JPH11126110A5 - - Google Patents

Info

Publication number
JPH11126110A5
JPH11126110A5 JP1997289777A JP28977797A JPH11126110A5 JP H11126110 A5 JPH11126110 A5 JP H11126110A5 JP 1997289777 A JP1997289777 A JP 1997289777A JP 28977797 A JP28977797 A JP 28977797A JP H11126110 A5 JPH11126110 A5 JP H11126110A5
Authority
JP
Japan
Prior art keywords
moved
moving device
expansion arm
elastic member
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997289777A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11126110A (ja
JP3772005B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28977797A priority Critical patent/JP3772005B2/ja
Priority claimed from JP28977797A external-priority patent/JP3772005B2/ja
Publication of JPH11126110A publication Critical patent/JPH11126110A/ja
Publication of JPH11126110A5 publication Critical patent/JPH11126110A5/ja
Application granted granted Critical
Publication of JP3772005B2 publication Critical patent/JP3772005B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP28977797A 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡 Expired - Fee Related JP3772005B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28977797A JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28977797A JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JPH11126110A JPH11126110A (ja) 1999-05-11
JPH11126110A5 true JPH11126110A5 (enrdf_load_html_response) 2004-12-09
JP3772005B2 JP3772005B2 (ja) 2006-05-10

Family

ID=17747634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28977797A Expired - Fee Related JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Country Status (1)

Country Link
JP (1) JP3772005B2 (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4797150B2 (ja) * 2000-03-14 2011-10-19 オリンパス株式会社 走査機構およびこれを用いた機械走査型顕微鏡
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
JP4642294B2 (ja) * 2001-09-20 2011-03-02 オリンパス株式会社 微動機構
US7687767B2 (en) * 2002-12-20 2010-03-30 Agilent Technologies, Inc. Fast scanning stage for a scanning probe microscope
JP5270384B2 (ja) 2009-01-15 2013-08-21 株式会社ミツトヨ 直線案内機構および測定装置
JP5295814B2 (ja) * 2009-02-17 2013-09-18 オリンパス株式会社 走査機構および走査型プローブ顕微鏡

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