JPS5832524B2 - Electrode structure of tuning fork crystal resonator - Google Patents

Electrode structure of tuning fork crystal resonator

Info

Publication number
JPS5832524B2
JPS5832524B2 JP51132544A JP13254476A JPS5832524B2 JP S5832524 B2 JPS5832524 B2 JP S5832524B2 JP 51132544 A JP51132544 A JP 51132544A JP 13254476 A JP13254476 A JP 13254476A JP S5832524 B2 JPS5832524 B2 JP S5832524B2
Authority
JP
Japan
Prior art keywords
electrodes
tuning fork
vibrator
electrode
peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51132544A
Other languages
Japanese (ja)
Other versions
JPS5357788A (en
Inventor
真 芝田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Priority to JP51132544A priority Critical patent/JPS5832524B2/en
Priority to CH1297177A priority patent/CH625100GA3/en
Priority to GB45784/77A priority patent/GB1571965A/en
Publication of JPS5357788A publication Critical patent/JPS5357788A/en
Publication of JPS5832524B2 publication Critical patent/JPS5832524B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21Crystal tuning forks
    • H03H9/215Crystal tuning forks consisting of quartz
    • GPHYSICS
    • G04HOROLOGY
    • G04FTIME-INTERVAL MEASURING
    • G04F5/00Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The vibrating element (6) consists of an X-cut crystal plate with a rotation of 0 DEG to 10 DEG about the X axis and a rotation of 70 DEG to 90 DEG about the Y' axis. The electrodes are produced by means of photochemical etching techniques. The peripheral outer electrodes (3 and 4) are galvanically connected to side electrodes (7 and 8) over the greatest proportion of their longitudinal dimension. The peripheral electrodes (3, 4) are arranged in parallel with the plane of vibration of the crystal plate and have a width dimension which is equal to or less than the width dimension of the fork tine carrying them; the side electrodes (7, 8) are arranged perpendicular to the plane of vibration of the crystal plate and partially overlap the peripheral electrodes at their common joint. <IMAGE>

Description

【発明の詳細な説明】 本発明はフォトエツチング法によって作られた音叉型水
晶振動子に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a tuning fork type crystal resonator manufactured by a photoetching method.

さらに詳しくは、上記振動子の平面および側面に配置さ
れた電極の形状寸法に関する。
More specifically, the present invention relates to the shape and dimensions of the electrodes arranged on the plane and side surfaces of the vibrator.

本発明は、このような振動子のクリスタルインピーダン
ス(CI)低減を目的とする。
The present invention aims to reduce the crystal impedance (CI) of such a vibrator.

第1図は従来の実施例の概念図であり、フォトエツチン
グ法により作られる音叉型水晶振動子1は、いわゆる5
°−X系の板より作られている。
FIG. 1 is a conceptual diagram of a conventional embodiment, and a tuning fork type crystal resonator 1 made by photoetching is a
It is made from °-X type board.

すなわち図において、αは00〜100、βは700〜
900である。
That is, in the figure, α is from 00 to 100, and β is from 700 to
It is 900.

中心電極2は他方の叉の周辺電極3と、周辺電極4は他
方の叉の中心電極5とつながっている。
The center electrode 2 is connected to the peripheral electrode 3 of the other fork, and the peripheral electrode 4 is connected to the center electrode 5 of the other fork.

第2図は、この振動子をX−2平面で切った断面図であ
り、矢印は電界の向きを表わしている。
FIG. 2 is a cross-sectional view of this vibrator taken along the X-2 plane, and the arrows indicate the direction of the electric field.

この断面図においては簡単のためにβ−900としてい
る。
In this cross-sectional view, β-900 is used for simplicity.

この振動子によれば旧来のNTカット振動子より、数段
低いCIが得られるが時計用振動子として考えた場合、
さらにインピーダンス低減が期待された。
With this vibrator, a CI several steps lower than the conventional NT cut vibrator can be obtained, but when considered as a watch vibrator,
Further impedance reduction was expected.

本発明は前記目的を達成せんとするものであり以下、図
を用いて説明する。
The present invention aims to achieve the above object and will be described below with reference to the drawings.

第3図は本発明に関する音叉型振動子6の概観図であり
、カット角は前記の振動子1と同I:、、5゜−X系で
あるが、振動子側面にも電極1が付与されている点で異
なっている。
FIG. 3 is a general view of a tuning fork type vibrator 6 according to the present invention, and the cut angle is the same I:, 5°-X system as the above-mentioned vibrator 1, but electrodes 1 are also provided on the side of the vibrator. They are different in that they are

第4図は本発明の詳細な説明するための断面図であり、
β−900としである。
FIG. 4 is a sectional view for explaining the present invention in detail,
It is β-900.

電極膜の厚さは誇張して描いである。The thickness of the electrode film is exaggerated.

周辺電極3,4と側面電極7.8はエツジ部で分断され
ることなくつながっている。
The peripheral electrodes 3, 4 and the side electrodes 7.8 are connected without being separated at the edge.

第2図との比較より明らかなように、本例においては側
面電極の効果により、電界のX方向成分が多くなり、C
Iが大幅に減少する。
As is clear from the comparison with Figure 2, in this example, due to the effect of the side electrodes, the X-direction component of the electric field increases, and C
I decreases significantly.

我々の実験では第2図に示すもののl/2の値が得られ
た。
In our experiments, we obtained a value of 1/2 as shown in FIG.

以下、図を用いながら本発明の効果を詳しく説明しよう
Hereinafter, the effects of the present invention will be explained in detail using figures.

第5図は第4図の半分を拡大したもので、叉の幅はWと
する。
FIG. 5 is an enlarged half of FIG. 4, and the width of the prongs is W.

(電極の厚みは誇張して描いであることに注意)。(Note that the electrode thickness is exaggerated).

周知のように屈曲運動のひずみの大きさは中心線A−に
かもの距離に比例する。
As is well known, the amount of strain caused by bending motion is proportional to the distance between the center line A and the center line A-.

従って電界はなるべく中心線より離れた、すなわち側面
に近い部分に印加するのがインピーダンス低減の観点点
より望ましい。
Therefore, from the viewpoint of impedance reduction, it is desirable to apply the electric field as far away from the center line as possible, that is, to a portion close to the side surfaces.

第5図における外周電極30幅dとCIの関係を描いた
のが第6図である。
FIG. 6 depicts the relationship between the width d of the outer peripheral electrode 30 and CI in FIG. 5.

なお、このグラフは厚さ100μ、幅Wが380μの振
動子について得られた結果である。
Note that this graph is the result obtained for a vibrator with a thickness of 100 μm and a width W of 380 μm.

図よりd/Wが176からOの間にCIの極小値が存在
することがわかる。
It can be seen from the figure that a minimum value of CI exists between d/W of 176 and 0.

次に、このような電極を側面に形成する一具体例を第7
図と第8図によって説明する。
Next, a specific example of forming such an electrode on the side surface will be described in the seventh section.
This will be explained with reference to the drawings and FIG.

水晶エツチング工程による外形形成および電極形成を終
えた多数の振動子6は枠9につながれたまま2枚の蒸着
マスク10と11に密着してはさまれる。
A large number of oscillators 6 whose external shapes and electrodes have been formed by a crystal etching process are tightly sandwiched between two vapor deposition masks 10 and 11 while being connected to a frame 9.

この状態では水晶板は蒸着装置に入れられマスクに設け
られた孔12に対応している側面のみに電極膜を付着さ
せる。
In this state, the crystal plate is placed in a vapor deposition apparatus and an electrode film is deposited only on the side surface corresponding to the hole 12 provided in the mask.

マスク合せの時の誤差を考慮すると、上記マスクの孔1
2は少なくとも10μは振動子側へくい込んでいること
が必要である。
Considering the error in mask alignment, hole 1 of the above mask
2 must be recessed into the vibrator side by at least 10μ.

言いかえれば、側面電極は蒸着により、振動子側面のみ
ならず音叉平面の外周部に10μ程度の幅で前記の外周
電極の上にオーバーラツプして付着させることにより、
外周電極と側面電極の間の導通が確実にとられる。
In other words, the side electrodes are deposited by vapor deposition not only on the sides of the vibrator but also on the outer periphery of the tuning fork plane with a width of about 10 μm, overlapping the outer periphery electrodes.
Conductivity is ensured between the outer circumferential electrode and the side electrode.

以上の電界印加効率、および製造技術上の観点より、外
周電極の幅は10μより犬きく、1/6Wより小さい範
囲が実用土竜も都合がよい。
From the above-mentioned viewpoints of electric field application efficiency and manufacturing technology, it is convenient for the width of the outer peripheral electrode to be more than 10 μm and smaller than 1/6 W for practical use.

本発明によれば、従来例のほぼ半分のCI値の振動子が
わずかの工程増加によって得られるので特に腕時計用小
型振動子としてたいへん優れたものが得られる。
According to the present invention, a vibrator with a CI value that is approximately half that of the conventional example can be obtained with a slight increase in the number of steps, so that a particularly excellent small vibrator for a wristwatch can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の実施例の概念図である。 第2図は従来の実施例の断面図である。 第3図は本発明に関する振動子6の概念図である。 第4図は本発明に関する振動子6の断面図である。 第5図は振動子側面の拡大図である。 第6図は電極幅とCIの関係を表わしている。 第7図は本発明に関する振動子の製造方法を示す図であ
る。 第8図は第7図による工程を説明するための断面図であ
る。 3.4・・・・・・周辺電極、2,5・・・・・・中心
電極、γ。 8・・・・・・側面電極、6・・・・・・振動子、10
,11・・・・・・蒸着マスク、12・・・・・・蒸着
孔。
FIG. 1 is a conceptual diagram of a conventional embodiment. FIG. 2 is a sectional view of a conventional embodiment. FIG. 3 is a conceptual diagram of the vibrator 6 according to the present invention. FIG. 4 is a sectional view of the vibrator 6 according to the present invention. FIG. 5 is an enlarged view of the side surface of the vibrator. FIG. 6 shows the relationship between electrode width and CI. FIG. 7 is a diagram showing a method for manufacturing a vibrator according to the present invention. FIG. 8 is a sectional view for explaining the process shown in FIG. 7. 3.4...peripheral electrode, 2,5...center electrode, γ. 8... Side electrode, 6... Vibrator, 10
, 11... Vapor deposition mask, 12... Vapor deposition hole.

Claims (1)

【特許請求の範囲】[Claims] 1 音叉型水晶振動子において、該振動子はX板をX軸
のまわりに700〜90°、続いてY′軸のまわりにl
O0〜0°回転させた水晶薄板よりフォトエツチング法
を用いて形成され、該振動子の振動面に平行な平面には
中心電極と、それをはさむ周辺電極が設けられ、片方の
叉の中心電極と他方の叉の周辺電極は電気的接続がなさ
れ、前記周辺電極は振動を発生させるに関与する個所に
おいては、前記音叉の叉の幅のl/6より狭く、しかも
10μより広く、さらに該周辺電極は該音叉の振動面と
垂直な平面に付与された側面電極と接続されてなること
を特徴とする音叉型水晶振動子の電極構造。
1. In a tuning fork type crystal oscillator, the oscillator rotates the X plate by 700 to 90 degrees around the
It is formed using a photoetching method from a thin crystal plate rotated by 0 to 0 degrees, and a center electrode and peripheral electrodes sandwiching it are provided on a plane parallel to the vibration plane of the vibrator. and the peripheral electrode of the other fork are electrically connected, and the peripheral electrode is narrower than 1/6 of the width of the fork of the tuning fork, and wider than 10 μ, at a portion involved in generating vibration, and An electrode structure for a tuning fork type crystal resonator, characterized in that the electrodes are connected to side electrodes provided on a plane perpendicular to the vibration surface of the tuning fork.
JP51132544A 1976-11-04 1976-11-04 Electrode structure of tuning fork crystal resonator Expired JPS5832524B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP51132544A JPS5832524B2 (en) 1976-11-04 1976-11-04 Electrode structure of tuning fork crystal resonator
CH1297177A CH625100GA3 (en) 1976-11-04 1977-10-25 Electrode arrangement in a crystal oscillator of the tuning-fork type.
GB45784/77A GB1571965A (en) 1976-11-04 1977-11-03 Quartz crystal tuning fork vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51132544A JPS5832524B2 (en) 1976-11-04 1976-11-04 Electrode structure of tuning fork crystal resonator

Publications (2)

Publication Number Publication Date
JPS5357788A JPS5357788A (en) 1978-05-25
JPS5832524B2 true JPS5832524B2 (en) 1983-07-13

Family

ID=15083751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51132544A Expired JPS5832524B2 (en) 1976-11-04 1976-11-04 Electrode structure of tuning fork crystal resonator

Country Status (3)

Country Link
JP (1) JPS5832524B2 (en)
CH (1) CH625100GA3 (en)
GB (1) GB1571965A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005812A1 (en) * 1998-07-24 2000-02-03 Seiko Epson Corporation Piezo-oscillator and production method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity
JPH0752820B2 (en) * 1990-02-28 1995-06-05 日本電波工業株式会社 Multi-electrode crystal unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005812A1 (en) * 1998-07-24 2000-02-03 Seiko Epson Corporation Piezo-oscillator and production method thereof
US6961981B2 (en) 1998-07-24 2005-11-08 Seiko Epson Corporation Method of producing a piezoelectric resonator

Also Published As

Publication number Publication date
CH625100GA3 (en) 1981-09-15
CH625100B (en)
JPS5357788A (en) 1978-05-25
GB1571965A (en) 1980-07-23

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