JPH09253592A - Totally enclosed washer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely prevent a detergent of high volatility from leaking to working environment by housing an ultrasonic washing part, a part basket mounting belt conveyorpart, a rinse washing part and a vapor washing part in a device body and carrying in and out a part basket through a shutter. SOLUTION: A washing basket containing material to be washed is placed in a carry-in belt conveyor 14, and a carry-in side shutter 7 is opened to carry the basket onto a belt conveyor 5', and then, the shutter 7 is closed. Next, a shutter 6 is driven to immerse the whole basket on the conveyor 5' in washing liquid 3 in a washing tank 1, and ultrasonic washing is performed by an ultrasonic washing element 2. After washing, the conveyor 5' is returned to its original position, and then, rinse liquid is sprayed from a nozzle to perform rinse washing. Successively, vapor is jetted into a vessel from a still 10 to fill it with it to perform vapor washing and drying. Next, a mist separator 13 is driven and the vapor is liquefied and housed in a solvent recovery tank, and then, a carry-out shutter 8 is opened to carry out the basket.

Description

Detailed Description of the Invention

[0001] The present invention relates to a method for cleaning components such as metals, ceramics, glass, plastics, substrates, etc., which are processed in various manufacturing industries, for the purpose of degreasing and defluxing, and cleaning such as surface cleaning. The present invention relates to an industrial cleaning device.

[Prior Art] Conventionally, as a cleaning agent in the industrial field, a non-flammable solvent such as CFC-113 which is a chlorofluorocarbon-based solvent or 1.1.1-trichloroethane which is a chlorine-based solvent has been used in a cleaning tank. Many open-type cleaning devices have been used, which consist of a steam cleaning tank. However, when these substances become unusable due to problems such as destruction of the ozone layer and pollution of the global environment, hydrocarbon solvents and PFC (perfluorocarbon) have begun to be widely used as alternative cleaning agents. Although some measures have been taken to reduce the consumption of liquid, a modified version of the conventional type has been used in most cases.

[Problems to be Solved by the Invention] The present invention is proposed from the viewpoint that there can be no substance that is completely harmless to the human body and to the environment. The allowable concentration of any substance is specified, but even if the safety is sufficiently confirmed, it will be discovered that after several years it is a substance that impairs carcinogenicity and sexual function, It is not uncommon to hear disturbing findings, including the fear of global warming. Furthermore, there are many cases where a small amount of use did not cause a social problem but later caused a serious problem. In the semiconductor manufacturing process, a large amount of highly toxic substances such as hydrofluoric acid and arsenic are handled, but facilities are basically built based on the idea that no one droplet leaks outside. Therefore, the equipment is extremely expensive.
The present invention intends to provide a space-saving and economical general-purpose cleaning apparatus while utilizing this concept.

[Means for Solving the Problems] A closed type cleaning apparatus according to the present invention stores an object to be cleaned, an ultrasonic cleaning section for removing oil and flux adhering to the object to be cleaned by applying ultrasonic waves. A belt conveyor for mounting a parts car with the function of driving the plurality of parts cages from the entrance to the exit to the left and right.The belt conveyor is driven up and down and immersed in the liquid in the cleaning tank or A vertical drive mechanism with a function to return to the position, a rinsing part consisting of a jet injection nozzle provided for rinsing the parts after ultrasonic cleaning, The apparatus comprises a steam cleaning section for performing precision finishing cleaning and precision drying, and a cleaning apparatus for accommodating all of these parts and having a port for carrying in and out parts.

Further, in order to repeatedly use the cleaning agent, the liquid in the cleaning tank is constantly distilled, and further, in order to use the cleaning agent as a rinse cleaning agent and as a steam cleaning agent,
It is desirable from a practical point of view to connect a distiller inside or outside the closed type cleaning device.

Further, by providing a mist separator provided for collecting the mist after the steam cleaning as quickly as possible and drying the parts in a short time, the leakage of the steam when the shutter is opened and closed is avoided as much as possible. It becomes possible.

[0007] Furthermore, in order to automate the whole of the closed type cleaning apparatus, this can be achieved by installing an electric control mechanism.

[0008] A belt conveyor for transporting cleaning parts is provided before and after the shutter opening / closing section.

[Embodiment of the Invention] Hereinafter, a closed type cleaning apparatus according to the present invention will be described. First, cleaning agents applicable to this cleaning apparatus are not particularly limited, but include the aforementioned CFC-113 (boiling point of 47 ° C., the same applies hereinafter) which can be used for a period of time in a developing country. 1.
1. Trichloroethylene (87.2 ° C., CHCl = CH ₂ ), tetrachloroethylene (121.2 ° C., CCl ₂ = CC), including 1.1-trichloroethane (74 ° C.)
l ₂ ), dichloromethane (methylene chloride, CH ₂ C
l _2), such as, HCFC in HCFC-225ca (5
1.1 ° C., CF ₃ CF ₂ CHCl ₂ ), HCFC-22
For HFC such as 5cb (56.1 ° C., CClF ₂ CF ₂ CHClF), HFC-43-10mee (55 ° C.,
C ₅ H ₂ F ₁₀ ), a detergent in combination with other azeotropic compounds, for example, an azeotropic compound with methanol (D
u'pont, XM (boiling point 46 ° C), azeotropic compound with ethanol (Du'pont, XE (boiling point 52)
C)), an azeotropic compound with trans-1.2-dichloroethylene (Du'pont, MCA (boiling point 38C)),
Furthermore, an azeotropic compound of MCA and methanol (Du'po
nt Co., SMT (boiling point 37 ° C.)) such _{as, C 4 F 9 O-CH} 3 is US 3M Co. The PFC (boiling point 60
_{℃), C 4 F 9 O} -C 2 H 5 ( boiling point 73 ° C.), such as azeotropic compounds and the like such as methanol or ethanol,
As the bromine-based cleaning agent, isopropyl bromide (isopropyl bromide, boiling point 60 ° C., CH ₃ CHBrC
H _3), bromide (n-) propyl (propyl bromide,
_{71 ℃, CH 3 CH 2 CH} 2 Br) , and the like. These series of cleaning agents broadly include not only the cleaning agents used in the past but also the recently developed cleaning agents. All of the cleaning agents listed are nonflammable and less volatile. Also, flammable volatile organic cleaning agents, steam finishing agents after cleaning, and the like are objects to which the sealed cleaning apparatus according to the present invention is applied. Since the above-mentioned cleaning agents have various KB values indicating the detergency, they are generally used separately according to the degree of contamination of the object to be cleaned.

[0010] As described above, there are various types of cleaning agents, and their allowable concentrations and toxicity levels vary widely (including those under some tests). The device is intended to be proposed based on the idea that no cleaning agent basically leaks out of the device at all. Next, an embodiment of a novel closed-type cleaning apparatus based on the concept will be described with reference to the drawings. FIG. 1 shows a first embodiment showing the internal structure of a closed type cleaning apparatus according to the present invention. That is,
FIG. 1 shows a front view (lower part) and a drawing (upper part) viewed from above at the same time.

The ultrasonic cleaning unit has a structure in which a cleaning tank 1 having an ultrasonic element 2 at the bottom is filled with a cleaning agent 3. On the other hand, the rinsing section 4 is a section for performing rinsing cleaning by injecting a rinsing liquid from above and below four directions to the component after ultrasonic cleaning. The mechanism unit 5 for vertically driving the parts car is a belt conveyor on which a plurality of cleaning cars (six pieces are shown in the figure) containing parts containing objects to be cleaned are mounted. Function to immerse the object to be cleaned in the liquid together with the belt conveyor, return it to its original position, and automatically take out the parts basket after steam cleaning by electric control as described later. Having. The shutter mechanism section is provided at the carry-in port 7 and the carry-out port 8 of the component. A carry-in entrance shutter 7 and a carry-out exit shutter 8 provided in each of the left and right openings 7'and 8'having the ultrasonic cleaning units 1 to 3, the rinse cleaning unit 4, the vertical and horizontal drive mechanism unit 5, and the shutter mechanism unit. Is stored in the cleaning device body 9 which is a closed container.

The distiller 10 has a function of distilling a dirty cleaning agent. For example, the above-mentioned detergent is generally 100 ° C. or lower except for the boiling point of tetrachloroethylene of 121.2 ° C. On the other hand, since the boiling points of machine oil, wax, and flux are around 170 to 300 ° C, the cleaning agent mixed with these contaminants after parts cleaning is heated by the heater to a temperature slightly higher than the boiling point. Then, it can be easily taken out as a pure solvent that can be reused. At that time, these contaminants and the like remaining as distillation residue are removed as a pot residue and disposed of. Therefore, the cleaning agent recovered by distillation can be reused as a rinse cleaning agent, and as shown in FIG. 2, the steam is sprayed from the openings 11 and 12 as a steam cleaning agent by opening and closing the valve. Steam cleaning can be performed.

As shown in FIG. 2 in one embodiment, the mist separator section 13 opens and closes the shutter by collecting mist after steam cleaning as soon as possible and at the same time operating a suction blower to accelerate drying. Occasionally it is possible to eliminate almost no cleaning agent dissipation.

FIG. 1 shows other components according to the present invention. A carry-in belt conveyor unit 14, a carry-out belt conveyor unit 15, and a cleaning basket 1 containing a cleaning object.
6. An electric control box 17 having a function of centrally controlling a motor, a heater, a sensor, and the like of the cleaning device, and the like are attached.

The operation function of the completely closed type cleaning apparatus according to the present invention described in detail above as an example of the embodiment is as follows. In FIG. 1, when a predetermined number of cleaning cars containing the objects to be cleaned are set on the carry-in belt conveyor 14, the carry-in side shutter 7 is opened and the cleaning car is placed on the belt conveyor 5'arranged in the cleaning device. After transporting, the shutter is closed.

Next, the cylinder 6 is driven downward to immerse the entire component basket on the belt conveyor 5'into the cleaning agent 3 in the cleaning tank 1, and the ultrasonic cleaning element 2 is operated to ultrasonically clean the same. Do. This work depends on the object to be cleaned, but usually 3
It takes about 5 minutes. Thereafter, the air cylinder 6 is driven to return the entire belt conveyor to the original position.

Next, rinsing is performed by vigorously spraying a rinsing liquid from a nozzle.

After the above operation, the valve is opened and the distillation machine 1 is opened.
From 0, steam cleaning is performed by injecting and filling steam into the container. In this steam cleaning, when the temperature of the object to be cleaned reaches the temperature of steam, dew condensation ends and the parts are dried.

After that, the mist separator 13 is driven to collect the vapor in the container, liquefy it, and store it in the solvent recovery tank.

When the vapor is completely recovered, the carry-out port shutter 8 is opened, the whole component car is carried out by the carry-out side belt conveyor 15, and the shutter 8 is closed. Thereafter, by repeating this operation, the cleaning of new dirty parts is continued.

FIG. 3 shows another embodiment, which is an example of the completely sealed cleaning apparatus according to the present invention when the carry-in / out port is the same. It is effective to carry in / out only in one direction depending on the restrictions on the installation space, the production volume, and the layout before and after. It should be noted that in cleaning the hollow hole parts and the like, it is also possible to drive a rotating car on the belt conveyor by gears or the like for cleaning.

[Effects of the Invention] As described in detail above, according to the present invention, even if the cleaning agent has a low boiling point and a large volatility, it is possible to obtain a cleaning agent having excellent cleaning ability and low cost. When used, the completely sealed cleaning device can be provided which has substantially no safety to the human body, environment, disaster prevention, etc. by virtually eliminating leakage to the working environment.

[Brief description of drawings]

FIG. 1 is an internal structure of a completely closed type cleaning apparatus according to the present invention.

FIG. 2 shows the configuration of a steam cleaning section of the completely closed type cleaning apparatus according to the present invention.

FIG. 3 is a completely closed type cleaning apparatus according to the present invention when the carry-in / out port is the same.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Cleaning tank, 9 ... Cleaning device main body 2 ... Ultrasonic element, 10 ... Distiller 3 ... Cleaning agent, 11 ... Opening part 4 ... Rinse washing part, 12 ... Opening part 5 ... Vertical and horizontal drive mechanism part, 13 ... Mist Separator 5 '... Belt conveyor, 14 ... Carry-in belt conveyor 6 ... Air cylinder, 15 ... Carry-out belt conveyor 7 ... Carry-in shutter, 16 ... Washing basket 7' ... Carry-in opening, 17 ... Electrical control box 8 ... Carry-out shutter, 8 '... unloading opening,

Claims (5)

[Claims] 1. An ultrasonic cleaning unit comprising a cleaning tank having an ultrasonic vibrator at the bottom and a cleaning agent stored therein, and a function of driving a plurality of component cars containing an object to be cleaned from the carry-in port to the carry-out port from side to side. It has a function of immersing the belt conveyor in the cleaning liquid and returning it to its original position by hanging the belt conveyor with air cylinders at the four corners from the ceiling and driving it up and down. Up / down / left / right drive mechanism section, Rinse cleaning section having the function of spraying rinse liquid from the upper and lower surfaces to rinse components after ultrasonic cleaning, Rinse vapor obtained by heating the cleaning agent above the boiling point from the distiller After cleaning, a steam cleaning unit that has a function of spraying steam on the parts to perform steam cleaning and drying, a shutter opening / closing mechanism that stores all of these and loads and unloads a component car to the left and right, and the steam Completely sealed cleaning device with a sealed structure equipped with a steam intake that takes in cleaning agent vapor into the container during cleaning 2. The completely sealed type according to claim 1, comprising a distiller having a function of repeatedly using a cleaning agent, a function of supplying a clean rinse liquid, and a function of generating steam for supplying steam. Cleaning equipment 3. The method according to claim 1, wherein the cleaning agent vapor in the storage container having a closed structure for performing the vapor cleaning is liquefied and condensed as the temperature in the container decreases and is recovered in the cleaning tank. Completely sealed cleaning device equipped with a mist separator that condenses the cleaning agent vapor in a short time in order to shorten the processing time. 4. The cleaning apparatus according to claim 1, wherein a belt conveyor device capable of automatically or manually feeding a component car is installed at a carry-in port and a carry-out port of the cleaning apparatus. 5. The cleaning device according to claim 1, 2, 3, or 4, wherein the positions of the entrance and exit of the cleaning component in the cleaning device are carried out to only one side instead of being provided on the left and right sides of the cleaning device. A space-saving and economical cleaning device characterized by having one inlet and a belt conveyor only on one side.