JPH11177105A5 - - Google Patents

Info

Publication number
JPH11177105A5
JPH11177105A5 JP1997363444A JP36344497A JPH11177105A5 JP H11177105 A5 JPH11177105 A5 JP H11177105A5 JP 1997363444 A JP1997363444 A JP 1997363444A JP 36344497 A JP36344497 A JP 36344497A JP H11177105 A5 JPH11177105 A5 JP H11177105A5
Authority
JP
Japan
Prior art keywords
layer
aluminum
tantalum
based material
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997363444A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11177105A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP36344497A priority Critical patent/JPH11177105A/ja
Priority claimed from JP36344497A external-priority patent/JPH11177105A/ja
Priority to US09/210,781 priority patent/US6369410B1/en
Publication of JPH11177105A publication Critical patent/JPH11177105A/ja
Priority to US10/101,830 priority patent/US6613614B2/en
Publication of JPH11177105A5 publication Critical patent/JPH11177105A5/ja
Withdrawn legal-status Critical Current

Links

JP36344497A 1997-12-15 1997-12-15 半導体装置およびその作製方法 Withdrawn JPH11177105A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP36344497A JPH11177105A (ja) 1997-12-15 1997-12-15 半導体装置およびその作製方法
US09/210,781 US6369410B1 (en) 1997-12-15 1998-12-15 Semiconductor device and method of manufacturing the semiconductor device
US10/101,830 US6613614B2 (en) 1997-12-15 2002-03-21 Semiconductor device and method of manufacturing the semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP36344497A JPH11177105A (ja) 1997-12-15 1997-12-15 半導体装置およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007069775A Division JP4153015B2 (ja) 2007-03-19 2007-03-19 半導体装置

Publications (2)

Publication Number Publication Date
JPH11177105A JPH11177105A (ja) 1999-07-02
JPH11177105A5 true JPH11177105A5 (enExample) 2005-07-21

Family

ID=18479327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP36344497A Withdrawn JPH11177105A (ja) 1997-12-15 1997-12-15 半導体装置およびその作製方法

Country Status (1)

Country Link
JP (1) JPH11177105A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6580094B1 (en) * 1999-10-29 2003-06-17 Semiconductor Energy Laboratory Co., Ltd. Electro luminescence display device
JP4963158B2 (ja) * 2000-01-25 2012-06-27 株式会社半導体エネルギー研究所 表示装置の作製方法、電気光学装置の作製方法
TW513753B (en) * 2000-03-27 2002-12-11 Semiconductor Energy Lab Semiconductor display device and manufacturing method thereof

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