JPH10275018A - マスフローコントローラ - Google Patents

マスフローコントローラ

Info

Publication number
JPH10275018A
JPH10275018A JP9081185A JP8118597A JPH10275018A JP H10275018 A JPH10275018 A JP H10275018A JP 9081185 A JP9081185 A JP 9081185A JP 8118597 A JP8118597 A JP 8118597A JP H10275018 A JPH10275018 A JP H10275018A
Authority
JP
Japan
Prior art keywords
flow rate
piezoelectric element
sensor
mass flow
laminated piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9081185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10275018A5 (enExample
Inventor
Yasuo Sakaguchi
泰雄 坂口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP9081185A priority Critical patent/JPH10275018A/ja
Publication of JPH10275018A publication Critical patent/JPH10275018A/ja
Publication of JPH10275018A5 publication Critical patent/JPH10275018A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Flow Control (AREA)
JP9081185A 1997-03-31 1997-03-31 マスフローコントローラ Pending JPH10275018A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9081185A JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9081185A JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Publications (2)

Publication Number Publication Date
JPH10275018A true JPH10275018A (ja) 1998-10-13
JPH10275018A5 JPH10275018A5 (enExample) 2005-02-03

Family

ID=13739418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9081185A Pending JPH10275018A (ja) 1997-03-31 1997-03-31 マスフローコントローラ

Country Status (1)

Country Link
JP (1) JPH10275018A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007083439A1 (ja) * 2006-01-18 2007-07-26 Fujikin Incorporated ノーマルオープン型の圧電素子駆動式金属ダイヤフラム型制御弁
DE102016112115A1 (de) * 2016-07-01 2018-01-04 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179584A (ja) * 1987-01-21 1988-07-23 Toshiba Corp 変位発生装置
JPH01144690A (ja) * 1987-11-30 1989-06-06 Ohkura Electric Co Ltd 積層圧電アクチュエータ
JPH01147410U (enExample) * 1988-03-30 1989-10-12
JPH01318924A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JPH0282670A (ja) * 1988-09-20 1990-03-23 Toto Ltd 湯水混合装置
JPH08338546A (ja) * 1995-06-12 1996-12-24 Fujikin:Kk 圧力式流量制御装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179584A (ja) * 1987-01-21 1988-07-23 Toshiba Corp 変位発生装置
JPH01144690A (ja) * 1987-11-30 1989-06-06 Ohkura Electric Co Ltd 積層圧電アクチュエータ
JPH01147410U (enExample) * 1988-03-30 1989-10-12
JPH01318924A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JPH0282670A (ja) * 1988-09-20 1990-03-23 Toto Ltd 湯水混合装置
JPH08338546A (ja) * 1995-06-12 1996-12-24 Fujikin:Kk 圧力式流量制御装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007083439A1 (ja) * 2006-01-18 2007-07-26 Fujikin Incorporated ノーマルオープン型の圧電素子駆動式金属ダイヤフラム型制御弁
JP2007192269A (ja) * 2006-01-18 2007-08-02 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
US8181932B2 (en) 2006-01-18 2012-05-22 Fujikin Incorporated Normally open type piezoelectric element driven metal diaphragm control valve
US8191856B2 (en) 2006-01-18 2012-06-05 Fujilin Incorporated Piezoelectric element driven metal diaphragm control valve
DE102016112115A1 (de) * 2016-07-01 2018-01-04 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
US10247326B2 (en) 2016-07-01 2019-04-02 Buerkert Werke Gmbh & Co. Kg Linear valve drive and valve
DE102016112115B4 (de) * 2016-07-01 2025-10-23 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil

Similar Documents

Publication Publication Date Title
US5927325A (en) Microelectromechanical machined array valve
US4685331A (en) Thermal mass flowmeter and controller
JP5933936B2 (ja) 流量測定システム、流量制御システム、及び、流量測定装置
US10114385B2 (en) Fluid control valve
JP4186831B2 (ja) 質量流量制御装置
JP5808537B2 (ja) 流量測定機構及びマスフローコントローラ
US7591177B2 (en) Flow sensor and mass flow controller using the same
WO2024067123A1 (zh) 一种基于相变材料的高灵敏度热式微流量传感器
JPH0863235A (ja) 差圧式質量流量コントロール装置
US7789371B2 (en) Low-power piezoelectric micro-machined valve
JP2004500249A (ja) マイクロメカニカル装置をマニホルドに取付ける方法、およびそれによって製造された流体制御システム。
JP5874193B2 (ja) 流量制御装置および流量センサユニット
JP5833403B2 (ja) 流体機構及び該流体機構を構成する支持部材
JPH10275018A (ja) マスフローコントローラ
US6878472B2 (en) Air mass flow controller
JP2002099330A (ja) 流量制御装置
JP4170945B2 (ja) 漏れ検査システム
JP7775040B2 (ja) 流体制御バルブ及び流体制御装置
JP4576597B2 (ja) 耐腐食性集積化マスフローコントローラ
JP3818547B2 (ja) 質量流量制御装置
EP1503186B1 (en) Thermal flowmeter
JPH01288725A (ja) 流量センサ
JP6082082B2 (ja) 流体機構及び該流体機構を構成する支持部材
US11268839B2 (en) Resistive flow sensor
JP4752086B2 (ja) 質量流量制御装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040226

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040226

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20051208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060106

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060512