JPH10321912A5 - - Google Patents

Info

Publication number
JPH10321912A5
JPH10321912A5 JP1997128451A JP12845197A JPH10321912A5 JP H10321912 A5 JPH10321912 A5 JP H10321912A5 JP 1997128451 A JP1997128451 A JP 1997128451A JP 12845197 A JP12845197 A JP 12845197A JP H10321912 A5 JPH10321912 A5 JP H10321912A5
Authority
JP
Japan
Prior art keywords
type semiconductor
semiconductor layer
conductivity type
electrode
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997128451A
Other languages
English (en)
Japanese (ja)
Other versions
JP3878715B2 (ja
JPH10321912A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP12845197A priority Critical patent/JP3878715B2/ja
Priority claimed from JP12845197A external-priority patent/JP3878715B2/ja
Publication of JPH10321912A publication Critical patent/JPH10321912A/ja
Publication of JPH10321912A5 publication Critical patent/JPH10321912A5/ja
Application granted granted Critical
Publication of JP3878715B2 publication Critical patent/JP3878715B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP12845197A 1997-05-19 1997-05-19 発光素子 Expired - Fee Related JP3878715B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12845197A JP3878715B2 (ja) 1997-05-19 1997-05-19 発光素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12845197A JP3878715B2 (ja) 1997-05-19 1997-05-19 発光素子

Publications (3)

Publication Number Publication Date
JPH10321912A JPH10321912A (ja) 1998-12-04
JPH10321912A5 true JPH10321912A5 (enExample) 2005-03-17
JP3878715B2 JP3878715B2 (ja) 2007-02-07

Family

ID=14985045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12845197A Expired - Fee Related JP3878715B2 (ja) 1997-05-19 1997-05-19 発光素子

Country Status (1)

Country Link
JP (1) JP3878715B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4267122B2 (ja) * 1999-02-19 2009-05-27 アバゴ・テクノロジーズ・イーシービーユー・アイピー(シンガポール)プライベート・リミテッド フォトリソグラフィ方法及びフォトリソグラフィを行うための装置構成
US6696223B2 (en) 1999-02-19 2004-02-24 Agilent Technologies, Inc. Method for performing photolithography
US6614056B1 (en) * 1999-12-01 2003-09-02 Cree Lighting Company Scalable led with improved current spreading structures
JP2003110139A (ja) * 2001-09-28 2003-04-11 Sanyo Electric Co Ltd 窒化物系半導体発光素子
JP3906736B2 (ja) * 2002-04-22 2007-04-18 日亜化学工業株式会社 窒化物半導体素子
KR100616693B1 (ko) 2005-08-09 2006-08-28 삼성전기주식회사 질화물 반도체 발광 소자
DE112006002927B4 (de) * 2006-01-09 2010-06-02 Seoul Opto Device Co. Ltd., Ansan Licht emittierende Diode mit ITO-Schicht und Verfahren zur Herstellung einer solchen
JP2007287757A (ja) * 2006-04-12 2007-11-01 Rohm Co Ltd 窒化物半導体発光素子及び窒化物半導体発光素子の製造方法
US9614126B2 (en) 2015-04-27 2017-04-04 Nichia Corporation Light emitting device

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