JPH10254375A - Picture forming device and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the flat plate type picture forming device and its manufacturing method in which the device and the phospher surface are hard to be damaged, the assembling is precisely and easily done and the productivity is high. SOLUTION: A spacer 7, a supporting frame 3 as well as positioning members 4, 5 and 6 are provided between first and second base bodies 1 and 2. The length of the spacer 7 is made shorter than the length of the frame 3 or the positioning members. The members 4, 5 and 6 are constructed, for example, by the pair of members having recessed parts and the sphere or round bar shaped members arranged in the space formed by pasting the pair of the members.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a flat plate type image forming apparatus and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, an active matrix type liquid crystal has been used as a flat panel type image forming apparatus instead of a CRT. Active matrix type liquid crystal
Instead of the self-luminous type, display is performed using a backlight. However, since the light use efficiency is low, a brighter image forming apparatus has been desired. For this reason, electrons emitted from cold-cathode electron-emitting devices such as plasma displays, field electron-emitting devices, and surface conduction electron-emitting devices (for example, disclosed in Japanese Patent Application Laid-Open No. 7-235255) are accelerated and collided. The development of a self-luminous image forming apparatus that performs display by causing a phosphor to emit light is being put to practical use. These flat-panel image forming apparatuses are increasing in area to several tens of inches, and a highly accurate and easy assembling method is desired.

In a flat plate type image forming apparatus, an element on a first base and an image forming member on a second base are:
Pixels of several tens μ to several hundreds μ are formed in correspondence with 1. In this case, if the alignment between the element and the image forming member is insufficient, variations in the luminance of the pixels occur, and in the case of color, Degradation of image quality occurs, such as mixing of RGB colors.
For this reason, high precision is required for the alignment between the element on the first base and the image forming member on the second base.

Japanese Patent Application Laid-Open No. Hei 5-232451 discloses an assembling method of a liquid crystal display device as an example of a method of manufacturing a flat image forming apparatus. The contents will be described below with reference to FIG. First, the first substrate and the second substrate are aligned. These substrates are provided with an electrode pattern, a positioning pattern, and a sealing material. These first and second substrates are installed in an alignment device,
Heated and kept warm. Next, the first substrate and the second substrate are aligned via an alignment pattern. Next, the first substrate and the second substrate are pressurized and aligned at the same time. Finally, after maintaining the pressurized state for a predetermined time, the pressurization is released, and the assembled liquid crystal cell is removed from the alignment device. By doing so, it is said that the positioning can be performed with high accuracy even if a positional shift occurs in a high temperature state. Further, the above-mentioned publication also describes a method of performing temporary fixing using a photocurable adhesive after positioning at room temperature, and further heating and curing the sealing material.

[0005]

However, the above method is
It had the following problems. That is, in the above method, the first substrate and the second substrate are heated at a high temperature, and the pressure is applied while softening the adhesive disposed between the first substrate and the second substrate. After the first substrate and the second substrate are aligned with each other, by solidifying the adhesive,
The first substrate and the second substrate are aligned. here,
The alignment is performed in a high-temperature bath or by installing a heater in a pressing jig. For this reason, the alignment apparatus is required to have high-precision specification accuracy, and the process becomes complicated, resulting in a problem of reduction in productivity. On the other hand, as pointed out in the above-mentioned publication, the manufacturing method based on room temperature alignment and temporary fixing also causes problems such as displacement of the adhesive due to softening of the adhesive.

On the other hand, in an image forming apparatus in which an electron beam generated from the electron-emitting device collides with a phosphor to emit light,
Further, since it is necessary to constitute a vacuum container, the first
The bonding material corresponding to the adhesive disposed between the first substrate and the second substrate is bonded using a glass material so as to maintain a vacuum. However, since the softening temperature of the organic adhesive is about 150 ° C. and the temperature at the time of assembly is 400 ° C. or higher, it is very difficult to perform highly accurate alignment and assembly. In addition, since the first substrate and the second substrate have different coefficients of thermal expansion, the temperature distribution in the substrate may cause a decrease in positioning accuracy or the generation of stress, and the vacuum container may be broken.

Further, in order to reduce the weight of the vacuum vessel, a support called an atmospheric pressure-resistant spacer is disposed between the first base and the second base, thereby reducing the thickness of the material of the vacuum vessel. However, in order to prevent the pixels from being hindered, the spacer needs to be set within a width of a black conductor between phosphors provided on the base 2 described later. The shape of the spacer can be a columnar shape, a flat shape, or the like, but in the case of a cylindrical shape, its diameter needs to be equal to or less than the width of the black conductor in the case of a flat shape. Yes, it needs to be several tens to several hundreds μm. For this reason,
During assembly, the device may be broken due to the difference in thermal expansion between the first base and the second base. There is also a problem that the phosphor surface is damaged.

An object of the present invention is to provide a flat-plate image forming apparatus which assembles these flat-plate image forming apparatuses with high precision and has high productivity, and a method of manufacturing the same.

[0009]

An image forming apparatus according to the present invention for solving the above-mentioned problems has a first base and a second base, and a first base and a second base are provided between the first base and the second base. To the spacer,
It has a support frame and an alignment member, and the length of the spacer is shorter than the length of the support frame or the alignment member. Therefore, the positioning and fixing can be easily performed at or near room temperature by the positioning member disposed between the first base and the second base, so that there is no need to use a complicated alignment device, The first base and the second base can be positioned with high accuracy. Further, since the length of the spacer is shorter than the height of the support frame or the positioning member, the image forming apparatus can be assembled without contacting the spacer with the second base. Therefore, the device is not destroyed by the difference in thermal expansion between the first base and the second base, and the phosphor surface is not damaged. The number of positioning members is usually two or more.

Here, the positioning member in the present invention has a pair of members provided with a concave portion, and the surfaces provided with the concave portions of the pair of members are bonded together and formed by the concave portions of the pair of members. A structure having a spherical or round bar-shaped member in the space formed.

Further, the positioning member according to the present invention comprises:
Two round bar-shaped members (a) arranged on the first substrate at a predetermined interval;
The two round bar-shaped members (b) arranged on the substrate described above, and the spherical shape arranged between the two round bar-shaped members (a) and the two round bar-shaped members (b) Alternatively, a structure having a round bar-shaped member may be employed.

Further, the positioning member of the present invention may have a structure in which a member provided with a concave portion and a member provided with a convex portion are fitted.

Further, the positioning member according to the present invention comprises:
It may be arranged inside a region surrounded by the first base, the second base, the spacer, and the support frame, or may be arranged outside. Since the positioning member and the support frame are separated from each other in position, the degree of freedom of the shape of the positioning member is increased, and the first base and the second positioning and the definition of the interval can be defined with high precision. It can be carried out.

Further, the first base, the second base, the spacer, and the support frame may constitute a vacuum container.

It is preferable that the positioning members according to the present invention are disposed substantially at the vertices of a regular polygon. For example, three positioning members may be disposed at the vertices of a regular triangle. By doing so, the load is distributed on average, so that the stress due to the difference in thermal expansion between the first base and the second base is also dispersed, and highly accurate alignment can be performed. Because you can.

In the image forming apparatus of the present invention, not only liquid crystal but also an electron-emitting device such as a cold cathode electron-emitting device is provided on a first base, and an image forming member such as a phosphor is provided on a second base. The present invention can also be applied to a vacuum vessel or a plasma display vessel of an installed image forming apparatus.

The method for manufacturing an image forming apparatus according to the present invention includes the following steps. (A) a first step of disposing a component of the positioning member on the first substrate and / or the second substrate; and (B) a step of disposing the spacer and the spacer on the first substrate or the second substrate. Second step of disposing a support frame (C) Third step of joining the first base and the second base via the positioning member (D) The first base and the second base A fourth step (E) of softening the first base, the second base, and the joining member provided on the support frame; and (F) a sixth step of solidifying the joining member. Step In the present invention, in at least a step after the fourth step, the pressure of a container constituted by the first base, the second base, the spacer, and the support frame is adjusted to a pressure outside the container. Preferably, the inside and outside of the container are It is more preferable that the same degree of vacuum.

In the fourth step, it is preferable that the place where the first base and / or the second base is pressed is a back surface of the place where the support frame is provided, and the support frame is provided. More preferably, the back surface of the location and the back surface of the location where the alignment member is provided.

According to the present invention, the flat plate type image forming apparatus has a high assembling accuracy, and more particularly, the flat plate type image forming device with high image quality and high productivity which hardly causes breakage of the spacer and damage of the phosphor. An apparatus and a method for manufacturing the same are provided.

According to the method of manufacturing an image forming apparatus of the present invention, the first substrate or the second substrate is aligned and fixed at room temperature, and a high-temperature heating and cooling step for softening and solidifying the bonding material. In this case, since no alignment is performed, highly accurate and easy alignment can be performed. Furthermore, an alignment device corresponding to a high temperature is not required, and the device can be simplified.

As described above, according to the image forming apparatus and the method of manufacturing the same of the present invention, high-precision assembly can be realized without using a complicated alignment apparatus, so that an inexpensive and high-quality image forming apparatus can be provided. realizable.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the present invention, a plurality of electron-emitting devices such as a liquid crystal and a plasma, particularly, a field electron-emitting device and a surface conduction electron-emitting device are arranged, and an image forming member such as a phosphor emits light to display. An object of the present invention is to provide a novel configuration and a manufacturing method of a flat plate type image forming apparatus.

First, an example of a main configuration of the image forming apparatus of the present invention will be described with reference to the drawings. FIG. 1A is a cross-sectional view taken along the line AA of the plan view (FIG. 1B) of the image forming apparatus of the present invention. FIG. 2A is a partially enlarged view of the positioning member 4. The positioning member 4 includes the constituent members 4-1 and 4-
2, 4-3. Spherical or rod-shaped glass, ceramic material, or the like is used as the constituent member 4-3. on the other hand,
In FIG. 2B, there is no component 4-3, and the component 4-
1, an example in which the component members 4-2 are directly fitted. Also,
FIG. 3 shows another configuration example of the invention. FIG. 3 (a)
FIG. 3A is a plan view of the image forming apparatus of the present invention, and FIG.
It is A sectional drawing. FIG. 4 is a partially enlarged view of the positioning member 4 of FIG.

The base 1 is a rear plate made of glass or the like, on which patterns such as electrodes and wirings are formed.
Further, in an image forming apparatus using an electron-emitting device, an electron-emitting device is provided. In a plasma display, a partition for limiting a plasma region is provided, and in a reflection type, a phosphor or the like is provided.

The base 2 is a face plate made of glass or the like, on which patterns such as electrodes and wirings are formed. Furthermore, in an image forming apparatus using an electron-emitting device, a phosphor that emits light by colliding with electrons is arranged. In the plasma display, wiring and the like are provided.

The support frame 3 is made of the same material as the bases 1 and 2, and the base 1, 2 and the support frame 3 constitute a container. In an image forming apparatus using an electron-emitting device, the inside is evacuated. In an image forming apparatus using plasma, gas is sealed. Note that the support frame 3 may use a printed partition wall, or may be integrated with a face plate or a rear plate, and need not necessarily be a separate member from the first base and the second base. Absent.

The support frame 3 and the base 1 and the base 2 are bonded with an adhesive or frit glass.

The positioning members 4, 5, and 6 are formed on the bases 1 and / or 2 in advance.
As shown in FIG. 2 (a), a conical concave portion is provided in the positioning member so that the positioning can be easily performed, and at the same time, the temporary fixing can be performed without an adhesive or the like. A spherical or round bar-shaped glass or ceramic component member 4-3 fits between them. Further, as shown in FIG. 4, a concave portion is formed as a positioning member for the bases 1 and 2 by a gap between two rod-shaped members provided on the base, and similar to the case of FIG. Glass, spherical, rod-like,
It is fitted by a member such as ceramic. In this case, since the distance between the bases is set by a spherical or rod-shaped member made of glass, ceramic, or the like, the height can be precisely defined.

The positioning member may be arranged in the container inside the support frame as shown in FIG. 1, or may be arranged outside the container as shown in FIG. In the case of the inside of the container, it is also effective to define the distance between the base 1 and the base 2 at the same time. Further, the number of the positioning members may be three as shown in FIG. 3, but is not limited to three. In the case of three, as shown in FIG. 1B, a structure is arranged at the apex of an equilateral triangle so as to withstand the thermal stress generated in the heating step, and the thermal stress is dispersed evenly. Is preferred. In addition, the arrangement outside the support frame is advantageous in terms of arrangement because a plurality of cells can be cut out from a large-area substrate or can be installed outside the external drawer wiring of each image forming apparatus. In addition, it is advantageous that a large member can be set so as to sufficiently withstand thermal stress. Further, after assembly is completed at the image forming apparatus stage, the alignment members 4, 5, and 6 are cut off to constitute the image forming apparatus. May be.

The spacer 7 is a support for providing a structure capable of withstanding the atmospheric pressure when the inside of the container of the image forming apparatus is evacuated or when a low-pressure gas is filled like a plasma display. The spacer may be in the form of a column, a flat plate, a whirl, or the like. The material constituting the spacer is a glass, an organic polymer, a ceramic, or a semiconductor having a secondary electron emission coefficient of about 1 on the surface thereof, a semiconductor material such as Si, CrO ₂ , CuO, etc., which is close to 1, and a metal oxide. Are laminated.

When used as a vacuum vessel, the inside of the vessel is evacuated from an exhaust pipe (not shown), and after the vacuum is formed, the exhaust pipe is sealed. When introducing a gas, the gas is introduced and sealed after evacuation.

Next, the structural relationship between the first base, the second base, the support frame, the positioning member, and the spacer which constitute the container of the image forming apparatus of the present invention will be described. In the present invention, the length of the spacer is shorter than the length of at least one of the support frame and the positioning member. The image forming apparatus container is pressurized by atmospheric pressure, and FIG.
As shown in (1), the first substrate and the second substrate come into contact with the spacer, the positioning member, and the support frame, and become curved. As shown in the figure, it is preferable that the height of the image display area is defined by the length of the spacer.

Next, an example of a method for manufacturing the image forming apparatus of the present invention will be described with reference to FIG. (1) An electrode, a wiring, an element, alignment members 4, 5, 6 and the like are formed on the base 1 and the base 2 in advance. At the same time, the adhesive for the support frame is disposed on the base 1. (2) The electrodes, wirings, phosphors, positioning members 4, 5, 6 and the like are formed on the base 2 in advance. At the same time, an adhesive is provided on the base 2. (3) The bases 1 and 2 are set on a pressurizing device. (4) A support frame and a spacer are provided on the base 1. In the case where the spacer is provided on the base 2, the spacer is bonded in advance with a glass frit or the like. (5) The positioning members 4, 5, and 6 are fitted respectively. (6) The first substrate and the second substrate are pressed by the assembling apparatus. (7) The bases 1, 2 and the like are heated by the assembling apparatus to flow the adhesive, and are heated and pressed for a desired time. (8) Cool. (9) Release the pressure.

Thus, the container portion of the image forming apparatus is manufactured. In addition, a step for forming an electron-emitting device is appropriately inserted into the above-described manufacturing process. The pressurizing device used in the present invention will be described with reference to FIG. FIG. 6A is an example of a pressing device used in the present invention, and FIG. 6B is a plan view of an upper holder of the pressing device used in the present invention. The pressing device used in the present invention includes an upper holder 61, a lower holder 62, a pressing means 63, a holder slide guide 64
And so on. In addition, the same code | symbol as FIGS. 1-4 shows the same thing. At least one of the upper and lower holders 61 and 62 has at least one of the support frame and the positioning member pressed, and a region 8 in which the spacer is arranged is cut out so as not to press the spacer. Therefore, the base 2 is partially pressurized by the pressurizing means provided on the base 2 through the upper slide through the holder slide guide. The pressurizing method is not limited to the pressurizing device as long as partial pressurization can be performed uniformly.

In at least the steps after the step (4) of the steps of the method for manufacturing an image forming apparatus, it is preferable that the pressure inside the container is equal to or higher than the pressure outside the container. Further, by setting at least one of the support frame and the positioning member as a pressurized portion, it is possible to avoid contact between the base 1 and the spacer during the above process, and to damage the phosphor provided on the base 2, Can be prevented from being damaged by stress.

As described above, according to the present invention, no special operation is required for the positioning of the substrates 1 and 2, and the substrate 1 is simply fitted at room temperature by fitting the positioning member. And temporary fixing between the two.

[0037]

【Example】

[Embodiment 1] An image forming apparatus according to a first embodiment of the present invention includes the configuration shown in FIG. In the present embodiment, a plurality of surface conduction electron-emitting devices, which are cold cathode electron-emitting devices, are formed on a first substrate as electron-emitting devices, and a phosphor is provided on a second substrate. Was 15 inches diagonally, and a color image forming apparatus having an aspect ratio of 3: 4 was prepared. First, an image forming apparatus according to the present invention will be described with reference to FIG. 7, and then a manufacturing method thereof will be described.

FIG. 7 is a perspective view of the image forming apparatus used in the embodiment, in which a part of the panel is cut away to show the internal structure.

In the figure, 75 is a rear plate, 76 is a support frame, 77 is a face plate, and 75 to 77 form an airtight container for maintaining the inside of the display panel at a vacuum. When assembling the airtight container, it is necessary to seal the joint of each member to maintain sufficient strength and airtightness. Reference numeral 70 denotes a flat spacer, which is a spacer provided with conductivity.

On the rear plate 75, N × M surface conduction electron-emitting devices 72 are formed. (N and M are 2
The above positive integer is set as appropriate according to the target number of display pixels. For example, in a display device for displaying high-definition television, N = 3000 and M =
It is desirable to set the number to 1000 or more. In this embodiment, N = 333 and M = 250. ) The N
× M surface conduction electron-emitting devices are arranged in a simple matrix by M row-directional wirings 63 (sometimes referred to as upper wirings) and N column-directional wirings 74 (also referred to as lower wirings). ing.

FIG. 8 is a schematic view showing the structure of a surface conduction electron-emitting device to which the present invention can be applied. FIG. 8A is a plan view, and FIG. 8B is a sectional view. In FIG. 8, 81 is a substrate,
82 and 83 are device electrodes, 84 is a conductive thin film, and 85 is an electron emitting portion.

By subjecting the conductive thin film 84 to a forming process through the device electrodes 82 and 83, the conductive thin film is locally destroyed, deformed or deteriorated, and the electron emitting portion 85 in an electrically high resistance state is formed. An activation step of forming and further improving the emission current is performed by applying a voltage to the conductive thin film 4 of the surface conduction electron-emitting device and causing a current to flow through the device. Is to be released.

On the lower surface of the face plate 77,
A fluorescent film 78 is formed. Since this embodiment is a color display device, phosphors of three primary colors of red, green, and blue used in the field of CRT are separately applied to a portion of the fluorescent film 78. The phosphors of the respective colors are separately applied in stripes as shown in FIG. 9A, for example, and black conductors 91 are provided between the stripes of the phosphors. The purpose of providing the black conductor 91 is to prevent the display color from being shifted even if the irradiation position of the electron beam is slightly shifted, and to prevent the reflection of external light to prevent the display contrast from being lowered. And preventing charge-up of the fluorescent film by the electron beam. Although graphite is used as a main component for the black conductor 91, any other material may be used as long as the above object is achieved.

The method of applying the three primary color phosphors is not limited to the stripe arrangement shown in FIG. 9A, but may be, for example, a delta arrangement as shown in FIG. Other arrangements may be used.

When a monochrome display panel is manufactured, a monochromatic phosphor material may be used for the phosphor film 78, and a black conductive material may not be necessarily used.

A metal back 79 known in the field of CRTs is provided on the surface of the fluorescent film 78 on the rear plate side. The purpose of providing the metal back 79 is to improve the light utilization rate by mirror-reflecting a part of the light emitted from the fluorescent film 78, to protect the fluorescent film 68 from the collision of negative ions, and to increase the electron beam acceleration voltage. , Or as a conductive path for the excited electrons of the fluorescent film 78. The metal back 79 is a fluorescent film 78
Was formed on the face plate substrate 77, the surface of the fluorescent film was smoothed, and Al was vacuum-deposited thereon. When a fluorescent material for low voltage is used for the fluorescent film 78, the metal back 79 is not used.

Although not used in the present embodiment, for the purpose of applying an acceleration voltage and improving the conductivity of the fluorescent film, a transparent material made of, for example, ITO is used between the face plate substrate 77 and the fluorescent film 78. Electrodes may be provided.

Dx1 to Dxm and Dy1 to Dy
n and Hv are electric connection terminals having an airtight structure provided for electrically connecting the display panel and an electric circuit (not shown). Dx1 to Dxm are electrically connected to the row wiring 73 of the multi-electron beam source, Dy1 to Dyn are connected to the column wiring 74 of the multi-electron beam source, and Hv is electrically connected to the metal back 79 of the face plate.

The basic configuration of the image forming apparatus according to the present invention has been described. Next, a method for manufacturing the image forming apparatus of the present invention will be described.

(Preparation of Base 1) Step-1 A lower wiring was formed by screen printing on a substrate 1 in which a silicon oxide film was formed on a blue plate glass by a sputtering method. next,
An interlayer insulating layer was formed between the lower wiring and the upper wiring. further,
The upper wiring was formed. Next, device electrodes connected to the lower wiring and the upper wiring were formed. Next, after forming a conductive thin film by a sputtering method, patterning was performed to obtain a desired form.

Step-2 A frit glass for fixing the support frame was formed at a desired position by printing.

Further, a positioning member was formed at the position shown in FIG. The positioning member processed in advance in the shape of FIG. 2A was fixed with frit glass. The support frame is
The height was 3.8 mm. H = 3.8 for the positioning member
mm, h1 = h2 = 1.9 mm, R = 3.5 mm. On the other hand, for a spherical member, r = 3 m
m.

Through the above steps, a surface-conduction electron-emitting device, a bonding material for a support frame, a positioning member, and the like formed by simple matrix wiring on the substrate 1 were formed.

(Preparation of Substrate 2) Step-3 A phosphor and a black conductor were formed on a blue plate glass substrate by a printing method. A smoothing treatment was performed on the inner side surface of the fluorescent film, and then Al was deposited by vacuum evaporation or the like to form a metal back.

Further, a flat spacer having a thickness of 100 μm and a height of 3.6 mm was bonded with a glass frit. The spacer was made of glass, and was provided with conductivity by laminating CrO ₂ on its surface.

Step-4 Frit glass for fixing the support frame was formed at a desired position by printing. Further, an alignment member was formed at the position shown in FIG. Both the support frame and the positioning member had a height of 3.8 mm. The positioning member had the shape shown in FIG. 2A and was previously processed to the same size as that used in Step 2 and was fixed with a frit.

Through the above steps, the phosphors of the three primary colors were arranged on the substrate 2 in the form of stripes, an adhesive for the support frame, a positioning member, and the like.

Step-5 Next, the substrates 1 and 2 were placed in a pressurizing device shown in FIG. (Note that components having the same reference numerals as those in FIG. 1 are the same as those in FIG. 1).
Glass beads having a diameter of 3 mm are arranged in the concave portions of the positioning member. Next, the positioning member of the base 2 is installed so as to fit with the positioning member of the base 1. Thereafter, the upper holder is placed on the base 2 through the holder slide guide, and is pressurized by pressurizing means. At this time, since the upper portion of the upper holder 61 shown in FIG. 6B is used as the pressurizing portion, only the support frame, the positioning member and the vicinity thereof are pressurized. Not done.

Step-6 The containers of the pressurizing device and the image forming device are introduced into a heating furnace and heated to soften the frit.

Step-7 After a desired time, the heating furnace is gradually cooled to harden the frit. Finally, the container for the image forming apparatus to which the substrates 1, 2 and the support frame were adhered was taken out from the pressurizing device.

Step-8 The atmosphere in the container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after reaching a sufficient degree of vacuum, the external terminals Dxo1 to Doxm and Doy.
Applying a voltage to the electron-emitting device through 1 to Doyn;
The electron-emitting portion 3 was formed by subjecting the conductive thin film 4 to a forming step and an activation step. Furthermore, after a series of processes, baking was performed at 250 degrees for 10 hours.

Step-9 Next, at room temperature, the air was evacuated to a degree of vacuum of about 10 ^-8 torr, and an exhaust pipe (not shown) was heated by a gas burner to weld and seal the envelope.

Finally, to maintain the degree of vacuum after sealing,
Getter treatment was performed by a high-frequency heating method.

As a comparative example, an image forming apparatus was prepared in the same manner as in Example 1 except for the following points. (1) The height of each of the spacer, the support frame, and the positioning member is set to 3.6 mm. (2) As the upper holder used in the step-5, a part having a portion corresponding to the image display part was not hollowed out. (In the first embodiment, a holder having a hollowed part as shown in FIG. 6B was used. .).

In the image forming apparatus of the present invention completed as described above, the scanning signal and the modulation signal are respectively transmitted to the respective electron-emitting devices from the signal generating means (not shown) through the external terminals Dx1 to Dxm and Dy1 to Dyn. , By applying electrons, a few kV is applied to the metal back 79 or a transparent electrode (not shown) through the high voltage terminal Hv.
The above high pressure is applied to accelerate the electron beam, and the fluorescent film 78
Then, the image was displayed by exciting and emitting light.

As a result, there was no displacement of the electron-emitting device and the phosphor, no variation in luminance and no color mixing caused by the displacement, and no damage of the phosphor or spacer was observed. On the other hand, in the image forming apparatus of the comparative example, there was no displacement of the electron-emitting device and the phosphor, and there was no luminance variation or color mixing caused by the displacement, but a part of the spacer was broken.

[Embodiment 2] In the second embodiment of the present invention, the relative position between the positioning member and the support frame is different from that of the first embodiment, and the positioning member is installed outside the support frame of the image forming apparatus. This is an example in which a plurality of small image forming apparatuses are simultaneously manufactured on a large substrate. This will be described with reference to FIGS. 101 is a rear plate, 102 is a face plate, 103 is a support frame, 104 is a positioning member, 105
Is a spacer. FIG. 10 is a diagram showing a state before the small image forming apparatus is separated.

The size of the effective display area of the small-sized image forming apparatus is an aspect ratio of 3: 4 and a diagonal of 10 inches. The positioning member is disposed outside the support frame and outside the container of the small-sized image forming apparatus, and is further provided at a position where the positioning member does not overlap the wiring lead-out portion. In addition, H = 4m
m, h = h1 = h2 = 2.0 mm, width 10 mm, length 3
0 mm. The recess is V-shaped. On the other hand, the member arranged in the space formed by the concave portion was a round bar-shaped member having a diameter of 3.5 mm and a length of 25 mm. These were formed of glass rods made of the same material as the substrates 1 and 2. The support frame height is 3.9mm, the spacer height is
3.7 mm.

Next, a method for manufacturing the image forming apparatus of the present invention will be described.

(Preparation of Substrate 1) Step-1 In the same manner as in Step 1 of Example 1, a 30-inch substrate shown in FIG. did. The conductive thin film was prepared by applying a liquid of an aqueous solution of an organic metal compound by an ink jet method, and then baking the substrate at 350 ° C. to thermally decompose the organic metal compound to form a conductive film of a metal oxide. The difference from the first embodiment is that four sets of wirings and the like having the same form are created.
In this case, there is no need for a step of patterning the conductive thin film applied by the inkjet method.

Step-2 Four sets of frit glass for fixing the support frame were formed at desired positions by printing.

Further, the positioning member is moved to the position shown in FIG.
A pair was formed. The positioning member previously processed into the shape shown in FIG. 11 was fixed to the base 1 with frit glass. FIG.
In FIG. 11, (a) is an X sectional view of FIG.
FIG. 11B is a Y sectional view of FIG.

Through the above steps, four sets of surface conduction electron-emitting devices, a bonding material for a support frame, a positioning member, and the like were formed on the substrate 1 by simple matrix wiring.

(Preparation of Substrate 2) Step-3 Similarly to the substrate 1, a transparent conductor, a phosphor and a black conductor were formed on an inch blue plate glass substrate by a printing method. A smoothing treatment was performed on the inner side surface of the fluorescent film, and then Al was deposited by vacuum evaporation or the like to form a metal back.

Step-4 Four sets of frit glass for fixing the support frame were formed at desired positions by printing.

Further, a positioning member was formed at the position shown in FIG. The positioning member had the shape shown in FIG. 11 and was previously processed to the same size as that used in Step 2 and was fixed with a frit. Further, the spacer was bonded to the black conductor with a frit.

Through the above steps, the phosphors of the three primary colors were arranged on the substrate 2 in the form of stripes, and four sets of adhesives for the support frame, positioning members, spacers and the like were formed.

(Preparation of Electron Source and Assembly of Container) Next, the base 1 and the base 2 are put into the apparatus for preparing and assembling an electron source shown in FIG. The electron source making and assembling apparatus of FIG. 12 includes a substrate 1 loading chamber, a baking chamber, a forming chamber,
It consists of an activation room, a stabilization room, an assembly room, a substrate 2 loading room, a baking room, and a slow cooling room. Each chamber is an independent vacuum chamber, where an exhaust pump, vacuum gauge, etc. necessary for vacuum are arranged.In the forming chamber and the activation chamber, a voltage is simultaneously applied to each wiring to perform the forming step and the activation step. A probe needle, a power supply, and the like are arranged so as to be able to carry out.
A gas source is connected to the activation chamber so that a gas for the activation step can be introduced. The baking room and the stabilization are further provided with a heater so that heating can be performed. A pressurizing device conceptually similar to the embodiment is installed in the assembly room. In the upper holder of the pressing device, each spacer region is hollowed out so that only the support frame and the positioning member of the small image forming apparatus can be pressed. In each chamber, the substrate and the container that have completed each process are transported to the next process chamber.

Step-5 The substrate 2 is introduced into the load chamber of the substrate 2 and exhausted.

Step-6 The substrate 2 was transported to the baking chamber of the substrate 2 and was heated at 400 ° C. for 1 hour.
Baking for hours.

Step-7 The substrate 1 is introduced into the load chamber of the substrate 1 and evacuated.

Step-8 The substrate 1 was transferred to the baking chamber of the substrate 1 and was heated at 250 ° C. for 1 hour.
Baking for hours.

Step-9 The substrate 1 was transported to the forming chamber of the substrate 1, and the forming process was performed for each line, and all the line forming was performed.

Step-10 The substrate 1 was transported to the activation chamber of the substrate 1, and the activation process was performed for each line, and the activation process for all lines was performed. Acetone was introduced as an activating gas at 10 ⁻⁵ Pa, and an electric current was supplied for 30 minutes to perform an activating step. After the activation was completed, the air was exhausted.

Step-11 The substrate 1 is transported to the stabilizing chamber of the substrate 1 and the pressure of 10-9 Pa is applied.
After degassing, the mixture was heated at 230 ° C. for 10 hours to perform degassing. Degassing of acetone, water, oxygen and the like adsorbed on the substrate 1 was performed.

Step-12 The substrates 1 and 2 were transported to the assembling room, and were heated and degassed at 410 ° C. for 10 minutes. At this time, the frit glass placed on the base 1 softened. At this time, the degree of vacuum had reached ^10-9 Pa. Next, the positioning member was positioned and pressed against the target. The display panel was assembled as described above.

Step-13 After the display panel was conveyed to the annealing room, it was gradually cooled to room temperature.

Step-14 After the display panel was transported to the unloading chamber, the display panel was taken out.

Step-15 A small dicing saw was used to divide the display panel into four small display panels. A drive circuit was installed in the small display panel manufactured in the same manner as in Example 1, and a display was performed. As a result, there was no problem of misalignment such as color mixing or a problem of spacer damage.

[Embodiment 3] The third embodiment of the present invention differs from Embodiments 1 and 2 in the following points. That is, the difference is that a field emission device, which is a kind of cold cathode electron emission device, is used as the electron emission device, the positioning member is installed outside the support frame of the image forming apparatus, and the method of installing the spacer is different.

First, the field emission device will be described with reference to FIG. In FIG. 13, 131 is a rear plate,
132 is a face plate, 133 is a cathode, 134 is a gate electrode, 135 is an insulating layer between the gate and the cathode, 136 is a focusing electrode, 137 is a phosphor / metal back, 138
Denotes an insulating layer between the focusing electrode and the gate electrode, and 139 denotes a cathode wiring.

FIG. 13 (b) is a plan view of the rear plate of FIG. 13 (a). In the plan view, the insulating layer between the gate and the cathode and the focusing electrode are omitted for simplification.

The electron-emitting device applies a large electric field between the tip of the cathode 133 and the gate electrode 134, and emits electrons from the tip of the cathode 133. Gate electrode 134
Is provided with an electron passage port so that electrons emitted from a plurality of cathodes can pass through. Further, the electrons passing through the gate electrode port are converged by the converging electrode 136 and accelerated by the electric field of the anode provided on the face plate 132,
The light-emitting element collides with a picture element of a phosphor corresponding to the cathode to emit light. The plurality of gate electrodes 134 and the plurality of cathode wirings 139 are arranged in a simple matrix, and a corresponding cathode is selected according to an input signal, and electrons are emitted from the selected cathode.

FIG. 14 shows an image forming apparatus. In the figure, 14
1 is a rear plate, 142 is a face plate, 143
Are support frames, 144, 145, and 146 are alignment members,
147 is a spacer. The size of the effective display area of the image forming apparatus shown in FIG.
0 inches. Positioning members 144, 145, 14
6 is arranged outside the support frame so as to be located substantially at the vertex of an equilateral triangle. The positioning member had a structure in which a glass rod having a diameter of 0.5 mm and a length of 30 mm was adhered on the base 1 and the base 2 at predetermined intervals, and a round bar-shaped member was disposed therebetween. (FIG. 14
(A)). Round bar-shaped member is 5mm in diameter and 25m in length
m. These were formed by ceramics, which is a material having substantially the same thermal expansion coefficient as the substrates 1 and 2. The base 1
The gap between the substrate and the base 2 is 1.5 mm. Spacer 147
As shown in FIG. 14, an irregular shape made of polyimide was used, and the height was 1, 40 mm. Next, a method for manufacturing the image forming apparatus of the present invention will be described.

Next, a method for manufacturing the image forming apparatus of the present invention will be described.

(Preparation of Substrate 1) Step-1 Using a blue sheet glass as a substrate, a concave portion for positioning and fixing was formed at a desired position around the substrate. Next, the cathode, gate electrode, wiring, and the like in FIG. 13 were formed by a known method. The cathode material was MO.

Step-2 A frit glass for fixing the support frame was formed at a desired position by printing.

Through the above steps, a field emission type electron-emitting device having a simple matrix wiring on the substrate 1, an adhesive for a support frame, a positioning member, and the like were formed.

Preparation of Base 2 Step-3 A transparent conductor, a phosphor and a black conductor were formed on a blue glass substrate by a printing method. A smoothing treatment was performed on the inner side surface of the fluorescent film, and then Al was deposited by vacuum evaporation or the like to form a metal back.

Step-4 Using a blue sheet glass as a substrate, a concave portion for positioning and fixing was formed at a desired position around the substrate. Frit glass for fixing the support frame was formed at a desired position by printing.

By the above steps, the phosphors of the three primary colors were arranged in stripes on the substrate 2, and an adhesive for the support frame, a positioning member, a spacer, and the like were formed.

Step-5 Next, in the same manner as in Example 1, the substrates 1 and 2 were set in a pressurizing device shown in FIG. It consists of an upper holder, a lower holder, a pressing means, and a holder slide guide.

The base 1 is placed on the lower holder, and a support frame and a ceramic rod having a diameter of 1.5 mm and a length of 25 mm are placed in a positioning and fixing recess formed in the substrate. Further, the spacer is set at a desired position. Next, the positioning and fixing concave portion of the base 2 is installed so as to be fitted with the positioning and fixing concave portion of the base 1. Thereafter, the upper holder is placed on the base 2 through the holder slide guide, and is pressurized by pressurizing means.

Step-6 The containers of the pressure device and the image forming device are introduced into a heating furnace and heated.

Step-7 After a desired time, the heating furnace is gradually cooled to harden the frit. Finally, the container of the image forming apparatus to which the bases 1, 2 and the support frame were adhered was taken out from the pressing device.

Step-8 The atmosphere in the container completed as described above is exhausted by a vacuum pump through an exhaust pipe (not shown), and after a sufficient degree of vacuum is reached, the atmosphere inside the container is supplied to the electron-emitting device through a terminal outside the container. It was created by applying voltage and aging. Further, after the aging, baking was performed at 250 degrees for 10 hours.

Step-9 Next, the chamber was evacuated to a degree of vacuum of about 10 ^-8 torr at room temperature, and the envelope was sealed by heating an exhaust pipe (not shown) with a gas burner.

Finally, to maintain the degree of vacuum after sealing,
Getter treatment was performed by a high-frequency heating method.

In the image forming apparatus of the present invention completed as described above, each electron-emitting device is connected to a terminal outside the container.
Electrons are emitted by applying a signal from a signal generating means (not shown), and a high voltage of several kV or more is applied to a metal back or a transparent electrode (not shown) through a high voltage terminal Hv to accelerate an electron beam and to emit fluorescent light. An image was displayed by colliding with the film and exciting / emitting light. At this time,
Color mixing, phosphor damage by the spacer, and destruction of the spacer did not occur, and the alignment could be performed easily.

[0110]

As described above, according to the image forming apparatus and the method of manufacturing the same of the present invention, a complicated alignment apparatus is not required, and high-precision assembly can be performed while preventing damage to the apparatus and damage to the phosphor surface. It can be performed. Therefore, an inexpensive and high-quality image forming apparatus can be realized.

[Brief description of the drawings]

FIG. 1 is a plan view of a main configuration of an image forming apparatus of the present invention,
It is sectional drawing.

FIG. 2 is a view showing an example of an alignment member of the present invention.

FIG. 3 is a plan view of a main configuration of the image forming apparatus of the present invention,
It is sectional drawing.

FIG. 4 is a diagram illustrating an example of a positioning member of the present invention.

FIG. 5 is a diagram illustrating an example of an assembling method of the image forming apparatus of the present invention.

FIG. 6 is a diagram illustrating an assembly device (pressing device) of the image forming apparatus according to the first embodiment.

FIG. 7 is a perspective view of the image forming apparatus according to the first embodiment.

FIG. 8 shows a cold cathode surface conduction electron-emitting device used in Example 1.

FIG. 9 is an example of a fluorescent film used in Example 1.

FIG. 10 is a diagram illustrating a state of the image forming apparatus according to the second embodiment before separation of the small-sized image forming apparatus.

FIG. 11 is a view showing an example of a positioning member of the present invention.

FIG. 12 is a diagram illustrating an assembling apparatus of the image forming apparatus of the present invention.

FIG. 13 is a view showing an example of a positioning member of the present invention.

FIG. 14 is a plan view and a cross-sectional view of an image forming apparatus according to a third embodiment.

FIG. 15 is a diagram illustrating a method of assembling a conventional image forming apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st base | substrate 2 2nd base | substrate 3 Support frame 4,5,6 Alignment member 62 Lower holder 63 Pressurizing means 64 Holder slide guide 7 Spacer 72 Surface conduction type electron-emitting device 75 Rear plate 76 Support frame 77 Face plate 79 Metal back 8 Image display area 81 Substrate 82, 83 Element electrode 84 Conductive thin film 85 Electron emission part 9 Spacer arrangement area 91 Black conductor 61 Upper holder 101 Rear plate 102 Face plate 133 Cathode 134 Gate electrode 135 Gate / cathode Insulating layer 136 Focusing electrode 137 Phosphor / metal back 138 Insulating layer between focusing electrode / gate electrode 139 Cathode wiring 141 Rear plate 142 Face plate 143 Support frame 144, 145, 14 Positioning member 147 Spacer 148 Cross section

Claims (18)

[Claims] A first base and a second base, wherein a spacer, a support frame, and a support are provided between the first base and the second base;
And a positioning member, wherein the length of the spacer is
An image forming apparatus, wherein the length is shorter than the length of the support frame or the positioning member. 2. The positioning member has a pair of members provided with concave portions, surfaces of the pair of members provided with concave portions are bonded together, and a space formed by the concave portions of the pair of members is provided. 2. The image forming apparatus according to claim 1, further comprising a spherical or round bar-shaped member. 3. The positioning member according to claim 1, wherein the positioning member is provided with two round bar-shaped members (a) disposed on the first substrate at a predetermined interval, and the second substrate is disposed at a predetermined interval. Two round bar-shaped members (b) arranged above, and a spherical or round member arranged between the two round bar-shaped members (a) and the two round bar-shaped members (b) The image forming apparatus according to claim 1, further comprising a rod-shaped member. 4. The image forming apparatus according to claim 1, wherein the positioning member is formed by fitting a member provided with a concave portion and a member provided with a convex portion. 5. The apparatus according to claim 1, wherein the positioning member is disposed inside a region surrounded by the first base, the second base, the spacer, and the support frame. The image forming apparatus as described in the above. 6. The apparatus according to claim 1, wherein the positioning member is disposed outside a region surrounded by the first base, the second base, the spacer, and the support frame. The image forming apparatus as described in the above. 7. The vacuum vessel according to claim 1, wherein the first base, the second base, the spacer, and the support frame constitute a vacuum vessel.
An image forming apparatus according to any one of claims 1 to 6. 8. The image forming apparatus according to claim 1, wherein the positioning member is disposed substantially at each vertex of a regular polygon. 9. The image forming apparatus according to claim 8, wherein the regular polygon is a regular triangle. 10. The apparatus according to claim 1, wherein an electron-emitting device is provided on the first base, and an image forming member is provided on the second base.
An image forming apparatus according to any one of claims 1 to 9. 11. The image forming apparatus according to claim 10, wherein said image forming member is a phosphor. 12. The image forming apparatus according to claim 10, wherein said electron-emitting device is a cold cathode electron-emitting device. 13. The method according to claim 1, comprising the following steps:
The method for manufacturing an image forming apparatus according to any one of the above. (A) a first step of arranging the constituent members of the positioning member on the first base and / or the second base; and (B) the spacer and the spacer on the first base or the second base. Second step of disposing a support frame (C) Third step of joining the first base and the second base via the positioning member (D) The first base and / or Fourth step of pressing the second base (E) Fifth step of softening the first base, the second base, and the bonding member provided on the support frame (F) solidifying the bonding member Sixth process 14. The method according to claim 13, wherein the second step and the third step are performed at room temperature. 15. In a step after the fourth step, the first
The method of manufacturing an image forming apparatus according to claim 13, wherein a pressure of a container formed by the base, the second base, the spacer, and the support frame is equal to or higher than a pressure outside the container. 16. The method according to claim 15, wherein the inside and outside of the container have substantially the same degree of vacuum. 17. The image according to claim 13, wherein the pressurized portion in the fourth step is a back surface of a portion of the first base and / or the second base where the support frame is provided. Manufacturing method of forming apparatus. 18. The method according to claim 18, wherein the pressurized portion is a first substrate or /
The method of manufacturing an image forming apparatus according to claim 17, further comprising: a back surface of a portion of the second base where the support frame is provided and a back surface of a portion where a positioning member is provided.