JPH10339742A - Checking device for probe card - Google Patents

Abstract

PROBLEM TO BE SOLVED: To individually check a common needle even when common needles are arranged into multilayers, by measuring the needle tip height and contact resistance of common needle while using a 2nd contact plate forming a conductive contact land on an electric insulated surface. SOLUTION: When checking one common needle 345 between two common needles 345 and 346, a 2nd contact plate 44 is moved in XY direction so that any contact land 122 can be matched with the needle tip of common needle 345. After a switch 128 of contact land switcher 120 and a switch 112 of switcher 110 on the side of probe card 32 are suitably set, the plate 44 is moved up. By detecting the touch of the common needle 345 with the contact land 122, the needle tip height of common needle 345 can be found. Besides, by measuring a current while raising the plate 44 just for a prescribed overdrive amount, the contact resistance can be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for inspecting the height of a probe needle of a probe card and the contact resistance at the time of contact.

[0002]

2. Description of the Related Art In a probe card inspection apparatus, a flat metal plate is used to measure the tip height of a probe needle and the contact resistance at the time of contact. FIG. 14 is a principle diagram of a conventional inspection apparatus using a flat metal plate. One end of the measuring device 10 is connected to the switch 12 and the multi-core cable 1.
4 are connected to a number of probe needles 18 of the probe card 16. The other end of the measuring device 10 is connected to a metal plate 20. In order to inspect the probe needles 18, the switch 12 is repeatedly switched in a predetermined switching cycle while slowly raising the metal plate 20, and the measuring device 10 measures the conduction state between each probe needle 18 and the metal plate 20. . When any of the probe needles 18 comes into contact with the metal plate 20, this can be confirmed by the measuring instrument 10, and the height position of the metal plate 18 at that time is recorded. Thereby, the tip height of the probe needle 18 can be obtained. In a state where the metal plate 20 is further pressed against the probe needle 18 by a predetermined overdrive amount from the contact height position, the electric resistance of the electric circuit including the probe needle 18 is measured. Thereby, the contact resistance at the time of contact between the probe needle 18 and the metal plate 20 can be obtained. By performing such an operation for all the probe needles 18,
The tip heights and contact resistances of all the probe needles 18 can be measured.

However, as shown in FIG. 15, if two probe needles 181 and 182 are electrically connected to each other and are connected to a common external connection terminal 22, this inspection device will not work. That is, in a state where the external connection terminal 22 is connected to the measuring device 10 by the switch 12, when the conducting state can be confirmed by the measuring device 10, which of the two probe needles 181 and 182 is in contact with the metal plate 20. It cannot be distinguished. As described above, when a plurality of probe needles (hereinafter, referred to as common needles) electrically connected to each other are present in the probe card, in the inspection apparatus of the type using a flat metal plate, the tip of the common needle is used. Measurement of height and contact resistance becomes impossible. An example of a common needle is a power line (VCC)
And a ground line (GND). In many cases, a plurality of power supply lines (VCC) and ground lines (GND) are provided for each probe card. Further, the signal line may be a common needle.

FIG. 16 is a principle diagram of another type of conventional inspection apparatus. In this inspection apparatus, the contact pins 24 are used without using a flat metal plate. The contact pin 24 has a tip with a diameter as small as about 50 to 100 μm, and can contact the tip of each probe needle. Therefore, the contact pins 24 do not contact the adjacent tips at the same time. Using this contact pin 24, the common needles 181 and 182 can be measured separately. Of course, many probe needles 183 electrically separated from each other
(Hereinafter referred to as an independent needle) can also be measured with this contact pin 24. The contact pins 24 can be moved up and down in the same manner as the metal plate 20 described above, and their height positions can be recorded. Also, when the contact pin 24 is
By moving the probe in the Y direction (two-dimensional direction in a horizontal plane), it can be brought to the XY coordinate position of the tip of an arbitrary probe needle.

[0005]

The above-described contact pin type inspection apparatus has the following disadvantages when inspecting a multi-layered array of probe needles. FIG. 17 is a side view showing a state of inspecting a multi-layered array of probe needles. In FIG. 17A, the probe card includes a first-layer probe needle 184, a second-layer probe needle 185, and a third-layer probe needle 186. Contact pin 24
By contacting the probe needle 184 of the layer, the tip height of the probe needle 184 can be measured. Further, the contact resistance of the probe needle 184 can be measured by pressing the contact pin 24 by a predetermined amount of overdrive. However, when the contact pins 24 are pressed down, as shown in FIG.
84 elastically displaces and comes into contact with the second-layer probe needle 185. If the two probe needles 18 in contact
4 and 185 are connected to a common external connection terminal (provided that they are common needles), the measurement result is different from the contact resistance between the probe needle 184 and the contact pin 24, and accurate. Measurement of contact resistance becomes impossible.

Incidentally, the same number of conductive contact lands as the number of probe needles are formed on the electrically insulating surface so as to completely coincide with the XY coordinate positions of the tips of a large number of probe needles to be measured. If the electric signals are separately extracted from these contact lands, all of the above problems can be solved. However, manufacturing such a dedicated contact plate is very expensive, and requires a separate contact plate for each type of probe card, which is impractical.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to provide an inspection apparatus capable of inspecting a common needle in a probe card having a plurality of probe needles without any trouble. It is in.

[0008]

The invention according to claim 1 is
It has a first contact plate for inspecting an independent needle and a second contact plate for inspecting a common needle, and is particularly characterized in the configuration of the second contact plate. That is, the probe card inspection apparatus has the following features (a) to (f). (A) A first contact plate for inspecting a plurality of probe needles (hereinafter, referred to as independent needles) electrically separated from each other, and a plurality of probe needles (hereinafter, referred to as common needles) electrically connected to each other. .) For inspection. (B) The first contact plate has a conductive surface. (C) The second contact plate has an electrically insulating surface, a plurality of conductive contact lands exposed on the surface and electrically separated from each other, and a one-to-one correspondence between these contact lands. A plurality of external connection terminals electrically connected in a corresponding relationship. (D) The exposed dimension of the contact land in at least one direction is smaller than the arrangement pitch of the probe tips of the probe needle of the probe card to be inspected. (E) The independent needles are brought into contact with the surface of the first contact plate, and for each of the independent needles, the continuity of an electric circuit including the independent needles and the first contact plate is checked. First measuring means for measuring the needle tip height and the contact resistance between each independent needle and the first contact plate.
(F) By contacting any one of the common needles with any one of the contact lands of the second contact plate and checking the conduction state of an electric circuit including the common needle and the contact lands. Second measuring means for measuring the height of the tip of the common needle and the contact resistance between the common needle and the contact land.

When measuring the tip height and contact resistance of the independent needle, the first contact plate is used. Independent needle
Since they are electrically separated from each other, even when the independent needles are simultaneously brought into contact with the conductive surface of the first contact plate,
By switching the electric circuit, the contact state of a plurality of independent needles can be individually inspected.

When measuring the tip height and contact resistance of the common needle, a second contact plate is used. By bringing the common needle to be inspected into contact with any contact land of the second contact plate, the common needle can be individually inspected. The second contact plate has a plurality of conductive contact lands exposed on an electrically insulating surface, and the surface is substantially flat. Therefore, even when the common needles are arranged in multiple layers, it is possible to avoid contact between the common needles (see FIG. 17B) which occurs when a conventional contact pin is used.

By the way, in principle, one contact land of the second contact plate is sufficient. This is the invention according to claim 2.

Further, it is also possible that most of the surface of the second contact plate is made conductive, and only the periphery of the belt-like contact land is made an electrically insulating surface. This is the invention according to claim 3.

Two types of band-like contact lands can be provided, one extending in the X direction and one extending in the Y direction. This is the invention according to claim 4.

[0014] The first contact plate and the second contact plate can be integrated. This is the invention according to claim 5.

[0015]

FIG. 1 is a plan view of an inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a front view thereof. In FIG. 2, this inspection apparatus is roughly divided into a plate base 30 on which various inspection plates are mounted,
A movement mechanism for moving the plate base 30 in the XYZ directions, and a camera stage 38 on which a CCD camera for observing the tip of the probe needle 34 of the probe card 32 is mounted.
And a card holder 40 for holding the probe card 32
And

Referring to FIG. 1, various inspection plates mounted on the plate base 30 will be described. On the upper surface of the plate base 30, a first needle for inspecting the independent needle is provided.
A contact plate 42, a second contact plate 44 for inspecting a common needle, a glass plate 46 used when observing the probe tip position, and a polishing plate 48 for polishing the probe tip are provided. They are arranged side by side. The first contact plate 42 is a flat plate made of metal (for example, brass, aluminum, stainless steel, or the like), and the entire surface is conductive. Alternatively, instead of a metal flat plate, ceramic (eg, alumina)
A metal plate (for example, gold plating) may be used for a metal plate. The first contact plate 42 has one external terminal electrically connected to the surface thereof. The second contact plate 44 has an electrically insulating surface, on which a plurality of conductive contact lands are exposed. The detailed configuration will be described later. The glass plate 46 is made of transparent glass. The position of the needle point can be confirmed from the back side of the glass plate 46. An opening 31 is formed in the plate base 30 below the glass plate 46. The polishing plate 48 is made of ceramic (or a polishing plate is attached to a metal flat plate).
Is moved in a horizontal plane, thereby removing metal scraps and the like attached to the needle tip.

Next, a mechanism for moving the plate base 30 in the XYZ directions will be described. First, Z direction (vertical direction)
Will be described. In FIG. 2, side walls 52 stand vertically on both left and right sides of the upper surface of the support base 50. As shown in FIG. 1, Z-axis rails 54 extend vertically in two front and rear portions on the inner surface of the left and right side walls 52. This Z-axis rail 5
4, a Z-axis slider 56 is slidably connected.
One elevation plate 5 is attached to the Z-axis slider 56 before and after this.
8 is fixed. There are one lifting plate 58 on each side. As shown in FIG. 2, a Z-axis motor 60 is fixed below the support base 50, and a lead screw 62 is attached to the output shaft.
Are combined. The lead screw 62 passes through the through hole of the support base 50, and as shown in FIG.
I'm with 4 The lead nut 64 is fixed to a side surface of the right lifting plate 58. When the Z-axis motor 60 in FIG. 2 rotates, the right lifting plate 58 moves up and down via the lead screw 62 and the lead nut 64.

Next, a description will be given of a moving mechanism in the Y direction (vertical direction on the paper surface of FIG. 1, direction perpendicular to the paper surface of FIG. 2). In FIG. 2, a Y-axis rail 66 extends inside the left and right elevating plates 58 in a direction perpendicular to the plane of the drawing (Y direction). A Y-axis slider 68 is slidably connected to the Y-axis rail 66. As shown in FIG. 1, two front and rear Y-axis sliders 68 are slidably coupled to the left and right Y-axis rails 66, respectively.
It is fixed to the moving table 70. A Y-axis motor 72 is fixed in front of the inside of the right elevating plate 58, and its output shaft is connected to a lead screw 74 as shown in FIG. The lead screw 74 is attached to the Y movable table 70 (see FIG. 2).
Bites into the lead nut fixed to the bottom of the. Y
When the shaft motor 72 rotates, the Y moving table 70 moves in the Y direction (the vertical direction in FIG. 1) via the lead screw 74 and the lead nut.
Go to

In FIG. 2, the lifting movement of the right lifting plate 58 is also transmitted to the left lifting plate 58 via the right Y-axis slider 68, the Y moving table 70 and the left Y-axis slider 68. You. Therefore, when the right elevating plate 58 moves up and down, the Y-axis moving table 70 and the left elevating plate 58 also move up and down together with this. The left lifting plate 58 may be provided with a lifting drive mechanism similar to that on the right. In this case, the left and right lifting motors are driven synchronously.

Next, the moving mechanism in the X direction (the left-right direction in FIG. 1) will be described. FIG. 3 is a side view showing the moving mechanism in the X direction and the observation device. A first X-movement guide 76 is fixed to the upper surface of the Y-movement table 70, and the first X-movement guide 76 extends in a direction perpendicular to the paper surface (X direction). On the other hand, a second X-movement guide 78 is fixed to the bottom surface of the plate base 30, and likewise extends in the X-direction. Between the first X movement guide 76 and the second X movement guide 78, a steel ball 80 (or a steel roller) is incorporated. In this way, the two types of moving guides 76 and 78 and the steel ball 80 constitute a slide mechanism in the X direction. The slide mechanism in the X direction is provided on the left and right in FIG.
One set is provided for each. With this sliding mechanism, the plate base 30 is slidable in the X direction with respect to the Y moving table 70. The front surface of the first moving guide 76 and the Y moving table 70 on the left side of FIG. 3 (the surface on the left side of FIG. 3).
, An X-axis motor 82 is fixed as shown in FIG. The output shaft of the X-axis motor 82 is connected to a lead screw 84, which meshes with a lead nut 86. The lead nut 86 is fixed to the front surface of the plate base 30, as shown in FIG. FIG.
, When the X-axis motor 82 rotates, the lead screw 8
4 and the plate base 30 via the lead nut 86
Move in the direction.

In FIG. 3, a first contact plate 42, a second contact plate 44, a glass plate 46, and a polishing plate 48 are provided on the upper surface of the plate base 30. The surfaces of these four types of plates are coplanar. Below the glass plate 46, an opening 31 is formed in the plate base 30, and an opening 71 is also formed in the Y moving table 70.

Next, a description will be given of a device for observing the needlepoint position. In FIG. 3, an objective lens 88 is arranged below the glass plate 46. A reflecting mirror 90 is provided below the objective lens 88, and is behind the reflecting mirror 90 (right side in the drawing).
Is provided with a CCD camera 92. The lens barrel 94
A reflection mirror 90 is built in and a CCD camera 92 is supported. This lens barrel 94 is mounted on the camera stage 38. The camera stage 38 is movable in a two-dimensional direction (XY directions) and a vertical direction (Z direction) in a horizontal plane. When the camera stage 38 moves, the CCD camera 92, the reflection mirror 90, and the objective lens 88 thereon move integrally. The objective lens 88 faces upward and faces the upper probe card 32.

Next, a support device for the probe card 32 will be described. 2, the probe card 32 is detachably fixed to the card holder 40 by a fixing device. The card holder 40 is attached to a support plate 98.
As shown in FIG. 4, the support plate 98 is fixed to a base 102 via a support column 100. The camera stage 38 and the side wall 52 are mounted on a support base 50, and the support base 50 is fixed to the base 102 via a support 104.

Next, the principle of the inspection apparatus will be described. FIG. 5 is a principle diagram when the independent needles of the probe card 32 are inspected using the first contact plate 42. The probe card 32 has a large number of probe needles 34, which are connected to external connection terminals 106. The external connection terminal 106 is connected to the switch 11 via a multi-core cable 108.
0 terminal 111. The switch 110 has a number of switches 112, and a predetermined switching cycle is repeated so that any one of these switches is closed in order. The other end of the switch 110 is connected to a common terminal 113, which is
4 is connected to one end. The other end of the measuring device 114 is the first
It is connected to a contact plate 42. Measuring instrument 11
4, a voltage source 116 and an ammeter 118 are connected in series.

When the first contact plate 42 is raised, one of the independent needles 341 to 344 of the probe card 32 comes into contact with the first contact plate 42. Then, when the switch 112 connected to the independent needle is closed, a current flows through the ammeter 118 of the measuring device 114. By recording the height position of the first contact plate 42 at that time, the tip height of the independent needle can be obtained. Further, for the independent needle, the first contact plate 42 is further raised by a predetermined overdrive amount from the height position of the first contact plate 42 at the time of contact, and the value of the ammeter 118 at that time is recorded. The contact resistance at the time of contact between the independent needle and the first contact plate 42 can be measured.

FIG. 6 shows the second contact plate 4.
FIG. 4 is a principle diagram when a common needle of the probe card 32 is inspected by using FIG. In this figure, the probe card 32
The configuration and function of the switching unit 110 and the measuring unit 114 are the same as those in FIG. The difference is that a second contact plate 44 and a contact land switch 120 therefor are used. The surface of the second contact plate 44 is electrically insulating, and a plurality of conductive contact lands 122 are exposed on this surface. Contact land 122
Are the external connection terminals 124 of the second contact plate 44.
Is connected to The external connection terminal 124 is connected to a plurality of terminals 127 of the contact land switch 120 via a multi-core cable 126. The contact land switch 120 has a plurality of switches 128, and any one of these switches 128 is closed. The other end of the contact land switch 120 is connected to a common terminal 130, which is connected to a measuring device 114.

When inspecting one of the two common needles 345 and 346, first, one of the contact lands 122 is set to coincide with the XY coordinate position of the common needle 345. Second contact plate 44
The plate base 30 (see FIG. 1) on which the
Move in the direction. In that case, the XY of the plate base 30
In order to minimize the amount of movement in the
The contact land 122 existing at a position closest to 45
To the common needle 345. Contact land switch 1
At 20, only the switch 128 connected to the specific contact land 122 aligned with the common needle 345 is closed. Further, the switch 11 on the side of the probe card 32
At 0, only the switch 112 connected to the common external connection terminal 106 connected to the common hands 345 and 346 is closed.

In this state, the second contact plate 44
To rise. Then, only when the common needle 345 contacts the contact land 122, the ammeter 1
Current flows through 18. By recording the height position of the second contact plate 44 at that time, the common needle 3
A needle tip height of 45 can be obtained. In addition, a second predetermined amount of overdrive from the height position at the time of contact is used.
By recording the current value of the ammeter 118 when the contact plate 44 is raised, the contact resistance at the time of contact between the common needle 345 and the contact land 122 can be measured.

In order to inspect another common needle 346, once the second contact plate 44 is lowered, the contact land 122 closest to the common needle 346 is
Plate base 30 so as to match the XY coordinates of 46.
Is moved in the XY directions. Then, in the contact land switch 120, the switch 128 connected to the aligned contact land 122 is closed, and the same inspection as that of the common needle 345 is performed.

As described above, since only the common needle to be measured is brought into contact with the contact land, the common needle can be inspected one by one. By the way, when the second contact plate 44 rises, the common needle to be measured is moved to the target contact land 1.
At this time, another common needle and many independent needles come into contact with the insulating surface of the second contact plate 44. Therefore, when the common needle to be measured is displaced by a predetermined overdrive amount, another common needle and an independent needle are displaced by the same overdrive amount. Therefore, even if the probe needles are arranged in multiple layers, there is no inconvenience that only the common needle to be measured is displaced and this common needle contacts another common needle or an independent needle. In addition,
By chance, another common needle or independent needle may come into contact with the other contact lands 122. Even in this case, since the probe needles other than the common needle to be measured do not form a closed electric circuit via the measuring device 114 due to the function of the switch 112 of the switch 110 and the switch 128 of the contact land switch 120, the measurement is performed. There is no effect on the inspection of common needles to be performed.

FIG. 7 is a plan view of the second contact plate 44. The surface of the second contact plate 44 is covered with an electrically insulating resist layer (protective layer), and a plurality of (16 in the drawing) conductive contact lands 122 are provided.
Is exposed. Each contact land 122 is connected to an external connection terminal 124 of a connector 134 via a wiring pattern 132 below the resist layer. The contact land 122 has a circular shape with a diameter of 50 to 100 μm. This diameter is smaller than the arrangement pitch of the probe tips. The shape of the contact land 122 is not limited to a circle, but may be, for example, a square.

FIG. 8 is a vertical sectional view showing a state where a common needle is brought into contact with the contact lands 122 of the second contact plate 44. Assuming that three common needles 347 to 349 are adjacent to each other, when the tip of the central common needle 348 is brought into contact with the contact land 122, the common needles 3
The tips of 47 and 349 come into contact with the resist layer 138 (electrically insulating surface layer). Since the diameter (exposed dimension) of the contact land 122 is 50 to 100 μm, which is smaller than the arrangement pitch of the needle tips (for example, 200 μm), a plurality of common needles do not contact the same contact land 122 at the same time.

FIG. 9 is a view for explaining a manufacturing process of the second contact plate 44. FIG. 9A is an enlarged plan view showing a state in which a contact land 122 and its wiring pattern 132 are simultaneously formed of a conductive film on an electrically insulating (for example, glass or ceramic) substrate. FIG.
(B) is a sectional view taken along line 9B-9B in FIG. 9 (A). Hereinafter, the manufacturing process of the second contact plate 44 will be described with reference to FIGS. First, as shown in FIG. 9B, the surface of the substrate 136 is plated with gold, for example.
The contact lands 122 and the wiring patterns 132
It is formed with a thickness of 40 μm. Next, as shown in FIG. 9C, a resist layer (epoxy resin) 138 is formed on the entire surface to a thickness of 30 to 50 μm. Next, as shown in FIG. 9D, the resist layer 138 is removed only by the contact land 122 by etching. As a result, a second contact plate in which the plurality of conductive contact lands 122 are exposed on the surface of the resist layer 138 is completed.

Returning to FIG. 7, the second contact plate 4
In FIG. 4, two reference holes 140 for alignment are formed. The reference hole 140 has an inner diameter of about 0.1 mm and penetrates through the second contact plate 44. The two reference holes 140 are formed on a center line 141 passing through the center of the second contact plate 44 in the X direction, and are separated from each other by a predetermined distance in the Y direction. As shown in FIG. 3, below the reference hole 140, the plate base 30 and the Y
Openings 141 and 143 are formed in the moving table 70. When the second contact plate 44 is moved above the objective lens 88 of the CCD camera 92, the XY coordinates of the reference hole 140 can be observed by the CCD camera 92, and the position can be stored. On the other hand, the tip position of each common needle of the probe card can be measured by the CCD camera 92 through the glass plate 46. The relative positional relationship between each contact land 122 of the second contact plate 44 and the reference hole 140 is predetermined. Therefore, the second contact plate 44 (that is, the plate base 30) is
By moving in the Y direction, any contact land 1
It is possible to align 22 with the needle point of any common needle.

When the substrate portion of the second contact plate 44 is made of ceramic, the reference hole 14 is formed as described above.
0 is formed, but when the second contact plate 44 is made of transparent glass, a reference mark (for example, a cross mark or a square mark) is formed on the front or back surface of the glass.
And this may be used in place of the reference hole 140.

In FIG. 7, one contact land 122 is sufficient in principle. It is sufficient that any common needle always contacts this single contact land 122. In that case, the contact land switch 120 (see FIG. 6) becomes unnecessary. However, when inspecting a common needle far from the contact land 122, the second contact plate 44 must be largely moved in the XY directions.

FIG. 10 is a plan view of an integrated contact plate 142 in which the first contact plate and the second contact plate are integrated. The left half of the integrated contact plate 142 in the drawing is a first contact plate 144, and this portion is a metal flat plate. The right half is a second contact plate 146, and a plurality of contact lands 122 are exposed on an electrically insulating surface 145. This integrated contact plate 142 also has two reference holes 140 for alignment.
When such an integrated contact plate 142 is used, the integrated contact plate 1 is provided on the plate base.
It suffices to provide three plates 42, a glass plate 46, and a polishing plate 48.

FIG. 11 is a plan view of a modified example of the integrated contact plate of FIG. The integrated contact plate 148 is provided with the first contact plate 144 in the left half.
And the reference hole 140 are the same as those shown in FIG. What is different from FIG. 10 is the portion of the second contact plate 150 in the right half. Most of the second contact plate 150 is a conductive surface 151. This conductive surface 151 is integral with the conductive surface of the left first contact plate 144. The second contact plate 150 has two types of two contact lands 152 and 154, and an electrically insulating surface is formed only in the vicinity thereof. One external connection terminal of the integrated contact plate 148 is sufficient, and the first contact plate 144 and the second
It is connected to the conductive surface of the contact plate 150 and serves as a common external connection terminal for the first contact plate 144 and the second contact plate 150.

FIG. 12A shows an X-direction contact land 15 of the two types of contact lands shown in FIG.
2 is an enlarged plan view of FIG. This X direction contact land 1
Reference numeral 52 denotes a conductive strip extending in the X direction and having a width of 50 to 100 μm. This X direction contact land 15
2, the exposure dimension in one direction (Y direction) is 50 to 100 μm
It is. Both ends of the X-direction contact land 152 are connected to the conductive surface 151. The periphery of the X-direction contact land 152 is surrounded by a substantially circular electrically insulating surface 156 having a diameter of 1.0 to 1.5 mm. The X-direction contact lands 152 are used when inspecting common needles arranged in the Y direction (the common needles are adjacent to each other in the Y direction and are connected to the same external connection terminal). In FIG. 12A, a black circle 160 indicates Y
It shows the tip positions of three common needles adjacent in the direction. Place the tip of any common needle in the X-direction contact land 1
Upon contact with 52, the tips of the other two common needles will necessarily contact the electrically insulating surface 156. That is, when “three” common needles are adjacent to each other in the Y direction, the radius of the circular electrically insulating surface 156 is set to be larger than twice the arrangement pitch P of the needle tips of the common needles. When the tip of any one of the common needles is brought into contact with the X-direction contact land 152, the tips of the other two common needles always contact the electrically insulating surface, and 151 does not come into contact. When “two” common needles are adjacent to each other, it is sufficient that the radius of the electrically insulating surface 156 is larger than the arrangement pitch P.

FIG. 12B is an enlarged plan view of the Y-direction contact land 154. The Y direction contact land 154 extends in the Y direction, and both ends thereof are connected to the conductive surface 151. Y direction contact land 1
The sides of 54 are surrounded by a generally circular electrically insulating surface 158. This Y-direction contact land 154
Is used when inspecting common needles arranged in the X direction. In FIG. 12B, black circles 162 are adjacent to each other in the X direction.
It shows the tip position of the common needle of the book.

The integrated contact plate 1 shown in FIG.
48 can be manufactured by performing metal plating on the surface of an electrically insulating substrate so that only a circular insulating portion remains around a strip-shaped contact land. Alternatively, using a metal substrate, an insulating material may be coated so that a circular insulating portion is formed around the belt-like contact land.

FIG. 13 is a plan view showing an example of the arrangement of common needles and independent needles in a probe card. FIG. 13 (A)
Is a place where the probe needles 34 are visible from the central opening 33 of the probe card. In this example, three probe needles connected to a common power supply line (VCC) are arranged so as to be adjacent to each other. Also, three probe needles connected to a common ground line (GND) are arranged so as to be adjacent to each other. These probe needles are common needles, and the remaining probe needles are independent needles. FIG.
In the example of (B), two probe needles connected to a common power supply line (VCC) are far apart from each other. Two probe needles connected to a common ground line (GND) are arranged adjacent to each other.

The second contact plate of the type shown in FIGS. 7 and 10 allows the inspection of the common needle regardless of the arrangement of the common needle. On the other hand, a second contact plate of the type shown in FIG. 11 can be used only for inspection of a probe card in which common needles are adjacent to each other. Therefore, for the probe card shown in FIG. 13A, any type of second contact plate shown in FIGS. 7, 10 and 11 can be inspected, but for the probe card shown in FIG. 13B. 7 and 10 can be used, but the second contact plate of FIG. 11 cannot be used. This is because, in FIG. 13B, two probe needles connected to the common power supply line VCC are far apart from each other, so that one common needle connected to the power supply line VCC is connected to the contact land 152 (or 15) in FIG.
4), the other common needle becomes conductive surface 15
This is because they come into contact with 1.

Next, a method of using the inspection apparatus shown in FIGS. 1 to 3 will be described. First, in FIG. 2, the probe card 32 is set in the card holder 40. Next, the Y moving table 70 is moved in the Y direction, and the glass plate 46 (FIG.
) Is brought directly below the probe card 32. Then, the elevating plate 58 is raised to bring the upper surface of the glass plate 46 into contact with the probe needle 34. In this state, FIG.
First, the camera stage 38 is moved up and down (Z direction) to focus the camera optical system. Then, the XY coordinates of the tip of each probe needle 34 are observed using the CCD camera 92. That is, camera stage 3
8 is moved in the XY directions so that the tip of the probe needle 34 coincides with the reference position of the field of view of the CCD camera 92.
The XY coordinates of the tip of each probe needle 34 are confirmed based on the XY movement amount of the camera stage 38 at that time, and the coordinates are stored. Note that the position of the probe tip can be observed in a state where the probe tip of the probe needle 34 is not brought into contact with the glass plate 46.

Next, returning to FIG. 2, after lowering the elevating table 58, the Y moving table 70 is moved in the Y direction, and holding the first contact plate 42 (see FIG. 1) directly below the probe card 32. come. Then, the lifting plate 58 is raised,
The conductive surface of the first contact plate 42 is brought into contact with the probe needle 34 of the probe card 32. In this contact process, for the independent needle of the probe needles 34,
The tip height and contact resistance are measured, and the results are stored.

As for the common needle, a plurality of common needles connected to the same external connection terminal are regarded as one group, and for each group, the position of the lowest needle tip height in the group is measured. can do. That is, in each group of the common needles, when any of the common needles belonging to the group first comes into contact with the first contact plate 42, at that time, a current flows through the electric circuit including the external connection terminal connected to the group. In other words, the height position of the lowest needle point among the common needles belonging to the group can be measured.

Next, after lowering the elevating plate 58, the Y moving table 70 is moved in the Y direction, and the second contact plate 44 (see FIG. 1) is brought directly below the probe card 32. Then, as shown in FIG.
Is driven, and the XY coordinates of the two reference holes 140 of the second contact plate 44 are measured by the CCD camera 92. Then, the plate base 30 is moved in the X and Y directions such that the contact land closest to the common needle to be inspected matches the XY coordinates of the common needle to be inspected. Next, in the process of raising the elevating plate 58 and bringing the contact land into contact with the common needle, the tip height and the contact resistance of the common needle are measured. Such inspection is sequentially performed for all the common needles included in the probe card.

The comparison between the height of the common needle and the height of the independent needle is as follows. As described above, the needle height of the independent needle and the lowest needle height in each group of the common needle are determined by the first contact plate 42 as described above.
Is measured and stored. Further, the tip height of each common needle is measured and stored using the second contact plate 44 as described above. Therefore, which common needle has the lowest needle tip height among the groups of the common needles has been clarified by the measurement using the second contact plate 44. The relative deviation of the needle tip height from other common needles belonging to the same group is also known. Therefore, it is possible to obtain the relative deviation of the needle point height between all the independent needles and all the common needles by using the lowest common needle of each group as an intermediary.

In the above description of the embodiment, the power supply line (VCC) and the ground line (GND) have been described as examples of common needles of the probe card. However, the signal lines may be common needles. Conversely, the power supply line (VC
C) and the ground line (GND) may be independent needles.

[0050]

According to the inspection apparatus of the present invention, the tip height and the contact resistance of the common needle are measured by using the second contact plate having the conductive contact lands formed on the electrically insulating surface. Even when the common needles are arranged in multiple layers, the common needles can be individually tested.

[Brief description of the drawings]

FIG. 1 is a plan view of an embodiment of an inspection device of the present invention.

FIG. 2 is a front view of the inspection device of FIG.

FIG. 3 is a side view showing an X-direction moving mechanism and an observation device.

FIG. 4 is a schematic front view showing the entire inspection apparatus of FIG. 1;

FIG. 5 is a principle diagram when an independent needle is inspected using a first contact plate.

FIG. 6 is a principle diagram when a common needle is inspected using a second contact plate.

FIG. 7 is a plan view of a second contact plate.

FIG. 8 is a vertical sectional view showing a state where a common needle is brought into contact with a contact land of a second contact plate.

FIG. 9 is a view illustrating a manufacturing process of a second contact plate.

FIG. 10 is a plan view of an integrated contact plate obtained by integrating a first contact plate and a second contact plate.

FIG. 11 is a plan view of a modified example of the integrated contact plate.

FIG. 12 is an enlarged plan view of two types of contact lands shown in FIG.

FIG. 13 is a plan view showing an example of the arrangement of common needles and independent needles in a probe card.

FIG. 14 is a principle diagram of a conventional inspection device using a flat metal plate.

FIG. 15 is a principle diagram when a common needle is inspected by the conventional inspection device of FIG.

FIG. 16 is a principle view of a conventional inspection device using contact pins.

FIG. 17 is a side view showing a state of inspecting a multi-layered array of probe needles with the conventional inspection apparatus of FIG. 16;

[Explanation of symbols]

 Reference Signs List 30 plate base 32 probe card 34 probe needle 38 camera stage 42 first contact plate 44 second contact plate 46 glass plate 48 polishing plate 92 CCD camera 110 switch 114 measuring instrument 120 contact land switch 122 contact land 124 external connection terminal 140 Reference hole 142 Integrated contact plate 148 Integrated contact plate 152 X-direction contact land 154 Y-direction contact land 345, 346 Common needle

Claims (5)

[Claims] 1. An inspection apparatus for a probe card having the following features. (A) A first contact plate for inspecting a plurality of probe needles (hereinafter, referred to as independent needles) electrically separated from each other, and a plurality of probe needles (hereinafter, referred to as common needles) electrically connected to each other. .) For inspection. (B) The first contact plate has a conductive surface. (C) The second contact plate has an electrically insulating surface, a plurality of conductive contact lands exposed on the surface and electrically separated from each other, and a one-to-one correspondence between these contact lands. A plurality of external connection terminals electrically connected in a corresponding relationship. (D) The exposed dimension of the contact land in at least one direction is smaller than the arrangement pitch of the probe tips of the probe needle of the probe card to be inspected. (E) The independent needles are brought into contact with the surface of the first contact plate, and for each of the independent needles, the continuity of an electric circuit including the independent needles and the first contact plate is checked. First measuring means for measuring the needle tip height and the contact resistance between each independent needle and the first contact plate. (F) By contacting any one of the common needles with any one of the contact lands of the second contact plate and checking the conduction state of an electric circuit including the common needle and the contact lands. Second measuring means for measuring the height of the tip of the common needle and the contact resistance between the common needle and the contact land. 2. A probe card inspection apparatus having the following features. (A) A first contact plate for inspecting a plurality of probe needles (hereinafter, referred to as independent needles) electrically separated from each other, and a plurality of probe needles (hereinafter, referred to as common needles) electrically connected to each other. .) For inspection. (B) The first contact plate has a conductive surface. (C) The second contact plate includes an electrically insulating surface, one conductive contact land exposed on the surface, and an external connection terminal electrically connected to the contact land. Have. (D) The exposed dimension of the contact land in at least one direction is smaller than the arrangement pitch of the probe tips of the probe needle of the probe card to be inspected. (E) The independent needles are brought into contact with the surface of the first contact plate, and for each of the independent needles, the continuity of an electric circuit including the independent needles and the first contact plate is checked. First measuring means for measuring the needle tip height and the contact resistance between each independent needle and the first contact plate. (F) bringing any one of the common needles into contact with the contact lands of the second contact plate and checking the continuity of an electric circuit including the common needles and the contact lands; Second measuring means for measuring the height of the needle tip and the contact resistance between the common needle and the contact land. 3. A probe card inspection apparatus having the following features. (A) A first contact plate for inspecting a plurality of probe needles (hereinafter, referred to as independent needles) electrically separated from each other, and a plurality of probe needles (hereinafter, referred to as common needles) electrically connected to each other. .) For inspection. (B) The first contact plate has a conductive surface. (C) the second contact plate has a conductive surface, an electrically insulating surface surrounded by the conductive surface,
A conductive strip-shaped contact land surrounded by the electrically insulating surface, the contact land having both ends connected to the conductive surface; (D) The width of the belt-like contact land is smaller than the arrangement pitch of the probe tips of the probe needles of the probe card to be inspected. (E) The independent needles are brought into contact with the surface of the first contact plate, and for each of the independent needles, the continuity of an electric circuit including the independent needles and the first contact plate is checked. First measuring means for measuring the needle tip height and the contact resistance between each independent needle and the first contact plate. (F) bringing any one of the common needles into contact with the contact lands of the second contact plate and checking the continuity of an electric circuit including the common needles and the contact lands; Second measuring means for measuring the height of the needle tip and the contact resistance between the common needle and the contact land. 4. The inspection apparatus according to claim 3, wherein the second contact plate includes a conductive strip-shaped contact land extending in the X direction and a conductive strip-shaped contact land extending in the Y direction. Inspection equipment characterized. 5. The method according to claim 1, wherein:
3. The inspection device according to claim 1, wherein the first contact plate and the second contact plate are integrated.