JP2014011647A - Crystal vibration element - Google Patents

Crystal vibration element Download PDF

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JP2014011647A
JP2014011647A JP2012147267A JP2012147267A JP2014011647A JP 2014011647 A JP2014011647 A JP 2014011647A JP 2012147267 A JP2012147267 A JP 2012147267A JP 2012147267 A JP2012147267 A JP 2012147267A JP 2014011647 A JP2014011647 A JP 2014011647A
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crystal
crystal piece
plane
routing pattern
piece
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JP5936936B2 (en
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Koichi Iwata
浩一 岩田
Kohei Sasaoka
康平 笹岡
Hitoshi Shirasawa
仁 白澤
Kei Kasahara
慧 笠原
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Kyocera Crystal Device Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a crystal vibration element capable of reducing leakage of vibration energy to achieve a low crystal impedance (CI) value.SOLUTION: A crystal vibration element 10 comprises: a tabular crystal piece 1; excitation electrodes 2 provided on both principal surfaces of the crystal piece; and a routing pattern 3 that is provided at one edge of the crystal piece to connect to the excitation electrodes 2. The crystal piece is provided in its side surfaces with "m" surfaces 1b, and the routing pattern 3 is provided on the principal surface and the "m" surface of the crystal piece to linearly extend to a corner of the crystal piece 1. The routing pattern 3 is provided on the "m" surface 1b in a direction to the corner of the crystal piece 1 while extending in a direction orthogonal to the "m" surface 1b from the excitation electrode 2.

Description

本発明は、水晶デバイスに用いられる水晶振動素子に関する。   The present invention relates to a crystal resonator element used in a crystal device.

従来より、水晶デバイスには水晶片に金属膜を設けて構成された水晶振動素子が用いられている。
この水晶片は、例えば、ＡＴカットの水晶ウェハを従来周知のフォトリソグラフィ技術とエッチング技術を用いることで形成することができる。
このような水晶振動素子は、四角形に形成された水晶片と、この水晶片の両主面中央に設けられる四角形状の励振電極と、この励振電極と接続され水晶片の一方の端部に設けられる引き回しパターンとから構成されている。
ここで、励振電極に接続されている引き回しパターンは、水晶片の主面において、水晶片の短辺の中心と縁との間に設けられる（例えば、特許文献１参照）。 Conventionally, a quartz crystal element in which a quartz film is provided with a metal film is used for a quartz crystal device.
This crystal piece can be formed, for example, by using an AT-cut crystal wafer by using a conventionally known photolithography technique and etching technique.
Such a crystal resonator element includes a crystal piece formed in a square shape, a square excitation electrode provided at the center of both main surfaces of the crystal piece, and provided at one end of the crystal piece connected to the excitation electrode. And a routing pattern to be formed.
Here, the routing pattern connected to the excitation electrode is provided between the center and the edge of the short side of the crystal piece on the main surface of the crystal piece (see, for example, Patent Document 1).

特開２０１２−１１９９１１号公報JP 2012-119911 A

しかしながら、従来の水晶振動素子は、引き回しパターンが水晶片の短辺の中心と縁との間に設けられているため、振動エネルギーが引き回しパターンを介して漏れる恐れがある。そのため、低いＣＩ値（クリスタル・インピーダンス値）の実現が困難であった。   However, in the conventional quartz resonator element, since the routing pattern is provided between the center and the edge of the short side of the crystal piece, the vibration energy may leak through the routing pattern. For this reason, it has been difficult to realize a low CI value (crystal impedance value).


そこで、本発明は、低いＣＩ値を実現するために振動エネルギーの漏れを軽減する水晶振動素子を提供することを課題とする。
Therefore, an object of the present invention is to provide a crystal resonator element that reduces leakage of vibration energy in order to realize a low CI value.

前記課題を解決するため、本発明は、水晶振動素子であって、平板状の水晶片と、この水晶片の両主面に設けられる励振電極と、この水晶片の一方の端部に設けられ、前記励振電極と接続する引き回しパターンとを備え、前記水晶片の側面にｍ面が設けられ、前記引き回しパターンが、前記水晶片の主面と前記ｍ面とに、水晶片の角部に向かって設けられて構成されることを特徴とする。
なお、主面とは、水晶片に設けられる平面のうち、最も広い面とこの面と向かい合う面をいう。 In order to solve the above-described problems, the present invention provides a crystal resonator element, which is provided on a flat plate-shaped crystal piece, excitation electrodes provided on both main surfaces of the crystal piece, and one end of the crystal piece. A routing pattern connected to the excitation electrode, and an m-plane is provided on a side surface of the crystal piece, and the routing pattern faces the corner of the crystal piece on the main surface and the m-plane of the crystal piece. It is characterized by being provided.
The main surface refers to the widest surface among the flat surfaces provided on the crystal piece and the surface facing this surface.

また、本発明は、前記引き回しパターンが、前記励振電極から前記ｍ面と直交する方向に設けられつつ、ｍ面上であって水晶片の角部の方向に設けられていても良い。
また、本発明は、前記励振電極が楕円形状となっていても良い。 In the present invention, the routing pattern may be provided on the m plane and in the direction of the corner of the crystal piece while being provided in the direction orthogonal to the m plane from the excitation electrode.
In the present invention, the excitation electrode may have an elliptical shape.

このような水晶振動素子では、引き回しパターンが、水晶片の主面とｍ面とに、水晶片の角部に向かって直線状に設けられて構成されるので、水晶片の主面の内側を引き回しパターンが拘束することがなくなり、振動エネルギーが漏れるのを軽減することができる。   In such a crystal resonator element, the routing pattern is formed linearly on the main surface and the m-plane of the crystal piece toward the corner of the crystal piece. The routing pattern is not restrained, and leakage of vibration energy can be reduced.

（ａ）は本発明の実施形態に係る水晶振動素子の一方の主面側の状態の一例を示す模式図であり、（ｂ）は本発明の実施形態に係る水晶振動素子の他方の主面側の状態の一例を示す模式図である。(A) is a schematic diagram which shows an example of the state by the side of one main surface of the crystal vibration element which concerns on embodiment of this invention, (b) is the other main surface of the crystal vibration element which concerns on embodiment of this invention. It is a schematic diagram which shows an example of the state of the side. （ａ）は本発明の実施形態に係る水晶振動素子の変形例の一方の主面側の状態の一例を示す模式図であり、（ｂ）は本発明の実施形態に係る水晶振動素子の変形例の他方の主面側の状態の一例を示す模式図である。(A) is a schematic diagram which shows an example of the state by the side of one main surface of the modification of the crystal oscillation element which concerns on embodiment of this invention, (b) is a deformation | transformation of the crystal oscillation element which concerns on embodiment of this invention. It is a schematic diagram which shows an example of the state by the side of the other main surface of an example.

次に、本発明を実施するための最良の形態（以下、「実施形態」という。）について、適宜図面を参照しながら詳細に説明する。なお、各構成要素について、状態をわかりやすくするために、誇張して図示している。   Next, the best mode for carrying out the present invention (hereinafter referred to as “embodiment”) will be described in detail with reference to the drawings as appropriate. Note that each component is exaggerated for easy understanding of the state.

図１（ａ）及び（ｂ）に示すように、本発明の実施形態に係る水晶振動素子１０は、四角形状の水晶片１とこの水晶片１の両主面に設けられる励振電極２と、この励振電極２と接続し水晶片１の一方の端部へ引き回されている引き回しパターン３とから構成されている。   As shown in FIGS. 1A and 1B, a crystal resonator element 10 according to an embodiment of the present invention includes a quadrangular crystal piece 1 and excitation electrodes 2 provided on both main surfaces of the crystal piece 1. It is composed of a routing pattern 3 connected to the excitation electrode 2 and routed to one end of the crystal piece 1.

水晶片１は、例えばＡＴカットの水晶ウェハから四角形状でかつ平板状に形成されており、長辺側の側面にｍ面１ｂが設けられている。
この水晶片１は、従来周知のフォトリソグラフィ技術とエッチング技術を用いて形成することができる。これにより設けられた水晶片１は、長辺側の側面にｍ面１ｂが形成された状態となる。つまり、ｍ面１ｂは、水晶をエッチングしたときに側面側に生じる結晶面である。
なお、水晶片１は、引き回しパターン３が設けられる端部をＸ軸の＋Ｘ方向とし、反対側の端部を−Ｘ方向としている。 The crystal piece 1 is formed, for example, from an AT-cut crystal wafer in a rectangular shape and a flat plate shape, and an m-plane 1b is provided on the side surface on the long side.
This crystal piece 1 can be formed using a conventionally known photolithography technique and etching technique. Thus, the provided crystal piece 1 is in a state in which the m-plane 1b is formed on the side surface on the long side. In other words, the m-plane 1b is a crystal plane generated on the side surface side when the crystal is etched.
The crystal piece 1 has an end portion where the routing pattern 3 is provided as the + X direction of the X axis and an opposite end portion as the −X direction.

励振電極２は、楕円形状となっており、この楕円の中心点が、水晶片１の主面の平面中心上に位置している。
また、励振電極２は、水晶片１の両主面に設けられ、それぞれ対向するように設けられている。 The excitation electrode 2 has an elliptical shape, and the center point of the ellipse is located on the plane center of the main surface of the crystal piece 1.
Further, the excitation electrodes 2 are provided on both main surfaces of the crystal piece 1 so as to face each other.

引き回しパターン３は、水晶片１の一方の端部に設けられ、励振電極２と接続している。
この引き回しパターン３は、水晶片１の主面と側面の一部であるｍ面１ｂとに、水晶片１の角部に向かって直線状に設けられている。 The routing pattern 3 is provided at one end of the crystal piece 1 and is connected to the excitation electrode 2.
The routing pattern 3 is linearly provided toward the corner of the crystal piece 1 on the main surface of the crystal piece 1 and the m-plane 1b that is a part of the side surface.

例えば、引き回しパターン３は、２つ一対の接続パッド３ａと引き回し配線３ｂとから構成されている。接続パッド３ａは、水晶片１の一方の主面の角部に並んで２つ設けられており、一方の接続パッド３ａが一方の主面に設けられた励振電極２と引き回し配線３ｂを介して接続し、他方の接続パッド３ａが他方の主面に設けられた励振電極２と引き回し配線３ｂを介して接続している。
また、引き回し配線３ｂは、水晶片１の角部の方向へ直線で形成されており、水晶片１の主面とｍ面１ｂとに渡って励振電極２から接続パッド３ａまで設けられている。 For example, the routing pattern 3 includes two pairs of connection pads 3a and routing wirings 3b. Two connection pads 3a are provided side by side on the corner of one main surface of the crystal piece 1, and one connection pad 3a is connected to the excitation electrode 2 provided on one main surface and the routing wiring 3b. The other connection pad 3a is connected to the excitation electrode 2 provided on the other main surface via the lead wiring 3b.
The routing wiring 3b is formed in a straight line in the direction of the corner of the crystal piece 1, and is provided from the excitation electrode 2 to the connection pad 3a across the main surface of the crystal piece 1 and the m-plane 1b.

このように本発明の実施形態に係る水晶振動素子１０を構成したので、水晶片１の中央側に引き回しパターン３が設けられなくなり、水晶片１の縁側に引き回しパターン３が設けられるので、水晶片の主面の内側を引き回しパターンが拘束することがなくなる。
また、このような水晶振動素子は厚みすべりモードの振動をするため、水晶片１の主面に設けられる引き回しパターン３の占める割合を小さくすることができる。
これにより、振動エネルギーが引き回しパターン３を伝って漏れるのを軽減することができる。 Since the crystal resonator element 10 according to the embodiment of the present invention is configured as described above, the routing pattern 3 is not provided on the center side of the crystal piece 1, and the routing pattern 3 is provided on the edge side of the crystal piece 1. The pattern is not constrained by routing the inside of the main surface.
In addition, since such a crystal resonator element vibrates in a thickness-shear mode, the proportion of the routing pattern 3 provided on the main surface of the crystal piece 1 can be reduced.
As a result, it is possible to reduce the leakage of vibration energy along the pattern 3.

次に、本発明の実施形態に係る水晶振動素子の変形例について説明する。
図２（ａ）及び（ｂ）に示すように、本発明の実施形態に係る水晶振動素子の変形例は、引き回しパターン３が、励振電極２からｍ面１ｂと直交する方向に設けられつつ、ｍ面１ｂ上であって水晶片１の角部の方向に設けられて構成されている。
この引き回しパターン３は、励振電極２からｍ面１ｂと直交する方向に設けられつつ、ｍ面内を水晶片１の一方の角部の方へ引き回されて構成されている。
例えば、引き回しパターン３は、接続パッド３ａと引き回し配線３ｃとから構成されている。ここで、引き回し配線３ｃは、励振電極２からｍ面１ｂと直交する方向に設けられつつ、ｍ面内を水晶片１の一方の角部の方へ引き回されて、略Ｌ字形状に形成されている。この引き回し配線３ｃは、接続パッド３ａと接続している。 Next, a modified example of the crystal resonator element according to the embodiment of the invention will be described.
As shown in FIGS. 2A and 2B, in the modification of the crystal resonator element according to the embodiment of the present invention, the routing pattern 3 is provided in the direction orthogonal to the m-plane 1b from the excitation electrode 2. It is provided on the m-plane 1 b and in the direction of the corner of the crystal piece 1.
The routing pattern 3 is configured to be routed from the excitation electrode 2 in a direction orthogonal to the m-plane 1 b and routed in the m-plane toward one corner of the crystal piece 1.
For example, the routing pattern 3 includes connection pads 3a and routing wirings 3c. Here, the routing wiring 3c is provided in the direction orthogonal to the m-plane 1b from the excitation electrode 2, and is routed in the m-plane toward one corner of the crystal piece 1 to form a substantially L-shape. Has been. The routing wiring 3c is connected to the connection pad 3a.

このように本発明の第二の実施形態に係る水晶振動素子を構成しても同様の効果を奏する。   Thus, even if it comprises the crystal vibration element which concerns on 2nd embodiment of this invention, there exists the same effect.

以上、本発明の実施形態について説明したが、本発明は前記実施形態には限定されない。例えば、水晶片にｍ面が設けられていれば、ＡＴカットに限定されず、種々のカットアングルの水晶片を用いることができる。
また、引き回しパターンは、本実施形態に限定されない。例えば、引き回しパターンの引き回し配線は、水晶片の角部の方向に向かって主面の縁に対して斜めに設けられつつ、ｍ面内に位置したところで、ｍ面の縁に沿って接続パッドとつながる構成としても良い。 As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment. For example, if the crystal piece is provided with an m-plane, it is not limited to the AT cut, and crystal pieces having various cut angles can be used.
Further, the routing pattern is not limited to this embodiment. For example, the routing wiring of the routing pattern is provided obliquely with respect to the edge of the main surface in the direction of the corner of the crystal piece, and is located in the m plane, and is connected to the connection pad along the edge of the m plane. It is good also as a connected structure.

１０ 水晶振動素子
１ 水晶片
１ｂ ｍ面
２ 励振電極
３ 引き回しパターン DESCRIPTION OF SYMBOLS 10 Crystal resonator element 1 Crystal piece 1b m surface 2 Excitation electrode 3 Leading pattern

Claims (3)

平板状の水晶片と、
この水晶片の両主面に設けられる励振電極と、
この水晶片の一方の端部に設けられ、前記励振電極と接続する引き回しパターンとを備え、
前記水晶片の側面にｍ面が設けられ、
前記引き回しパターンが、前記水晶片の主面と前記ｍ面とに、水晶片の角部に向かって設けられて構成されることを特徴とする水晶振動素子。 A flat crystal piece,
Excitation electrodes provided on both main surfaces of the crystal piece;
Provided at one end of this crystal piece, with a routing pattern connected to the excitation electrode,
An m-plane is provided on the side surface of the crystal piece,
The crystal vibrating element, wherein the routing pattern is provided on the main surface and the m-plane of the crystal piece toward a corner of the crystal piece. 前記引き回しパターンが、前記励振電極から前記ｍ面と直交する方向に設けられつつ、ｍ面上であって水晶片の角部の方向に設けられていることを特徴とする請求項１に記載の水晶振動素子。   2. The routing pattern according to claim 1, wherein the routing pattern is provided in a direction perpendicular to the m-plane from the excitation electrode and on the m-plane and in a direction of a corner portion of the crystal piece. Crystal vibrating element. 前記励振電極が楕円形状となっていることを特徴とする請求項１又は請求項２に記載の水晶振動素子。   The crystal resonator element according to claim 1, wherein the excitation electrode has an elliptical shape.
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US9660610B2 (en) 2014-05-30 2017-05-23 Kyocera Crystal Device Corporation Crystal device and mounting arrangement
US10629799B2 (en) 2016-11-30 2020-04-21 Kyocera Corporation Piezoelectric vibration element and piezoelectric vibration device

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US9660610B2 (en) 2014-05-30 2017-05-23 Kyocera Crystal Device Corporation Crystal device and mounting arrangement
US10629799B2 (en) 2016-11-30 2020-04-21 Kyocera Corporation Piezoelectric vibration element and piezoelectric vibration device

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