JPH11233001A - Image forming device and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plate-type image forming device, which has no dispersion of rightness and no mixed colors caused by a position gap, and also has high productivity, by improving assembling precision of the plate-type image forming device, and also to provide its manufacturing method. SOLUTION: This image forming device is composed of primary substrate 1, secondary substrate 2, and a support frame 3 which is held between the primary substrate 1 and the secondary substrate 2 to support them. Plural positioning fixed members, 4, 5 and 6, are arranged between the primary substrate 1 and the secondary substrate 2, and a positioned surface by the positioning fixed members is adjusted vertically to the planes of the substrate 1, 2. And, a vacuum container is formed by the primary substrate 1, the secondary substrate 2 and the support frame 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an image forming apparatus and a method of manufacturing the same. More specifically, a flat panel type in which a plurality of electron-emitting devices such as a field electron-emitting device and a surface conduction electron-emitting device are arranged, and a light-emitting image-forming member such as a phosphor is displayed, particularly a liquid crystal display or plasma display An object of the present invention is to provide a novel configuration of an image forming apparatus and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, an active matrix type liquid crystal display has been used as a flat panel type image forming apparatus instead of a CRT. This active matrix type liquid crystal display uses a backlight because it is not a self-luminous type, but performs display using a backlight. However, since the light use efficiency is low, a brighter image forming apparatus has been desired.

For this reason, electrons emitted from a cold cathode electron-emitting device such as a plasma display, a field emission electron-emitting device (FE) and a surface conduction electron-emitting device (for example, Japanese Patent Application Laid-Open No. 7-235255) are accelerated. Development of a self-luminous image forming apparatus that performs display by emitting light by emitting phosphor upon collision has been put to practical use. These flat plate type image forming apparatuses are:
A large area of several tens of inches is being developed. In particular, in these image forming apparatuses, a highly accurate and easy assembling method is desired.

FIG. 15 shows an assembly process diagram of a liquid crystal display device as an example of a method of assembling these flat plate type image forming apparatuses. A description will be given in accordance with the description in JP-A-5-232451.

First, positioning of a pair of liquid crystal glass substrates (hereinafter, referred to as a "first substrate (body)" and a "second substrate (body)") will be described. A first substrate and a second substrate
The substrate is provided with an electrode pattern, a positioning pattern, and a sealing material. These first and second substrates are installed in an alignment device. By the alignment device, the first
The substrate and the second substrate are heated and kept warm. Next, the first substrate and the second substrate are aligned via an alignment pattern. Subsequently, the first and second substrates are pressurized and simultaneously aligned. Finally, after the pressure is maintained for a predetermined time in the pressurized state, the pressurization is released, and the assembled liquid crystal cell is removed from the alignment device. In this manner, even if a positional shift occurs in a high temperature state, the alignment is performed, so that the first substrate and the second substrate can be aligned with high accuracy. This publication also describes, as a prior art, a method of temporarily fixing with a photocurable adhesive after positioning at room temperature, and further heating and curing the sealing material.

[0006]

In the flat plate type image forming apparatus, the elements on the first base and the image forming members on the second base are in a one-to-one correspondence, and several tens μm to several hundreds A pixel of μm is formed. At this time, if the alignment between the element and the image forming member is insufficient, the brightness of the pixels varies, and in the case of color, the RGB colors are mixed or the image quality is impaired. For this reason, it is necessary that the alignment between the element on the first base and the image forming member on the second base be highly accurate.

In the above-mentioned conventional liquid crystal cell assembly, the first substrate and the second substrate are heated at a high temperature, and the pressure applied while softening the adhesive disposed between the first substrate and the second substrate. Further, after the first substrate and the second substrate are aligned in a high-temperature heating state, the adhesive is solidified, whereby the first substrate and the second substrate are aligned. For this reason, it is necessary to perform alignment in a high-temperature bath or to install a heater in a pressing jig. At that time, the alignment equipment is required to be accurate at high temperature specifications, resulting in complicated processes,
A problem such as a decrease in productivity occurs. On the other hand, as pointed out in the same gazette, in the manufacturing method using the alignment at room temperature and the temporary fixing, there are problems such as displacement of the adhesive due to softening of the adhesive.

In an image forming apparatus in which an electron beam generated from the electron-emitting device collides with a phosphor to emit light from the phosphor, it is necessary to further form a vacuum container. The bonding material corresponding to the adhesive disposed between the two substrates needs to be bonded using a glass material so as to maintain a vacuum. In this case, the liquid crystal is an organic adhesive, and thus requires a high temperature of 400 ° C. or more, compared with a softening temperature of about 150 ° C., and furthermore, the problem of the high-precision alignment and assembly apparatus is severe. Become. Further, a temperature distribution or a temperature difference for heating the first base and the second base causes a difference in thermal expansion between the first base and the second base, which causes not only a decrease in alignment accuracy but also a reduction in stress. With the occurrence, the vacuum container was sometimes destroyed.

It is an object of the present invention to improve the assembling accuracy of these flat plate type image forming apparatuses, to eliminate variations in luminance and color mixing caused by misalignment, and to increase the productivity of a flat type image forming apparatus and a method of manufacturing the same. It is to provide.

[0010]

SUMMARY OF THE INVENTION The present invention comprises a first base, a second base, and a support frame for supporting between the first base and the second base. A plurality of positioning and fixing members are provided between the second bases, and a positioning surface of the positioning and fixing member is substantially perpendicular to a plane of the base.

In the positioning and fixing member, members having or forming a recess on a plane substantially perpendicular to the plane of the base are disposed on the first base and the second base, respectively. It is preferable that they are fitted via a spherical or rod-shaped member disposed in the recess.

The positioning and fixing member is provided with a member having or forming a concave portion and a member having or forming a convex portion on a surface substantially perpendicular to the plane of the substrate, respectively, on the first substrate and the second substrate. It is preferable that these members fit each other.

In the positioning and fixing member, a member having or forming a concave portion on the plane of the base and a member having or forming a convex portion are disposed on the first base and the second base, respectively. Are preferably fitted to each other.

The present invention also relates to a method of manufacturing the above image forming apparatus, comprising the steps of arranging a positioning and fixing member on the first base and the second base, and supporting the positioning support on the first base or the second base. A step of disposing a frame, a step of fitting the first base and the second base through a support frame by fitting a positioning and fixing member, a step of pressing the first base and / or the second base, A method for manufacturing an image forming apparatus, comprising: a step of softening a joining member disposed between a first base and a support frame and a step between a second base and a support frame; and a step of solidifying the joining member. About.

According to the present invention, not only the liquid crystal display but also an electron-emitting device such as a cold cathode electron-emitting device is provided on a first base, and an image forming member such as a phosphor is provided on a second base. The present invention is also applied to an image forming apparatus characterized by being provided, a plasma display, and the like, and is not limited thereto, and may be any image forming apparatus that requires alignment between a first base and a second base. The present invention applies.

According to the image forming apparatus and the method of manufacturing the same of the present invention, a high-precision assembly can be realized without requiring a complicated alignment apparatus, so that an inexpensive and high-quality image forming apparatus can be realized.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a configuration example of an image forming apparatus according to the present invention will be described with reference to FIGS.

FIG. 1B is a plan view (omitting the second base) of the image forming apparatus of the present invention, and FIG.
FIG. 3B is a sectional view taken along line AA of FIG. 1 is a first base, 2 is a second base, 3 is a support frame, 4, 5 and 6 are positioning and fixing members, and each member is composed of two or three members.

FIG. 2A is a cross-sectional view of the positioning and fixing member 4. Reference numeral 4c denotes a spherical or rod-shaped member made of glass, ceramic material, or the like. Through this member 4c,
The member 4a and the member 4b are fitted. On the other hand, FIG.
Here, another example is shown in which the member 4a and the member 4b are directly fitted without the member 4c.

The positioning and fixing member is formed on the first base 1 and the second base 2 in advance, and the first base 1 and the second base 2 are formed.
For example, as shown in FIG. 2A, V-shaped recesses are respectively formed in the positioning and fixing members 4a and 4c so that the positioning can be easily performed, and at the same time, the temporary fixing can be performed without an adhesive material. Then, these two members are fitted to each other with a member 4c made of glass or ceramic in a spherical or rod shape interposed therebetween.

FIGS. 3 and 4 show another configuration example of the present invention. FIG. 3B is a plan view of the image forming apparatus of the present invention (the second base is omitted), and FIG. 3A is a view A of FIG.
FIG. 4 is a cross-sectional view taken along a line A. FIG. 4 is a partially enlarged view of the positioning and fixing member 4 shown in FIG. As shown in FIGS. 3 and 4, either one of the first base 1 and the second base 2 is provided with four rod-shaped members 4a on the base as positioning and fixing members, and a recess is formed by a gap therebetween. Then, it is fitted with a spherical or rod-shaped member 4b made of glass or ceramic provided on the other base.

The planar arrangement of the positioning and fixing member may be inside the container inside the support frame as shown in FIG. 1 or outside the container as shown in FIG. When it is provided in the container, it is also effective in defining the distance between the first base 1 and the second base 2 at the same time.

The object of the present invention can be achieved with three positioning and fixing members as shown in FIG.
It is not limited to individuals. In the case of three pieces, FIG. 1B is used so as to withstand the thermal stress generated in the heating step.
As shown in (1), it is preferable that straight lines connecting the center of the panel and each fixing member are arranged at an inner angle of about 120 degrees, respectively, to have a structure in which thermal stress is dispersed on average.

When the positioning and fixing member is disposed outside the support frame, a plurality of cells are cut out from a large-sized base as shown in FIG. It is possible and advantageous in arrangement. Also,
This is advantageous in that a large-sized member can be set so as to sufficiently withstand thermal stress. Further, after the assembly of the image forming apparatus is completed, the positioning and fixing member may be cut off to form the image forming apparatus.

When used as a vacuum vessel, the vessel (cell) is evacuated by an exhaust pipe (not shown), and after the vacuum is formed, the exhaust pipe is sealed.

The first base 1 is a rear plate made of glass or the like, on which patterns such as electrodes and wirings are formed. Further, in an image forming apparatus using an electron-emitting device, an electron-emitting device is provided. In a plasma display, a partition for limiting a plasma region is provided, and in a reflection type, a phosphor or the like is provided.

The second base 2 is a face plate made of glass or the like, on which patterns such as electrodes and wiring are formed. Further, in an image forming apparatus using an electron-emitting device, a phosphor that emits light by colliding with electrons is arranged. In the plasma display, wiring and the like are provided.

The support frame 3 is made of the same material as the first and second substrates 1 and 2, and a container (cell) is formed by the first and second substrates 1 and 2 and the support frame 3. In an image forming apparatus using an electron-emitting device, the inside is evacuated.
In an image forming apparatus using plasma, gas is sealed. In addition, the support frame 3 may use a printing partition,
Alternatively, it may be integrated with the festival plate or the rear plate, and need not necessarily be a separate member from the first base and the second base. Support frame 3 and first base 1,
The second base 2 is bonded with an adhesive or frit glass.

Next, the assembling process of the method for manufacturing an image forming apparatus according to the present invention will be described with reference to FIG. (1) An electrode, a wiring, an element, a phosphor, and the like, and a positioning and fixing member are previously formed on the first base and the second base. At the same time, the adhesive is used for the first base, the second base,
The positioning fixing member and the support frame are provided at necessary places. (2) The first base and the second base are arranged in an assembling apparatus. Next, the support frame is provided on the base. (3) The positioning and fixing members are fitted to each other, the element forming surface of the first base is opposed to the phosphor forming surface of the second base, and the first base and the second base are interposed via the support frame. Join. (4) Pressure is applied from both the first base and the second base or from one of the first base and the second base by the assembling apparatus. (5) The first substrate, the second substrate, and the like are heated by an assembling apparatus to soften and melt the adhesive, and are heated and pressed for a desired time. (6) Cool and release pressure.

Thus, the container of the image forming apparatus is manufactured. As described above, there is no need to perform special alignment between the first base and the second base, and at room temperature, only by fitting the positioning and fixing member, the first base and the second base can be positioned. Positioning and temporary fixing are performed.

[0031]

(Embodiment 1) A first embodiment of the present invention is shown in FIG.
Is an image forming apparatus using the container having the configuration shown in FIG. In this embodiment, a plurality of surface conduction electron-emitting devices, which are cold cathode electron-emitting devices, are formed on a first substrate, a phosphor is provided on a second substrate, and the effective display area is 5 inches diagonally. A color image forming apparatus having an aspect ratio of 3: 4 was prepared. First, the configuration of the image forming apparatus according to the present embodiment will be described with reference to FIG. 6, and then the manufacturing method will be described. FIG. 6 is a perspective view of the image forming apparatus of the present invention, in which a part of the panel is cut away to show the internal structure.

In FIG. 6, reference numeral 65 denotes a rear plate, 66 denotes a support frame, and 67 denotes a face plate. 65 to 67 form an airtight container for maintaining the inside of the display panel at a vacuum. In assembling the airtight container, it is necessary to seal each member in order to maintain sufficient strength and airtightness for joining.

On the rear plate 65, N × M surface conduction electron-emitting devices 62 are formed. Where N and M
Is a positive integer of 2 or more, and is appropriately set according to the target number of display pixels. For example, in a display device for displaying high-definition television, it is desirable that N is set to 3000 or more and M is set to 1000 or more.
In this embodiment, N = 333 and M = 250.

These N × M surface conduction electron-emitting devices are:
Simple matrix wiring is performed by M row-directional wirings 63 (also referred to as “lower wirings”) and N column-directional wirings 64 (also referred to as “upper wirings”).

Here, the surface conduction electron-emitting device will be described with reference to FIG. FIGS. 7A and 7B are schematic diagrams showing a configuration of a surface conduction electron-emitting device applicable to the image forming apparatus of the present invention. FIG. 7A is a plan view, and FIG. 7B is a cross-sectional view.
7, reference numeral 71 denotes a substrate; 72 and 73, device electrodes;
Is a conductive thin film, and 75 is an electron emitting portion.

The conductive thin film 7 through the device electrodes 72 and 73
By subjecting the conductive thin film 4 to a forming process, the conductive thin film is locally destroyed, deformed, or altered to form an electron emitting portion 75 in a state of being electrically high in resistance. Further, an activation step for significantly improving the emission current is performed. Conductive thin film 74
By applying a voltage to the device and causing a current to flow through the element, electrons are emitted from the above-described electron emitting portion 75 (this is the same as that described in Japanese Patent Application Laid-Open No. Hei 7-235255 described in the related art). In FIG. 6, a fluorescent film 68 is formed on one surface of the face plate 67. Since the present embodiment is a color display device, phosphors of three primary colors of red, green and blue used in the field of CRT are separately applied to a portion of the fluorescent film 68. The phosphors of each color are separately applied in a stripe shape (FIG. 8A) or a matrix shape (FIG. 8B) as shown in FIG. 8, for example, and a black conductor 81 is provided between the phosphors. . The purpose of providing this black conductor is to prevent the display color from being shifted even if there is a slight shift in the irradiation position of the electron beam, to prevent reflection of external light and to prevent a decrease in display contrast, This is to prevent the fluorescent film from being charged up by the electron beam. In the black conductor 81,
Although a material containing graphite as a main component was used, any other material may be used as long as it is suitable for the above purpose.

On the rear plate side surface of the fluorescent film 68, a metal back 69 known in the field of CRT is provided. The purpose of this metal back is to improve the light utilization rate by mirror-reflecting a part of the light emitted from the fluorescent film,
Protecting the fluorescent film from the collision of negative ions, acting as an electrode for applying an electron beam acceleration voltage,
For example, the fluorescent film may function as a conductive path for excited electrons. Such a metal back is formed by forming a fluorescent film 68 on a face plate 67, smoothing the surface of the fluorescent film, and vacuum-depositing Al thereon. When a phosphor material for low voltage is used for the fluorescent film, no metal back is used.

Although not used in the present embodiment, for the purpose of applying an acceleration voltage and improving the conductivity of the fluorescent film, for example, an ITO film is provided between the face plate 67 and the fluorescent film 68.
May be provided as a transparent electrode.

In FIG. 6, Dx1 to Dxm, Dy1 to Dyn, and Hv are electric connection terminals having an airtight structure provided for electrically connecting the display panel to an electric circuit (not shown). Dx1 to Dxm are the row wirings 6 of the multi-electron beam source.
3 and Dy1 to Dyn are column wirings 6 of the multi-electron beam source.
4 and Hv are electrically connected to the metal back 69 of the face plate.

The image forming apparatus to which the present invention is applied has been described. Next, a method for manufacturing the image forming apparatus of the present invention will be described.

Preparation of First Substrate Step-1 An element electrode connected to the lower wiring and the upper wiring was formed on a first substrate 1 in which a silicon oxide film was formed on a blue plate glass by a sputtering method. Subsequently, the lower wiring was formed by screen printing. Next, an interlayer insulating layer between the lower wiring and the upper wiring was formed, and then the upper wiring was formed. Next, after a conductive thin film was formed by a sputtering method, patterning was performed to obtain a desired shape.

Step-2 A frit glass for fixing the support frame was formed at a predetermined position by printing. Further, the positioning fixing member 4
a, 5a and 6a were formed at the positions shown in FIG. The positioning and fixing member previously processed into the shape shown in FIG. 2A was fixed with frit glass. In addition, the positioning fixing member,
L = 4.2mm, l = 2mm, S = 3mm, height 30m
m. The recess is 90 degree V-shaped.

Through the above steps, a surface conduction electron-emitting device, a bonding material for a support frame, a positioning and fixing member, and the like formed by simple matrix wiring on the first substrate 1 were formed.

Preparation of Second Substrate Step 3 A phosphor and a black conductor were formed on a blue glass substrate by a printing method. A smoothing treatment was performed on the inner surface of the fluorescent film, and then Al was deposited using vacuum evaporation or the like to form a metal back.

Step-4 Frit glass for fixing the support frame was formed at a predetermined position by printing. Further, the positioning fixing member 4
b, 5b and 6b were formed at the positions shown in FIG. The positioning and fixing member having the shape shown in FIG. 2A and having been processed in advance to the same size as that used in Step 2 was fixed with frit glass.

Through the above steps, an array of three primary color phosphors, an adhesive for a support frame, a positioning fixing member, and the like were formed on the second substrate.

Step-5 Next, the first and second substrates 1 and 2 were set in a pressurizing device shown in FIG. 9 that are the same as those in FIG. 1 are the same as those in FIG. This pressurizing device includes an upper holder 91, a lower holder 92, a pressurizing means 93, a holder slide guide 94, and the like. The first base 1 is placed on the lower holder 92, and a support frame and a diameter of 2.2 m are provided.
The glass rods 4c, 5c, and 6c having a height of 3.5 mm and a height of 3.5 mm are arranged in the concave portions of the positioning fixing members 4a, 5a, and 6a, respectively.

Next, the positioning member 4b of the second base 2,
5b, 6b are fixed to the positioning and fixing members 4a, 5a of the first base 1.
The second base is set so as to be fitted with a and 6a, respectively. After that, the upper holder 91 is set on the second base 2 through the holder slide guide 94 and is pressed by the pressing means 93.

Step-6 The above-mentioned pressurizing device, the first and second substrates 1 and 2, the support frame and the positioning and fixing member are introduced into a heating furnace and heated.

Step-7 After a desired time, the heating furnace is gradually cooled to harden the frit. Finally, the first and second substrates 1 and 2 to which the support frame was adhered were taken out of the pressing device.

Step-8 The atmosphere in the container completed as described above is evacuated by a vacuum pump through an exhaust pipe (not shown), and after reaching a sufficient degree of vacuum, the outer terminals Dx1 to Dxm and Dy1 A voltage was applied to the conductive thin film through Dyn to form an electron emission portion 75, and then an activation process was performed by introducing acetone gas. Furthermore, after a series of processes, baking was performed at 250 ° C. for 10 hours.

Step-9 Next, after evacuating to a degree of vacuum of about 10 ^-8 Torr at room temperature, the envelope was sealed by heating an exhaust pipe (not shown) by heating it with a gas burner. Finally, gettering was performed by a high-frequency heating method to maintain the degree of vacuum after sealing.

In the image forming apparatus of the present invention completed as described above, each electron-emitting device is provided with terminals Dx1 to Dx outside the container.
The scanning signal and the modulation signal are applied from signal generation means (not shown) through m and Dy1 to Dyn, respectively, to emit electrons, and the metal back 69 is applied through the high voltage terminal Hv.
, A high voltage of 5 kV or more was applied, and the electron beam was accelerated to collide with the fluorescent film 68 to excite and emit light, thereby displaying an image.

As a result, there was no misalignment between the electron-emitting device and the phosphor, and no variation in luminance or color mixing due to the misalignment was observed.

(Embodiment 2) The second embodiment of the present invention differs from Embodiment 1 in the relative position between the positioning and fixing member and the support frame, and the positioning and fixing member is installed outside the support frame of the image forming apparatus. In this example, a plurality of small image forming apparatuses are simultaneously manufactured on a large substrate, and a spacer is provided as an atmospheric pressure resistant member in order to further reduce the weight. FIG.
This will be described with reference to (a) and (b). FIG. 10 is an explanatory view in the middle of manufacturing using a 30-inch substrate to manufacture a 10-inch small-sized image forming apparatus. 101 is a rear plate, 102 is a face plate, 103 is a support frame, 10
4 is a positioning and fixing member, 105 is a spacer, and 106 is a wiring.

The size of the effective display area of the small-sized image forming apparatus is an aspect ratio of 3: 4 and a diagonal of 10 inches. The positioning and fixing member is arranged outside the support frame and outside the container of the small-sized image forming apparatus, and is further installed at a position where it does not overlap with the wiring lead-out portion. Note that the positioning and fixing member is L =
4 mm, l = 2 mm, S = 3 mm, height 3.5 mm, and the concave portion is V-shaped. On the other hand, the glass member arranged in the concave portion had a diameter of 2 mm and a height of 4 mm. These are the first
And the second bases 1 and 2 were formed of the same material as glass.

Next, a method for manufacturing the image forming apparatus of the present embodiment will be described.

Production of First Substrate Step-1 A device electrode, a lower wiring, an interlayer insulating layer and an upper wiring are formed in this order on a 30-inch glass substrate shown in FIG. It was produced by a printing method. The conductive thin film was prepared by applying a droplet of an aqueous solution of an organometallic compound by an inkjet method, and then baking the substrate at 350 ° C. to thermally decompose the organometallic compound to form a conductive film of a metal oxide. The difference from the first embodiment is that four sets of wirings and the like having the same form are manufactured. In the second embodiment, the step of patterning the conductive thin film is not required since the application is performed by the ink jet method.

Step-2 Four sets of frit glass for fixing the support frame were formed at predetermined positions by printing. Further, a total of four sets of three positioning fixing members were formed for each small image forming apparatus at the positions shown in FIG. The positioning and fixing member is shown in FIG.
The workpiece 104a previously processed into the shape shown in FIG. 1 was fixed to the first substrate 1 with frit glass. In FIG. 11, FIG.
1 (a) is a sectional view taken along line XX of FIG.
FIG. 11B is an XY plane cross-sectional view of FIG. 10.

Through the above steps, four sets of the surface conduction electron-emitting devices, the adhesive for the support frame, the positioning and fixing members, etc. were formed on the first substrate 1 by simple matrix wiring.

Production of Second Substrate Step-3 A transparent conductor, a phosphor and a black conductor were formed on a 30-inch blue plate glass substrate by a printing method. A smoothing treatment was performed on the inner surface of the fluorescent film, and then Al was deposited using vacuum evaporation or the like to form a metal back.

Step-4 Four sets of frit glass for fixing the support frame were formed at predetermined positions by printing. Further, the positioning and fixing member 104b was formed at the position shown in FIG. The positioning and fixing member had a shape shown in FIG. 11 and was previously processed to the same size as that used in Step 2, and was fixed with a frit. Further, the spacer was bonded to the black conductor of the face plate with a frit.

Through the above steps, four sets of striped phosphors of three primary colors, an adhesive for a support frame, positioning and fixing members, spacers, etc. were formed on the second substrate.

Production of Electron Source and Assembly of Container Next, the first base 1 and the second base 2 are put into an image forming apparatus assembling apparatus schematically shown in FIG. The image forming apparatus assembling apparatus includes a first substrate loading chamber, a baking chamber, a forming chamber, an activation chamber, a stabilizing chamber, an assembling chamber, a second substrate loading chamber, a baking chamber, a slow cooling chamber, and an unloading chamber. Consists of a load room. Each chamber is an independent vacuum chamber, where the exhaust pump and vacuum gauge required for vacuum are arranged, and the forming chamber and the activation chamber are respectively
A probe needle, a power supply, and the like are arranged so that a forming step and an activation step can be performed by simultaneously applying a voltage to each wiring. Further, a gas source is connected to the activation chamber so that a gas for the activation step can be introduced. The baking room and the stabilizing room are further provided with a heater so that heating can be performed. Also, in the assembly room,
A pressurizing device conceptually similar to that of Example 1 was installed, and the first and second substrates 1 and 2 were installed in the pressurizing device. Substrates and containers that have completed each process in each chamber are transported to the next process chamber.

Step-5 The second substrate was introduced into the load chamber for the second substrate and evacuated.

Step-6 The second substrate is transported to the baking chamber for the second substrate,
Baking was performed at 00 ° C. for 1 hour.

Step-7 The first substrate was introduced into the load chamber for the first substrate and evacuated.

Step-8 The first substrate is transported to a baking chamber for the first substrate,
Baking was performed at 50 ° C. for 1 hour.

Step-9 The first substrate was transported to the forming chamber, and the forming step was performed line by line, and forming was performed on all lines.

Step-10 The first substrate was transported to the activation chamber, the activation step was performed for each line, and the activation step for all lines was performed. Acetone was introduced as an activating gas at 10 ⁻⁵ Pa, and an electric current was supplied for 30 minutes to perform an activating step. After the activation was completed, the air was exhausted.

Step-11 The first substrate was transported to the stabilization chamber, and after evacuating to 10 ^-9 Pa,
Degassing was performed by heating at 230 ° C. for 10 hours. Degassing of acetone, water, oxygen and the like adsorbed on the first substrate was performed.

Step-12 The first and second substrates 1 and 2 are transported to the assembly chamber and
Heat degassing was performed at 0 ° C. for 10 minutes. At this time, the frit glass set on the first base was softened. At this time, the degree of vacuum had reached 10 ^-9 Pa. Next, the first
The substrate and the second substrate were aligned with the positioning and fixing member as a target, joined via a support frame, and pressed. Thus, the display panel (container) was assembled.

Step-13 After the display panel was transported to the annealing room, it was gradually cooled to room temperature.

Step-14 After the display panel was transported to the unloading chamber, the display panel was taken out.

Step-15 The display panel was cut with a dicing saw and divided into four small display panels.

A drive circuit was installed on the small display panel manufactured in the same manner as in the first embodiment, and display was performed.
Display could be performed without any problems caused by misalignment such as color mixing.

(Embodiment 3) The third embodiment of the present invention is an example in which a field emission device which is a kind of a cold cathode electron emission device is used for an electron emission device unlike the first and second embodiments, and is positioned and fixed. This is an example in which a member is installed outside a support frame of an image forming apparatus, and a spacer is installed as an atmospheric pressure resistant member in order to further reduce the weight.

First, the field emission device will be described with reference to FIG. 13, and then the image forming apparatus will be described with reference to FIG. In FIG. 13, 131 is a rear plate, 1
32 is a face plate, 133 is a cathode, 134 is a gate electrode, 135 is an insulating layer between the gate and the cathode, 136 is a focusing electrode, and 139 is an image forming member. In FIG. 14, 141 is a rear plate, 142 is a face plate, 143 is a support frame, 144, 145, and 146 are positioning and fixing members, and 147 is a spacer.

The size of the effective display area of the image forming apparatus is an aspect ratio of 3: 4 and a diagonal of 10 inches. The positioning and fixing members 144, 145, and 146 are disposed outside the container outside the support frame, and the angle formed by each of the positioning and fixing members is 120 °. The positioning and fixing members are four 1m in diameter
m, 1 mm long glass rods 144a, 145a, 146a
Was adhered to the first substrate, and a concave portion was formed by the gap. On the other hand, rod-shaped members 144b, 145b, 146b
Was 2 mm in diameter and 1.5 mm in length, and was adhered to a second base to form a convex portion. These members were formed of ceramics, which is a material having substantially the same thermal expansion coefficient as the first and second substrates. The gap between the first base and the second base was 1.5 mm.

Next, a method of manufacturing the image forming apparatus of this embodiment will be described.

Production of First Substrate Step-1 Using blue sheet glass as a substrate, concave portions were formed at desired positions around the substrate with positioning and fixing members 144a, 145a, and 146a. Next, as shown in FIG. 13, a cathode, a gate electrode, a wiring, and the like were produced by a known method. The cathode material was Mo.

Step-2 A frit glass for fixing the support frame was formed at a predetermined position by printing.

Through the above steps, a field emission type electron-emitting device having a simple matrix wiring on the first substrate, an adhesive for a support frame, a positioning fixing member, and the like were formed.

Production of Second Substrate Step 3 A transparent conductor, a phosphor and a black conductor were formed on a blue glass substrate by a printing method. A smoothing treatment was performed on the inner surface of the fluorescent film, and then Al was deposited using vacuum evaporation or the like to form a metal back.

Step-4 Using blue sheet glass as a substrate, at a desired position around the substrate,
The convex portions were formed by the positioning and fixing members 144b, 145b, and 146b. Frit glass for fixing the support frame was formed at a predetermined position by printing. Further, the spacer was bonded to the black conductor with a frit.

Through the above steps, a striped phosphor of three primary colors, an adhesive for a support frame, a positioning and fixing member, a spacer, and the like were formed on the second substrate.

Step-5 Next, as in Example 1, the first and second substrates were
It installed in the pressurizing device shown in FIG.

The first base is placed on the lower holder, and the support frame is placed. Next, the positioning and fixing projections of the second base are set so as to fit with the positioning and fixing recesses of the first base. Thereafter, the upper holder was placed on the second substrate through the holder slide guide, and pressurized by pressurizing means.

Step-6 The containers of the pressure device and the image forming device were introduced into a heating furnace and heated.

Step-7 After a desired time, the heating furnace was gradually cooled to cure the frit. Finally, the container for the image forming apparatus to which the first and second bases and the support frame were bonded was taken out by the pressing device.

Step-8 The atmosphere in the container completed as described above is evacuated by a vacuum pump through an exhaust pipe (not shown), and after a sufficient degree of vacuum is reached, the atmosphere inside the container is discharged to the electron-emitting device through a terminal outside the container. A voltage was applied to perform aging. After further aging, 2
Baking was performed at 50 ° C. for 10 hours.

Step-9 Next, the chamber was evacuated to a degree of vacuum of about 10 ^-8 Torr at room temperature.
Weld by heating the exhaust pipe (not shown) with a gas burner,
The envelope was sealed. Finally, gettering was performed by a high-frequency heating method to maintain the degree of vacuum after sealing.

In the image forming apparatus of the present invention completed as described above, each electron-emitting device emits electrons by applying a signal from a signal generating means (not shown) through a terminal outside the container. An image is displayed by applying a high voltage of several kV or more to a metal back or a transparent electrode (not shown) through the high voltage terminal Hv, accelerating the electron beam, colliding with the fluorescent film, and exciting and emitting light. At this time, there was no problem caused by alignment such as color mixing, and the alignment could be easily performed.

[0094]

The present invention comprises a first base, a second base, and a support frame for supporting the first base and the second base, and a plurality of support frames between the first base and the second base. According to the image forming apparatus of the present invention, a positioning and fixing member is provided, and a positioning surface of the positioning and fixing member is perpendicular to a plane of the base. The plurality of positioning and fixing members facilitate positioning and fixing at or near room temperature. As a result, it is not necessary to use a complicated alignment device, and the first base and the second base are aligned with high accuracy. Further, even when the spacing between the first and second bases at which the positioning and fixing members are arranged is different from each other, the first base and the second base are highly accurate without lowering the planar positioning accuracy. Positioning can be realized.

A plurality of positioning and fixing members are provided with the support frame and the first frame.
According to the image forming apparatus of the present invention provided inside or outside the container constituted by the base and the second base, the plurality of positioning fixing members and the support frame are separated from each other in position. Therefore, the degree of freedom of the shapes of the plurality of positioning and fixing members is increased, and the planar positioning accuracy is reduced even when the positions of the first and second bases where the positioning and fixing members are disposed are different from each other. Without this, highly accurate positioning of the first base and the second base can be realized.

According to the image forming apparatus of the present invention, the plurality of positioning and fixing members can be arranged so that the load on the base is evenly distributed, and the thermal expansion of the first base and the second base can be achieved. Can be dispersed, and highly accurate alignment can be maintained during the assembly process.

The method for manufacturing an image forming apparatus of the present invention is for positioning and fixing the first base and the second base at room temperature, and includes the steps of heating at a high temperature for softening and solidifying the bonding material. Since alignment is not performed in the cooling step, highly accurate and easy alignment can be performed. Further, an alignment device corresponding to a high temperature is not required, and the device can be simplified.

As described above, according to the image forming apparatus and the method of manufacturing the same of the present invention, a high-precision assembly can be realized without requiring a complicated alignment apparatus, so that an inexpensive and high-quality image forming apparatus can be realized. .

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of main components of an image forming apparatus according to the present invention.

FIG. 2 is an explanatory diagram of a positioning and fixing member of the image forming apparatus of the present invention.

FIG. 3 is an explanatory diagram of main components of the image forming apparatus of the present invention.

FIG. 4 is an explanatory diagram of a positioning and fixing member of the image forming apparatus of the present invention.

FIG. 5 is an assembly process diagram of the image forming apparatus of the present invention.

FIG. 6 is a perspective view of the image forming apparatus of the present invention.

FIG. 7 is an explanatory diagram of a surface conduction electron-emitting device in the image forming apparatus of the present invention.

FIG. 8 is an explanatory diagram of a fluorescent film in the image forming apparatus of the present invention.

FIG. 9 is an explanatory diagram of an image forming apparatus assembling apparatus (pressing apparatus) used in the manufacturing method of the present invention.

FIG. 10 is a diagram showing a state before separation of the small image forming apparatus in the manufacturing method of the present invention.

FIG. 11 is an explanatory diagram of a positioning and fixing member of the image forming apparatus of the present invention.

FIG. 12 is an explanatory diagram of an image forming apparatus assembling apparatus used in the manufacturing method of the present invention.

FIG. 13 is an explanatory diagram of a field emission device used in the image forming apparatus of the present invention.

FIG. 14 is an explanatory diagram of an image forming apparatus of the present invention.

FIG. 15 is an assembly process diagram of a conventional image forming apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st base | substrate 2 2nd base | substrate 3 Support frame 4,5,6 Positioning fixing member 41 Frit 62 Surface conduction type emission element 63 Row direction wiring (lower wiring) 64 Column direction wiring (upper wiring) 65 Rear plate 66 Support Frame 67 Face plate 68 Fluorescent film 69 Metal back 71 Substrate 72, 73 Device electrode 74 Conductive thin film 75 Device emission part 81 Black conductor 91 Upper holder 92 Lower holder 93 Pressing means 94 Holder slide guide 101 Rear plate 102 Face plate 103 Support frame 104 Positioning and fixing member 105 Spacer 106 Wiring 131 Rear plate 132 Face plate 133 Cathode 134 Gate electrode 135 Insulating layer between gate and cathode 136 Focusing electrode 139 Image forming member 141 Rear plate 142 Face plate 143 Lifting frame 144, 145, 146 positioned and fixed member 147 spacer

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI H01J 11/02 H01J 11/02 B 29/86 29/86 Z 31/12 31/12 C (72) Inventor Masahiro Tagawa Tokyo 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) The inventor Shinya Koyama 3-30-2, Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (13)

[Claims] A first base, a second base, and a support frame supporting the first base and the second base; and a plurality of support frames between the first base and the second base. An image forming apparatus, comprising a positioning fixing member, wherein a positioning surface of the positioning fixing member is substantially perpendicular to a plane of the base. 2. The image forming apparatus according to claim 1, wherein the first base, the second base, and a support frame for supporting between the first base and the second base constitute a vacuum container. 3. The image forming apparatus according to claim 1, wherein a plurality of positioning fixing members are provided in an inner region of the support frame. 4. The image forming apparatus according to claim 1, wherein a plurality of positioning and fixing members are disposed outside the support frame. 5. The image forming apparatus according to claim 1, wherein three positioning and fixing members are provided, and an angle between them is substantially 120 degrees. 6. The positioning and fixing member includes a first base member and a second base member each having a recess or formed on a surface substantially perpendicular to the plane of the base, and these members have recesses with respect to each other. The image forming apparatus according to any one of claims 1 to 5, wherein the image forming apparatus is fitted and fitted via a spherical or rod-shaped member disposed in the recess. 7. The positioning and fixing member includes a first base member and a second base member having a member having or forming a concave portion and a member having or forming a convex portion on a plane substantially perpendicular to the plane of the base member. The image forming apparatus according to claim 1, wherein these members are fitted with each other. 8. The positioning and fixing member includes a member having or forming a concave portion and a member having or forming a convex portion on the plane of the substrate, which are disposed on the first substrate and the second substrate, respectively. The image forming apparatus according to claim 1, wherein the image forming apparatuses are fitted with each other. 9. The image forming apparatus according to claim 1, wherein the first base is provided with an electron-emitting device, and the second base is provided with an image forming member.
The image forming apparatus according to any one of claims 1 to 8, wherein 10. The image forming apparatus according to claim 9, wherein the image forming member has a phosphor. 11. The image forming apparatus according to claim 9, wherein the electron-emitting device is a cold cathode electron-emitting device. 12. The method for manufacturing an image forming apparatus according to claim 1, wherein a positioning fixing member is provided on the first base and the second base. Arranging a support frame on a base or a second base;
Joining the first base and the second base via the support frame by fitting the positioning and fixing member, pressing the first base and / or the second base, and pressing the first base and / or the second base between the first base and the second base And a step of softening a joining member provided between the second base and the support frame, and a step of solidifying the joining member. 13. The step of arranging a support frame on the first base or the second base, and the step of fitting the first base and the second base together with the positioning and fixing member and joining them via the support frame, 13. The method according to claim 12, wherein the method is performed at room temperature.