JPH1054784A - ガスセンサの取付け構造 - Google Patents
ガスセンサの取付け構造Info
- Publication number
- JPH1054784A JPH1054784A JP22767796A JP22767796A JPH1054784A JP H1054784 A JPH1054784 A JP H1054784A JP 22767796 A JP22767796 A JP 22767796A JP 22767796 A JP22767796 A JP 22767796A JP H1054784 A JPH1054784 A JP H1054784A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas sensor
- valve
- corrosive
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000009972 noncorrosive effect Effects 0.000 claims abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 61
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22767796A JPH1054784A (ja) | 1996-08-09 | 1996-08-09 | ガスセンサの取付け構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22767796A JPH1054784A (ja) | 1996-08-09 | 1996-08-09 | ガスセンサの取付け構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1054784A true JPH1054784A (ja) | 1998-02-24 |
| JPH1054784A5 JPH1054784A5 (enExample) | 2004-08-19 |
Family
ID=16864608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22767796A Pending JPH1054784A (ja) | 1996-08-09 | 1996-08-09 | ガスセンサの取付け構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1054784A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001214888A (ja) * | 2000-02-01 | 2001-08-10 | Matsushita Electric Ind Co Ltd | 真空排気装置及び方法 |
-
1996
- 1996-08-09 JP JP22767796A patent/JPH1054784A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001214888A (ja) * | 2000-02-01 | 2001-08-10 | Matsushita Electric Ind Co Ltd | 真空排気装置及び方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Effective date: 20041012 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20041026 |
|
| A02 | Decision of refusal |
Effective date: 20050308 Free format text: JAPANESE INTERMEDIATE CODE: A02 |