JP2004134568A5 - - Google Patents
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- Publication number
- JP2004134568A5 JP2004134568A5 JP2002297365A JP2002297365A JP2004134568A5 JP 2004134568 A5 JP2004134568 A5 JP 2004134568A5 JP 2002297365 A JP2002297365 A JP 2002297365A JP 2002297365 A JP2002297365 A JP 2002297365A JP 2004134568 A5 JP2004134568 A5 JP 2004134568A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- gate electrode
- breakdown voltage
- region
- voltage mos
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 6
- 230000015556 catabolic process Effects 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002297365A JP2004134568A (ja) | 2002-10-10 | 2002-10-10 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002297365A JP2004134568A (ja) | 2002-10-10 | 2002-10-10 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004134568A JP2004134568A (ja) | 2004-04-30 |
| JP2004134568A5 true JP2004134568A5 (enExample) | 2005-10-27 |
Family
ID=32287088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002297365A Pending JP2004134568A (ja) | 2002-10-10 | 2002-10-10 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004134568A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5481526B2 (ja) * | 2012-06-13 | 2014-04-23 | ラピスセミコンダクタ株式会社 | 高耐圧電界効果トランジスタ |
-
2002
- 2002-10-10 JP JP2002297365A patent/JP2004134568A/ja active Pending
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