JPH10249291A - Washing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove effectively a second solvent stuck to a work when the work is transferred from a washing tank to a principal washing tank by a method wherein a vapor layer of a first solvent is formed to an upper part on a liquid surface of the washing tank in which mixed solution of the first solvent (HFC or the like) and the second solvent (hydrocarbon solvent or the like) is reserved. SOLUTION: In order to wash a work, at first the work is dipped in mixed solution C in a pre-washing tank 5 of a pre-washing part 1 to execute prewashing. Then, the work is pulled up to a vapor layer D, a second solvent B stuck to the work is washed with vapor of a first solvent A, and bringing into a principal washing part 2 of a second solvent B is reduced. Then, the work is conveyed to the principal washing part 2, at first dipped into a first solvent A in a boiling tank 21, and a remaining excess content of the second solvent stuck to the work is thoroughly washed out. Thereafter, the work is pulled up into a vapor layer E from the boiling tank 21, and the work is washed with clean vapor. Thereafter, it is dipped into the first solvent A of an ultrasonic tank 22 to execute finish washing by use of ultrasonic energy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning a workpiece with a hydrocarbon solvent such as HC (hydrocarbon) or an alcohol or both solvents.

[0002]

2. Description of the Related Art Conventionally, as a cleaning apparatus of the above-mentioned example, there is an apparatus having a configuration as shown in FIG. That is, the main body 101 having a wide opening at the top and set at the work entrance 100.
A first tank 102 (cleaning tank), a second tank 103 (rinse tank), and a third tank 104 (PFC replacement cleaning tank) are formed in the first tank 102. In the first tank 102, for example, HC as a hydrocarbon solvent is used. In addition to storing (hydrocarbon) X, an ultrasonic oscillator 105 and a heater 106 are attached to the bottom of the tank, a fluorine-based solvent Y is stored in the second tank 103, and an ultrasonic oscillator 107 and A heater 108 is attached, a fluorine-based solvent Y is stored in the third tank 104, and an ultrasonic vibrator 109 and a heater 110 are attached to the bottom of the tank.
A vapor layer Z of the fluorinated solvent Y is formed between the liquid surface of the third tank 104 and the cooling jacket 111 disposed on the upper periphery of the third tank 104, and a liquid level shower device is provided at a position corresponding to the liquid surface of the fluorinated solvent Y described above. This is a cleaning device to which a cleaning device 112 is attached.

According to this conventional apparatus, a work (not shown) as an object to be cleaned is first formed of HC (X) in the first tank 102.
And then rinsed, and then immersed in a fluorinated solvent Y in the second tank 103 for rinsing.
The substrate is immersed in a fluorine-based solvent Y of No. 04 and subjected to replacement cleaning.

When the work is moved from the first tank 102 to the second tank 103, the liquid of the HC (X) adhering to the work is drained.
03 and the third tank 104, and thus HC
When (X) is carried into the solution of the fluorine-based solvent Y, the rinsing ability and the replacement cleaning ability of the fluorine-based solvent Y are reduced, and the degree of cleaning of the vapor layer Z is reduced. There was a problem that it could not be secured.

In the third tank 104, a specific gravity difference (for example, when PFC is used as a fluorine-based solvent, the specific gravity = 1.
68, the specific gravity of HC = 0.815)
Although the HC (X) floating on the liquid surface can be discharged and removed to the outside of the tank by the liquid level shower device 112, when the shower flow d is ejected from the liquid level shower device 112,
It is not preferable because a so-called entrainment phenomenon in which HC (X) and the fluorinated solvent Y are mixed occurs.

[0006]

The invention according to claim 1 of the present invention comprises a first solvent (HFC, HFE or a fluorine-based solvent) and a second solvent (hydrocarbon-based solvent or alcohol or both solvents). A vapor layer of the first solvent is formed above the liquid surface of the pre-cleaning tank in which the second solvent is mixed and stored, and when the work is moved from the pre-cleaning tank to the main cleaning tank, the second solvent adhering to the work surface is removed by the first solvent. It is possible to reduce the amount of the second solvent brought into the main cleaning tank by removing the solvent with the vapor of the solvent, and of course, the main cleaning tank in which the first solvent is stored and the second solvent are provided above the liquid level of the first solvent. An object of the present invention is to provide a cleaning apparatus that is provided with a steam tank that forms a vapor layer of one solvent, performs steam cleaning of a workpiece with clean steam, and can ensure sufficient cleaning quality of the workpiece.

According to a second aspect of the present invention, in addition to the object of the first aspect of the present invention, the above-mentioned steam tank is provided on a side of a boiling tank or an ultrasonic tank which constitutes a main cleaning tank. Accordingly, it is an object of the present invention to provide a cleaning apparatus capable of reducing the area of an opening for a work entrance having a top opening structure of a main cleaning tank to reduce solvent consumption per unit time.

According to a third aspect of the present invention, in addition to the object of the first or second aspect, the solvent vapor is regenerated and liquefied by cooling means provided around the opening of the main cleaning tank. In addition, an object of the present invention is to provide a cleaning apparatus capable of maintaining the cleanliness of an ultrasonic tank and preventing a rise in liquid temperature of the tank by refluxing a regenerated liquid after water separation to an ultrasonic tank.

According to a fourth aspect of the present invention, in addition to the object of the first aspect of the present invention, a distillation tank is provided adjacent to the main cleaning tank, and a cooling means and a liquid receiving part are provided above the distillation tank. By providing and condensing and regenerating the distilled solvent,
It is an object of the present invention to provide a cleaning device capable of performing mist separation in steam by condensation regeneration.

According to a fifth aspect of the present invention, in addition to the object of the fourth aspect, a separation tank is provided between the main washing tank and the distillation tank to contain the first solvent and dirt. It is an object of the present invention to provide a cleaning apparatus capable of separating a second solvent from a second solvent by a temperature difference.

[0011]

According to the first aspect of the present invention, a first solvent such as HFC, HFE, or a fluorine-based solvent is mixed with a hydrocarbon-based solvent or an alcohol or both of the second solvents. A pre-cleaning section in which a vapor layer of the first solvent is formed above the liquid level of the pre-cleaning tank, a main cleaning tank storing the first solvent, and a vapor of the first solvent being disposed above the liquid level of the main cleaning tank. The cleaning device includes a steam tank for forming a layer.

According to a second aspect of the present invention, in addition to the configuration of the first aspect, the steam tank is provided on a side of a boiling tank or an ultrasonic tank which constitutes a main cleaning tank. It is a cleaning device.

According to a third aspect of the present invention, in addition to the configuration of the first or second aspect of the present invention, a cooling means is provided around an opening of the main cleaning tank having an open upper surface. The cleaning device is characterized in that the regenerating solution liquefied in the above is separated into water and then returned to the ultrasonic bath.

According to a fourth aspect of the present invention, in addition to the configuration of the first aspect of the present invention, a distillation tank is provided adjacent to the main cleaning apparatus, and a cooling means and a liquid receiving unit are provided above the distillation tank. And a washing apparatus for condensing and regenerating the distilled solvent.

According to a fifth aspect of the present invention, in addition to the structure of the fourth aspect of the present invention, a first solvent and a second solvent containing dirt are provided between the main cleaning tank and the distillation tank. The cleaning device is provided with a separation tank for separating a solvent from a solvent by a temperature difference.

[0016]

According to the first aspect of the present invention, a first solvent (such as HFC, HFE or fluorine-based solvent) and a second solvent (hydrocarbon-based solvent or alcohol or both solvents) are used. A vapor layer of the first solvent was formed above the liquid surface of the pre-cleaning tank in which the mixture was stored, so that when the work was moved from the pre-cleaning tank to the main cleaning tank, the second solvent adhering to the work surface was removed. Removed with one solvent vapor (steam cleaning)
As a result, the amount of the second solvent brought into the main cleaning tank can be reduced. In addition, since the main cleaning tank storing the first solvent and the vapor tank for forming the vapor layer of the first solvent above the liquid surface of the first solvent are provided, the workpiece is subjected to steam cleaning with clean steam, and This has the effect that sufficient cleaning quality can be ensured.

According to the invention described in claim 2 of the present invention,
In addition to the effect of the invention according to claim 1, the above-described steam tank is provided on the side of the boiling tank or the ultrasonic tank that constitutes the main cleaning tank, so that it is used for the entrance of the work having the upper surface open structure of the main cleaning tank. There is an effect that the area of the opening can be reduced to reduce the amount of solvent consumed per unit time.

According to the invention described in claim 3 of the present invention,
In addition to the effect of the first or second aspect of the present invention, the solvent vapor is regenerated and liquefied by cooling means provided around the opening of the main cleaning tank, and the regenerated liquid after water separation is returned to the ultrasonic tank. Therefore, there is an effect that the cleanliness of the ultrasonic bath can be maintained and the liquid temperature of the ultrasonic bath can be prevented from rising.

According to the invention described in claim 4 of the present invention,
In addition to the effect of the first aspect of the present invention, a distillation tank is provided adjacent to the main cleaning tank, and a cooling means and a liquid receiving portion are provided above the distillation tank to condense and regenerate the distilled solvent. With such a configuration, there is an effect that the mist in the steam can be separated by the condensation regeneration.

According to the invention described in claim 5 of the present invention,
In addition to the effect of the fourth aspect of the present invention, since a separation tank is provided between the main cleaning tank and the distillation tank, when the liquid in the separation tank is cooled, the first solvent and the dirt containing dirt are removed. There is an effect that the two solvents can be separated by a temperature difference.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawing shows a cleaning apparatus for cleaning a work using a solvent. In FIG. 1, the cleaning apparatus includes a pre-cleaning section 1 and a main cleaning section 2.

The above-mentioned pre-cleaning section 1 has a work entrance 3
A pre-cleaning tank 5 (first cleaning tank) and a distillation tank 6 as a sub-tank (pool tank) are formed in a tank body 4 provided with the above. An overflow section 7 is formed between the tanks 5 and 6. . In the tanks 5 and 6 described above, a first solvent A such as HFC, HFE or a fluorine-based solvent, and a second solvent A such as a hydrocarbon-based solvent (eg, HC) or an alcohol or both.
The mixed solution C with the solvent B is stored.

In the above-described distillation tank 6, the first liquid C
A heater 8 is attached as heating means for heating the solvent A to its boiling point (60 ° C. when HFE is used as the first solvent A) to form a vapor layer D of the first solvent A. While the ultrasonic vibrator 9 is disposed in the above-described pre-cleaning tank 5, a pump 10 and a filter 1 are provided between the distillation tank 6 and the pre-cleaning tank 5.
1. A liquid sending means 13 provided with a heat exchanger 12 and the like is provided,
The structure is such that the mixed liquid C in the distillation tank 6 is sent by the pump 10 and the particulate dust is filtered by the filter 11.

A cooling jacket 14 and a cooling coil 15 are attached to the outer periphery of the work entrance 3 so as to recover the solvent by cooling to prevent the scattering. Here, one of the cooling jacket 14 and the cooling coil 15 can be selected according to the size of the pre-cleaning tank 5 to suppress the size of the apparatus.

The above-mentioned cooling jacket 14 is constructed so that one or more coils thereof are immersed in the regenerating solution a, thereby increasing the cooling area with the cooling jacket coil area and the solvent, and the fluctuation of the cooling pipe surface temperature. Even if it occurs, it is configured to ensure a certain cooling effect by cooling the solvent. The above-described heat exchanger 12, cooling jacket 14, and cooling coil 15 are connected to a refrigerating device such as a refrigerator 16 or a water cooler capable of low-temperature cooling.

In the pre-cleaning section 1, the work is immersed in the mixed solution C of the pre-cleaning tank 5, the work is pre-cleaned (ultrasonic cleaning) with the mixed solution C in an emulsion state, and the work is pulled up from the liquid. The work is positioned in the vapor layer D, and the second solvent B attached to the work is vapor-cleaned with the vapor of the first solvent A, so that the amount of the second solvent B brought into the main cleaning section 2 is reduced.

On the other hand, the above-mentioned main cleaning section 2 is configured as follows. That is, the main cleaning unit 2 includes a distillation tank 19, a separator separation tank 20, a boiling tank 21 (second cleaning tank), an ultrasonic tank 22, (Third washing tank), steam tank 2
3. A water separation tank 24 is formed.

A cooling jacket 25 connected to the refrigerator 16 is provided on the outer periphery of the opening 17, and the cooling jacket 25 is configured so that one or more coils thereof are immersed in the regenerating solution a. Thus, the cooling area is increased by the cooling jacket coil area and the solvent, and the solvent is cooled even if the surface temperature of the cooling pipe fluctuates, so that a constant cooling effect is ensured.

The cooling coil 2 is provided between the cooling area 26 in front of the opening 17 (right side in the figure) and the liquid in the water separation tank 24.
7 and 28 are disposed, and these coils 27 and 28 are connected to the refrigerator 16 described above. Here, the cooling coil is set to 10
In order to cool the cooling jacket to 15 ° C. or lower, the above-mentioned cooling temperature can be achieved by using a medium-low temperature type as the refrigerator 16, and the refrigeration capacity is assisted by a chiller or a blusher. You may. Of the boiling tank 21 and the ultrasonic tank 22 constituting the main cleaning tank, the boiling tank 21 is configured as follows.

That is, the first solvent A is stored in the boiling tank 21 alone, and a heater 29 as a heating means for heating the first solvent A is attached. When (fluoroether) is used, the solvent is heated to 60 ° C. as its boiling point.

The boiling tank 21 is used for main cleaning of the pre-cleaned work, and the second solvent B in the mixed liquid C adhered to the work.
Is completely washed away, and carry-in to the ultrasonic bath 22 is completely prevented. Further, when dirt contained in the second solvent B of the mixed liquid C adhered to the work is brought into the boiling tank 21, the dirt is sent to the distillation tank 19 via the separator separation tank 20 (overflow). The solvent concentration in the boiling tank 21 is kept constant.

The separator separation tank 20 interposed between the boiling tank 21 and the distillation tank 19 has a partition plate 30 and a cooling coil 31, and the first solvent A is cooled by the cooling coil 31 (the first solvent A). When HFE is used as the solvent A, the temperature of the first solvent A and the second solvent B containing dirt are reduced by cooling to 55 ° C. or lower, and the characteristics of each solvent are utilized. The separated first solvent A and the second solvent B containing dirt are sent to the distillation tank 19 (overflow).

The distillation tank 19 provided adjacent to the boiling tank 21 as the main cleaning tank via the separator separation tank 20 is provided with a heater 32 for regenerating the solvent by distillation. Regenerated liquid a
After being cooled and regenerated in the cooling jacket 25, it is sent into the vapor layer 23 and the ultrasonic tank 22 via the return paths 33 and 34. Here, an electromagnetic on-off valve (not shown) is interposed in the return path 33 described above.

The above-described ultrasonic bath 22 has a first
An ultrasonic vibrator 35 and a heater 36 (heating means) are provided while storing the solvent A alone. The above heater 3
In step 6, the first solvent A (for example, using HFE) is changed to 30 to 45.
The temperature is maintained at ° C., and the work is finish-cleaned under the temperature condition at which the ultrasonic effect is most obtained.

Since the solvent after cooling and water separation in the water separation tank 24 having the cooling coil 28 is refluxed in the ultrasonic tank 22, the liquid temperature in the tank 22 is kept constant (35 ° C. or lower). To prevent the liquid temperature from rising. That is, the liquid temperature of the ultrasonic bath 22 is prevented from being overheated by the vapor of the first solvent A heated in the boiling bath 21, the distillation bath 19, and the steam bath 23.

Further, a circulation means 40 having a pump 37, a filter 38, a heat exchanger 39 and the like is attached to the above-mentioned ultrasonic bath 22, and the first solvent A in the ultrasonic bath 22 is pumped by the pump 37. It is configured to circulate. Here, the above-described heat exchanger 39 is connected to the refrigerator 16 while the pumps 37 and 1 are connected.
PTFE (tetrafluoroethylene resin) in the seal part of 0
Is used to improve the solvent resistance.

On the other hand, the above-mentioned steam tank 23 is provided with a heater 41 (heating means), and reheats the regenerated liquid of the first solvent A after liquefaction and recirculation, which is refluxed from the return path 33, so that a hydrocarbon solvent or the like A clean steam containing no oil is generated to form a steam layer E, and finish washing is performed by steam washing. HF as the first solvent A
When E (hydro-fluoro-ether) is used, the first solvent in the steam tank 23 is heated to 60 ° C. (boiling point), and a temperature difference of about 30 ° C. is made between the first solvent and the liquid temperature in the ultrasonic tank 22.

The above-mentioned water separation tank 24 is provided with a cooling coil 28 and a partition plate 42, and stores a solvent cooled by the cooling jacket 25 and a liquid obtained by cooling and regenerating the vapor of the vapor layer E by the cooling coil 28. The water and the first solvent A are separated. The solvent A accumulated in the water separation tank 24 is forcibly cooled to 0 ° C. to 35 ° C. by the cooling coil 28, and the regenerated and separated solvent A
Is sent to the ultrasonic bath 22 via the return path 34 to maintain the temperature of the ultrasonic bath 22 and maintain the cleanliness thereof.

Also, by controlling the liquid level in the steam tank 23, the regenerated liquid is supplied to the steam tank 2 by an electromagnetic on-off valve (not shown) in the return path 33.
3 Cleanly supplied steam with high cleanliness (see Steam layer E)
Is configured to occur. For example, HFE (hydro-fluoro-ether) is used as the first solvent A and HC (hydrocarbon) is used as the second solvent B, and their physical properties are listed below.

Physical properties of HFE Chemical formula: C ₄ F ₉ OCH ₃ Boiling point: 60 ° C. Surface tension: 13.6 dynes / cm Specific heat: 0.28 cal / g / ° C. Flash point: None Density: 1.52 g / ml VOC: None Property of HC Specific gravity: 0.816 Boiling point: 100 ° C or higher Aniline point: 67 ° C Pour point: -60 ° C or lower The example is configured as described above and the operation will be described below.

In order to clean the work, the work is first immersed in the mixed solution c in the pre-cleaning tank 5 of the pre-cleaning section 1 and
Pre-clean. The work after pre-cleaning is pulled up to the vapor layer C, where the second solvent A adhered to the work with the vapor of the first solvent A.
The solvent B is subjected to steam cleaning to reduce the second solvent B from being carried into the main cleaning section 2.

The work which has been subjected to the pre-cleaning and the steam cleaning as described above is conveyed to the main cleaning section 2, and the work is first immersed in the first solvent A of the boiling tank 21 so that the second solvent adhered to the work is removed. Completely wash the residue of B, and use the next ultrasonic bath 2
2 is completely prevented.

Next, the work is pulled up from the boiling tank 21 to the vapor layer E, and the work is steam-cleaned with clean steam. Then, the above-mentioned work is immersed in the first solvent A of the ultrasonic bath 22, Finish cleaning using sonic energy. The work after the finish cleaning is subjected to steam cleaning in the vapor layer E immediately above and the vapor layer E immediately above the vapor tank 23. The work that has undergone a series of cleaning operations in this manner is taken out of the work entrance / exit opening 17 and transported to the next process.

As described above, the first solvent A (HFC, HFE
Since a vapor layer D of the first solvent A was formed above the liquid surface of the pre-cleaning tank 5 in which the second solvent B (hydrocarbon solvent or alcohol or both solvents) was mixed and stored. When the work is moved from the pre-cleaning tank 5 to the main cleaning section 2, the second solvent B adhering to the work surface is removed with the vapor of the first solvent A (steam cleaning), and the second solvent B Of course, the amount brought into the cleaning unit 2 can be reduced. Moreover, the main cleaning section 2 storing the first solvent A
And a vapor layer E of the first solvent A above the liquid surface of the first solvent A.
Is provided, the work is steam-cleaned with clean steam, and there is an effect that sufficient cleaning quality of the work can be ensured.

The solvent vapor is regenerated and liquefied by cooling means (see cooling jacket 25 and cooling coil 27) provided around the opening of the main washing section 2, and the regenerated liquid after water separation is transferred to the ultrasonic bath 22. Because of the reflux, there is an effect that the cleanliness of the ultrasonic bath 22 can be maintained and that the liquid temperature of the ultrasonic bath 22 can be prevented from rising.

Further, a separation tank (separator separation tank 20) is provided between the boiling tank 21 and the distillation tank 19 constituting the main cleaning tank.
Therefore, when the liquid in the tank 20 is cooled, the first solvent A and the second solvent B containing dirt can be separated by a temperature difference.

FIGS. 2 and 3 show another embodiment of the cleaning apparatus. In the embodiment shown in FIG. 1, the steam tank 23 is provided in front of the ultrasonic bath 22 (in front of the workpiece moving direction). In the embodiment shown in FIGS. 2 and 3, a steam tank 23 is formed separately from the boiling tank 21 constituting the main cleaning tank, and clean steam is supplied to the steam layer E through the opening 43. Make up.

As described above, when the above-described steam tank 23 (see FIG. 3) is provided on the side of the boiling tank 21 constituting the main cleaning tank, the opening 17 for the work entrance of the main cleaning section 2 having an open top surface structure is provided. Has the effect that the area of the solvent can be reduced to reduce the amount of solvent consumption per unit time.

Here, the above-described steam tank 23 may be provided on the side of the ultrasonic tank 22 instead of the side of the boiling tank 21. Since the other points have substantially the same functions and effects as those of the previous embodiment, the same reference numerals are given to the same parts in FIGS. 2 and 3 as those in the previous figures, and detailed description thereof is omitted. However, in FIG. 2, reference numeral 44 denotes an electromagnetic on-off valve interposed in the return path 33, and a point 45 of the return path 33 is connected to a point 45 in FIG.

FIGS. 4 and 5 show still another embodiment of the cleaning apparatus. In the embodiment shown in FIGS. 4 and 5, in addition to the configuration of the embodiment shown in FIGS. A vapor outlet channel 46 and a cooling chamber 47 are formed above the distillation tank 19 in the section 2, and a liquid receiving section 50 having an inverted L-shaped partition plate 48 and an upright partition plate 49 is formed. . The liquid receiving portion 50 is formed with a space for ensuring a regeneration amount with respect to the distillation tank 19.

The liquid receiving portion 50 is provided with a cooling coil 51 connected to the refrigerator 16 described above, and a part of the cooling coil 51 is soaked in the regenerating liquid a.
Thus, the cooling area is increased by the area of the cooling coil 51 and the solvent, and even when the surface temperature of the cooling pipe fluctuates, the solvent is cooled to ensure a constant cooling effect.

Further, the liquid receiving chamber on the right side in the figure is completely liquid-sealed with steam by the above-mentioned respective partition plates 48 and 49. Especially the first
When HFE is used as the solvent A, this solvent is excellent in cleaning ability, but is likely to become a vapor in a state in which dirt and mist are retained. In order to prevent this, the above-mentioned liquid sealing structure is employed. I have.

Thus, the regenerating liquid a condensed and liquefied by the cooling coil 51 is contaminated by the liquid-sealing structure to completely prevent mist from entering, and return from the liquid receiving chamber on the right side of the liquid receiving section 50 in the drawing. The regenerating solution a is configured to be recirculated to the boiling tank 21 and the steam tank 23 via the paths 52 and 53. In addition,
The point 54 in FIG. 4 is communicatively connected to the point 54 in FIG.

As described above, the distillation tank 19 is provided adjacent to the main washing section 2, and the cooling means (the cooling coil 5) is provided above the distillation tank 19.
1) and the liquid receiving portion 50 are provided to condense and regenerate the distilled first solvent A. Therefore, there is an effect that the mist in the vapor can be separated by the condensing and regenerating.

In other respects, the operation and effects are substantially the same as those of the previous embodiment. Therefore, in FIGS. 4 and 5, the same parts as those in the previous figures are denoted by the same reference numerals, and detailed description thereof will be given. Although omitted, in the embodiment of FIGS. 4 and 5, the above-described steam tank 23 may be provided on the side of the ultrasonic tank 22 instead of the side of the boiling tank 21. .

In correspondence with the configuration of the present invention and the above-described embodiment, the present cleaning tank of the present invention is different from the boiling tank 2 of the embodiment.
1, the cooling means according to claim 3 corresponds to the cooling jacket 25 and the cooling coil 27, and the cooling means according to claim 4 corresponds to the cooling coil 51, and so on. The separation tank corresponds to the separator separation tank 20, and the present invention is not limited to the configuration of the above-described embodiment.

For example, the pre-cleaning tank 5, the boiling tank 21, and the ultrasonic tank 22 may be configured in a plurality of tanks, and only one of the tanks 21 and 22 constituting the main cleaning tank may be configured. As for the solvent, HFE and HC disclosed in the examples are used.
The first solvent is not limited to HFC,
HFE, a fluorine-based inert solvent, or a fluorine-based solvent can be used. As the second solvent, a hydrocarbon-based solvent, an alcohol, or both can be used.

[Brief description of the drawings]

FIG. 1 is a system diagram showing a cleaning device of the present invention.

FIG. 2 is a sectional view showing another embodiment of the cleaning device.

FIG. 3 is a sectional view taken along line PP of FIG. 2;

FIG. 4 is a sectional view showing still another embodiment of the cleaning apparatus.

FIG. 5 is a sectional view taken along line QQ of FIG. 4;

FIG. 6 is a sectional view showing a conventional cleaning device.

[Explanation of symbols]

 A: first solvent D, E: vapor layer 1 ... pre-cleaning section 5 ... pre-cleaning tank 17 ... opening 19 ... distillation tank 20 ... separator separation tank 21 ... boiling tank 22 ... ultrasonic tank 23 ... steam tank 25 ... cooling Jacket 27 Cooling coil 50 Liquid receiver 51 Cooling coil

Claims (5)

[Claims] A vapor layer of a first solvent is provided above a liquid level of a pre-cleaning tank in which a first solvent such as HFC, HFE or a fluorine-based solvent is mixed and stored with a hydrocarbon-based solvent or an alcohol or both of them. A main cleaning tank in which a first solvent is stored, and a first cleaning tank on a liquid level of the main cleaning tank.
A cleaning apparatus comprising: a vapor tank for forming a vapor layer of a solvent. 2. The cleaning apparatus according to claim 1, wherein the steam tank is provided on a side of a boiling tank or an ultrasonic tank constituting the main cleaning tank. 3. A cooling means is provided around the opening of the main cleaning tank whose upper surface is open, and the regenerated liquid liquefied by the cooling means is separated into water and then returned to the ultrasonic tank. The cleaning device according to claim 1 or 2, wherein 4. The cleaning apparatus according to claim 1, wherein a distillation tank is provided adjacent to the cleaning apparatus, and a cooling means and a liquid receiving section are provided above the distillation tank to condense and regenerate the distilled solvent. 5. The cleaning apparatus according to claim 4, wherein a separation tank is provided between the main cleaning tank and the distillation tank to separate the first solvent and the second solvent containing dirt by a temperature difference.