JP2000251774A - Airtight container, image display device using it, and their manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase assembly precision and provide a device with high productivity by arranging a plurality of positioning fixing members for first and second base substances and a support member, and using a fixing member of the support member as each fixing member of the first and second base substances. SOLUTION: A first base substance 1 serves as a rear plate or a substrate, and a second base substance 2 serves as a display surface including a display region shown by a vertical thin line. A support frame 3 seals the first base substance 1 and the second base substance 2, and a support member 4 maintains between the first base substance 1 and the second base substance 2. The support member 4 is constituted with a spacer 5, an spacer interval defining member 6, a support member connecting through bar 7, a fixing member 8 of the support member placed at an end of the support member connecting through bar 7. The fixing member 8 of the support member abuts to a fixing member 9 of the base substance 1 adhered onto the first base substance 1 and a fixing member 10 of the base substance 2 adhered onto the second base substance 2, and engages with the fixing member 9 of the base substance 1 and the fixing member 10 of the base substance 2, and functions as a positioning fixing member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtight container comprising a first base, a second base, a support member and a support frame for holding and determining the distance between the substrates, an image forming apparatus using the airtight container, and The present invention relates to a manufacturing method for forming the airtight container and a manufacturing method for forming an image forming apparatus.

[0002]

2. Description of the Related Art In recent years, an active matrix type liquid crystal has been used as a flat panel type image forming apparatus instead of a CRT. Also, the active matrix type liquid crystal is not self-luminous, and performs display using a backlight. However, since the light use efficiency is low,
A brighter image forming apparatus has been desired.

For this reason, electrons emitted from cold cathode electron-emitting devices such as a plasma display, an electric field (FE) type electron-emitting device, and a surface conduction type electron-emitting device (for example, JP-A-7-235255) are accelerated. The development of a self-luminous image forming apparatus that performs display by causing a phosphor to emit light upon collision has been put into practical use. These flat-panel image forming apparatuses have been increasing in area to several tens of inches. In particular, in these image forming apparatuses, a highly accurate and easy assembling method is desired.

[0004] The above-mentioned flat type image forming apparatus and the like have an external structure called an envelope (airtight container), and the inside of the envelope in a vacuum is maintained in a reduced pressure (vacuum) state to emit electrons. Since the element is operated, a getter and a support member having an anti-atmospheric pressure structure are required to maintain the degree of vacuum. In particular, large and thin image forming apparatuses, which have been in demand in recent years, have a structure in which a support member, which is a spacer for supporting atmospheric pressure, is disposed inside an envelope as an anti-atmospheric pressure structure.

FIG. 11 shows a liquid crystal display device as an example of a method of assembling these flat plate type image forming apparatuses. The structure of the liquid crystal display device described in JP-A-5-232451 will be described as an example.

The positioning of a pair of liquid crystal glass substrates 1 and 2 (hereinafter, referred to as a first substrate (body) and a second substrate (body)) will be described. The first substrate and the second substrate are provided with an electrode pattern, a positioning pattern, and a sealing material (S11, S12). These first and second substrates are set in a positioning device (S14). By the positioning device, the first substrate and the second substrate are heated to soften the sealing material and keep the temperature. Next, the first substrate and the second substrate are aligned via an alignment pattern (S15). Next, the first substrate and the second substrate are pressurized (S16), and are simultaneously aligned (S17). Finally, after maintaining the pressurized state for a predetermined time, the pressurization is released (S18), and the assembled liquid crystal cell is removed from the alignment device.

In this manner, even if a positional shift occurs in a high temperature state, the alignment is performed, so that the first substrate and the second substrate can be aligned with high accuracy. The publication also describes, as a conventional technique, a method of performing temporary fixing with a photocurable adhesive after positioning at room temperature, and further heating and curing the sealing material.

[0008]

SUMMARY OF THE INVENTION In a flat plate type image forming apparatus in which an electron beam generated from the above-mentioned electron-emitting device collides with a phosphor and emits light, the alignment between the first base and the second base is insufficient. If the support member as a spacer is not installed between the electron-emitting devices, it will protrude over the pixel and appear as a shadow on the screen, so the positioning accuracy of the support member is strict, and when the support member is positioned and fixed, It is necessary to arrange the first and second substrates with an accuracy of 100 μm or less, respectively.

In addition, since it is necessary to maintain a high degree of vacuum inside the vacuum vessel of the envelope, in the case of the support member, the room temperature alignment of the organic adhesive is performed because the inside of the envelope is kept at a high vacuum. I can't temporarily fix it. Therefore, the adhesive disposed between the first substrate and the second substrate uses a glass bonding material, and the softening temperature of the glass bonding material is a high temperature of 400 degrees or more. In this case, or when a heater is installed in the pressing jig, the alignment device is required to have high-temperature specification accuracy, which results in a complicated process and a problem such as a decrease in productivity.

An object of the present invention is to provide a flat plate type image forming apparatus which achieves high assembling accuracy of the flat plate type image forming apparatus and has high productivity, and a method of manufacturing the same.

[0011]

An airtight container according to the present invention comprises a first base and a second base, the first base and the second base.
A plurality of positioning and fixing members on the first base, the second base and the support member in a hermetic container which is opposed to the support frame and the at least one support member with a gap therebetween. Is provided, and the fixing member of the support member serves as each of the fixing members of the first base and the second base.

Further, the airtight container is a vacuum container comprising the first base, the second base, the support frame for supporting between the first base and the second base, and the support member. It is characterized by consisting of. At least one restraining direction of the plurality of positioning and fixing members in the airtight container has an angle of 90 degrees with respect to the restraining directions of the other positioning and fixing members in a plane of the first base and the second base. It is characterized by.

[0013] The plurality of positioning and fixing members are characterized in that they are formed of spherical members or rod-like members with concave portions provided in the first base member, the second base member and the support member.

The present invention also provides an airtight container comprising a first base, a second base, an inner support member for supporting between the first base and the second base, and a support frame outside the first base and the second base. In the method of manufacturing an image forming apparatus, (1) determining the positions of the first base, the second base, and the support member, and arranging a fixing member at each joint portion (2) the first base Alternatively, a step of disposing the support frame on the second base (3) A step of determining the positions of the first base, the second base and the support member, and joining them via the fixing member (4) A) a step of pressurizing the first base or the second base (5) a step of softening a joining member provided on the first base and the second base or the support frame; Steps of fixing the joining member Characterized in that it is produced from.

Further, the present invention is a method for manufacturing an inexpensive and high-precision panel instead of hot alignment, and includes a rear plate, a face plate, a support frame,
Positioning is performed by a fixing portion using a fitting member installed on the atmospheric pressure-resistant support member, and this positioning fixing portion is installed in the X-axis direction or the Y-axis direction on the display region side in the support frame, Alternatively, it is installed in two directions of the X-axis direction and the Y-axis direction.

[Operation] In the image forming apparatus of the present invention, the first base and the second base are supported by a support frame for supporting the first base and the second base and at least one support member. A plurality of positioning fixing members are arranged on the first base, the second base and the support member, and the fixing members are fitted to each other. According to the airtight container, it is possible to provide a flat type image forming apparatus with high assembling accuracy and high productivity, and a method of manufacturing the same.

In addition, in the airtight container, at least one restraining direction of the plurality of positioning and fixing members is 90% in a restraining direction of the other positioning and fixing members and a plane of the first base and the second base. It has a degree angle. According to the airtight container, positioning accuracy in the plane direction of the base is improved.

Further, the plurality of positioning and fixing members are characterized in that they are formed of spherical and rod-shaped members with concave portions provided in the first and second substrates and the supporting member. According to the airtight container, a concave portion and a spherical shape, or
By positioning by fitting the rod-shaped members, positioning by the wedge effect becomes possible, and the center position does not shift even in a high temperature state, and the positioning accuracy is further improved.

The recess provided on the first base and the second base is formed by a gap between two rod-shaped members provided on the first base and the second base. It is characterized by the following. According to the airtight container, the rod-shaped member is made up of the first base,
By disposing the rod-shaped member in close contact with the second substrate, the height of the rod-shaped member from the first substrate surface and the second substrate surface can be accurately reproduced. Therefore, the accuracy of the interval between the first base and the second base is further improved.

Further, the plurality of positioning and fixing members are characterized by comprising concave portions and convex portions provided on the first base, the second base and the support member. According to the airtight container, the degree of freedom is improved when designing the positioning and fixing member.

The hermetic container of the present invention is not limited to an image forming device in which an electron-emitting device such as a cathode electron-emitting device is provided on a first base, but also to an image forming apparatus using a liquid crystal or an image using a plasma. It can also be used for forming equipment.

According to the hermetic container and the method of manufacturing an image forming apparatus using the hermetic container having the following steps, the first base, the second base, and the plurality of positioning and fixing members are aligned at room temperature. Since it is not necessary to perform positioning in the heating and cooling steps for softening and solidifying the joining material,
Highly accurate and easy positioning is possible. further,
Since the apparatus can be simplified without the need for expensive alignment positions corresponding to high temperatures, the production cost can be reduced.

In the method of manufacturing an image forming apparatus using the hermetic container, the steps of determining the positions of the first base, the second base and the support member at room temperature, disposing the fixing member, Arranging the support frame on the second base, positioning the second base, the second base and the support member, and joining via the fixing member; and adding the first base or the second base. Pressing, softening the joining member provided on the first base and the second base or the support frame, solidifying the joining member, positioning the first base and the second base, and fixing the fixing member. The step of bonding is at room temperature.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments according to the present invention will be described.
This will be described in detail with reference to the drawings.

First Embodiment According to the present invention, a plurality of electron-emitting devices such as a liquid crystal or a plasma, particularly, a field electron-emitting device and a surface conduction electron-emitting device are arranged, and an image forming member such as a phosphor emits light. The present invention provides a novel configuration and a manufacturing method of a flat panel image forming apparatus for displaying images.

First, an example of a main structure of the airtight container of the present invention and an image forming apparatus using the airtight container is shown in FIGS.
This will be described with reference to FIG.

FIG. 1A is a plan view of an airtight container of the present invention and an image forming apparatus using the airtight container, and FIG.
It is -A sectional drawing. FIG. 1B is a view in which a part of the base 2 is omitted for the sake of explanation. In FIG. 1, reference numeral 1 denotes a first base serving as a rear plate or a substrate, 2 denotes a second base which also serves as a display surface including a display area indicated by a vertical thin line, and 3 denotes a first base 1 and a second base 2 Is a supporting member for maintaining a space between the first base 1 and the second base 2. The support member 4 includes a spacer 5, a spacer interval defining member 6,
It comprises a support member connecting penetrating rod 7 and a fixing member 8 of the supporting member 4 disposed at one end of the connecting penetrating rod 7. Fixing member 8
Are in contact with the fixing member 9 adhered on the base 1 and the fixing member 10 adhered on the base 2, and fit with the fixing members 8, 9 and the fixing member 10 to function as a positioning fixing member.

FIG. 2 shows the fixing members 8 and 9 and the fixing members 10.
FIG. 2 is a partially enlarged view of the cross-sectional view taken along line AA of FIG. 1B only, in which a fixing member 8 is a single rod-shaped glass or ceramic material or the like, and fixing members 9 and 10 are respectively fixed on a base. It is a glass or ceramic material, such as two rods, which are bonded side by side in parallel with the member 8. The adhesive 21 is frit glass that bonds the fixing members 9 and 10 to the base 1 and the base 2, respectively.

FIG. 3 is a partially enlarged view of another example of the positioning and fixing member of the present embodiment. The fixing member 31 connected to the supporting member is a single rod-shaped glass or ceramic material. The fixing member 32 adhered on the base 1 and the fixing member 33 adhered on the base 2 are made of a block-shaped glass or ceramic material having one V-shaped groove. Adhesive 34
Is a frit glass for fixing the fixing members 32 and 33 to the base 1 and the base 2 and bonding the fixing members 32 and 33 to the base 1 and the base 2, respectively. The fixing member 31 is in contact with the V-shaped grooves of the fixing member 32 adhered on the base 1 and the fixing member 33 adhered on the base 2, and is engaged with the fixing members 31, 32 and the fixing member 33. Thus, it functions as a positioning and fixing member.

On the other hand, the base 1 is a rear plate made of glass or the like, and a pattern such as an electrode and a wiring is formed on one surface. Further, in an image forming apparatus using an electron-emitting device, an electron-emitting device is provided. In a plasma display, a partition for limiting a plasma region is provided, and in a reflection type, a phosphor or the like is provided.

The base 2 is a face plate made of glass or the like, and a pattern such as an electrode and a wiring is formed on one surface. Furthermore, in an image forming apparatus using an electron-emitting device, a phosphor that emits light by colliding with electrons is arranged. In the plasma display, wiring and the like are provided.

The support frame 3 is made of the same material as the bases 1 and 2, and the bases 1, 2 and the support frame 3, support members 4
Constitutes a vacuum container. In an image forming apparatus using an electron-emitting device, the inside is evacuated. In an image forming apparatus using plasma, gas is sealed.

The support frame 3 may use a printed partition wall or may be integrated with a face plate or a rear plate, and is not necessarily a separate member of the first base and the second base. No need to be. The support frame 3 and the base 1 and the base 2 are bonded with an adhesive or frit glass.

The support member 4 is a member made of glass, ceramic, or the like, and is an anti-atmospheric pressure support member that holds the space between the substrates 1 and 2 together with the support frame 3. The support member 4 is disposed at one end of the spacer 5, the spacer interval defining member 6, the support member connecting penetrating rod 7, and the connecting penetrating rod 7.
It is composed of a fixing member 8 of a supporting member.

The spacer 5 is a strip-shaped member, has a length longer than the width of the image forming area, and has holes at both end portions through which the supporting member connecting penetrating rods 7 can pass. The spacer 5 is the base 1
And the base 2, and has a strength that can withstand even if the inside of the container including the base 1, the base 2, and the support frame 3 is evacuated.

The spacer interval defining member 6 has a cylindrical or rectangular parallelepiped shape, has a through hole larger than the diameter of the supporting member connecting through bar 7, and has an outer diameter larger than the through hole of the spacer 5.

The support member connecting penetrating rod 7 penetrates the spacers 5 and the spacer interval defining members 6 alternately, and has a fixing member 8 of a support member joined at one end.

The fixing members 9 and 10 are previously fixed to the bases 1 and 2 by an adhesive such as frit, respectively, and have a function of fitting by sandwiching the fixing member 8 of the support member 4 therebetween. This makes it easy to align the base 1 with the base 2 and the cylindrical members of the fixing members 8, 9, 10 of the support member 4 in the vertical direction, and at the same time, temporarily fixes even without an adhesive or the like.

As shown in FIG. 3, conical concave portions are formed in the fixing members 9 and 10, and fitting is performed by sandwiching the fixing member 8 of a supporting member made of a spherical glass, ceramic or the like between the two members. By doing so, in this case, the gap between the bases is set by a member such as a spherical or rod-shaped glass or ceramic, so that the distance between the bases 1 and 2 can be defined with high accuracy.

The number of fittings by the fixing members 8, 9, 10 is not limited to two as shown in FIG. By arranging a large number of sets, it is possible to sufficiently withstand the thermal stress generated in the heating step.

Further, the fixing member 8 of the supporting member does not necessarily need to be disposed at the end of the supporting member connecting penetrating rod 7, and can be replaced with one of the spacer interval defining members 6. In this case, since the installation area of the support fixing member 8 is not required for a portion other than the support member 4, the size of the image forming apparatus can be reduced. Furthermore, although the support member connecting through-rod 7 and the spacer interval defining member 6 are arranged at both ends of the spacer 5, it is not always necessary to arrange them at both ends. In this case, since the number of the supporting member connecting through-rod 7 and the number of the spacer interval defining members 6 are halved, the production cost can be reduced.

When the container is used as an airtight container, the inside of the container is evacuated from an exhaust pipe (not shown), and after the vacuum is formed, the exhaust pipe is sealed.

[Method of Manufacturing Image Forming Apparatus] Next, a part of a method of manufacturing an airtight container of the present invention and an image forming apparatus using the airtight container will be described with reference to FIG. (1) An electrode, a wiring, an element, a phosphor, etc., and fixing members 9 and 10 are formed in advance on the base 1 and the base 2 (S1, S2, S1).
S3). At the same time, the adhesive is applied to the bases 1, 2, or
Alternatively, it is disposed on the support frame 3. (2) The bases 1 and 2 are arranged in an assembly device (S4).
Further, the support frame 3 and the support member 4 are provided on the base 1. (3) The fixing members 8, 9, and 10 are fitted by bonding the bases 1 and 2, the support frame 3, and the support member 4 (S5). (4) The first substrate and the second substrate are pressurized by the assembling apparatus (S6). (5) The bases 1, 2 and the like are heated by the assembling apparatus to flow the adhesive, and are heated and pressed under a desired time (S7). (6) Cool. (7) Release the pressure (S8). Thus, the airtight container and the container of the image forming apparatus using the airtight container are manufactured. As described above, there is no special alignment between the bases 1 and 2 and the support member 4, and at room temperature, only the positioning and the fixing members are fitted.
Positioning and temporary fixing between the bases 1 and 2 and the support member 4 are performed, and an airtight container is formed via the support frame 3.

[0044]

(Embodiment 1) A first embodiment of the present invention is shown in FIG.
Is an image forming apparatus using the container having the configuration shown in FIG. In the present embodiment, a plurality of surface conduction electron-emitting devices, which are cold cathode electron-emitting devices, are formed on a first substrate as electron-emitting devices, and a phosphor is provided on a second substrate. Was a diagonal of 5 inches, and a color image forming apparatus having an aspect ratio of 3: 4 was prepared. First, an image forming apparatus according to the present invention will be described with reference to FIG. 5, and then a manufacturing method thereof will be described.

FIG. 5 is a perspective view of the image forming apparatus used in the embodiment, in which a part of the panel is cut away to show the internal structure.

In the figure, 55 is a rear plate, 56 is a support frame, 57 is a face plate, and 55 to 57 form an airtight container for maintaining the inside of the display panel at a vacuum. When assembling the airtight container, it is necessary to seal the joint of each member to maintain sufficient strength and airtightness.

On the rear plate 55, N × M surface conduction emission devices 52 are formed. Here, N and M are positive integers of 2 or more, and are appropriately set according to the target number of display pixels. For example, in a display device for displaying high-definition television, N = 3000, M
It is desirable to set a number equal to or greater than 1000. In this embodiment, N = 333 and M = 250. The N
× M surface-conduction emission devices are composed of M row-direction wirings 53
(Sometimes referred to as upper wiring) and N column-directional wirings 5
4 (may be referred to as a lower wiring).

The state of the phosphor formed on the second base will be described later with reference to FIG. FIGS. 6A and 6B are schematic diagrams showing the configuration of a surface conduction electron-emitting device to which the present invention can be applied. FIG. 6A is a plan view and FIG. 6B is a cross-sectional view.

In FIG. 6, 61 is a substrate, 62 and 63 are device electrodes, 64 is a conductive thin film, and 65 is an electron emitting portion.

By forming the conductive thin film 64 through the device electrodes 62 and 63, the conductive thin film 64 is formed.
Is locally destroyed, deformed or altered to form an electron emitting portion 5 in an electrically high-resistance state, and furthermore, an activation step for significantly improving the emission current is performed as described above for the surface conduction type electron emitting device. The device electrodes 62 and 63 are formed on the conductive thin film 64.
By applying a voltage through the element and passing a current through the element,
The electrons are emitted from the above-mentioned electron emitting section 65. The surface conduction electron-emitting device is the same as that disclosed in Japanese Patent Application Laid-Open No. Hei 7-235255.

As shown in FIG. 5, a fluorescent film 58 is formed on the lower surface of the face plate 57. Since this embodiment is a color display device, phosphors of three primary colors of red, green, and blue used in the field of CRT are separately applied to a portion of the fluorescent film 58. The phosphors of the respective colors are separately applied in stripes as shown in FIG. 7A, for example, and black conductors 71 are provided between the stripes of the phosphors. The purpose of providing the black conductor 71 is to prevent the display color from being shifted even if there is a slight shift in the irradiation position of the electron beam, and to prevent the reflection of external light to prevent a decrease in display contrast. And preventing charge-up of the fluorescent film by the electron beam. Black conductor 7
Although graphite was used as a main component in 1, any other material may be used as long as it is suitable for the above purpose.

The method of applying the phosphors of the three primary colors is not limited to the stripe arrangement shown in FIG. 7A, but may be, for example, a delta arrangement as shown in FIG. Other arrangements may be used.

When a monochrome display panel is manufactured, a monochromatic phosphor material may be used for the phosphor film 48, and a black conductive material may not be necessarily used.

Further, a metal back 59 known in the field of CRT is provided on the surface of the fluorescent film 58 on the rear plate side. The purpose of providing the metal back 59 is to improve the light utilization rate by mirror-reflecting a part of the light emitted from the fluorescent film 58, to protect the fluorescent film 58 from the collision of negative ions, and to increase the electron beam acceleration voltage. To act as an electrode for applying an electric field, or to act as a conductive path for the excited electrons of the fluorescent film 58. The metal back 59 is a fluorescent film 58
Was formed on the face plate substrate 57, the surface of the fluorescent film was smoothed, and Al was formed thereon by vacuum evaporation. When a fluorescent material for low voltage is used for the fluorescent film 48, the metal back 59 is not used.

Although not used in this embodiment, for the purpose of applying an acceleration voltage or improving the conductivity of the fluorescent film, a transparent material made of, for example, ITO is used between the face plate substrate 47 and the fluorescent film 58. Electrodes may be provided.

Also, Dx1 to Dxm and Dy1 to Dy
n and Hv are electric connection terminals having an airtight structure provided for electrically connecting the display panel and an electric circuit (not shown). Dx1 to Dxm are electrically connected to the row wiring 53 of the multi-electron beam source, Dy1 to Dyn are connected to the column wiring 54 of the multi-electron beam source, and Hv is electrically connected to the metal back 59 of the face plate.

The basic configuration of the image forming apparatus according to the present invention has been described.

Next, a method for manufacturing the image forming apparatus of the present invention will be described.

<< Preparation of Base 1 >> (Step-1) A lower wiring was formed by screen printing on a substrate 1 in which a silicon oxide film was formed on a soda lime glass by a sputtering method. Next, an interlayer insulating layer is formed between the lower wiring and the upper wiring. Further, an upper wiring was formed. Next, device electrodes 62 and 63 connected to the lower wiring and the upper wiring were formed. next,
After the conductive thin film 64 is formed by the sputtering method, it is patterned to have a desired form.

(Step-2) A frit glass for fixing the support frame 56 was formed at a desired position by printing. Further, the fixing member 9 was formed at the position shown in FIG. The fixing member 9 previously processed into the shape shown in FIG. 2 was dried at room temperature with a ceramic adhesive and fixed. The fixing member 9 had a cylindrical diameter of 0.5 mm in radius and 4 mm in length.

Through the above steps, a surface-conduction type emission device, a bonding material for a support frame, a fixing member, and the like formed by simple matrix wiring on the substrate 1 were formed.

<< Preparation of Base 2 >> (Step-3) A phosphor 58 and a black conductor were formed on a blue plate glass substrate as a second base by a printing method. A smoothing treatment was performed on the inner surface of the fluorescent film, and then Al was deposited by vacuum evaporation or the like to form a metal back 57.

(Step-4) A frit glass for fixing the support frame 56 was formed at a desired position by printing. Further, the fixing member 10 was formed at the position shown in FIG. The fixing member 10 having the shape shown in FIG. 2 and having been processed in advance to the same size as that used in step 2 was fixed with a ceramic adhesive.

Through the above steps, the phosphors of the three primary colors are arranged on the substrate 2 in the form of stripes, the adhesive for the support frame, the fixing members 9 and 10 and the like are formed.

{Preparation of Support Member} (Step-5) One end of the fixing member 8 is bonded to one end of the support member connecting through-bar 7 with a crystalline frit so as to be perpendicular to the support member connecting through-bar 7. Two sets were made. still,
The supporting member connecting penetrating rod 7 has a diameter of 0.5 mm and a length of 110 m.
m, and the fixing member 8 is 2 mm in diameter and 3 mm in length.
mm cylindrical ceramic part.

As shown in FIG. 1, the spacer 5 and the spacer interval defining member 6 are alternately inserted into the supporting member connecting through-bar 7 to which the two fixing members 8 are adhered, and the supporting member 4 is assembled.
The spacer 5 has a length of 100 mm, a height of 2 mm, and a width of 20 mm.
It is a glass member of 0 μm and has a hole of 0.55 mm in diameter at both ends penetrating in the width direction. Spacer spacing regulating material 6 is 12.5 mm long, 1.5 mm outside diameter, 0.55 mm inside diameter
Is a cylindrical ceramic part.

(Step-6) Next, the substrates 1 and 2 were set on the conceptual diagram of the pressurizing device shown in FIG. The components having the same reference numerals as those in FIG. 1 are the same as those in FIG. The pressing device includes an upper holder 81, a lower holder 82, a pressing means 83, a holder slide guide 84, and the like.

The base 1 is placed on the lower holder 82, and the fixing members 8 of the support frame 3 and the supporting member 4 are positioned by fitting into the recesses formed by the two fixing members 9 of the base 1. Next, the fixing member 10 of the base 2 is installed so as to fit with the fixing member of the support member 4. After that, the upper holder 81 is set on the base 2 through the holder slide guide 84 and pressurized by the pressurizing means 83, and the container of the pressurizing device and the image forming apparatus is introduced into a heating furnace and heated.

(Step-7) After the desired pressurizing treatment time, the heating furnace is cooled and the frit glass is hardened. Finally, the container for the image forming apparatus to which the bases 1, 2, the support frame 3, and the support member 4 were bonded was taken out from the pressurizing device.

(Step-8) The atmosphere in the container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after reaching a sufficient degree of vacuum, the terminal Dox outside the container.
A voltage was applied to the electron-emitting device through 1 to Doxm and Doy1 to Doyn, and the electron-emitting portion 75 was formed by performing a forming step and an activating step on the conductive thin film 74. Further, after a series of processes, at 250 degrees,
Baking was performed for 10 hours.

(Step-9) Next, at room temperature, the air was evacuated to a degree of vacuum of about 10 −8 torr, and an exhaust pipe (not shown) was welded by heating with a gas burner to seal the envelope. Stopped.

Finally, in order to maintain the degree of vacuum after sealing,
Getter treatment was performed by a high-frequency heating method.

In the image display device of the present invention completed as described above, the scanning signal and the modulation signal are respectively supplied to the respective electron-emitting devices through signal terminals (not shown) through the external terminals Dx1 to Dxm and Dy1 to Dyn. , The electrons are emitted, and several kV is applied to the metal back 59 or a transparent electrode (not shown) through the high voltage terminal Hv.
The above high pressure is applied to accelerate the electron beam, and the fluorescent film 58
Then, the image was displayed by exciting and emitting light.

As a result, there was no misalignment of the electron-emitting device and the phosphor, and no luminance variation or color mixing caused by the misalignment was observed.

(Embodiment 2) The second embodiment of the present invention is different from the first embodiment in that an electron-emitting device uses a field emission device which is a kind of cold cathode electron-emitting device, and a fixing member. Are different from each other, and are perpendicular to the surfaces of the bases 1 and 2.

First, the field emission device will be described with reference to FIG. 9, and then the image forming apparatus will be described with reference to FIG. In FIG. 9, 91 is a rear plate,
Reference numeral 92 denotes a face plate, 93 denotes a conical cathode, 94 denotes a gate electrode, 95 denotes an insulating layer between the gate and the cathode, and 96 denotes a focusing electrode. In FIG. 10, 101 is a rear plate, 102 is a face plate, 103 is a support frame, 104 is a support member, 105 is a spacer, 106 is a spacer interval defining member, 107 is a fixing member auxiliary material of the support member 104, and 108 is Fixing member for supporting member 104, 109
Is a fixing member of the rear plate 101, and 110 is a fixing member of the face plate 102.

The size of the effective display area of the image forming apparatus is 10 inches diagonally with an aspect ratio of 3: 4. The positioning fixing members 108 and 110 are V blocks having a height of 2.5 mm, a width of 3 mm, a depth of 2 mm, a depth of 1.5 mm, and a V groove having an angle of 90 degrees. The fixing member 109 is a cylindrical member having a diameter of 2 mm and a height of 2.5 mm. These were formed of ceramics, which is a material having substantially the same thermal expansion coefficient as the rear plate 101 and the face plate 102, which are blue glass. The gap between the substrates 1 and 2 is 3
mm.

Next, a method for manufacturing the image forming apparatus of the present invention will be described.

<< Preparation of Base 1 >> (Step-1) Using a blue plate glass as the rear plate 101
The fixing member 109 was bonded to a desired position in the periphery with a crystallization frit. Next, the cathode, gate electrode, wiring, and the like in FIG. 9 were formed by a known method. The cathode material was MO.

(Step-2) A frit glass for fixing the support frame 103 was formed at a desired position by printing.

Through the steps described above, the field emission type electron-emitting device, the adhesive for the support frame 103, and the fixing member 109 were formed on the rear plate 101 by simple matrix wiring.

<< Preparation of Substrate 2 >> (Step-3) A transparent conductor, a phosphor and a black conductor were formed on a face plate 102 made of blue plate glass by a printing method. A smoothing process is performed on the inner surface of the fluorescent film.
1 was deposited using vacuum evaporation or the like to form a metal back.

(Step-4) The fixing member 110 was bonded to a position corresponding to the fixing member 109 around the face plate 102 with a crystallization frit. Frit glass for fixing the support frame was formed at a desired position by printing.

By the above steps, the face plate 10
In 2, phosphors of three primary colors were arranged in a stripe pattern, and an adhesive for a support frame, a positioning member, a spacer, and the like were formed.

{Preparation of Supporting Member} (Step-5) A fixing member auxiliary member 107 bonded to the surface of the fixing member 108 opposite to the V-groove surface with a crystallization frit is used to form 2
I made a set. In addition, the fixing member auxiliary member 107 has one side of 2.
It is a rectangular parallelepiped glass of 5 mm and a length of 230 mm.

As shown in FIG. 10, the supporting member 104 is assembled by alternately bonding the spacers 5 and the spacer interval defining members 6 between the two fixing member auxiliary members 107 with a ceramic adhesive while drying at room temperature. The spacer 5 is a glass member having a length of 230 mm, a height of 3 mm, and a width of 200 μm. Spacer spacing defining material 106 is 12.5 m long
m, a ceramic part having an outer diameter of 2 mm.

(Step-6) Next, similarly to the first embodiment, the rear plate 101 and the face plate 102 are
Was installed in the conceptual diagram of the pressurizing device shown in FIG. It consists of an upper holder, a lower holder, a pressing means, and a holder slide guide.

The rear plate 101 is set on the lower holder, and the support frame 103 and the support member 104 are arranged. At this time, the fixing member 108 of the support member 104 is
1 It is arranged so as to fit with the fixing member 109. Next, the V-groove portion of the positioning fixing member 110 of the face plate 102 is installed so as to fit with the cylinder of the fixing member 109 of the rear plate 101. Thereafter, the upper holder is placed on the base 2 through the holder slide guide, and is pressurized by pressurizing means.

(Step-7) The pressure device and the container of the image forming apparatus are introduced into a heating furnace and heated.

(Step-8) After a desired time, the heating furnace is gradually cooled to harden the frit. Finally, the container for the image forming apparatus to which the substrates 1 and 2 and the support frame were adhered was taken out from the pressing device.

(Step-9) The atmosphere in the container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after a sufficient degree of vacuum is reached, electrons are emitted through a terminal outside the container. The device was prepared by applying a voltage to the device and performing aging. Furthermore, after aging is completed, at 250 degrees,
Baking was performed for 10 hours.

(Step-10) Next, at room temperature, the gas is evacuated to a degree of vacuum of about 10 −8 torr, and an exhaust pipe (not shown) is welded by heating with a gas burner to seal the envelope. Was done.

Finally, in order to maintain the degree of vacuum after sealing,
A getter (not shown) was subjected to a getter process by a high-frequency heating method.

In the image display device of the present invention completed as described above, each electron-emitting device is connected to a terminal outside the container.
A signal is applied from a signal generating means (not shown) to emit electrons, and a high voltage of several kV or more is applied to a metal back or a transparent electrode (not shown) through a high voltage terminal Hv to accelerate the electron beam. , Hit the fluorescent film,
An image was displayed by excitation and light emission. At this time, no color mixing or the like occurred, and the alignment could be easily performed even under a high temperature condition.

[0095]

The airtight container of the present invention comprises a first base and a second base.
An airtight container arranged to face each other with a gap therebetween by a support frame supporting at least one of the base, the first base, and the second base, and at least one support member; A plurality of positioning fixing members are arranged on the second base and the supporting member, and the fixing members of the supporting member are fitted with the fixing members of the first base and the second base. And According to the hermetic container, it has become possible to provide a flat type image forming apparatus with high assembling accuracy and high productivity and a method of manufacturing the same.

In addition, at least one restraining direction of the plurality of positioning and fixing members in the hermetic container is at least 90 in the restraining directions of the other positioning and fixing members and the planes of the first base and the second base. It has a degree angle. According to the airtight container, the positioning accuracy in the plane direction of the base can be improved.

[0097] The plurality of positioning and fixing members are provided in a hermetically sealed container characterized by being formed of a spherical or rod-shaped member with concave portions provided in the first base, the second base and the supporting member. According to this, by positioning by fitting a concave portion and a spherical or rod-shaped member, positioning by a wedge effect becomes possible, and even at a high temperature state, the center position does not shift and the positioning accuracy can be further improved. .

The recess provided on the first base and the second base is formed by a gap between two rod-like members provided on the first base and the second base. It is characterized by the following. According to the airtight container, the rod-shaped member is made of the first base,
By arranging the rod-shaped member in close contact with the second substrate, the height of the rod-shaped member from the first substrate surface and the second substrate surface can be accurately reproduced. Therefore, it is possible to further improve the interval accuracy between the first base and the second base.

Further, according to the hermetic container, the plurality of positioning and fixing members include the first base, the second base, and the concave and convex portions provided on the support member. In designing the positioning and fixing member, the degree of freedom can be improved.

The airtight container of the present invention can be used not only for an image forming device in which an electron-emitting device such as a cathode electron-emitting device is disposed on a first substrate, but also for an image forming apparatus using a liquid crystal or an image using a plasma. It can also be used for forming equipment.

According to the method for manufacturing an airtight container having the following steps and an image forming apparatus using the airtight container, the first base, the second base and the plurality of positioning and fixing members are kept at room temperature. Alignment and softening of bonding material,
Since it is not necessary to perform positioning in the heating and cooling steps for solidification, highly accurate and easy positioning can be performed. Furthermore, since an expensive alignment apparatus corresponding to a high temperature is not required and the apparatus can be simplified, the production cost can be reduced.

Locating the first base, the second base and the support member at room temperature, and disposing the fixing member;
Arranging a support frame on the first base or the second base, positioning the first base, the second base and the support member, and joining via a fixing member; the first base or Pressurizing the second base, softening the first base and the second base or the bonding member disposed on the support frame, solidifying the bonding base, the first base and the second base Since the method includes the steps of positioning and fixing via a fixing member, it is possible to manufacture an airtight container at room temperature.

As described above, according to the hermetic container and the image forming apparatus using the hermetic container and the method of manufacturing the same according to the present invention, high-precision assembly can be realized without a complicated alignment device. A high-quality airtight container and an image forming apparatus using the airtight container have become feasible.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main configuration of an image forming apparatus according to the present invention;
It is a top view.

FIG. 2 is an example of a positioning and fixing member of the present invention.

FIG. 3 is an example of a positioning and fixing member of the present invention.

FIG. 4 is an assembly example of the image forming apparatus of the present invention.

FIG. 5 is a perspective view of the image forming apparatus according to the first exemplary embodiment.

FIG. 6 shows a cold cathode surface conduction electron-emitting device used in Example 1.

FIG. 7 is an example of a fluorescent film used in Example 1.

FIG. 8 illustrates an image forming apparatus assembling apparatus (pressing apparatus) used in the first exemplary embodiment.

FIG. 9 is a diagram of a field emission device used in Example 3.

FIG. 10 is a sectional view and a plan view of the image forming apparatus used in the second embodiment.

FIG. 11 is an assembly example of a conventional image forming apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st base | substrate 2 2nd base | substrate 3 support frame 4 support member 5 spacer 6 spacer space | interval defining member 7 support member connection penetrating rod 8 support member fixing member 9 base 1 fixing member 10 base 2 fixing member 31 support member Fixing member 32 Fixing member of base 1 33 Fixing member of base 2 34 Adhesive 52 Surface conduction type emitting element 53 Row direction wiring 54 Column direction wiring 55 Rear plate 56 Support frame 57 Face plate 58 Fluorescent film 59 Metal back 61 Substrate 62 , 63 device electrode 64 conductive thin film 65 electron emission portion 71 black conductor 81 upper holder 82 lower holder 83 pressurizing means 84 holder slide guide 91 rear plate 92 face plate 93 cathode 94 gate electrode 95 gate / cathode insulating layer 96 Focusing electrode 101 Rear plate 102 Face plate DOO 103 fixing member of the fixing member 110 face plate of the fixing member 109 rear plate of the fixing member auxiliary member 108 supporting members of the support frame 104 supporting member 105 spacer 106 spacer space defining member 107 support member

Claims (13)

[Claims] 1. A first base and a second base are opposed to each other with a gap therebetween by a support frame for supporting the first base and the second base and at least one support member. In the hermetic container, a plurality of positioning fixing members are arranged on the first base, the second base, and the support member, and the fixing member of the support member is provided between the first base and the second base. An airtight container characterized by being each of the fixing members. 2. The airtight container according to claim 1, wherein the first base and the second base are arranged in the vicinity of respective outer peripheral portions and in the center of each of the supporting members. An airtight container characterized by holding a space between the substrates in an airtight manner through the airtight container. 3. The airtight container according to claim 1, wherein a plurality of the positioning fixing members are provided. 4. The airtight container according to claim 3, wherein the plurality of positioning and fixing members have at least one restraining direction.
An airtight container characterized by having an angle of 90 degrees between the constraint direction of the other positioning and fixing member and the plane of the first base and the second base. 5. The airtight container according to claim 1, wherein the plurality of positioning and fixing members are concave portions provided in the first base, the second base, and the support member. And a spherical or rod-shaped member. 6. The airtight container according to claim 1, wherein the recess provided on the first base and the second base includes the first base and the second base. An airtight container characterized by a gap between two rod-shaped members provided on two substrates. 7. The airtight container according to claim 1, wherein the plurality of positioning and fixing members are provided on the first base, the second base, and the support member. An airtight container comprising a concave portion and a convex portion. 8. An image forming apparatus using the airtight container according to claim 1, wherein an electron-emitting device is provided on the first base, and an electron-emitting device is provided on the second base. An image forming apparatus provided with an image forming member. 9. The image forming apparatus according to claim 8, wherein the image forming member is a phosphor. 10. The image forming apparatus according to claim 8, wherein said electron-emitting device is a cold cathode electron-emitting device. 11. A method for manufacturing an image forming apparatus comprising a first base, a second base, and a support frame for supporting the first base and the second base, wherein: (1) the first base; Determining the positions of the base, the second base, and the support member, and arranging a fixing member at each joint; (2) arranging the support frame on the first base or the second base; (3) determining the positions of the first base, the second base and the support member, and joining them via the fixing member; (4) bonding the first base or the second base Pressurizing step (5) softening a joining member provided on the first base and the second base or the support frame; and (6) fixing the joining member. Of an image forming apparatus characterized by the following: Construction method. 12. The method according to claim 11, wherein the step (2) and the step (3) are performed.
The step (d) is performed at room temperature. 13. A method for manufacturing an airtight container comprising a first base, a second base, and a support frame supporting between the first base and the second base, wherein: (1) the first base Determining the positions of the second base and the support member, and arranging a fixing member at each joint; and (2) arranging the support frame on the first base or the second base. (3) deciding the positions of the first base, the second base and the support member, and joining them via the fixing member; and (4) the first base and / or Or (5) softening a bonding member provided on the first substrate and the second substrate or the support frame; (6) a bonding member Characterized by being manufactured from each step of fixing and Manufacturing method of an airtight container.