JPH10274844A5 - - Google Patents

Info

Publication number
JPH10274844A5
JPH10274844A5 JP1997080666A JP8066697A JPH10274844A5 JP H10274844 A5 JPH10274844 A5 JP H10274844A5 JP 1997080666 A JP1997080666 A JP 1997080666A JP 8066697 A JP8066697 A JP 8066697A JP H10274844 A5 JPH10274844 A5 JP H10274844A5
Authority
JP
Japan
Prior art keywords
acid
group
photosensitive composition
positive
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997080666A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10274844A (ja
JP3778391B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP08066697A external-priority patent/JP3778391B2/ja
Priority to JP08066697A priority Critical patent/JP3778391B2/ja
Priority to US09/050,007 priority patent/US6037098A/en
Priority to EP98105753A priority patent/EP0869393B1/en
Priority to DE69800164T priority patent/DE69800164T2/de
Priority to KR1019980011177A priority patent/KR100496174B1/ko
Publication of JPH10274844A publication Critical patent/JPH10274844A/ja
Publication of JPH10274844A5 publication Critical patent/JPH10274844A5/ja
Publication of JP3778391B2 publication Critical patent/JP3778391B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08066697A 1997-03-31 1997-03-31 ポジ型感光性組成物 Expired - Fee Related JP3778391B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP08066697A JP3778391B2 (ja) 1997-03-31 1997-03-31 ポジ型感光性組成物
US09/050,007 US6037098A (en) 1997-03-31 1998-03-30 Positive photosensitive composition
EP98105753A EP0869393B1 (en) 1997-03-31 1998-03-30 Positive photosensitive composition
DE69800164T DE69800164T2 (de) 1997-03-31 1998-03-30 Positiv-arbeitende photoempfindliche Zusammensetzung
KR1019980011177A KR100496174B1 (ko) 1997-03-31 1998-03-31 포지티브감광성조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08066697A JP3778391B2 (ja) 1997-03-31 1997-03-31 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH10274844A JPH10274844A (ja) 1998-10-13
JPH10274844A5 true JPH10274844A5 (enrdf_load_stackoverflow) 2004-10-07
JP3778391B2 JP3778391B2 (ja) 2006-05-24

Family

ID=13724697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08066697A Expired - Fee Related JP3778391B2 (ja) 1997-03-31 1997-03-31 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3778391B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4190146B2 (ja) * 2000-12-28 2008-12-03 富士フイルム株式会社 電子線またはｘ線用ポジ型レジスト組成物
JP3909818B2 (ja) * 2001-11-12 2007-04-25 富士フイルム株式会社 ポジ型レジスト組成物
JP4677353B2 (ja) * 2005-02-18 2011-04-27 富士フイルム株式会社 レジスト組成物、該レジスト組成物に用いる化合物及び該レジスト組成物を用いたパターン形成方法
JP4617252B2 (ja) * 2005-12-22 2011-01-19 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4958584B2 (ja) * 2006-02-28 2012-06-20 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4996898B2 (ja) * 2006-03-27 2012-08-08 富士フイルム株式会社 ポジ型レジスト組成物およびそれを用いたパターン形成方法
JP5140354B2 (ja) * 2006-09-19 2013-02-06 富士フイルム株式会社 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法
JP5763433B2 (ja) * 2010-06-29 2015-08-12 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法

Similar Documents

Publication Publication Date Title
JP2001330947A5 (enrdf_load_stackoverflow)
JP2004117688A5 (enrdf_load_stackoverflow)
JP2001183837A5 (enrdf_load_stackoverflow)
JPH10274845A5 (enrdf_load_stackoverflow)
JP2004101706A5 (enrdf_load_stackoverflow)
JP2002090988A5 (enrdf_load_stackoverflow)
JP2002049156A5 (enrdf_load_stackoverflow)
JP2001318464A5 (enrdf_load_stackoverflow)
JP2002236358A5 (enrdf_load_stackoverflow)
JPH10274844A5 (enrdf_load_stackoverflow)
JP2004271629A5 (enrdf_load_stackoverflow)
JP2002202608A5 (enrdf_load_stackoverflow)
JP2001249458A5 (enrdf_load_stackoverflow)
JPH11344808A5 (enrdf_load_stackoverflow)
JP2000231194A5 (enrdf_load_stackoverflow)
JPH10282669A5 (enrdf_load_stackoverflow)
JP2000352822A5 (enrdf_load_stackoverflow)
JP2001330957A5 (enrdf_load_stackoverflow)
JP2001066779A5 (enrdf_load_stackoverflow)
JP2000347410A5 (enrdf_load_stackoverflow)
JPH10239846A5 (enrdf_load_stackoverflow)
JP2002221795A5 (enrdf_load_stackoverflow)
JP2002006495A5 (enrdf_load_stackoverflow)
JP2000338680A5 (enrdf_load_stackoverflow)
JP2000147774A5 (enrdf_load_stackoverflow)