive mesh is used as a conductive portion and is sandwiched between transparent glass or a transparent resin plate.

The other is a so-called thin film method in which a transparent conductive thin film such as an ITO film or an Ag film is formed on a transparent substrate such as glass by a vapor deposition method or a sputtering method.

[0005]

However, the fiber mesh method has a high electromagnetic wave shielding property due to the high conductivity of the conductive mesh, but has a problem that the conductive mesh is obstructive and has low transparency. .

On the other hand, the thin film method has a problem that although the transparency of the conductive thin film is high, the transparency is high, but the conductivity of the conductive thin film is inferior and the electromagnetic wave shielding property is low.

Accordingly, an object of the present invention is to solve the above-mentioned problems and to provide a transparent electromagnetic wave shielding material having both excellent electromagnetic wave shielding properties and excellent transparency, and a method of manufacturing the same.

[0008]

Means for Solving the Problems In order to achieve the above object, the transparent electromagnetic wave shielding material of the present invention is constituted as follows.

In other words, the transparent electromagnetic wave shielding material of the present invention is such that a black layer made of a metal oxide or a metal sulfide and a metal thin film layer are at least sequentially laminated in an electromagnetic wave shielding pattern on a transparent substrate. Configured.

[0010] In the above invention, a rust prevention layer may be formed on the metal thin film layer.

The method for producing a see-through electromagnetic wave shielding material according to the present invention comprises forming a resist layer having a pattern opposite to the electromagnetic wave shield pattern shape on a transparent substrate, and then forming a black layer made of a metal oxide or a metal sulfide. The entire surface was formed, then a metal thin film layer was entirely formed thereon, and then the resist layer was removed together with the black layer and the metal thin film layer laminated thereon.

In the above invention, a chromate treatment may be performed after removing the resist layer.

[0013]

Embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a cross-sectional view showing one embodiment of the electromagnetic wave shielding material of the present invention, and FIGS. 2 to 4 are cross-sectional views showing steps of manufacturing the electromagnetic wave shielding material of the present invention. In the figure, 1 is a transparent substrate, 2 is a black layer, 3 is a metal thin film layer, and 4 is a resist layer.

[0015] The transparent electromagnetic wave shielding material of the present invention comprises:
A black layer 2 made of a metal oxide or a metal sulfide and a metal thin film layer 3 are at least sequentially laminated on a transparent substrate 1 in an electromagnetic shield pattern shape (see FIG. 1).

In order to obtain a see-through electromagnetic wave shielding material having such a configuration, the following may be performed.

First, a resist layer 4 having a pattern opposite to that of the electromagnetic wave shield pattern is formed on the transparent substrate 1.

As the transparent substrate 1, a transparent material such as glass, acrylic resin, polycarbonate, polyethylene, AS resin, vinyl acetate resin, polystyrene, polypropylene, polyester, polysulfone, or polyvinyl chloride may be used.

The resist layer 4 can be obtained by applying a positive type or negative type resist solution on the transparent substrate 1, drying, pattern-exposing, and developing (see FIG. 2). The shape of the resist pattern is the reverse of the shape of the electromagnetic wave shield pattern to be obtained. That is, if the shape of the electromagnetic wave shield pattern to be obtained is positive, it is a negative corresponding to this positive. As the electromagnetic wave shield pattern shape, the line width of the conductive layer is 10 to 50 μm,
It is preferable to use a grid pattern having a line pitch of 50 to 500 μm. In order to determine the line width and the line pitch, the electromagnetic wave shielding level and the light transmission level of the electromagnetic wave shielding material may be considered. That is, in order to increase the electromagnetic wave shielding level and the light transmission level, it is preferable to reduce both the line width and the line pitch.

Next, a black layer 2 made of a metal oxide or a metal sulfide is entirely formed (see FIG. 3). The black layer 2 may be formed by an evaporation method, a sputtering method, an ion plating method, or the like. When the black layer 2 is formed by these vacuum film forming methods, the black layer 2 has excellent adhesion strength and durability. The black layer 2 is made of a metal oxide or a metal sulfide. Specifically, as the metal oxide, ITO, chromium oxide, tin oxide, silver oxide, cobalt oxide, mercury oxide, gold oxide, iridium oxide, or the like may be used. As the metal sulfide, chromium sulfide, palladium sulfide, nickel sulfide, copper sulfide, cobalt sulfide, iron sulfide, tantalum sulfide, titanium sulfide, or the like may be used.
The thickness of the black layer 2 is suitably 0.05 to 1.0 μm.

Next, a metal thin film layer 3 is formed entirely on the black layer 2 (see FIG. 4). The metal thin film layer 3 may be formed by an evaporation method, a sputtering method, an ion plating method, or the like. When the metal thin film layer 3 is formed by these vacuum film forming methods, it becomes excellent in adhesion strength and durability. Further, as the metal thin film layer 3, copper, silver, gold, nickel, or the like may be used. The type of metal used as the metal thin film layer 3 can be selected regardless of the type of metal oxide or metal sulfide used as the black layer 2. The appropriate thickness of the metal thin film layer 3 is 0.1 to 5.0 μm.

Next, the resist layer 4 is removed together with the black layer 2 and the metal thin film layer 3 laminated thereon.

Thereafter, the black layer 2 and the metal thin film layer 3 laminated thereon are removed together with the resist layer 4 (see FIG. 1). In order to remove the resist layer 4, a stripping solution such as an aqueous solution of sodium hydroxide may be used. The black layer 2 and the metal thin film layer 3 formed on the resist layer 4 are incompletely covered, and cracks are formed in the black layer 2 and the metal thin film layer 3 at the edges of the resist layer 4, and the stripping liquid enters. Then, the resist layer 4 is swollen and dissolved.

Thus, a transparent electromagnetic wave shielding material can be obtained.

The transparent electromagnetic wave shielding material may be a material in which a rust prevention layer is formed on the metal thin film layer 3.
When the metal thin film layer 3 is made of copper, for example, as the rust-preventive layer, a nickel plating layer having a thickness of 0.2 to 1.0 μm may be formed.

Further, in order to form a rust preventive layer, a chromate treatment may be performed after the resist layer 4 is peeled off. As the chromate treatment, for example, there is an acidic chromate treatment called a phosphoric acid / chromic acid treatment method. Immerse in an aqueous solution containing phosphoric acid and chromate as the main component,
The rust-proof layer can be formed by treating for minutes.

[0027]

EXAMPLES Example 1 A resist portion was formed on a glass plate having a thickness of 3 mm and a square of 300 mm in a pattern opposite to the electromagnetic wave shield pattern by a screen printing method, and dried at 80 ° C. for 30 minutes.

Next, copper oxide,
Copper was sequentially laminated over the entire surface with a thickness of 0.3 μm to form a black layer and a metal thin film layer.

Next, using a 5% aqueous sodium hydroxide solution as a stripping solution, the resist layer and the black layer and the metal thin film layer thereon were removed.

Next, the surface of the metal thin film layer is subjected to a rust-proofing process by chromate treatment, and the line width is 30 μm and the line pitch is 125 μm.
Thus, a see-through electromagnetic wave shielding material having a conductive portion having a lattice pattern of m was obtained.

The see-through electromagnetic wave shielding material thus obtained has high conductivity, and when viewed from the transparent substrate side, the pattern-like conductive portions appear black due to the black portions.
It was easy to see through without metal reflection.

Example 2 A resist layer was entirely formed on a polyester film having a thickness of 0.1 mm and a square of 100 mm by a screen printing method. The layers were patterned.

Next, a black layer and a metal thin film layer were formed to a thickness of 0.2 μm each in the order of silver oxide and silver by ion plating.

Next, using a 5% aqueous solution of sodium hydroxide as a stripping solution, the resist layer, the black layer and the metal thin film layer thereon were removed, and the line width was 20 μm and the line pitch was 100 μm.
The transparent electromagnetic wave shielding material on which the conductive portion of the lattice pattern was formed was obtained.

The transparent electromagnetic wave shielding material thus obtained has a high conductivity, and when viewed from the transparent substrate side, the conductive portion in a pattern looks black due to the black portion.
It was easy to see through without metal reflection.

[0036]

Since the present invention has the above-described structure, it has the following effects.

The electromagnetic wave shielding material of the present invention has a high electromagnetic wave shielding property because the electromagnetic wave is shielded by the metal thin film layer having the electromagnetic wave shielding pattern shape having excellent conductivity. In addition, since the black layer is laminated below the metal thin film layer, the transparent portion of the conductive portion on the transparent substrate side has a black color, and there is no metal reflection and excellent transparency.

Further, the method for manufacturing an electromagnetic wave shielding material of the present invention is capable of easily obtaining an electromagnetic wave shielding material having the above-mentioned structure, which has excellent electromagnetic wave shielding properties and good transparency. In particular, as compared with the photo etching process, the etching step can be omitted, and the process can be shortened. In addition, since it can be formed in an electromagnetic wave shield pattern shape regardless of the thickness of the black layer and the metal thin film layer, it can be easily manufactured even in a fine electromagnetic wave shield pattern shape.

[Brief description of the drawings]

FIG. 1 is a sectional view showing one embodiment of an electromagnetic wave shielding material of the present invention.

FIG. 2 is a cross-sectional view illustrating a manufacturing process of the electromagnetic wave shielding material of the present invention.

FIG. 3 is a cross-sectional view showing a manufacturing process of the electromagnetic wave shielding material of the present invention.

FIG. 4 is a cross-sectional view showing a manufacturing process of the electromagnetic wave shielding material of the present invention.

[Explanation of symbols]

 Reference Signs List 1 transparent substrate 2 black layer 3 metal thin film layer 4 resist layer

Claims (4)

[Claims] 1. A transparent electromagnetic wave shielding material comprising a transparent substrate and a black layer made of a metal oxide or metal sulfide and a metal thin film layer laminated at least sequentially in an electromagnetic wave shielding pattern shape. 2. The see-through electromagnetic wave shielding material according to claim 1, wherein a rust prevention layer is formed on the metal thin film layer. 3. A resist layer having a pattern opposite to that of an electromagnetic wave shield pattern is formed on a transparent substrate, a black layer made of a metal oxide or a metal sulfide is entirely formed, and a metal thin film layer is formed thereon. , And then removing the resist layer together with the black layer and the metal thin film layer laminated thereon. 4. The method for producing a see-through electromagnetic wave shielding material according to claim 3, wherein a chromate treatment is performed after removing the resist layer.