JPH10297998A5 - - Google Patents

Info

Publication number
JPH10297998A5
JPH10297998A5 JP1997123085A JP12308597A JPH10297998A5 JP H10297998 A5 JPH10297998 A5 JP H10297998A5 JP 1997123085 A JP1997123085 A JP 1997123085A JP 12308597 A JP12308597 A JP 12308597A JP H10297998 A5 JPH10297998 A5 JP H10297998A5
Authority
JP
Japan
Prior art keywords
silicon carbide
grown
producing
atomic arrangement
antiphase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997123085A
Other languages
English (en)
Japanese (ja)
Other versions
JP3983341B2 (ja
JPH10297998A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP12308597A priority Critical patent/JP3983341B2/ja
Priority claimed from JP12308597A external-priority patent/JP3983341B2/ja
Publication of JPH10297998A publication Critical patent/JPH10297998A/ja
Publication of JPH10297998A5 publication Critical patent/JPH10297998A5/ja
Application granted granted Critical
Publication of JP3983341B2 publication Critical patent/JP3983341B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP12308597A 1997-04-26 1997-04-26 炭化珪素、及び炭化珪素の製造方法 Expired - Fee Related JP3983341B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12308597A JP3983341B2 (ja) 1997-04-26 1997-04-26 炭化珪素、及び炭化珪素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12308597A JP3983341B2 (ja) 1997-04-26 1997-04-26 炭化珪素、及び炭化珪素の製造方法

Publications (3)

Publication Number Publication Date
JPH10297998A JPH10297998A (ja) 1998-11-10
JPH10297998A5 true JPH10297998A5 (enExample) 2005-03-17
JP3983341B2 JP3983341B2 (ja) 2007-09-26

Family

ID=14851843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12308597A Expired - Fee Related JP3983341B2 (ja) 1997-04-26 1997-04-26 炭化珪素、及び炭化珪素の製造方法

Country Status (1)

Country Link
JP (1) JP3983341B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3650727B2 (ja) 2000-08-10 2005-05-25 Ｈｏｙａ株式会社 炭化珪素製造方法
JP6702268B2 (ja) * 2017-06-15 2020-05-27 信越半導体株式会社 エピタキシャルウェーハの製造方法
KR20230021993A (ko) * 2021-08-06 2023-02-14 주성엔지니어링(주) SiC 기판의 제조 방법

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