JPH11200020A - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH11200020A JPH11200020A JP1790898A JP1790898A JPH11200020A JP H11200020 A JPH11200020 A JP H11200020A JP 1790898 A JP1790898 A JP 1790898A JP 1790898 A JP1790898 A JP 1790898A JP H11200020 A JPH11200020 A JP H11200020A
- Authority
- JP
- Japan
- Prior art keywords
- electron gun
- vacuum
- vapor deposition
- cathode
- degassing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790898A JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1790898A JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11200020A true JPH11200020A (ja) | 1999-07-27 |
| JPH11200020A5 JPH11200020A5 (enExample) | 2005-08-18 |
Family
ID=11956860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1790898A Pending JPH11200020A (ja) | 1998-01-13 | 1998-01-13 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11200020A (enExample) |
-
1998
- 1998-01-13 JP JP1790898A patent/JPH11200020A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20041217 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041217 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041217 |
|
| RD02 | Notification of acceptance of power of attorney |
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| A521 | Written amendment |
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| RD04 | Notification of resignation of power of attorney |
Effective date: 20050225 Free format text: JAPANESE INTERMEDIATE CODE: A7424 |
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| A977 | Report on retrieval |
Effective date: 20070724 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070726 |
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| A02 | Decision of refusal |
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