JPH11106288A5 - - Google Patents

Info

Publication number
JPH11106288A5
JPH11106288A5 JP1997269085A JP26908597A JPH11106288A5 JP H11106288 A5 JPH11106288 A5 JP H11106288A5 JP 1997269085 A JP1997269085 A JP 1997269085A JP 26908597 A JP26908597 A JP 26908597A JP H11106288 A5 JPH11106288 A5 JP H11106288A5
Authority
JP
Japan
Prior art keywords
substrate surface
thin film
producing
crystal thin
species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997269085A
Other languages
English (en)
Japanese (ja)
Other versions
JP4014700B2 (ja
JPH11106288A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26908597A priority Critical patent/JP4014700B2/ja
Priority claimed from JP26908597A external-priority patent/JP4014700B2/ja
Publication of JPH11106288A publication Critical patent/JPH11106288A/ja
Publication of JPH11106288A5 publication Critical patent/JPH11106288A5/ja
Application granted granted Critical
Publication of JP4014700B2 publication Critical patent/JP4014700B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP26908597A 1997-10-01 1997-10-01 結晶薄膜製造方法 Expired - Fee Related JP4014700B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26908597A JP4014700B2 (ja) 1997-10-01 1997-10-01 結晶薄膜製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26908597A JP4014700B2 (ja) 1997-10-01 1997-10-01 結晶薄膜製造方法

Publications (3)

Publication Number Publication Date
JPH11106288A JPH11106288A (ja) 1999-04-20
JPH11106288A5 true JPH11106288A5 (cg-RX-API-DMAC10.html) 2005-05-19
JP4014700B2 JP4014700B2 (ja) 2007-11-28

Family

ID=17467470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26908597A Expired - Fee Related JP4014700B2 (ja) 1997-10-01 1997-10-01 結晶薄膜製造方法

Country Status (1)

Country Link
JP (1) JP4014700B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5005170B2 (ja) * 2002-07-19 2012-08-22 エーエスエム アメリカ インコーポレイテッド 超高品質シリコン含有化合物層の形成方法

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