JPH10275018A5 - - Google Patents

Info

Publication number
JPH10275018A5
JPH10275018A5 JP1997081185A JP8118597A JPH10275018A5 JP H10275018 A5 JPH10275018 A5 JP H10275018A5 JP 1997081185 A JP1997081185 A JP 1997081185A JP 8118597 A JP8118597 A JP 8118597A JP H10275018 A5 JPH10275018 A5 JP H10275018A5
Authority
JP
Japan
Prior art keywords
laminated piezoelectric
piezoelectric element
section
element body
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997081185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10275018A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9081185A priority Critical patent/JPH10275018A/ja
Priority claimed from JP9081185A external-priority patent/JPH10275018A/ja
Publication of JPH10275018A publication Critical patent/JPH10275018A/ja
Publication of JPH10275018A5 publication Critical patent/JPH10275018A5/ja
Pending legal-status Critical Current

Links

JP9081185A 1997-03-31 1997-03-31 マスフローコントローラ Pending JPH10275018A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9081185A JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9081185A JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Publications (2)

Publication Number Publication Date
JPH10275018A JPH10275018A (ja) 1998-10-13
JPH10275018A5 true JPH10275018A5 (enExample) 2005-02-03

Family

ID=13739418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9081185A Pending JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Country Status (1)

Country Link
JP (1) JPH10275018A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
DE102016112115B4 (de) 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179584A (ja) * 1987-01-21 1988-07-23 Toshiba Corp 変位発生装置
JPH01144690A (ja) * 1987-11-30 1989-06-06 Ohkura Electric Co Ltd 積層圧電アクチュエータ
JPH01147410U (enExample) * 1988-03-30 1989-10-12
JP2814378B2 (ja) * 1988-06-20 1998-10-22 忠弘 大見 マスフローコントローラ
JP2735578B2 (ja) * 1988-09-20 1998-04-02 東陶機器株式会社 湯水混合装置
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置

Similar Documents

Publication Publication Date Title
EP1489477A4 (en) MASS FLOW REGULATOR
EP0165407A3 (en) Flow control valve with piero-electric actuator
JPH10275018A5 (enExample)
JP2005030888A (ja) 流量・液種検知装置および流量・液種検知方法
WO2003014554A1 (en) Device for controlling throttle valve
CN101258321B (zh) 发动机用进气装置
JP2546242Y2 (ja) 建設機械の油圧回路
CA2199643A1 (en) System for controlling the flow of temperature control fluid
JP2615059B2 (ja) 湯水混合装置
JPH073035Y2 (ja) 液体ポンプ
JPH0740175Y2 (ja) 流量制御装置
JP2580711B2 (ja) 内燃機関の弁駆動装置
JPH068371Y2 (ja) 流体制御弁
JP3073431B2 (ja) 双方向流れの流体制御装置
JP2007247488A (ja) 排気圧力制御装置
JPH0257780A (ja) 湯水混合装置
JPS62247165A (ja) エンジンの排気ガス再循環制御装置
JPS63233203A (ja) ボイラ−の薬液自動注入装置
JP3047546B2 (ja) 流量制御装置
JPS6477717A (en) Exhaust gas purifying device for diesel engine
KR100270766B1 (ko) 압력센서를 이용한 유량제어장치
JPH051627A (ja) 内燃機関の電子制御装置
JPS57173536A (en) Fuel feed controller of internal combustion engine
JPH0643274Y2 (ja) 便所装置
JPH0257781A (ja) 湯水混合装置