JPH11274891A - Piezoelectric vibrator, piezoelectric vibrator unit using the same and piezoelectric oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator capable of sufficiently improving the mechanical strength of a terminal connecting part, piezoelectric vibrator unit using the same and piezoelectric oscillator. SOLUTION: Concerning a piezoelectric vibrator 10 for piezoelectric vibrator and piezoelectric oscillator, a drawing electrode 22 is obliquely extended from a main electrode 21 to a side terminal part 14 of a piezoelectric vibrating element 11 and connected to a side face electrode 24 for front/rear side conduction formed on a side end face 1,5 communicated to the side end part 14 and an electrode 23 for terminal connection formed at a fixing part 12 with an internal terminal 7. Therefore, since the fixing part 12 secures a base area 110 of the piezoelectric vibrating element 11 inside rather than the electrode 23 for terminal connection, when the internal terminal 7 and the electrode 23 for terminal connection are electrically connected by a conductive adhesive, a top end part 70 of the internal terminal 7 can be directly fixed on the base area 110 by the conductive adhesive.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-shaped piezoelectric vibrator, a piezoelectric vibrator unit using the plate-shaped piezoelectric vibrator, and a piezoelectric oscillator. More specifically, the present invention relates to a pattern for forming an electrode formed on a piezoelectric vibrator.

[0002]

2. Description of the Related Art As shown in FIG. 1, a piezoelectric vibrator unit includes a piezoelectric vibrator 10 using a thin plate-shaped quartz crystal piece as a piezoelectric vibrating piece 11, and an end portion 13 of the piezoelectric vibrator 10.
A plug 50 to which two internal terminals 7 and 8 are connected, respectively, and a metal case 51 containing the piezoelectric vibrator 10.
The inside is kept airtight by the metal case 51 and the plug 50. In the piezoelectric vibrator unit 1, a pair of electrode patterns (a first electrode pattern and a second electrode pattern) are formed on the piezoelectric vibrator 10 on the front and back surfaces of the piezoelectric vibrating reed 11, as described later. When an AC voltage is applied from the external terminals 52 and 53 of the plug 50, the piezoelectric vibrating reed 1
1 vibrates at a predetermined frequency.

[0003] A piezoelectric vibrator 10 used in such a piezoelectric vibrator unit 1 has a structure as shown in Figs.
A main electrode 21 that excites the piezoelectric vibrating reed 11 on a flat surface of the piezoelectric vibrating reed 11, and extends from the main electrode 21 toward an end 13 that is a fixing portion 12 between the piezoelectric vibrating reed 11 and the internal terminal 7. Leader electrode 22 and terminal connection electrode 23 connected to leader electrode 22 by fixed part 12
Is formed. Also, the piezoelectric vibrator 10 has a second electrode pattern including a main electrode, a lead electrode, and a terminal connection electrode 23 which are respectively paired with the main electrode 21, the lead electrode 22, and the terminal connection electrode 23 of the first electrode pattern 20. 30 is formed symmetrically with the first electrode pattern 20. However, in FIGS. 7 and 8, the main electrode and the lead electrode of the second electrode pattern 30 are not shown because they are on the back side of the piezoelectric vibrating reed 11. Note that the connection of the internal terminals 8 to the second electrode pattern 30 is performed on the same side as the terminal connection to the first electrode pattern 20, so that the second electrode pattern 30 has a surface opposite to the main electrode. Is used as the terminal connection electrode 33.

In the piezoelectric vibrator 10 configured as described above, the extraction electrode 22 of the first electrode pattern 20 conventionally extends straight through the vicinity of the center in the width direction of the piezoelectric vibrating reed 11 to form a terminal connection electrode 23. And is not formed at the side end portion 14. Therefore, conventionally, only the terminal connection electrode 23 is connected to the front / back conduction side electrode 24 formed on the side end surface 15. Therefore, to reduce the electric resistance of this side electrode 24, Terminal connection electrode 2
3 need to be widened. For this reason, almost the entire surface of the fixed portion 12 with the internal terminal 7 is occupied by the electrode 23 for terminal connection, and the background portion of the piezoelectric vibrating reed 11 is hardly exposed. It is fixed with solder or conductive adhesive 9 only to the electrode 23 for use.

[0007] The piezoelectric vibrator 10 shown in FIGS. 7 and 8 has a terminal connection electrode 23 of the first electrode pattern 20.
Is a single support type in which the terminal connection electrode 33 of the second electrode pattern 30 is also formed on the end portion 13 where is located.
As shown in FIG. 9, the terminal portion 16 of the first electrode pattern 20 opposite to the terminal portion 13 where the terminal connection electrode 23 is located is located.
The basic structure of the double-support type piezoelectric vibrator 10 in which the terminal connection electrodes 33 of the second electrode pattern 30 are formed is the same. That is, the extraction electrode 22
Extends straight from the main electrode 21 through the vicinity of the center in the width direction of the piezoelectric vibrating reed 11 and is connected to the terminal connection electrode 23, and is not formed on the side end portion 14. Are connected to the side surface electrode 24 for front / back conduction of the side end surface 15. Accordingly, in order to reduce the electric resistance of the side electrode 24, it is necessary to increase the width of the terminal connection electrode 23. Therefore, the entire surface of the fixed portion 12 with the internal terminal 7 is occupied by the terminal connection electrode 23. The background portion of the piezoelectric vibrating reed 11 is not exposed.

In any of the piezoelectric vibrators 10 described with reference to FIGS. 7 to 9, since the piezoelectric vibrating reed 11 vibrates, the connecting portions of the internal terminals 7 and 8 are required to have high mechanical strength. . However, since the adhesion between the conductive film constituting the first and second electrode patterns 20 and 30 and the underlying quartz (piezoelectric vibrating reed 11) is poor, the internal terminals 7 have conventionally been subjected to impact. At times, the terminal connection electrode 23 may be peeled off from the piezoelectric vibrating reed 11.
Therefore, conventionally, the first and second electrode patterns 20,
When the conductive film constituting 30 is formed on the piezoelectric vibrating reed 11, the first film is formed by accelerating the metal particles at the time of vapor deposition by a method such as an ion bombardment method or an ion plating method. And the second electrode pattern 20,
The adhesion strength between the piezoelectric vibrating piece 11 and the piezoelectric vibrating piece 11 is increased.

The internal terminals 7 are connected to the piezoelectric vibrator 10.
Is connected with the conductive adhesive 9, the fixing strength of the internal terminal 7 to the terminal connection electrode 23 is low. Therefore, conventionally, the conductive adhesive 9 is applied to the terminal connection electrode 23 by applying a large amount. The terminal connection is reinforced. After the internal terminals 7 are connected to the terminal connection electrodes 23, the terminal connection portions may be reinforced by overcoating the terminal connection portions with a non-conductive adhesive.

[0008]

However, in the conventional method of overcoating with an adhesive to increase the strength of the terminal connection portion, the piezoelectric vibrator 10 is sealed in a metal case 51, and then the adhesive is applied. There is a problem that the gas generated from the above deteriorates the frequency characteristics and the CI value of the piezoelectric vibrator unit 1. Further, when the conductive adhesive 9 is applied to the terminal connection electrode 23 in a relatively large amount, the conductive adhesive 9 is applied even to a portion of the piezoelectric vibrator 10 where the piezoelectric vibrator 10 should vibrate. And the first
Also, there is a problem that a short circuit easily occurs between the second electrode patterns 20 and 30. Furthermore, even if the ion bombard method or the ion plating method is used to increase the adhesion strength between the first and second electrode patterns 20 and 30 and the piezoelectric vibrator 10, the setting of the film forming conditions is complicated. In addition, there is a problem that the effect of increasing the adhesion strength between the first and second electrode patterns 20 and 30 and the piezoelectric vibrator 10 is not sufficient.

[0009] Even if any of these measures is combined, the mechanical strength of the terminal connection portion cannot be increased to a sufficient level as long as the conventional piezoelectric vibrator 10 is used. That is, the stress applied to the terminal connection part tends to concentrate on the tip of the internal terminal 7, and unless the adhesion strength of this part is increased, the mechanical strength of the terminal connection part cannot be significantly increased.

Here, the inventor of the present application has proposed that the piezoelectric vibrating reed 11 is provided with a conductive adhesive 9 at the tip of the internal terminal 7.
A method for directly fixing the base portion 110 to the background portion 110 is proposed. If the bonding is performed by the conductive adhesive 9, the background portion 110 of the piezoelectric vibrating reed 11 and the tip of the internal terminal 7 can be directly fixed. This is because the adhesive strength is high if the value is between the two. However, in the conventional piezoelectric vibrator 10, even if the tip of the internal terminal 7 protrudes from the terminal connection electrode 23 toward the inner region, the extraction electrode 22 is formed there. However, since the tip of the internal terminal 7 is fixed to the extraction electrode 22, the problem cannot be solved. Further, even if the internal terminal 7 is shifted from the extraction electrode 22, the tip of the internal terminal 7 is fixed to the extraction electrode 22 due to a slight shift of the internal terminal 7.

In view of the above problems, an object of the present invention is to
For the tip of the terminal, by forming an electrode pattern so that it can be directly fixed to the background portion of the piezoelectric vibrating reed, after coating the adhesive after connecting the terminal, applying a conductive adhesive over a wide area, and An object of the present invention is to provide a piezoelectric vibrator capable of sufficiently increasing the mechanical strength of a terminal connection portion without using a special film forming method, and a piezoelectric vibrator unit and a piezoelectric oscillator using the same.

[0012]

According to the present invention, there is provided a piezoelectric vibrating reed having a main electrode for exciting the piezoelectric vibrating reed on a flat surface of the piezoelectric vibrating reed. A piezoelectric vibrator having a first electrode pattern including a lead electrode extending toward an end portion serving as a fixed portion with a terminal, and a terminal connection electrode connected to the lead electrode by the fixed portion, The connection electrode is formed along a terminal edge at a terminal end of the piezoelectric vibrating reed, and the lead electrode extends obliquely from the main electrode toward a side end of the piezoelectric vibrating reed,
By connecting to the side surface electrode for front and back conduction formed on the side end surface connected to the side end portion, and the terminal connection electrode of the fixed portion, the fixed portion has the terminal connection electrode. The background area of the piezoelectric vibrating reed is secured in a more inner area.

In the specification of the present application, the terminating end used to specify each end of the piezoelectric vibrating piece means the end on the short side when the piezoelectric vibration has a rectangular planar shape. Good, the side end means the end on the long side. Although the terms “piezoelectric vibrating reed” and “piezoelectric vibrator” are used in the specification of the present application, the term “piezoelectric vibrating reed” in the present specification refers to a flat plate-shaped piezoelectric material before an electrode pattern is formed. The term “element” refers to a plate-shaped piezoelectric material (piezoelectric vibrating reed) having an electrode pattern formed thereon.

In the piezoelectric vibrator thus configured, the lead electrode for connecting the main electrode and the terminal connection electrode of the fixed portion extends obliquely from the main electrode toward the side end of the piezoelectric vibrating piece. That is, since the extraction electrode is formed obliquely so as to avoid the inside area of the terminal connection electrode, the background area of the piezoelectric vibrating reed is secured in the fixed part in the inside area of the terminal connection electrode. Therefore, when electrically connecting the terminal connection electrode and the terminal with a conductive adhesive, if the terminal is arranged such that the tip of the terminal reaches the inner region (background region) from the terminal connection electrode, the terminal Can be fixed directly to the background region of the piezoelectric vibrating reed with a conductive adhesive, and the portion where such a background region and the tip of the terminal are directly fixed with the conductive adhesive has a large fixing strength. Therefore, even if the adhesion between the electrode for terminal connection and the piezoelectric vibrating reed as the base is poor, the mechanical strength of the terminal connection portion can be increased. Also,
Since the extraction electrode is formed so as to reach the side end of the piezoelectric vibrating reed from the main electrode, the background area is considerably wide in the width direction. Therefore, even if the terminal is wide or the position of the terminal is shifted in the width direction, the tip of the terminal always overlaps the background area of the piezoelectric vibrating reed. Can be directly fixed by the conductive adhesive reliably. Furthermore, since the terminal connection electrode is formed along the end edge at the end of the piezoelectric vibrating reed, the background area of the piezoelectric vibrating reed is wide in the length direction. Therefore, even if the position of the tip of the terminal is displaced in the length direction, the tip of the terminal always overlaps the background area of the piezoelectric vibrating reed, so that the tip of the terminal and the background area of the piezoelectric vibrating reed are surely conductive. Can be fixed directly by the adhesive. Therefore, the mechanical strength of the terminal connection portion can be sufficiently increased without using a top coat of the adhesive after connecting the terminal, applying a conductive adhesive to the terminal connection electrode over a wide range, and using a special film forming method. Can be increased. Furthermore, since the extraction electrode is formed obliquely from the main electrode toward the side end of the piezoelectric vibrating reed, this extraction electrode can be integrally connected to the terminal connection electrode to the front and back conduction side electrode. Become. Therefore, the side electrodes can be formed wider, and the electric resistance of the side electrodes can be reduced. In addition, since the extraction electrode is formed obliquely from the main electrode toward the side end of the piezoelectric vibrating piece, even if this oblique portion is formed wider to reduce its electrical resistance, it is secured in the fixed portion. The background area of the piezoelectric vibrating piece is not significantly reduced.

In the present invention, the lead electrode extends obliquely from the main electrode toward a side end of the piezoelectric vibrating reed, and then extends along the side edge of the side end to the terminal connection electrode. Preferably, it extends toward. With such a configuration, the width of the lead-out electrode extending along the side edge is wider by the extent extending along the side edge, and accordingly, the side electrode for front / back conduction can be formed wider. In addition, the electric resistance of the side electrode can be reduced. Further, since the lead electrode extends along the side edge, a wide background area can be formed in the inner area of the terminal connection electrode. Therefore, even if the terminal is a wide terminal, even if the tip position of the terminal is largely shifted. Since the tip of the terminal is located in the background area of the piezoelectric vibrating reed, the tip of the terminal and the background area of the piezoelectric vibrating reed can be directly fixed with a conductive adhesive.

In the present invention, it is preferable that an end surface electrode for front and back conduction to which the terminal connection electrode is connected is formed on an end surface connected to the end portion on which the terminal connection electrode is formed. That is, by utilizing the fact that the terminal connection electrode is formed at the end of the piezoelectric vibrating reed, an end surface electrode for front and back conduction is formed on the end surface connected to this end so that the front and back electrodes have low resistance. It is preferable to connect with.

In the present invention, if the piezoelectric vibrator is of a single support type, the main electrode of the first electrode pattern is provided at the end of the first electrode pattern where the terminal connection electrode is located. The terminal connection electrode of the second electrode pattern including the electrode, the main electrode, the extraction electrode, and the terminal connection electrode, which are respectively paired with the extraction electrode and the terminal connection electrode, is also formed.

In this case, between the first electrode pattern and the second electrode pattern, the direction in which the lead electrode is drawn from the main electrode is reversed so that the front and back lead electrodes do not overlap. It is preferable to form it as follows. With this configuration, the piezoelectric vibrating reed can be excited only by the main electrode without the exciter electrode exciting the piezoelectric vibrating reed.

In the present invention, if the piezoelectric vibrator is of a double support type, the first electrode pattern has the first electrode pattern at the end opposite to the end where the terminal connection electrode is located. The terminal connection electrode of the second electrode pattern including the main electrode, the extraction electrode, and the terminal connection electrode, which is paired with the main electrode, the extraction electrode, and the terminal connection electrode, respectively. become.

According to such a piezoelectric vibrator, in the piezoelectric vibrator unit using the piezoelectric vibrator, the internal terminal connected to the mounting external terminal is connected to the terminal connecting electrode of the piezoelectric vibrator by a conductive adhesive. In addition to being electrically connected, the tip of the internal terminal is bonded and fixed to the background area of the piezoelectric vibrating reed secured in the area inside the terminal connection electrode by the conductive adhesive. Thus, the strength of the terminal connection portion can be increased.

According to the piezoelectric vibrator of the present invention,
In a piezoelectric oscillator using the same, an internal terminal connected to the mounting external terminal is electrically connected to the terminal connection electrode of the piezoelectric vibrator by a conductive adhesive, and a tip end of the internal terminal. Can be configured to be bonded and fixed to the background area of the piezoelectric vibrating reed secured in the area inside the electrode for terminal connection by the conductive adhesive to increase the mechanical strength of the terminal connection part. .

Even when these piezoelectric vibrator units or piezoelectric oscillators are constructed, the overlapping area between the internal terminal and the terminal connection electrode is larger than the overlapping area between the internal terminal and the background area of the piezoelectric vibrating reed. Preferably it is narrow.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. In any of the embodiments described below, the basic configuration is the same as that of the conventional piezoelectric vibrator described with reference to FIGS. 7 to 9, and the corresponding parts are denoted by the same reference numerals. It is.

[First Embodiment] FIG. 1 is a sectional view of a piezoelectric vibrator unit of a type in which a piezoelectric vibrator is housed in a metal case. FIG. 2 is a perspective view showing a state where a metal case is removed from a piezoelectric vibrator unit using the one-support type piezoelectric vibrator according to the present embodiment. FIG. 3 is a perspective view of a single-support type piezoelectric vibrator according to the present embodiment.

As shown in FIG. 1, the piezoelectric vibrator unit 1
Is a piezoelectric vibrator 10 using a thin plate-shaped piezoelectric vibrating piece 11 (quartz piece), and a hermetic type in which two internal terminals 7 and 8 are connected to the end 13 of the piezoelectric vibrator 10 respectively. And a metal case 51 containing the piezoelectric vibrator 10 are used, and the inside is kept airtight by the metal case 51 and the plug 50. In the piezoelectric vibrator unit 1, the piezoelectric vibrator 10 includes:
As described later, a pair of electrode patterns (a first electrode pattern and a second electrode pattern) is formed on each of the front surface and the back surface of the piezoelectric vibrating reed 11 from a metal layer such as gold, silver, nickel, and chromium. Therefore, when an AC voltage is applied from an external terminal of the plug 50, the piezoelectric vibrating reed 11 vibrates at a predetermined frequency.

The piezoelectric vibrator 10 used in such a piezoelectric vibrator unit 1 is, as shown in FIGS.
A main electrode 21 for exciting the piezoelectric vibrating reed 11 on the flat surface of the piezoelectric vibrating reed 11,
A first electrode pattern 20 including a lead electrode 22 extending toward a terminal portion 13 that is a fixing portion 12 of the internal terminal 7 and a terminal connection electrode 23 connected to the drawing electrode 22 by the fixing portion 12 is formed. Have been. The piezoelectric vibrating reed 11 has a main electrode 21 of the first electrode pattern 20,
The main electrode, the lead electrode 32 and the terminal connection electrode 3 which are respectively paired with the lead electrode 22 and the terminal connection electrode 23.
The second electrode pattern 30 including 3 is formed symmetrically with the first electrode pattern 20. However, in FIGS. 2 and 3, the main electrode of the second electrode pattern 30 is not shown because it is formed to overlap the main electrode 21 on the back side of the piezoelectric vibrating reed 11. Also, the second
When the internal terminals 8 are connected to the first electrode pattern 30, the connection is performed on the same side as the terminal connection to the first electrode pattern 20, so that the second electrode pattern 30 is connected to the opposite side of the main electrode. The electrode portion formed on the surface is used as the electrode 33 for terminal connection. In the present embodiment, between the first electrode pattern 20 and the second electrode pattern 30, the extraction direction of the extraction electrodes 22 and 32 from the main electrode is reversed, so that the extraction electrodes 22 and 32 on the front and back sides are connected to each other. Do not overlap.

In the piezoelectric vibrator 10 thus configured, in the present embodiment, the terminal connecting electrode 23 is
The extraction electrode 22 extends obliquely from the main electrode 21 toward the side end 14 of the piezoelectric vibrating reed 11, and is formed on the side end 14. It is connected to the side electrode 24 for front-to-back conduction formed on the side end face 15 to be connected and the terminal connection electrode 23 of the fixed part 12. In addition, the extraction electrode 22
Extends obliquely from the main electrode 21 toward the side end 14 of the piezoelectric vibrating reed 11, and then extends from the extended portion 220 of the extraction electrode 22.
Extends along the side edge 141 of the side end portion 14 and is connected to the terminal connection electrode 23. Therefore, the fixed part 12 includes
Area inside electrode 23 for terminal connection (electrode 23 for terminal connection
A background area 110 of the piezoelectric vibrating reed 11 is secured in a region adjacent to the piezoelectric vibrating reed 11 in the longitudinal direction of the piezoelectric vibrating reed 11). Moreover, the extended portion 220 extending along the side edge 141 is formed in the extraction electrode 22, so that a large background area 110 is secured in the area inside the terminal connection electrode 23. Therefore, in the fixed portion 12, the formation region of the terminal connection electrode 23 is smaller than the background region 110 of the piezoelectric vibrating reed 11.

Since the extraction electrode 22 extends obliquely from the main electrode 21 toward the side end portion 14 of the piezoelectric vibrating reed 11, the side surface electrode 24 formed on the side end surface 15 for front and back conduction is Since it is formed wide so as to extend from the extraction electrode 22, the electric resistance between the front and back electrodes can be reduced. Further, in the present embodiment, the terminal surface 17 is connected to the terminal portion 13 by utilizing the fact that the terminal connection electrode 23 is formed on the terminal portion 13 of the piezoelectric vibrating reed 11.
The front and back electrodes are connected to each other with low resistance by forming the front and back conductive end face electrodes 25 on the front side.

The first structure of the piezoelectric vibrator 10 thus constructed
In the electrode pattern 20 of FIG.
Extraction electrode 22 for connecting to the terminal connection electrode 23
Are formed obliquely so as to avoid the inner region of the terminal connection electrode 23, so that the background region 110 of the piezoelectric vibrating reed 11 is secured in the inner region of the terminal connection electrode 23. Therefore, when the terminal connection electrode 23 and the internal terminal 7 are electrically connected with the conductive adhesive 9, the tip portion 70 of the internal terminal 7 protrudes from the terminal connection electrode 23 to the inner region (background region 110). When the internal terminals 7 are arranged as described above and bonded with the conductive adhesive 9, the internal terminals 7 and the terminal connection electrodes 23 can be electrically connected with the conductive adhesive 9, and the tip portions 70 of the internal terminals 7 can be connected. Can be directly fixed to the background area 110 of the piezoelectric vibrating reed 11 with the conductive adhesive 9. Since the adhesive strength is high between the background region 110 and the conductive adhesive 9, the portion where the background region 110 and the tip 70 of the internal terminal 7 are directly fixed with the conductive adhesive 9 is used. High fixing strength. Therefore, the terminal connection electrode 2
Even if the adhesion between the piezoelectric vibrating piece 3 and the underlying piezoelectric vibrating reed 11 is poor, the mechanical strength of the terminal connection portion can be increased.
Therefore, the normal sputtering method can be used without coating the adhesive after connecting the internal terminals 7 and 8, applying the conductive adhesive 9 to the terminal connection electrode 23 over a wide range, and using a special film forming method. Even if each electrode pattern is formed from a conductive film formed by the oblique evaporation method, the mechanical strength of the terminal connection portion can be sufficiently increased. Therefore, it is possible to manufacture a piezoelectric vibrator unit and a piezoelectric oscillator having good shock resistance and excellent frequency characteristics and CI characteristics at low cost.

Further, the extraction electrode 22 is formed obliquely so as to avoid the inner region of the terminal connection electrode 23, and the extraction electrode 22 extends along the side edge 141 so that the terminal connection electrode 23 is formed. A wide background area 110 is secured in the inner area of. Therefore, even if the internal terminals 7 are wide, the internal terminals 7 and the first electrode patterns 20 may be displaced due to a positional shift during mounting or a mask shift when forming the first electrode patterns 20. Even if the positional relationship is shifted in the width direction, the tip 70 of the internal terminal 7 must be
Since it overlaps the first background region 110, the front end portion 70 of the internal terminal 7 and the background region 110 of the piezoelectric vibrating reed 11 can be reliably and directly fixed by the conductive adhesive 9. Furthermore, since the terminal connection electrode 23 is formed along the terminal edge 131 at the terminal end 13 of the piezoelectric vibrating reed 11, the background region 110 of the piezoelectric vibrating reed 11 is wide and the internal terminal 7 is connected to the terminal connecting electrode. Even if it slightly deviates from the above, there is no problem in the electrical connection as in the related art. Therefore, even if the positional relationship between the internal terminal 7 and the first electrode pattern 20 is shifted in the length direction due to a positional shift during mounting or a mask shift when the first electrode pattern 20 is formed, Since the tip 70 of the internal terminal 7 always overlaps the background area 110 of the piezoelectric vibrating reed 11, the tip 70 of the internal terminal 7 and the background 110
Can be reliably and directly fixed by the conductive adhesive 9. In addition, since the background area 110 of the piezoelectric vibrating reed 11 is wide, the overlapping area between the internal terminal 7 and the terminal connecting electrode 23 is smaller than the overlapping area between the internal terminal 7 and the background area 110 of the piezoelectric vibrating reed 11. Also, the strength of the terminal connection portion can be increased.

Further, since the extraction electrode 22 is formed obliquely from the main electrode 21 toward the side end portion 14 of the piezoelectric vibrating reed 11, when viewed from the terminal connection electrode 23 having a width of 150 μm to 200 μm, Even if the width of the oblique portion of the extraction electrode 22 is greatly expanded to, for example, 300 μm to 400 μm to reduce the electric resistance of this portion, the background region 110 of the piezoelectric vibrating reed 11 will not be narrowed. Further, the extension 220 of the extraction electrode 22 is not
4, the wiring width at the side end 14 is 1
Even if the width is reduced to 00 μm to 200 μm and the background area 110 of the piezoelectric vibrating reed 11 is widened, the electric resistance of this portion does not increase.

Further, in the present embodiment, between the first electrode pattern 20 and the second electrode pattern 30, the direction in which the lead electrodes 22, 32 are pulled out from the main electrode is reversed, so that the front and back sides are drawn. The electrodes 22, 32 do not overlap. Therefore, the piezoelectric vibrating reed 11 is not excited by the lead electrodes 22 and 32, and the piezoelectric vibrating reed 11 can be excited only by the main electrode.

[Modification 2 of Embodiment 1] FIG. 4 is a sectional view of a piezoelectric vibrator unit of a type in which the piezoelectric vibrator according to the present embodiment is housed in a ceramic package.

The above-described embodiment is a piezoelectric vibrator unit 1 of the type in which the piezoelectric vibrator 10 is housed in a metal case 51.
However, as shown in FIG. 4, the piezoelectric vibrator 10 may be housed in a ceramic package 60 to constitute the surface-mount type piezoelectric vibrator unit 1.

That is, in the piezoelectric vibrator unit 1 shown in FIG. 4, the ceramic package 60 is formed as a laminated ceramic body in which a plurality of ceramic plates each formed into a predetermined shape are laminated. It has a rectangular planar shape like the planar shape of the above. In this multilayer ceramic body, for example, the second and third layers from the bottom
The ceramic plate of the layer defines a resonator element storage chamber 61 for storing the piezoelectric vibrator 10 in a flat state. Further, a shelf-shaped mount portion 62 to which the end portion 13 of the piezoelectric vibrator 10 is fixed is formed on the second-layer ceramic plate in the resonator element storage chamber 61. 8 are formed. Therefore, the piezoelectric vibrating reed 1
The terminal connection electrode 23 formed on the
When the conductive terminals 9 and 8 are bonded to the internal terminals 7 and 8 formed with the conductive adhesive 9, the end 13 of the piezoelectric vibrating piece 11 is fixed to the mount 62, and the piezoelectric vibrator 10 is in a flat state. After adjusting the frequency in this state, the vibrating piece storage chamber 61 is closed with the lid member 64 in a nitrogen gas atmosphere or vacuum, but the front end side of the piezoelectric vibrator 10 is in contact with the container bottom 63 and the lid member 64. In this state, a sufficient gap is secured. Although not shown, the internal terminals 7 and 8 formed on the mount portion 62 and the mounting external terminals formed on the back surface of the container include a wiring pattern formed on the bottom of the container and the like. Electrical connection is achieved via a wiring pattern formed in a corner portion of the outer periphery, a conductive material buried in a through hole formed in a ceramic plate, and the like.

The piezoelectric vibrator unit 1 configured as described above
Also, as described with reference to FIG.
Is bonded to the inner terminal 7 and the piezoelectric vibrator 10 by bonding with the conductive adhesive 9 in a state where the front end portion 70 protrudes from the terminal connection electrode 23 to the inner region (background region 110). 23 can be electrically connected, and the tip 70 of the internal terminal 7 can be directly fixed to the background area 110 of the piezoelectric vibrating reed 11 with the conductive adhesive 9. Therefore, the terminal connecting electrode 23 and the piezoelectric vibrating reed 1 that
The mechanical strength of the terminal connection portion can be increased even if the adhesion to the terminal 1 is poor. Further, the overlapping area between the internal terminal 7 and the terminal connection electrode 23 is defined as the internal terminal 7 and the piezoelectric vibrating piece 11.
Is smaller than the overlapping area with the background region 110, so that the strength of the terminal connection portion can be further increased.

[Modification 2 of Embodiment 1] FIG. 5 is a sectional view of a piezoelectric oscillator in which the piezoelectric vibrator according to the present embodiment is housed in a ceramic package.

The above embodiment is an example in which the piezoelectric vibrator 10 to which the present invention is applied is housed in the ceramic package 60 to form the surface-mount type piezoelectric vibrator unit 1 as shown in FIG. Then, the electrode 23 for terminal connection formed on the piezoelectric vibrating reed 11 is fixed to the internal terminals 7 and 8 formed on the mount part 62 with the conductive adhesive 9, and the piezoelectric vibrating reed 11 is fixed on the container bottom 63. The piezoelectric oscillator 2 may be configured by performing wire bonding 67 on a driving IC 66 for driving.

In the piezoelectric oscillator 2 configured as described above, as described with reference to FIG. 3, the tip 70 of the internal terminal 7 protrudes from the terminal connecting electrode 23 to the inner area (background area 110). By bonding with the conductive adhesive 9 in this state, the internal terminal 7 and the terminal connection electrode 23 of the piezoelectric vibrator 10 can be electrically connected, and the front end portion 70 of the internal terminal 7 is connected to the surface of the piezoelectric vibrating piece 11. Region 110
Can be directly fixed with the conductive adhesive 9. Therefore, even if the adhesion between the electrode 23 for terminal connection and the piezoelectric vibrating reed 11 as the base is poor, the mechanical strength of the terminal connection part can be increased. Further, the overlapping area between the internal terminal 7 and the electrode 23 for terminal connection is smaller than the overlapping area between the internal terminal 7 and the background area 110 of the piezoelectric vibrating reed 11, so that the strength of the terminal connection portion can be further increased. .

[Embodiment 2] In both Embodiment 1 and its modifications, a single-support type piezoelectric vibrator was used. As shown in FIG. 6, the present invention is applied to a double-support type piezoelectric vibrator. May be applied.

FIG. 6 is a perspective view of a double support type piezoelectric vibrator according to this embodiment.

In this figure, the piezoelectric vibrator 10 of the present embodiment is shown.
Is a both-supporting type, so that the terminal electrode 16 of the first electrode pattern 20 has a main electrode 21, a lead-out electrode 22, A second electrode pattern 30 including a main electrode 31, a lead electrode 32, and a terminal connection electrode 33, each of which is paired with the terminal connection electrode 23, is formed. However, the terminal connection electrode 3 of the second electrode pattern 30
3 is formed on the surface opposite to the main electrode 31 and the extraction electrode 32, the terminal connection electrode 33 and the extraction electrode 32 are connected to the side surface electrode 3 for conducting the front and back of the side surface 15.
4 for electrical connection.

In the double-supporting type piezoelectric vibrator 10 thus configured, the terminal connection electrode 23 is formed along the terminal edge 131 at the terminal end 13 of the piezoelectric vibrating reed 11 as in the first embodiment. In addition, the extraction electrode 22 is connected to the side end 14 of the piezoelectric vibrating reed 11 from the main electrode 21.
End surface 1 that extends diagonally toward and connects to the side end portion 14
5 is connected to the side electrode 24 for front and back conduction and the terminal connection electrode 23 of the fixed part 12. Further, the extraction electrode 22 is connected to the piezoelectric vibrating reed 1 from the main electrode 21.
After extending obliquely toward the first side end 14, the extension 220 of the extraction electrode 22 extends along the side edge 141 of the side end 14 and is connected to the terminal connection electrode 23. Therefore, in the fixed portion 12, a background region 110 of the piezoelectric vibrating reed 11 is secured in a region inside the terminal connection electrode 23.
Other configurations are the same as those of the first embodiment.

Also in the double-supporting type piezoelectric vibrator 10 thus configured, the conductive bonding is performed in a state where the tip 70 of the internal terminal 7 protrudes from the terminal connecting electrode 23 to the inner region (background region 110). By bonding with the agent 9, the internal terminal 7 and the terminal connection electrode 23 of the piezoelectric vibrating reed 11 can be electrically connected, and the tip 70 of the internal terminal 7 can be directly connected to the background region 110 of the piezoelectric vibrating reed 11. It can be fixed with the conductive adhesive 9. Therefore, the terminal connection electrode 23
Even if the adhesion between the substrate and the piezoelectric vibrating reed 11 is poor, the same effects as in the first embodiment can be obtained, for example, the mechanical strength of the terminal connection portion can be increased.

The term flat plate in the present specification includes not only parallel plates but also those subjected to bevel processing and convex processing. Further, in the above embodiment, the description has been made using only the rectangular vibrating reed. However, the present invention is also applicable to vibrating reeds of other shapes such as a tuning fork type.

[0046]

As described above, in the piezoelectric vibrator according to the present invention, the lead electrode for connecting the main electrode and the terminal connecting electrode of the fixed portion is directed from the main electrode to the side end of the piezoelectric vibrating piece. By extending it obliquely, a background area of the piezoelectric vibrating reed is secured in the fixed portion inside the terminal connection electrode. Therefore, by arranging the terminal such that the tip of the terminal reaches the inner area (background area) from the terminal connection electrode, the tip of the terminal can be directly fixed to the background area of the piezoelectric vibrating reed with a conductive adhesive. In such a portion where the background region and the tip of the terminal are directly fixed with a conductive adhesive, the adhesion is good. Therefore, even if the adhesion between the terminal connecting electrode and the piezoelectric vibrating piece as the base is poor, the mechanical strength of the terminal connecting portion can be increased. In addition, the terminal connection electrode is formed along the terminal edge at the end of the piezoelectric vibrating reed, and the lead electrode is formed obliquely from the main electrode toward the side end of the piezoelectric vibrating reed. The background area of the resonator element is large. Therefore, even if the terminal is wide or the terminal is displaced, the tip of the terminal and the background region of the piezoelectric vibrating reed can be reliably and directly fixed by the conductive adhesive. Furthermore, since the extraction electrode is formed obliquely from the main electrode toward the side end of the piezoelectric vibrating reed, this extraction electrode is
It is connected to the side surface electrode for front and back conduction integrally with the terminal connection electrode. Therefore, the side electrodes can be formed wider, and the electric resistance of the side electrodes can be reduced. Moreover, since the extraction electrode is formed obliquely from the main electrode toward the side end of the piezoelectric vibrating reed, even if the diagonal portion is formed wide to reduce its electrical resistance, the piezoelectric vibrating reed can be reduced. It does not narrow the background area.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a piezoelectric vibrator unit of a type in which a piezoelectric vibrator is housed in a metal case.

FIG. 2 is a perspective view showing a state in which a metal case is removed from a piezoelectric vibrator unit using the single-support type piezoelectric vibrator according to Embodiment 1 of the present invention.

FIG. 3 is a perspective view of a single-support type piezoelectric vibrator according to Embodiment 1 of the present invention.

FIG. 4 is a cross-sectional view of a piezoelectric vibrator unit of a type in which a piezoelectric vibrator is housed in a ceramic package.

FIG. 5 is a cross-sectional view of a piezoelectric oscillator in which a piezoelectric vibrator is housed in a ceramic package.

FIG. 6 is a perspective view of a double support type piezoelectric vibrator according to Embodiment 2 of the present invention.

FIG. 7 is a perspective view of a conventional single-supporting type piezoelectric vibrator.

8 is a perspective view showing a state where a metal case is removed from a piezoelectric vibrator unit using the piezoelectric vibrator shown in FIG. 7;

FIG. 9 is a perspective view of a conventional double-supporting type piezoelectric vibrator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator unit 2 Piezoelectric oscillator 7, 8 Internal terminal 9 Conductive adhesive 10 Piezoelectric vibrator 11 Piezoelectric vibrating reed 12 Fixing part to terminal 13, 16 End of piezoelectric vibrating reed 14 Side end of piezoelectric vibrating reed 15 Side end face of piezoelectric vibrating reed 17 End face of piezoelectric vibrating reed 25 End face electrode for front and back conduction 20 First electrode pattern 21, 31 Main electrode 22, 32 Leader electrode 23, 33 Electrode for terminal connection 24 Side face electrode for front and back conduction REFERENCE SIGNS LIST 30 second electrode pattern 50 plug 51 metal case 70 tip end of internal terminal 110 background area of piezoelectric vibrating reed 131 end edge of piezoelectric vibrating reed 141 side end of piezoelectric vibrating reed 220 220 extension part of extraction electrode

Claims (10)

[Claims] 1. A main electrode for exciting the piezoelectric vibrating reed on a flat surface of a plate-shaped piezoelectric vibrating reed, and a drawer extending from the main electrode toward an end portion serving as a fixed portion between the piezoelectric vibrating reed and a terminal. An electrode, and a piezoelectric vibrator having a first electrode pattern including a terminal connection electrode connected to the extraction electrode at the fixed portion, wherein the terminal connection electrode has a terminal edge at a terminal end of the piezoelectric vibrating reed. And the lead-out electrode extends obliquely from the main electrode toward the side end of the piezoelectric vibrating reed and is formed on a side end surface connected to the side end. By being connected to the common side electrode and the terminal connection electrode of the fixing part, the background area of the piezoelectric vibrating reed is secured in the fixing part in an area inside the terminal connection electrode. That Piezoelectric vibrator and butterflies. 2. The device according to claim 1, wherein the extraction electrode extends obliquely from the main electrode toward a side end of the piezoelectric vibrating reed and then extends along a side edge of the side end. A piezoelectric vibrator connected to a terminal connection electrode. 3. An end surface electrode for front and back conduction to which the terminal connection electrode is connected is formed on an end surface connected to the end portion where the fixing portion is formed, according to claim 1 or 2. A piezoelectric vibrator characterized by the following. 4. The method according to claim 1, wherein
At the end of the first electrode pattern where the terminal connection electrode is located, the main electrode of the first electrode pattern,
A piezoelectric vibrator, wherein the main electrode, the lead electrode, and the terminal connection electrode of the second electrode pattern including the terminal connection electrode are also formed, respectively. . 5. The piezoelectric vibration according to claim 4, wherein the direction in which the lead electrode is drawn from the main electrode is opposite between the first electrode pattern and the second electrode pattern. Child. 6. The method according to claim 1, wherein
An end portion of the first electrode pattern opposite to the end portion where the terminal connection electrode is located is paired with the main electrode, the lead electrode, and the terminal connection electrode of the first electrode pattern, respectively. A piezoelectric vibrator, wherein a terminal connection electrode of a second electrode pattern including a main electrode, a lead electrode, and a terminal connection electrode is formed. 7. A piezoelectric vibrator unit using the piezoelectric vibrator defined in claim 1, wherein an internal terminal connected to an external mounting terminal is electrically conductively bonded to the terminal connecting electrode. While electrically connected by the agent, the tip of the internal terminal is bonded and fixed to the background area of the piezoelectric vibrating reed secured in the area inside the terminal connection electrode by the conductive adhesive. A piezoelectric vibrator unit. 8. The piezoelectric vibration according to claim 7, wherein an overlapping area between the internal terminal and the terminal connection electrode is smaller than an overlapping area between the internal terminal and a background area of the piezoelectric vibrating piece. Child unit. 9. A piezoelectric oscillator using the piezoelectric vibrator defined in any one of claims 1 to 6, wherein an internal terminal connected to an external mounting terminal is connected to the terminal connecting electrode by a conductive adhesive. While being electrically connected, the tip of the internal terminal is bonded and fixed to the background area of the piezoelectric vibrating reed secured in an area inside the terminal connection electrode by the conductive adhesive. A piezoelectric oscillator characterized in that: 10. The piezoelectric oscillator according to claim 9, wherein an overlapping area between the internal terminal and the terminal connection electrode is smaller than an overlapping area between the internal terminal and a background area of the piezoelectric vibrating reed. .