CN215866990U

CN215866990U - Probe card, detection device and wafer detection device

Info

Publication number: CN215866990U
Application number: CN202122005544.5U
Authority: CN
Inventors: 宋慧; 王国峰
Original assignee: Beihai Huike Semiconductor Technology Co Ltd
Current assignee: Beihai Huike Semiconductor Technology Co Ltd
Priority date: 2021-08-24
Filing date: 2021-08-24
Publication date: 2022-02-18
Anticipated expiration: 2031-08-24

Abstract

The application discloses a probe card, a detection device and a detection device of a wafer, wherein the probe card is used for detecting a part to be detected of a product to be detected, and comprises a probe card body, wherein at least one probe group is arranged on the probe card body; the probe group comprises at least two probes, all the probes in one probe group are used for detecting the part to be detected, and the distance between different probes in one probe group is adjustable. According to the application, the applicability of the probe card is improved through the mode.

Description

Probe card, detection device and wafer detection device

Technical Field

The present disclosure relates to the field of inspection technologies, and particularly to a probe card, an inspection apparatus, and an inspection apparatus for a wafer.

Background

At present, when products leave a factory, the yield of the products is always a problem of close attention of people, so that the detection of the performance of the products is crucial, the products to be detected generally comprise a plurality of parts to be detected, specifically, the parts to be detected generally comprise at least two detection points, the performance of the detection points can be detected through probes, in the actual test process, the products to be detected generally have different specifications, the sizes of the parts to be detected in the products to be detected in the same specification can also be different, and the positions of the detection points in the parts to be detected in different sizes are different; correspondingly, the positions of the detection points in the parts to be detected can be different for products to be detected with the same specification, the existing probe card can only correspondingly detect the products to be detected with one specification and the same size of the parts to be detected, and when the specification of the products to be detected is changed, the probe card with the applicable specification needs to be replaced. Therefore, how to improve the applicability of the probe card is an urgent technical problem to be solved by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

The probe card is provided with the probe group for testing the part to be detected, and the distance between different probes in the same probe group is adjustable, so that the applicability of the probe card is improved.

The application discloses a probe card, which is used for detecting a part to be detected of a product to be detected and comprises a probe card body, wherein at least one probe group is arranged on the probe card body; the probe group comprises at least two probes, all the probes in one probe group are used for detecting the part to be detected, and the distance between different probes in one probe group is adjustable.

Optionally, the probe card body is provided with at least two probe sets, and the distance between different probe sets is adjustable.

Optionally, the probe card body is provided with at least two probe tracks, the probes are arranged in one-to-one correspondence with the probe tracks, and the probes are movably connected to the probe tracks.

Optionally, the probe track includes at least two circular sub-tracks, the two circular sub-tracks are arranged to have different radiuses at the same center, and a linear track connecting the two circular sub-tracks, and the linear track is used for the probe to perform orbital transfer between the two circular sub-tracks.

Optionally, each probe track is provided with a sliding block, the sliding block is connected with the probe track in a sliding manner, and the probe is fixed on the sliding block.

Optionally, the probe track is a guide rail shaped like a Chinese character 'ao', and the slider is provided with a sliding part matched with the guide rail shaped like a Chinese character 'ao'.

Optionally, at least two fixing through holes are formed in the probe card body, the number of the fixing through holes is larger than that of the probes, and the probes are detachably fixed in different fixing through holes.

Optionally, the probe card body includes a printed circuit board, the probe track is disposed on the printed circuit board, the probe is electrically connected to the printed circuit board through the probe track, and the printed circuit board provides a test signal for the probe.

The application discloses a detection device, which comprises the probe card, a driving motor, a driving mechanism and a carrying mechanism, wherein the driving mechanism is arranged on a probe track and is connected with the driving motor so as to drive the probe to move along the probe track; a product to be detected is placed on the carrying mechanism, and a plurality of parts to be detected are arranged in the product to be detected; the carrying mechanism is movable.

The application also discloses detection device of wafer, include this application and disclose detection device, it is the wafer to wait to detect the product, it is to wait to detect the portion for test pad in the wafer.

Compared with a probe card which can only detect products to be detected with one specification and the same size of parts to be detected, the method has low applicability. According to the probe card, at least two probes form a probe group, all the probes in one probe group detect the same part to be detected, and the test of all detection points in the part to be detected can be completed by carrying out one-time detection; moreover, the distance between different probes in the probe group is adjustable, and the probe group can be used for testing various products to be detected with different specifications, particularly the situation that the sizes of parts to be detected are different. The probe set comprises a probe set body, a probe group, a probe card and a probe card, wherein the probe set body is provided with a plurality of detecting points, the detecting points are arranged in the probe set body, the positions of the detecting points in the detecting portions are different, when the size of the detecting portion is changed, the distance between different probes in the probe set is adjusted, the positions of all probes in the probe set body can correspond to the positions of the detecting points in the detecting portion one to one, the accuracy of a test result is guaranteed, and the applicability of the probe card is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the embodiments of the application, are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:

FIG. 1 is a schematic view of a probe card according to an embodiment of the present application;

FIG. 2 is a schematic view of a portion to be detected according to an embodiment of the present application;

FIG. 3 is a schematic diagram of probe orbitals within a probe set according to one embodiment of the present application;

FIG. 4 is a schematic view of a probe card according to another embodiment of the present application;

FIG. 5 is a schematic view of the probe track and slider assembly according to one embodiment of the present application;

FIG. 6 is a schematic view of the probe track and slider assembly of another embodiment of the present application;

FIG. 7 is a schematic view of a through hole of a probe card according to another embodiment of the present application;

FIG. 8 is a schematic diagram illustrating the transmission of test signals of probes on a probe card according to an embodiment of the present invention;

fig. 9 is a schematic view of a detection device according to an embodiment of the present application.

100, a detection device/a wafer detection device; 200. an object mechanism/object table; 300. a drive motor; 400. a drive mechanism; 500. a probe card; 510. a probe card body; 520. a probe set; 521. a probe; 530. probe track/guide rail in a shape of Chinese character 'ao'; 531. a circular sub-track; 532. a linear track; 533. a slider; 534. a sliding part; 540. a fixing through hole; 550. a printed circuit board; 600. products/wafers to be detected; 610. a portion to be tested/test pad; 620. and detecting points.

Detailed Description

It is to be understood that the terminology, the specific structural and functional details disclosed herein are for the purpose of describing particular embodiments only, and are representative, but that the present application may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.

In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating relative importance or as implicitly indicating the number of technical features indicated. Thus, unless otherwise specified, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature; "plurality" means two or more. The terms "comprises" and "comprising," and any variations thereof, are intended to cover a non-exclusive inclusion, such that one or more other features, integers, steps, operations, elements, components, and/or combinations thereof may be present or added.

Further, terms of orientation or positional relationship indicated by "center", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, are described based on the orientation or relative positional relationship shown in the drawings, are simply for convenience of description of the present application, and do not indicate that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application.

Furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, fixed connections, removable connections, and integral connections; can be mechanically or electrically connected; either directly or indirectly through intervening media, or through both elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

The present application is described in detail below with reference to the figures and alternative embodiments.

Fig. 1 is a schematic view of a probe card according to an embodiment of the present application, and referring to fig. 1, the present application discloses a probe card 500, where the probe card 500 is used for inspecting a portion 610 to be inspected of a product 600 to be inspected, the probe card 500 includes a probe card body 510, and at least one probe set 520 is disposed on the probe card body 510; the probe set 520 comprises at least two probes 521, all the probes 521 in one probe set 520 are used for detecting one part 600 to be detected, and the distance between different probes 521 in one probe set 520 is adjustable.

Compared with a probe card 500 which can only detect products 600 to be detected with one specification and the same size of parts to be detected, the method for detecting the probe card 500 has low applicability. In the probe card 500 of the present application, at least two probes 521 form a probe group 520, and a test can be performed on all the detecting points 620 in the to-be-detected portion 610 by performing a single detection; moreover, the distance between different probes 521 in the probe set 520 of the present application is adjustable, and the probe set can be used for testing a plurality of products 600 to be tested with different specifications, especially for the cases where the sizes of the parts 610 to be tested are different. Specifically, the positions of the detection points 620 in the part to be detected 610 are different, and when the size of the part to be detected 610 is changed, the distance between different probes 521 in the probe set 520 is adjusted, so that the positions of all the probes 521 in the probe set 520 can be in one-to-one correspondence with the positions of the detection points 620 in the part to be detected 610, the accuracy of a test result is ensured, and the applicability and the flexibility of the probe card 500 are improved.

Fig. 2 is a schematic diagram of a to-be-detected portion in an embodiment of the present application, and as can be seen from fig. 2, one to-be-detected portion 610 generally includes at least two detection points 620, when a product 600 to be detected is detected, one probe group 520 correspondingly detects one to-be-detected portion 610, the number of the detection points 620 is the same as the number of the probes 521 in the probe group 520, so that the probes 521 in the probe group 520 correspond to the detection points 620 in the to-be-detected portion 610 one to one, and a test of all the detection points 620 in the to-be-detected portion 610 can be completed by performing a single detection, while the sizes of the to-be-detected portions 610 of the product 600 to be detected in the same specification may also be different, and the sizes of the to-be-detected portions 610 are different, so that the positions of all the detection points 620 in the to-be-detected portion 610 are also different.

Specifically, taking the products 600 to be detected in the same specification, the shape of the part 610 to be detected is a square as an example, four detection points 620 are arranged in the part 610 to be detected, and the four detection points 620 are arranged in a square shape, for example, as shown in fig. 2, the positions of all the detection points 620 in the parts 610 to be detected of the products 600 to be detected, which are 6 inches, 8 inches and 12 inches from small to large respectively, correspond to the products 600 to be detected of 6 inches, 8 inches and 12 inches, and the positions of the detection points 620 in the products 600 to be detected of 8 inches and 12 inches are different, that is, the positions of the detection points 620 in the products 600 to be detected of 8 inches and 12 inches sequentially deviate to the right side from the positions of the detection points 620 in the products 600 to be detected of 6 inches. It should be noted that the sizes, shapes, positions, etc. of the products 600 to be detected, the parts 610 to be detected, and the detecting points 620 of the same specification or different specifications are not limited to the one shown in the embodiment, and the type of the actual products 600 to be detected is taken as the standard.

In the actual detection process of the product 600 to be detected, when the product 600 to be detected with the small size is detected and replaced to the product 600 to be detected with the large size for detection, because the size of the part 610 to be detected in the product 600 to be detected with the large size increases, the position of the detection point 620 in the part 610 to be detected shifts to the right relative to the previous position, when the probe card 500 of the present application is used for detection, different probes 521 in the probe set 520 move relatively, so that all the probes 521 in the probe set 520 move to the right integrally, all the probes 521 in the probe set 520 can correspond to all the detection points 620 in the part 610 to be detected with the large size one to one, and the test of the product 600 to be detected with the large size can be satisfied; when the product 600 to be detected is changed from a large size to a small size, different probes 521 in the probe group 520 move relatively, so that all the probes 521 in the probe group 520 integrally move to the left side, and the test of the product 600 to be detected in the small size can be completed. When the size of the product 600 to be detected is changed, the product 600 to be detected with different sizes can be detected without changing the probe card 500, and the detection efficiency is greatly improved.

Fig. 3 is a schematic diagram of probe tracks in a probe set according to an embodiment of the present invention, and referring to fig. 3, at least two probe tracks 530 are disposed on the probe card body 510, the probes 521 are disposed in one-to-one correspondence with the probe tracks 530, and the probes 521 are movably connected to the probe tracks 530. In this embodiment, at least two probe tracks 530 are disposed on the probe card body 510, the number of the probe tracks 530 is the same as the number of the probes 521, so that each probe 521 is provided with one probe track 530, each probe 521 is movably connected to the corresponding probe track 530, each probe 521 can move in the corresponding probe track 530, and all the probes 521 in the probe set 520 can move independently, so that the size and the central position of a polygonal area surrounded by a plurality of probes 521 can be changed, and the probe card can adapt to the test of the to-be-detected part 610 with different sizes and different positions.

Preferably, in this embodiment, the probe track 530 includes at least two circular sub-tracks 531, where the two circular sub-tracks 531 are concentric and have different radii, and a linear track 532 connecting the two circular sub-tracks 531, where the linear track 532 is used for the probe 521 to perform track change between the two circular sub-tracks 531. In this embodiment, the probe track 530 is designed to be at least two concentric circular sub-tracks 531, and the linear track 532 is connected between each circular sub-track 531, so that the probe 521 can be switched between different circular tracks through the linear track 532, and the probe 521 is located on circular tracks with different radii, and further the position of the probe 521 is adjusted, and the distance between different probes 521 is changed.

In the above preferred embodiment, the movement of the probes 521 on the probe track 530 forms a certain movement track, and the movement track of each probe 521 in the probe set 520 is the same, the movement track of each probe 521 is at least two circles, the two circles are concentric circles with different radii, and a straight line connecting between each circle is formed, and the probe track 530 has the same shape as the movement track, so that the probe track 530 can be formed according to the movement track.

Further, in order to test the products 600 to be detected with different specifications, the positions of the detection points 620 in the part 610 to be detected can be marked according to different actual products 600 to be detected, and the shortest path for the probe 521 to move to each marking point is preset according to the marking points on the products 600 to be detected with different specifications, so as to form the movement track of the probe 521. The motion track can be flexibly designed according to the specific condition of the product 600 to be detected, and according to the preset motion track, a corresponding probe track 530 is made for each probe 521 on the probe card body 510, so that the effect that the probe 521 can move on the probe track 530 is realized, the probe card 500 has higher flexibility, and the motion track of each probe 521 can be the same or different, and only the suitable probe 521 can move to a target position or change the distance between different probes 521.

The shape of the probe track 530 is made according to the motion track of the probe 521, and the motion track is preset, so that on one hand, when the probe 521 detects products 600 to be detected with different specifications, the moving distance is short, the detection time is saved, and the test efficiency is improved; on the other hand, the manufacturing cost of a certain probe track 530 can be saved.

Fig. 4 is a schematic diagram of a probe card according to another embodiment of the present invention, and referring to fig. 4, it can be seen that generally, a product 600 to be detected includes more than one portion to be detected 610, and all the portions to be detected 610 need to be detected to complete the detection of the product 600 to be detected, so that at least two probe sets 520 are disposed on the probe card body 510, and the distance between different probe sets 520 is adjustable. In this embodiment, at least two probe sets 520 are provided, so that the probe card 500 can synchronously detect at least two parts to be detected 610, and the test speed is obviously improved; meanwhile, when the specifications of the products 600 to be detected are the same and/or different, the distances between the adjacent parts 600 to be detected may also be different, so that the distances between the adjacent probe sets 520 in the probe card 500 are adjusted accordingly, so as to be suitable for detecting the products 600 to be detected with different specifications.

Specifically, the distance between different probe sets 520 includes two cases: one is the distance D1 between the center points of the probe sets 520, the center point refers to the center point of the probes 521 in the probe set 520, the probes 521 are generally regularly arranged to form a regular polygon, the center point of the probes 521 is the center point of the polygon, if the probes 521 enclose an irregular polygon, the center point of the irregular polygon can be preset, and the distance between the center points of two adjacent probe sets 520 is realized by the relative movement between different probes 521 in the probe set 520; the other is the distance D2 between probes 521 that are close to the edge between different probe sets 520 and between adjacent probe sets 520.

In the actual testing process, the distance between different probe sets 520 of different products 600 to be tested may be D1 or D2. Use product 600 to wait to detect to be display panel for example, it is the components and parts on the display panel to wait to detect portion 610, check point 620 is a plurality of pins on the components and parts, on the display panel of same size, the size of components and parts is probably different, the position of a plurality of pins is also different, it is concrete, on the components and parts of equidimension not, the central point interval of a plurality of pins is inequality, therefore, when using probe card 500 to detect display panel, need select the central point distance D1 of adjustment probe group 520, on adapting to same size display panel, the size of components and parts is different phenomenon, make all probe 521 in the probe group 520 can with a plurality of pin position one-to-one on the components and parts, when improving detection speed, guarantee the accuracy of testing result.

Preferably, in this embodiment, four probe sets 520 are disposed on the probe card body 510, each probe set 520 includes four probes 521, probe tracks 530 are disposed on the probe card body 510, the number of the probe tracks 530 is the same as that of the probes 521, each probe track 530 includes four concentric circular sub-tracks 531 and a linear track 532 connecting the four concentric circular sub-tracks 531, all the probes 521 are movably connected to the circular sub-tracks 531 and the linear track 532, and can be shifted between different circular sub-tracks 531 through the linear tracks 532.

In this embodiment, the arrangement shape of the detection points 620 in the to-be-detected part 610 may be square, four probes 521 are used to form one probe group 520, one probe group 520 is used to detect one to-be-detected part 610, four probes 521 in each probe group 520 may be arranged in a square shape, and are arranged corresponding to the arrangement shape of all the detection points 620 in the to-be-detected part 610, four probe groups 520 are arranged on the probe card body 510, and four probe groups 520 may be arranged in a straight shape, so that the probe card 500 can realize synchronous detection of the four to-be-detected parts 610.

Meanwhile, the probe track 530 is composed of four concentric circular sub-tracks 531 and a linear track 532 for connecting the four concentric circular sub-tracks 531, each probe 521 can change tracks between different circular sub-tracks 531 through the linear track 532, each probe 521 in each probe group 520 on the probe card 500 can move through the probe track 530, the distance between different probes 521 can be adjusted by changing the position of each probe 521 through independent movement, meanwhile, the position of the central point of the probe group 520 can be changed, and further, the distance between the central points of two adjacent probe groups 520 can be adjusted, so that the probe card 500 can detect the parts to be detected 610 on products with different sizes, and the flexibility is higher.

For example, when the product 600 to be detected is a display panel, the part 610 to be detected may be a data line on the display panel, and the detection point 620 on the part 610 to be detected is a pin on the data line, the four probes 521 in the probe set 520 may be arranged in a straight line, and the four probe sets 520 may be arranged in parallel, so that the probe tracks 530 may be correspondingly arranged as one or more linear tracks, so that each probe 521 in the probe set 520 linearly moves along the linear tracks. The arrangement of the probes 521 in the probe set 520 is not limited to a square or a straight line, and may be other triangles, circles or polygons, which is not described herein again.

In the probe card 500 of the present application, the probes 521 can move on the probe tracks 530, and the specific matching structure can be adjusted according to actual requirements, and how the probes 521 and the probe tracks 530 slide in a matching manner is specifically described below:

fig. 5 is a schematic view illustrating the assembly of the probe track and the slider according to an embodiment of the present invention, and referring to fig. 5, the probe track 530 is a guide rail shaped like a Chinese character 'ao', and the slider 533 is provided with a sliding portion 534 matching with the guide rail shaped like a Chinese character 'ao'. In this embodiment, the probe track 530 is designed as a concave guide, the concave design enables a hollow groove to be formed inside the probe track 530, correspondingly, the slider 533 is designed as a rectangular or square shape matching with the groove in the probe track 530, the slider 533 is provided with a sliding portion 534, the sliding portion 534 can be a portion of the slider 533 contacting with the groove in the concave guide, the shape of the slider 533 is not limited to the rectangular or square shape, as long as the slider 533 is not easily dropped out of the groove in the probe track 530, and the slider 533 can slide back and forth in the probe track 530 along the sliding portion 534, and the slider 533 can also be in an i-shape or T-shape.

Specifically, the probes 521 may be fixed on the sliders 533, so that the probes 521 are movable on the probe tracks 530, and the specific fixing manner of the probes 521 and the sliders 533 may be detachable, for example, some screws for fixing are provided on the probes 521, screw holes are provided on the corresponding sliders 533, and the probes 521 are fixed together in a manner that the screws and the screw holes are detachable, so that when one of the probes 521 on the probe card 500 is damaged, the probe 521 can be replaced independently, so that the probe card 500 can continue to be used normally, the service life of the probe card 500 is prolonged, and the manufacturing cost of the probes 521 can be saved; the mode of directly welding the probe 521 on the sliding block 533 can be adopted, so that the stability of the probe 521 and the sliding block 533 is better, and the risk of dislocation during the test of the probe 521 due to looseness between the probe 521 and the sliding block 533 caused by frequent movement of the probe 521 and multiple tests can be avoided.

Fig. 6 is a schematic view showing an assembly of a probe track and a slider according to another embodiment of the present invention, and it can be seen from fig. 6 that the probe track 530 can also be designed as a convex rail, and correspondingly, the slider 533 is designed as a concave rail, and the sliding portion 534 is a portion of the slider 533 contacting with the convex rail, so that the slider 533 can slide back and forth along the sliding portion 534 on the probe track 530, and the fixing manner of the probe 521 and the slider 533 can be described with reference to the concave rail portion of the probe track 530.

In the probe card 500 of the present application, the probes 521 can move through the probe tracks 530, and the inventors of the present application have devised another embodiment, specifically as follows:

fig. 7 is a schematic view of fixing through holes of a probe card according to another embodiment of the present invention, and referring to fig. 7, at least two fixing through holes 540 are formed in the probe card body 510, and the number of the fixing through holes 540 is greater than the number of the probes 521, and the probes 521 are detachably fixed in different fixing through holes 540. In this embodiment, the positions of the fixing through holes 540 may be correspondingly set according to the size of the product 600 to be detected, the sizes of the parts 610 to be detected are different, and the positions of the detecting points 620 in the corresponding parts 610 to be detected are also different, and at least two fixing through holes 540 may be set on the probe card body 510 in advance according to the positions of the detecting points 620 in the parts 610 to be detected, wherein the number of the fixing through holes 540 is greater than the set number of the probes 521, and the probes 521 and the fixing through holes 540 are detachably fixed, so that each probe 521 can be respectively fixed in different fixing through holes 540.

Specifically, the position of each probe 521 in the different fixing through holes 540 may be changed by clamping the probe 521 by a manipulator, and moving the manipulator, so as to change the position of the probe 521, where the manipulator can respectively clamp each probe 521 fixed in the different fixing through holes 540, and change the position of each probe 521, so that the distance between different probes 521 on the probe card 500 can be adjusted, and the distance between different probes 521 in one probe group 520 can be adjusted, and/or the distance between different probe groups 520 can be adjusted.

Fig. 8 is a schematic diagram of probe test signal transmission on a probe card according to an embodiment of the present invention, as can be seen from fig. 8, in order to realize electrical signal transmission between the probe card 500 and probes 521, the probe card body 510 includes a printed circuit board 550, the probe tracks 530 are disposed on the printed circuit board 550, the probes 521 are electrically connected to the printed circuit board 550 through the probe tracks 530, and the printed circuit board 550 provides test signals for the probes 521.

In this embodiment, the printed circuit board 550 may be an independent structure disposed on the probe card body 510, the printed circuit board 550 and the probe card body 510 are connected together by fixing screws, the probe tracks 530 are disposed on the printed circuit board 550, and the probes 521 are electrically connected to the printed circuit board 550 through the probe tracks 530. The detachable connection between the printed circuit board 550 and the probe card body 510 facilitates the detachment from the probe card body 510 when the printed circuit board 550 has an abnormal function, so that maintenance personnel can check and test the performance of the printed circuit board, and the maintenance process is more convenient.

Specifically, the probe track 530 may be made of a non-conductive material, and the probe 521 is electrically connected to the printed circuit board 550 directly through a wire; the probe track 530 may also be made of a metal conductive material, or made of other non-metal materials, and a conductive coating is coated on the surface of the probe track 530, so that the probe 521 and the probe track 530 can transmit an electrical signal without a wire, and the printed circuit board 550 is ensured to provide a test signal for the probe 521.

In addition, the sliding block 533 in this application may be made of a metal conductive material, or made of other non-metal materials, and a conductive coating is coated on the surface of the sliding block 533, so as to ensure that the probe 521 is fixed on the sliding block 533, and when the sliding block 533 moves on the probe track 530, the probe 521 and the probe track 530 can transmit an electrical signal therebetween.

In addition, in the actual detection process, the number of the probe sets 520 and the number of the probes 521 in the probe sets 520 can be determined according to the actual detection requirements, for example, when the probe card 500 is used for detecting the current of the part to be detected 610, when all the probes 521 in each probe set 520 simultaneously test one part to be detected 610, the function of current division is equivalently performed on each probe 521, when a large current test is performed, a single probe 521 cannot realize the test, the function of current division can be realized by adopting at least two probes 521, the integrity of each probe 521 can be ensured, and the damage caused by the large current is avoided.

Of course, the probe card body 510 can also be directly the printed circuit board 550, so that the probe card body 510 does not need to be manufactured to fix the printed circuit board 550, and the electrical signal transmission between the probe card 500 and the probes 521 can also be realized.

The inventor of the present application further designs a detection apparatus 100 for the improved probe card 500, which is as follows:

fig. 9 is a schematic view of a detection apparatus according to an embodiment of the present application, and as can be seen from fig. 9, the detection apparatus 100 includes any probe card 500 disclosed in the present application, and a driving motor 300, a driving mechanism 400 and a carrying mechanism 200, wherein the driving mechanism 200 is disposed on the probe track 530, and the driving mechanism 400 is connected to the driving motor 300 to drive the probe 521 to move along the probe track 530; a product 600 to be detected is placed on the carrying mechanism 400, and a plurality of parts 610 to be detected are arranged in the product 600 to be detected; the loading mechanism 200 is movable.

In this embodiment, the probe card body 510 is provided with a plurality of probe tracks 530, the number of the probe tracks 530 is the same as the number of the probes 521, the driving mechanism 400 is disposed on the probe tracks 530, the detecting apparatus 100 further includes a driving motor 300, and the driving mechanism 400 is connected with the driving motor 300 to drive the probes 521 to move along the probe tracks 530; a product 600 to be detected is placed on the carrying mechanism 200, and a plurality of parts 610 to be detected are arranged in the product 600 to be detected; the carrier mechanism 200 is movable to enable the probe card 500 to inspect different parts to be inspected 610.

The embodiment is optional, the object carrying mechanism 200 may be an object carrying table, the object carrying table may be circular, and may be used for placing a plurality of products 600 to be detected, and meanwhile, a surface of the object carrying table contacting the products 600 to be detected may be set to be a horizontal surface, so as to ensure that when the products 600 to be detected are placed on the object carrying table, the surface to be detected remains horizontal, and the probe 521 in the probe card 500 does not contact the products 600 to be detected locally due to local inclination, which may cause inaccurate test result and affect the test efficiency; meanwhile, the object stage can be movable, and can be in a mode of circular motion around the geometric center of the object stage, when a product 600 to be detected is detected, the product 600 to be detected is placed on the object stage, and the object stage can be rotated to detect the parts 610 to be detected at different positions on the product 600 to be detected; when detecting a plurality of products 600 that wait to detect, will a plurality of products 600 that wait to detect place respectively in the different positions of objective table, rotatory objective table can realize changing fast and wait to detect product 600, improves efficiency of software testing.

The shape of the object stage can be designed into a rectangular shape or other polygonal shapes according to the shape of the product 600 to be detected, and some fixing columns or stopping strips can be designed correspondingly at the position where the product 600 to be detected is placed on the object stage, so that the product 600 to be detected is placed on the object stage, and when the object stage moves, the product 600 to be detected can be fixed between the fixing columns or the stopping strips, so that the product 600 to be detected moves randomly, and the testing speed is increased.

In this embodiment, the detecting device 100 further includes a mechanical arm, the probe card 500 is fixed on the mechanical arm, the mechanical arm is electrically connected to the probe card 500, the mechanical arm can extend back and forth to drive the probe card 500 to move back and forth, the mechanical arm can flexibly rotate at any angle during operation, the probe card 500 can rotate to an angle corresponding to any one of the products 600 to be detected under the action of the mechanical arm, and the probe card 500 is quickly aligned with the position of the portion 610 to be detected in the product 600 to be detected, so as to greatly improve the detecting speed.

In addition, when the probe card 500 is fixed on the mechanical arm, and the position of the probe card 500 is changed by the movement of the mechanical arm, the objective table can also be fixed, when the product 600 to be detected is placed on the objective table, the probe card 500 is driven by the mechanical arm to move to change the position of the probe card 500, and the position of the probe card 500 corresponds to the positions of different parts 610 to be detected on the product 600 to be detected, so that the parts 610 to be detected at different positions on the product 600 to be detected are tested; when a plurality of products 600 to be tested are placed on the object stage, the position of the probe card 500 can be moved to test different products 600 to be tested, and the test efficiency can be improved.

Further, in the process of testing the product 600 to be tested, when the probe set 520 for testing on the probe card 500 is in contact with the part 610 to be tested on the product 600 to be tested, the probes 521 for testing are not necessarily in one-to-one correspondence with all the detecting points 620 in the part 610 to be tested, which leads to the problem of inaccurate testing result, the testing apparatus 100 is further provided with the driving motor 300 and the driving mechanism 400, the probe track 530 is provided on the probe card body 510 of the probe card 500, the driving mechanism 400 is provided on the probe track 530, the driving motor 300 is electrically connected with the driving mechanism 400, the probes 521 can be fixedly mounted on the driving mechanism 400, the probes 521 move along the probe track 530 under the driving of the driving motor 300, the pitch between all the probes 521 on the probe card 500 can be finely adjusted, so that all the probe cards 500 can be in one-to-one correspondence with all the detecting points 620 in the part 610 to be tested, so that the test result is more accurate.

Specifically, the probe card 500 may be aligned with the positions of all the detecting points 620 in the to-be-detected portion 610 by arranging a magnifying glass on the probe card body 510 to magnify a local area where each probe 521 contacts with each detecting point 620 in the to-be-detected portion 610, the magnifying glass may be provided with an optical scale, and a tester visually observes a result of the optical scale on the magnifying glass to adjust the positions of the probes 521, so that the probes 521 correspond to the positions of the detecting points 620 one by one; the position of each probe 521 and each detection point 620 in the part to be detected 610 may be monitored by adding a sensor to the probe card 500, so as to automatically adjust the position of the probe 521. The arrangement of the magnifier and the sensor can enable a tester to more intuitively know the distance between the probe 521 and the detection point 620 at any time in the test process, and can timely adjust the position of the probe 521, so that the probe 521 is quickly aligned with the detection point 620, and the detection efficiency is improved.

In the actual detection process, after one or one batch of parts to be detected 610 is detected, the next or the next batch of parts to be detected 610 needs to be detected, and the size of the next or the next batch of parts to be detected 610 is different from that of the previous batch, the distance between different probes 521 in each probe group 520 on the probe card 500 can be correspondingly adjusted, so that all the probes 521 in the probe group 520 can still correspond to the positions of all the detection points 620 in the parts to be detected 610 one by one, and therefore the probe card 500 can be used for detecting the parts to be detected 610 with different sizes, and products to be detected 600 with different specifications can be detected.

The detection device 100 of the present application can be used for detecting various different types of products, and the probe card 500 does not limit the product 600 to be detected and the portion 610 to be detected, and when the product 600 to be detected is a display panel, the portion 610 to be detected corresponds to a data line, a scan line, and the like; when the product 600 to be detected is a printed circuit board, the part 610 to be detected corresponds to a component, a line or a pad on the printed circuit board; when the product 600 to be inspected is a wafer, the portion 610 to be inspected is a test pad or a die, etc.

The application also discloses a detection device 100 for a wafer, which comprises the detection device 100 disclosed by the application, wherein the product 600 to be detected is a wafer, and the part 610 to be detected is a test pad in the wafer. In this embodiment, when the detecting device 100 is a detecting device for a wafer, the product 600 to be detected is a wafer, the part 610 to be detected is a testing pad on the wafer, the testing pad generally includes four detecting points 620, the size of the whole wafer is currently developed from 6 inches to 8 inches, to the current advanced 12 inches, along with the continuous increase of the size of the wafer, the size of the testing pad is not increased, and the distance between the central points of the four detecting points 620 of adjacent testing pads is also correspondingly increased.

In the process of detecting the wafer, after the probe card 500 tests the wafer with the small size, the wafer is replaced, and the replaced wafer has the test pads with the larger or smaller size and/or the space between the adjacent test pads is larger or smaller, so that the positions of the four detection points 620 of the adjacent test pads are different from or partially the same as the positions of the four detection points 620 of the wafer before replacement, at this time, different probes 521 in the probe group 520 move on respective probe tracks 530, so as to change the positions of all the probes 521 in each probe group 520, and adjust the space between the adjacent probe groups 520, so that all the probes 521 on the probe card 500 correspond to the detection points 620 one by one, and the wafer with different sizes can be detected, and the applicability and the flexibility are stronger.

It should be noted that the inventive concept of the present application can form many embodiments, but the present application has a limited space and cannot be listed one by one, so that, on the premise of no conflict, any combination between the above-described embodiments or technical features can form a new embodiment, and after the embodiments or technical features are combined, the original technical effect will be enhanced.

The foregoing is a more detailed description of the present application in connection with specific alternative embodiments, and the specific implementations of the present application are not to be considered limited to these descriptions. For those skilled in the art to which the present application pertains, several simple deductions or substitutions may be made without departing from the concept of the present application, and all should be considered as belonging to the protection scope of the present application.

Claims

1. A probe card is used for detecting a part to be detected of a product to be detected and is characterized by comprising a probe card body;

the probe card body is provided with at least one probe group;

the probe group comprises at least two probes, all the probes in one probe group are used for detecting the part to be detected, and the distance between different probes in one probe group is adjustable.

2. The probe card of claim 1, wherein at least two probe sets are disposed on the probe card body, and the distance between different probe sets is adjustable.

3. The probe card of claim 1 or 2, wherein the probe card body is provided with at least two probe tracks, the probes are arranged in one-to-one correspondence with the probe tracks, and the probes are movably connected to the probe tracks.

4. The probe card of claim 3, wherein the probe track comprises at least two circular sub-tracks, the two circular sub-tracks being concentrically arranged with different radii, and a linear track connecting the two circular sub-tracks, the linear track being used for the probe to perform the track change between the two circular sub-tracks.

5. A probe card of claim 3, wherein each of said probe tracks is provided with a slider, said slider is slidably connected with said probe track, and said probe is fixed on said slider.

6. The probe card of claim 5, wherein the probe track is a guide rail having a concave shape, and the slider is provided with a sliding portion having a shape matching the guide rail having a concave shape.

7. The probe card of claim 1 or 2, wherein at least two fixing through holes are formed in the probe card body, and the number of the fixing through holes is greater than that of the probes, and the probes are detachably fixed in different fixing through holes.

8. The probe card of claim 3, wherein the probe card body comprises a printed circuit board, the probe tracks are disposed on the printed circuit board, the probes are electrically connected to the printed circuit board through the probe tracks, and the printed circuit board provides test signals for the probes.

9. A testing apparatus, comprising the probe card of any one of claims 1 to 8, and a driving motor, a driving mechanism and a carrying mechanism, wherein the driving mechanism is disposed on the probe track, and the driving mechanism is connected to the driving motor to drive the probe to move along the probe track;

a product to be detected is placed on the carrying mechanism, and a plurality of parts to be detected are arranged in the product to be detected;

the carrying mechanism is movable.

10. An inspection apparatus for a wafer, comprising the inspection apparatus as claimed in claim 9, wherein the product to be inspected is a wafer, and the portion to be inspected is a test pad in the wafer.