JP3965767B2 - Semiconductor chip substrate mounting structure - Google Patents
Semiconductor chip substrate mounting structure Download PDFInfo
- Publication number
- JP3965767B2 JP3965767B2 JP09325798A JP9325798A JP3965767B2 JP 3965767 B2 JP3965767 B2 JP 3965767B2 JP 09325798 A JP09325798 A JP 09325798A JP 9325798 A JP9325798 A JP 9325798A JP 3965767 B2 JP3965767 B2 JP 3965767B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- semiconductor chip
- chip
- hole
- rows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/45124—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/4824—Connecting between the body and an opposite side of the item with respect to the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/49105—Connecting at different heights
- H01L2224/49109—Connecting at different heights outside the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49175—Parallel arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、半導体チップをワイヤボンディングにより配線基板に電気的に接続する半導体チップの基板実装構造に関し、特に構造の小型化に関する。
【0002】
【従来の技術】
近年、機器の小型化に伴い、高密度実装に適しているベアチップ実装が盛んに検討されている。このベアチップ実装としては、図3及び図4に示す様な方式がある。ここで図3及び図4において、(b)は(a)のB−B断面図である。
図3はワイヤボンディング方式であり、半導体チップ1の電極取出部と配線基板2との間をワイヤボンディングによるワイヤ3にて結線した後、接続部分の保護のため樹脂4により全体を封止する。
【0003】
一方、図4はフリップチップ方式であり、半導体チップ1の電極取出部に半田で盛り上がらせて形成したバンプ5によって、半導体チップ1を配線基板2に接続する。また、上記両方式の他、配線フィルムを用いるTAB方式(テープキャリア方式)がある。
【0004】
【発明が解決しようとする課題】
しかしながら、ワイヤボンディング方式の場合、一般的にAlパッド上にAuボールワイヤを超音波や熱の接合エネルギーの印加により圧着するという成熟した技術がある反面、図3の様に、半導体チップ1周辺から外部の配線基板2へボンディングが行われていることやワイヤ3のループ(ワイヤループ)の形成、封止樹脂4の関係等から、実装厚・実装面積に限界があり、チップサイズの実装構造とすることは不可能である。
【0005】
また、フリップチップ方式は、各種実装法の中で最も実装面積が小さくかつ最も薄型実装が可能であるが、図4に示す様に、バンプ5の形成処理が必要なことや、半導体チップ(例えばSiチップ等)1と配線基板(例えばアルミナ基板)2との材料の熱膨張率の差に起因するバンプ5の熱疲労寿命が信頼性に支障をきたすなどの問題がある。さらには、この熱膨張率の差によってチップ1の大きさが制限されるだけでなく、配線基板2についてもSi基板、セラミック基板あたりまでが実用化対象領域と考えられている。
【0006】
また、TAB方式に関しても、同様に、実装面積の限界、バンプ形成処理などが問題としてあげられる。
以上の点から本発明者は、比較的信頼性に優れ、材料の制約の少ないワイヤボンディング方式の実装構造を用いて、上記問題点を解決することとした。そこで、本発明の目的は、半導体チップを配線基板に搭載し、両者をワイヤボンディングで接続する実装構造において、チップの実装面積をチップサイズにまで縮小可能な構成を提供することとする。
【0007】
【課題を解決するための手段】
本発明は、チップ配置の向き及びボンディングワイヤの接続方向という点に着目してなされたものである。すなわち、請求項1記載の発明においては、片面(21)に電極取出部(22)を有する半導体チップ(20)と、片面(11)側から他面(12)側に貫通する貫通穴(13)を有する配線基板(10)とを備え、半導体チップ(20)の片面(21)と配線基板(10)の片面(11)とを、電極取出部(22)と貫通穴(13)とが対応するように対向配置して接着し、電極取出部(22)と配線基板(10)の他面(12)とを、貫通穴(13)を通してワイヤボンディングすることにより、半導体チップ(20)と配線基板(10)とを電気的に接続したことを特徴としている。また、本発明は、半導体チップ(20)の片面(21)には電極取出部(22)が4列に配置されており、貫通穴(13)は4列に配置された電極取出部(22)の各々の2列に対応して2個設けられており、それぞれの貫通穴(13)は2列に配置された電極取出部(22)の配置スペースの大きさに対応して長方形状に開けられており、4列に配置された電極取出部(22)、2個の貫通穴(13)及びワイヤボンディングによって形成されたワイヤ(40)は、樹脂(50)により全体が一括して封止されていることを特徴としている。
【0008】
本発明では、半導体チップ(20)の電極取出部(22)は、半導体チップ(20)の中央部からワイヤボンディングにより配線基板(10)の他面(12)と接続されるため、半導体チップ(20)の片面(21)と対向する配線基板(10)の片面(11)には、半導体チップ(20)のみの配置スペースがあればよい。従ってチップの実装面積をチップサイズにまで縮小可能とできる。
【0009】
また、ワイヤボンディングによるワイヤ(40)は、半導体チップ(20)の電極取出部(22)から配線基板(10)の他面(12)側に至るように形成され、貫通穴(13)内部のスペースに形成されるため、ワイヤループが半導体チップ(20)及び配線基板(10)から突出する部分を小さく抑えることができ、実装厚さもチップサイズとできる。
【0011】
なお、上記各手段の括弧内の符号は、後述する実施形態記載の具体的手段との対応関係を示すものである。
【0012】
【発明の実施の形態】
以下、本発明を図に示す実施形態について説明する。
(第1の参考例)
図1に第1の参考例に係る半導体チップの基板実装構造を示す。図1において、10は配線基板であり、図示しない配線部が形成されている。ここで、(a)は配線基板10の表面(請求項でいう片面)11からみた図、(b)は(a)のA−A断面図、(c)は配線基板10の裏面(請求項でいう他面)12からみた図である。
【0013】
20は、片面21を拡散面としてデバイスが形成された半導体チップ(半導体素子)である。半導体チップ(以下チップという)20は、片面21の中央部に縦2列に配置された複数個のパッド(接合部)22を有する。これらパッド22は、上記デバイスと導通する電極取出部として構成されている。
また、配線基板10には、表面11から裏面12に貫通するワイヤ通孔(貫通穴)13が形成されている。ワイヤ通孔13は、パッド22の配置スペースの大きさに対応した長方形状に開けられており、後述のワイヤボンディングによるワイヤ40が通るための孔となっている。
【0014】
チップ20は、片面21を配線基板10の表面11に対向配置させた形(いわゆるフェースダウン)にて接着されており、パッド22はワイヤ通孔13に対応した位置にて、ワイヤ通孔13から配線基板10の裏面12側を覗くようになっている。なお、チップ20と配線基板10とは、ダイボンディングされ、両面11、21間に介在する接着剤30によって接着されている。
【0015】
また、配線基板10において、裏面12のワイヤ通孔13縁部には、パッド22の数に対応した数の電極部14が設けられており、これら電極部14は、配線基板10の上記配線部と導通されている。
そして、チップ20の各パッド22は各々、ワイヤ通孔13を通るワイヤ40によって、配線基板10の裏面12に設けられた各電極部14に電気的に接続されている。これらワイヤ40はAu(金)線またはAl(アルミニウム)線等からなり、通常のワイヤボンディングにより結線されている。
【0016】
また、ワイヤ40及びワイヤ40の接続部の保護のため、パッド22、ワイヤ通孔13及びワイヤ40は、モールド樹脂(樹脂)50によって封止されている。第1の参考例の半導体チップの基板実装構造は、かかる構成を有するものであるが、本構造の製造方法について概略を述べておく。
【0017】
パッド22とワイヤ通孔13とを対応させつつ、チップ20の片面21と配線基板10の表面11とを対向配置させ、これら両面11、21をダイボンディングする。続いて、パッド22と電極部14とを、各々Au線またはAl線によりワイヤボンディングした後、ワイヤ40及びワイヤ40の接続部を樹脂封止する。こうして図1に示す半導体チップの基板実装構造となる。
【0018】
ところで、上述のように、通常のワイヤボンディング方式の場合、ワイヤをチップの周りに引き出すことや封止樹脂の関係によりどうしても実装面積がチップサイズより大きくなってしまう。また、フリップチップにおいては実装面積がチップサイズではあるが、バンプ形成処理や、バンプの信頼性上の問題により基板種やチップの大きさが限られてしまう。
【0019】
しかし、第1の参考例では、ワイヤ通孔13を通して配線基板10の裏面12にワイヤボンディングが施してあるため、配線基板10の表面11における実装面積としては、チップ20のみの配置スペースがあればよく、まさにチップサイズの面積実装が可能となる。また、配線基板10の裏面12に関してもチップ10の中央部からワイヤボンディングが施してあるため、配線基板12へのセカンドボンディングは表面11のチップサイズ面積内に納まる。
【0020】
また、第1の参考例では、配線基板10の表面11に、チップ20からのワイヤボンディングが施されていないため、配線基板10やチップ20から突出するワイヤループを抑えることができ、また、フリップチップ方式のようなバンプもないため、実装厚もチップサイズとできる。また、第1の参考例では、信頼性の面に関しても、熱膨張率の差に起因する熱疲労寿命に問題を抱えているバンプ技術ではなく、成熟されたワイヤボンディング技術を用いているため問題はない。そのため、熱膨張率の影響は大きくなく、配線基板10の種類やチップ20のサイズも制限されることはない。
【0021】
さらに、第1の参考例では、樹脂封止に関してもワイヤ通孔13の真上から行うことができるのでワイヤ40への負荷が少なく、ワイヤ流れによる(AuまたはAl線間の)短絡やワイヤ切断も押さえることができる。以上のように、第1の参考例では、中央縦2例にパッド22が配列してあるチップ20を、予めワイヤ通孔13の開いている配線基板10に、パッド22を下向き(フェースダウン)に接着し、配線基板10のワイヤ通孔13を通して裏面12から、電極部14とパッド22との両側にワイヤボンディングを行い、樹脂封止することで、本発明の目的を達成するものである。
【0022】
ところで、上記図1では、配線基板10のワイヤ通孔13が1個、チップ20のパッド22が2列の場合におけるワイヤボンディングを例にとって説明をしたが、第1の参考例において、それらの数に制限はない。図2に、上記図1の図示例とは異なる3つの変形例を示す。なお、以下、主として上記図1と異なる部分について述べることとし、同一部分については、図中同一符号を付して説明を省略する。また、図2において符号は省略したが、ワイヤ40の配線基板10側接続部分は、上記図1と同様に電極部14である。
【0023】
(第2の参考例):第2の参考例を図2(a)に示す。本例ではパッド22を4列とし、ワイヤ通孔13は1個であるが内周面に段部130を有することが異なる。チップ10の中央部には4列のパッド22が配置してあり、その配置スペースに対応した大きめのワイヤ通孔13が設けられている。そのワイヤ通孔13を通して、上記図1の構成と同様にワイヤボンディングが施され、樹脂封止されている。
【0024】
この場合、ワイヤ40の数が多くなったことにより、ワイヤループが大きくなってしまうので、配線基板10において、ワイヤ通孔13に段部130を設けることによりそれを防いでいる。従って、4列のパッドを配列し、段部130にて更にワイヤボンディング接続可能とすることにより、ボンディング数の増加が図れる。
【0025】
(本実施形態):図2(b)に本実施形態を示す。本例ではパッド22を4列とし、ワイヤ通孔13を2個としたことが異なる。チップ20には4列のパッド22が配置してあるが、片側の2列と他側の2列との間に、ある程度間隔を設けてある。ワイヤ通孔13は、パッド22における各々の2列に対応した2つのワイヤ通孔13a、13bとからなる。各ワイヤ通孔13a、13bを通して、上記図1の構成と同様にワイヤボンディングが施され、樹脂封止されている。
【0026】
従って、本例では、4列のパッド22を配列し、ワイヤ通孔13を2個としたことによりボンディング数の増加が図れ、更に、パッド22をチップ20の中央部に集める必要がなくなる。
(第3の参考例):図2(c)に第3の参考例を示す。本例は、上記第1の参考例および本実施形態を組み合わせたものであり、ボンディング数の大幅な改善(図では6列のパッド22)ができる。
【0027】
なお、以上述べた各図示例は、チップのパッド数、配置、ワイヤ通孔の数、配線基板の段部の組合せの代表的なものを示したが、これらの組み合わせによるチップサイズ内でのワイヤボンディング数の選択は自由であり、大幅な改善も可能である。また、チップ20の片面21はパッド22が形成されていればよく、拡散面でなくともよい。
【図面の簡単な説明】
【図1】 本発明の第1の参考例に係る半導体チップの基板実装構造を示す図である。
【図2】 (a)及び(c)は半導体チップの基板実装構造の参考例を示す図である、(b)は半導体チップの基板実装構造の実施例を示す図である。
【図3】 従来のワイヤボンディング方式の実装構造を示す図である。
【図4】 従来のフリップチップ方式の実装構造を示す図である。
【符号の説明】
10…配線基板、11…配線基板の表面、12…配線基板の裏面、13…ワイヤ通孔(貫通穴)、20…半導体チップ、21…半導体チップの片面、22…パッド、40…ワイヤ、50…モールド樹脂、130…段部。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate mounting structure of a semiconductor chip in which a semiconductor chip is electrically connected to a wiring substrate by wire bonding, and more particularly to downsizing of the structure.
[0002]
[Prior art]
In recent years, with the miniaturization of equipment, bare chip mounting suitable for high-density mounting has been actively studied. As this bare chip mounting, there are methods as shown in FIG. 3 and FIG. Here, in FIG. 3 and FIG. 4, (b) is a BB cross-sectional view of (a).
FIG. 3 shows a wire bonding method, in which the electrode extraction portion of the
[0003]
On the other hand, FIG. 4 shows a flip-chip method, in which the
[0004]
[Problems to be solved by the invention]
However, in the case of the wire bonding method, in general, there is a mature technique in which an Au ball wire is crimped onto an Al pad by applying ultrasonic or heat bonding energy. On the other hand, as shown in FIG. Due to the fact that bonding is performed to the
[0005]
In addition, the flip chip method has the smallest mounting area and the thinnest mounting among various mounting methods. However, as shown in FIG. 4, the
[0006]
Similarly, regarding the TAB method, the limit of the mounting area, bump formation processing, and the like are raised as problems.
From the above points, the present inventor decided to solve the above problems by using a wire bonding type mounting structure that is relatively excellent in reliability and has few material restrictions. Therefore, an object of the present invention is to provide a configuration in which a chip mounting area can be reduced to a chip size in a mounting structure in which a semiconductor chip is mounted on a wiring board and both are connected by wire bonding.
[0007]
[Means for Solving the Problems]
The present invention has been made paying attention to the orientation of the chip arrangement and the connection direction of the bonding wires. That is, in the first aspect of the invention, the semiconductor chip (20) having the electrode extraction portion (22) on one side (21) and the through hole (13) penetrating from the one side (11) side to the other side (12) side. ) Having a wiring board (10), one side (21) of the semiconductor chip (20) and one side (11) of the wiring board (10), an electrode extraction part (22) and a through hole (13). The semiconductor chip (20) and the semiconductor chip (20) are bonded to each other in a corresponding manner by wire bonding the electrode extraction part (22) and the other surface (12) of the wiring board (10) through the through hole (13). The wiring board (10) is electrically connected. Further, according to the present invention, the electrode extraction portions (22) are arranged in four rows on one surface (21) of the semiconductor chip (20), and the through holes (13) are arranged in four rows. 2) corresponding to each two rows, and each through hole (13) has a rectangular shape corresponding to the size of the arrangement space of the electrode extraction portions (22) arranged in two rows. The electrode extraction portions (22) arranged in four rows, the two through holes (13), and the wire (40) formed by wire bonding are collectively sealed with resin (50). It is characterized by being stopped.
[0008]
In the present invention, the electrode extraction part (22) of the semiconductor chip (20) is connected to the other surface (12) of the wiring substrate (10) by wire bonding from the central part of the semiconductor chip (20). On the one side (11) of the wiring board (10) facing the one side (21) of 20), it is sufficient if there is an arrangement space for only the semiconductor chip (20). Therefore, the chip mounting area can be reduced to the chip size.
[0009]
Further, the wire (40) by wire bonding is formed so as to extend from the electrode extraction part (22) of the semiconductor chip (20) to the other surface (12) side of the wiring substrate (10), and inside the through hole (13). Since the space is formed in the space, the portion where the wire loop protrudes from the semiconductor chip (20) and the wiring substrate (10) can be kept small, and the mounting thickness can also be set to the chip size.
[0011]
Contact name code in parentheses above means show the correspondence with specific means described embodiments to be described later.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments shown in the drawings will be described below.
(First reference example)
FIG. 1 shows a substrate mounting structure of a semiconductor chip according to a first reference example . In FIG. 1,
[0013]
In addition, a wire through hole (through hole) 13 that penetrates from the
[0014]
The
[0015]
Further, in the
Each
[0016]
In addition, the
[0017]
While making the
[0018]
Incidentally, as described above, in the case of the normal wire bonding method, the mounting area is inevitably larger than the chip size due to the wire drawn out around the chip and the relationship of the sealing resin. In flip chip, although the mounting area is the chip size, the substrate type and the chip size are limited due to bump formation processing and bump reliability problems.
[0019]
However, in the first reference example , since wire bonding is applied to the
[0020]
Further, in the first reference example , since the wire bonding from the
[0021]
Furthermore, in the first reference example , the resin sealing can be performed from directly above the wire through-
[0022]
Incidentally, in FIG. 1 described above, the wire bonding in the case where there is one wire through
[0023]
( Second Reference Example ): A second reference example is shown in FIG. In this example, the
[0024]
In this case, since the number of the
[0025]
( Embodiment ): This embodiment is shown in FIG. In this example, the
[0026]
Therefore, in this example, the number of bondings can be increased by arranging four rows of
( Third Reference Example ): A third reference example is shown in FIG. This example is a combination of the first reference example and this embodiment , and can greatly improve the number of bondings (six rows of
[0027]
Each of the illustrated examples described above shows a typical combination of the number of pads of the chip, the arrangement, the number of wire through holes, and the stepped portion of the wiring board. However, the wire within the chip size by these combinations is shown. The number of bondings can be freely selected and can be greatly improved. Further, the one
[Brief description of the drawings]
FIG. 1 is a diagram showing a substrate mounting structure of a semiconductor chip according to a first reference example of the present invention.
FIGS. 2A and 2C are diagrams showing a reference example of a substrate mounting structure of a semiconductor chip, and FIG. 2B is a diagram showing an example of a substrate mounting structure of a semiconductor chip.
FIG. 3 is a view showing a mounting structure of a conventional wire bonding method.
FIG. 4 is a diagram showing a conventional flip-chip mounting structure.
[Explanation of symbols]
DESCRIPTION OF
Claims (1)
片面(11)側から他面(12)側に貫通する貫通穴(13)を有する配線基板(10)とを備え、
前記半導体チップ(20)の前記片面(21)と前記配線基板(10)の前記片面(11)とは、前記電極取出部(22)と前記貫通穴(13)とが対応するように対向配置されて接着されており、
前記電極取出部(22)と前記配線基板(10)の前記他面(12)とを、前記貫通穴(13)を通してワイヤボンディングすることにより、前記半導体チップ(20)と前記配線基板(10)とが電気的に接続されている半導体チップの基板実装構造であって、
前記半導体チップ(20)の前記片面(21)には前記電極取出部(22)が4列に配置されており、前記貫通穴(13)は前記4列に配置された電極取出部(22)の各々の2列に対応して2個設けられており、それぞれの前記貫通穴(13)は前記2列に配置された前記電極取出部(22)の配置スペースの大きさに対応して長方形状に開けられており、
前記4列に配置された電極取出部(22)、前記2個の貫通穴(13)及び前記ワイヤボンディングによって形成されたワイヤ(40)は、樹脂(50)により全体が一括して封止されていることを特徴とする半導体チップの基板実装構造。A semiconductor chip (20) having an electrode extraction part (22) on one side (21);
A wiring board (10) having a through hole (13) penetrating from one side (11) side to the other side (12) side,
The one side (21) of the semiconductor chip (20) and the one side (11) of the wiring board (10) are arranged to face each other so that the electrode extraction part (22) and the through hole (13) correspond to each other. Has been glued,
The semiconductor chip (20) and the wiring substrate (10) are bonded by wire bonding the electrode extraction part (22) and the other surface (12) of the wiring substrate (10) through the through hole (13). Is a substrate mounting structure of a semiconductor chip electrically connected to each other,
The electrode extraction portions (22) are arranged in four rows on the one surface (21) of the semiconductor chip (20), and the through holes (13) are arranged in the four rows of electrode extraction portions (22). The two through holes (13) are rectangular corresponding to the size of the arrangement space of the electrode extraction portions (22) arranged in the two rows. Open to the shape,
The electrode extraction portions (22) arranged in the four rows, the two through holes (13), and the wires (40) formed by the wire bonding are collectively sealed with a resin (50). A substrate mounting structure of a semiconductor chip, characterized in that
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09325798A JP3965767B2 (en) | 1998-04-06 | 1998-04-06 | Semiconductor chip substrate mounting structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09325798A JP3965767B2 (en) | 1998-04-06 | 1998-04-06 | Semiconductor chip substrate mounting structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11297738A JPH11297738A (en) | 1999-10-29 |
JP3965767B2 true JP3965767B2 (en) | 2007-08-29 |
Family
ID=14077450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP09325798A Expired - Fee Related JP3965767B2 (en) | 1998-04-06 | 1998-04-06 | Semiconductor chip substrate mounting structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3965767B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1922764A1 (en) * | 2005-08-24 | 2008-05-21 | Philips Intellectual Property & Standards GmbH | Light emitting diodes and lasers diodes with color converters |
US10008441B2 (en) * | 2015-12-17 | 2018-06-26 | Mediatek Inc. | Semiconductor package |
-
1998
- 1998-04-06 JP JP09325798A patent/JP3965767B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH11297738A (en) | 1999-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3631120B2 (en) | Semiconductor device | |
JP3481444B2 (en) | Semiconductor device and manufacturing method thereof | |
US6664643B2 (en) | Semiconductor device and method for manufacturing the same | |
JP3526788B2 (en) | Method for manufacturing semiconductor device | |
KR100604821B1 (en) | Stack type Ball grid array package and method for manufacturing the same | |
JP3461720B2 (en) | Resin-sealed semiconductor device | |
JP5227501B2 (en) | Stack die package and method of manufacturing the same | |
JP2002222889A (en) | Semiconductor device and method of manufacturing the same | |
US6483187B1 (en) | Heat-spread substrate | |
JP2001223326A (en) | Semiconductor device | |
US5243497A (en) | Chip on board assembly | |
JP3415509B2 (en) | Semiconductor device | |
JP3402086B2 (en) | Semiconductor device and manufacturing method thereof | |
JPH1187556A (en) | Semiconductor device | |
JP3965767B2 (en) | Semiconductor chip substrate mounting structure | |
JP3043484B2 (en) | Semiconductor device | |
JPH0637233A (en) | Semiconductor integrated circuit device and its manufacturing method | |
JP2756791B2 (en) | Resin-sealed semiconductor device | |
JP2005197538A (en) | Semiconductor device | |
JPH06120296A (en) | Semiconductor integrated circuit device | |
KR100218633B1 (en) | Ball grid array package having a carrier frame | |
JPH11204565A (en) | Semiconductor device | |
JP3145892B2 (en) | Resin-sealed semiconductor device | |
KR20020028018A (en) | Multi chip package | |
JP3669986B2 (en) | Semiconductor device and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040611 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050210 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060822 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061019 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070110 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070130 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070330 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20070413 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070508 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070521 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100608 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110608 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110608 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120608 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120608 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130608 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140608 Year of fee payment: 7 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |