JPH10214934A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPH10214934A
JPH10214934A JP1632397A JP1632397A JPH10214934A JP H10214934 A JPH10214934 A JP H10214934A JP 1632397 A JP1632397 A JP 1632397A JP 1632397 A JP1632397 A JP 1632397A JP H10214934 A JPH10214934 A JP H10214934A
Authority
JP
Japan
Prior art keywords
circuit board
printed circuit
bare chip
board
bare
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1632397A
Other languages
Japanese (ja)
Inventor
Hideo Nakanishi
秀雄 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1632397A priority Critical patent/JPH10214934A/en
Publication of JPH10214934A publication Critical patent/JPH10214934A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device for mounting bare chips on both the surfaces of a printed board by bonding the board to a lead frame and a method for manufacturing the device. SOLUTION: In the semiconductor device in which a printed board 3 is connected to a lead frame 4, and further bare chips 1, 2 are mounted on both the surfaces of the board 3, a bonding part 7 to the frame 4 is disposed on the surface of the side for mounting the chip 1 having larger occupying area on the board 3. Also, the chips 1, 2 are mounted on one surface of the board 3 by a wire bonding type, and the chips 1, 2 are mounted on the other surface by a flip-chip type. Further, the chip 2 of the side having smaller occupying area on the board 3 is mounted previously on the board 3, and then the chip 1 of the side having larger occupying area on the board 3 is mounted on the board 3.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、プリント基板と外
部入出力端子となるリードフレームを接合したタイプの
半導体パッケージにベアチップを実装してなる半導体装
置及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device having a bare chip mounted on a semiconductor package of a type in which a printed board and a lead frame serving as an external input / output terminal are joined, and a method of manufacturing the same.

【0002】[0002]

【従来の技術】従来から、プリント基板と外部入出力端
子となるリードフレームを接合し、このプリント基板の
両面に半導体チップを搭載した半導体装置が知られてい
る。そして、従来のこのような半導体装置では、プリン
ト基板の両面に半導体チップを搭載する場合には、プリ
ント基板の両面にベアチップを実装することが困難であ
るため、プリント基板の片面にのみベアチップを実装
し、もう一方の面には、QFPやSOP等のベアチップ
が封止されたものを半田実装し、さらに全体をモールド
樹脂で封止して製造されていた。しかし、このような構
成の半導体装置では実装密度の向上に限度があるため、
半導体チップを搭載するプリント基板と外部入出力端子
となるリードフレームを接合している半導体装置であっ
て、プリント基板の両面にベアチップを直接実装するこ
とができる半導体装置が求められていた。
2. Description of the Related Art Heretofore, there has been known a semiconductor device in which a printed board and a lead frame serving as an external input / output terminal are joined, and semiconductor chips are mounted on both sides of the printed board. In such a conventional semiconductor device, when semiconductor chips are mounted on both sides of a printed circuit board, it is difficult to mount bare chips on both sides of the printed circuit board. On the other side, a package in which a bare chip such as QFP or SOP is sealed is mounted by soldering, and the whole is sealed with a mold resin. However, in a semiconductor device having such a configuration, there is a limit in improving a mounting density.
There has been a demand for a semiconductor device in which a printed board on which a semiconductor chip is mounted and a lead frame serving as an external input / output terminal are bonded, and the bare chip can be directly mounted on both sides of the printed board.

【0003】[0003]

【発明が解決しようとする課題】本発明は上記のような
事情に鑑みてなされたものであって、その目的とすると
ころは、半導体チップを搭載するプリント基板と外部入
出力端子となるリードフレームを接合している半導体装
置であって、プリント基板の両面にベアチップを実装す
ることができる半導体装置を提供すること及びその製造
方法を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a printed circuit board on which a semiconductor chip is mounted and a lead frame serving as an external input / output terminal. It is an object of the present invention to provide a semiconductor device in which bare chips can be mounted on both sides of a printed circuit board, and a method of manufacturing the same.

【0004】[0004]

【課題を解決するための手段】請求項1に係る発明の半
導体装置は、両面にベアチップと接続可能な回路を有し
たプリント基板と外部入出力端子となるリードフレーム
を接合し、さらに該プリント基板の両面にベアチップを
実装した後、このベアチップを実装したプリント基板を
モールド樹脂で封止してなる半導体装置において、プリ
ント基板上の占有面積が大きい方のベアチップを実装す
る側のプリント基板の表面に、リードフレームとの接合
部を配置したことを特徴とする。
According to a first aspect of the present invention, there is provided a semiconductor device in which a printed board having a circuit connectable to a bare chip on both sides is joined to a lead frame serving as an external input / output terminal. After mounting the bare chip on both sides of the semiconductor device, the printed circuit board on which the bare chip is mounted is sealed with a mold resin, and the area occupied on the printed circuit board is larger on the surface of the printed circuit board on which the bare chip is mounted. And a joint portion with the lead frame.

【0005】請求項2に係る発明の半導体装置は、請求
項1記載の半導体装置において、プリント基板上の占有
面積が小さい方のベアチップを実装する側のプリント基
板表面の、このベアチップを包囲する位置に、このベア
チップとプリント基板を接続するボンディングワイヤー
の高さより高い堰堤を設けたことを特徴とする。
According to a second aspect of the present invention, in the semiconductor device according to the first aspect, a position surrounding the bare chip on the surface of the printed circuit board on which the bare chip occupying the smaller area on the printed circuit board is mounted. In addition, a dam is provided which is higher than the height of the bonding wire connecting the bare chip and the printed board.

【0006】請求項3に係る発明の半導体装置の製造方
法は、請求項1又は請求項2記載の半導体装置の製造方
法であって、プリント基板上の占有面積が小さい方のベ
アチップを先にプリント基板に実装した後、プリント基
板上の占有面積が大きい方のベアチップをプリント基板
に実装することを特徴とする。
According to a third aspect of the present invention, there is provided a method of manufacturing a semiconductor device according to the first or second aspect, wherein a bare chip having a smaller area occupied on a printed circuit board is printed first. After mounting on the board, the bare chip having the larger occupied area on the printed board is mounted on the printed board.

【0007】請求項4に係る発明の半導体装置は、両面
にベアチップと接続可能な回路を有したプリント基板と
外部入出力端子となるリードフレームを接合し、さらに
該プリント基板の両面にベアチップを実装した後、この
ベアチップを実装したプリント基板をモールド樹脂で封
止してなる半導体装置において、プリント基板の一方の
面にはワイヤーボンデイング方式によりベアチップとプ
リント基板を実装し、他方の面にはフリップチップ方式
によりベアチップとプリント基板を実装していることを
特徴とする。
According to a fourth aspect of the present invention, a printed board having a circuit connectable to a bare chip on both sides is joined to a lead frame serving as an external input / output terminal, and further, bare chips are mounted on both sides of the printed board. Then, in a semiconductor device in which the printed circuit board on which the bare chip is mounted is sealed with a mold resin, the bare chip and the printed circuit board are mounted on one surface of the printed circuit board by a wire bonding method, and the flip chip is mounted on the other surface. The method is characterized in that a bare chip and a printed board are mounted by a method.

【0008】[0008]

【発明の実施の形態】本発明の実施の形態を図面を参照
して説明する。
Embodiments of the present invention will be described with reference to the drawings.

【0009】図1は第1の実施の形態を示す断面図であ
る。図1に示すように、第1の実施の形態の半導体装置
では、両面にベアチップ1、2と接続可能な回路を有し
たプリント基板3と外部入出力端子となるリードフレー
ム4を接合し、さらにプリント基板3の両面にベアチッ
プ1、2を実装した後、このベアチップ1、2を実装し
たプリント基板3をモールド樹脂5で封止している。そ
して、プリント基板上の占有面積が大きい方のベアチッ
プ1を実装する側のプリント基板3の表面に、リードフ
レーム4との接合部7を配置している。この接合部7は
プリント基板3の外周に設けられていて、リードフレー
ム4の中央部に形成されている枠状の部分と接合してい
る。このように、占有面積が大きい方のベアチップ1を
実装する面に接合部7を配置すると、占有面積が小さい
方のベアチップ2を先に実装した後、占有面積が大きい
方のベアチップ1を実装する際に、ベアチップ1のワイ
ヤーボンディングに必要なブロックヒーターの設置面を
ベアチップ1の実装面の裏面側に確保できるため、プリ
ント基板3の両面にベアチップ1、2をワイヤーボンデ
ィング法によって実装することが可能になる。
FIG. 1 is a sectional view showing a first embodiment. As shown in FIG. 1, in the semiconductor device of the first embodiment, a printed board 3 having a circuit connectable to bare chips 1 and 2 on both sides and a lead frame 4 serving as an external input / output terminal are joined. After the bare chips 1 and 2 are mounted on both sides of the printed board 3, the printed board 3 on which the bare chips 1 and 2 are mounted is sealed with the mold resin 5. The joint 7 with the lead frame 4 is arranged on the surface of the printed circuit board 3 on the side where the bare chip 1 occupying the larger area on the printed circuit board is mounted. The joint 7 is provided on the outer periphery of the printed circuit board 3 and is joined to a frame-shaped portion formed at the center of the lead frame 4. As described above, when the bonding portion 7 is arranged on the surface on which the larger occupied area of the bare chip 1 is mounted, the bare chip 2 with the smaller occupied area is mounted first, and then the bare chip 1 with the larger occupied area is mounted. At this time, the installation surface of the block heater required for wire bonding of the bare chip 1 can be secured on the back side of the mounting surface of the bare chip 1, so that the bare chips 1 and 2 can be mounted on both sides of the printed board 3 by the wire bonding method. become.

【0010】また、図2は第2の実施の形態を示す断面
図である。図2に示すように、第2の実施の形態の半導
体装置では、前記の第1の実施の形態の半導体装置にお
いて、プリント基板3上の占有面積が小さい方のベアチ
ップ2を実装する側のプリント基板表面の、このベアチ
ップ2を包囲する位置に、このベアチップ2とプリント
基板3を接続するボンディングワイヤー6の高さより高
い堰堤8を設けている。この堰堤8を備えると、堰堤8
によってボンディングワイヤー6が保護されるので、占
有面積が小さい方のベアチップ2を実装したものの取り
扱いが容易になる。また、この堰堤8を、占有面積が大
きい方のベアチップ1を実装するためのボンディングパ
ッドの直下の裏面の位置に備えるようにすると、占有面
積が大きい方のベアチップ1をワイヤーボンディングす
る際のボンディング性を向上させることができる。
FIG. 2 is a sectional view showing a second embodiment. As shown in FIG. 2, the semiconductor device according to the second embodiment differs from the semiconductor device according to the first embodiment in that the printed area on the printed board 3 on which the bare chip 2 with the smaller area is mounted is mounted. At a position surrounding the bare chip 2 on the substrate surface, a dam 8 higher than the height of the bonding wire 6 connecting the bare chip 2 and the printed board 3 is provided. When this dam 8 is provided, the dam 8
Since the bonding wire 6 is protected by this, handling of the bare chip 2 having the smaller occupied area is facilitated. Further, when this dam 8 is provided at a position on the back surface immediately below the bonding pad for mounting the bare chip 1 having the larger occupied area, the bonding property when wire bonding the bare chip 1 having the larger occupied area is improved. Can be improved.

【0011】さらに、図3は第3の実施の形態を示す断
面図である。図3に示すように、第3の実施の形態の半
導体装置では、両面にベアチップ11、12と接続可能
な回路を有したプリント基板3と外部入出力端子となる
リードフレーム4を接合し、さらにプリント基板3の両
面にベアチップ11、12を実装した後、このベアチッ
プ11、12を実装したプリント基板3をモールド樹脂
5で封止している。そして、プリント基板3の一方の面
にはワイヤーボンデイング方式によりベアチップ12と
プリント基板3を実装し、他方の面にはフリップチップ
方式によりベアチップ11とプリント基板3を実装して
いる。なお、この実施の形態におけるベアチップ11の
一方の面には、図3に示すように、バンプと呼ばれる接
点9を形成しているので、ベアチップ11をフリップチ
ップ方式によりプリント基板3上の回路に接合すること
ができる。このように一方の面にはフリップチップ方式
で、他方の面にはワイヤーボンデイング方式でベアチッ
プをプリント基板に実装するようにした場合には、両方
の面にワイヤーボンデイング方式で実装する場合に問題
となる、後からのワイヤーボンデイングの際にブロック
ヒーターの設置面を実装面の裏面側に確保できにくいと
いう問題が生じないため、プリント基板の両面にベアチ
ップを容易に実装することが可能となる。
FIG. 3 is a sectional view showing a third embodiment. As shown in FIG. 3, in the semiconductor device according to the third embodiment, a printed board 3 having circuits connectable to bare chips 11 and 12 on both sides and a lead frame 4 serving as an external input / output terminal are joined. After mounting the bare chips 11 and 12 on both sides of the printed board 3, the printed board 3 on which the bare chips 11 and 12 are mounted is sealed with the mold resin 5. The bare chip 12 and the printed circuit board 3 are mounted on one surface of the printed circuit board 3 by a wire bonding method, and the bare chip 11 and the printed circuit board 3 are mounted on the other surface by a flip chip method. As shown in FIG. 3, a contact 9 called a bump is formed on one surface of the bare chip 11 in this embodiment, so that the bare chip 11 is joined to a circuit on the printed circuit board 3 by a flip chip method. can do. In this way, if the bare chip is mounted on the printed circuit board using the flip chip method on one side and the wire bonding method on the other side, there is a problem when mounting the bare chip on both sides using the wire bonding method. In other words, there is no problem that it is difficult to secure the installation surface of the block heater on the back surface side of the mounting surface when wire bonding is performed later, so that it is possible to easily mount bare chips on both surfaces of the printed circuit board.

【0012】[0012]

【発明の効果】請求項1に係る発明の半導体装置は、プ
リント基板上の占有面積が大きい方のベアチップを実装
する側のプリント基板の表面に、リードフレームとの接
合部を配置しているので、占有面積が小さい方のベアチ
ップを先に実装しておくと、占有面積が大きい方のベア
チップを実装する際に、ワイヤーボンディングに必要な
ブロックヒーターの設置面をベアチップの実装面の裏面
側に確保できるため、プリント基板の両面にベアチップ
をワイヤーボンディング法によって実装することが可能
になる。
In the semiconductor device according to the first aspect of the present invention, the joint portion with the lead frame is arranged on the surface of the printed circuit board on which the bare chip having the larger occupied area on the printed circuit board is mounted. If the bare chip with the smaller occupied area is mounted first, the mounting surface of the block heater required for wire bonding is secured on the back side of the bare chip mounting surface when mounting the bare chip with the larger occupied area Therefore, bare chips can be mounted on both sides of the printed circuit board by a wire bonding method.

【0013】請求項2に係る発明の半導体装置は、プリ
ント基板上の占有面積が小さい方のベアチップを実装す
る側のプリント基板表面の、このベアチップを包囲する
位置に、このベアチップとプリント基板を接続するボン
ディングワイヤーの高さより高い堰堤を設けているた
め、堰堤によってボンディングワイヤーが保護される。
従って請求項2に係る発明の半導体装置は、前記の請求
項1に係る発明の効果に加えて、占有面積が小さい方の
ベアチップを実装したものの取り扱いが容易になるとい
う効果も奏する。
According to a second aspect of the present invention, the bare chip is connected to the printed circuit board at a position surrounding the bare chip on the surface of the printed circuit board on which the bare chip occupying the smaller area on the printed circuit board is mounted. Since the bank is higher than the height of the bonding wire, the bonding wire is protected by the bank.
Therefore, the semiconductor device according to the second aspect of the present invention has an effect that, in addition to the effect of the first aspect of the present invention, it is easy to handle a device mounted with a bare chip having a smaller occupied area.

【0014】請求項3に係る発明の半導体装置の製造方
法によれば、プリント基板の両面にベアチップをワイヤ
ーボンディング法によって実装した半導体装置を製造す
ることが可能になる。
According to the method of manufacturing a semiconductor device according to the third aspect of the present invention, it is possible to manufacture a semiconductor device in which bare chips are mounted on both sides of a printed board by a wire bonding method.

【0015】請求項4に係る発明の半導体装置は、プリ
ント基板の一方の面にはワイヤーボンデイング方式によ
りベアチップとプリント基板を実装し、他方の面にはフ
リップチップ方式によりベアチップとプリント基板を実
装しているので、プリント基板の両面にベアチップを容
易に実装することが可能となる。
According to a fourth aspect of the present invention, a bare chip and a printed circuit board are mounted on one surface of a printed circuit board by a wire bonding method, and a bare chip and a printed circuit board are mounted on the other surface by a flip chip method. Therefore, bare chips can be easily mounted on both sides of the printed circuit board.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態を示す断面図であ
る。
FIG. 1 is a cross-sectional view showing a first embodiment of the present invention.

【図2】本発明の第2の実施の形態を示す断面図であ
る。
FIG. 2 is a sectional view showing a second embodiment of the present invention.

【図3】本発明の第3の実施の形態を示す断面図であ
る。
FIG. 3 is a sectional view showing a third embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1、2、11、12 ベアチップ 3 プリント基板 4 リードフレーム 5 モールド樹脂 6 ボンディングワイヤー 7 接合部 8 堰堤 9 接点 1, 2, 11, 12 Bare chip 3 Printed circuit board 4 Lead frame 5 Mold resin 6 Bonding wire 7 Joint 8 Dam 9 Contact

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 両面にベアチップ(1、2)と接続可能
な回路を有したプリント基板(3)と外部入出力端子と
なるリードフレーム(4)を接合し、さらに該プリント
基板(3)の両面にベアチップ(1、2)を実装した
後、このベアチップ(1、2)を実装したプリント基板
(3)をモールド樹脂(5)で封止してなる半導体装置
において、プリント基板(3)上の占有面積が大きい方
のベアチップ(1)を実装する側のプリント基板(3)
の表面に、リードフレーム(4)との接合部(7)を配
置したことを特徴とする半導体装置。
1. A printed circuit board (3) having a circuit connectable to bare chips (1, 2) on both sides and a lead frame (4) serving as an external input / output terminal are joined. After mounting the bare chips (1, 2) on both surfaces, the printed circuit board (3) on which the bare chips (1, 2) are mounted is sealed with a mold resin (5). Printed circuit board (3) on the side on which the bare chip (1) occupying the larger area is mounted
A semiconductor device having a joint (7) with a lead frame (4) disposed on the surface of the semiconductor device.
【請求項2】 プリント基板(3)上の占有面積が小さ
い方のベアチップ(2)を実装する側のプリント基板
(3)表面の、このベアチップ(2)を包囲する位置
に、このベアチップ(2)とプリント基板(3)を接続
するボンディングワイヤー(6)の高さより高い堰堤
(8)を設けたことを特徴とする請求項1記載の半導体
装置。
2. The bare chip (2) is placed on the surface of the printed circuit board (3) on the side on which the bare chip (2) occupying the smaller area on the printed circuit board (3) is mounted, in a position surrounding the bare chip (2). 2. The semiconductor device according to claim 1, wherein a dam is provided which is higher than the height of a bonding wire connecting the printed circuit board and the printed circuit board.
【請求項3】 プリント基板(3)上の占有面積が小さ
い方のベアチップ(2)を先にプリント基板(3)に実
装した後、プリント基板(3)上の占有面積が大きい方
のベアチップ(1)をプリント基板(3)に実装するこ
とを特徴とする請求項1又は請求項2記載の半導体装置
の製造方法。
3. The bare chip (2) occupying a smaller area on the printed circuit board (3) is mounted on the printed circuit board (3) first, and then the bare chip (2) occupied on the printed circuit board (3) is larger. 3. The method for manufacturing a semiconductor device according to claim 1, wherein 1) is mounted on a printed circuit board.
【請求項4】 両面にベアチップ(11、12)と接続
可能な回路を有したプリント基板(3)と外部入出力端
子となるリードフレーム(4)を接合し、さらに該プリ
ント基板(3)の両面にベアチップ(11、12)を実
装した後、このベアチップ(11、12)を実装したプ
リント基板(3)をモールド樹脂(5)で封止してなる
半導体装置において、プリント基板(3)の一方の面に
はワイヤーボンデイング方式によりベアチップ(12)
をプリント基板(3)に実装し、他方の面にはフリップ
チップ方式によりベアチップ(11)をプリント基板
(3)に実装していることを特徴とする半導体装置。
4. A printed circuit board (3) having a circuit connectable to bare chips (11, 12) on both sides and a lead frame (4) serving as an external input / output terminal are joined. After mounting bare chips (11, 12) on both sides, the printed circuit board (3) on which the bare chips (11, 12) are mounted is sealed with a mold resin (5). Bare chip (12) on one side by wire bonding method
Is mounted on a printed circuit board (3), and a bare chip (11) is mounted on the printed circuit board (3) on the other surface by a flip chip method.
JP1632397A 1997-01-30 1997-01-30 Semiconductor device and its manufacture Pending JPH10214934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1632397A JPH10214934A (en) 1997-01-30 1997-01-30 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1632397A JPH10214934A (en) 1997-01-30 1997-01-30 Semiconductor device and its manufacture

Publications (1)

Publication Number Publication Date
JPH10214934A true JPH10214934A (en) 1998-08-11

Family

ID=11913274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1632397A Pending JPH10214934A (en) 1997-01-30 1997-01-30 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPH10214934A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6800943B2 (en) * 2001-04-03 2004-10-05 Matsushita Electric Industrial Co., Ltd. Solid image pickup device
US6812556B2 (en) 2002-04-05 2004-11-02 Oki Electric Industry Co., Ltd. Multi-chip package semiconductor device having plural level interconnections
JP2017126774A (en) * 2011-04-04 2017-07-20 ローム株式会社 Semiconductor device and manufacturing method of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6800943B2 (en) * 2001-04-03 2004-10-05 Matsushita Electric Industrial Co., Ltd. Solid image pickup device
US6812556B2 (en) 2002-04-05 2004-11-02 Oki Electric Industry Co., Ltd. Multi-chip package semiconductor device having plural level interconnections
JP2017126774A (en) * 2011-04-04 2017-07-20 ローム株式会社 Semiconductor device and manufacturing method of semiconductor device

Similar Documents

Publication Publication Date Title
US20010035569A1 (en) Resin-packaged semiconductor device
JP2002222889A (en) Semiconductor device and method of manufacturing the same
KR100825784B1 (en) Semiconductor package suppressing a warpage and wire open defects and manufacturing method thereof
JPH09260436A (en) Semiconductor device
JPH11260851A (en) Semiconductor device and its manufacture
JPH0547998A (en) High density mounting semiconductor device
JPH10214934A (en) Semiconductor device and its manufacture
JPH08153747A (en) Semiconductor chip and semiconductor device using the chip
JP2845218B2 (en) Electronic component mounting structure and method of manufacturing the same
KR100207902B1 (en) Multi chip package using lead frame
JPH1074887A (en) Electronic part and its manufacture
JP2936819B2 (en) IC chip mounting structure
JPH0697349A (en) Resin sealed semiconductor device and production thereof
JP3529507B2 (en) Semiconductor device
JP2000286372A (en) Manufacture of semiconductor device
JP2000286376A (en) Manufacture of semiconductor device
JP2885786B1 (en) Semiconductor device manufacturing method and semiconductor device
JP2822990B2 (en) CSP type semiconductor device
JP3965767B2 (en) Semiconductor chip substrate mounting structure
JP2001007238A (en) Method of packaging wafer-level integrated circuit device
KR100201379B1 (en) Attaching method of semiconductor chip using a solder ball and structure of the same
JP3145892B2 (en) Resin-sealed semiconductor device
JP2003007904A (en) Semiconductor device
KR200172710Y1 (en) Chip size package
JP5003451B2 (en) Resin mold package type electronic device and manufacturing method thereof