JPH10303142A5 - - Google Patents

Info

Publication number
JPH10303142A5
JPH10303142A5 JP1997118807A JP11880797A JPH10303142A5 JP H10303142 A5 JPH10303142 A5 JP H10303142A5 JP 1997118807 A JP1997118807 A JP 1997118807A JP 11880797 A JP11880797 A JP 11880797A JP H10303142 A5 JPH10303142 A5 JP H10303142A5
Authority
JP
Japan
Prior art keywords
titanium
film
nitride film
contact hole
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1997118807A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10303142A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11880797A priority Critical patent/JPH10303142A/ja
Priority claimed from JP11880797A external-priority patent/JPH10303142A/ja
Publication of JPH10303142A publication Critical patent/JPH10303142A/ja
Publication of JPH10303142A5 publication Critical patent/JPH10303142A5/ja
Withdrawn legal-status Critical Current

Links

JP11880797A 1997-04-22 1997-04-22 半導体装置及びその作製方法 Withdrawn JPH10303142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11880797A JPH10303142A (ja) 1997-04-22 1997-04-22 半導体装置及びその作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11880797A JPH10303142A (ja) 1997-04-22 1997-04-22 半導体装置及びその作製方法

Publications (2)

Publication Number Publication Date
JPH10303142A JPH10303142A (ja) 1998-11-13
JPH10303142A5 true JPH10303142A5 (cg-RX-API-DMAC7.html) 2005-03-10

Family

ID=14745621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11880797A Withdrawn JPH10303142A (ja) 1997-04-22 1997-04-22 半導体装置及びその作製方法

Country Status (1)

Country Link
JP (1) JPH10303142A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002202527A (ja) * 2000-12-28 2002-07-19 Nec Corp アクティブマトリクス型液晶表示装置
TW200710471A (en) * 2005-07-20 2007-03-16 Samsung Electronics Co Ltd Array substrate for display device
JP4885914B2 (ja) * 2008-07-16 2012-02-29 三菱電機株式会社 表示装置
CN103392198B (zh) * 2011-02-28 2015-11-25 夏普株式会社 电极基板以及具备该电极基板的显示装置和触摸面板

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