JP4836259B2 - Substrate automatic dividing method and automatic dividing apparatus - Google Patents

Substrate automatic dividing method and automatic dividing apparatus Download PDF

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JP4836259B2
JP4836259B2 JP2006325467A JP2006325467A JP4836259B2 JP 4836259 B2 JP4836259 B2 JP 4836259B2 JP 2006325467 A JP2006325467 A JP 2006325467A JP 2006325467 A JP2006325467 A JP 2006325467A JP 4836259 B2 JP4836259 B2 JP 4836259B2
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substrate
sheet
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strip
substrate body
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JP2008140974A (en
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信幸 渋谷
達 野末
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株式会社研友
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Description

本発明は、割り溝、又は割り孔を介して複数の小基板が縦横に連続する基板本体を、短冊に分割した後に、小基板に自動的に分割する方法、装置に関する。   The present invention relates to a method and an apparatus for automatically dividing a substrate main body, in which a plurality of small substrates are arranged vertically and horizontally through dividing grooves or dividing holes, into small strips.

割り溝等を介して複数の基板が連続する基板を、分割する装置として、割り溝を境に折るだけの応力をかける上下一対の上位挟持ローラと下位挟持ローラと、一対の挟むローラ間に基板を送り込むべく循環する上位搬送ベルトと下位搬送ベルトを具備し、上位挟持ローラが所定の内気圧を以って筒状に保形されたチューブからなるものが知られている(特許文献1)。
特開2000−326298号公報
As a device that divides a substrate in which a plurality of substrates are continuous via a split groove, etc., a substrate between a pair of upper and lower upper sandwiching rollers and a lower sandwiching roller that apply a stress sufficient to bend at the boundary of the split groove, and a pair of sandwiching rollers It has been known that an upper conveying belt and a lower conveying belt that circulate in order to feed in are provided, and an upper clamping roller is formed of a tube that is held in a cylindrical shape with a predetermined internal pressure (Patent Document 1).
JP 2000-326298 A

これはベルトコンベヤによって基板を搬送しながら上位挟持ローラと下位挟持ローラの間を通過する際に、隣り合う基板の間を割り溝箇所で搬送方向に直交する向きに割るものである。   This is to divide between adjacent substrates in the direction perpendicular to the conveying direction at the dividing groove portions when passing between the upper and lower clamping rollers while conveying the substrates by the belt conveyor.

ところで、基板には、全体として矩形で、小基板が割り溝等を介して縦横に連続して矩形の基板本体を形成し、基板本体の外側を割り溝等を介して四片の耳板で囲むものが存在する。小基板の具体例としては、チップ部品を搭載する基板が挙げられる。このような基板から小基板を得るには、耳板を最初に落として基板本体とし、その後、基板本体を短冊、小基板に順次分割する工程を経ることが要求される。最終製品に至る一連の工程のうち、基板本体を短冊、小基板に順次分割する各工程には、上述した分割装置を利用することができる。   By the way, the substrate has a rectangular shape as a whole, and a small substrate continuously forms a rectangular substrate body vertically and horizontally through a split groove and the like, and the outer side of the substrate body is formed by four pieces of earplates through the groove and the like. There is something to enclose. As a specific example of the small substrate, a substrate on which a chip component is mounted can be cited. In order to obtain a small substrate from such a substrate, it is required that the ear plate is first dropped to form a substrate body, and then the substrate body is sequentially divided into strips and small substrates. Of the series of processes leading to the final product, the above-described dividing apparatus can be used for each process of sequentially dividing the substrate body into strips and small substrates.

ところが、分割装置は搬送方向に隣り合う基板を分割できるが、搬送方向に直交する方向に隣り合う基板を分割できない。それ故、搬送方向に隣り合う短冊同士や小基板同士を分割することはできても、搬送方向に直交する方向に隣り合う短冊同士や小基板同士を分割することはできなかった。そして、基板本体を短冊にする際の分割方向と、短冊を小基板にする際の分割方向は、直交しているので、一つの分割装置では基板本体を短冊にするか、短冊を小基板にするかしかできない。ゆえに、最初の分割装置で基板本体を短冊にした後、短冊を回収し、その後、回収した短冊を次の分割装置に投入して小基板にする工程を経ねばならず、作業効率が悪く、作業ラインを自動化しにくい。   However, the dividing apparatus can divide the substrates adjacent in the transport direction, but cannot divide the substrates adjacent in the direction orthogonal to the transport direction. Therefore, even though the strips and small substrates adjacent in the transport direction can be divided, the strips and small substrates adjacent in the direction orthogonal to the transport direction cannot be split. Since the dividing direction when making the substrate body into a strip is orthogonal to the dividing direction when making the strip into a small substrate, the substrate body is made into a strip with one dividing device, or the strip is made into a small substrate. I can only do it. Therefore, after making the substrate body into a strip with the first dividing device, the strip must be collected, and then the recovered strip must be put into the next dividing device to make a small substrate, resulting in poor work efficiency. It is difficult to automate work lines.

また、上述した分割装置に基板本体を通す前には、耳板を除去せねばならない。というのも、耳板は、前後二片と、左右二片では、分割する向き(割り溝の方向)が180度異なっており、耳板付きのまま基板本体を分割装置に通すと、基板本体と搬送方向に隣り合う耳板は割り溝に沿って体裁よく割れるが、基板本体と搬送方向に直交する方向に隣り合う耳板は基板本体の両側を遮る形態となって、基板本体が短冊に割れるのを邪魔するからである。従って、耳板を除去するには、上述した分割装置以外の専用の装置が必要であり、その専用の装置をどのようにして自動化ラインに組み込むかも問題となる。   In addition, the ear plate must be removed before the substrate body is passed through the above-described dividing apparatus. The reason for this is that the ear plate is divided by 180 degrees in the direction of splitting (the direction of the split groove) between the front and rear two pieces and the left and right two pieces. The earboard adjacent in the transport direction can be cracked nicely along the split groove, but the earboard adjacent in the direction orthogonal to the substrate main body and the transport direction is configured to block both sides of the substrate main body, It is because it disturbs breaking. Therefore, in order to remove the ear plate, a dedicated device other than the above-described dividing device is required, and how to incorporate the dedicated device into the automated line becomes a problem.

本発明は上記実情を考慮して創作されたもので、その解決課題は、基板本体を小基板にするまでの作業ラインを自動化できる基板の自動分割方法、及び装置を提供することにある。   The present invention was created in view of the above circumstances, and a problem to be solved by the invention is to provide an automatic substrate dividing method and apparatus capable of automating a work line until the substrate body is made into a small substrate.

また、請求項5の発明の解決課題は、耳板付きの基板を、小基板にするまでを自動化することのできる基板の自動分割装置を提供することにある。   Another object of the present invention is to provide an automatic substrate dividing apparatus capable of automating the process of making a substrate with an ear plate into a small substrate.

そこで本発明者は、ベルトコンベヤを用いた従来の分割装置を二台、直交する方向に配置すれば、最初の分割装置で基板本体を短冊にし、次の分割装置で短冊を小基板に分割できると考えた。しかしながら、最初の分割装置の下流側で短冊を回収して、再度、次の分割装置に短冊を向きを合わせて投入するのは、作業効率が悪い。というのも、基板本体を分割装置に通すと、分割装置の下流では短冊が整然と並列し、分割前の基板本体の形態を維持しており、この形態を利用して、そのまま次の分割装置に投入することができれば、作業効率が格段に向上するからである。   Therefore, the present inventor can divide the substrate body into strips with the first dividing device and the strips into small substrates with the next dividing device by arranging two conventional dividing devices using a belt conveyor in the orthogonal direction. I thought. However, it is not efficient to collect the strip on the downstream side of the first dividing device and to put the strip into the next dividing device with the orientation turned again. This is because when the substrate main body is passed through the dividing device, the strips are arranged in an orderly manner downstream of the dividing device, maintaining the form of the substrate body before dividing, and this form can be used as it is to the next dividing device. This is because if it can be input, work efficiency will be greatly improved.

そこで問題となるのが、従来の分割装置がベルトコンベヤを用いている点であって、搬送方向の直交する二台のベルトコンベヤに、整然と並列した短冊をその形態を維持したままいかにして移し変えるかである。ベルト上で短冊を押し込む等して移動させれば、ベルトとの摩擦によって分割前の基板本体の形態を維持できない。   Therefore, the problem is that the conventional dividing apparatus uses a belt conveyor, and how to move the strips in orderly parallel to the two belt conveyors perpendicular to the conveying direction. It is to change. If the strip is moved on the belt by pushing it or the like, the form of the substrate body before division cannot be maintained due to friction with the belt.

そこで本発明は以下の解決手段を採用することにより、この問題を解消した。請求項1の発明の解決手段は、短冊形成工程、小基板形成工程、小基板回収工程、シート回収工程の順番からなる一連の作業工程を平面視して矩形の作業ラインに組んで、シートを循環可能に形成すると共に、矩形の作業ラインの隅角部には、シートを中継する第一〜第四受け渡し工程をそれぞれ設け、第一受け渡し工程では、シート回収工程からシートを受け取って短冊形成工程に搬送するまでの途中に、シートに基板本体を載せる基板本体搬送工程を設け、短冊形成工程では、第一受け渡し工程から搬送された基板本体をシートに載せたまま搬送し、搬送中に一次分割用ベルトコンベヤで基板本体に加圧して、パーティングラインに沿って基板本体を短冊ごとに分割しつつ、短冊が隣り合わせに整列して分割前の基板本体の矩形を維持し、短冊をシートに載せたまま一次分割用ベルトコンベヤからその延長方向の第二受け渡し工程に搬送し、第二受け渡し工程では、第二ローラコンベヤ上に搬送されたシートを、それまでの搬送方向とは直交する方向に押し込むことによって、小基板形成工程に短冊をシートに載せたまま搬送し、小基板形成工程では、短冊をシートに載せたまま搬送し、搬送中に二次分割用ベルトコンベヤで短冊に加圧して、パーティングラインに沿って短冊を小基板ごとに分割しつつ、小基板が縦横に整列して分割前の基板本体の矩形を維持し、小基板をシートに載せたまま二次分割用ベルトコンベヤからその延長方向の第三受け渡し工程に搬送し、第三受け渡し工程では、第三ローラコンベヤ上に搬送されたシートを、それまでの搬送方向とは直交する方向に押し込むことによって、小基板回収工程に小基板をシートに載せたまま搬送し、小基板回収工程では、小基板をシートに載せたまま三次コンベヤで搬送すると共にシートを残しながら小基板を作業ライン外に排出して回収し、第四受け渡し工程では、残ったシートをシート回収工程へ搬送し、シート回収工程では、シートを四次コンベヤで第一受け渡し工程に搬送することを特徴とする基板の自動分割方法である。   Therefore, the present invention solves this problem by adopting the following solutions. The solution of the invention of claim 1 is a plan view of a series of work steps comprising a strip forming step, a small substrate forming step, a small substrate collecting step, and a sheet collecting step. In addition to forming in a circulatory manner, the corners of the rectangular work line are provided with first to fourth delivery processes for relaying the sheets, respectively, and in the first delivery process, the sheets are received from the sheet recovery process and a strip forming process is performed. In the middle of the process, a board body transport process is provided to place the board body on the sheet. In the strip forming process, the board body transported from the first delivery process is transported while being placed on the sheet, and the primary division is performed during the transport. The belt body is pressed by the belt conveyor and divided into strips along the parting line, while the strips are aligned next to each other to maintain the rectangular shape of the substrate body before division. The strips are transported from the primary dividing belt conveyor to the second delivery process in the extending direction while being placed on the sheet. In the second delivery process, the sheet conveyed on the second roller conveyor is the conveyance direction up to that time. By pushing in the orthogonal direction, the strip is transported while being placed on the sheet in the small substrate forming process. In the small substrate forming process, the strip is transported while being placed on the sheet, and the strip is transported by the belt conveyor for secondary division during transport. While the strip is divided into small substrates along the parting line, the small substrates are aligned vertically and horizontally to maintain the rectangular shape of the substrate body before the division, and the small substrate is placed on the sheet while being placed on the sheet. The sheet is conveyed from the dividing belt conveyor to the third delivery process in the extension direction. In the third delivery process, the sheet conveyed on the third roller conveyor is perpendicular to the previous conveyance direction. The small substrate is transported while being placed on the sheet in the small substrate recovery process, and in the small substrate recovery process, the small substrate is transported by the tertiary conveyor while being placed on the sheet, and the small substrate is moved to the work line while leaving the sheet. The substrate is characterized in that it is discharged and collected outside, and in the fourth delivery process, the remaining sheet is conveyed to the sheet collection process, and in the sheet collection process, the sheet is conveyed to the first delivery process by a fourth conveyor. This is an automatic division method.

小基板の排出の仕方及び排出方向、並びに基板本体搬送工程での基板本体の受入れ先は、問わないが、全ての作業工程に要するスペースをコンパクトにするには、請求項2の発明の解決手段のように、小基板回収工程では、小基板を排出するために、ブラシによる小基板の掃き出し方向を小基板回収工程の作業ラインの下流側の延長方向とし、短冊形成工程の作業ラインの上流側の延長方向に、基板本体搬送工程での基板本体の受入れ先を、設けてあることが望ましい。   The method of discharging the small substrate, the discharge direction, and the receiving destination of the substrate main body in the substrate main body transporting process are not limited. However, in order to make the space required for all the work processes compact, the solution of the invention of claim 2 In the small substrate recovery process, in order to discharge the small substrate, the direction of sweeping out the small substrate by the brush is set as the extension direction downstream of the work line of the small substrate recovery process, and the upstream side of the work line of the strip forming process It is desirable to provide a receiving destination for the substrate main body in the substrate main body transporting process in the extending direction.

また、請求項3の発明の解決手段は、短冊形成装置、小基板形成装置、小基板回収装置、シート回収装置の順番に各種装置からなる作業ラインを平面視して矩形に形成して、シートを循環可能に設け、矩形の作業ラインの隅角部には、シートを中継する第一〜第四受け渡し装置をそれぞれ設け、第一受け渡し装置は、シート回収装置からシートを受け取ると共に、短冊形成装置の上流側の延長方向に備える基板本体搬送装置からシートに基板本体を載せるまで待機し、その後、基板本体を載せたシートを短冊形成装置に搬送し、短冊形成装置は、一次分割用ベルトコンベヤであって、第一受け渡し装置から搬送された基板本体をシートに載せて搬送し、搬送中に一次分割用ベルトコンベヤでシートに載った基板本体に加圧して、パーティングラインに沿って基板本体を短冊ごとに分割しつつ、短冊が隣り合わせに整列して分割前の基板本体の矩形を維持し、短冊をシートに載せたまま一次分割用ベルトコンベヤからその延長方向の第二受け渡し装置に搬送し、第二受け渡し装置は、短冊を載せたシートの搬送方向に回転方向を合わせた第二ローラコンベヤを有し、隣り合うローラ間に、短冊が載ったシートを押し出すピンを小基板形成装置に向かって往復動可能に設け、小基板形成装置は、二次分割用ベルトコンベヤであって、短冊をシートに載せたまま搬送し、搬送中に二次分割用ベルトコンベヤで短冊に加圧して、パーティングラインに沿って短冊を小基板ごとに分割しつつ、小基板が縦横に整列して分割前の基板本体の矩形を維持し、小基板をシートに載せたまま二次分割用ベルトコンベヤからその延長方向の第三受け渡し装置に搬送し、第三受け渡し装置は、小基板を載せたシートの搬送方向に回転方向を合わせた第三ローラコンベヤを有し、隣り合うローラ間に、小基板が載ったシートを押し出すピンを小基板回収装置に向かって往復動可能に設け、小基板回収装置は、ベルトコンベヤからなる三次コンベヤの下流端部の上方には排出装置を備え、排出装置は、小基板を掃きだしてシートのみを残すブラシを、往復動可能に備え、第四受け渡し装置は、小基板回収装置の下流端部で残ったシートをシート回収装置に搬送し、シート回収装置はベルトコンベヤからなる四次コンベヤである基板の自動分割装置である。   According to a third aspect of the present invention, there is provided a sheet forming apparatus comprising: a sheet forming device, a small substrate forming device, a small substrate collecting device, and a sheet collecting device in order of a work line including various devices formed in a rectangular shape in plan view. The first to fourth transfer devices for relaying the sheets are provided at the corners of the rectangular work line, respectively, and the first transfer device receives the sheets from the sheet recovery device and also forms the strip forming device. From the substrate body conveying device provided in the extension direction on the upstream side of the substrate, and waits until the substrate body is placed on the sheet, and then conveys the sheet on which the substrate body is placed to the strip forming device. The strip forming device is a belt conveyor for primary division. The substrate body transported from the first delivery device is placed on the sheet and transported, and the substrate body placed on the sheet is pressurized by the primary dividing belt conveyor during transportation, and the parting Dividing the substrate body into strips along the in-line, the strips are aligned side by side to maintain the rectangular shape of the substrate body before separation, and the strips are placed on the sheet from the primary dividing belt conveyor in the extending direction. The second delivery device has a second roller conveyor that is aligned with the direction of conveyance of the sheet on which the strip is placed, and a pin for pushing out the sheet on which the strip is placed between adjacent rollers. The small substrate forming device is a belt conveyor for secondary division, which is transported while being placed on a sheet, and is stripped by the belt conveyor for secondary division during conveyance. While the strip is divided into small substrates along the parting line, the small substrates are aligned vertically and horizontally to maintain the rectangular shape of the substrate body before the division, and the small substrate is placed on the sheet while being placed on the sheet. For division The third transfer device has a third roller conveyor whose rotational direction is aligned with the transfer direction of the sheet on which the small substrate is placed, between the adjacent rollers. A pin for extruding the sheet on which the substrate is placed is provided so as to be able to reciprocate toward the small substrate collection device. The small substrate collection device includes a discharge device above the downstream end of the tertiary conveyor formed of a belt conveyor. A brush that sweeps out the small substrate and leaves only the sheet is reciprocally movable, the fourth transfer device conveys the sheet remaining at the downstream end of the small substrate collection device to the sheet collection device, and the sheet collection device is a belt It is an automatic substrate splitting device which is a quaternary conveyor composed of conveyors.

さらに、請求項4の発明の解決手段は、排出装置はブラシによる小基板の掃き出し方向を、下流側の延長方向に形成し、第一受け渡し装置は、シートの搬送方向に回転方向を合わせた第一ローラコンベヤを有し、隣り合うローラ間に、シートを押し出すピンを短冊形成装置に向かって往復動可能に設け、短冊形成装置の上流側の延長方向には、第一ローラコンベヤの隣りに配置する第二待機ステージと、第二待機ステージから基板本体を受け取って第一ローラコンベヤ上のシートに基板本体を載せる基板本体搬送装置を有することを特徴とする。   Further, according to a fourth aspect of the present invention, the discharging device forms the sweeping direction of the small substrate by the brush in the extension direction on the downstream side, and the first delivery device has the first rotating device whose rotational direction is aligned with the sheet conveying direction. It has a one-roller conveyor, and a pin that pushes out sheets between adjacent rollers is provided so as to be able to reciprocate toward the strip forming apparatus, and is arranged next to the first roller conveyor in the extension direction on the upstream side of the strip forming apparatus. And a substrate body transfer device for receiving the substrate body from the second standby stage and placing the substrate body on a sheet on the first roller conveyor.

以上は、基板本体を分割対象に用いるものであるが、矩形の基板本体の周囲を四片の耳板で囲むと共に、耳板と基板本体の間をもパーティングラインとする形態の基板を分割対象に用いる基板の自動分割装置として、装置全体をコンパクトにするには、請求項5の発明の解決手段ように、第一受け渡し装置からシート回収装置までの一連の作業装置を本処理装置とし、本処理装置のほかに、予備処理装置を設け、予備処理装置は、カセットに積み重ねられた基板を上から取り出して、耳板を基板本体から落とす耳落とし装置を有し、耳落とし装置から基板本体搬送装置に基板本体を搬送し、耳落とし装置を、短冊形成装置の上流側の延長方向と小基板回収装置の下流側の延長方向との範囲内に形成してあることが望ましい。   The above is to use the substrate body as the object to be divided, but the rectangular substrate body is surrounded by four pieces of ear plates and the substrate is divided between the ear plate and the substrate body. In order to make the whole apparatus compact as an automatic substrate dividing apparatus used for the object, a series of work devices from the first delivery device to the sheet collecting device are used as the processing device, as in the solution of the invention of claim 5, In addition to this processing apparatus, a preliminary processing apparatus is provided, and the preliminary processing apparatus has an ear drop device for taking out the substrate stacked on the cassette from above and dropping the ear plate from the substrate main body. It is desirable that the substrate body is transported to the transport device, and the ear drop device is formed in a range between the extension direction on the upstream side of the strip forming device and the extension direction on the downstream side of the small substrate recovery device.

請求項1、3の発明は、シートに載せたまま基板本体を短冊に、短冊を小基板にそれぞれ分割することにより、基板本体の分割前の矩形を維持しながら分割して搬送でき、しかもそのシートを押す手法を採用しているので、シート上の短冊に触れることなく、小基板に分割する工程や装置に移動させることができる優れたものである。また、平面視して矩形の作業ラインに組んで、シートを循環可能に形成すると共に、矩形の作業ラインの隅角部には、シートを中継する第一〜第四受け渡し工程や装置をそれぞれ設けてあるので、シートの受け渡しを容易に行えると共に、作業効率が向上する。なお、シートを残しながらシート上の小基板を作業ライン外に排出して回収する巧みな手法を用いている。   According to the first and third aspects of the present invention, the substrate body is divided into strips and the strips are divided into small substrates while being placed on the sheet, so that the substrate body can be divided and conveyed while maintaining the rectangle before the division. Since the method of pushing the sheet is adopted, the sheet can be moved to a process or an apparatus for dividing into small substrates without touching a strip on the sheet. In addition, the sheet is formed in a rectangular work line in plan view so that the sheet can be circulated, and the first to fourth transfer processes and devices for relaying the sheet are provided at the corners of the rectangular work line, respectively. Therefore, the sheet can be easily transferred and the work efficiency can be improved. A skillful technique is used to discharge and collect the small substrate on the sheet outside the work line while leaving the sheet.

請求項2、4の発明は、矩形の作業ラインのうち一辺の外側に、小基板の回収先や基板本体の受入れ先が集中しているので、全作業工程を行う装置をコンパクトにすることができる。   In the inventions of claims 2 and 4, since the collection destination of small substrates and the reception destination of the substrate main body are concentrated outside one side of the rectangular work line, it is possible to make the apparatus for performing the entire operation process compact. it can.

請求項5の発明は、基板本体の周囲を耳板で囲む形態の基板を分割対象とするが、この場合でも、矩形の作業ラインのうち一辺の外側に耳落とし装置を、小基板の回収先や基板本体の受入れ先と同様に集中しているので、装置全体をコンパクトにすることができる。   According to the invention of claim 5, a substrate having a shape in which the periphery of the substrate body is surrounded by an ear plate is to be divided, but even in this case, the ear drop device is placed outside one side of the rectangular work line, and the small substrate is collected. Since it is concentrated in the same manner as the receiving destination of the substrate body, the entire apparatus can be made compact.

基板1は図2に示すように、矩形の平板(アルミナ基板)であって、その表面に割り溝2を縦横に形成すると共に、割り溝2に沿って間隔をあけて割り孔Hをあけ、割り溝2及び割り孔Hの形成箇所を基板1のパーティングラインL(分割基準線)とする。符号3は電極からなる金属皮膜である。パーティングラインLによって区画された基板1は、最終製品となる矩形の小基板4が縦横に連続して大きな矩形の基板本体5を構成すると共に、基板本体5の周囲四辺を細長い帯板状の耳板6で覆う形態となっている。全部で四片からなる耳板6は、前後二片が基板本体5の左右に突出する長さで、左右二片が基板本体5の前後長に一致する長さである。基板1は、耳板6を割って基板本体5のみとし、図3に示すように基板本体5を例えば縦のパーティングラインLに沿って割って小基板4が一列に連続する短冊Tとし、その後に、図4に示すように分割前の基板本体5で言えば横のパーティングラインLに沿って、短冊Tを割って小基板4とし、その小基板4が最終製品となるものである。   As shown in FIG. 2, the substrate 1 is a rectangular flat plate (alumina substrate), and has a groove 2 formed vertically and horizontally on its surface, and a slit H is formed at intervals along the groove 2. A part where the split groove 2 and the split hole H are formed is defined as a parting line L (divided reference line) of the substrate 1. Reference numeral 3 denotes a metal film made of electrodes. The substrate 1 partitioned by the parting line L is composed of a rectangular small substrate 4 as a final product, which forms a large rectangular substrate main body 5 continuously in the vertical and horizontal directions. The ear plate 6 is covered. The ear plate 6 consisting of four pieces in total has a length in which the two front and rear pieces protrude to the left and right of the substrate body 5, and the two left and right pieces match the front and rear length of the substrate body 5. The substrate 1 divides the ear plate 6 so that only the substrate body 5 is formed, and as shown in FIG. 3, the substrate body 5 is divided along, for example, a vertical parting line L to form strips T in which the small substrates 4 are continuous in a line. After that, as shown in FIG. 4, in the case of the substrate body 5 before division, along the horizontal parting line L, the strip T is divided into small substrates 4, and the small substrates 4 become final products. .

基板の自動分割装置は図1に示すように、基板1から耳板6を除去して基板本体5にするための予備処理装置7と、基板本体5を最終的に小基板4にするための本処理装置8に分けられ、本処理装置8からなる一連の作業ライン9を矩形に循環可能に形成すると共に、本処理装置8での小基板4の回収箱10と、予備処理装置7を、矩形の作業ライン9の一辺の外側(隣り側)に集中したものでる。   As shown in FIG. 1, the automatic substrate dividing apparatus removes the ear plate 6 from the substrate 1 to form a substrate body 5, and a substrate processing unit 5 to finally make the substrate body 5 into a small substrate 4. The processing apparatus 8 is divided into a series of work lines 9 composed of the processing apparatus 8 so as to be circulated in a rectangular shape, and a collection box 10 for the small substrate 4 in the processing apparatus 8 and a preliminary processing apparatus 7 are provided. It is concentrated on the outside (adjacent side) of one side of the rectangular work line 9.

予備処理装置7は、基板1を積み重ねるカセット11と、カセット11内の基板1を上昇させる昇降装置12と、カセット11内の基板1のうち一番上のものを取り出して第一待機ステージ13に移動させると共に第一待機ステージ13の基板1を第二待機ステージ14に移動させると共に第二待機ステージ14の基板本体5を本処理装置8に移動させる基板搬送装置15と、基板搬送装置15で第一待機ステージ13に移動させた基板1を他の検査エリア16との間で往復動させる検査装置17と、第二待機ステージ14に移動させた基板1を耳落としエリア18との間で往復動させると共に耳板6を除去する耳落とし装置19とからなる。   The pretreatment device 7 takes out a cassette 11 for stacking the substrates 1, an elevating device 12 for raising the substrate 1 in the cassette 11, and the uppermost one of the substrates 1 in the cassette 11, and puts it on the first standby stage 13. The substrate transfer device 15 that moves the substrate 1 of the first standby stage 13 to the second standby stage 14 and moves the substrate body 5 of the second standby stage 14 to the processing apparatus 8 and the substrate transfer device 15 The inspection apparatus 17 that reciprocates the substrate 1 moved to the one standby stage 13 between the other inspection areas 16 and the reciprocation movement of the substrate 1 moved to the second standby stage 14 to the ear drop area 18. And an ear drop device 19 for removing the ear plate 6.

カセット11は、有底筒状である。また、昇降装置12は、カセット11の内部に基板1を載せる内板20を備え、カセット11の底部に抜穴をあけ、抜穴を貫通するロッド21で内板20を昇降可能に支持し、常に一番上の基板1を基準高さにあわせるために、基板1を取るごとにその厚み分だけ内板20を上昇させる。また、カセット11の側方には、検査装置17の第一待機ステージ13、耳落とし装置19の第二待機ステージ14、本処理装置8の矩形の作業ライン9の隅角部を順次配置してある。   The cassette 11 has a bottomed cylindrical shape. The elevating device 12 includes an inner plate 20 on which the substrate 1 is placed inside the cassette 11. A hole is formed in the bottom of the cassette 11, and the inner plate 20 is supported by a rod 21 penetrating the hole so that the inner plate 20 can be moved up and down. In order to always adjust the uppermost substrate 1 to the reference height, each time the substrate 1 is taken, the inner plate 20 is raised by the thickness. Further, on the side of the cassette 11, the first standby stage 13 of the inspection device 17, the second standby stage 14 of the ear drop device 19, and the corners of the rectangular work line 9 of the processing device 8 are sequentially arranged. is there.

基板搬送装置15は、基板1を吸着して持ち上げるのに適した本数を1セットとする吸引ノズル(符号省略)が3セット左右に間隔をあけて配置され、3セットの吸引ノズルが一緒に、原点から下降、吸引による基板1の吸着、上昇、横移動、下降、吸引の解除による基板1の載せ置き、からなる基板移動工程を行うと共に、基板移動工程後に上昇、原点への横移動からなる復帰工程を繰り返し行うものである。3セットの吸引ノズルのうち、第二待機ステージ14の基板本体5を本処理装置8に移動させる装置が、基板本体搬送装置22となる。   In the substrate transfer device 15, three sets of suction nozzles (reference numerals omitted) that are suitable for adsorbing and lifting the substrate 1 are arranged at intervals on the left and right, and the three sets of suction nozzles are Substrate moving step consisting of adsorbing, ascending, laterally moving, descending and placing the substrate 1 by releasing suction from the origin and lowering from the origin is performed, and also includes raising and lateral movement to the origin after the substrate moving step. The return process is repeated. Of the three sets of suction nozzles, the apparatus that moves the substrate body 5 of the second standby stage 14 to the processing apparatus 8 is the substrate body transfer apparatus 22.

検査装置17は第一待機ステージ13を、小基板4の回収箱10の設置方向に有する検査エリア16に対して往復動可能に設けると共に、往動して停止中の第一待機ステージ13の上に載った基板1を検査して、例えば、外観不良がないか、表裏が正しく載せられているか等を、目視或いはカメラによる自動判別装置で検査し、不良等の場合は予備処理装置7及び本処理装置8を停止させ、良好な場合は、第一待機ステージ13を複動して元の位置に戻す。   The inspection device 17 is provided with the first standby stage 13 so as to be able to reciprocate with respect to the inspection area 16 having the collection box 10 of the small substrate 4 in the installation direction, and on the first standby stage 13 that is moved forward and stopped. The substrate 1 placed on the substrate is inspected, and for example, it is inspected visually or with an automatic discriminating device using a camera to check whether there is a defect in appearance or whether the front and back sides are correctly placed. The processing device 8 is stopped, and when it is satisfactory, the first standby stage 13 is double-moved to return to the original position.

耳落とし装置19も、第二待機ステージ14を小基板4の回収箱10の設置方向に有する耳落としエリア18に対して往復動可能に設けると共に、往動して停止中の第二待機ステージ14の上に載った基板1から耳板6を割って、第二待機ステージ14を復動して元の位置に戻す。なお、第一、第二待機ステージ13,14の往復動は、同時に行う。   The ear drop device 19 is also provided so as to be able to reciprocate with respect to the ear drop area 18 having the second standby stage 14 in the direction in which the collection box 10 of the small substrate 4 is installed, and is moved forward and stopped. The ear plate 6 is split from the substrate 1 placed on the substrate, and the second standby stage 14 is moved back to the original position. The first and second standby stages 13 and 14 are reciprocated simultaneously.

耳落とし装置19は図5又は図6に示すように、第二待機ステージ14を、基板1の基板本体5を載せると共に耳板6のみを食み出す大きさの水平なテーブルとし、テーブルにあけた吸引穴23からエアを吸引して吸引穴23内を負圧とすることによって基板1を固定する。第二待機ステージ14の周囲四辺上方には耳板6を傾けて割る爪24を昇降可能にそれぞれ設ける。   As shown in FIG. 5 or FIG. 6, the ear drop device 19 is configured so that the second standby stage 14 is a horizontal table on which the substrate main body 5 of the substrate 1 is mounted and only the ear plate 6 is protruded. The substrate 1 is fixed by sucking air from the suction holes 23 to make the suction holes 23 have a negative pressure. Claws 24 for inclining and breaking the ear plate 6 are provided above the four sides around the second standby stage 14 so as to be movable up and down.

図2に示すように分割前の基板1を視ると、前後二片の短い方の耳板6は、その左右端を長い方の耳板6に連続している形態である。パーティングラインLに沿って四片の耳板6を体裁よく割るには、その割る順番を、最初に長い方(左右)の耳板6、次に短い方(前後)の耳板6とする。仮に、順番を逆にすると、割り残しができるおそれがある。体裁よく割る順番を達成するために、図示しないが、四つの爪24を全体として矩形枠に組むだけでなく、長い方の耳板6を分割する爪24を、短い方の耳板6を分割する爪24よりも低く固定する。   When the substrate 1 before division is viewed as shown in FIG. 2, the ear plate 6 having the shorter front and rear two pieces has a configuration in which the left and right ends thereof are connected to the longer ear plate 6. In order to divide the four pieces of the ear plate 6 along the parting line L, the order of the division is first the longer (left and right) ear plate 6 and then the shorter (front and rear) ear plate 6. . If the order is reversed, there is a risk that it may be left unbalanced. Although not shown in the figure, the four claws 24 are not only assembled into a rectangular frame as a whole, but the claw 24 that divides the longer ear plate 6 is divided into the shorter ear plate 6. Fix lower than the nail 24.

爪24は図6に示すように水平な棒状のブロックであって、その内面側(テーブル面側)を楔形とする。爪24の昇降手順は、まず、図6(1)に示すように第二待機ステージ14に基板1を載せ、吸引装置(図示省略)によって吸引穴23内を負圧にして基板1をその耳板6が第二待機ステージ14から食み出す状態で保持する。次に、図6(2)に示すように爪24を下降して爪24で左右の耳板6を押し込み、パーティングラインLを境にして基板本体5から耳板6を割る。図6(3)に示すように割れた耳板6はそのまま落下し、爪24をさらに下降すると、図示しないが前後の耳板6が爪24によって割られ、落下し、第二待機ステージ14上には基板本体5のみが残る。   As shown in FIG. 6, the claw 24 is a horizontal bar-like block, and its inner surface side (table surface side) has a wedge shape. First, as shown in FIG. 6A, the claw 24 is moved up and down by placing the substrate 1 on the second standby stage 14 and applying a negative pressure to the inside of the suction hole 23 by a suction device (not shown). The plate 6 is held in a state of protruding from the second standby stage 14. Next, as shown in FIG. 6 (2), the claw 24 is lowered and the left and right earplates 6 are pushed by the claw 24, and the earplate 6 is split from the substrate body 5 with the parting line L as a boundary. As shown in FIG. 6 (3), the cracked ear plate 6 is dropped as it is, and when the claw 24 is further lowered, the front and rear ear plates 6 are broken by the claw 24 (not shown) and fall, and the second standby stage 14 is dropped. Only the substrate body 5 remains.

上述した予備処理装置7で行う自動的な処理工程を総括すれば、まず基板搬送装置15によってカセット11から基板1を取り出して第一待機ステージ13に載せる(基板第一搬送工程)。次に、検査装置17によって、基板1が乗ったまま第一待機ステージ13を検査エリア16に移動して基板1が正常か否か判別し異常な場合は装置全体を停止すると共に正常な場合は元のエリアに第一待機ステージ13を移動する(検査工程)。その後、基板搬送装置15によって第一待機ステージ13の基板1を第二待機ステージ14に移動する(基板第二搬送工程)。続いて、耳落とし装置19によって第二待機ステージ14を基板1が乗ったまま耳落としエリア18に移動し、基板1から耳板6を落として基板本体5とし、基板本体5が乗った第二待機ステージ14を元のエリアに戻す(耳落とし工程)。ここで、基板第一搬送工程から耳落とし工程までの全工程を、一つの耳割り工程として捉えることも可能である。同様に、基板第一搬送工程から耳落とし工程までの全工程を行う装置を、一つの耳落とし装置として捉えることも可能である。最後に、基板搬送装置15によって第二待機ステージ14上の基板本体5を本処理装置8に移動する(基板本体搬送工程)。なお、基板本体搬送工程は、本処理装置8で行う最初の工程の一部でもある。   To summarize the automatic processing steps performed by the preliminary processing apparatus 7 described above, the substrate 1 is first taken out from the cassette 11 by the substrate transfer device 15 and placed on the first standby stage 13 (substrate first transfer step). Next, the inspection apparatus 17 moves the first standby stage 13 to the inspection area 16 while the substrate 1 is on the surface, and determines whether the substrate 1 is normal. The first standby stage 13 is moved to the original area (inspection process). Thereafter, the substrate 1 of the first standby stage 13 is moved to the second standby stage 14 by the substrate transfer device 15 (substrate second transfer step). Subsequently, the ear drop device 19 moves the second standby stage 14 to the ear drop area 18 while the substrate 1 is on it, drops the ear plate 6 from the substrate 1 to form the substrate body 5, and the second on which the substrate body 5 rides. The standby stage 14 is returned to the original area (ear drop process). Here, all the processes from the substrate first transfer process to the ear drop process can be regarded as one ear splitting process. Similarly, an apparatus that performs all processes from the substrate first transfer process to the ear drop process can be regarded as one ear drop apparatus. Finally, the substrate main body 5 on the second standby stage 14 is moved to the main processing apparatus 8 by the substrate transfer device 15 (substrate main body transfer step). Note that the substrate body transporting process is also a part of the first process performed in the processing apparatus 8.

本処理装置8は図1に示すように、分割対象が基板本体5であって、基板本体5を短冊Tに分割する短冊形成装置25、短冊Tを小基板4に分割する小基板形成装置26、小基板4を回収する小基板回収装置27、シート28を回収するシート回収装置29を平面視矩形に組んで作業ライン9を構築し、シート28を水平に且つ循環可能に作業ライン9を形成してある。また、矩形に組んだ作業ライン9の隅角部には、作業ライン9の上流側から下流側にシート28を中継する第一〜第四受け渡し装置30,31,32,33を設けてある。第一〜第四受け渡し装置30,31,32,33は、正に矩形の作業ライン9の隅角部を構築することもあるし、矩形の作業ライン9の隅角部の上方に重なり合う形態で構築することもある。なお、シート28は、柔軟な導電性を有する材料を用い、最終製品となる小基板4の静電気を除去する。   As shown in FIG. 1, the processing apparatus 8 is a substrate body 5 to be divided, a strip forming apparatus 25 that divides the substrate body 5 into strips T, and a small substrate forming apparatus 26 that divides the strips T into small substrates 4. The work line 9 is constructed by assembling the small substrate collecting device 27 for collecting the small substrate 4 and the sheet collecting device 29 for collecting the sheet 28 into a rectangular shape in plan view, and forms the work line 9 so that the sheet 28 can be circulated horizontally. It is. In addition, first to fourth transfer devices 30, 31, 32, and 33 that relay the sheet 28 from the upstream side to the downstream side of the work line 9 are provided at the corners of the work line 9 assembled in a rectangle. The first to fourth delivery devices 30, 31, 32, and 33 may construct the corners of the rectangular work line 9 or overlap the corners of the rectangular work line 9. Sometimes build. Note that the sheet 28 uses a material having flexible conductivity, and removes static electricity from the small substrate 4 that is the final product.

第一受け渡し装置30は、シート28の受入れ方向に回転方向を合わせた(間隔をあけて並列した)第一ローラコンベヤ34を有し、第一ローラコンベヤ34の隣り合うローラ間に、シート28を押し出す複数のピン35(押出部材)を、シート28の受入れ方向に間隔をあけて配置し、複数のピン35を短冊形成装置25に向かって往復動可能に設けてある。第一ローラコンベヤ34を構成するローラには少なくとも一つの原動ローラ36を設け、シート回収装置29から送られたシート28を原動ローラ36の回転によって第一ローラコンベヤ34の所定位置に移動して、短冊形成装置25に正確に送り出せるように位置決めする。ピン35を、短冊形成装置25に向かって往復動する時期は、第一ローラコンベヤ34上にシート28が送り込まれ、そのシート28上に前記した基板本体搬送装置22から基板本体5をシート28の上に載せられた後が、その時期となる。なお、ピン35の上部はローラよりも上方に突出し、基板本体5が載ったシート28に干渉する構造としてある。   The first delivery device 30 has a first roller conveyor 34 whose rotational direction is aligned with the receiving direction of the sheet 28 (in parallel with a gap), and the sheet 28 is placed between adjacent rollers of the first roller conveyor 34. A plurality of pins 35 (extrusion members) to be pushed out are arranged at intervals in the receiving direction of the sheet 28, and the plurality of pins 35 are provided so as to reciprocate toward the strip forming device 25. The rollers constituting the first roller conveyor 34 are provided with at least one driving roller 36, and the sheet 28 fed from the sheet collecting device 29 is moved to a predetermined position of the first roller conveyor 34 by the rotation of the driving roller 36, Positioning is performed so that the strip forming device 25 can be accurately fed out. When the pin 35 is reciprocated toward the strip forming device 25, the sheet 28 is fed onto the first roller conveyor 34, and the substrate body 5 is moved onto the sheet 28 from the substrate body conveying device 22 described above. It is the time after being placed on top. Note that the upper portion of the pin 35 protrudes above the roller and has a structure that interferes with the sheet 28 on which the substrate body 5 is placed.

短冊形成装置25は、図7、図8に示すように一次分割用ベルトコンベヤであって、搬送方向に直交する向きのパーティングラインLに沿って基板本体5を割って複数枚の短冊Tを形成するために、上位コンベヤ37と下位コンベヤ38を上下に対向して備え、上位コンベヤ37の上位ベルト39と下位コンベヤ38の下位ベルト40の間に基板本体5を挟んで搬送し、上位ベルト39と下位ベルト40の間で、基板本体5を挟む搬送部41に、基板本体5の搬送方向を局部的に変える複数の基板割りユニット42,43を上流側から下流側に向かって順次備えたものである。   The strip forming device 25 is a primary dividing belt conveyor as shown in FIGS. 7 and 8, and divides the substrate body 5 along a parting line L in a direction perpendicular to the conveying direction to generate a plurality of strips T. In order to form, the upper conveyor 37 and the lower conveyor 38 are vertically opposed to each other, the substrate body 5 is sandwiched between the upper belt 39 of the upper conveyor 37 and the lower belt 40 of the lower conveyor 38, and the upper belt 39 is conveyed. And the lower belt 40 are provided with a plurality of substrate dividing units 42 and 43 that sequentially change the conveyance direction of the substrate body 5 from the upstream side to the downstream side in the conveyance unit 41 that sandwiches the substrate body 5. It is.

下位コンベヤ38は、基板本体5を全体的に見て水平に搬送することを目的として、複数の下搬送ローラ44に下位ベルト40を循環可能に巻きかけ、基板本体5を載せるために下位ベルト40の水平な搬送部41を上位ベルト39の搬送部41よりも上流側に延ばしてある。一方、上位コンベヤ37は、基板本体5を上位ベルト39で上から軽く押え付けることを目的として、複数の上搬送ローラ45に上位ベルト39を循環可能に巻きかけてある。また、上位コンベヤ37と下位コンベヤ38は、各々の駆動源たるモータの同期をとっていることにより、上位ベルト39と下位ベルト40が同速度で移動し、それ故、上位ベルト39と下位ベルト40で挟んだ基板本体5を投入直後の矩形形状のまま、短冊Tに割った後も、搬送できる。   The lower conveyor 38 wraps the lower belt 40 around the plurality of lower conveying rollers 44 in a circulatory manner for the purpose of conveying the substrate body 5 horizontally as a whole, and places the lower belt 40 on the substrate body 5 for mounting. The horizontal conveyor 41 is extended upstream of the conveyor 41 of the upper belt 39. On the other hand, the upper conveyor 37 wraps the upper belt 39 around the plurality of upper conveying rollers 45 in a circulatory manner for the purpose of lightly pressing the substrate body 5 from above with the upper belt 39. Further, since the upper conveyor 37 and the lower conveyor 38 are synchronized with each other as a driving source, the upper belt 39 and the lower belt 40 move at the same speed. Therefore, the upper belt 39 and the lower belt 40 are moved. The substrate body 5 sandwiched between the two can be transported even after being divided into the strips T in the rectangular shape immediately after being put in.

上流側の基板割りユニット42は、上位ローラ46と下位ローラ47の組み合わせからなるもので、上位ローラ46にエアチューブローラを、下位ローラ47に一般的な金属等からなるムクのローラを用い、エアチューブローラを、その下部が基板本体5を挟む上位ベルト39に干渉して凹む形態で回転可能に支持し、上位ベルト39と下位ベルト40との摩擦力によって上位ローラ46と下位ローラ47をそれぞれ回転させる。なお、図面では凹みを実寸比よりも強調して記載してある。そして、凹みによる干渉によって、シート28に載せたまま一緒に基板本体5の搬送方向を局部的に変え、隣り合う短冊T間のパーティングラインLに沿ってシート28を変形させながら屈曲して割ると共に、続いて下流側の基板割りユニット43に向かって搬送される際に、上位ベルト39と下位ベルト40に割った後の基板本体5が挟まれていることによって、屈曲角度が浅くなる方向に折り戻して割った後に隣り合う短冊Tを平らにする。   The upstream substrate splitting unit 42 is composed of a combination of an upper roller 46 and a lower roller 47. An air tube roller is used as the upper roller 46, and a mulch roller made of a general metal or the like is used as the lower roller 47. The tube roller is rotatably supported so that the lower part of the tube roller is recessed by interfering with the upper belt 39 sandwiching the substrate body 5, and the upper roller 46 and the lower roller 47 are rotated by the frictional force between the upper belt 39 and the lower belt 40. Let In the drawings, the dent is emphasized rather than the actual size ratio. Then, due to the interference due to the dents, the conveyance direction of the substrate body 5 is locally changed while being placed on the sheet 28, and the sheet 28 is bent and broken along the parting line L between the adjacent strips T. At the same time, when the substrate body 5 after being split into the upper belt 39 and the lower belt 40 is sandwiched when being transported toward the downstream substrate splitting unit 43, the bending angle becomes shallower. After folding back and breaking, the adjacent strips T are flattened.

下位ローラ47は、急角度に搬送方向を変更して基板本体5を短冊Tに割り易くするために、その大きさ(直径)をできるだけ小さく形成してある。この場合、直径が小さいのため、ベアリングで支持し難い。それ故、下位ローラ47の下側であって上流側と下流側には、下位ローラ47を載せる第一、第二支持ローラ48,49を図示しないベアリングを介して回転可能に支持し、搬送方向に移動不能に規制してある。   The lower roller 47 is formed to have a size (diameter) as small as possible in order to change the conveying direction to a steep angle so that the substrate body 5 can be easily divided into strips T. In this case, since the diameter is small, it is difficult to support with a bearing. Therefore, on the lower side of the lower roller 47, on the upstream side and the downstream side, the first and second support rollers 48 and 49 on which the lower roller 47 is placed are rotatably supported via a bearing (not shown), and the conveying direction It is restricted to be immovable.

上位ローラ46のエアチューブローラは、下位ローラ47に対して下流側に偏心して支持してある。エアチューブローラは図9に示すように、柔軟な筒状のチューブ50内に伸縮可能な中心軸51を、その両端部がチューブ50外に突出する状態に設け、チューブ50の両端部を気密状態に挟持する内外のクランプ52を、中心軸51の両端部に備え、エアを中心軸51の外部からその内部を経てチューブ50内に送り込むことによってチューブ50を膨らませつつ中心軸51を延長し且つクランプ52による挟持力を向上させるものである。   The air tube roller of the upper roller 46 is supported eccentrically on the downstream side with respect to the lower roller 47. As shown in FIG. 9, the air tube roller is provided with a center shaft 51 that can be expanded and contracted in a flexible cylindrical tube 50 so that both ends of the tube protrude outside the tube 50, and both ends of the tube 50 are airtight. Inner and outer clamps 52 sandwiched between the inner and outer ends of the central shaft 51 are provided at both ends of the central shaft 51. Air is fed from the outside of the central shaft 51 into the tube 50 by extending the central shaft 51 while the tube 50 is inflated and clamped. The clamping force by 52 is improved.

中心軸51は、シリンダ53内外にピストン54を出没可能に設けると共に、ピストン54よりも大径のピストンロッド55の先端部とシリンダ53の底部に大径の鍔部56を設けてある。鍔部56は、軸線延長方向に向かうにつれて小径となるテーパー形状であって、クランプ52の雄部となり、チューブ50の端部内周面に密接する。   The central shaft 51 is provided with a piston 54 in and out of the cylinder 53 so that the piston 54 can protrude and retract, and a large-diameter flange 56 is provided at the tip of the piston rod 55 having a larger diameter than the piston 54 and at the bottom of the cylinder 53. The flange portion 56 has a tapered shape having a smaller diameter in the axial extension direction, and is a male portion of the clamp 52 and is in close contact with the inner peripheral surface of the end portion of the tube 50.

クランプ52の雌部は、鍔部56を受け込むテーパー状の内壁面を備えるキャップ57であって、キャップ57の中心部からネジ58を鍔部56に捩じ込むことによって、チューブ50の端部を挟持する。ピストンロッド55の鍔部56に捩じ込むネジ58は、軸線に沿って空気注入孔59をあけてあり、ピストンロッド55には空気注入孔59に通じると共にチューブ50内に通じる連絡路60を縦横にあけてある。空気注入孔59からエアを注入することによってチューブ50が膨らみ、それに伴ってピストンロッド55とシリンダ53の各鍔部56が外向きに押し出されてピストン54がシリンダ53から抜け出る方向に移動し、チューブ50の外形を維持する。なお、棒状のピストン54は、その中間部を段差状に小径部61に形成してあり、シリンダ53の外側から捩じ込まれた係止ピン62の先を、シリンダ53の内壁面よりも小径部61に向かって突出することによって、中心軸51が伸縮可能な長さを規制してある。なお、チューブ50の内気圧は、基板本体5を短冊Tに分割するのに適当な圧に設定する。   The female portion of the clamp 52 is a cap 57 having a tapered inner wall surface that receives the flange portion 56, and the end portion of the tube 50 is screwed into the flange portion 56 from the center of the cap 57. Pinch. The screw 58 to be screwed into the flange portion 56 of the piston rod 55 has an air injection hole 59 formed along the axis, and the piston rod 55 has a communication path 60 that communicates with the air injection hole 59 and the tube 50 vertically and horizontally. It is open. By injecting air from the air injection hole 59, the tube 50 swells, and accordingly, the piston rod 55 and the flanges 56 of the cylinder 53 are pushed outward, and the piston 54 moves in the direction of exiting the cylinder 53. Maintain 50 contours. The rod-shaped piston 54 is formed in a small-diameter portion 61 with an intermediate portion in a stepped shape, and the tip of the locking pin 62 screwed in from the outside of the cylinder 53 has a smaller diameter than the inner wall surface of the cylinder 53. By projecting toward the part 61, the length by which the central shaft 51 can expand and contract is regulated. The internal pressure of the tube 50 is set to a pressure suitable for dividing the substrate body 5 into strips T.

下流側の基板割りユニット43は、上流側の基板割りユニット42で基板本体5を万一、短冊Tごとに割れなかった場合に、確実に短冊Tごとに割るために設けてある。以上によって、矩形の基板本体5はパーティングラインLに沿って短冊Tごとに左右に分割されるが、基板本体5の一枚分の短冊Tが整然と並列して分割前の基板本体5の矩形を保持し、その短冊Tをシート28に載せたまま第二受け渡し装置31に送り出す。   The downstream substrate splitting unit 43 is provided to ensure that the substrate main body 5 is not broken for each strip T by the upstream substrate splitting unit 42 and is surely split for each strip T. As described above, the rectangular substrate body 5 is divided into left and right strips for each strip T along the parting line L. However, the rectangular strips of the substrate body 5 before division are arranged in parallel in a regular manner. And the strip T is sent out to the second delivery device 31 while being placed on the sheet 28.

第二受け渡し装置31は、第一受け渡し装置30と同一構造であって、その受け渡し方向が異なるだけで、短冊形成装置25から送られた短冊Tをシート28に載せたまま、小基板形成装置26に送り出すものである。符号63は第二ローラコンベヤ、符号64はピンである。   The second delivery device 31 has the same structure as that of the first delivery device 30, and only the delivery direction is different, and the small substrate forming device 26 remains on the sheet 28 while the strip T sent from the strip forming device 25 is placed on the sheet 28. To send out. Reference numeral 63 denotes a second roller conveyor, and reference numeral 64 denotes a pin.

小基板形成装置26は、短冊形成装置25と同一構造からなる二次分割用ベルトコンベヤであり、搬送方向に延びる短冊Tを隣り合う小基板4ごとに分割するが、一枚分の基板本体5の小基板4が整然と縦横に並んで分割前の基板本体5の矩形を保持し、その小基板4をシート28に載せたまま第三受け渡し装置32に送り出す。   The small substrate forming device 26 is a secondary dividing belt conveyor having the same structure as the strip forming device 25 and divides the strip T extending in the transport direction into each adjacent small substrate 4. The small substrates 4 are arranged in the vertical and horizontal directions, hold the rectangular shape of the substrate body 5 before the division, and the small substrates 4 are sent to the third delivery device 32 while being placed on the sheet 28.

第三受け渡し装置32は第一受け渡し装置30と同一構造であって、その受け渡し方向が異なるだけで、小基板形成装置26から送られた小基板4をシート28に載せたまま、小基板回収装置27に送り出すものである。符号65は第三ローラコンベヤ、符号66はピンである。   The third delivery device 32 has the same structure as that of the first delivery device 30, and only the delivery direction is different, and the small substrate collection device is provided with the small substrate 4 sent from the small substrate forming device 26 placed on the sheet 28. 27. Reference numeral 65 is a third roller conveyor, and reference numeral 66 is a pin.

小基板回収装置27は、ベルトコンベヤからなる三次コンベヤの下流端部の上方には、小基板4の排出装置68を設けてある。排出装置68は、小基板4を掃きだしてシート28のみを残すブラシ67を、往復動可能に備えている。三次コンベヤはその下流端部の所定位置にシート28が達すると、一時停止し、その一次停止中にブラシ67を往復動させる。ブラシ67を往復動する手順としては、例えばブラシ67を基準位置からその先部がシート28に達する面まで下降し、ブラシ67の前進によって小基板4を、小基板搬送方向の延長方向に掃き出して回収箱10内に回収し、その後、ブラシ67を後退、上昇させて基準位置で停止するものが挙げられる。この停止中に、小基板4を掃きだして残ったシート28を、第四受け渡し装置33がシート回収装置29に移動させる。   The small substrate collection device 27 is provided with a small substrate 4 discharge device 68 above the downstream end of the tertiary conveyor formed of a belt conveyor. The discharging device 68 includes a brush 67 that sweeps out the small substrate 4 and leaves only the sheet 28 so as to be reciprocally movable. When the sheet 28 reaches the predetermined position at the downstream end of the tertiary conveyor, the tertiary conveyor is temporarily stopped, and the brush 67 is reciprocated during the primary stop. As a procedure for reciprocating the brush 67, for example, the brush 67 is lowered from the reference position to a surface where the tip of the brush 67 reaches the sheet 28, and the small substrate 4 is swept out in the extending direction of the small substrate conveyance direction by the advance of the brush 67. Examples include those that are collected in the collection box 10 and then the brush 67 is retracted and raised to stop at the reference position. During this stop, the fourth delivery device 33 moves the sheet 28 left after sweeping out the small substrate 4 to the sheet collection device 29.

第四受け渡し装置33は、小基板回収装置27の下流端部に残ったシート28をシート回収装置29に搬送するもので、予備処理装置7の基板本体搬送装置22と同様の構造であって、シート28を吸着するのに適切な本数からなる1セット分の吸引ノズルを、原点から下降、吸引によるシート28の吸着、上昇、横移動、吸引の解除(解除によってシート28が落下しシート回収装置29に搬送される)、横移動による原点への復帰からなるシート移動工程を行うものである。   The fourth delivery device 33 conveys the sheet 28 remaining at the downstream end of the small substrate collection device 27 to the sheet collection device 29, and has the same structure as the substrate main body conveyance device 22 of the pretreatment device 7. One set of suction nozzles, each of which is appropriate for sucking the sheet 28, is lowered from the origin, sucked, lifted, moved laterally, and released from the suction of the sheet 28 (the sheet 28 is dropped by the release and the sheet collecting device 29), a sheet moving process including returning to the origin by lateral movement is performed.

シート回収装置29はベルトコンベヤからなる四次コンベヤであって、その上流端部に載せられたシート28を、下流に向かって送り、最終的に第一受け渡し装置30に送り出す。   The sheet collecting device 29 is a quaternary conveyor including a belt conveyor, and the sheet 28 placed on the upstream end thereof is sent downstream and finally sent to the first delivery device 30.

上述した本処理装置8で行う処理工程を総括すれば、まず、シート回収装置29によってシート28を第一受け渡し装置30の第一ローラコンベヤ34に送り、第一ローラコンベヤ34の原動ローラ36が駆動してシート28を所定位置まで移動させて停止する(第一受け渡し工程の前半部)。停止中に、基板本体搬送装置22によって基板本体5を第二待機ステージ14から移動して、停止しているシート28に載せる(第一受け渡し工程中の基板本体搬送工程)。次に、第一受け渡し装置30によってピン35を往動させてシート28を短冊形成装置25の一次分割用ベルトコンベヤに送り出す(第一受け渡し工程の後半部)。続いて、短冊形成装置25の一次分割用ベルトコンベヤによって基板本体5をシート28に載せたまま搬送し、搬送中に基板本体5に加圧して、パーティングラインLに沿って基板本体5を短冊Tごとに分割しつつ、短冊Tが隣り合わせに整列して分割前の基板本体5の矩形を維持し、短冊Tをシート28に載せたまま一次分割用ベルトコンベヤからその延長方向の第二受け渡し装置31に搬送する(短冊形成工程)。   To summarize the processing steps performed by the processing apparatus 8 described above, first, the sheet collection apparatus 29 sends the sheet 28 to the first roller conveyor 34 of the first delivery apparatus 30 and the driving roller 36 of the first roller conveyor 34 is driven. Then, the sheet 28 is moved to a predetermined position and stopped (the first half of the first delivery process). During the stop, the substrate body 5 is moved from the second standby stage 14 by the substrate body transfer device 22 and placed on the stopped sheet 28 (substrate body transfer step in the first delivery step). Next, the pin 35 is moved forward by the first delivery device 30 and the sheet 28 is sent to the belt conveyor for primary division of the strip forming device 25 (the second half of the first delivery process). Subsequently, the substrate main body 5 is transported while being placed on the sheet 28 by the belt conveyor for primary division of the strip forming device 25, and the substrate main body 5 is pressurized along the parting line L while being transported. While dividing each T, the strips T are aligned side by side to maintain the rectangular shape of the substrate body 5 before the division, and the second delivery device in the extending direction from the belt conveyor for primary division with the strips T placed on the sheet 28 31 (Strip formation process).

続いて、第二受け渡し装置31によって、第二ローラコンベヤ63上に搬送されたシート28を、それまでの搬送方向とは直交する方向に押し込むことによって、小基板形成装置26に短冊Tをシート28に載せたまま搬送する(第二受け渡し工程)。その後、小基板形成装置26によって短冊Tをシート28に載せたまま搬送し、搬送中に二次分割用ベルトコンベヤで短冊Tに加圧して、パーティングラインLに沿って短冊Tを小基板4ごとに分割しつつ、小基板4が縦横に整列して分割前の基板本体5の矩形を維持し、小基板4をシート28に載せたまま二次分割用ベルトコンベヤからその延長方向の第三受け渡し装置32に搬送する(小基板形成工程)。続いて、第三受け渡し装置32によって、第三ローラコンベヤ65上に搬送されたシート28を、それまでの搬送方向とは直交する方向に押し込んで、小基板回収装置27に小基板4をシート28に載せたまま元の基板本体5の矩形を保持したまま搬送する(第三受け渡し工程)。その後、小基板回収装置27によって、小基板4をシート28に載せたまま三次コンベヤで搬送すると共にシート28上をブラシ67で掃いて小基板4を作業ライン9外の回収箱10に回収する(小基板回収工程)。残ったシート28を第四受け渡し装置33によってシート回収装置29に搬送する(第四受け渡し工程)。その後、シート回収装置29によってシート28を四次コンベヤで第一受け渡し装置30に搬送する(シート回収工程)。以上の第一受け渡し工程からシート回収工程までの各工程が自動的に繰り返し行われることによって、基板本体5が小基板4となって回収されると共に、シート28が循環する。   Subsequently, the sheet 28 conveyed on the second roller conveyor 63 is pushed by the second delivery device 31 in a direction perpendicular to the conveying direction so far, whereby the strip T is transferred to the small substrate forming device 26. (2nd delivery process). Thereafter, the strip T is transported while being placed on the sheet 28 by the small substrate forming device 26, and the strip T is pressurized by the secondary dividing belt conveyor during transport, and the strip T is moved along the parting line L to the small substrate 4. The small substrates 4 are aligned vertically and horizontally while maintaining the rectangular shape of the substrate body 5 before the division, and the third substrate in the extending direction is extended from the secondary dividing belt conveyor while the small substrates 4 are placed on the sheets 28. It is conveyed to the delivery device 32 (small substrate forming process). Subsequently, the sheet 28 conveyed on the third roller conveyor 65 is pushed by the third delivery device 32 in a direction perpendicular to the conveying direction so far, and the small substrate 4 is inserted into the small substrate collection device 27. Then, the original substrate body 5 is transported while being held in a rectangular shape (third delivery step). Thereafter, the small substrate 4 is transported by the tertiary conveyor while being placed on the sheet 28 by the small substrate collecting device 27 and the sheet 28 is swept with the brush 67 to collect the small substrate 4 in the collection box 10 outside the work line 9 ( Small substrate recovery process). The remaining sheet 28 is conveyed to the sheet collection device 29 by the fourth delivery device 33 (fourth delivery step). Thereafter, the sheet collecting device 29 conveys the sheet 28 to the first delivery device 30 by a quaternary conveyor (sheet collecting step). By automatically repeating the steps from the first delivery step to the sheet collection step, the substrate body 5 is collected as the small substrate 4 and the sheet 28 is circulated.

図10は小基板4の排出装置68の別例と第四受け渡し装置33の別例を示すものである。シート28を反転させて下流側に搬送しながら小基板を排出する排出装置68を、三次コンベヤの下流に設けると共に、小基板排出装置68の下流側に別例の第四受け渡し装置33を設け、第四受け渡し装置33の下方には小基板4の排出シュート69を設け、排出シュート69を排出装置68の下流側に向かって低くなる状態に傾斜してある。   FIG. 10 shows another example of the discharge device 68 for the small board 4 and another example of the fourth delivery device 33. A discharge device 68 that reverses the sheet 28 and discharges the small substrate while being conveyed downstream is provided downstream of the tertiary conveyor, and another fourth delivery device 33 is provided downstream of the small substrate discharge device 68, A discharge chute 69 for the small substrate 4 is provided below the fourth delivery device 33, and the discharge chute 69 is inclined so as to become lower toward the downstream side of the discharge device 68.

排出装置68は、三次コンベヤの下流に反転プレート70を、隣り合わせに且つほぼ同一高さで水平に支持すると共に、反転プレート70の下流端部をその下流側の支軸71に連結し、反転プレート70を支軸71を支点として動力によって約180度回転可能に設けてある。反転プレート70は、その上面に吸引孔72をあけ、エアを吸引して吸引孔72内を負圧にすることによって、その上面にシート28を吸着して固定し、反転時にもシート28をずれないように保持する。また、反転プレート70はその下流側の三方に小フェンス73を平面視コ字状に起立し、反転プレート70が水平から鉛直に起立する段階までに小基板4が落下しないように小フェンス73で受け止める。符号77は、シート用の位置決めストッパである。   The discharge device 68 supports the reversing plates 70 downstream of the tertiary conveyor horizontally and at substantially the same height, and connects the downstream end of the reversing plates 70 to the support shaft 71 on the downstream side. 70 is provided so as to be rotatable about 180 degrees by power with a support shaft 71 as a fulcrum. The reversing plate 70 has a suction hole 72 formed on the upper surface thereof, sucks air to create a negative pressure inside the suction hole 72, and adsorbs and fixes the sheet 28 on the upper surface, and the sheet 28 is displaced even during reversal. Hold to not. Further, the reversing plate 70 is erected in a U shape in a plan view on the downstream side of the small fence 73 so that the small substrate 4 does not fall before the reversing plate 70 rises from the horizontal to the vertical. Take it. Reference numeral 77 denotes a sheet positioning stopper.

別例の第四受け渡し装置33は、シート28よりも細い複数本の紐ベルト74をプーリー75に掛けたコンベヤであって、プーリー75の回転軸76を、シート回収装置29の搬送方向に向かって間隔をあけて配置し、紐ベルト74同士の間及び回転軸76同士の間から小基板4を下方に落下させて排出シュート69に導きつつ、複数本の紐ベルト74上に載ったシート28を、四次コンベヤからなるシート回収装置29に搬送するものである。   Another example of the fourth delivery device 33 is a conveyor in which a plurality of string belts 74 thinner than the sheet 28 are hung on the pulley 75, and the rotation shaft 76 of the pulley 75 is directed toward the conveyance direction of the sheet collection device 29. The sheets 28 placed on the plurality of string belts 74 are arranged while being spaced apart from each other and dropping the small substrate 4 downward from between the string belts 74 and between the rotation shafts 76 to guide the discharge chute 69. , And conveyed to a sheet collecting device 29 comprising a quaternary conveyor.

本発明は上記実施形態に限定されない。例えば、第一受け渡し装置30は、基板本体搬送装置22と同様の構造であっても良い。また、第四受け渡し装置33も、第一受け渡し装置30と同様の構造であっても良い。   The present invention is not limited to the above embodiment. For example, the first delivery device 30 may have the same structure as the substrate main body transfer device 22. Further, the fourth delivery device 33 may have the same structure as the first delivery device 30.

基板の自動分割装置の平面図である。It is a top view of the automatic dividing apparatus of a board | substrate. 基板の一部拡大表面図である。It is a partial enlarged surface view of a substrate. (イ)(ロ)図は基板本体を短冊に分割することを示す図面である。(A) (b) The drawing shows that the substrate body is divided into strips. (イ)(ロ)図は短冊を小基板に分割することを示す図面である。(A) and (b) are drawings showing that a strip is divided into small substrates. 耳落とし装置の平面図である。It is a top view of an ear drop device. (1)〜(3)図は耳落とし装置の作業手順を示す要部断面面である。(1)-(3) figure is a principal part sectional surface which shows the operation | movement procedure of an ear drop apparatus. 短冊形成装置を示す説明図である。It is explanatory drawing which shows a strip forming apparatus. 図7のA部拡大図である。It is the A section enlarged view of FIG. エアチューブローラの内部構造を示す断面図である。It is sectional drawing which shows the internal structure of an air tube roller. (イ)(ロ)図は排出装置、第四受け渡し装置の別例を示す平面図、側面図である。(A) and (B) are a plan view and a side view showing another example of the discharge device and the fourth delivery device.

符号の説明Explanation of symbols

1基板、2割り溝、H割り孔、Lパーティングライン、T短冊、3電極、4小基板、
5基板本体、6耳板、7予備処理装置、8本処理装置、9作業ライン、10回収箱、
11カセット、12昇降装置、13第一待機ステージ、14第二待機ステージ、
15基板搬送装置、16検査エリア、17検査装置、18耳落としエリア、
19耳落とし装置、20内板、21ロッド、22基板本体搬送装置、23吸引穴、
24爪、25短冊形成装置、26小基板形成装置、27小基板回収装置、28シート、
29シート回収装置、30第一受け渡し装置、31第二受け渡し装置、
32第三受け渡し装置、33第四受け渡し装置、34第一ローラコンベヤ、35ピン、
36原動ローラ、37上位コンベヤ、38下位コンベヤ、39上位ベルト、
40下位ベルト、41搬送部、42基板割りユニット、43基板割りユニット、44下搬送ローラ、45上搬送ローラ、46上位ローラ、47下位ローラ、48第一支持ローラ、
49第二支持ローラ、50チューブ、51中心軸、52クランプ、53シリンダ、
54ピストン、55ピストンロッド、56鍔部、57キャップ、58ネジ、
59空気注入孔、60連絡路、61小径部、62係止ピン、63第二ローラコンベヤ、
64ピン、65第三ローラコンベヤ、66ピン、67ブラシ、68排出装置、
69排出シュート、70反転プレート、71支軸、72吸引孔、73小フェンス、
74紐ベルト、75プーリー、76回転軸、77位置決めストッパ
1 substrate, 2 split groove, H split hole, L parting line, T strip, 3 electrode, 4 small substrate,
5 substrate body, 6 ear plate, 7 pretreatment device, 8 processing device, 9 work line, 10 collection box,
11 cassettes, 12 lifting devices, 13 first standby stage, 14 second standby stage,
15 substrate transfer device, 16 inspection area, 17 inspection device, 18 ear drop area,
19 ear drop device, 20 inner plate, 21 rod, 22 substrate body transfer device, 23 suction holes,
24 claws, 25 strip forming device, 26 small substrate forming device, 27 small substrate collecting device, 28 sheets,
29 sheet collecting device, 30 first delivery device, 31 second delivery device,
32 3rd delivery device, 33 4th delivery device, 34 1st roller conveyor, 35 pins,
36 driving rollers, 37 upper conveyor, 38 lower conveyor, 39 upper belt,
40 lower belt, 41 conveying section, 42 substrate dividing unit, 43 substrate dividing unit, 44 lower conveying roller, 45 upper conveying roller, 46 upper roller, 47 lower roller, 48 first support roller,
49 second support roller, 50 tube, 51 central axis, 52 clamp, 53 cylinder,
54 pistons, 55 piston rods, 56 collars, 57 caps, 58 screws,
59 air injection hole, 60 communication path, 61 small diameter part, 62 locking pin, 63 second roller conveyor,
64 pin, 65 third roller conveyor, 66 pin, 67 brush, 68 discharge device,
69 discharge chute, 70 inversion plate, 71 spindle, 72 suction hole, 73 small fence,
74 string belt, 75 pulley, 76 rotating shaft, 77 positioning stopper

Claims (5)

小基板(4)を縦横に連続する矩形の基板本体(5)を分割対象に用いると共に、隣り合う小基板(4)の間をパーティングライン(L)とし、パーティングライン(L)に沿って割り溝(2)又は貫通する割り孔(H)を形成し、基板本体(5)を小基板(4)が一列に連続する短冊(T)、小基板(4)に順次分割する一連の作業工程を備える基板の自動分割方法であって、
短冊形成工程、小基板形成工程、小基板回収工程、シート回収工程の順番からなる一連の作業工程を平面視して矩形の作業ライン(9)に組んで、シート(28)を循環可能に形成すると共に、矩形の作業ライン(9)の隅角部には、シート(28)を中継する第一〜第四受け渡し工程をそれぞれ設け、
第一受け渡し工程では、シート回収工程からシート(28)を受け取って短冊形成工程に搬送するまでの途中に、シート(28)に基板本体(5)を載せる基板本体搬送工程を設け、
短冊形成工程では、第一受け渡し工程から搬送された基板本体(5)をシート(28)に載せたまま搬送し、搬送中に一次分割用ベルトコンベヤで基板本体(5)に加圧して、パーティングライン(L)に沿って基板本体(5)を短冊(T)ごとに分割しつつ、短冊(T)が隣り合わせに整列して分割前の基板本体(5)の矩形を維持し、短冊(T)をシート(28)に載せたまま一次分割用ベルトコンベヤからその延長方向の第二受け渡し工程に搬送し、
第二受け渡し工程では、第二ローラコンベヤ(63)上に搬送されたシート(28)を、それまでの搬送方向とは直交する方向に押し込むことによって、小基板形成工程に短冊Tをシート(28)に載せたまま搬送し、
小基板形成工程では、短冊(T)をシート(28)に載せたまま搬送し、搬送中に二次分割用ベルトコンベヤで短冊(T)に加圧して、パーティングライン(L)に沿って短冊(T)を小基板(4)ごとに分割しつつ、小基板(4)が縦横に整列して分割前の基板本体(5)の矩形を維持し、小基板(4)をシート(28)に載せたまま二次分割用ベルトコンベヤからその延長方向の第三受け渡し工程に搬送し、
第三受け渡し工程では、第三ローラコンベヤ(65)上に搬送されたシート(28)を、それまでの搬送方向とは直交する方向に押し込むことによって、小基板回収工程に小基板(4)をシート(28)に載せたまま搬送し、
小基板回収工程では、小基板(4)をシート(28)に載せたまま三次コンベヤで搬送すると共にシート(28)を残しながら小基板(4)を作業ライン(9)外に排出して回収し、
第四受け渡し工程では、残ったシート(28)をシート回収工程へ搬送し、
シート回収工程では、シート(28)を四次コンベヤで第一受け渡し工程に搬送することを特徴とする基板の自動分割方法。
A rectangular substrate body (5), which is continuous in the vertical and horizontal directions, is used as an object to be divided, and between the adjacent small substrates (4) is defined as a parting line (L) along the parting line (L). A split groove (2) or a through hole (H) is formed, and the substrate body (5) is sequentially divided into strips (T) in which the small substrates (4) are continuous in a row and small substrates (4). A method for automatically dividing a substrate comprising a work process,
Forming a series of work processes consisting of a strip forming process, a small substrate forming process, a small substrate collecting process, and a sheet collecting process in plan view, it is assembled into a rectangular work line (9), and the sheet (28) can be circulated. In addition, first to fourth delivery steps for relaying the sheet (28) are provided at the corners of the rectangular work line (9), respectively.
In the first delivery process, in the middle of receiving the sheet (28) from the sheet recovery process and transporting it to the strip forming process, a substrate body transporting process for placing the substrate body (5) on the sheet (28) is provided,
In the strip forming process, the substrate body (5) transported from the first delivery process is transported while being placed on the sheet (28), and the substrate body (5) is pressurized by the primary dividing belt conveyor during the transportation, While the substrate body (5) is divided into strips (T) along the line (L), the strips (T) are aligned side by side to maintain the rectangular shape of the substrate body (5) before the division ( T) is transported from the primary dividing belt conveyor to the second delivery step in the extending direction while being placed on the sheet (28),
In the second delivery step, the sheet (28) conveyed on the second roller conveyor (63) is pushed in a direction orthogonal to the conveying direction so far, whereby the strip T is formed in the small substrate forming step (28). )
In the small substrate forming process, the strip (T) is transported while being placed on the sheet (28), and the strip (T) is pressurized by the secondary conveyor belt conveyor during transport, along the parting line (L). While dividing the strip (T) into small substrates (4), the small substrates (4) are aligned vertically and horizontally to maintain the rectangular shape of the substrate body (5) before the division, and the small substrates (4) are separated from the sheets (28). ) And transport it to the third delivery process in the extension direction from the belt conveyor for secondary division,
In the third delivery process, the sheet (28) conveyed on the third roller conveyor (65) is pushed in a direction perpendicular to the conveying direction so far, so that the small substrate (4) is put into the small substrate collection process. Carry it on the sheet (28),
In the small substrate collection process, the small substrate (4) is transported by the tertiary conveyor while being placed on the sheet (28), and the small substrate (4) is discharged out of the work line (9) and collected while leaving the sheet (28). And
In the fourth delivery process, the remaining sheet (28) is conveyed to the sheet collection process,
In the sheet collecting step, the substrate (28) is conveyed to the first delivery step by a fourth conveyor, and the substrate is divided automatically.
小基板回収工程では、小基板(4)を排出するために、シート(28)上をブラシ(67)で掃くと共に、ブラシ(67)による小基板(4)の掃き出し方向を小基板回収工程の作業ライン(9)の下流側の延長方向とし、
短冊形成工程の作業ライン(9)の上流側の延長方向に、基板本体搬送工程での基板本体(5)の受入れ先を、設けてあることを特徴とする請求項1記載の基板の自動分割方法。
In the small substrate collection step, the sheet (28) is swept with the brush (67) to discharge the small substrate (4), and the direction in which the small substrate (4) is swept by the brush (67) is changed. The extension direction on the downstream side of the work line (9),
2. The automatic dividing of a substrate according to claim 1, wherein a receiving destination of the substrate main body (5) in the substrate main body transporting step is provided in an extending direction on the upstream side of the work line (9) in the strip forming step. Method.
小基板(4)を縦横に連続する矩形の基板本体(5)を分割対象に用い、隣り合う小基板(4)の間をパーティングライン(L)とし、パーティングライン(L)に沿って割り溝(2)又は貫通する割り孔(H)を形成し、基板本体(5)を小基板(4)が一列に連続する短冊(T)、小基板(4)に順次分割する各種装置を備える基板の自動分割装置であって、
短冊形成装置(25)、小基板形成装置(26)、小基板回収装置(27)、シート回収装置(29)の順番に各種装置からなる作業ライン(9)を平面視して矩形に形成して、シート(28)を循環可能に設け、矩形の作業ライン(9)の隅角部には、シート(28)を中継する第一〜第四受け渡し装置(30,31,32,33)をそれぞれ設け、
第一受け渡し装置(30)は、シート回収装置(29)からシート(28)を受け取ると共に、短冊形成装置(25)の上流側の延長方向に備える基板本体搬送装置(22)からシート(28)に基板本体(5)を載せるまで待機し、その後、基板本体(5)を載せたシート(28)を短冊形成装置に搬送し、
短冊形成装置(25)は、一次分割用ベルトコンベヤであって、第一受け渡し装置(30)から搬送された基板本体(5)をシート(28)に載せて搬送し、搬送中に一次分割用ベルトコンベヤでシート(28)に載った基板本体(5)に加圧して、パーティングライン(L)に沿って基板本体(5)を短冊(T)ごとに分割しつつ、短冊(T)が隣り合わせに整列して分割前の基板本体(5)の矩形を維持し、短冊(T)をシート(28)に載せたまま一次分割用ベルトコンベヤからその延長方向の第二受け渡し装置(31)に搬送し、
第二受け渡し装置(31)は、短冊(T)を載せたシート(28)の搬送方向に回転方向を合わせた第二ローラコンベヤ(63)を有し、隣り合うローラ間に、短冊(T)が載ったシート(28)を押し出すピン(64)を小基板形成装置(26)に向かって往復動可能に設け、
小基板形成装置(26)は、二次分割用ベルトコンベヤであって、短冊(T)をシート(28)に載せたまま搬送し、搬送中に二次分割用ベルトコンベヤで短冊(T)に加圧して、パーティングライン(L)に沿って短冊(T)を小基板(4)ごとに分割しつつ、小基板(4)が縦横に整列して分割前の基板本体(5)の矩形を維持し、小基板(4)をシート(28)に載せたまま二次分割用ベルトコンベヤからその延長方向の第三受け渡し装置(32)に搬送し、
第三受け渡し装置(32)は、小基板(4)を載せたシート(28)の搬送方向に回転方向を合わせた第三ローラコンベヤ(65)を有し、隣り合うローラ間に、小基板(4)が載ったシート(28)を押し出すピン(66)を小基板回収装置(27)に向かって往復動可能に設け、
小基板回収装置(27)は、ベルトコンベヤからなる三次コンベヤの下流端部の上方には排出装置(68)を備え、排出装置(68)は、小基板(4)を掃きだしてシート(28)のみを残すブラシ(67)を、往復動可能に備え、
第四受け渡し装置(33)は、小基板回収装置(27)の下流端部で残ったシート(28)をシート回収装置(29)に搬送し、
シート回収装置(29)はベルトコンベヤからなる四次コンベヤである基板の自動分割装置。
A rectangular substrate body (5) that is continuous vertically and horizontally is used as an object to be divided, and a space between adjacent small substrates (4) is defined as a parting line (L) along the parting line (L). Various devices for forming a split groove (2) or a through hole (H) penetrating and sequentially dividing the substrate body (5) into strips (T) in which the small substrates (4) are arranged in a row and small substrates (4). An automatic substrate splitting device comprising:
The work line (9) comprising various devices in the order of the strip forming device (25), the small substrate forming device (26), the small substrate collecting device (27), and the sheet collecting device (29) is formed into a rectangular shape in plan view. The sheet (28) is provided so as to be able to circulate, and first to fourth transfer devices (30, 31, 32, 33) for relaying the sheet (28) are provided at the corners of the rectangular work line (9). Each provided,
The first delivery device (30) receives the sheet (28) from the sheet collecting device (29), and also supplies the sheet (28) from the substrate body conveying device (22) provided in the extension direction on the upstream side of the strip forming device (25). To wait for the substrate body (5) to be placed thereon, and then transport the sheet (28) on which the substrate body (5) is placed to the strip forming device,
The strip forming device (25) is a belt conveyor for primary division, and carries the substrate body (5) conveyed from the first delivery device (30) on the sheet (28), and is used for primary division during conveyance. The substrate (5) placed on the sheet (28) is pressed by the belt conveyor, and the substrate (5) is divided into strips (T) along the parting line (L). Maintaining the rectangular shape of the substrate body (5) before division by aligning adjacently, the strip (T) is placed on the sheet (28) from the primary dividing belt conveyor to the second delivery device (31) in the extending direction. Transport,
The second delivery device (31) has a second roller conveyor (63) whose rotational direction is aligned with the conveying direction of the sheet (28) on which the strip (T) is placed, and between the adjacent rollers, the strip (T). A pin (64) that pushes out the sheet (28) on which is placed so as to reciprocate toward the small substrate forming device (26);
The small substrate forming device (26) is a belt conveyor for secondary division, and transports the strip (T) while being placed on the sheet (28), and the strip (T) is transported to the strip (T) while transporting. Applying pressure to divide the strip (T) along the parting line (L) for each small substrate (4), the small substrate (4) is aligned vertically and horizontally, and the rectangular shape of the substrate body (5) before division. And the small substrate (4) is transported from the secondary dividing belt conveyor to the third delivery device (32) in the extending direction while being placed on the sheet (28),
The third delivery device (32) has a third roller conveyor (65) whose rotational direction is aligned with the conveyance direction of the sheet (28) on which the small substrate (4) is placed, and between the adjacent rollers, the small substrate ( 4) A pin (66) for pushing out the sheet (28) on which the sheet is placed is provided so as to be able to reciprocate toward the small substrate recovery device (27);
The small substrate collection device (27) includes a discharge device (68) above the downstream end of the tertiary conveyor formed of a belt conveyor, and the discharge device (68) sweeps out the small substrate (4) to form a sheet (28). The brush (67) that leaves only the
The fourth delivery device (33) conveys the sheet (28) remaining at the downstream end of the small substrate collection device (27) to the sheet collection device (29),
The sheet collecting device (29) is a substrate automatic dividing device which is a quaternary conveyor comprising a belt conveyor.
排出装置(68)はブラシ(67)による小基板(4)の掃き出し方向を、下流側の延長方向に形成し、
第一受け渡し装置(30)は、シート(28)の搬送方向に回転方向を合わせた第一ローラコンベヤ(34)を有し、隣り合うローラ間に、シート(28)を押し出すピン(35)を短冊形成装置(25)に向かって往復動可能に設け、
短冊形成装置(25)の上流側の延長方向には、第一ローラコンベヤ(34)の隣りに配置する第二待機ステージ(14)と、第二待機ステージ(14)から基板本体(5)を受け取って第一ローラコンベヤ(34)上のシート(28)に基板本体(5)を載せる基板本体搬送装置(22)を有することを特徴とする請求項3記載の基板の自動分割装置。
The discharge device (68) forms the sweeping direction of the small substrate (4) by the brush (67) in the extending direction on the downstream side,
The first delivery device (30) has a first roller conveyor (34) whose rotational direction is aligned with the conveyance direction of the sheet (28), and a pin (35) for pushing out the sheet (28) between adjacent rollers. Provided so as to be able to reciprocate toward the strip forming device (25),
In the extension direction on the upstream side of the strip forming apparatus (25), the second standby stage (14) disposed adjacent to the first roller conveyor (34) and the substrate body (5) from the second standby stage (14) are moved. 4. The automatic substrate dividing apparatus according to claim 3, further comprising a substrate body transfer device (22) for receiving and placing the substrate body (5) on the sheet (28) on the first roller conveyor (34).
矩形の基板本体(5)の周囲を四片の耳板(6)で囲むと共に、耳板(6)と基板本体(5)の間をもパーティングライン(L)とする形態の基板(1)を分割対象に用いる基板の自動分割装置であって、
第一受け渡し装置(30)からシート回収装置(29)までの一連の作業装置を本処理装置(8)とし、本処理装置(8)のほかに、予備処理装置(7)を設け、
予備処理装置(7)は、カセット(11)に積み重ねられた基板(1)を上から取り出して、耳板(6)を基板本体(5)から落とす耳落とし装置(19)を有し、耳落とし装置(19)から基板本体搬送装置(22)に基板本体(5)を搬送し、耳落とし装置(19)を、短冊形成装置(25)の上流側の延長方向と小基板回収装置(27)の下流側の延長方向との範囲内に形成してあることを特徴とする請求項4記載の基板の自動分割装置。
A substrate (1) in which a rectangular substrate body (5) is surrounded by four pieces of ear plates (6), and a parting line (L) is formed between the ear plate (6) and the substrate body (5). ) Is an automatic board splitting device that uses as a target for splitting,
A series of work devices from the first delivery device (30) to the sheet collecting device (29) is the main processing device (8). In addition to the main processing device (8), a preliminary processing device (7) is provided.
The pretreatment device (7) has an ear drop device (19) for taking out the substrate (1) stacked on the cassette (11) from above and dropping the ear plate (6) from the substrate body (5). The substrate body (5) is transported from the drop device (19) to the substrate body transport device (22), and the ear drop device (19) is connected to the upstream direction of the strip forming device (25) and the small substrate recovery device (27). 5. The substrate automatic dividing apparatus according to claim 4, wherein the substrate is divided within a range extending in the downstream direction of the substrate.
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