JP4959397B2 - Washing and drying method and washing and drying apparatus for workpiece - Google Patents

Description

  The present invention relates to a method for cleaning and drying an object to be substantially removed of dirt adhered to an object to be processed such as an electronic part or a machined part in a manufacturing process, etc. The present invention relates to a cleaning / drying apparatus. More specifically, the present invention includes a hydrocarbon-based cleaning agent having sufficient dissolving power to substantially remove dirt adhering to an object to be processed, and a cleaning agent that is hardly soluble with the cleaning agent. In addition, the present invention provides a cleaning / drying method and a cleaning / drying apparatus for an object to be processed, in which a fluorine-based rinse agent having a high specific gravity is used to efficiently rinse and dry the object to be processed with the vapor of the rinse agent.

  In the manufacturing process of electronic parts and machined parts, in order to ensure the quality and product performance of the post-process, a cleaning process is performed to remove dirt attached to the parts. In recent years, as a cleaning / drying method in which dirt adhering to a component (object to be processed) is cleaned with a hydrocarbon cleaning agent, and the hydrocarbon cleaning agent is rinsed and substituted with a fluorine-based solvent [Patent Document 1] ], [Patent Document 2] and [Patent Document 3] have been devised.

  In the combination in which the hydrocarbon cleaning agent and the fluorinated solvent are compatible, the rinsing property of the cleaning agent is high and rational, and the effect of cleaning and drying the object to be processed can be obtained for a general purpose. [Patent Document 1] discloses a cleaning method that attempts to improve the rinsing failure of the cleaning agent adhered to the object to be processed by using a cleaning agent that is compatible with the fluorinated solvent for rinsing. However, in such combinations where the hydrocarbon cleaning agent and the fluorinated solvent are compatible, the usable cleaning agent and fluorinated solvent may be limited, which may be undesirable.

  As an example of a rinsing / drying unit of a conventional cleaning / drying apparatus in the case of a combination in which a hydrocarbon cleaning agent and a fluorine-based solvent are compatible, FIG. A cleaning tank (not shown) storing a cleaning agent, a rinsing tank (1) storing a fluorinated solvent for rinsing the cleaning agent attached to the cleaned object to be processed, and a rinsing tank (1). Equipped with a drying tank (8) for bringing the object to be treated into contact with the fluorine solvent vapor to further rinse and dry the object to be treated, and to store a mixture of the cleaning agent overflowing from the rinsing tank and the fluorine solvent A steam generation tank (4) for generating a fluorine-based solvent vapor, a distillation tank (6) for obtaining a purified fluorine-based solvent by distilling and separating the mixture of the cleaning agent and the fluorine-based solvent from the steam generation tank, Purification obtained in the tank Separating and recovering the fluorinated solvent from the water separation tank (3) for returning the fluorinated solvent obtained by separating water from the fluorine-based solvent to the rinsing tank (1) and the residual liquid obtained in the distillation tank The thing provided with the multistage solvent recovery tank (7) for this is shown typically.

  On the other hand, in the case where the hydrocarbon cleaning agent and the fluorinated solvent are hardly soluble, the hydrocarbon cleaning agent phase brought in from the cleaning device is formed in the upper layer of the fluorinated solvent in the rinsing tank. Thus, when the object to be cleaned is pulled up from the rinsing tank, the cleaning agent is reattached to the object to be cleaned, and the rinsing / drying property of the cleaning agent is significantly reduced.

  As a countermeasure, [Patent Document 2] presents a means for removing the cleaning agent that has floated due to the cascade effect and a method of adding a coupling solvent to the first rinsing tank. In the case of an object to be treated with a large amount of carry-in, it is necessary to use multiple rinsing tanks, and rinsing and displacement drying cannot be performed reasonably. Also, in [Patent Document 3], the physical action of the fluorinated solvent by showering away the cleaning agent that is hardly soluble with the fluorinated solvent, and reducing the carry-in to the rinsing / drying unit, thereby rinsing the cleaning agent. However, depending on the shape of the object to be processed, the physical action by the shower may not work effectively, and a general effect cannot be expected.

JP 10-36894 A Japanese Patent No. 2680930 Japanese Patent Laid-Open No. 10-192797

  The present invention is a cleaning / drying method in which dirt attached to an object to be processed is cleaned with a hydrocarbon cleaning agent, rinsed with a cleaning agent and a fluorine-based rinsing agent that is hardly soluble, and subjected to substitution drying. Rinse equivalent to a fluorine solvent system that is compatible with the detergent by preventing the re-adhesion of the detergent to the product as much as possible and forming a clean vapor phase of the fluorine-based rinse agent by rational means・ To obtain drying characteristics.

In the cleaning and drying method in which the dirt attached to the object to be processed is cleaned with a cleaning agent of hydrocarbons, and rinsed with a cleaning agent and a fluorine-based rinsing agent that is sparingly soluble. overflows from the rinsing tank, by providing a reservoir which stores a mixture of detergent phase formed in the rinsing tank and re Nsu agent phase, preferably further in the distillation vessel for separating the rinse phase from the reservoir By supplying the purified rinse agent in the separator to the rinse agent vapor generation tank, the vapor phase of the rinse agent required for rinsing and drying can be efficiently formed, and the fluorine-based solvent that is compatible with the cleaning agent As with the cleaning and drying method of rinsing and displacement drying, a method and apparatus for enabling cleaning and drying of an object to be processed are provided.

According to a first aspect of the present invention, according to claim 1, a cleaning tank storing a hydrocarbon-based cleaning agent having sufficient dissolving power to substantially remove dirt adhered to an object to be processed is provided. A step of immersing the processed material and cleaning with a cleaning agent, in order to rinse the cleaning agent adhering to the processed object to be processed, a fluorine-based material that is slightly soluble in the cleaning agent and has a higher specific gravity than the cleaning agent The step of immersing the rinsed object in the rinse tank (11) in which the rinse agent is stored and rinsing, and the object to be rinsed from the rinse tank from the steam generation tank (14) in which the rinse agent is stored A cleaning / drying method for an object to be processed, which further includes a step of rinsing and drying the object to be processed by bringing it into contact with the generated rinsing agent vapor, wherein the cleaning agent is formed in the rinsing tank from the rinsing tank (11). the mixture overflow of the phase and the phase of the rinse Reservoir which stores by (18) in the step to phase separate rinse agent phase at the bottom of the detergent phase at the top by a difference in specific gravity between the respective mixture of detergent phase and rinse phases, and the reservoir (18) It is a washing-drying method further including the process of returning the rinse agent phase from to a steam generation tank (14) .

According to a second aspect of the present invention, the object to be treated according to claim 5 stores a hydrocarbon-based cleaning agent having a sufficient dissolving power to substantially remove dirt adhered to the object to be treated. Cleaning bath for immersing and cleaning with cleaning agent, Fluorine-based that is slightly soluble in cleaning agent and has higher specific gravity than cleaning agent for rinsing cleaning agent adhering to cleaned object A rinsing tank (11) for rinsing the cleaned object to be processed, in which the rinsing agent is stored, a steam generating tank (14) for storing the rinsing agent and generating vapor of the rinsing agent, and a rinsing tank ( 11 is a washing and drying apparatus for a treatment object, comprising a drying tank (19) for bringing the rinsed treatment object from 11) into contact with the rinse agent vapor to further rinse and dry the treatment object. Te, overflowing from the rinsing tank (11), phosphorus Storing the mixture of the phases of the cleaning agent formed in the bath (hereinafter referred to as "detergent") and the phase of re Nsu agent (hereafter also referred to as "rinse agents"), each of the mixture of detergent phase and rinse phase A storage tank (18) for phase-separating the cleaning agent phase at the top and the rinsing agent phase at the bottom by means of the specific gravity difference , and means for returning the rinsing agent phase from the storage tank (18) to the steam generation tank (14) Is a washing and drying apparatus.

  According to the first and second aspects of the present invention, the cleaning agent in the rinsing tank is prevented from reattaching to the object to be processed and a clean solvent vapor layer is formed by a rational means. Rinsing / drying properties equivalent to compatible fluorine-based solvents can be obtained.

As a preferable aspect of the first aspect of the present invention, according to claim 2, the step of supplying the rinse agent phase from the storage tank (18) to the steam generation tank (14) is performed from the storage tank (18). step a rinsing agent phase separating purified rinse from the rinse agent phase was treated by separator (16), and a step of supplying a purified rinse agent from the separator (16) to the vapor generating bath (14) including, washing and drying methods.

Moreover, as a preferable aspect of the second aspect of the present invention, according to claim 6, the means for supplying the rinse agent phase from the storage tank (18) to the steam generation tank (14) is a storage tank ( 18) separator for separating purified rinse from the rinse agent phase from (16), and e Bei the means for supplying the steam generating vessel purified rinse agent from the separator (16) (14) And a washing and drying apparatus.

  According to these preferred embodiments of the present invention, fluorine that exhibits compatibility with the cleaning agent can be formed by rationally forming a clean solvent vapor layer and preventing re-adhesion of the cleaning agent to the object to be processed in the rinsing tank. Rinsing and drying properties equivalent to those of system solvents can be obtained more reliably.

  Further, as a preferred embodiment of the present invention, according to Claims 3 and 7, at least one fluorine-based rinsing agent is selected from hydrofluorocarbons (HFCs) and hydrofluoroethers (HFEs), respectively. Examples of the component include a cleaning / drying method and a cleaning / drying apparatus.

  Further, as a preferred embodiment of the present invention, according to claims 4 and 8, the hydrocarbon-based cleaning agent is a paraffin-based, olefin-based, aroma-based, naphthene-based, alcohol-based, ester-based, ketone-based, Examples thereof include a cleaning / drying method and a cleaning / drying apparatus, which are mainly composed of at least one selected from glycols.

  According to the aspect of the combination of the fluorine type rinsing agent and the hydrocarbon type cleaning agent of the present invention, prevention of reattachment of the cleaning agent to the object to be treated in the rinsing tank and formation of a clean solvent vapor layer by a rational means. By doing so, it is possible to more reliably obtain the same rinsing / drying property as that of the fluorine-based solvent having compatibility with the cleaning agent.

  Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings as necessary. In addition, the code | symbol in the parenthesis attached | subjected to each said means is an example which shows the correspondence of the specific means described in the aspect mentioned later.

  The rinsing / drying unit of the preferred embodiment of the washing and drying apparatus of the present invention is washed in FIG. 2 with a washing tank (not shown) storing a hydrocarbon-based cleaning agent for immersing and washing the object to be treated. A rinsing tank (11) storing a fluorine-based rinse agent for rinsing the cleaning agent adhering to the object to be treated, and the object to be treated taken out from the rinse tank (11) being brought into contact with the vapor of the fluorine-based rinse agent Further, a drying tank (19) for rinsing and drying the object to be processed and a mixture of the cleaning agent and the fluorine-based rinsing agent overflowing from the rinsing tank (11) are stored, and a mixture of the cleaning agent and the fluorine-based rinsing agent is stored respectively. The purified fluorine rinse agent was separated from the fluorine rinse agent phase from the storage tank (18) and the reservoir tank (18) for phase separation of the cleaning agent phase at the top and the rinse agent phase at the bottom by the specific gravity difference of A separator (16), and a steam generation tank (14) for storing the purified rinse agent from the separator (16) and generating vapor of the rinse agent, and more preferably from the separator (16) Fluorine-based rinsing agent obtained by separating water from the purified fluorinated rinsing agent, water-recovering tank (13) for returning the rinsing-based rinsing agent to the rinsing tank (11), and fluorine-based from the residual liquid obtained in the separator (16) What is equipped with the multistage recovery tank (17) of the fluorine-type rinse agent for isolate | separating and collect | recovering rinse agents is typically shown.

  That is, in the aspect of the present invention, a rinsing tank (11) and a storage tank (18) are provided, and the storage tank (18) includes a cleaning agent rinsed from an object to be processed and a fluorine-based material from the rinsing tank (11). Both rinse agents are supplied by overflow. The cleaning agent exceeding the saturation concentration in the storage tank (18) is separated into two layers of a cleaning agent phase in the upper layer part and a fluorine-based rinsing agent phase in the lower layer part due to the difference in specific gravity. In addition, you may cool the storage tank (18) (for example, 30 degrees C or less). By cooling, the two-layer separation of the cleaning agent and the fluorine-based rinsing agent can be facilitated. The fluorine-based rinsing agent phase containing a cleaning agent having a lower concentration than the saturation concentration in the lower layer is supplied to a distillation tank which is a separator (16). In the distillation tank, it is heated using a heater (15) and is separated by distillation into a purified fluorinated rinse agent and a residual liquid which is a fluorinated rinse agent in which a cleaning agent is dissolved. The purified fluorinated rinse agent is It is supplied to the rinse tank (11) via the water separation tank (13). On the other hand, the saturated vapor of the fluorine-based rinse agent generated by heating using the heater (15) in the steam generation tank (14) is condensed and recovered by a cooler (12) such as a cooling pipe and the water separation tank (13). ) To the rinse tank (11). In addition, you may provide the means (not shown) which discharges | emits the water produced | generated to the upper layer part in the water separation tank (13). As the fluorine rinse agent is condensed in the steam generator (12), the fluorine rinse agent is consumed in the steam generation tank (14). Therefore, the purified fluorine rinse agent distilled and separated by the separator (16) A saturated vapor layer of the fluorine-based rinse agent in the drying tank (19) is formed by supplying a part to the steam generation tank (14). In addition, you may make it return the residual liquid which has the cleaning agent as a main component obtained in the collection tank (17) of the fluorine-type rinse agent shown in FIG. 2 to a washing tank.

  In this way, the object to be treated, which is immersed in the cleaning agent of hydrocarbons filled in the cleaning tank and cleaned and pulled up from the cleaning tank and attached with the cleaning agent of hydrocarbons, is rinse tank (11). It is immersed and rinsed in the fluorine-type rinse agent satisfy | filled. The object to be treated after the rinsing is pulled up to the drying tank (19) located in the upper part of the rinsing tank (11), and a vapor layer (drying) composed of saturated vapor of a fluorine-based rinsing agent generated from the steam generation tank (14). In the tank (19)), the rinse is performed by condensation of the rinse agent. Further, the surface of the object to be treated is heated to the boiling point of the fluorine-based rinsing agent by saturated steam, the fluorine-based rinsing agent is vaporized, and the object to be treated is dried.

In the present invention, as a hydrocarbon-based cleaning agent having a sufficient dissolving power to substantially remove dirt adhered to the object to be treated, for example, paraffin-based, olefin-based, aroma-based, naphthene-based, alcohol-based, Examples include those containing at least one selected from ester, ketone, glycols and the like as a main component. Such a cleaning agent is preferably a paraffinic hydrocarbon, and examples thereof include C ₁₀ H ₂₂ , C ₁₁ H ₂₄ , and C ₁₂ H ₂₆ . The hydrocarbon-based cleaning agent may contain other additives as necessary. However, the concentration of these hydrocarbon compounds in the hydrocarbon-based cleaning agent is substantially equivalent to dirt adhered to the object to be treated. It may be in a range having sufficient dissolving power for removal, and is preferably 50% by weight or less based on the weight of the hydrocarbon-based cleaning agent.

  In the present invention, a fluorine-based rinse agent that is hardly soluble with such a hydrocarbon-based detergent and has a higher specific gravity than that of the detergent is used. The hydrocarbon-based cleaning agent and the fluorine-based rinsing agent are hardly soluble. Preferably, the amount of the hydrocarbon-based cleaning agent dissolved in the fluorine-based rinsing agent is room temperature (specifically, for example, 20 ° C.). It means 10% by weight or less based on the weight of the fluorinated rinse agent. Further, the fluorine-based rinsing agent having a higher specific gravity than the hydrocarbon-based cleaning agent is preferably (specific gravity of the fluorine-based rinsing agent) / (hydrocarbon-based cleaning) at room temperature (specifically, for example, 20 ° C.). The ratio of the specific gravity of the agent is greater than 1. In such a system, in the storage tank (18), the mixed liquid of the fluorine-based rinsing agent and the hydrocarbon-based cleaning agent containing the hydrocarbon-based cleaning agent at a saturation solubility or higher mainly includes the hydrocarbon-based cleaning agent. Two layers can be easily separated into an upper layer of the system-based detergent phase and a lower layer of the fluorine-based rinse agent phase mainly containing the fluorine-based rinse agent.

  Further, the fluorine-based rinse agent used in the present invention is hardly soluble in the hydrocarbon-based cleaning agent, and the boiling point of the fluorine compound in the fluorine-based rinse agent is that of the hydrocarbon compound in the hydrocarbon-based cleaning agent. A system lower by 30 ° C. or more than the boiling point is desirable. If the boiling point of the hydrocarbon-based cleaning agent is close to the boiling point of the fluorine-based rinsing agent, the hydrocarbon-based cleaning agent is liable to vaporize and the flammability is increased, which is not preferable.

  Examples of such a fluorine-based rinsing agent of the present invention include those containing as a main component at least one selected from hydrofluorocarbons (HFCs), hydrofluoroethers (HFEs) and the like.

Hydrofluorocarbons (HFCs) include CF ₃ CHFCHFCF ₂ CF ₃ (HFC-43-10mee), CF ₃ CH ₂ CF ₂ CH ₃ (HFC-365mfc), CF ₃ CF ₂ CF ₂ CF ₂ CF ₂ CHF ₂ ( _{HFC-52-13p), CF 3 CF} 2 CF 2 CF 2 CH 2 CH 3 (HFC-569sf) , and the like.

Hydrofluoroethers (HFE) include CF ₃ CH ₂ OCF ₂ CHF ₂ (HFE-347pc-f), C ₄ F ₉ OCH ₃ , C ₄ F ₉ OC ₂ H ₅ , C ₆ F ₁₃ OCH _{3 and the} like. Can be mentioned.

  Among these, more preferable fluorine-based rinsing agents include HFC-43-10mee and HFE-347pc-f. The fluorine-based rinsing agent may contain other additives as necessary, but the concentration of the fluorine compound in the fluorine-based rinsing agent may include the above-mentioned characteristics such as poor solubility with a hydrocarbon-based cleaning agent. It may be in the range to satisfy, and is preferably 10% by weight or less based on the weight of the fluorinated rinse agent.

  The present invention is not limited in any way by specific modes such as the illustrated embodiment.

It is the schematic diagram which showed the rinse and the drying part of the conventional washing | cleaning drying apparatus in the case of the combination in which the cleaning agent of hydrocarbons and a fluorine-type solvent show compatibility. It is the schematic diagram which showed the rinse and the drying part of the washing-drying apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rinse tank 2 Cooler 3 Water separation tank 4 Steam generation tank 5 Heater 6 Distillation tank 7 Recovery tank 8 Drying tank 11 Rinse tank 12 Cooler 13 Water separation tank 14 Steam generation tank 15 Heater 16 Separator 17 Collection tank 18 Storage tank 19 Drying tank

Claims (8)

A step of immersing the object to be processed in a cleaning tank storing a hydrocarbon-based cleaning agent having sufficient dissolving power to substantially remove dirt adhering to the object to be processed, and cleaning with the cleaning agent;
In order to rinse the cleaning agent adhering to the cleaned object to be processed, a rinsing tank (11) that stores a fluorine-based rinsing agent that is hardly soluble in the cleaning agent and has a higher specific gravity than the cleaning agent And rinsing the washed object to be rinsed, and the rinse agent generated from the steam generation tank (14) storing the rinse agent. A method for cleaning and drying the object to be processed, comprising a step of irrigating and drying the object to be processed by contact with the vapor of
In the storage tank (18) in which the mixture of the cleaning agent phase and the rinsing agent phase formed in the rinsing tank is overflowed and stored from the rinsing tank (11) , the cleaning agent phase and the rinsing agent phase are stored. step of phase separation in the lower part of the rinsing agent phase at the top of the detergent phase mixture by each of the difference in specific gravity and,
Supplying the rinsing agent phase from the storage tank (18) to the steam generation tank (14) ; The step of supplying the rinse agent phase from the storage tank (18) to the steam generation tank (14),
The process, and the purified rinse agent from the separator (16) separating the purified rinse the rinse phase is treated from the rinse phase by separator (16) from said reservoir (18) Supplying to steam generation tank (14)
The including, washing and drying method as claimed in claim 1.   The cleaning and drying method according to claim 1 or 2, wherein the fluorine-based rinsing agent is mainly composed of at least one selected from hydrofluorocarbons (HFCs) and hydrofluoroethers (HFEs).   The hydrocarbon-based cleaning agent is mainly composed of at least one selected from paraffinic, olefinic, aroma-based, naphthenic, alcohol-based, ester-based, ketone-based, and glycols. 2. The washing and drying method according to 2. A cleaning tank for storing a hydrocarbon-based cleaning agent having sufficient dissolving power to substantially remove dirt adhered to the object to be processed, and immersing the object to be processed and cleaning with the cleaning agent,
The rinsed cleaning agent stores a fluorine-based rinse agent that is sparingly soluble in the cleaning agent and has a higher specific gravity than the cleaning agent for rinsing the cleaning agent that has adhered to the cleaned object to be processed. A rinsing tank (11) for rinsing the treated object
A steam generation tank (14) for storing the rinse agent and generating vapor of the rinse agent, and the object to be treated rinsed from the rinse tank (11) are removed from the steam generation tank (14). A drying tank (19) for rinsing and drying the object to be processed by bringing it into contact with the generated vapor of the rinse agent
An apparatus for cleaning and drying an object to be processed, comprising:
Overflow from the rinsing tank (11), storing the mixture of the phases of the phase and said rinse agent in the cleaning agent formed in the rinsing tank, the difference in specific gravity of each of the mixture of the detergent phase and the rinse phase reservoir for causing phase separation in the lower part of the rinsing agent phase the detergent phase at the top (18), and
A cleaning / drying apparatus, further comprising means for supplying the rinse agent phase from the storage tank (18) to the steam generation tank (14) . The means for supplying the rinse agent phase from the reservoir (18) to the steam generation tank (14);
Separator for separating purified rinse from the rinse phase from the storage tank (18) (16), and supplying the purified rinse agent from the separator (16) to the vapor generating tank (14) Means to do
The painting Bei, washing and drying apparatus according to claim 5.   The cleaning / drying apparatus according to claim 5 or 6, wherein the fluorine-based rinsing agent is mainly composed of at least one selected from hydrofluorocarbons (HFCs) and hydrofluoroethers (HFEs).   The hydrocarbon-based cleaning agent is mainly composed of at least one selected from paraffinic, olefinic, aroma-based, naphthenic, alcohol-based, ester-based, ketone-based, and glycols. 7. The washing and drying apparatus according to 6.

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