TWI330195B - Cleaning agent composition and cleaning method - Google Patents

Description

13301.95 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a detergent composition and a cleaning method for removing a fluxing agent, a wax, a mechanical oil, etc., particularly to an electrical and electronic element.

Parts, optical 7C parts, automotive parts, precision instrument parts and other such composites of these materials. V [Prior Art] Conventionally, a fluorocarbon-based solvent (for example, trifluorotrifluoroethane) or a chlorine-based solvent (for example, i, M-trichloroethane, tri-hexane: chlorine) is used. As a cleaning agent (cleaninga coffee seven), to clean the flux, soil, mechanical oil, etc. attached to precision parts, however, three gas trichloro-W and 1,1, Bu Sanqi B-burning at the end of 1995 It is forbidden to manufacture, because this 70 quality will contribute to the rupture of the ozone layer. Similarly, trichloroacetic acid and methylene chloride are severely toxic and cause air and water contamination when released. Therefore, the above substances are strictly controlled by law. Also began to study the use of surfactants or inorganic salts of water-soluble Qi K (such as phosphate) and water-based ❹, but there is a poor, clear fruit and fruit and wastewater treatment equipment will take up a lot of empty economy. Making such cleaning (4) is not optimistic. Therefore, the development of other 栌 Μ Μ Μ χ 且 且 且 右 右 右 右 右 右 右 右 右 右 右 右 右 右 右 , , , , , , , , , , , , , , , , , , , , , , , , , , , , ; = liquid or gas-based liquid, . Θ 4 is a flammable liquid, so the Fire servlce Act imposes a designated component as a hazardous substance. 317907 5 1330195 Hydrocarbons with a flash point of at least 70 °C are safe to use, but conversely they are very hairy, which creates a tamping problem, ie they take a long time to dry after cleaning. In addition, 'HFCs or hydrofluoroethers (HFC/E) have been used as a vap〇r cieaning agent ‘- or rinsing agent. However, since the smoke cleaner cannot be sufficiently dissolved in .HFC/E, HFC/E cannot sufficiently replace the hydrocarbon detergent, and some soiled hydrocarbon detergent remains attached to the cleaned article, so that the cleaning The effect is unsatisfactory. • A cleaning method has previously been proposed which involves a warm water bath cleaning step of a mixture of HFC/E with an organic compound (eg, a HFC/E compatible glycol ether or ester), and flushing with the HFC/E alone (see The steps of the patent document 丨). The proposed method of cleaning the article is to clean the HFC/ with a uniform detergent consisting of 11 with an organic mouthstock such as glycol ether, glycol ether acetate or hydroxycarboxylate. E-rinsing, the mixed soiling component and/or detergent component are separated by the stable departure of the fouling rinsing agent in the rinsing step, and it has been proposed that the cleaning agent and the rinsing agent can be further profitable ( See patent document 2). However, the ethyl ether ethers discussed in these publications do not require the same removal of mineral oil as hydrocarbons. Further, a cleaning device is proposed which washes the object to be cleaned with a first cleaning liquid whose main component is a hydrocarbon-based solvent, and then rinses and cleans the second cleaning liquid whose main component is HFC. Object (see patent document 3). Other cleaning methods have been proposed: one filled with hFc/e and the compound (for example, a hydrocarbon that cannot be quickly dissolved in hfc/£) is divided into two layers of ice/cold L, and the upper layer of liquid (mainly containing the organic compound) is cleaned. The 137907 layer to be cleaned (mainly containing the HFG/E) is washed and cleaned.

The object of cleaning; the part of the object is still left on the surface of the object to be cleaned, and the sewage component dissolved in the solvent will contaminate the surface of the object, and the cleaning effect is unsatisfactory. . Patent Document 1 曰 Patent Publication No. H1 0-36894 Patent Document 2 曰 Patent Publication No. 2001-334104 Patent Document 3 曰 Patent Publication No. H6-328052 Patent Document 4 曰 Patent Publication No. H10-192792 Patent Document 5 曰本Patent Publication No. H10-202209 [Draft] The present invention provides a detergent composition having the following advantages and a cleaning method 317907 7 Cleaning method: = detergent composition and cleaning method do not occur as The cleaning effect of thinking; not 迕 浐 浐 BS BS 人 人 人 人 人 人 BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS BS 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧 臭氧Simple; and for help. Adhesive staining of the mechanical oil composition exhibits sufficient cleaning effect. The inventors of the present invention have found that the satin is suitable for the specificity of the various types of county pollution. The solubility property of the removal I in the wind rat carbide or hydrogen special rumors 'the detergent composition of the present invention contains 2 points of the Buddha. Saturated hydrocarbons up to 3501. Heavy vinegar. Preferably, the saturated tobacco has a carbon number of 12, to (4) yttrium acetate. The venom von 12 to 19, the acetate is vinegar... 3-methyl | methoxy butyl vinegar, and The flash point of the detergent composition = ash P〇int) is at least 7 ° ° C ° If the flash point is lower than (10), the flammable vapor will be significantly produced in the positive (d) temperature range of cleaning, which will reduce the total To the extent that the flash point of the composition is at least 7 〇t. - Many different types of soil can be completely removed by the following method, / method c includes immersion cleaning of the above-mentioned detergent composition The object to be cleaned is then immersed and rinsed in a hydrofluorocarbon or hydrogen sputum. After cleaning the object as described above, the object is vapor-cleaned by contacting the mash with the vapor of the carbide or ruthenium (10). And drying the article, wherein the cleaning age and the hydrofluorocarbon money _ in the steam cleaning two 317907 8 , , the middle ή ~ composition 'to make the object rinse or steam cleaning, in or fluorinated _ by two:; There are: = Oxygen fluoride breaking compound of the object one road # "Knife into two layers, and can easily recover the middle of the two layers The boiling point of the hydrofluorocarbon or hydrogen_ is preferably 3〇^########################################################################## There are very few flashlights with a flash point of at least 70t and are fired by another eve and because of their heartfelt s... "Component; evaporation loss is less likely to be cleaned under heat; and right::,: agent, soil, The adhesion of the composite such as mechanical oil shows sufficient conversion. The cleaning method of the present invention utilizes the detergent composition to mean that a compatible fit occurs in the vicinity of the Buddha's point of HCF/E, and

This solubility is significantly reduced when j is lowered. Thereby, rinsing the cleaned article with the HCF/E knife is provided to cause the cleaned article to dry quickly = and the cleaning agent and the vapor cleaning agent are easily separated and recovered. [Appropriate method] The preferred composition of the invention The detergent composition of the present invention contains 2 to 6 wt% of a saturated hydrocarbon having a boiling point of 200 to 35 (TC). The saturated hydrocarbon may be linear, branched or cyclic. Type, and they may be used alone or in a mixture of two or more. It is preferred that the saturated aliphatic hydrocarbon is particularly preferably a linear saturated aliphatic hydrocarbon. From the female (four), the Buddha's point is less than 20 generations. The saturated aliphatic hydrocarbon is poor, because 317907 9 1330195 ^ has a lower flash point. Undesirably, the cleaning composition has a point of more than 35 〇 ^ because the saturated hydrocarbon will exhibit high viscosity, and the cleaning effect will be deteriorated. The residual smoke cannot be dried quickly after cleaning. It is preferred to use saturated fat smoke having a capacity of 19, more preferably a saturated aliphatic hydrocarbon having a carbon number of u, and particularly preferably n-dodecane. The inventive detergent composition contains the above 2 () to 6 {)% by weight of saturation: preferably contains 30 to 4% by weight of a saturated hydrocarbon. It is not expected that the saturated hydrocarbon contains a Lie at 2G weight a:%' because the cleaning effect on the oil is impaired. Conversely, 'the saturated smoke content is not expected to be higher than 6% by weight, and the similarity with the singularity ^ will be reduced'. Therefore, it should be washed with /ρ, 、, 土#, initial swelling 0/£ or clean. At the time, the replacement of the clear ball will not proceed smoothly. The detergent composition of the invention contains 4% by weight of a cool acid vinegar, preferably 60 to 70% by weight of acetic acid vinegar. In the case of the acetic acid, it is preferred to use an ester of acetic acid and a fat having a hydroxyl group, an ε-day fat, and particularly an acid (IV) where the alcohol is a gas atom of Erjing to pass i H (four) (four) The carbon number is preferably from 5 to 1 G, especially to 8 °. If the acetic acid contains 1 less than 4Q% by weight on the 1st, the cleaning effect on the stain containing polar substances (for example, aids (4) and (5) will be reduced, and in HFC/E In the middle of the solution, the degree of solution will also decrease. Therefore, when the replacement of the cleaning agent by 咮1 will not be able to clean smoothly, it will be recognized. Non-precision is ordered. At the same time, acetic vinegar is not expected... “'Because the cleaning effect of removing mineral oil will be impaired. Examples of acetic acid vinegar include ethylene glycol monoethyl (tetra) acid brewing, ethylene glycol monopropyl (tetra) acid ester, ethylene glycol monobutyl test vinegar, propylene glycol Monomethyl ether 317907 10

Vinegar's acid, glycerin, 7g S; μ U propyl bis-ether ether, propylene glycol monopropyl ether acetate, ether-acid [I oxime, butanediol monoethyl ether acetate Ester, butanediol monopropyl phthalate monomethyl acetate vinegar, diethylene glycol monoethyl vinegar vinegar day - ethyl alcohol monopropyl, acetic acid g |, diethylene glycol monomethyl test Acetic acid 』-propanol car ethyl ether acetate, dipropylene glycol monomethyl ether acetate vinegar, diethyl vinegar acetate and triethylene glycol monomethyl vinegar. For the second and the flash point, it is preferred to use 3 methyl-3-methoxybutyl acetate as the butyl alcohol monomethyl ether acetate. It may also be jeopardized for the purpose of the present invention. Otherwise, the detergent composition of the present invention contains other cigarettes, vinegar, alcohol, ® I, decylamine and other such compounds; or = surfactant, antioxidant, uv Absorbents, rust inhibitors and other additives used. The total amount of these components is preferably less than 1% by weight, and particularly preferably less than 2% by weight. It is generally preferred not to add water. I-side living J·sheng is preferably a non-ionic surfactant, and examples thereof include poly-P-women-based shouting, polyoxyethylene alkyl phenyl hydrazine, polyethylene glycol hydroxy vinegar, and oxyethylene base. Amine, sorbitol vinegar vinegar, sorbitol wild fatty acid scorpion, sucrose fatty acid vinegar, Shi Xi mainly surfactant and gas-based surfactant. , _ ϋ ν absorbents and antioxidants help to improve stability, such as the stability of long-term storage of detergent liquids. Examples of the υν absorbing agent include UV absorption mainly composed of benzotriazine or hindered amine, and examples of the antioxidant include antioxidants mainly composed of phenol, amine, sulfur, or phosphorus, and Any substance dissolved in the detergent composition of the present invention can be used. The special car is also a phenol-based antioxidant 317907 11 13301.95 added with 5 〇 to i 〇〇 0 ppm. The detergent composition of the present invention has a high enthalpy point, but its low evaporation rate is the problem, so it is preferred to use a sail/£ as a steam cleaner to quickly dry the hot air cleaning. Specifically, by flushing out any cleaning agent attached to the cleaned article in the rinsing machine, the evaporation rate is significantly increased, and then the cleaning article is stabilized. : in the saturated vapor layer of HCF/E. The stagnation point of the 眺/£ is between 3〇 and (10) ^, especially when the material is in the hydrogen level of the phantom stage (4), when it is compatible with the cleaning agent, consider this The difference between the detergents 1 is different. Examples of the chest include U, tetrafluoroethyl-heptylfluoropropyl ether (boiling point: 40 〇c), and 1 1 1 9 q q. — n 1,1,1,2, 3, 3-hexyl-2-heptylfluoropropoxy_3_ 1,2, 2, 2-tetrafluoroethoxy)propane (boiling point: 1〇4 gas B Quiche-Sandon Ethyl: It is called helium 'methyl group: 'Fo. 61 C C. and 壬 fluorobutyl ethyl acid (Buddha: μ). The film, which is more sturdy, is cleaned as a detergent and a vapor cleaner, and is compatible near the boiling point of the evaporated detergent. The first figure shows the solubility of a mixture of decyl butyl acrylate and n-dodecane, which is a detergent composition of the present invention, and U, 2, 2-tetrafluoroethyl-2, 2, 2 - trifluoroethyl bond '; example! to 5 and comparative examples i to 3), which is a kind of vapor, moon detergent. The detergent composition of the present invention is at 50. (: Compatible with HFE-1) Therefore, the vapor cleaning effect is sufficiently obtained. The detergent composition of the present invention, the solubility of HFE-1 is rapidly lowered as the temperature is lowered. Therefore, the helium cleaning agent and the cleaning of the present invention Mixture of the composition of the agent, 兮/: The vicinity of the detergent is in the (four) state, and will be divided when cooled; (4) ^ 317907 12 丄j The components can be easily recovered and reused. ::::—and two ===: The sea of the product:: 2 includes the infiltration and spraying of the composition of the monthly detergent to fill the cleaning agent group. For the combination of (4): to (4) In the case of cleaning at the same time, etc., the air makes it foam, etc. It is 100 kHz > I 曰 ', the movement is better, so the vibration frequency is 20, and the vibration of the liquid is increased. The output is 10 to bribe. In the fight =, foaming, 'the air/cleaner body bubbles are preferably passed through the composition, which causes any bubbles that are insoluble in the detergent to rise to achieve separation. In the chastity, ^ force Preferably, it is 0.05 to as. In any example, 15 seconds to 2 hours, especially the estimated time is here - and the slave is held, The interval is between 30 seconds and 20 minutes. If the right is below this time range, the foot will be cleared. The phase u will be insufficient and the dirt will not be removed. ^ When the right time exceeds this time range, the cleaning effect will be increased. The temperature is preferably 20 $ 1Qn> ..."Bei 曰t door", 〇C, and the heating temperature to 50 to 130 C will significantly improve the cleaning effect. ^ In the cleaning method of the present invention, by using _/Ε The plug gas cleaning has a cleaning agent attached to the cleaning article. How to complete the limitation of the crucible' and any known method can be used. For example, the object/slot is flushed and attached to the cleaning device. The article is stably placed in the saturated layer of the _E to clean the article by steam to obtain a clean product. The rinsing tank 317907 13 1330195 can be one of a hot water bath or a cold water bath, or a booster The effect is 杲, and an agitator or ultrasonic oscillator can be added. The most effective one is not rinsed in the hot water bath, and then rinsed with the water with the ultrasonic center of vibration. The cleaned in the rinse tank The object is cooled to a temperature below the boiling point of 卯, and then taken The object is introduced into the 卯WE, and the vapor layer, and the HFC/E is liquefied on the surface of the cleaned object, and is replaced by a cleaning device containing unremovable dirt in the rinsing tank. Rinse. If the HFC/E and the detergent in this manual are too low, the replacement may not be sufficient, and the cleaning agent will still be on the surface of the cleaned object, causing the stain to be on the surface. However, since the detergent composition of the present invention is compatiblely blended with the HFC/E near the boiling point of the hfc/e, such insufficient cleaning does not occur. Once the rinse is completed, the cleaned The surface of the object is only wetted by the HFC/E, so it can be dried quickly. Distillation is conventionally applied to separate the detergent composition meter or soiling component from the vapor cleaner. The detergent composition of the present invention can also be separated from the vapor/moon sputum by distillation, however the problem is that steaming is generally time consuming and expensive. As shown in Fig. 1, the phase difference between the vapor cleansing agent and the detergent composition of the present invention is significantly affected by temperature, and therefore the cleaning method of the present invention also includes a separation method 'where the condensate of the steam cleaner is cooled or contains The rinse tank of the detergent is separated into two layers, and the layers are recycled and reused. In the present specification, after the detergent composition is separated from the soiled component by steaming or the like, the detergent containing the soiled component is reused. Examples of items to be cleaned including electrical and electronic parts, optical parts, 14 317907 / ', mechanical parts, automotive parts and other such examples may focus on including printing two. Electrical circuit board, etc.; lead frame n, celestial circuit board and other pieces; relay - (2) = e) and other such semiconductor seals (5) ay), connectors and other::,: The public display, and other such displays are zero-two = its magnetic storage parts; stone = these piezoelectric parts; motor, . 匕 mirror r "... two" < bar on the axis, and other These parts. = Example package for the type of riding of the item to be cleaned = Help: Mechanical oil composed of mineral oil, vegetable oil, class and flux agent: ΐInventive detergent composition New Zealand, with ❹(4).

The examples are to be considered in all respects as illustrative and not restrictive. The present invention is described in detail, but only the preparations of Examples 1 to 5 and Comparative Examples 1 to 1 清洁 are prepared according to the one shown in Table 1, i. Will n-undecane (n-Cll; boiling point: ι71 C), n-dodecane (n-Cl2; boiling point: 2〇9. 〇 with 3 decyl butyl acetate (MMBAC; boiling point. Wide, 仏人在丨",· 18 8 C ) blending to prepare the cleansing agents of Examples 1 to 5 virtual comparative examples 1 to 10. 〃 317907 15 1330195 tt|$i column 10 Ο ' L〇CO tfc$ Delete 9 s CO CO t Nen series 8 S s inch CO fine column 7 S CO CD t tender column 6 another LO CO t tender column 5 c=><〇τ-Η t tender column 4 c? o LO tt| butterfly 3 Q CO tank column 2 § 1 Ο Ο 1—« oo CO § CO CO Example 3 s CO Example 2 S s oa § n-Cll (% by weight) n-C12 (weight 90 /-NO ^ 戋 ls Ή s^/ flash point ( °c) 16 317907 1330195 Flash point, Table 1 also shows the TAG cl〇sed_CUp f lash p〇int (JIS K2265) of the cleaning agents in Examples 1 to 5 and Comparative Examples 1 to 10. The solubility in the detergent was measured in the solubility of the cleaning agents of Examples 1 to 5 and Comparative Examples J to 4 in the m2 tetrafluoroethyl ^^' 仏 three gas ethyl gu coffee (1) and the results are shown in Table 2 and The first limit of the dissolution measurement of this specification is set at 100 g / 100 g of HFE-1. The cleaning agents of Examples i to 5 were compatiblely blended in the order of ', and the compatibility was drastically lowered when cooling. Conversely, the cleaning agents of Comparative Examples 1 to 3 At 5 〇. 有 has low solubility in HFEq', so it is difficult to replace the cleaning agent still attached to the part. Therefore, 'under the same conditions of Examples 1 to 5, when they are cleaned by steam cleaning' A sufficient rinsing is achieved. Since the cleaning agent of Comparative Example 4 - l 〇 ° C is completely compatible and compatible with HFE-1, the cleaning is called vapor cleaning agent (10) Η) cannot be separated, and cannot be separately separated when cooled. Return to μ. The cleaning limit of 50 /c dissolved in ημ - 于 in Table 2 is 100 g / 100 g HFE-1) The recovery rate of -HTC, the rate of arrogance, up and recovery. As separation 317907 17 1330195

CXI Comparative Example 4 4cd or*_< C5 〇X 〇〇Comparative Example 3 CO Cvl 03 1 < CO oo 〇〇X 〇Comparative Example 2 LO CO οα 03 1 (s XXX 〇Comparative Example 1 οα 1 H LO XXXX Implementation Example 5 ooi-H CO (N1 oo CJi 〇〇〇〇 Example 4 c=> 〇1 < un CO i 1 CD cr> 〇〇〇〇Example 3 〇<〇卜寸 CO CO 1—H Cn 05 〇〇〇〇Example 2 C? CQ oa C<I r-H s 〇〇〇〇贲Example 1 t-4 inch CO 03 CO 〇〇〇〇50°C 40°C 30°C 20° C -10 ° C separation and recovery rate (% at -10 ° C) rosin solubility flux removal wax removal of vegetable oil removal in HFE-1 solubility (g / 100 g) 18 317907 1330195 rosin solubility Examples 1 to 5 and Comparative Examples 1 to 4, slag, zhibu 丨 n ν, detergent were subjected to rosin (Kanro (4) solubility test. Mixing (four) amount of each detergent and (four) amount of resin' t That is, the weight ratio of the detergent to the resin in the mixture is 4 〇 60 ′ to expose the mixture to ultrasonic radiation at room temperature (output 'Frequency Z', the product was visually inspected for 5 minutes to check for any insoluble parts. In Table 2, 〇 represents that the component is completely compatible, and X does not exhibit insoluble components, even if the insoluble component To a very small amount. From their,,, σ fruit's understanding that the cleaning agent of the example 丨1 5 exhibits high rosin solubility, while the rosin solubility of the cleaning agents of the comparative examples 1 to 2 is poor. The metal piece (50x50mm steel sheet with a thickness of 〇·03mm) was reflowed at 250 C for 30 seconds to evaluate the degree of flux removal, and the metal piece was coated with a rosin-based flux (SQ) at 9 positions. -1 030SZM-1, manufactured by Tamura Kaken) (1 mg per position). In a cleaning tank filled with 200 cm3 of detergent, the object to be cleaned is supercharged at a liquid temperature of 2 °C. Sound wave (output 1〇〇w, frequency 28kHz) to clean for 1 minute. After cleaning, check if the metal piece has a slight flux. If it is not found, it will be represented by 〇. From these results, I learned about the cleaning of examples 1 to 5. The agent exhibits removal of the high flux. The removal of the wax is performed by cleaning the metal sheet (50 x 50 mm copper sheet with a thickness of 0. 〇 3 mm) to evaluate the ability to remove the defect while the metal sheet is coated with 100 mg 萜. Aene 19 317907 1330195 . Look forward to the moon-based butterfly (Alcowax 542M, manufactured by Nikka Seiko), from the temperature to the ultrasonic radiation (output 100W, frequency 28kHz) to clear you for 30 seconds. In this evaluation, calculate the ratio of the wax residue (the weight ratio of the residual wax to the initial coating amount«)), and if the residual ratio is less than 15%, the ratio is shown in the table. Equal to or higher than 15% is represented by X. From the results, it was revealed that the cleaning agents of Examples 1 to 5 exhibited good removal of the wax. The removal of vegetable oil is carried out by using a 60-heart ultrasonic wave (output 100W, frequency 28 kHz) to the heart of '1111, and the coating contains 3〇〇mg to 4〇〇mg of castor oil (manufacturer: Kanto Kagaku) A thin layered sheet of metal (made of stainless steel with a diameter of 3 而 and a thickness of 1 〇 mm) to assess the extent of vegetable oil removal. In this evaluation, the ratio of the vegetable oil residue (weight ratio (%) of the remaining vegetable oil to the initial coating amount) is calculated, and if the residue ratio is less than 15%, it is expressed by ' if the residue ratio is equal to or Above 15%, in the results of X, it is understood that the cleaning agents of Examples i to 5 exhibit high vegetable oil removal. Industrial Applicability The detergent composition of the present invention does not cause any environmental problems, such as • the ozone layer is broken, and the specified amount is rarely a dangerous substance; the reduction due to evaporation: the consumption of the shell can be cleaned under heating; Drying effect; recycling is simple. Accordingly, the present invention facilitates the removal of fluxes, waxes, mechanical oils, and the like, particularly scum composites attached to such materials as electrical and electronic components, optical components, automotive parts, precision mechanical parts, and other components thereof. BRIEF DESCRIPTION OF THE DRAWINGS 317907 20 1330195 FIG. 1 is a view showing the detergent composition of the present invention in 1,1,2,2-tetrafluoroethyl 2,2,2-trifluoroethyl ether (which is an HFE). A chart of solubility.

21 317907

Claims (1)

Call 〇195 -------- ϋ/) Original patent application scope::, - Patent Application No. 95406542: Eight (993⁄4]^ 15 a) . A detergent composition, 'including 2 〇 to 6 〇 weight % of a saturated hydrocarbon having a boiling point of from 2 Torr to 350 ° C, and from 4 to 8 % by weight of an aliphatic hydrocarbon derivative having a hydroxyl group and an ester of acetic acid, wherein the detergent composition has a flash point of at least 7 ( TC. The detergent composition of claim 1 wherein the carbon number of the remainder and the hydrocarbon is 12 to 19. · The cleaning composition of claim 1 or 2, wherein the acetic acid The ester is 3-methyl-3-methoxybutyl acetate. The cleaning method of the invention includes the cleaning of the cleaning agent to be cleaned by the cleaning agent composition of any of the above-mentioned patent scopes 1 to 3. The object is then infiltrated and rinsed in a hydrofluorocarbon or hydrofluoric test. The cleaning method includes the following steps: • cleaning the object to be cleaned by the cleaning method of claim 4; Dissolving the article with a strip of vapor of a hydrofluorocarbon or hydrofluorocarbon; and drying the article; wherein the detergent composition is compatible with the hydrofluorocarbon vapor clean Blending, so that the detergent composition on the surface of the cleaned object will be fluorinated by hydrofluorocarbon or hydrofluorication, and the hydrogen containing the detergent composition::: Or (4) the ether is divided into two layers by cooling, and the two layers can be recovered. 317907 Rev. 22 1330195 Patent Application No. 95106542 (January 15, 1999) 6. The cleaning method of claim 4 or 5. Where the hydrogen fluoride or hydrofluoroether has a flash point of 4 30 to 15 (TC. 23 317907 Revised Edition)