JPH10209795A - Vibrator and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To protect a vibrator used in a communication equipment or the like against external noises and to prevent internal radiation from effecting the vibrator onto other components. SOLUTION: This vibrator is provided with a 1st cover 1, a 2nd cover 2 and a diaphragm 3 inserted between them, and at least one or more outer circumferential end faces are processed to be a recessed part. The outer surface of the 2nd cover and the recessed part of the outer circumferential end faces are covered by a conductor 5 and a 2nd external electrode 7 formed to the 1st cover 1, and the conductor 5 are connected electrically. Thus, the conductor 5 acts as a shield for the vibrator to protect the vibrator from external noises, and the effects from internal radiation from the vibrator on other components is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator used for communication equipment and the like and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a quartz oscillator has been known as this type of oscillator. The crystal oscillator is shown in FIGS. In FIG. 5, 1 is a first cover, 2 is a second cover formed of a 400 μm-thick quartz plate, and 3 is a diaphragm formed of a 100 μm-thick quartz plate. The first cover 1 and the second cover 2 are directly joined to the front and back surfaces of the diaphragm 3. Reference numeral 6 denotes an external electrode formed on the outer surface of the first cover.

Next, the internal structure of the crystal unit will be described with reference to FIG. 6 (a) and 6 (e) show the external shape of the crystal unit, wherein FIG.
Indicates the lower external shape. (B), (c),
(D) is an exploded perspective view of the crystal unit viewed from above,
(B) is the second cover, (c) is the diaphragm, and (d) is the first cover.
Shows the cover. Similarly, (f), (g), (h)
Is an exploded perspective view of the crystal unit viewed from below, (f) shows a second cover, (g) shows a diaphragm, and (h) shows a first cover.

In FIG. 6, a diaphragm 3 has a U-shaped cut groove 12 formed inward thereof, thereby forming a tongue-shaped vibrating portion 13. Excitation electrodes 14 are formed on the front and back surfaces of the vibrating portion 13, and the lead electrodes 15 are drawn out through the root portions of the vibrating portion 13, respectively. One end of the lead electrode 15 penetrates the diaphragm 3 through the through-hole 16, and then extends to the side opposite to the root through the side of the vibrating part 13. These lead electrodes 15 are electrically connected to the external electrodes 6 via through holes 17 formed in the corresponding first cover 1.

The diaphragm 3 is sandwiched between the first cover 1 and the second cover 2 at the outer peripheral portions of the front and back surfaces, and is directly joined.
2, the portion where the lead electrode 15 passes through the side of the vibrating portion 13 is joined to the first cover 1 and the second cover 2 outside thereof. ing.

[0006]

However, in the above-described configuration, since the electrode portion having a shielding effect is not provided, the reference frequency of the crystal resonator often fluctuates due to external noise or the like. There has been a problem that radiation from the crystal unit affects other components and changes the frequency.

[0007] In view of the above problems, the present invention does not cause fluctuations in the reference frequency of the crystal unit due to external noise, and can eliminate the influence of radiation on other components.
An object of the present invention is to provide a crystal resonator which simplifies a manufacturing process of a shield electrode and in which electrical conduction of the shield electrode is not cut at an edge portion of the first and second covers, and a method of manufacturing the same.

[0008]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, a quartz oscillator and a method of manufacturing the same according to the present invention are characterized in that at least one or more outer peripheral end portions of the quartz oscillator are first and second.
And the entire surface of the outer surface of the second cover is covered with a conductor.
Since the second external electrode provided at a position other than the first external electrode provided on the outer surface of the cover is electrically conducted through the concave portion, this conductor functions as a shield electrode,
Variations in the reference frequency of the crystal unit due to external noise can be prevented, and the effects of radiation on other components can be excluded. Further, in the manufacturing process of the shield electrode, the conductor can be formed in the concave portion of the end face at the same time as the step of forming the conductor on the outer surface of the second cover, and the conductor formation step can be simplified. Since the concave portion is processed by sandblasting and / or etching, the edge portion is formed with a rounded shape, thereby preventing the conductor from being cut at the edge portion.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claims 1 and 2 of the present invention comprises a diaphragm and first and second diaphragms which cover the front and back surfaces of the diaphragm and sandwich the diaphragm at the outer periphery thereof. The vibrating plate has a tongue-shaped vibrating portion inside a portion sandwiched by the first and second covers, and an exciting electrode is formed on the front and back surfaces of the vibrating portion. A lead electrode is pulled out from each of the electrodes through a root portion of the vibrating portion, and the lead electrode is provided on an outer surface of the first cover through a first through hole provided in the first cover. In a vibrator electrically connected to a first external electrode, at least one or more outer peripheral end portions of the vibrator are formed into recesses over the first and second covers, and the second cover The entire surface of the outer surface is covered with a conductor, And a second external electrode provided at a position other than the first external electrode provided on an outer surface of the first cover is electrically connected through the recess. Functions as a shield for external noise and internal radiation of the vibrator, and has an effect that the conductor can be stably connected to the second external electrode by the concave portion.

According to the third, fourth and fifth aspects of the present invention, the concave portion is processed by sandblasting or etching or by etching after processing by sandblasting, and the edge portion of the concave portion is processed with roundness. Has the effect of preventing the conductor and the second external electrode from being cut at the edge.

According to the present invention, the conductor is formed of a conductive paste or a metal thin film,
The conductor includes at least one component of Au, Ag, Cu, Cr, Ni, or Ni / Cr. It has an effect that the conductor is simultaneously formed on the outer surface and the concave portion of the second cover by using a film printing technique or a thin film forming technique such as vapor deposition or sputtering.

According to the ninth and tenth aspects of the present invention, there is provided a diaphragm plate having at least two or more vibrating portions in the same plane, and a first plate having at least two or more first covers in the same plane. After joining a cover plate and a second cover plate having at least two or more second covers in the same plane to form a plurality of vibrators, the vibrator is divided into individual vibrators. In the manufacturing method, a second through hole is formed in the diaphragm plate at a position to be a division line later, and a third through hole is formed in the first cover plate at a position to be a division line later. Then, a fourth through-hole is formed in the second cover plate at a position to be a division line later, and the second through-hole, the third through-hole, and the fourth through-hole are Diaphragm plate and first cover When joining the plate and the second cover plate, the second cover plate and the second cover plate are overlapped with each other, and the second, third, and second portions are simultaneously formed in the step of forming the conductor on the outer surface of the second cover plate. The conductor can be formed in the through-hole of No. 4, and if divided thereafter, the conductor acts as a shield electrode of the quartz vibrator.

According to an eleventh aspect of the present invention, the diameter of each of the second through-hole, the third through-hole, and the fourth through-hole is at least larger than the dividing line width. This also has the effect of reliably forming a concave portion in the outer peripheral end face portion.

According to a twelfth aspect of the present invention, the center of the diameter of each of the second through-hole, the third through-hole, and the fourth through-hole does not coincide with the center of the division line width. There is an effect that a concave portion is reliably formed in the outer peripheral end surface portion even after individual division.

According to a thirteenth aspect of the present invention, the diameter of the fourth through hole is larger than the diameter of the second through hole, and the diameter of the second through hole is larger than the diameter of the third through hole. When the conductor is formed from the outer surface of the second cover plate, the conductor is surely formed inside the second, third, and fourth through holes at the same time.

According to a fourteenth aspect of the present invention, the diaphragm plate, the first cover plate, and the second cover plate are joined, and an outer surface of the second cover plate, a second through hole, After the conductor is formed inside the third through-hole and the fourth through-hole, the conductor is divided into individual vibrators by a dividing line. This has the effect of increasing the efficiency of the shield electrode forming process. Have.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. The vibrator according to the embodiment of the present invention and the method for manufacturing the same shown in FIGS. 1 to 4 have basically the same configurations as the conventional vibrator and the method for manufacturing the same shown in FIGS. The same components are denoted by the same reference numerals, and detailed description is omitted.

(Embodiment 1) FIG. 1 shows Embodiment 1 of the present invention. In FIG. 1, a conductor 5 covers the entire outer surface of a second cover 2, and the conductor 5 is a quartz oscillator. Is electrically connected to a second external electrode 7 formed in a part of the first cover 1 via a concave portion 4 formed in an outer peripheral end surface of the first cover 1. Since the recess 4 is formed by sandblasting, etching, or etching after sandblasting, the processing edges of the first cover 1 and the second cover 2 are rounded. Due to the roundness of the edge portion, the conductor 5 can be reliably electrically connected to the second external electrode 7 via the concave portion 4 without disconnection.

In FIG. 1, the concave portion 4 is formed at the corner portion of the crystal unit. However, the concave portion 4 may be formed at any position on the outer peripheral end face portion as long as the concave portion 4 does not contact the first external electrode 6. I do not care. There is no problem if the number of the concave portions 4 is one or more, but it is preferable that the number of the concave portions 4 be two in consideration of covering the whole with the conductor 5.

(Embodiment 2) FIGS. 2 and 3 show Embodiment 2 of the present invention. In the drawings, reference numeral 21 denotes a first cover plate, 22 denotes a second cover plate, and 23 denotes a vibration. A plate plate having a plurality of parts in the same plane. Reference numeral 27 denotes a dividing line. This dividing line is not actually drawn, but after the diaphragm plate 23, the first cover plate 21, and the second cover plate 22 are joined together, It shows a margin for cutting between elements when dividing into elements.

Reference numeral 24 denotes a second through hole formed in the diaphragm plate 23 and formed at a position overlapping with the dividing line 27.
It is processed into an elliptical shape. This is because only two diagonal corners of the four corners of the crystal unit are processed into the concave portions in order to make the crystal unit having the concave portion 4 shown in FIG. This is because, when a through-hole is formed on the dividing line, the shape of the crystal resonator as shown in FIG. 2
Reference numeral 5 denotes a third through hole formed in the first cover plate 21, which is formed in an elliptical shape for the same reason as the second through hole.

Reference numeral 26 denotes a fourth through hole formed in the second cover plate 22, which is formed in an elliptical shape for the same reason as the second through hole. The second through-hole 24, the third through-hole 25, and the fourth through-hole 26 are formed in respective through holes so that the recess 4 is formed in the outer peripheral end surface portion even after individual division into the quartz oscillator. The diameter of the hole is designed to be larger than the division line width, or the hole diameter is designed to be shifted from the center of each through hole and the center of the division line width. Reference numeral 31 denotes a state in which the diaphragm plate 23, the first cover plate 21, and the second cover plate 22 are joined, and reference numeral 32 denotes a state in which the quartz resonator is individually divided after the joining.

Next, the features of the second embodiment will be described. After processing the diaphragm plate 23 to a predetermined thickness, the sandblasting method is used to process the diaphragm 23 shown in FIG.
At the same time as forming the kerf 12 and the through hole 16 as shown in FIGS. 1C and 1G, a second through hole 24 is formed, and then the diaphragm portion of the crystal resonator is formed in the same manner as in the prior art. By forming each electrode pattern of FIG.
Process like.

Next, in another process, the first cover plate 21 is processed by sandblasting the first through hole 17 by spraying abrasive grains from the side on which the external electrode 6 is to be formed later, and vibrating to the opposite surface. A dent is dug at a position to avoid contact with the plate, and a through hole 25 is formed by sandblasting. After that, only the surface to be joined to the diaphragm is protected and
The substrate is processed as shown in FIG.

In this etching step, the periphery of the through hole on the bonding surface side of the first through hole 17 is thinly cut.
When joining to the diaphragm, the thickness of the lead electrode of the diaphragm is absorbed, and the diaphragm and the first cover can be directly joined reliably. At the same time, this etching step has the effect of removing the damaged layer formed on the surface processed by sandblasting.

Similarly, in a separate step, the second cover plate 22 is sprayed with abrasive grains from a surface which is not joined to the diaphragm, and the fourth through-hole 26 is processed by sandblasting. 2A is formed by digging a dent at a position where the contact is avoided. Then, after all the processes are completed, the diaphragm plate 23 is sandwiched between the first cover plate 21 and the second cover plate 22 and joined at predetermined positions as shown in FIG. Process.

In this state, the conductor 5 is formed on the entire surface by screen printing or the like from the outer surface side of the second cover. It is important that the conductor 5 is formed so as to penetrate into the second through-hole 24, the third through-hole 25, and the fourth through-hole 26. At this time, since the conductor 5 is formed from the outer surface side of the second cover, the size of the second, third, and fourth through holes is (the fourth through hole 26> the second through hole 24>
It is desirable that the order is the third through-hole 25).

Next, a first external electrode 6 and a second external electrode 7 are formed on the outer surface of the first cover by screen printing or the like. At this time, the order of forming the conductor 5, the first external electrode 6, and the second external electrode 7 may be performed in any order. However, the conductor 5 and the second external electrode 7 must always be electrically conductive. And the conductor 5
After the first external electrode 6 and the second external electrode 7 are formed, a predetermined dividing line 27 is diced to form a part shown in FIG.
These are the individual crystal units as shown in (1).

[0029]

As described above, according to the present invention, at least one or more outer peripheral end portions of the crystal unit are the first and the second.
And the entire surface of the outer surface of the second cover is covered with a conductor.
The second external electrode provided at a position other than the first external electrode provided on the outer surface of the cover can be electrically conducted through the concave portion to protect the crystal unit with the shield electrode. The reference frequency of the crystal resonator does not fluctuate due to noise, and the influence of radiation on other components can be excluded.

Further, since the shield electrode can be formed on a plurality of elements at a time, the manufacturing process is simplified, and the processing is performed by using the sandblasting and etching methods. An object of the present invention is to provide a crystal resonator and a method of manufacturing the same, which are formed so as not to be cut off at the edge portions of the first and second covers, since the shield electrode is not electrically connected to the first and second covers.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an external shape of a crystal unit according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of a case where a plurality of crystal units according to an embodiment of the present invention are manufactured at the same time.

FIG. 3 is a perspective view of the same.

FIG. 4 is a perspective view of a crystal resonator according to an embodiment of the present invention.

FIG. 5 is a perspective view showing an external shape of a conventional crystal unit.

FIG. 6 is a perspective view of a conventional crystal unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st cover 2 2nd cover 3 diaphragm 4 recessed part 5 conductor 6 1st external electrode 7 2nd external electrode 11 vibrator 12 kerf 13 vibrating part 14 excitation electrode 15 lead electrode 16 through hole 17th 1 through hole 21 first cover plate 22 second cover plate 23 diaphragm plate 24 second through hole 25 third through hole 26 fourth through hole 27 division line 31 vibrator 32 vibrator 41 vibrator

Claims (14)

[Claims] 1. A vibration plate, comprising: a first cover and a second cover that cover front and back surfaces of the vibration plate and sandwich the vibration plate at an outer peripheral portion thereof, wherein the vibration plate includes the first and second covers. A tongue-shaped vibrating portion is provided inside the holding portion of the cover, and excitation electrodes are formed on the front and back surfaces of the vibration portion, and lead electrodes are respectively provided from the excitation electrodes via root portions of the vibration portion Wherein the lead electrode is electrically connected to a first external electrode provided on an outer surface of the first cover through a first through hole provided in the first cover, A vibrator, wherein at least one or more outer peripheral end portions of the vibrator are formed into recesses over the first and second covers. 2. A method according to claim 1, wherein the entire surface of the outer surface of the second cover is covered with a conductor, and a second external electrode provided at a position other than the conductor and the first external electrode provided on the outer surface of the first cover is provided. The vibrator according to claim 1, wherein the vibrator is electrically connected through the recess. 3. The vibrator according to claim 1, wherein the concave portion is processed by sand blast. 4. The vibrator according to claim 1, wherein the recess is processed by etching. 5. The vibrator according to claim 1, wherein the concave portions are processed by etching after being processed by sandblasting. 6. The vibrator according to claim 2, wherein the conductor is formed of a conductive paste. 7. The vibrator according to claim 2, wherein the conductor is formed of a metal thin film. 8. The conductor is made of Au, Ag, or C.
The vibrator according to claim 3, further comprising at least one component of u, Cr, Ni, or Ni / Cr. 9. A diaphragm plate having at least two vibrating portions in the same plane, and a first cover plate having at least two or more first covers in the same plane. After joining a second cover plate having at least two or more second covers in a plane to form a plurality of vibrators, the method for manufacturing a vibrator to be divided into individual vibrators, Forming a second through-hole in the diaphragm plate at a position to be a later dividing line, and forming a third through-hole in the first cover plate at a position to be a later dividing line; 2. A method of manufacturing a vibrator, wherein a fourth through hole is formed in a position of a cover plate in a position to be a division line later. 10. The second through-hole, the third through-hole, and the fourth through-hole overlap each other when joining the diaphragm plate, the first cover plate, and the second cover plate. The method for manufacturing a vibrator according to claim 9, wherein: 11. The method according to claim 9, wherein the diameter of each of the second through-hole, the third through-hole, and the fourth through-hole is at least larger than the division line width. 12. The vibration according to claim 9, wherein the center of the diameter of each of the second through-hole, the third through-hole, and the fourth through-hole does not coincide with the center of the division line width. Child manufacturing method. 13. The method according to claim 9, wherein the diameter of the fourth through hole is larger than the diameter of the second through hole, and the diameter of the second through hole is larger than the diameter of the third through hole. A method for manufacturing a vibrator. 14. A diaphragm plate, a first cover plate, and a second cover plate are joined, and an outer surface of the second cover plate, a second through hole, a third through hole, 10. The method of manufacturing a vibrator according to claim 9, wherein after the conductor is formed inside the fourth through hole, the vibrator is individually divided by the dividing line.