JPH11274060A5 - - Google Patents

Info

Publication number
JPH11274060A5
JPH11274060A5 JP1998090958A JP9095898A JPH11274060A5 JP H11274060 A5 JPH11274060 A5 JP H11274060A5 JP 1998090958 A JP1998090958 A JP 1998090958A JP 9095898 A JP9095898 A JP 9095898A JP H11274060 A5 JPH11274060 A5 JP H11274060A5
Authority
JP
Japan
Prior art keywords
optical
prism
integrator
light source
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998090958A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11274060A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10090958A priority Critical patent/JPH11274060A/ja
Priority claimed from JP10090958A external-priority patent/JPH11274060A/ja
Publication of JPH11274060A publication Critical patent/JPH11274060A/ja
Publication of JPH11274060A5 publication Critical patent/JPH11274060A5/ja
Pending legal-status Critical Current

Links

JP10090958A 1998-03-19 1998-03-19 照明光学装置および該照明光学装置を備えた露光装置 Pending JPH11274060A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10090958A JPH11274060A (ja) 1998-03-19 1998-03-19 照明光学装置および該照明光学装置を備えた露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10090958A JPH11274060A (ja) 1998-03-19 1998-03-19 照明光学装置および該照明光学装置を備えた露光装置

Publications (2)

Publication Number Publication Date
JPH11274060A JPH11274060A (ja) 1999-10-08
JPH11274060A5 true JPH11274060A5 (cs) 2005-10-06

Family

ID=14013011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10090958A Pending JPH11274060A (ja) 1998-03-19 1998-03-19 照明光学装置および該照明光学装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JPH11274060A (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231619A (ja) * 2000-11-29 2002-08-16 Nikon Corp 照明光学装置および該照明光学装置を備えた露光装置
EP1840944A4 (en) * 2005-01-14 2011-11-02 Nikon Corp EXPOSURE METHOD AND DEVICE AND METHOD OF MANUFACTURING AN ELECTRONIC DEVICE
WO2010073794A1 (ja) 2008-12-24 2010-07-01 株式会社 ニコン 照明光学系、露光装置及びデバイスの製造方法
CN102736427B (zh) * 2011-04-07 2014-11-12 上海微电子装备有限公司 一种曝光装置及其方法
DE102013213545A1 (de) * 2013-07-10 2015-01-15 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithografie
CN114243441A (zh) * 2021-12-16 2022-03-25 上海瑞柯恩激光技术有限公司 一种固体激光器及固体激光器系统

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