JPS5832524B2 - Electrode structure of tuning fork crystal resonator - Google Patents
Electrode structure of tuning fork crystal resonatorInfo
- Publication number
- JPS5832524B2 JPS5832524B2 JP51132544A JP13254476A JPS5832524B2 JP S5832524 B2 JPS5832524 B2 JP S5832524B2 JP 51132544 A JP51132544 A JP 51132544A JP 13254476 A JP13254476 A JP 13254476A JP S5832524 B2 JPS5832524 B2 JP S5832524B2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- tuning fork
- vibrator
- electrode
- peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 12
- 230000002093 peripheral effect Effects 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 6
- 238000001259 photo etching Methods 0.000 claims abstract description 4
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はフォトエツチング法によって作られた音叉型水
晶振動子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a tuning fork type crystal resonator manufactured by a photoetching method.
さらに詳しくは、上記振動子の平面および側面に配置さ
れた電極の形状寸法に関する。More specifically, the present invention relates to the shape and dimensions of the electrodes arranged on the plane and side surfaces of the vibrator.
本発明は、このような振動子のクリスタルインピーダン
ス（ＣＩ）低減を目的とする。The present invention aims to reduce the crystal impedance (CI) of such a vibrator.
第１図は従来の実施例の概念図であり、フォトエツチン
グ法により作られる音叉型水晶振動子１は、いわゆる５
°−Ｘ系の板より作られている。FIG. 1 is a conceptual diagram of a conventional embodiment, and a tuning fork type crystal resonator 1 made by photoetching is a
It is made from °-X type board.
すなわち図において、αは００〜１００、βは７００〜
９００である。That is, in the figure, α is from 00 to 100, and β is from 700 to
It is 900.
中心電極２は他方の叉の周辺電極３と、周辺電極４は他
方の叉の中心電極５とつながっている。The center electrode 2 is connected to the peripheral electrode 3 of the other fork, and the peripheral electrode 4 is connected to the center electrode 5 of the other fork.
第２図は、この振動子をＸ−２平面で切った断面図であ
り、矢印は電界の向きを表わしている。FIG. 2 is a cross-sectional view of this vibrator taken along the X-2 plane, and the arrows indicate the direction of the electric field.
この断面図においては簡単のためにβ−９００としてい
る。In this cross-sectional view, β-900 is used for simplicity.
この振動子によれば旧来のＮＴカット振動子より、数段
低いＣＩが得られるが時計用振動子として考えた場合、
さらにインピーダンス低減が期待された。With this vibrator, a CI several steps lower than the conventional NT cut vibrator can be obtained, but when considered as a watch vibrator,
Further impedance reduction was expected.
本発明は前記目的を達成せんとするものであり以下、図
を用いて説明する。The present invention aims to achieve the above object and will be described below with reference to the drawings.
第３図は本発明に関する音叉型振動子６の概観図であり
、カット角は前記の振動子１と同Ｉ：、、５゜−Ｘ系で
あるが、振動子側面にも電極１が付与されている点で異
なっている。FIG. 3 is a general view of a tuning fork type vibrator 6 according to the present invention, and the cut angle is the same I:, 5°-X system as the above-mentioned vibrator 1, but electrodes 1 are also provided on the side of the vibrator. They are different in that they are
第４図は本発明の詳細な説明するための断面図であり、
β−９００としである。FIG. 4 is a sectional view for explaining the present invention in detail,
It is β-900.
電極膜の厚さは誇張して描いである。The thickness of the electrode film is exaggerated.
周辺電極３，４と側面電極７．８はエツジ部で分断され
ることなくつながっている。The peripheral electrodes 3, 4 and the side electrodes 7.8 are connected without being separated at the edge.
第２図との比較より明らかなように、本例においては側
面電極の効果により、電界のＸ方向成分が多くなり、Ｃ
Ｉが大幅に減少する。As is clear from the comparison with Figure 2, in this example, due to the effect of the side electrodes, the X-direction component of the electric field increases, and C
I decreases significantly.
我々の実験では第２図に示すもののｌ／２の値が得られ
た。In our experiments, we obtained a value of 1/2 as shown in FIG.
以下、図を用いながら本発明の効果を詳しく説明しよう
。Hereinafter, the effects of the present invention will be explained in detail using figures.
第５図は第４図の半分を拡大したもので、叉の幅はＷと
する。FIG. 5 is an enlarged half of FIG. 4, and the width of the prongs is W.
（電極の厚みは誇張して描いであることに注意）。(Note that the electrode thickness is exaggerated).
周知のように屈曲運動のひずみの大きさは中心線Ａ−に
かもの距離に比例する。As is well known, the amount of strain caused by bending motion is proportional to the distance between the center line A and the center line A-.
従って電界はなるべく中心線より離れた、すなわち側面
に近い部分に印加するのがインピーダンス低減の観点点
より望ましい。Therefore, from the viewpoint of impedance reduction, it is desirable to apply the electric field as far away from the center line as possible, that is, to a portion close to the side surfaces.
第５図における外周電極３０幅ｄとＣＩの関係を描いた
のが第６図である。FIG. 6 depicts the relationship between the width d of the outer peripheral electrode 30 and CI in FIG. 5.
なお、このグラフは厚さ１００μ、幅Ｗが３８０μの振
動子について得られた結果である。Note that this graph is the result obtained for a vibrator with a thickness of 100 μm and a width W of 380 μm.
図よりｄ／Ｗが１７６からＯの間にＣＩの極小値が存在
することがわかる。It can be seen from the figure that a minimum value of CI exists between d/W of 176 and 0.
次に、このような電極を側面に形成する一具体例を第７
図と第８図によって説明する。Next, a specific example of forming such an electrode on the side surface will be described in the seventh section.
This will be explained with reference to the drawings and FIG.
水晶エツチング工程による外形形成および電極形成を終
えた多数の振動子６は枠９につながれたまま２枚の蒸着
マスク１０と１１に密着してはさまれる。A large number of oscillators 6 whose external shapes and electrodes have been formed by a crystal etching process are tightly sandwiched between two vapor deposition masks 10 and 11 while being connected to a frame 9.
この状態では水晶板は蒸着装置に入れられマスクに設け
られた孔１２に対応している側面のみに電極膜を付着さ
せる。In this state, the crystal plate is placed in a vapor deposition apparatus and an electrode film is deposited only on the side surface corresponding to the hole 12 provided in the mask.
マスク合せの時の誤差を考慮すると、上記マスクの孔１
２は少なくとも１０μは振動子側へくい込んでいること
が必要である。Considering the error in mask alignment, hole 1 of the above mask
2 must be recessed into the vibrator side by at least 10μ.
言いかえれば、側面電極は蒸着により、振動子側面のみ
ならず音叉平面の外周部に１０μ程度の幅で前記の外周
電極の上にオーバーラツプして付着させることにより、
外周電極と側面電極の間の導通が確実にとられる。In other words, the side electrodes are deposited by vapor deposition not only on the sides of the vibrator but also on the outer periphery of the tuning fork plane with a width of about 10 μm, overlapping the outer periphery electrodes.
Conductivity is ensured between the outer circumferential electrode and the side electrode.
以上の電界印加効率、および製造技術上の観点より、外
周電極の幅は１０μより犬きく、１／６Ｗより小さい範
囲が実用土竜も都合がよい。From the above-mentioned viewpoints of electric field application efficiency and manufacturing technology, it is convenient for the width of the outer peripheral electrode to be more than 10 μm and smaller than 1/6 W for practical use.
本発明によれば、従来例のほぼ半分のＣＩ値の振動子が
わずかの工程増加によって得られるので特に腕時計用小
型振動子としてたいへん優れたものが得られる。According to the present invention, a vibrator with a CI value that is approximately half that of the conventional example can be obtained with a slight increase in the number of steps, so that a particularly excellent small vibrator for a wristwatch can be obtained.
第１図は従来の実施例の概念図である。
第２図は従来の実施例の断面図である。
第３図は本発明に関する振動子６の概念図である。
第４図は本発明に関する振動子６の断面図である。
第５図は振動子側面の拡大図である。
第６図は電極幅とＣＩの関係を表わしている。
第７図は本発明に関する振動子の製造方法を示す図であ
る。
第８図は第７図による工程を説明するための断面図であ
る。
３．４・・・・・・周辺電極、２，５・・・・・・中心
電極、γ。
８・・・・・・側面電極、６・・・・・・振動子、１０
，１１・・・・・・蒸着マスク、１２・・・・・・蒸着
孔。FIG. 1 is a conceptual diagram of a conventional embodiment. FIG. 2 is a sectional view of a conventional embodiment. FIG. 3 is a conceptual diagram of the vibrator 6 according to the present invention. FIG. 4 is a sectional view of the vibrator 6 according to the present invention. FIG. 5 is an enlarged view of the side surface of the vibrator. FIG. 6 shows the relationship between electrode width and CI. FIG. 7 is a diagram showing a method for manufacturing a vibrator according to the present invention. FIG. 8 is a sectional view for explaining the process shown in FIG. 7. 3.4...peripheral electrode, 2,5...center electrode, γ. 8... Side electrode, 6... Vibrator, 10
, 11... Vapor deposition mask, 12... Vapor deposition hole.
Claims (1)
のまわりに７００〜９０°、続いてＹ′軸のまわりにｌ
Ｏ０〜０°回転させた水晶薄板よりフォトエツチング法
を用いて形成され、該振動子の振動面に平行な平面には
中心電極と、それをはさむ周辺電極が設けられ、片方の
叉の中心電極と他方の叉の周辺電極は電気的接続がなさ
れ、前記周辺電極は振動を発生させるに関与する個所に
おいては、前記音叉の叉の幅のｌ／６より狭く、しかも
１０μより広く、さらに該周辺電極は該音叉の振動面と
垂直な平面に付与された側面電極と接続されてなること
を特徴とする音叉型水晶振動子の電極構造。1. In a tuning fork type crystal oscillator, the oscillator rotates the X plate by 700 to 90 degrees around the
It is formed using a photoetching method from a thin crystal plate rotated by 0 to 0 degrees, and a center electrode and peripheral electrodes sandwiching it are provided on a plane parallel to the vibration plane of the vibrator. and the peripheral electrode of the other fork are electrically connected, and the peripheral electrode is narrower than 1/6 of the width of the fork of the tuning fork, and wider than 10 μ, at a portion involved in generating vibration, and An electrode structure for a tuning fork type crystal resonator, characterized in that the electrodes are connected to side electrodes provided on a plane perpendicular to the vibration surface of the tuning fork.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51132544A JPS5832524B2 (en) | 1976-11-04 | 1976-11-04 | Electrode structure of tuning fork crystal resonator |
| CH1297177A CH625100GA3 (en) | 1976-11-04 | 1977-10-25 | Electrode arrangement in a crystal oscillator of the tuning-fork type. |
| GB45784/77A GB1571965A (en) | 1976-11-04 | 1977-11-03 | Quartz crystal tuning fork vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51132544A JPS5832524B2 (en) | 1976-11-04 | 1976-11-04 | Electrode structure of tuning fork crystal resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5357788A JPS5357788A (en) | 1978-05-25 |
| JPS5832524B2 true JPS5832524B2 (en) | 1983-07-13 |
Family
ID=15083751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51132544A Expired JPS5832524B2 (en) | 1976-11-04 | 1976-11-04 | Electrode structure of tuning fork crystal resonator |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5832524B2 (en) |
| CH (1) | CH625100GA3 (en) |
| GB (1) | GB1571965A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4531073A (en) * | 1983-05-31 | 1985-07-23 | Ohaus Scale Corporation | Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity |
| JPH0752820B2 (en) * | 1990-02-28 | 1995-06-05 | 日本電波工業株式会社 | Multi-electrode crystal unit |
-
1976
- 1976-11-04 JP JP51132544A patent/JPS5832524B2/en not_active Expired
-
1977
- 1977-10-25 CH CH1297177A patent/CH625100GA3/en unknown
- 1977-11-03 GB GB45784/77A patent/GB1571965A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000005812A1 (en) * | 1998-07-24 | 2000-02-03 | Seiko Epson Corporation | Piezo-oscillator and production method thereof |
| US6961981B2 (en) | 1998-07-24 | 2005-11-08 | Seiko Epson Corporation | Method of producing a piezoelectric resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1571965A (en) | 1980-07-23 |
| JPS5357788A (en) | 1978-05-25 |
| CH625100GA3 (en) | 1981-09-15 |
| CH625100B (en) |
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