JP4519236B2 - Method for manufacturing member for plasma display, member for plasma display, and plasma display using the same. - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a member for a plasma display used for a wall-mounted television or a large monitor, and a method for manufacturing the plasma display, and more particularly to a method for forming electrodes of the member for plasma display and a continuity test.
[0002]
[Prior art]
Plasma displays (hereinafter abbreviated as PDPs) are attracting attention as displays that can be used in thin and large televisions. An exploded perspective view of a structural example of the PDP is shown in FIG. In the PDP, for example, a plurality of paired sustain electrodes are formed of a material such as silver, chromium, aluminum, or nickel on a glass substrate on the front plate side serving as a display surface. Further, a dielectric layer mainly composed of glass is formed with a thickness of 20 to 50 μm by covering the sustain electrode, and an MgO layer is formed by covering the dielectric layer. On the other hand, on the glass substrate 101 on the back plate side, a plurality of address electrodes 102 are formed in stripes, and a dielectric layer mainly composed of glass is formed covering the address electrodes. A barrier rib for partitioning the discharge cells is formed on the dielectric layer, and a phosphor layer is formed in a discharge space formed by the barrier rib and the dielectric layer. In a PDP capable of full color display, the phosphor layer is composed of materials that emit light of RGB colors. The front plate and the back plate are sealed so that the sustain electrode of the glass substrate on the front plate side and the address electrode 102 on the back plate side are orthogonal to each other, and helium, neon, xenon, etc. are formed in the gap between the substrates. A noble gas is sealed, and driving circuits such as the scan driver IC and the address driver IC described in FIG. 7 are mounted to form a PDP. Since the pixel cell is formed around the intersection of the scan electrode and the address electrode, the PDP has a plurality of pixel cells and can display an image.
[0003]
When performing display in the PDP, when a voltage higher than the discharge start voltage is applied between the scan electrode and the address electrode in a selected pixel cell when light is not emitted, positive ions and electrons generated by ionization are Is a capacitive load and moves toward the opposite polarity electrode in the discharge space and charges the inner wall of the MgO layer. The inner wall charge is not attenuated due to the high resistance of the MgO layer, and becomes a wall charge. Remains.
[0004]
Next, a sustaining voltage is applied between the scan electrode and the sustain electrode. Where there is a wall charge, it can be discharged even at a voltage lower than the discharge start voltage. The xenon gas in the discharge space is excited by the discharge, and ultraviolet light having a wavelength of 147 nm is generated. The ultraviolet light excites the phosphor, thereby enabling light emission display.
[0005]
In such a PDP, it is important to increase the luminance when the phosphor screen emits light. As a means for increasing the brightness, as shown in FIG. 7, generally, the stripe-shaped address electrodes on the back plate are divided into two upper and lower groups at the center, and the address scan is performed in order to select a pixel cell to be displayed. A dual-scan driving method is known in which the address selection period is halved by performing simultaneously and the luminance is increased by extending the discharge maintaining period in which the phosphor screen emits light.
[0006]
Conventionally, the address electrodes on the back plate are divided into two groups in the upper and lower groups at the center shown in FIG. 5 in advance when the screen printing method, etching method, photosensitive paste method, etc. are formed. It is formed by using the divided pattern of FIG. 4 and conducts a continuity test between the longitudinal direction leading ends of each electrode and between adjacent electrodes in Japanese Patent Publication No. 7-66022 or Japanese Patent Laid-Open No. 11-233021. The probe method described in (1) was performed.
[0007]
[Problems to be solved by the invention]
However, since conduction cannot be obtained at the portion where the electrodes are divided, the time required for the same number of inspection probes is doubled and the manufacturing tact is delayed as compared with the case where the electrodes are not divided. Further, when the number of inspection probes is doubled, the tact is the same, but since the processing load increases, it is necessary to increase the capacity of the measuring apparatus, which causes a problem that the apparatus cost increases. Further, since the inspection probe comes into contact with the divided portion at the center of the substrate during the continuity inspection, the electrode may be damaged during the inspection, which may result in a defect. In addition, the continuity test cannot be performed after the dielectric layer, barrier rib, and phosphor layer after the electrode is formed, and the address when the panel is turned on by overlooking defects that occur in the electrode part after the electrode is formed. There is a problem of destroying the driver IC.
[0008]
The present invention relates to a plasma display member in which electrodes are divided into two or more groups, which improves the defects of such a conventional continuity inspection method, has no defects and has excellent reliability, and An object is to provide a member for a plasma display and a plasma display.
[0009]
[Means for Solving the Problems]
That is, according to the present invention, a striped electrode pattern is formed on a substrate, a conduction inspection is performed between the longitudinal conducting ends of each electrode and between adjacent electrodes, and then the striped electrode pattern is divided into two or more groups. A width Wcut (μm) of a part to be divided of the electrode pattern is smaller than a width Wa (μm) of an undivided part of the electrode pattern, and is 10 μm or more. It is a manufacturing method of the member for plasma displays characterized by these.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
In the following, a preferred embodiment of the present invention will be described in accordance with a PDP manufacturing procedure.
[0012]
(Back plate)
An example of the back plate manufacturing flow of the present invention is shown in FIG.
In the present invention, first, a striped electrode pattern is formed on a substrate. As a substrate used for the PDP member of the present invention, a glass substrate is usually used. In addition to soda glass, “PD200” manufactured by Asahi Glass Co., Ltd. or “PP8” manufactured by Nippon Electric Glass Co., Ltd., which is a heat resistant glass for PDP, is used. Can do.
[0013]
Address electrodes 102 are formed on a glass substrate 101 in stripes at a pitch of display cells (regions for forming each RGB of a pixel) using a metal such as silver, aluminum, chromium, or nickel. As a method of forming, after applying a metal paste mainly composed of these metal powder and organic binder by screen printing, or after applying a photosensitive metal paste using a photosensitive organic component as an organic binder, It is possible to use a photosensitive paste method in which pattern exposure is performed using a photomask, unnecessary portions are dissolved and removed in a development step, and further, heated and baked at 400 to 600 ° C. to form a metal pattern. Moreover, after depositing a metal such as chromium, copper or aluminum on a glass substrate, a resist is applied, and after exposing the resist to a pattern using a photomask and developing it, etching is performed to remove unnecessary portions of the metal by etching. Can be used. The screen plate and the photomask used at this time are those in which the portion (104) to be divided of the electrode group is not divided as shown in FIGS.
[0014]
If dividing by laser irradiation, the width Wa of the electrode portion that does not divide the be cut portion of the width of the electrode Wcut (μm) (μm), as shown in FIG. 1, it is necessary Wcut is smaller than Wa Although Ru can efficiently at short time energy division is small by laser irradiation or overcurrent, when less than 10 [mu] m, a problem that the electrode formation is disconnected in addition a small defect difficulties arising. Moreover, when dividing by overcurrent, the width Wcut of the electrode at the part to be divided is preferably sufficiently small with respect to the electrode Wa, and preferably in the range of 10 μm ≦ Wcut ≦ Wa / 2.
[0015]
The electrode thickness is preferably 1 to 10 μm, and more preferably 2 to 5 μm. If the electrode thickness is too thin, the resistance value becomes large and accurate driving becomes difficult, and the power consumption tends to increase. If it is too thick, a large amount of material is required, which tends to be disadvantageous in terms of cost.
The width of the address electrode is 20 to 250 μm, more preferably 30 to 100 μm. If the width is too small, the resistance value tends to be high and accurate driving tends to be difficult. Since it becomes shorter, a short defect tends to occur. Further, the address electrodes are formed at a pitch corresponding to the display cell. The pitch is preferably 100 to 500 μm for a normal PDP and 100 to 250 μm for a high definition PDP.
[0016]
Next, in the present invention, a continuity test is performed between the longitudinal conducting ends of each electrode and between adjacent electrodes. Conductivity inspection after electrode formation is performed by a probe inspection method using an open / short inspection apparatus using an inspection pin probe or bump probe. That is, the inspection probe head is brought into contact with both terminal portions of the electrode formed on the glass substrate (101), voltage is applied between two predetermined locations, and the operation for confirming the presence / absence of conduction between them is conducted in the longitudinal direction of the electrode. Check that there is no open defect that cannot be conducted between the longitudinal conducting ends in the same wiring and that there is no short defect that is conducted between adjacent electrodes. However, nothing on the substrate is selected as a non-defective product and passed to the next process. Defective products having defects that are short-circuited between adjacent substrates and electrodes that have an open defect portion in the same wiring and cannot be electrically connected to the adjacent wiring electrodes are passed to a subsequent process after the defect portion is repaired.
[0017]
As a repair method, first, in the image processing inspection method that extracts the shape defect coordinates by image processing the image data obtained by the photographing means such as CCD at the location where the open and short defects are extracted by the continuity inspection, Identify the location. Next, depending on the type of defect, in the case of an open defect, a repairing conductive paste is applied to the defective portion using a needle, a syringe, a dispenser, etc., and then baked to be repaired. Baking includes a method of heating the entire substrate in a baking furnace and a method of heating and baking only at a repair site with a laser such as an Nd: YAG laser. However, a laser method is preferred because defect repair work efficiency is good. In case of a short defect, it is repaired by irradiating it with a laser beam. These continuity inspection and defect repair methods of the present invention require about half the inspection time and improve production efficiency compared with the case of inspecting the dual scan driving back plate that is divided into two vertically at the center of the glass. Become.
[0018]
Next, in the present invention, the striped electrode pattern is divided into two or more groups. As a method of dividing the electrode, there is a method of mechanically dividing with a blade or the like, but it is preferable to divide by heating with laser irradiation light or overcurrent that can divide the electrode without damaging the substrate.
[0019]
The laser preferably has a wavelength in the range of 0.5 to 2.0 μm that passes through the absorption band of the glass substrate. Specific examples include Nd: YAG lasers and semiconductor lasers, but the present invention is not limited to these lasers. The cutting method is not particularly limited, but from the back side of the surface on which the electrode is formed with the surface on which the electrode is formed facing down, so that the part to be divided of the electrode and the material evaporated by laser irradiation are not scattered and adhered onto the glass substrate. It is preferable to irradiate a laser.
[0020]
The laser scanning may be any method of moving the glass substrate with the laser oscillator fixed, moving the laser oscillator with the glass substrate fixed, or optically scanning with a polygon mirror or the like. The length Wd (μm) to be divided is determined by the definition of the panel, and is preferably 70 to 200 μm for a normal PDP and 30 to 100 μm for a high definition PDP. Further, when the division is performed with an overcurrent, after the continuity inspection, selection, and repair, the overcurrent is divided so that only the divided portion is burned out by resistance heating between the electrodes. As a device for passing an overcurrent between the electrodes, a continuity inspection probe may be used as it is, even if it is a dedicated device that connects the electrodes in common and divides them together. Further, in the division, an overcurrent may be used in combination in order to more reliably divide after irradiation with a laser or the like.
[0021]
If necessary, the inspection of the cut portion is performed by a normal image processing method or probe inspection method. Preferably, after the probe inspection before the cutting, the selection, repair, and cutting are performed with the probe attached, and finally the open inspection is performed. Good to do.
[0022]
As described above, the address electrode layer divided into a predetermined electrode group can be obtained on the glass substrate. In order to stabilize discharge, a dielectric layer may be provided on the address electrode layer.
[0023]
A partition located in parallel with the electrode layer is formed on the glass substrate on which the address electrode layer is formed by a sandblast method, a mold transfer method, a photolithography method, or the like. The material for the partition used in the present invention is not particularly limited, and a glass material containing an oxide of silicon and boron is preferably used. Further, when the partition walls are formed by a photolithography method, it is advantageous to include 70% by weight or more of a glass material having a refractive index of 1.5 to 1.68.
[0024]
A phosphor layer is formed on a glass substrate on which an electrode layer and a partition wall layer are formed by a photolithography method using a photosensitive phosphor paste, a dispenser method, a screen printing method, or the like. The phosphor material used in the present invention is not particularly limited, and phosphor powder is applied. For example, in red, Y ₂ O ₃ : Eu, YVO ₄ : Eu, (Y, Gd) BO ₃ : Eu, Y ₂ O ₃ S: Eu, and γ-Zn ₃ (PO ₄ ) ₂ : Mn are available. In green, Zn ₂ GeO ₂ : Mn, BaAl ₁₂ O ₁₉ : Mn, Zn ₂ SiO ₄ : Mn, LaPO ₄ : Tb, ZnS: Cu, Al, Zn ₂ SiO ₄ : Mn, As, (ZnCd) S: Cu Al, ZnO: Zn, and the like. In blue, Sr ₅ (PO ₄ ) ₃ Cl: Eu, BaMgAl ₁₄ O ₂₃ : Eu, BaMgAl ₁₀ O ₁₇ : Eu, BaMg ₂ Al ₁₄ O ₂₄ : Eu, ZnS: Ag + red pigment, Y ₂ SiO ₃ : Ce, etc. It is.
In this way, a back plate can be produced.
[0025]
(Front plate)
The glass substrate used for the front plate is the same as that described for the back plate.
[0026]
First, a transparent electrode such as tin oxide or ITO is formed on a glass substrate by a lift-off method, a photo etching method, or the like.
[0027]
On the glass substrate on which the transparent electrode is formed, a bus electrode layer is patterned by screen printing of silver, aluminum, copper, gold, nickel, or the like or a photolithography method using a photosensitive conductive paste. A transparent dielectric layer is formed on the glass substrate on which the transparent electrode and the bus electrode are formed by a screen printing method or the like. The transparent dielectric material used in the present invention is not particularly limited, but a dielectric material containing PbO, B ₂ O ₃ and SiO ₂ is applied.
[0028]
Further, for the purpose of protecting the transparent dielectric layer and lowering the discharge voltage, a protective film is formed so as to cover the transparent dielectric layer. In general, an oxide of an alkaline earth metal can be used for the protective film. In particular, MgO is preferably applied because it has excellent sputtering resistance and a high secondary electron emission coefficient. The MgO protective film is formed by electron beam vapor deposition, Mg target reactive sputtering, or ion plating.
[0029]
In this way, the front plate can be produced.
[0030]
(Plasma display)
Using the back plate and front plate of these plasma display members, after sealing the back plate and front plate, a discharge gas composed of helium, neon, xenon, etc. is formed in the space formed between the front and back substrates. After enclosing, a plasma display can be manufactured by mounting a drive circuit.
[0031]
【Example】
Hereinafter, the present invention will be specifically described with reference to examples.
( Reference Example 1)
(Preparation of Front Plate) Scan electrodes having a pitch of 375 μm and a line width of 150 μm were formed using ITO on a 13-inch glass substrate “PD200” manufactured by Asahi Glass Co., Ltd. A bus electrode having an electrode width of 50 μm and a thickness of 3 μm was formed on the substrate by a photosensitive silver paste method. Next, a front dielectric was formed to a thickness of 50 μm by screen printing with a transparent dielectric glass paste so as to cover the bus electrode in the display portion. A front plate was produced by forming a 0.5 μm thick magnesium oxide layer as a protective film by electron beam evaporation on the substrate on which the dielectric was formed.
[0032]
(Preparation of back plate)
Address electrodes were formed on a "PD200" 13-inch glass substrate using a photosensitive silver paste. Photosensitive silver paste is applied and dried, exposed to an electrode photomask having an electrode width Wa = 50 μm and a pitch of 250 μm that is not divided in the vertical direction shown in FIG. 2, and then developed and baked, Wa = 50 μm, thickness 3 μm Address electrodes with a pitch of 250 μm were formed.
[0033]
Next, the probe head was contacted between the address electrodes, and a continuity test was conducted by the probe method to select non-defective products and defective products, and the defective products were repaired.
[0034]
Nd: YAG laser was used for the electrode separation. Irradiation was performed from the surface of the substrate on which the address electrodes were formed while scanning the dividing part at an emission pulse energy of 10 mJ, a pulse repetition frequency of 10 Hz, and a beam diameter of 50 μm, and the electrodes were divided vertically by Wcut = 50 μm and Wd = 60 μm. At this time, it was possible to process in about 60% of the time of the conventional upper / lower divided address electrode substrate from the continuity test to the division.
[0035]
Next, a dielectric layer was formed to 20 μm by screen printing. Next, barrier ribs were formed by a photolithography method using a photosensitive barrier rib paste. Next, a phosphor layer was formed using a dispenser method. The phosphor powder used had a composition of red: (Y, Gd, Eu) BO ₃ , green: (Zn, Mn) ₂ SiO ₄ , blue: (Ba, Eu) MgAl ₁₀ O ₇ . Thus, a back plate was produced.
[0036]
(Production of plasma display)
The front plate and the back plate were matched so that matrix display drive was possible, sealed with a glass frit for sealing, evacuated while heating to 350 ° C., and sealed with 67 kPa of Xe 5% -Ne gas. The scan electrode is connected to the scan electrode side pulse generator of the drive circuit board via the scan driver IC, the sustain electrode is connected to the sustain electrode side pulse generator, and the address electrode is connected to the image processing unit via the address driver IC. Then, a plasma display was produced.
[0037]
A voltage added with an image data signal was applied to the address electrode of the PDP to emit light. Good display characteristics free from defects and image quality disturbance were obtained.
[0038]
(Example 1 ) An address electrode substrate was prepared using a photomask for electrodes of Wa = 50 μm, Wcut = 20 μm, Wd = 50 μm shown in FIG. 1, and an output pulse energy of 5 mJ, a pulse repetition frequency of 10 Hz, and a beam diameter of 50 μm. It was produced in the same manner as in Reference Example 1 except that the divided part was irradiated and the electrode was vertically divided at Wcut = 20 μm and Wd = 50 μm. Good display characteristics free from defects and image quality disturbance were obtained.
[0039]
(Example 2 ) It was produced in the same manner as in Example 1 except that the emission pulse energy was 6 mJ and irradiation was performed from the back surface of the substrate on which the address electrode was formed. Good display characteristics free from defects and image quality disturbance were obtained.
[0040]
(Example 3 ) An address electrode substrate was prepared using a photomask for electrodes of Wa = 50 μm, Wcut = 10 μm, Wd = 50 μm, and an overcurrent of several A was applied between the electrodes instead of irradiation with Nd: YAG laser. The sample was produced in the same manner as in Example 1 except that the electrode was cut off until it was burnt out and no conduction was obtained. Good display characteristics free from defects and image quality disturbance were obtained.
[0041]
【The invention's effect】
According to the present invention, in a plasma display member in which the electrode is divided into two or more groups, a method for manufacturing a plasma display member excellent in reliability without defects and image quality disturbance, and a plasma display member and a plasma display are provided. Can be provided.
[Brief description of the drawings]
FIG. 1 is an enlarged plan view of an embodiment of an electrode showing a planned division portion of the electrode formed according to the present invention.
FIG. 2 is an enlarged plan view of another aspect of the electrode showing a planned division portion of the electrode formed according to the present invention.
FIG. 3 is a flowchart for manufacturing a back plate according to the present invention.
FIG. 4 is a pattern example diagram of a photomask for electrode formation and a screen plate.
FIG. 5 is an enlarged view showing a divided portion of the divided electrode group.
FIG. 6 is an exploded perspective view of a plasma display.
FIG. 7 is a system diagram of a driving circuit of a plasma display.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 101 Glass substrate 102 Electrode 103 Electrode part scheduled periphery 104 Electrode part scheduled part

Claims (5)

A striped electrode pattern is formed on a substrate, and after conducting a continuity test between the longitudinal conducting ends of each electrode and between adjacent electrodes, the striped electrode pattern is divided into two or more groups. A method for manufacturing a member for a plasma display , wherein a width Wcut (μm) of a portion to be divided of the electrode pattern is smaller than a width Wa (μm) of a portion not to be divided of the electrode pattern and is 10 μm or more. The manufacturing method of the member for plasma displays . 2. The plasma display device according to claim 1, wherein whether or not there is a defect is selected by the continuity inspection, the defective electrode is repaired, and then the striped electrode pattern is divided into two or more groups. Manufacturing method of member. The method for producing a member for a plasma display according to claim 1 or 2, wherein the electrode is heated by laser irradiation light or overcurrent to divide the striped electrode pattern. The width Wcut (μm) of the part to be divided of the electrode pattern and the width Wa (μm) of the part not to be divided satisfy the following relational expression, and the electrode pattern is divided by heating the electrode with overcurrent. The manufacturing method of the member for plasma displays of Claim 3 characterized by these.
10μm ≦ Wcut ≦ Wa / 2 4. The method for manufacturing a member for a plasma display according to claim 3, wherein laser irradiation light is irradiated from the back surface of the substrate on which the electrode is formed, the electrode is heated, and the striped electrode pattern is divided.

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