JPH10264130A - Ceramic base with break groove and electronic component manufactured from the ceramic base - Google Patents

Ceramic base with break groove and electronic component manufactured from the ceramic base

Info

Publication number
JPH10264130A
JPH10264130A JP9497097A JP9497097A JPH10264130A JP H10264130 A JPH10264130 A JP H10264130A JP 9497097 A JP9497097 A JP 9497097A JP 9497097 A JP9497097 A JP 9497097A JP H10264130 A JPH10264130 A JP H10264130A
Authority
JP
Japan
Prior art keywords
break
ceramic substrate
groove
grooves
dummy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9497097A
Other languages
Japanese (ja)
Inventor
Noriyasu Kawamuki
徳康 川向
Yasuo Yokoyama
康夫 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP9497097A priority Critical patent/JPH10264130A/en
Publication of JPH10264130A publication Critical patent/JPH10264130A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0097Processing two or more printed circuits simultaneously, e.g. made from a common substrate, or temporarily stacked circuit boards

Landscapes

  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To simplify machining for break grooves and to prevent cracking at the time of packaging, printing, carrying and others. SOLUTION: Break grooves 2 and 3 are formed longitudinally and laterally in the surface of a ceramic base 1 and this base is divided into individual bases by breaking it along these break grooves. Dummy parts 5 are formed in the peripheral part of the ceramic base 1, while a product part 4 is formed inside them, and the longitudinal and lateral break grooves 2 and 3 are formed in continuity from the product part 4 to the dummy parts 5. The break grooves extending from the outermost-side break grooves 2a and 3a to the dummy parts 5 are formed to be shallow in comparison with the break grooves 2 and 3 dividing the product part 4 and the outermost-side break grooves 2a and 3a partitioning the product part from the dummy parts, and therefore the strength of the ceramic base l can be ensured.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は一枚の母材から複数
の基板に分割するのに適したブレーク溝付きセラミック
基板に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic substrate with break grooves suitable for dividing a single base material into a plurality of substrates.

【0002】[0002]

【従来の技術】従来、この種のブレーク溝付きセラミッ
ク基板として、表面に縦横にブレーク溝を形成し、これ
らブレーク溝に沿ってブレークすることにより個々の基
板に分割するようにしたものが知られている。
2. Description of the Related Art Heretofore, as this type of ceramic substrate with a break groove, there has been known a ceramic substrate in which break grooves are formed vertically and horizontally on the surface, and the substrate is divided into individual substrates by breaking along these break grooves. ing.

【0003】このようなセラミック基板の場合、まずブ
レーク溝を縦横に形成しておき、このブレーク溝付のセ
ラミック基板の表面に電極を形成するとともに、電子部
品素子を搭載し、その後でブレーク溝に沿って分割する
ようになっている。しかしながら、上記のようにブレー
ク溝が縦横に形成されていると、電子部品素子の実装時
や電極の印刷時などにセラミック基板に荷重が加わる
と、ブレーク溝の部分で割れてしまう恐れがある。その
ため、セラミック基板の強度を確保するためにブレーク
溝をある程度浅くしなければならないが、これではセラ
ミック基板をブレークする際にバリや欠けが発生しやす
いという問題があった。特に、個々の基板の大きさが数
mm角程度の微小な電子部品の場合、僅かなバリや欠け
でも不良品となってしまう。
In the case of such a ceramic substrate, first, break grooves are formed vertically and horizontally, electrodes are formed on the surface of the ceramic substrate having the break grooves, and electronic component elements are mounted. It is designed to be split along. However, if the break grooves are formed vertically and horizontally as described above, when a load is applied to the ceramic substrate during mounting of an electronic component element or printing of an electrode, the break grooves may be broken at the break grooves. Therefore, in order to ensure the strength of the ceramic substrate, the break groove must be made shallow to some extent. However, this has a problem that burrs and chips are likely to occur when breaking the ceramic substrate. In particular, in the case of a minute electronic component having a size of each substrate of about several mm square, even a slight burr or chip may result in a defective product.

【0004】そこで、特開平9−11221号公報に記
載のように、周縁部にダミー部を形成し、ダミー部を除
いて複数のブレーク溝を格子状に形成したものが知られ
ている。最外側のブレーク溝はその4つの交点から基板
の縁端部に至る途中まで外側に延びており、45度で傾
斜する傾斜ブレーク溝を各交点よりも縁端部側で、かつ
最外側の縦横のブレーク溝の先端寄り位置を斜めに横断
する形で設けてある。そして、まず傾斜ブレーク溝に沿
ってブレークした後、最外側のブレーク溝に沿ってブレ
ークすることにより、従来と同様にブレークできるよう
になっている。
[0004] Therefore, as described in Japanese Patent Application Laid-Open No. 9-112221, there has been known a structure in which a dummy portion is formed on a peripheral portion, and a plurality of break grooves are formed in a lattice shape excluding the dummy portion. The outermost break grooves extend outwardly from the four intersections to a part of the way to the edge of the substrate, and the inclined break grooves inclined at 45 degrees are arranged on the edge end side of each intersection and on the outermost vertical and horizontal sides. The groove is provided so as to obliquely cross the position near the tip of the break groove. Then, first, a break is made along the inclined break groove, and then a break is made along the outermost break groove, so that a break can be performed as in the conventional case.

【0005】この場合には、縦横のブレーク溝が周縁ま
で至らず、ダミー部の途中で終端となっているため、ダ
ミー部の強度が大きく、実装時や印刷時、搬送時などに
荷重が加わってもセラミック基板の割れを防止できる利
点がある。
[0005] In this case, since the vertical and horizontal break grooves do not reach the peripheral edge but end at the middle of the dummy portion, the strength of the dummy portion is large, and a load is applied during mounting, printing, transport and the like. However, there is an advantage that cracking of the ceramic substrate can be prevented.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記の
場合には縦横のブレーク溝をダミー部の途中で終端とな
るように加工しなければならず、溝加工に手間がかかる
という問題があった。しかも、縦横のブレーク溝以外に
4本の傾斜ブレーク溝を形成しなければならず、この傾
斜ブレーク溝は最外側のブレーク溝の交点よりも縁端部
側で、かつ最外側の縦横のブレーク溝の先端寄り位置を
斜めに横断する形で設ける必要があるため、寸法精度が
要求され、製造コストの上昇を招くという問題があっ
た。
However, in the above case, the vertical and horizontal break grooves must be processed so as to be terminated in the middle of the dummy portion, and there is a problem that the groove processing is troublesome. In addition, in addition to the vertical and horizontal break grooves, four inclined break grooves must be formed, and these inclined break grooves are closer to the edge than the intersection of the outermost break grooves and are the outermost vertical and horizontal break grooves. It is necessary to provide a position obliquely crossing the position near the front end of the device, so that there is a problem that dimensional accuracy is required and the production cost is increased.

【0007】そこで、本発明の目的は、ブレーク溝の加
工が簡単で、実装時や印刷時、搬送時などの割れを防止
できるブレーク溝付きセラミック基板を提供することに
ある。また、他の目的は、上記セラミック基板を用いる
ことにより歩留りよく量産できる電子部品を提供するこ
とにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a ceramic substrate with a break groove, in which a break groove can be easily processed and cracks can be prevented during mounting, printing, transport, and the like. Another object is to provide an electronic component which can be mass-produced with a high yield by using the ceramic substrate.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するた
め、本発明は、表面に縦横にブレーク溝を形成し、これ
らブレーク溝に沿ってブレークすることにより個々の基
板に分割するようにしたセラミック基板において、周辺
部にダミー部が、その内側に製品部がそれぞれ形成さ
れ、縦横のブレーク溝は製品部からダミー部まで連続的
に形成され、製品部を区画するブレーク溝および製品部
とダミー部との間を区画する最外側のブレーク溝に比べ
て、最外側のブレーク溝からダミー部へ延びるブレーク
溝が浅く形成されていることを特徴とする。
In order to achieve the above-mentioned object, the present invention provides a ceramic in which break grooves are formed longitudinally and laterally on the surface and the substrate is divided into individual substrates by breaking along these break grooves. On the substrate, a dummy portion is formed in a peripheral portion, and a product portion is formed inside the dummy portion. Vertical and horizontal break grooves are formed continuously from the product portion to the dummy portion, and a break groove for dividing the product portion and the product portion and the dummy portion are formed. A break groove extending from the outermost break groove to the dummy portion is formed to be shallower than an outermost break groove partitioning between the outermost break grooves.

【0009】すなわち、ダミー部のブレーク溝の深さを
製品部のブレーク溝の深さより浅くしたので、セラミッ
ク基板の周辺部(ダミー部)の強度が高く、実装時、印
刷時、搬送時などにセラミック基板が割れるのを防止で
きる。また、縦横のブレーク溝は製品部からダミー部を
横断して周縁部まで連続的に形成すればよいので、従来
のようにダミー部の途中で終端とする必要はなく、しか
も傾斜ブレーク溝を形成する必要もないので、溝加工が
簡単になる。
That is, since the depth of the break groove of the dummy portion is made shallower than the depth of the break groove of the product portion, the strength of the peripheral portion (dummy portion) of the ceramic substrate is high, so that it can be mounted, printed, transported, and the like. Cracking of the ceramic substrate can be prevented. Also, since the vertical and horizontal break grooves need only be formed continuously from the product portion to the peripheral portion across the dummy portion, there is no need to terminate at the middle of the dummy portion unlike the conventional case, and the inclined break groove is formed. Since there is no need to perform, the groove processing is simplified.

【0010】ところで、セラミック基板をブレークする
場合、セラミック基板の一端側をチャックし、一端側に
亀裂を発生させることにより他端側へ亀裂を走らせ、ブ
レークする方法が用いられることがある。この場合、四
辺すべてのダミー部のブレーク溝の深さを浅くすると、
他端部での肉厚が厚いために、亀裂が他端側まで走った
時点で斜め方向へそれ、綺麗にブレークできないという
欠点がある。
When the ceramic substrate is to be broken, a method of chucking one end of the ceramic substrate and generating a crack at one end to cause the crack to run to the other end to break the ceramic substrate may be used. In this case, if the depth of the break groove of the dummy part on all four sides is reduced,
Since the thickness at the other end is large, there is a disadvantage that the crack deviates in an oblique direction at the time when the crack runs to the other end, and it cannot be broken cleanly.

【0011】そこで、最外側のブレーク溝からダミー部
へ延びるブレーク溝のうち、一辺のダミー部へ延びるブ
レーク溝を製品部を区画するブレーク溝と同等な深さに
形成し、残りの三辺のダミー部へ延びるブレーク溝を製
品部を区画するブレーク溝より浅く形成するのが望まし
い。この場合には、溝深さの浅い方向から深い方向へ亀
裂が走るようにブレークすれば、終端部での肉厚が薄い
ので、最後まで綺麗にブレークできる。
Therefore, of the break grooves extending from the outermost break groove to the dummy portion, the break groove extending to one side of the dummy portion is formed at the same depth as the break groove defining the product portion, and the remaining three sides are formed. It is desirable that the break groove extending to the dummy portion is formed shallower than the break groove defining the product portion. In this case, if the break is performed so that the crack runs from the shallow groove depth direction to the deep groove direction, the thickness at the terminal end portion is thin, so that the break can be performed finely to the end.

【0012】本発明のセラミック基板は表面実装型電子
部品に適用するのが望ましい。すなわち、請求項1また
は2に記載のセラミック基板の製品部であって、縦横の
ブレーク溝で仕切られた部位にそれぞれ電子部品素子が
搭載され、縦横のブレーク溝に沿ってセラミック基板を
ブレークすれば、表面実装型の電子部品を容易に得るこ
とができる。このような電子部品では、電子部品素子の
搭載時や電極の形成時などにセラミック基板が割れる恐
れが少なく、しかもダミー部以外のブレーク溝は割れや
すいので、個々の電子部品に分割する際に電子部品素子
にかかる負荷が小さく、不良品の発生率を低くできる。
It is desirable that the ceramic substrate of the present invention be applied to a surface mount electronic component. That is, in the product part of the ceramic substrate according to claim 1 or 2, the electronic component element is mounted on each of the parts partitioned by the vertical and horizontal break grooves, and the ceramic substrate is broken along the vertical and horizontal break grooves. Thus, a surface-mounted electronic component can be easily obtained. In such an electronic component, the ceramic substrate is less likely to be broken when mounting the electronic component element or forming the electrodes, and the break grooves other than the dummy portion are easily broken. The load on the component element is small, and the incidence of defective products can be reduced.

【0013】ブレーク溝の形成方法としては、グリーン
シートの状態でプレス金型により形成する方法、硬化状
態のセラミック基板にダイサーによって溝を加工する方
法、レーザによって溝を加工する方法など種々の方法が
考えられる。本発明でセラミック基板とは、セラミック
スの単一基板に限らず、多層基板であってもよい。セラ
ミックス材料としてはアルミナが一般的であるが、これ
に限るものではない。
There are various methods for forming a break groove, such as a method of forming a green sheet with a press die, a method of forming a groove on a hardened ceramic substrate with a dicer, and a method of forming a groove with a laser. Conceivable. In the present invention, the ceramic substrate is not limited to a single ceramic substrate, but may be a multilayer substrate. Alumina is generally used as the ceramic material, but is not limited thereto.

【0014】[0014]

【発明の実施の形態】図1,図2は本発明にかかるブレ
ーク溝付きセラミック基板の一例を示す。セラミック基
板1は、例えば厚みが635μmのアルミナ基板で形成
されており、その表面には電極(図示せず)が形成され
るとともに、多数の電子部品素子(図示せず)が縦横に
整列されて搭載されている。セラミック基板1の表面に
は、搭載された電子部品素子の間を仕切るようにV字状
のブレーク溝2,3が縦横に形成されている。なお、最
外側のブレーク溝2a,3aの内側には製品として用い
られる製品部4が形成され、最外側のブレーク溝2a,
3aの外側には廃棄部分であるダミー部5が形成されて
いる。
1 and 2 show an example of a ceramic substrate having a break groove according to the present invention. The ceramic substrate 1 is formed of, for example, an alumina substrate having a thickness of 635 μm. On the surface thereof, electrodes (not shown) are formed, and a large number of electronic component elements (not shown) are arranged vertically and horizontally. It is installed. V-shaped break grooves 2 and 3 are formed vertically and horizontally on the surface of the ceramic substrate 1 so as to partition between mounted electronic component elements. A product part 4 used as a product is formed inside the outermost break grooves 2a and 3a, and the outermost break grooves 2a and 3a are formed.
A dummy portion 5, which is a discarded portion, is formed outside 3a.

【0015】ブレーク溝2,3のうち、最外側のブレー
ク溝2a,3aを含む製品部4を区画する溝部分は、図
1に太線で示すように、幅が例えば100μm、深さが
220μmの深い溝に加工されている。一方、ダミー部
5に対応する溝部分は、図1に細線で示すように、幅が
例えば100μm、深さが180μmの浅い溝に加工さ
れている。このように、ダミー部5のブレーク溝は製品
部4のブレーク溝より浅いため、セラミック基板1の周
辺部は中央部に比べて強度が高い。そのため、セラミッ
ク基板1全体の剛性が高くなり、電子部品素子の実装時
や電極の印刷時、搬送時などにセラミック基板1が割れ
るのを防止できる。
Of the break grooves 2 and 3, the groove section defining the product part 4 including the outermost break grooves 2a and 3a has a width of, for example, 100 μm and a depth of 220 μm as shown by a thick line in FIG. It is processed into a deep groove. On the other hand, the groove portion corresponding to the dummy portion 5 is formed into a shallow groove having a width of, for example, 100 μm and a depth of 180 μm, as shown by a thin line in FIG. As described above, since the break groove of the dummy portion 5 is shallower than the break groove of the product portion 4, the peripheral portion of the ceramic substrate 1 has higher strength than the central portion. Therefore, the rigidity of the entire ceramic substrate 1 is increased, and it is possible to prevent the ceramic substrate 1 from being cracked at the time of mounting electronic component elements, printing electrodes, transporting, and the like.

【0016】なお、上記ブレーク溝2,3の加工方法と
しては、グリーンシートの状態でプレス金型により形成
する方法、硬化状態のセラミック基板にダイサーによっ
て溝を加工する方法、レーザによって溝を加工する方法
など公知の方法を用いればよい。特に、CO2 レーザを
用いた溝加工方法では、その幅と深さを自在に調整でき
るので、本発明のようなセラミック基板1を容易に作製
することができる。
The break grooves 2 and 3 are formed by pressing a green sheet with a press die, forming a groove on a hardened ceramic substrate by a dicer, or forming a groove by a laser. A known method such as a method may be used. In particular, in the groove processing method using a CO 2 laser, the width and the depth can be freely adjusted, so that the ceramic substrate 1 as in the present invention can be easily manufactured.

【0017】ここで、上記セラミック基板1のブレーク
方法について説明する。まず、図3のようにチャックA
でセラミック基板1を縦方向のブレーク溝2にそって一
列分チャックし、チャックBで隣の列をチャックし、チ
ャックAを矢印方向に回転させることによって一次ブレ
ークする。同様にして、全ての縦方向のブレーク溝2に
そってセラミック基板1を一次ブレークすることによ
り、短冊状のセラミック基板1aを得る。この時、縦方
向のブレーク溝2の両端は中央部に比べて浅いので、両
端部でバリや欠けが発生する可能性があるが、この部分
はダミー部5に相当する廃棄部分であるため、問題はな
い。
Here, a method of breaking the ceramic substrate 1 will be described. First, as shown in FIG.
Then, the ceramic substrate 1 is chucked for one row along the vertical break groove 2, the next row is chucked by the chuck B, and the primary break is performed by rotating the chuck A in the direction of the arrow. Similarly, the ceramic substrate 1 is firstly broken along all the vertical break grooves 2 to obtain a strip-shaped ceramic substrate 1a. At this time, since both ends of the vertical break groove 2 are shallower than the central part, burrs and chipping may occur at both ends. However, since this part is a waste part corresponding to the dummy part 5, No problem.

【0018】次に、縦方向にブレークされた短冊状のセ
ラミック基板1aを、図4のようにチャックCとチャッ
クDとでチャックし、横方向のブレーク溝3に沿って個
々の基板6に二次ブレークする。この時、横方向のブレ
ーク溝3はすべて深く形成されているので、二次ブレー
ク時に亀裂が斜め方向に走ることがなく、バリや欠けの
発生を防止できる。そのため、基板6の四辺を綺麗な破
断面とすることができる。
Next, the strip-shaped ceramic substrate 1a broken in the vertical direction is chucked by the chucks C and D as shown in FIG. Break next. At this time, since the lateral break grooves 3 are all formed deep, cracks do not run obliquely during the secondary break, and burrs and chips can be prevented. Therefore, the four sides of the substrate 6 can be made to have a beautiful broken surface.

【0019】なお、セラミック基板1,1aのブレーク
方法としては、図3のようにチャックA〜Dによってセ
ラミック基板1,1aの上下面をチャックしてブレーク
する方法に限らず、図5のようにセラミック基板1,1
aを2個の搬送ローラE,Fと1個の押えローラGの間
に通し、連続的にブレークするようにしてもよい。この
場合、セラミック基板1,1aの溝加工面を下側(搬送
ローラE,F側)に向けて供給すればよい。
The method of breaking the ceramic substrates 1 and 1a is not limited to the method of breaking the upper and lower surfaces of the ceramic substrates 1 and 1a by chucks A to D as shown in FIG. Ceramic substrate 1, 1
a may be passed between the two transport rollers E and F and one pressing roller G to continuously break. In this case, it is sufficient to supply the ceramic substrate 1 or 1a with the grooved surface facing downward (toward the transport rollers E and F).

【0020】図6は上記のようなセラミック基板1によ
って得られた表面実装型の電子部品の一例を示す。図に
おいて、基板6の表裏面には帯状の電極10,11が形
成され、これら電極10,11に発振子素子12が導電
性接着剤13,14によって接続固定されている。基板
6上にはキャップ15が絶縁性接着剤16によって接着
され、発振子素子12が密封されている。基板6の両側
縁部には表裏方向に延びる溝6aが形成されており、こ
の溝6aの内面に形成された電極を介して、表裏の電極
10,11が導通している。上記溝6aは、セラミック
基板1の縦横いずれかのブレーク溝2,3上に形成され
たスルーホールを分割することによって形成される。
FIG. 6 shows an example of a surface-mounted electronic component obtained by using the ceramic substrate 1 as described above. In the figure, strip-shaped electrodes 10 and 11 are formed on the front and back surfaces of a substrate 6, and an oscillator element 12 is connected and fixed to the electrodes 10 and 11 by conductive adhesives 13 and 14. A cap 15 is adhered on the substrate 6 with an insulating adhesive 16, and the oscillator element 12 is sealed. Grooves 6a extending in the front and back directions are formed on both side edges of the substrate 6, and the electrodes 10 and 11 on the front and back are electrically connected through the electrodes formed on the inner surface of the grooves 6a. The groove 6a is formed by dividing a through hole formed on one of the vertical and horizontal break grooves 2 and 3 of the ceramic substrate 1.

【0021】上記のような電極10,11はセラミック
基板1のほぼ全面に形成されており、発振子素子12お
よびキャップ15は製品部4のブレーク溝2,3で仕切
られた部位に縦横に配列して搭載されている。従来のよ
うに製品部4もダミー部5も同一溝深さであると、電極
10,11の形成時や素子12の搭載時などにセラミッ
ク基板1が割れやすかったが、本発明のようにダミー部
5の溝深さが浅いので、ダミー部5の強度が高く、セラ
ミック基板1の割れを防止できる。しかも、製品部4の
溝深さが深いので、個々の電子部品に分割する際に素子
12やキャップ15にかかるショックが小さく、不良品
の発生率を低減できる。
The electrodes 10 and 11 as described above are formed on almost the entire surface of the ceramic substrate 1, and the oscillator element 12 and the cap 15 are vertically and horizontally arranged at the portions of the product portion 4 separated by the break grooves 2 and 3. It is installed. If the product portion 4 and the dummy portion 5 have the same groove depth as in the prior art, the ceramic substrate 1 is easily broken when the electrodes 10 and 11 are formed or when the element 12 is mounted. Since the groove depth of the portion 5 is shallow, the strength of the dummy portion 5 is high, and cracking of the ceramic substrate 1 can be prevented. In addition, since the groove depth of the product part 4 is large, the shock applied to the element 12 and the cap 15 when dividing into individual electronic components is small, and the occurrence rate of defective products can be reduced.

【0022】なお、本発明における電子部品素子として
は、図6図のような発振子素子12に限るものではな
く、例えばコンデンサ素子や抵抗素子などであってもよ
く、あるいは複数の素子を組み合わせてもよい。
The electronic component element in the present invention is not limited to the oscillator element 12 shown in FIG. 6, but may be, for example, a capacitor element or a resistance element, or a combination of a plurality of elements. Is also good.

【0023】図7は本発明にかかるセラミック基板の第
2実施例を示す。このセラミック基板1’に形成された
ブレーク溝2,3のうち、最外側のブレーク溝2a,3
aを含む製品部4に対応する溝部分は、図7に太線で示
すように、幅が例えば100μm、深さが220μmの
深い溝に加工されている。また、一辺のダミー部5aに
対応する部分も同様な深い溝に加工されている。残りの
三辺のダミー部5b〜5dに対応する溝部分は、図7に
細線で示すように、幅が例えば100μm、深さが18
0μmの浅い溝に加工されている。
FIG. 7 shows a second embodiment of the ceramic substrate according to the present invention. Of the break grooves 2 and 3 formed in the ceramic substrate 1 ', the outermost break grooves 2a and 3
The groove portion corresponding to the product part 4 including a is processed into a deep groove having a width of, for example, 100 μm and a depth of 220 μm, as shown by a thick line in FIG. The portion corresponding to the dummy portion 5a on one side is also processed into a similar deep groove. The groove portions corresponding to the remaining three sides of the dummy portions 5b to 5d have a width of, for example, 100 μm and a depth of 18 as indicated by thin lines in FIG.
It is processed into a shallow groove of 0 μm.

【0024】この実施例の場合には、一辺のダミー部5
のブレーク溝のみが深く、残りの三辺のダミー部5のブ
レーク溝は浅いので、セラミック基板1’の周辺部は中
央部に比べて強度が高い。そのため、第1実施例と同様
にセラミック基板1’全体の剛性が高くなり、電子部品
の実装時や電極の印刷時、搬送時などにセラミック基板
1’が割れるのを防止できる。
In the case of this embodiment, one side of the dummy portion 5
Is deep, and the break grooves of the dummy portions 5 on the remaining three sides are shallow, so that the peripheral portion of the ceramic substrate 1 'has higher strength than the central portion. Therefore, as in the first embodiment, the rigidity of the entire ceramic substrate 1 'is increased, and it is possible to prevent the ceramic substrate 1' from breaking when mounting electronic components, printing electrodes, or transporting.

【0025】上記実施例のセラミック基板1’のブレー
ク方法を図8に示す。すなわち、チャックHでセラミッ
ク基板1の一端側、特に溝の深いダミー部5aと対向す
る溝の浅いダミー部5cの端部を約1個分だけチャック
し、チャックIで隣の約1個分をチャックし、チャック
Hを矢印方向に回転させることによって一次ブレークす
る。この時、チャックされた部分にまず亀裂が発生し、
この亀裂は縦方向のブレーク溝2にそって他端側(矢印
Y方向)へ走る。亀裂は溝の深いダミー部5aで終端と
なるので、終端部で亀裂が斜め方向にそれず、最後まで
綺麗にブレークできる。
FIG. 8 shows a method of breaking the ceramic substrate 1 'of the above embodiment. That is, the chuck H chucks one end side of the ceramic substrate 1, in particular, the end of the shallow dummy portion 5 c facing the deep groove dummy portion 5 a by about one piece, and the chuck I chucks the adjacent about one piece by the chuck I. The primary break is performed by chucking and rotating the chuck H in the direction of the arrow. At this time, cracks first occur in the chucked part,
This crack runs along the longitudinal break groove 2 toward the other end (in the direction of arrow Y). Since the crack terminates at the dummy portion 5a having a deep groove, the crack does not deviate in the oblique direction at the terminal portion, and a clean break can be performed to the end.

【0026】同様にして縦方向のブレーク溝2にそって
一次ブレークすることにより、短冊状のセラミック基板
1aを得ることができる。なお、この短冊状のセラミッ
ク基板1aを二次ブレークする方法は図4と同様であ
る。
Similarly, by making a primary break along the longitudinal break groove 2, a strip-shaped ceramic substrate 1a can be obtained. The method of secondary breaking the strip-shaped ceramic substrate 1a is the same as that of FIG.

【0027】上記ブレーク方法では、一次ブレークも二
次ブレークも同様のチャックH,Iを用いることがで
き、複数の基板を同時にチャックする必要がないので、
チャック装置を小型化できる。しかも、亀裂を走らせる
ことによりブレークするため、破断面が綺麗になるとい
う特徴がある。
In the above-described breaking method, the same chucks H and I can be used for the primary break and the secondary break, and there is no need to chuck a plurality of substrates at the same time.
The chuck device can be downsized. In addition, there is a characteristic that a broken surface is made beautiful because a break is caused by running a crack.

【0028】本発明は上記実施例に限定されるものでは
なく、種々変更が可能であることは言うまでもない。例
えば、実施例では深さの深いブレーク溝をダミー部の途
中まで設けたが、製品部とダミー部との境界部、つまり
最外側のブレーク溝を深いブレーク溝の終端としてもよ
い。また、深いブレーク溝を設けた製品部の内、縦横の
ブレーク溝の交点部分をさらに深くしてもよい。
The present invention is not limited to the above embodiment, and it goes without saying that various modifications are possible. For example, in the embodiment, the deep break groove is provided halfway in the dummy portion, but a boundary portion between the product portion and the dummy portion, that is, the outermost break groove may be an end of the deep break groove. Further, among the product parts provided with the deep break grooves, the intersections of the vertical and horizontal break grooves may be further deepened.

【0029】[0029]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、製品部を区画するブレーク溝および製品部とダ
ミー部との間を区画する最外側のブレーク溝に比べて、
最外側のブレーク溝からダミー部へ延びるブレーク溝を
浅くしたので、セラミック基板の周辺部の強度が高く、
実装時や印刷時、搬送時などにセラミック基板が割れる
のを防止できる。なお、ダミー部の溝が浅いので、ブレ
ーク時にダミー部にバリや欠けが発生する可能性がある
が、ダミー部は廃棄される部分であるため、問題がな
い。また、縦横のブレーク溝は製品部からダミー部を横
断して周縁まで連続的に形成すればよいので、ダミー部
の途中で終端とする必要はなく、しかも傾斜ブレーク溝
などを形成する必要がないので、溝加工が簡単であり、
製造コストを低減できる。
As is apparent from the above description, according to the present invention, as compared with the break groove for partitioning the product part and the outermost break groove for partitioning between the product part and the dummy part,
Since the break groove extending from the outermost break groove to the dummy part is made shallow, the strength of the peripheral part of the ceramic substrate is high,
The ceramic substrate can be prevented from cracking during mounting, printing, transportation, and the like. Since the groove of the dummy portion is shallow, burrs or chipping may occur in the dummy portion at the time of a break. However, since the dummy portion is a portion to be discarded, there is no problem. In addition, since the vertical and horizontal break grooves may be formed continuously from the product portion to the peripheral portion across the dummy portion, there is no need to terminate the dummy portion in the middle, and it is not necessary to form an inclined break groove or the like. So the groove processing is easy,
Manufacturing costs can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明にかかるブレーク溝付きセラミック基板
の一例の斜視図である。
FIG. 1 is a perspective view of an example of a ceramic substrate with a break groove according to the present invention.

【図2】図1のX−X線拡大断面図である。FIG. 2 is an enlarged sectional view taken along line XX of FIG.

【図3】セラミック基板の一次ブレーク時の斜視図であ
る。
FIG. 3 is a perspective view of a ceramic substrate during a primary break.

【図4】セラミック基板の二次ブレーク時の斜視図であ
る。
FIG. 4 is a perspective view of the ceramic substrate during a secondary break.

【図5】セラミック基板のブレーク方法を示す他の実施
例の説明図である。
FIG. 5 is an explanatory view of another embodiment showing a method of breaking a ceramic substrate.

【図6】本発明のセラミック基板から得られた表面実装
型の電子部品の一例の分解斜視図である。
FIG. 6 is an exploded perspective view of an example of a surface-mounted electronic component obtained from the ceramic substrate of the present invention.

【図7】本発明にかかるブレーク溝付きセラミック基板
の第2実施例の斜視図である。
FIG. 7 is a perspective view of a ceramic substrate with a break groove according to a second embodiment of the present invention.

【図8】図7のセラミック基板のブレーク方法を示す斜
視図である。
FIG. 8 is a perspective view showing a method of breaking the ceramic substrate of FIG. 7;

【符号の説明】 1 セラミック基板 2,3 ブレーク溝 4 製品部 5 ダミー部 6 基板[Description of Signs] 1 Ceramic substrate 2, 3 Break groove 4 Product part 5 Dummy part 6 Substrate

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】表面に縦横にブレーク溝を形成し、これら
ブレーク溝に沿ってブレークすることにより個々の基板
に分割するようにしたセラミック基板において、 周辺部にダミー部が、その内側に製品部がそれぞれ形成
され、 縦横のブレーク溝は製品部からダミー部まで連続的に形
成され、 製品部を区画するブレーク溝および製品部とダミー部と
の間を区画する最外側のブレーク溝に比べて、最外側の
ブレーク溝からダミー部へ延びるブレーク溝が浅く形成
されていることを特徴とするブレーク溝付きセラミック
基板。
1. A ceramic substrate in which break grooves are formed longitudinally and laterally on the surface, and divided along the ceramic substrate by breaking along the break grooves, a dummy portion is provided at a peripheral portion, and a product portion is provided inside the dummy portion. The vertical and horizontal break grooves are formed continuously from the product section to the dummy section, and compared to the break groove that partitions the product section and the outermost break groove that partitions between the product section and the dummy section, A ceramic substrate with a break groove, wherein a break groove extending from the outermost break groove to the dummy portion is formed shallow.
【請求項2】請求項1に記載のセラミック基板におい
て、 最外側のブレーク溝からダミー部へ延びるブレーク溝の
うち、一辺のダミー部へ延びるブレーク溝は製品部を区
画するブレーク溝と同等な深さに形成され、残りの三辺
のダミー部へ延びるブレーク溝は製品部を区画するブレ
ーク溝より浅く形成されていることを特徴とするブレー
ク溝付きセラミック基板。
2. The ceramic substrate according to claim 1, wherein, among the break grooves extending from the outermost break groove to the dummy portion, the break groove extending to one side of the dummy portion has a depth equivalent to the break groove defining the product portion. The break groove formed on the substrate and extending to the remaining three sides of the dummy portion is formed shallower than the break groove defining the product portion.
【請求項3】請求項1または2に記載のセラミック基板
の製品部であって、縦横のブレーク溝で仕切られた部位
にそれぞれ電子部品素子が搭載され、縦横のブレーク溝
に沿ってセラミック基板をブレークすることにより個々
に分割されたことを特徴とする電子部品。
3. The product part of the ceramic substrate according to claim 1, wherein electronic component elements are respectively mounted on portions partitioned by vertical and horizontal break grooves, and the ceramic substrate is mounted along the vertical and horizontal break grooves. An electronic component characterized by being divided individually by breaking.
JP9497097A 1997-03-27 1997-03-27 Ceramic base with break groove and electronic component manufactured from the ceramic base Pending JPH10264130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9497097A JPH10264130A (en) 1997-03-27 1997-03-27 Ceramic base with break groove and electronic component manufactured from the ceramic base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9497097A JPH10264130A (en) 1997-03-27 1997-03-27 Ceramic base with break groove and electronic component manufactured from the ceramic base

Publications (1)

Publication Number Publication Date
JPH10264130A true JPH10264130A (en) 1998-10-06

Family

ID=14124782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9497097A Pending JPH10264130A (en) 1997-03-27 1997-03-27 Ceramic base with break groove and electronic component manufactured from the ceramic base

Country Status (1)

Country Link
JP (1) JPH10264130A (en)

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US7446262B2 (en) 2004-01-27 2008-11-04 Murata Manufacturing Co., Ltd. Laminated electronic component and method for producing the same
WO2009154295A1 (en) * 2008-06-20 2009-12-23 日立金属株式会社 Collective ceramic substrate, manufacturing method for the substrate, ceramic substrate, and ceramic circuit substrate
JP2012172177A (en) * 2011-02-18 2012-09-10 Denki Kagaku Kogyo Kk Aluminum alloy-ceramic composite, manufacturing method of the composite and stress buffer material comprising the composite
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Publication number Priority date Publication date Assignee Title
US7446262B2 (en) 2004-01-27 2008-11-04 Murata Manufacturing Co., Ltd. Laminated electronic component and method for producing the same
JP2007227513A (en) * 2006-02-22 2007-09-06 Kyocera Corp Multipiece wiring board, electronic component storing package and electronic apparatus
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