JPH11185627A - Review device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the efficiency of the work for specifying a review position by providing a review device movable in the X direction and Y direction along the substrate plane of a large substrate, and lighting only the LEDs of the corresponding LED array in the X and Y direction only when the review device is located at the prescribed X and Y direction position of the substrate. SOLUTION: Inspection light of diffused light is radiated to the whole back face of a substrate 180. This review device is provided with a substrate placing base 110 to be placed with the substrate 180 while one side of it is kept below along the horizontal direction, a microscope 120 movable in the X and Y direction along the substrate plane and a placing base controller 130 holding the substrate placing base 110 and changing its angle and height. The substrate placing base 110 is provided with a plurality of rollers (horizontal moving sections) 118 moving the substrate 180 with its lower side aligned along the horizontal direction. LEDs of an X direction LED array 191 and a Y direction LED array 193 are lighted only when the microscope 120 is located at the prescribed position. This device is particularly effective for correcting flaws such as the severance or short circuit of electrode wires.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a review device for observing a predetermined coordinate position on a large substrate, such as a correction table for correcting a defect such as disconnection or short circuit of an electrode wiring of the large substrate. In particular, the present invention relates to a review device for correcting defects such as electrode wiring on a back plate and a front plate of a plasma display substrate.

[0002]

2. Description of the Related Art In recent years, plasma display panels (hereinafter, also referred to as PDPs) have been used in various display devices because of their small depth, light weight, clear display, and wide viewing angle compared to liquid crystal panels. It is being used.
Generally, a plasma display panel (PDP) has two
A pair of regularly arranged electrodes are provided on a pair of opposed glass substrates, and a gas mainly containing neon, xenon, or the like is sealed between the pair of electrodes. Then, a voltage is applied between these electrodes, and a discharge is generated in minute cells around the electrodes, so that each cell emits light and display is performed. In particular, in order to display information, regularly arranged cells are selectively discharged to emit light.

Here, the structure of the PDP is shown in FIG.
An example of the type PDP will be described. FIG. 5 is a perspective view of the PDP structure, but shows a front plate (glass substrate 510) and a rear plate (glass substrate 520) apart from actuality for easy understanding. As shown in FIG. 5, two glass substrates 510 and 520 are disposed in parallel and opposed to each other, and both are provided in parallel with each other on a glass substrate 520 serving as a back plate (cell barrier). 530)
Are held at regular intervals. On the back side of the glass substrate 510 serving as a front plate, composite electrodes composed of a transparent electrode 540 serving as a discharge sustaining electrode and a metal electrode 550 serving as a bus electrode are formed in parallel with each other.
A dielectric layer 560 is formed, and a protective layer (MgO layer) 570 is further formed thereon. In addition, on the front side of the glass substrate 520 serving as a back plate, an address electrode 580 is located between the barriers 530 so as to be orthogonal to the composite electrode.
Are formed in parallel with each other, and a fluorescent surface 590 is provided so as to cover the wall surface of the barrier 530 and the cell bottom surface. The barrier 530 is for defining a discharge space, and each partitioned discharge space is called a cell or a unit light emitting region.
This AC type PDP is of a surface discharge type, and has a structure in which an AC voltage is applied between composite electrodes on the front panel to cause discharge.
In this case, since the alternating current is applied, the direction of the electric field changes according to the frequency. The fluorescent material 590 emits light by the ultraviolet light generated by the discharge, and the light transmitted through the front plate can be visually recognized by an observer. In addition, DC type P
The DP differs from the AC type in that the electrode has a structure that is not coated with a dielectric layer, but the discharge effect is the same. FIG. 5 shows a glass substrate 520.
Has a structure in which a base layer 567 is provided on one surface and a dielectric layer 565 is provided thereon.
65 is not always required.

[0004] Such a plasma display (PD)
Since the manufacturing process of the back plate and the front plate of the substrate for P) is complicated and long, a defect occurs in the manufacturing process, and various inspections are performed during and after the manufacturing. Above all, inspection of disconnection of electrode wiring and short-circuit is indispensable as guaranteeing the final quality of the back plate and the front plate. Inspection of disconnection and short-circuit of the electrode wiring, for each wiring, whether there is a disconnection, whether there is a short-circuit with the adjacent wiring, to check for each wiring,
Basically, an operation of applying a voltage between two predetermined locations and confirming whether there is continuity between them is performed in the same wiring and two adjacent wirings, and this operation is performed on all the wirings to be inspected. I do.

[0005] As a result of inspection for disconnection and short-circuit of the electrode wiring, if it is determined that it is a defective portion, if it can be corrected,
Correction work for correcting the defective part is performed. For the correction work, a correction table 400 (also a review device) as shown in FIG. 4 has been proposed by the present inventor. A correction table 400 (review device) shown in FIG. 5 is a correction table for correcting defects such as disconnection and short circuit of electrode wiring of a large-sized substrate, and is also a review device for observing a corrected portion of the substrate. The correction table (review device) 400 irradiates the entire back surface of the substrate 480 that is not the correction surface side with observation light composed of diffused light, and makes one side of the substrate 480 horizontally downward, and tilts the substrate surface obliquely. A substrate mounting table 410 on which the substrate is mounted in a vertical state, and an X direction which is held on the substrate mounting table 410 and is a horizontal direction along the substrate surface of the substrate for observing the correction surface side of the substrate 480. A microscope 420 movable in the Y direction along the substrate surface perpendicular to the X direction, and a mounting table control unit 430 that holds the substrate mounting table 410 and changes the angle and height of the substrate mounting table 410 The substrate mounting table 410 is provided with a roller (horizontal moving part) 418 for moving the substrate 480 along one side of the lower side of the substrate 480 in the horizontal direction. X indicating the position in the direction, It has a counter 440. That is, in the correction table (review device) 400, one side of the substrate 480 is horizontally arranged downward, and the substrate is placed and placed on the substrate surface obliquely or nearly perpendicular to the horizontal plane, so that a person can perform correction. In doing so, the observation and correction of the substrate 480 can be performed with a reasonable posture, and it is possible to cope with the enlargement of the substrate 480. Then, the substrate mounting table 410 is held, and the substrate mounting table 410 is held.
And a roller (horizontal moving unit) 418 for moving the substrate 480 along one side of the lower side of the substrate 480 in the horizontal direction by providing the mounting table controller 430 that changes the angle and height of the substrate. By doing so, the position of the substrate 480 can be easily moved and transported. As described above, the correction table (review device) 400 can cope with an increase in the size of the substrate, and can efficiently observe a large substrate so that the posture of a person is not excessively increased. In this correction table (review device) 400, a person moves the microscope 420 in the X direction and the Y direction to determine a position to be corrected, based on the values of the X and Y counters 440. In order to precisely observe a defective portion with the microscope 420 or the monitor 450, it is essential to move the microscope while looking at the X and Y counter values to specify the repaired portion, that is, the observed portion. For this reason, it is burdensome for a person to specify the observation point, and when there are many observation points, the workability is reduced.

[0006]

As described above, a correction table (also a review device) for correcting disconnection, short circuit, etc. of electrode wiring of a large substrate such as a PDP substrate shown in FIG.
Can be corrected while the upper body of the worker is almost standing, so the posture of the person is not too much, the handling of the board is easy, and it can cope with the enlargement of the board. The work of identifying an observation point, such as a defective point, has been inefficient and problematic. The present invention is directed to a reviewing apparatus for observing a predetermined coordinate position of a large substrate, such as a correction table for correcting a disconnection defect or a short circuit defect of an electrode wiring of a large substrate. It is an object of the present invention to provide a review device capable of efficiently performing an operation of specifying an observation point of a user.

[0007]

SUMMARY OF THE INVENTION A review apparatus of the present invention performs an operation of observing a predetermined coordinate position of a large substrate, such as a repair table for correcting a disconnection defect or a short circuit defect of an electrode wiring of a large substrate. An X-direction that is a horizontal direction along the substrate surface, and an observation device for observing the substrate surface, such as a microscope or a camera, which is movable in a Y-direction along the substrate surface orthogonal to the X direction, and An X-direction LED array and a Y-direction LED array are provided along the X-direction and the Y-direction, respectively. The X-direction LED array and the Y-direction LED array respectively have a predetermined X-direction position on the substrate, Only when the observation device is located at a predetermined Y direction position, the corresponding X direction L
ED array LED, corresponding Y-direction LED array LED
Only one of them is lit.
In the above, the inspection light composed of the diffused light is applied to the entire back surface other than the observation surface side of the substrate, and one side of the substrate is horizontally oriented downward, and the substrate surface is oblique or vertical. A substrate mounting table on which the substrate is to be placed, and an X direction that is held on the substrate mounting table to observe the correction surface side of the substrate and is orthogonal to the X direction, which is a horizontal direction along the substrate surface of the substrate, and orthogonal to the X direction. A microscope movable in the Y direction along the surface, and a mounting table control unit that holds the substrate mounting table and changes the angle and height of the substrate mounting table, and the substrate mounting table includes a It is characterized in that a horizontal moving section for moving the substrate with one lower side along the horizontal direction is provided. The horizontal moving unit is characterized in that one side of the substrate is placed on the lower side, and the side is moved on a plurality of rollers or rolls extending in the horizontal direction. Further, in the above, the substrate mounting table is in contact with the entire back surface, not the correction surface side of the substrate, and irradiates the entire back surface with observation light for observation via the diffusion plate. . Further, in the above, there is provided a monitor for observing a microscope image of the substrate. The present invention is particularly effective when applied to a correction table for correcting a defect such as a disconnection or a short circuit of an electrode wiring on a substrate for a plasma display.

[0008]

The review apparatus of the present invention is designed to cope with such a configuration, and is provided with a correction board for correcting a disconnection defect or a short-circuit defect of an electrode wiring of a large substrate. A review device that performs an operation of observing a predetermined coordinate point can provide a review device that can efficiently perform an operation of identifying an observation position of a substrate. Specifically, a reviewing device for observing a predetermined coordinate location of a large substrate, such as a correction table for correcting a disconnection defect or a short-circuit defect of an electrode wiring of a large substrate, is provided in a horizontal direction along the substrate surface. Direction, and an observation device for observing the substrate surface, such as a microscope and a camera, which is movable in the Y direction along the substrate surface orthogonal to the X direction, and along the X direction and the Y direction, respectively. An X-direction LED array and a Y-direction LED array are provided, and the X-direction LED array and the Y-direction LED array are positioned at a predetermined X-direction position and a predetermined Y-direction position on the substrate, respectively. Only when the corresponding X direction L
ED array LED, corresponding Y-direction LED array LED
This is achieved by only illuminating. That is, it is not necessary to rely solely on the values of the X and Y counters to specify the observation location. The location where the LED array is turned on is determined by searching for the location where the LED array lights up, and the microscope 20 or monitor is used at that location. It is assumed that a defective portion can be specified more accurately, and compared with a correction table (review device) 400 shown in FIG.
The work of the person can be reduced, and work can be efficiently performed even when there are many observation points.

More specifically, the entire back surface of the substrate, not the observation surface side, is irradiated with inspection light composed of diffused light, and one side of the substrate is horizontally oriented downward, and the substrate surface is oblique or vertical. The substrate mounting table on which the substrate is placed in a state where the substrate is placed, and the X direction, which is the horizontal direction along the substrate surface of the substrate, held on the substrate mounting table to observe the correction surface side of the substrate, and the X direction. A microscope movable orthogonally in the Y direction along the substrate surface, and a mounting table controller for holding the substrate mounting table and changing an angle and a height of the substrate mounting table; Is provided with a horizontal moving unit for moving the substrate along one side of the lower side of the substrate in the horizontal direction, so that it can handle a large-sized substrate such as a PDP substrate. In this case, it is possible to prevent the posture of the person from being overly scrutinized. Further, the horizontal moving unit, one side of the substrate is on the lower side, by moving the side mounted on a plurality of rollers or rolls along the horizontal direction,
Further, the substrate mounting table is in contact with the entire back surface, not the observation surface side of the substrate, and irradiates the entire back surface with observation light for observation via a diffusion plate, so that the entire configuration is relatively simple. It is assumed. In addition, by providing a monitor for observing a microscope image of the substrate, the magnification of the microscope is changed so that the defect position can be easily specified.

The review apparatus of the present invention is particularly effective when used on a repair table for repairing defects such as disconnection and short circuit of electrode wiring on a large-sized plasma display substrate.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One example of an embodiment of a review device of the present invention will be described with reference to the drawings. 1 is a schematic plan view of an example of the embodiment, FIG. 2 is a cross-sectional view as viewed from A1-A2 in FIG. 1, and FIG. 3 is a view around a roller portion (horizontal moving portion) as viewed from A3-A4 in FIG. It is an enlarged view. In FIG. 1, 100 is a review device, 110 is a substrate mounting table, 111 is a substrate support,
112 is an inspection light irradiation unit, 112A is a fluorescent lamp, 112B is a transparent acrylic plate, 112C is a transparent glass plate, 112D is a diffusion acrylic plate, 113 is a Y-direction rail, 114 is a wiring storage unit, 115 is an X-direction rail, and 116 is Wiring compartment,
117 is a Y-direction moving table, 118 is a roller (horizontal moving part),
120 is a microscope, 130 is a mounting table control unit, 131 is a vertical movement unit, 133 is an angle adjustment unit, 140 is an XY counter, 150 is a monitor, 170 is an arm rest, 180 is a board, 190 is an LED, and 191 is the X direction. LED array, 19
Reference numeral 3 denotes a Y-direction LED array. Note that the X direction is the horizontal direction and the direction along the surface of the mounting table on which the substrate to be observed is placed.
The Y direction is a direction perpendicular to the X direction along a surface of the mounting table on which the substrate to be observed is placed, that is, a direction substantially along the surface of the substrate on which the mounting table is placed for observation. Here, the surface of the substrate to be observed and the surface of the mounting table on which the substrate to be observed is placed (112B and 11B in FIG. 3).
2C and 112D) are substantially parallel to each other.
The direction may be defined as a horizontal direction and a direction along the substrate surface, and the Y direction may be defined as a direction orthogonal to the X direction and along the substrate surface. The review device 100 shown in FIGS. 1 and 2 is a review device for observing defects such as disconnection and short circuit of electrode wiring of a large substrate such as a back substrate and a front plate for PDP. A microscope for observing the substrate surface, which is movable in a certain X direction and a Y direction orthogonal to the X direction along the substrate surface, and an X direction LED array along the X direction and the Y direction, respectively. , Y-direction LED arrays. The apparatus is capable of performing operations such as repairing a defective portion while observing as necessary. In addition, the review device 100 irradiates the entire back surface, not the observation surface side, of the substrate 180 with the inspection light composed of diffused light, and makes one side of the substrate 180 downward along the horizontal direction, and tilts the substrate surface obliquely or vertically. Substrate mounting table 11 on which the substrate 180 is placed in the
In order to observe the observation surface side of the substrate 180 and the substrate 180, the substrate is held on the substrate mounting table 110, and the X direction, which is a horizontal direction along the substrate surface of the substrate 180, is orthogonal to the X direction, and is along the substrate surface. The microscope includes a microscope 120 movable in the Y direction and a mounting table control unit 130 for holding the substrate mounting table 110 and changing the angle and height of the substrate mounting table 110 for changing the angle and height of the substrate surface. The substrate placing unit 110 has a plurality of rollers (horizontal moving units) 118 that place a lower side of the substrate thereon and move the substrate along the horizontal direction.

In the review device 100, the microscope 1
An X-direction rail 115 for moving the X-direction 20, and a Y-direction rail 11 for moving the Y-direction moving table 117 on which the microscope 120 and the X-direction rail 115 are mounted, in the Y direction
3 is provided on the substrate mounting table 110. Microscope 120
Can move along the X-direction rail 115, and the Y-direction moving table 117 moves along the two Y-direction rails 113 shown on the left and right in FIG. 1 as a unit with the X-direction rail 115 and the microscope 120 mounted thereon. it can. That is, the microscope 120
It can move in both X and Y directions. Note that the X-direction movement and the Y-direction movement shown in FIGS. 1 and 2 are performed manually, but of course, a driving unit may be provided to perform the X-direction movement and the Y-direction movement. In this case, there are a method in which a person presses the X and Y buttons to operate the driving unit to move the image, a method in which the driving unit is operated by a lever, and the like.

The X-direction LED array 191 and the Y-direction LED array 193 are located at the corresponding X-direction positions only when the microscope 120 is located at the predetermined X-direction position and the predetermined Y-direction position on the substrate 180, respectively. Direction LED array 191
, And only the LEDs of the Y-direction LED array 193 at the corresponding Y-direction positions are turned on. Although a mechanism for lighting a predetermined LED is not shown, for example, L
In the case where n EDs are arranged to form an LED row, one of the LEDs Ln is connected to a switch SWn1 whose conduction (connection) is determined by moving the microscope, and the other is connected to the nth LED (Ln). A switch SWn2 whose connection is determined by a coordinate input from a terminal or the like and a lighting power supply unit are provided in series, and both switches SWn1 and SWn2 are provided.
LEDLn may be turned on only when both are connected.

The substrate 180 for observation is carried into the reviewing device 110 by adjusting the angle θ between the horizontal surface and the surface of the mounting table shown in FIG. It is done. At the time of observation, the mounting table control unit 130 adjusts the angle θ to perform observation at a predetermined angle θ1 suitable for observation. After the observation, the mounting table controller 13
The angle θ is returned to approximately 90 degrees by 0, and is carried out to the next step. As described above, the substrate 180 is moved by the roller (horizontal moving unit) 118 in the review apparatus 100. The angle θ1 suitable for observation varies depending on the physique and the like of the observer, but usually θ1 is 60 ° or more and less than 90 °. It is preferable that the mounting table control unit 130 can adjust the angle θ at least in a range of 60 ° to 90 °.

The substrate 180 is fixed so that the lower side is placed on the roller 118 and the back surface, which is not the surface to be observed, is supported by the substrate support 111. The substrate support portion 111 is thin, and the back surface of the substrate is directly connected to the review device 100 shown in FIG.
The substrate is not directly in contact with the surface of the diffusion sheet (the transparent acrylic plate 112B surface) on which the substrate made of 2B, 112C, and 112D is placed. To set the angle θ between the surface of the mounting table on which the substrate to be observed is placed (the transparent acrylic plate 112B surface) and the horizontal plane to be 60 ° ≦ θ <90 °, the substrate 18 is moved to the roller 118.
Most of the weight of zero takes. Then, the substrate mounting table 110
In a state where a slight gap is provided between the substrate 180 and the rear surface of the substrate 180 by the substrate support portion 111, the observation light is applied to the entire rear surface via a diffusion plate (112C in FIG. 3). still,
As shown in FIG. 3, the side opposite to the entire back surface of the substrate 180 of the substrate mounting table 110 has a diffusion acrylic plate 112D and a transparent glass in order from the light source side in order to diffuse the light from the light source including the fluorescent lamp 112A. Although a structure provided with the plate 112C and the transparent acrylic plate 112B may be provided, the present invention is not particularly limited to this. The horizontal moving unit having the structure shown in FIG. 3 in which the substrate 180 is placed on the substrate 180 using the rollers 118 so that the substrate 180 can be moved in the horizontal direction is not particularly limited.

As described above, the review apparatus 1 for the substrate 180
The substrate 18 in the loading / unloading and reviewing apparatus 100
There is almost no human burden when moving 0, and even large substrates can be easily handled. In the review device 100, the arm rest 1 that moves X and Y integrally with the microscope 120.
The provision of 70 makes the observation workable and makes it possible to make corrections and the like as necessary.

The reviewing apparatus 100 includes an XY counter 140 for numerically displaying the X and Y positions of the microscope 120, so that when observing predetermined coordinates of the substrate, the observation position can be easily specified. .

Further, the review apparatus 100 is provided with a monitor for observing a microscope image of the substrate, so that when observing a defect or the like specified in the inspection process, the observation position is easily specified.

Next, an operation of observing the substrate 180 in which the defective portion of the substrate is specified by the coordinate position of the substrate in the inspection process using the review apparatus 100 shown in FIG. 1 will be described as an example. A brief explanation will be given based on this. First, the angle θ of the review device 100 is set to substantially 90 ° (an angle slightly smaller than 90 degrees), and the substrate 180 on which the defective portion (X, Y position) is specified in the inspection process is set to the position of the review device 100. The substrate 180 is placed on the roller 118, and is moved in a horizontal direction on the roller 118 to move the substrate 180 to a predetermined position.
11, a part of the back surface that is not the observation surface side of the substrate 180 is placed,
While creating a gap between the review device 100 and the substrate,
The substrate 180 is divided into a roller 118 and the two substrate support portions 11.
Fix at 1. Next, the vertical movement unit 121 and the angle adjustment unit 133 of the mounting table control unit 130 are adjusted to have a height and an angle suitable for a person who observes the substrate surface. Next, if necessary, the Y-direction driving unit 113 and the X-direction driving unit 115 are driven based on the X and Y values of the XY counter 140 based on the result of the inspection process, and the microscope 120 is moved in the X and Y directions. To a point near a predetermined position (defect position). Next, when reaching the vicinity point, only the X movement of the microscope 120 is performed, and the microscope 120 stops at the position where the LEDs in the X direction array 191 are turned on. Further, at this position in the X direction, the Y
Only the movement is performed, and the movement is stopped at the position where the LEDs in the Y-direction array 193 are turned on. The positions of the microscope corresponding to the positions where the LEDs in the X direction array 191 are turned on and the positions where the LEDs in the Y direction array 193 are turned on are the observation positions to be obtained. Note that, in the above, the operation of moving the microscope to the nearby point by using the XY counter is not performed, and the L of each X-direction array 191 is directly controlled.
The position where the ED is turned on and the position where the LEDs in the Y direction array 193 are turned on may be obtained. In addition, in order to obtain the position where the LED is turned on, the microscope is first moved only in the Y direction,
Subsequently, it may move only in the X direction, or may move alternately in the X direction and the Y direction. Next, the defect is specified while observing the monitor image of the microscope image on the monitor 150. The magnification of the microscope when watching the monitor is set to an appropriate magnification for searching for a defective portion. After identifying the defective portion on the monitor, the magnification is changed to an easily observable one, and the observation operation is performed while looking at the microscope. In this way, observation of a predetermined coordinate position can be easily performed.

[0020]

As described above, the present invention is a review device for observing disconnection or short circuit of electrode wiring of a large-sized substrate such as a PDP substrate. In addition, it is possible to provide a review device for a large-sized board that does not require a great deal of human posture. In particular, it is effective in observing the disconnection and short circuit of the electrode wiring for PDP, which is becoming increasingly larger and the cell size is further advanced, and the electrode wiring shape is also various. As a result, it corresponds to the mass production of PDP substrates I can do it.

[Brief description of the drawings]

FIG. 1 is a schematic plan view showing an example of an embodiment of a review device of the present invention.

FIG. 2 is a cross-sectional view of one example of an embodiment;

FIG. 3 is an enlarged sectional view around a roller portion.

FIG. 4 shows a conventional correction table (review device).

FIG. 5 is a perspective view for explaining a PDP.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Review device 110 Substrate mounting table 111 Substrate support portion 112 Inspection light irradiation portion 112A Fluorescent lamp 112B Transparent acrylic plate 112C Transparent glass plate 112D Diffusion acrylic plate 113 Y-direction rail 114 Wiring storage portion 115 X-direction rail 116 Wiring storage portion 117 X-direction Moving table 118 Roller (horizontal moving section) 120 Microscope 130 Mounting table control section 131 Vertical moving section 133 Angle adjusting section 140 XY counter 150 Monitor 170 Arm rest 180 Board 190 LED 191 X-direction LED array 193 Y-direction LED array 400 Correction table 410 Board mounting table 413 Y-direction rail 414 Wiring storage section 415 X-direction rail 416 Wiring storage section 417 X-direction moving table 418 Roller (horizontal moving section) 420 Microscope 430 Mounting table control section 440 XY counter 450 monitor 470 arm every table 480 board

Claims (6)

[Claims] 1. A reviewing device for observing a predetermined coordinate location of a large substrate, such as a correction table for correcting a disconnection defect or a short-circuit defect of an electrode wiring of a large substrate, wherein X is a horizontal direction along a substrate surface. Direction, and an observation device for observing the substrate surface, such as a microscope and a camera, which is movable in the Y direction along the substrate surface orthogonal to the X direction, and along the X direction and the Y direction, respectively. An X-direction LED array and a Y-direction LED array are provided.
The ED array turns on only the LED of the corresponding X-direction LED array and the LED of the corresponding Y-direction LED array only when the observation device is located at the predetermined X-direction position and the predetermined Y-direction position of the substrate, respectively. A review device characterized in that: 2. The substrate is irradiated with inspection light composed of diffused light on the entire back surface other than the observation surface side of the substrate, and one side of the substrate is horizontally oriented downward and the substrate surface is oblique or vertical. A substrate mounting table on which the substrate is to be placed, and an X direction that is held on the substrate mounting table to observe the correction surface side of the substrate and is orthogonal to the X direction, which is a horizontal direction along the substrate surface of the substrate, and orthogonal to the X direction. A microscope movable in the Y direction along the surface, and a mounting table control unit that holds the substrate mounting table and changes the angle and height of the substrate mounting table, and the substrate mounting table includes a 2. The apparatus according to claim 1, further comprising a horizontal moving unit configured to move the substrate such that one side of the lower side extends along the horizontal direction.
The described review device. 3. The horizontal moving section according to claim 1, wherein one side of the substrate is set to a lower side, and the side is moved by being placed on a plurality of rollers or rolls extending in a horizontal direction. Review equipment. 4. The method according to claim 1, wherein the substrate mounting table contacts the entire back surface of the substrate other than the correction surface side, and irradiates the entire back surface with observation light for observation via a diffusion plate. Review equipment to feature. 5. The review device according to claim 1, further comprising a monitor for observing a microscope image of the substrate. 6. The reviewing device according to claim 1, wherein the reviewing device is a repair table for repairing a defect such as a disconnection or a short circuit of an electrode wiring on a substrate for a plasma display.