JPH11200038A5 - - Google Patents

Info

Publication number
JPH11200038A5
JPH11200038A5 JP1998001432A JP143298A JPH11200038A5 JP H11200038 A5 JPH11200038 A5 JP H11200038A5 JP 1998001432 A JP1998001432 A JP 1998001432A JP 143298 A JP143298 A JP 143298A JP H11200038 A5 JPH11200038 A5 JP H11200038A5
Authority
JP
Japan
Prior art keywords
target
magnetron sputtering
hollow cathode
sputtering apparatus
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998001432A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11200038A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10001432A priority Critical patent/JPH11200038A/ja
Priority claimed from JP10001432A external-priority patent/JPH11200038A/ja
Publication of JPH11200038A publication Critical patent/JPH11200038A/ja
Publication of JPH11200038A5 publication Critical patent/JPH11200038A5/ja
Pending legal-status Critical Current

Links

JP10001432A 1998-01-07 1998-01-07 マグネトロンスパッタ装置及びその方法 Pending JPH11200038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10001432A JPH11200038A (ja) 1998-01-07 1998-01-07 マグネトロンスパッタ装置及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10001432A JPH11200038A (ja) 1998-01-07 1998-01-07 マグネトロンスパッタ装置及びその方法

Publications (2)

Publication Number Publication Date
JPH11200038A JPH11200038A (ja) 1999-07-27
JPH11200038A5 true JPH11200038A5 (enExample) 2005-08-04

Family

ID=11501297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10001432A Pending JPH11200038A (ja) 1998-01-07 1998-01-07 マグネトロンスパッタ装置及びその方法

Country Status (1)

Country Link
JP (1) JPH11200038A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100948547B1 (ko) * 2007-12-11 2010-03-18 한국원자력연구원 고진공 마그네트론 스퍼터링 건

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