JPH11168166A - Lead frame inspection device and inspection system provided with device thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect the entire surfaces of upper and lower surfaces of a lead frame, without inverting the upper surface of the lead frame, by a method, wherein with at least two belt conveyors, which are run in synchronization with each other, disposed in row in the running direction at an interval, a CCD camera is provided over the belt convey or on one side of the two belt conveyors, and a CCD camera is provided under the lower part of the part between the two belt conveyors. SOLUTION: A lead frame inspection device is constituted into a structure, wherein respective belts of an input side belt conveyor 7 and an output side belt conveyor 8 are run by a timing belt system of a synchronous driving unit 20 in synchronization with each other. With the conveyors 7 and 8 disposed in row in the running direction at an internal, a CCD camera 9 for upper surface inspection and a CCD camera 10 for lower surface inspection are respectively provided over the conveyor 7 and under the lower part of the part between the conveyors 7 and 8. As a result, the entire surface in the widthwise direction of the lower surface of a lead frame 11 to be inspected also can be inspected by reading together with the entire surface in the widthwise direction of the upper surface of the lead frame 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a CCD [charge c]
Oupled device Charge-coupled device] A lead frame inspection device using a line sensor camera (hereinafter referred to as a CCD camera) and a lead frame inspection system provided with the inspection device are described in detail. The position of the plated part, chipping,
The present invention relates to an apparatus and a system for inspecting dirt and the like.

[0002]

2. Description of the Related Art A lead frame for a semiconductor chip is usually formed by stamping or etching a metal plate by a press and then plating with gold, silver or the like. It is manufactured by depressing and then supplied to a mounting process such as mounting of an IC chip. The lead frame supplied to the mounting process is inspected in advance for bending, the position of the applied plating portion, chipping, dirt, and the like.

[0003] The above inspection is usually carried out by feeding a lead frame which has been punched and stacked by a manipulator type handling device to an inspection device equipped with a CCD camera which will be described later one by one, and the inspected lead frame is handled by a manipulator type handling device. From the inspection device. At the time of the removal, the removed lead frame is supplied with an interlayer paper by an interlayer paper supply device in the meantime, thereby systematizing the inspection.

[0004] As the above-mentioned inspection apparatus, an inspection apparatus shown in FIGS. 11 to 13 is known. The inspection device shown in FIG. 11 is an inspection device using a frame table, and is a top surface inspection frame table 51.
And a reverse side inspection frame table 52, and a reversing device 53 disposed between the upper side inspection and rear side inspection frame tables 51 and 52.
The top inspection frame table 51 has a lead frame
Top surface inspection CCD camera 54 for inspecting the upper surface of 11
However, a back surface inspection CCD camera 55 for inspecting the back surface of the lead frame 11 is disposed above the back surface inspection frame table 52, respectively. These frame tables 51, 52
A rectangular through hole 56 is formed at the center of the lead frame 11, and an edge 57 on which the peripheral end of the lead frame 11 is placed is formed below the opening. Furthermore, the frame table 51,
52 is configured to be horizontally held by two guide rods 58 and capable of reciprocating along the guide rods 58 by feed screws 59. In the drawing, reference numeral 60 denotes a lead frame mounting table before inspection, 61 denotes a lead frame receiving table after inspection, and 62 denotes a driving device of the feed screw 59.

[0005] Inspection by an inspection apparatus using the above frame table is performed as follows. That is, the lead frame 11 is taken out from the lead frame mounting table 60 before the inspection by a manipulator-type handling device (not shown) and transferred to the upper surface inspection frame table 51. Next, the feed screw 59 is operated to move the upper surface inspection frame table 51 to the upper surface inspection CCD camera 54.
Is reciprocated below the surface of the lead frame 11 to inspect the upper surface of the lead frame 11. Thereafter, the lead frame 11 after the upper surface inspection is transferred to the reversing device 53 by a manipulator-type handling device (not shown) to be inverted, and then transferred again to the back-surface inspection frame table 52 using the manipulator-type handling device. Next, the backside inspection frame table 52 is reciprocated below the backside inspection CCD camera 55 by operating the feed screw 59, and the backside inspection of the lead frame 11 is performed. As a result, the entire surface including the peripheral end of the lead frame 11 hidden by the edge 57 of the frame tables 51 and 52 can be inspected. Thereafter, the inspected lead frame 11 is transferred to the inspected lead frame receiving table 61 by a manipulator-type handling device (not shown) to complete the inspection. In this inspection procedure, the inspection of the lead frame 11 is sequentially performed using a plurality of manipulator-type handling devices (not shown).

In the inspection apparatus using the above frame table, since the peripheral end of the lead frame 11 hidden by the edge 57 of the frame tables 51 and 52 can be inspected only from above, the entire surface including the peripheral end can be inspected. Inspection requires the reversing device 53, which increases the size of the inspection device and complicates the control system for inspection and movement of the lead frame 11. Also,
Frame table when the size of lead frame 11 changes
It is also necessary to change the size of the receiving portion formed by the through hole 56 at the center of the 51, 52, and prepare the frame tables 51, 52 according to the size of the lead frame 11, or
52 must be telescopic. Also, frame tables 51, 52
Must be reciprocated each time an inspection is performed, and there is a problem that the idle time is long.

The inspection apparatus shown in FIG. 12 is an inspection apparatus using a roller table, and includes a roller table 64 having a plurality of drive rollers 63 and a CCD camera 54 for upper surface inspection disposed above the roller table 64. And a CCD camera 55 for back surface inspection disposed below, and in the same manner as in the case of the above-described inspection device using the frame table, a lead frame mounting table (not shown) before inspection. A lead frame 11 is taken out from the apparatus by a manipulator-type handling device (not shown), and the upper surface inspection and the back surface inspection are performed while transferring and moving the lead frame 11 on the driving roller 63 of the roller table 64. Thereafter, the inspected lead frame 11 is transferred to the inspected lead frame receiving table (not shown) by a manipulator-type handling device (not shown), and the inspection is completed. In the figure,
Reference numeral 65 denotes a drive motor, 66 denotes a drive belt, and 67 denotes illumination for inspection.

In the inspection apparatus using the roller table, the reversing device 53 such as the inspection apparatus using the frame table described above is not required, and the upper surface can be moved while the lead frame 11 moves on the roller table 64. Although it has the advantage that the back surface can be inspected, precise feeding is required when reading with the CCD cameras 54 and 55, and a slight difference in the rotation of the drive roller 63 changes the feeding speed of the lead frame 11, and the lead frame 11 Skew is easy to occur. Accordingly, it is necessary to finish the outer diameter of the driving roller 63 with high dimensional accuracy, and it is necessary to impart precise rotation to each driving roller 63, which causes a problem that the apparatus is naturally expensive.

The inspection apparatus shown in FIG. 13 is an inspection apparatus using a pinch roller, and includes a belt conveyor 69 having a round belt 68 having a circular cross section on both sides, and two belt conveyors 69.
The tables are arranged in the running direction at intervals, and pinch rollers 70 provided on both sides therebetween, a CCD camera 54 for upper surface inspection disposed above a belt conveyor 69, a belt conveyor 69 and a pinch roller 70 And the pinch roller 70 is also applicable to the lead frame 11 having a depressed portion (a portion where an IC chip is mounted). The upper and lower rollers 71 and 72 have a narrow width so as to sandwich the peripheral end of the lead frame 11, and are provided on both sides. In the drawing, reference numeral 73 denotes a frame of the belt conveyor 69, and reference numeral 74 denotes a frame of the pinch roller 70.

In the inspection apparatus using the pinch roller,
In the same manner as in the case of the inspection apparatus using the frame table described above, the lead frame 11 is taken out from the lead frame mounting table (not shown) before inspection by a manipulator-type handling device (not shown), and the lead frame 11 is removed. Is transferred onto the round belt 68 of the belt conveyor 69 on the front side, is sent to the pinch roller 70, and the upper surface inspection and the back surface inspection are performed while the pinch roller 70 performs precise feeding. Then, after this, the inspected lead frame 11 is transferred from the belt conveyor 69 on the rear side to the inspected lead frame receiving table (not shown) by a manipulator type handling device (not shown), and the inspection is completed.

In the inspection device using the pinch roller,
When the size of the lead frame 11 changes, the structure must be such that the width of the belt conveyor 69 and the pinch roller 70 can be adjusted in accordance with the width of the lead frame 11, and the adjustment takes time. When the depressed portion is formed near the peripheral end of the lead frame 11, the depressed portion interferes with the pinch roller 70 and may damage the lead frame 11, and also prevents the fine skew or meandering of the lead frame 11. There is a problem that is said to be very difficult.

Next, an interlayer paper supply device will be described.
This inter-layer paper supply device feeds inter-layer paper alternately with the inspected lead frame when transferring the inspected lead frame from the inspection device to the inspected lead frame receiving stand by the manipulator type handling device. This is a device that is transferred onto a lead frame after inspection.

FIG. 14 shows a typical interlayer paper supply apparatus. The illustrated interlayer paper supply apparatus includes an interlayer paper supply table 75.
And a suction type paper feeder 76 for taking out the interlayer paper 25 one by one from the interlayer paper supply table 75, and the suction type paper supply tool 76 is connected to the interlayer paper supply table 75 and the lead frame receiving tray after inspection ( (Not shown). The interlayer paper supply table 75 includes a table 77, a guide post 78 erected on the table 77 so that the position of the interlayer paper 25 can be adjusted in the width direction and the longitudinal direction, and moves up and down inside the erected guide post 78. Equipment 79
And an inter-layer paper receiving table 80 that moves up and down. Further, the suction type paper feeder 76 is provided with a substrate 81, a suction tube 83 provided at a predetermined interval in a longitudinal direction of the substrate 81, and a vacuum suction plate 82 attached to a tip end (lower end), and a suction tube 83. , And an exhaust blower (not shown) connected to the apparatus, and the substrate 81 is attached to a manipulator (not shown) via an elevating device 84.

Feeding of interlayer paper by the above-described interlayer paper supply device is performed as follows. First, before feeding the interlayer paper 25,
The standing position of the guide post 78 is adjusted and fixed in the width direction and the longitudinal direction according to the size of the interlayer paper 25, and the position of the vacuum suction plate 82 of the suction type paper feeding device 76 is also changed according to the size of the interlayer paper 25. Adjust according to. Thereafter, when feeding the interlayer paper 25, the manipulator is operated on the interlayer paper 25 to move the suction type paper feeder 76, and the elevating device 84 is operated to suction the vacuum suction disk 82 to the interlayer paper 25. Descend to the position. When the vacuum suction disk 82 suctions the interlayer paper 25, the lifting device 84 is operated to raise the vacuum suction disk 82. Next, by the manipulator, the lead frame after inspection is moved onto the receiving table, the vacuum suction plate 82 is lowered, and the lead frame after inspection is moved.
The interlayer paper 25 is fed onto the top of the sheet 11. Hereinafter, this operation is repeatedly performed each time the lead frame 11 after the inspection is transferred to the lead frame receiving stand. In this paper feeding, the height of the uppermost part of the bundle of interlayer papers 25 on the interlayer paper supply table 75 is level-controlled by the elevating device 79 of the interlayer paper receiving table 80 so that a reliable vacuum suction operation is performed.

By the way, the interlayer paper 25 is sucked one by one in the above manner and fed onto the lead frame 11 after the inspection. The width and length of the interlayer paper 25 depend on the size of the lead frame 11. In addition, the hole is made to avoid the depressed part of the lead frame 11,
There are various paper qualities and thicknesses of 25. Therefore, when the interlayer paper 25 is sucked by the vacuum suction disk 82, depending on the paper quality, it may pass through the fine holes of the first sheet, or may be entangled by burrs in the holes opened to avoid the depressed portion by punching or the like. The second sheet may be adsorbed. In a new bundle, the interlayer paper 25 adheres considerably, and the phenomenon of second sheet suction is likely to occur. In order to prevent such a phenomenon, it is conceivable to adjust the vacuum suction force according to the difference in paper quality. However, there is a problem that fine adjustment of the vacuum pressure is required and it is practically difficult. To improve this problem,
As shown in FIG. 15, a projection 85 is provided at the uppermost portion of the guide post 78 on the width side, and the second sheet is scraped off when the suction type paper feeder 76 is raised. The position of 82 depends on the length of the interlayer paper 25 and the position of the hole opened so as to avoid the depressed portion, but the position change of the guide post 78 is restricted, so the position of the vacuum suction plate 82 and the protrusion Piece
There is a problem that the position of 85 is not appropriate in many cases, and the paper slips or escapes, and the second sheet cannot be reliably scraped off.

SUMMARY OF THE INVENTION The present invention has been made to solve the problems of the above-described lead frame inspection apparatus and the problem of the interlayer paper supply apparatus which is a lower process equipment of the inspection apparatus. One is that it is possible to inspect the entire surface in the width direction without reversing the top and back surfaces of the lead frame, and to perform precise feeding when reading the lead frame with a CCD camera, and to damage the lead frame.
An object of the present invention is to provide a lead frame inspection device that can be transported without skewing or meandering.

Another object of the present invention is to transfer the interleaved paper one by one onto the lead frame after transferring the inspected lead frame to a lead frame receiving stand as a lower process equipment of the lead frame inspection apparatus. An inspection system including an interlayer paper supply device is provided.

[0018]

Means for Solving the Problems The above paragraph number [001
In order to achieve the object of (6), the lead frame inspection apparatus according to the present invention arranges at least two belt conveyors running synchronously in a row in the running direction at intervals, and attaches a CCD camera to the belt conveyor. It is arranged above and below the belt conveyor.

In the lead frame inspection apparatus having the above structure, a belt conveyor running synchronously is adopted, so that the lead frame placed on the belt conveyor is:
Since there is no contact with the outside of the belt conveyor during transport and reading, it is sent in a stable state without skewing or meandering, and highly accurate inspection can be performed. In addition, since at least two belt conveyors are arranged at an interval, a CCD camera that reads the lower surface is disposed between the belt conveyors, so that the lower surface of the lead frame can be aligned with the upper surface without inverting the lead frame. The entire surface in the width direction can be read and inspected. For this reason, it is also effective for the inspection of the entire surface of a multi-spot type frame or frame material, and the upper and lower surfaces can be inspected simultaneously without using a reversing device. In addition, if the width of the belt conveyor is made in consideration of the maximum width of the lead frame to be handled, a lead frame having a width equal to or less than the maximum width can be inspected without adjusting in the width direction, and the structure is simplified.

When reading using transmitted light illumination is necessary in addition to the above-mentioned CCD camera, three belt conveyors running in synchronization are arranged in the running direction at intervals with two belt conveyors. A series of inspections can be performed by disposing a camera using transmitted light illumination between the third and third belt conveyors.

Further, in order to achieve the object of paragraph [0017], a lead frame inspection system according to the present invention includes the lead frame inspection device (claim 1 or claim 2) of the present invention. Downstream of the inspection device, a lead frame receiving table for receiving a lead frame after inspection, an interlayer paper supply table for stocking and feeding interlayer paper to be supplied between lead frames placed on the receiving table, A lead frame inspection system including a suction type paper feeder that reciprocates between the lead frame receiving table and the interlayer paper supply table, wherein the interlayer paper supply table is arranged on a table in a width direction of the interlayer paper and A guide post erected so that the position can be adjusted in the longitudinal direction, a horizontal plate attached to an upper portion of the width-side guide post, and having a long hole capable of moving and fixing the guide post; It is made and a two-ply extraction preventing jig interlayer sheet which is mounted adjustably along the long hole of the plate.

In the lead frame inspection system having the above-described structure, the jig for preventing the two sheets of interlayer paper from being taken out is placed on the upper part of the guide post standing on the table so that the jig can be adjusted in the width direction and the longitudinal direction of the interlayer paper. The horizontal plate having a long hole which can be attached to the guide post and which can move and fix the guide post can be mounted so as to be adjustable in position along the long hole. Even if the width and length are changed, it is possible to install the jig for preventing two layers of interlayer paper from being taken out at the correct position with respect to the vacuum suction position of the suction type paper feeder, and to squeeze the width direction end of the interlayer paper. Thus, even if two sheets of interlayer paper are adsorbed, one sheet can be reliably scraped off and only one sheet can be adsorbed, and the sheet can be fed one by one onto the lead frame after the inspection of the interlayer paper. .

[0023]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram of an inspection system including a lead frame inspection device according to the present invention, and FIG.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view of a lead frame inspection device according to the present invention, wherein a is an overall front view schematically showing a power transmission mechanism, b is a view as viewed from an arrow A of FIG. FIGS. 4A and 4B are explanatory views of the table, where a is a top view, b is a front view, and FIG.
It is a side view of b. In the drawing, 1 is a lead frame inspection apparatus, 2 is an outgoing side conveyance table, 3 is a defective lead frame receiving stand, 4 is a good lead frame receiving stand, 5
Denotes an interlayer paper supply table, and 6 denotes a suction type paper feeder.

In the lead frame inspection apparatus 1, the entrance belt conveyor 7 and the exit belt conveyor 8 are arranged in the running direction at an interval, and the CCD camera 9 for inspecting the upper surface is connected to the entrance belt conveyor 7. Above, C for lower surface inspection
A mounting table on which a CD camera 10 is disposed below the entrance and exit belt conveyors 7 and 8, and a lead frame 11 before inspection is placed on the side of the entrance belt conveyor 7.
12 are installed and configured. In addition, reference numerals 9A and 10A indicate illumination for inspection.

The entrance belt conveyor 7 and the exit belt conveyor 8 are the same type of belt conveyor, and are configured by winding a belt 17 around a driving pulley 13, a driven pulley 14, an idler 15, and a take-up pulley 16, In this example, the driven pulleys 14 and 14 on the input / output side are arranged side by side with a space between them, and the driving pulleys 13 and 13 on the input / output side are provided with a timing gear 18 and a belt 19. Is installed. In addition, 21 is a frame of a belt conveyor.

The delivery table 2 is provided with left and right frames 22.
And a horizontal guide roller 23 and a vertical guide post 24 for receiving and transporting the inspected lead frames 11 alternately arranged at predetermined intervals inside the respective frames 22. A receiving board 3 for a defective lead frame and a receiving board 4 for a non-defective lead frame are provided adjacent to each other, and an interlayer paper supply board 5 is provided on the other side. A frame is erected above the non-defective lead frame receiving table 4 and the interlayer paper supply table 5, and the non-defective lead frame receiving table 4 is extended along the frame.
A manipulator (not shown) provided with a traveling vehicle that travels between the inter-layer paper supply table 5 and the inter-layer paper supply table 5 is provided. The manipulator shown in FIG. A suction-type paper feeding device 6 having the same configuration as that of the above-mentioned device is attached to be able to move up and down.

As shown in FIGS. 3 and 4, the interlayer paper supply table 5 has a table 26 and four guide posts 27A to 27D for regulating the width direction of the interlayer paper 25 erected on the table 26.
And two guide posts 28A and 28B that regulate the longitudinal direction
And horizontal plates 29, 30 attached to the upper portions of the width-direction regulating guide posts 27A, 27B and 27C, 27D, and horizontal plates 29, 30.
Jig 31A for preventing two sheets of interlayer paper from being removed
31D.

The place where the width-direction regulating guide posts 27A and the longitudinal direction regulating guide posts 28A, which are reference posts, are erected on the table 26, and the width-direction regulating guide posts.
In each place where 27B is repositioned according to the length of the interlayer paper 25 (the guide post is shown by a solid line and a two-dot chain line), a through hole 33 having a step 32 shown in FIG. The position where the direction regulating guide posts 27C and 27D are changed according to the width of the interlayer paper 25 (the guide posts are shown by a solid line and a two-dot chain line) and their respective standing positions and the longitudinal direction regulating guide posts 28B
The guide posts are changed according to the length of the interlayer paper 25 (the guide posts are shown by solid lines and two-dot chain lines). Each of the guide posts is adjusted to the width and length positions of the interlayer paper 25 and stands upright in each of the opened holes.

Further, as shown in FIG. 7, the horizontal plates 29 and 30 are formed of a relatively thick strip having the same structure, and one end is provided with a width direction regulating guide post 27A or 27C. A bolt hole 36 for mounting, and a long hole 37 for mounting on the width direction regulating guide post 27B or 27D and a mounting jig 31B or 31D from the other end side, and a bolt hole 36 and a long hole. Prevention jig 31A between holes 37
Alternatively, long holes 38 for attaching 31C are formed.

The preventive jigs 31A to 31D have the same structure, and as shown in FIG.
A block piece 43 having an L-shaped cross section provided with 1, 42, and a protruding piece 45 for rubbing the width end of the interlayer paper 25 provided with a long hole 44 in the center portion, Side 39 of block piece 43
On the upper surface, a wing bolt 46 is attached by passing it through the long hole 44 and tightening it into the screw hole 41. And prevention jig 31A
31D is attached to the horizontal plate 29 or 30 by passing a wing bolt 47 through the long hole 37 or 38 of the horizontal plate 29 or 30 and tightening it into the screw hole 42.

In the inspection system 1 of the lead frame inspection system having the above-described configuration, the inspection device 1 is configured such that the respective belts 17 of the entrance-side belt conveyor 7 and the exit-side belt conveyor 8 run synchronously by a timing belt type synchronous driving device 20. Therefore, the lead frame 11 to be inspected is a CCD for inspecting the upper and lower surfaces while the conveyor belts 7, 8 are being conveyed.
When reading with the cameras 9 and 10, the outside of the belt 17 of the entrance and exit belt conveyors 7 and 8 does not come into contact with anything, so it is sent in a stable state without skewing or meandering, and high-precision inspection can be performed. . In addition, the entrance and exit belt conveyors 7 and 8 are arranged in a row in the traveling direction with an interval, and a CCD camera 9 for upper surface inspection is provided above the entrance belt conveyor 7.
The lower surface inspection CCD camera 10 is disposed below the entrance and exit belt conveyors 7 and 8, respectively.
The lower surface of 11 can also be inspected by reading the entire surface in the width direction. Therefore, if the width of the belt 17 of the entrance and exit belt conveyors 7 and 8 is set in consideration of the maximum width of the lead frame 11 to be inspected, the lead frame 11 to be inspected having a width equal to or less than the maximum width will Inspection can be performed without adjustment in the width direction. Even if the lead frame 11 to be inspected is a multi-spot type frame or a frame material, the entire surface can be inspected simultaneously without reversing the upper and lower surfaces.

In the above-described example, an example was described in which the belt 17 of the entrance / exit belt conveyors 7 and 8 was constituted by a single wide belt, but the present invention is not limited to this example.
For example, as shown in FIG. 9, a plurality of belts 48 (4 in FIG.
Book) may be provided. In addition, in the inlet / outlet belt conveyors 7, 8, drive pulleys 13, 13 are provided on both the inlet / outlet belt conveyors 7, 8, and a timing gear 18 and a belt 19 are provided between the drive pulleys 13 to synchronize. However, as shown in FIG. 10, one of the drive pulleys 13 is free, and the entrance and exit belt conveyors 7, 8
The timing gear 18 and the belt 19 between the driven pulleys 14 and 14
May be provided for synchronization.

In the lead frame inspection system having the above-described structure, the jigs 31A to 31D for preventing the two sheets of interlayer paper from being stacked on the interlayer paper supply table 5 are adjusted in the width direction and the longitudinal direction of the interlayer paper 25. An elongated hole 37 and a jig 31A, which are attached to the upper portions of guide posts 27A to 27D erected on the table 26 so as to move and fix the guide posts 27B and 27D,
Of the horizontal plates 29, 30 having the slots 38 for mounting 31D,
38, and the protruding piece 45 of the prevention jigs 31A to 31D itself is mounted on the upper surface of the side 39 of the block piece 43 with the wing bolt 46 so that the amount of movement can be adjusted. Even if the width and length of the interlayer paper 25 change according to the width and length of the frame 11, the two
The sheet stacking and unloading jigs 31A to 31D can be set at an appropriate position with respect to the vacuum suction position of the suction type sheet feeding device 6, and
The width direction end of the interlayer paper 25 can be reliably formed by adjusting the amount of the projecting pieces 45 to come and go. Thereby, the interlayer paper 25
Even if two sheets are adsorbed, one sheet can be reliably scraped off and only one sheet can be adsorbed, and the sheet can be reliably fed one by one onto the lead frame 11 after the inspection of the interlayer paper 25.

Note that, in the interlayer paper supply table 5, the horizontal plate
Although an example in which three holes of the bolt holes 36 and the long holes 37 and 38 are provided in the 29 and 30 has been described, the present invention is not limited to this, but one long hole or an appropriate number of long holes or A bolt hole may be provided. The tip of the projection piece 45 may have any shape as long as it can squeeze the interlayer paper 25, for example, may be formed in a comb shape, a blade shape, or a large number of fine lines are formed on the front surface. It may be provided so as to protrude.

[0035]

As described above, according to the lead frame inspection apparatus of the present invention, since the belt conveyor that runs synchronously is employed, the lead frame placed on the belt conveyor is transported. Since the inside and outside of the belt conveyor do not touch anywhere during reading,
A CCD camera that reads the lower surface of the lead frame is provided between at least two belt conveyors that are sent in a stable state without skewing or meandering and that are arranged at intervals. It is possible to inspect the lower surface of the lead frame together with the upper surface without inverting the entire surface in the width direction, and it is possible to inspect the lead frame with high accuracy.

According to the lead frame inspection system of the present invention, in addition to the above-described inspection effect, the non-defective lead frame after the inspection is surely loaded with the interlayer paper one by one and laminated alternately. Can be done.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an inspection system including a lead frame inspection device according to the present invention.

FIGS. 2A and 2B are explanatory views of a lead frame inspection apparatus according to the present invention, in which a is an overall front view schematically showing a power transmission mechanism, and b is a view of an arrow A of a.

FIG. 3 is an explanatory diagram of an interlayer paper supply table according to the present invention,
a is a top view and b is a front view.

FIG. 4 is a side view of FIG. 3b.

FIG. 5 is an enlarged sectional view of a portion B in FIG. 4;

FIG. 6 is an enlarged sectional view of a portion C in FIG. 4;

FIG. 7 is an explanatory view of a horizontal plate according to the present invention.

FIG. 8 is an enlarged sectional view taken along line DD of FIG. 3a.

FIG. 9 is an explanatory view of a belt according to another embodiment of the inlet / outlet belt conveyor according to the present invention.

FIG. 10 is an explanatory diagram of a drive mechanism of another embodiment in the entrance / exit belt conveyor according to the present invention.

FIG. 11 is an explanatory diagram viewed from the top of an inspection device using a conventional frame table.

FIG. 12 is an explanatory diagram of an inspection device using a conventional roller table, where a is an overall front view schematically showing a power transmission mechanism, and b is an EE cross-sectional view of a.

13 is an explanatory view of a conventional inspection device using a pinch roller, wherein a is an overall front view omitting a power transmission mechanism, b is an FF cross-sectional view of a, and c is a GG cross-section. FIG.

14A and 14B are explanatory diagrams showing a conventional typical interlayer paper supply device, where a is a top view and b is a front view.

FIG. 15 is an explanatory diagram of a guide post of another embodiment in a conventional interlayer paper supply device.

[Explanation of symbols]

1: Lead frame inspection device 2: Outgoing conveyance table 3: Receiving tray for defective lead frame 4: Receiving tray for non-defective lead frame 5: Interlayer paper supply tray 6: Suction type paper feeder 7: Inlet belt conveyor 8: Outgoing belt conveyor 9: CCD camera for upper surface inspection 10: CCD camera for lower surface inspection 11: Lead frame 12: Lead frame mounting table 13: Driving pulley 14: Driven pulley 15: Idler 16: Take-up pulley 17: Belt 18: Timing Gear 19: Timing belt 20: Timing belt type synchronous drive 21: Belt conveyor frame 22: Outgoing transfer table frame 23: Horizontal guide roller 24: Vertical guide post 25: Interlayer paper 26: Table 27A to 27D: Width direction Regulation guide post 28A, 28B: Longitudinal regulation guide post 29, 30: Horizontal plate 31A to 31D: Prevention jig 32, 34: Step 33: Through hole 35: Penetration Through hole 36: Bolt hole 37, 38: Long hole 39, 40: Side 41, 42: Screw hole 43: L-shaped block piece 44: Long hole 45: Projection piece 46, 47: Butterfly bolt 48: Belt

Continued on the front page (72) Inventor Yuji Yamamoto 1-5-5 Takatsukadai, Nishi-ku, Kobe City, Hyogo Prefecture Inside Kobe Steel No. 5 Building Genesis Technology Co., Ltd. (72) Inventor Yasuhide Nakai 1 Takatsukadai, Nishi-ku, Kobe City, Hyogo Prefecture No.5-5 Kobe Steel No.5 Building Genesis Technology Co., Ltd.

Claims (3)

[Claims] 1. At least two belt conveyors running synchronously are arranged in the running direction at intervals, and CCD line sensor cameras are arranged above the belt conveyor and below the belt conveyor, respectively. An inspection device for a lead frame, comprising: 2. A belt conveyor comprising: three belt conveyors which run in synchronization with each other in a row in the running direction with a space between them;
Inspection of a lead frame, wherein a camera using transmitted light illumination is arranged between the second and third belt conveyors, respectively, below and between the second belt conveyors. apparatus. 3. A lead frame inspection device according to claim 1 or 2, further comprising:
A lead frame receiving tray for receiving a lead frame after inspection, an interlayer paper feeding table for stocking and feeding interlayer paper to be supplied between lead frames placed on the receiving tray, and a lead frame receiving tray and an interlayer paper A lead frame inspection system comprising a suction type paper feeder that reciprocates between a supply table and a suction table, wherein the interlayer paper supply table is positionally adjustable on a table in a width direction and a longitudinal direction of the interlayer paper. An erect guide post, a horizontal plate attached to an upper portion of the width-side guide post and having an elongated hole capable of moving and fixing the guide post, and a position adjustable along the elongated hole of the horizontal plate. And a jig for preventing two layers of interleaved paper from being taken out.