JPH10282669A5 - - Google Patents

Info

Publication number
JPH10282669A5
JPH10282669A5 JP1997055224A JP5522497A JPH10282669A5 JP H10282669 A5 JPH10282669 A5 JP H10282669A5 JP 1997055224 A JP1997055224 A JP 1997055224A JP 5522497 A JP5522497 A JP 5522497A JP H10282669 A5 JPH10282669 A5 JP H10282669A5
Authority
JP
Japan
Prior art keywords
group
acid
groups
carbon atoms
branched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997055224A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10282669A (ja
JP3890358B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP05522497A priority Critical patent/JP3890358B2/ja
Priority claimed from JP05522497A external-priority patent/JP3890358B2/ja
Publication of JPH10282669A publication Critical patent/JPH10282669A/ja
Publication of JPH10282669A5 publication Critical patent/JPH10282669A5/ja
Application granted granted Critical
Publication of JP3890358B2 publication Critical patent/JP3890358B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP05522497A 1996-03-11 1997-03-10 ポジ型感光性樹脂組成物及びパターン形成方法 Expired - Fee Related JP3890358B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05522497A JP3890358B2 (ja) 1996-03-11 1997-03-10 ポジ型感光性樹脂組成物及びパターン形成方法

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP5331696 1996-03-11
JP8-138918 1996-05-31
JP13891896 1996-05-31
JP16797696 1996-06-27
JP8-167976 1996-06-27
JP2711197 1997-02-10
JP8-53316 1997-02-10
JP9-27111 1997-02-10
JP05522497A JP3890358B2 (ja) 1996-03-11 1997-03-10 ポジ型感光性樹脂組成物及びパターン形成方法

Publications (3)

Publication Number Publication Date
JPH10282669A JPH10282669A (ja) 1998-10-23
JPH10282669A5 true JPH10282669A5 (enrdf_load_stackoverflow) 2004-10-07
JP3890358B2 JP3890358B2 (ja) 2007-03-07

Family

ID=27520898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05522497A Expired - Fee Related JP3890358B2 (ja) 1996-03-11 1997-03-10 ポジ型感光性樹脂組成物及びパターン形成方法

Country Status (1)

Country Link
JP (1) JP3890358B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001125268A (ja) * 1999-10-28 2001-05-11 Sony Corp 露光方法
JP4177966B2 (ja) * 2001-01-25 2008-11-05 富士フイルム株式会社 ポジ型フォトレジスト組成物
JP2002229210A (ja) * 2001-02-06 2002-08-14 Fuji Photo Film Co Ltd ポジ型レジスト組成物
US7678528B2 (en) * 2005-11-16 2010-03-16 Az Electronic Materials Usa Corp. Photoactive compounds
JP2008120700A (ja) * 2006-11-08 2008-05-29 San Apro Kk スルホニウム塩
JP5514583B2 (ja) 2009-03-13 2014-06-04 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP2020015713A (ja) * 2018-07-11 2020-01-30 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法
US20230013430A1 (en) * 2019-11-12 2023-01-19 Toyo Gosei Co., Ltd. Sulfonium salt, acid generator, resist composition, and method for producing device

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