JPH10277507A - Washing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lessen the intake amount of a hydrocarbon type solvent to a main washing tank by storing a liquid mixture of a hydrocarbon type solvent and hydrofluoroether(HFE) in a pre-washing tank and at the same time forming a HFE vapor layer on the upper side of the liquid surface in a washing apparatus comprising the pre-washing tank and the main washing tank. SOLUTION: In a pre-washing part 1, a pre-washing tank 5 and an evaporation tank 6 are installed in a tank main body 4 having a work entrance and exit 3 in an upper part and an overflow part 7 is formed between both tanks 5, 6 and a mixed liquid C produced by mixing HFE and a hydrocarbon solvent is stored in both tanks 5, 6. A heater 8 as a heating means is installed in the evaporation tank 6 to heat the HFE to its boiling temperature and form a HFE vapor layer D and an ultrasonic vibrator 9 is installed in the pre-washing tank 5. In this pre-washing part 1, a work is immersed in the mixed liquid C in the pre-washing tank and pre-washed and then the hydrocarbon type solvent adhering to the work is washed out with the HFE vapor in the vapor layer D to lower the amount of the solvent to be taken in the main washing part 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning a work using a hydrocarbon solvent such as HC (hydrocarbon).

[0002]

2. Description of the Related Art Conventionally, as a cleaning apparatus of the above-mentioned example, there is an apparatus having a structure as shown in FIG. That is, the main body 101 having a wide opening at the top and set at the work entrance 100.
A first tank 102 (cleaning tank), a second tank 103 (rinse tank), and a third tank 104 (PFC replacement cleaning tank) are formed in the first tank 102. In the first tank 102, for example, HC as a hydrocarbon solvent is used. In addition to storing (hydrocarbon) X, an ultrasonic oscillator 105 and a heater 106 are attached to the bottom of the tank, a fluorine-based solvent Y is stored in the second tank 103, and an ultrasonic oscillator 107 and A heater 108 is attached, a fluorine-based solvent Y is stored in the third tank 104, and an ultrasonic vibrator 109 and a heater 110 are attached to the bottom of the tank.
A vapor layer Z of the fluorinated solvent Y is formed between the liquid surface of the third tank 104 and the cooling jacket 111 disposed on the upper periphery of the third tank 104, and a liquid level shower device is provided at a position corresponding to the liquid surface of the fluorinated solvent Y described above. This is a cleaning device to which a cleaning device 112 is attached.

According to this conventional apparatus, a work (not shown) as an object to be cleaned is first formed of HC (X) in the first tank 102.
And then rinsed, and then immersed in a fluorinated solvent Y in the second tank 103 for rinsing.
The substrate is immersed in a fluorine-based solvent Y of No. 04 and subjected to replacement cleaning.

When the work is moved from the first tank 102 to the second tank 103, the liquid of the HC (X) adhering to the work is drained.
03 and the third tank 104, and thus HC
When (X) is carried into the solution of the fluorine-based solvent Y, the rinsing ability and the replacement cleaning ability of the fluorine-based solvent Y are reduced, and the degree of cleaning of the vapor layer Z is reduced. There was a problem that it could not be secured.

In the third tank 104, a specific gravity difference (for example, when PFC is used as a fluorine-based solvent, the specific gravity = 1.
68, the specific gravity of HC = 0.815)
Although the HC (X) floating on the liquid surface can be discharged and removed to the outside of the tank by the liquid level shower device 112, when the shower flow d is ejected from the liquid level shower device 112,
It is not preferable because a so-called entrainment phenomenon in which HC (X) and the fluorinated solvent Y are mixed occurs.

[0006]

The invention according to claim 1 of the present invention comprises a pre-cleaning tank and a main cleaning tank, wherein the pre-cleaning tank includes a hydrocarbon solvent (HC) and HF.
E (hydro-fluoro-
(Ether) to form a mixture, and a HFE vapor layer is formed on the upper surface of the mixture. By moving the work from the pre-cleaning tank to the main cleaning tank, By removing the attached hydrocarbon solvent with HFE vapor, it is possible to reduce the amount of the hydrocarbon-based solvent brought into the main cleaning tank, as well as to make the flammability of the hydrocarbon solvent non-flammable by HFE. It is an object of the present invention to provide a cleaning device that can be used as a solvent and can be made nonflammable.

[0007] The invention according to claim 2 of the present invention has the object of the invention according to claim 1 and a hydrocarbon solvent and H
The mixing ratio with FE is 20 to 80 vol.
% (Volume percent), it is possible to prevent spots from being formed on the work while ensuring the steam cleaning effect of HFE, and to prevent the hydrocarbon solvent and HFE It is an object of the present invention to provide a cleaning apparatus capable of adjusting the mixing ratio within the above range so as to be able to cope with the type of contamination of metal cleaning.

[0008]

According to a first aspect of the present invention, there is provided a cleaning apparatus having a pre-cleaning tank and a main cleaning tank, wherein the pre-cleaning tank comprises a mixture of a hydrocarbon solvent and HFE. The cleaning device is characterized in that the cleaning device is configured to store a mixed liquid formed as one liquid and form an HFE vapor layer above the liquid surface.

The invention according to claim 2 of the present invention combines the structure of the invention according to claim 1 with a hydrocarbon solvent and H
The mixing ratio with FE is 20 to 80 vol.
%. The cleaning device is set to be within the range of%.

[0010]

According to the first aspect of the present invention, a work is pre-cleaned in a mixed liquid formed by mixing a hydrocarbon solvent and HFE into one liquid, and the work is mixed. By performing steam cleaning with the HFE vapor layer formed above the liquid surface of the liquid, the hydrocarbon solvent adhering to the work can be removed as much as possible, so that the amount of the hydrocarbon solvent brought into the main cleaning tank can be reduced. There is an effect that reduction can be achieved. In addition, the need for mixing the hydrocarbon-based solvent and HFE in the pre-cleaning tank is eliminated, and the flammability of the hydrocarbon solvent is changed to a non-flammable solvent by HFE, thereby making it possible to achieve non-combustibility. There is.

According to the second aspect of the present invention,
In addition to the effect of the first aspect of the present invention, the mixing ratio of the hydrocarbon solvent and HFE is adjusted so that the hydrocarbon solvent is
0 vol%, it is possible to prevent spots from being formed on the work while securing the effect of steam cleaning by HFE.
By adjusting the mixing ratio with FE within the above range, there is an effect that it is possible to correspond to the stain type of metal cleaning.

That is, the mixing ratio of the hydrocarbon solvent is 80
If it exceeds vol%, the HFE becomes so small that steam cleaning becomes impossible and it becomes difficult to make the fuel incombustible by HFE. Conversely, the mixing ratio of hydrocarbon solvent is 20vol
%, When the work is moved from the pre-cleaning tank to the main cleaning tank, a thin film of a hydrocarbon-based solvent that should be formed for rust prevention is not formed on the surface of the work. By passing, spots are formed on the work.

In order to solve such a problem, the value is set within the above range. In addition, the mixing ratio of the hydrocarbon-based solvent and HFE within the above range is set to 56 vol%: 44 vol
When it is specified as%, it is particularly effective for metal cleaning (cleaning of metal work).

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawing shows a cleaning apparatus for cleaning a work using a solvent. In FIG. 1, the cleaning apparatus includes a pre-cleaning section 1 and a main cleaning section 2.

The above-mentioned pre-cleaning section 1 has a work entrance 3
A pre-cleaning tank 5 (first cleaning tank) and a distillation tank 6 as a sub-tank (pool tank) are formed in a tank body 4 provided with the above. An overflow section 7 is formed between the tanks 5 and 6. . In addition, HFE (abbreviation for hydro-fluoro-ether, one of fluorine-based solvents) is contained in both of the tanks 5 and 6 described above.
(A) and a hydrocarbon-based solvent (for example, HC) B are mixed to form a mixed liquid C, which is stored as one liquid. In other words, the flammability of the hydrocarbon solvent is reduced by HFE
In (A), a non-combustible solvent is used to make it non-combustible.

In the above-mentioned distillation tank 6, HF of the mixed solution C
E (A) Heat to its boiling point (60 ° C.)
The heater 8 is attached as a heating means for forming.
While the ultrasonic vibrator 9 is arranged in the pre-cleaning tank 5 described above,
Between the distillation tank 6 and the pre-wash tank 5, a liquid sending means 13 including a pump 10, a filter 11, a heat exchanger 12, etc. is provided, and the pump 10 sends the mixed solution C in the distillation tank 6. The filter 11 is configured to liquefy and filter particulate dust.

A cooling jacket 14 and a cooling coil 15 are attached to the outer periphery of the work entrance 3 to
The solvent is recovered by cooling in order to prevent the vapor from scattering. Here, the cooling jacket 1 described above is used.
Either the cooling coil 15 or the cooling coil 15 can be selected in accordance with the size of the pre-cleaning tank 5 to suppress the size of the apparatus.

The above-mentioned cooling jacket 14 is constructed so that one or more coils thereof are immersed in the regenerating solution a, thereby increasing the cooling area with the cooling jacket coil area and the solvent, and the fluctuation of the cooling pipe surface temperature. Even if it occurs, it is configured to ensure a certain cooling effect by cooling the solvent. The above-described heat exchanger 12, cooling jacket 14, and cooling coil 15 are connected to a refrigerating device such as a refrigerator 16 or a water cooler capable of low-temperature cooling.

The pre-cleaning section 1 immerses the work in the mixed liquid C of the pre-cleaning tank 5, pre-cleans the work with the mixed liquid C (ultrasonic cleaning), and cleans the work pulled up from the liquid with steam. The hydrocarbon solvent B attached to the work is vapor-cleaned with the HFE vapor positioned on the layer D, and the amount of the solvent B carried into the main cleaning section 2 is reduced. However, a thin film of the hydrocarbon solvent B is formed on the surface of the work. Here, the mixing ratio of the mixed solution C in the pre-cleaning tank 5 is set so that the hydrocarbon-based solvent B is in the range of 20 to 80 vol%.

That is, when the mixing ratio of the hydrocarbon solvent B is 8
If it exceeds 0 vol%, HFE (A) becomes too small to make steam cleaning impossible, and it becomes difficult to make the fuel incombustible by HFE (A). Conversely, when the mixing ratio of the hydrocarbon solvent B is less than 20 vol%, the work is removed from the pre-cleaning tank 5.
When moving to the main cleaning section 2, a thin film of the hydrocarbon-based solvent B, which should originally be formed for rust prevention, is not formed on the surface of the work, and the work passes through the contaminated steam, thereby causing spots on the work. It is formed.

In order to solve such a problem, it is set within the above range. In this example, the mixing ratio of the hydrocarbon solvent B and HFE (A) in the above range was
56 vol%: 44 vol%, in particular, it is configured to exhibit an excellent effect on metal cleaning (cleaning of metal work).

As the above-mentioned HFE (A), for example, HFE7100 (trade name) manufactured by Sumitomo 3M Ltd. is used, and as the above-mentioned hydrocarbon-based solvent B, for example, NS100 (trade name) or NS200 (trade name) manufactured by Nikko Petrochemical Co., Ltd. ) Or HC250 (trade name) manufactured by Toso Co., Ltd., and the physical properties of these solvents are listed below.

Physical properties of HFE 7100 Chemical formula: C ₄ F ₉ OCH ₃ boiling point: 60 ° C. Surface tension: 13.6 dynes / cm Specific heat: 0.28 cal / g / ° C. Flash point: None Density: 1 .52g / ml VOC None ODP 0 Physical properties of NS100 Density (15 ° C) 0.734 Molecular weight 142.3 Boiling point 169-173 ° C SP value 7.7 KB value 19 Flash point: 53 ° C. Ignition point: 218 ° C. Physical properties of NS200 Density (15 ° C.): 0.745 Molecular weight: 158.4 Boiling point: 189 to 211 ° C. SP value: 7.8 KB value: 14 Flash point: 70 ° C Ignition point: 212 ° C Physical properties of H250 Main component: Paraffin hydrocarbon Boiling point: 172 ° C Specific gravity: 0.729 Surface tension: 24 dyn / cm (20 ° C) Specific heat: 0.55 cal / g / ° C Flash point: 53 ° C Flash point: 218 ° C The hydrocarbon solvent B and HFE (A) are dissolved in a large amount as the temperature rises and become completely mixed, while they have the property of separating when cooled, so that they can be mixed with HFE in addition to the exemplified solvents. Alternatively, another solvent which is mixed and dissolved at an increased temperature and separated by cooling may be used.

On the other hand, the above-mentioned main cleaning section 2 is configured as follows. That is, the main cleaning unit 2 includes a distillation tank 19, a separator separation tank 20, a boiling tank 21 (second cleaning tank), an ultrasonic tank 22, (Third washing tank), steam tank 2
3. A water separation tank 24 is formed.

A cooling jacket 25 connected to the refrigerator 16 is provided on the outer periphery of the opening 17, and the cooling jacket 25 is constructed so that one or more coils thereof are immersed in the regenerating solution a. Thus, the cooling area is increased by the cooling jacket coil area and the solvent, and the solvent is cooled even if the surface temperature of the cooling pipe fluctuates, so that a constant cooling effect is ensured.

The cooling coil 2 is provided between the cooling area 26 in front of the opening 17 (right side in the figure) and the liquid in the water separation tank 24.
7 and 28 are disposed, and these coils 27 and 28 are connected to the refrigerator 16 described above. Here, the cooling coil is set to 10
In order to cool the cooling jacket to 15 ° C. or lower, the above-mentioned cooling temperature can be achieved by using a medium-low temperature type as the refrigerator 16, and the refrigeration capacity is assisted by a chiller or a blusher. You may. Of the boiling tank 21 and the ultrasonic tank 22 constituting the main cleaning tank, the boiling tank 21 is configured as follows.

That is, the boiling tank 21 contains HFE (A)
Is stored as a single unit, and a heater 29 as a heating means for heating the HFE (A) is attached to heat the HFE (A) to 60 ° C. as its boiling point.

In the boiling tank 21, the pre-cleaned work is fully cleaned, the remaining hydrocarbon-based solvent B in the mixed liquid C adhered to the work is completely washed out, and brought into the ultrasonic bath 22. Prevent completely. Further, when dirt contained in the hydrocarbon-based solvent B in the mixed solution C adhered to the work is brought into the boiling tank 21, the separator separation tank 2
The solution is sent to the distillation tank 19 via an overflow (overflow), and the solvent concentration in the boiling tank 21 is kept constant.

The separator separation tank 20 interposed between the boiling tank 21 and the distillation tank 19 has a partition plate 30 and a cooling coil 31, and the HFE (A) is cooled by the cooling coil 31 (at 55 ° C.). HFE by cooling)
(A) and the dirt-containing hydrocarbon solvent B are separated by utilizing the characteristics of each solvent by giving a temperature difference, and the separated HFE (A) and the dirt-containing hydrocarbon solvent B are separated. Are sent to the distillation tank 19 (overflow).

The distillation tank 19 adjacent to the boiling tank 21 serving as the main cleaning tank via the separator separation tank 20 is provided with a heater 32 to regenerate the solvent by distillation. Regenerated liquid a
After being cooled and regenerated in the cooling jacket 25, it is sent to the steam tank 23 and the ultrasonic tank 22 via the return paths 33 and 34. Here, an electromagnetic on-off valve (not shown) is interposed in the return path 33 described above.

The above-mentioned ultrasonic bath 22 contains HF inside.
E (A) alone is stored, and an ultrasonic vibrator 35 and a heater 36 (heating means) are provided. The HFE (A) is maintained at a temperature of 30 to 45 ° C. by the above-described heater 36, and the work is finish-cleaned under the temperature condition at which the ultrasonic effect is most obtained.

Since the solvent after cooling and water separation in the water separation tank 24 having the cooling coil 28 is refluxed in the ultrasonic tank 22, the liquid temperature in the tank 22 is kept constant (35 ° C. or lower). To prevent the liquid temperature from rising. That is, it is possible to prevent the liquid temperature of the ultrasonic bath 22 from being overheated by the HFE (A) vapor heated in the boiling bath 21, the distillation bath 19 and the vapor layer 23.

Further, a circulating means 40 having a pump 37, a filter 38, a heat exchanger 39 and the like is attached to the above-mentioned ultrasonic bath 22, and the HFE in the ultrasonic bath 22 is
(A) is configured to be circulated. Here, while the above-mentioned heat exchanger 39 is connected to the refrigerator 16, the pump 37,
PTFE (tetrafluoroethylene resin) is used for the seal portion 10 to improve the solvent resistance.

On the other hand, the above-described steam tank 23 is provided with a heater 41 (heating means), and reheats the regenerated HFE (A) liquid after liquefaction and recirculation, which is refluxed from the return path 33, to produce a hydrocarbon solvent or the like. A clean steam containing no oil is generated to form a steam layer E, and finish washing is performed by steam washing. Here, H
Since FE (Hydro Fluoro Ether) (A) is used, HFE (A) in the steam tank 23 is heated to 60 ° C. (boiling point), and a temperature difference close to 30 ° C. between the liquid temperature of the ultrasonic tank 22 and the HFE (A) is reduced. Put on.

The above-mentioned water separation tank 24 is provided with a cooling coil 28 and a partition plate 42, and stores a solvent cooled by the cooling jacket 25 and a liquid obtained by cooling and regenerating the vapor of the vapor layer E by the cooling coil 28. Of water and HFE (A). The HFE (A) collected in the water separation tank 24 is forcibly cooled to 0 ° C. to 35 ° C. by the cooling coil 28, and the regenerated and separated HFE (A) is returned to the ultrasonic tank 2 via the return path 34.
2 to maintain the temperature and cleanliness of the ultrasonic bath 22.

Also, by controlling the liquid level in the steam tank 23, the regenerated liquid is supplied to the steam tank 2 by an electromagnetic on-off valve (not shown) in the return path 33.
3 to generate clean steam having a high degree of cleanliness (see the steam layer E). The operation of the illustrated embodiment will be described below with the configuration as described above.

To clean the work, the work is first immersed in a mixed solution C of HFE (A) and a hydrocarbon solvent B in the pre-cleaning tank 5 of the pre-cleaning section 1 to perform pre-cleaning. The work after pre-cleaning is pulled up to the HFE vapor layer D, where H
The hydrocarbon solvent B adhering to the work is vapor-cleaned with FE (A) vapor (however, H having a rust-preventive effect on the work surface)
A thin film of C is left so that the work does not pass through the contaminated steam), and the hydrocarbon-based solvent B is reduced from being carried into the main cleaning section 2.

The work, which has been subjected to the pre-cleaning and the steam cleaning in this manner, is transported to the main cleaning section 2, and the work is first immersed in HFE (A) of the boiling tank 21, and the hydrocarbon-based material adhering to the work is removed. The residue of the solvent B is completely washed away, and the carry-in to the next ultrasonic bath 22 is completely prevented.

Next, the work is pulled up from the boiling tank 21 to a vapor layer E (a vapor layer of clean HFE), and the work is subjected to steam cleaning with clean steam. ) And finish-cleaning using ultrasonic energy.

The work after the finish cleaning is subjected to steam cleaning in the steam layer E immediately above the workpiece and in the steam layer E immediately above the steam tank 23. The work that has undergone a series of cleaning operations in this manner is taken out of the work entrance / exit opening 17 and transported to the next process.

In short, according to the cleaning apparatus of this embodiment, the work is pre-cleaned in a mixed liquid C formed by mixing the hydrocarbon solvent B and the HFE (A) into one liquid. HFE vapor layer D formed above liquid level of mixed liquid C
When the steam cleaning is performed, the hydrocarbon solvent B adhering to the work can be removed as much as possible, so the amount of the hydrocarbon solvent B carried into the main cleaning tank (see the boiling tank 21 and the ultrasonic tank 22). This has the effect of reducing the number of pixels. In addition, it is not necessary to mix the hydrocarbon solvent B and the HFE (A) in the pre-cleaning tank 5, and the flammability of the hydrocarbon solvent B is changed to the non-flammable solvent in the HFE (A). This has the effect of making it non-combustible.

In addition, since the mixing ratio between the hydrocarbon solvent B and the HFE (A) is set so that the hydrocarbon solvent B is in the range of 20 to 80 vol%, the effect of the steam cleaning by the HFE (A) is reduced. It is possible to prevent spots from being formed on the work while securing the hydrocarbon solvent B and HFE.
By adjusting the mixing ratio with (A) within the above range, there is an effect that it is possible to correspond to the stain type of metal cleaning.

That is, when the mixing ratio of the hydrocarbon solvent B is 80
If it exceeds vol%, the HFE (A) becomes too small to make steam cleaning impossible, and it becomes difficult to make the fuel incombustible by HFE (A). Conversely, when the mixing ratio of the hydrocarbon solvent B is less than 20 vol%, when the workpiece is moved from the pre-cleaning tank 5 to the main cleaning section 2, the hydrocarbon solvent B that should be formed on the surface of the workpiece for rust prevention originally. No thin film is formed, and spots are formed on the work as the work passes through the contaminated vapor.

In order to solve such a problem, the value is set within the above range. Further, the mixing ratio of the hydrocarbon solvent B and HFE (A) in the above range was set to 56 vol%: 4
When it is specified to be 4 vol%, an excellent effect is exhibited especially for metal cleaning (cleaning of a metal work).

As described above, the hydrocarbon solvent B and the HFE (A) have a property that when the temperature rises, the amount of dissolution increases and a complete mixing state occurs, while they have the property of being separated from each other when cooled. When cooled and separated, the separated hydrocarbon is contaminated with dirt, so that it is subjected to industrial waste treatment, and the remaining HFE (A) can be used in the distillation tank 19, or the dirt of hydrocarbon is extremely reduced. In many cases, hydrocarbons and HFE can be separated by a waste liquid recovery machine (not shown), and the separated HFE can be used as a solvent for the main washing section 2.

As shown in the embodiment, the main cleaning section 2 storing the HFE (A) and the steam tank 23 for forming a clean HFE vapor layer E are provided above the liquid level of the HFE (A). Thus, there is an effect that the work is steam-cleaned with clean steam and sufficient cleaning quality of the work can be secured.

Further, the solvent vapor is regenerated and liquefied by cooling means (see cooling jacket 25 and cooling coil 27) provided around the opening of the main washing section 2, and the regenerated liquid after water separation is transferred to the ultrasonic bath 22. With the configuration for reflux, there is an effect that the cleanliness of the ultrasonic bath 22 can be maintained and the liquid temperature of the ultrasonic bath 22 can be prevented from rising.

Further, a separation tank (separator separation tank 20) is provided between the boiling tank 21 and the distillation tank 19 constituting the main washing tank.
Is provided, there is an effect that by cooling the liquid in the tank 20, the HFE (A) and the hydrocarbon solvent B containing dirt can be separated by a temperature difference.

The above-described steam tank 23 is connected to the tank body 18.
Between the tanks 23 and 21 or between the tanks 23 and 21 so that the clean steam formed in the steam tank 23 is formed above the tanks 21 and 22. , 22 opening (not shown)
It is also possible to reduce the solvent loss by reducing the area of the opening 17 and to reduce the size and size of the entire apparatus.

In correspondence between the structure of the present invention and the above-described embodiment, the present cleaning tank of the present invention is different from the boiling tank 21 of the embodiment.
The present invention is not limited only to the configuration of the above-described embodiment, although it corresponds to at least one of the ultrasonic bath 22 and the ultrasonic bath 22. For example, the number of tanks (the number of tanks) of the pre-cleaning tank 5 and the tanks 21 and 22 constituting the main cleaning tank is not limited to those in the illustrated embodiment.

[Brief description of the drawings]

FIG. 1 is a system diagram showing a cleaning device of the present invention.

FIG. 2 is a sectional view showing a conventional cleaning device.

[Explanation of symbols]

 5: Pre-cleaning tank 21: Boiling tank (main cleaning tank) 22: Ultrasonic tank (main cleaning tank) C: Mixed solution D: HFE vapor layer

Claims (2)

[Claims] 1. A cleaning apparatus comprising a pre-cleaning tank and a main cleaning tank, wherein the pre-cleaning tank stores a mixed solution formed by mixing a hydrocarbon solvent and HFE to form one liquid. A cleaning device with an HFE vapor layer formed above the liquid level. 2. The mixing ratio of a hydrocarbon solvent and HFE is as follows:
2. The cleaning apparatus according to claim 1, wherein the amount of the hydrocarbon solvent is set within a range of 20 to 80 vol%.