JPH10189455A5 - - Google Patents

Info

Publication number
JPH10189455A5
JPH10189455A5 JP1996358147A JP35814796A JPH10189455A5 JP H10189455 A5 JPH10189455 A5 JP H10189455A5 JP 1996358147 A JP1996358147 A JP 1996358147A JP 35814796 A JP35814796 A JP 35814796A JP H10189455 A5 JPH10189455 A5 JP H10189455A5
Authority
JP
Japan
Prior art keywords
gas
hole nozzle
film formation
film
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996358147A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10189455A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35814796A priority Critical patent/JPH10189455A/ja
Priority claimed from JP35814796A external-priority patent/JPH10189455A/ja
Publication of JPH10189455A publication Critical patent/JPH10189455A/ja
Publication of JPH10189455A5 publication Critical patent/JPH10189455A5/ja
Pending legal-status Critical Current

Links

JP35814796A 1996-12-27 1996-12-27 成膜装置および成膜方法 Pending JPH10189455A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35814796A JPH10189455A (ja) 1996-12-27 1996-12-27 成膜装置および成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35814796A JPH10189455A (ja) 1996-12-27 1996-12-27 成膜装置および成膜方法

Publications (2)

Publication Number Publication Date
JPH10189455A JPH10189455A (ja) 1998-07-21
JPH10189455A5 true JPH10189455A5 (cg-RX-API-DMAC7.html) 2004-12-02

Family

ID=18457793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35814796A Pending JPH10189455A (ja) 1996-12-27 1996-12-27 成膜装置および成膜方法

Country Status (1)

Country Link
JP (1) JPH10189455A (cg-RX-API-DMAC7.html)

Similar Documents

Publication Publication Date Title
DE60045136D1 (de) Verfahren und Einrichtung zur Herstellung von Interferenzpigmenten
CA2356864A1 (en) Method and apparatus for introducing in continuous a substance in liquid phase into plastics granules
CA2224984A1 (en) Free form article by layer deposition
EP1603154A3 (en) Apparatus and method for surface finishing a silicon film
WO2006068846A3 (en) Dense coating formation by reactive deposition
JPS5531436A (en) Production of fiber or globular particle having specific size from fused material and rotator therefor
ATE318716T1 (de) Herstellungsverfahren von tintenstrahlaufzeichnungsmedien
WO2001066493A3 (en) Permeable composition, controlled release product and methods for the production thereof
JP2004079904A5 (cg-RX-API-DMAC7.html)
CA2346710A1 (en) Controlled release fertilizer compositions and processes for the preparation thereof
JPH10189455A5 (cg-RX-API-DMAC7.html)
US20170028436A1 (en) Controlled Radical Assisted Polymerization
JPH0230119A (ja) 気相成長装置
JPS57128940A (en) Heat treating method for substrate
TW200624181A (en) Coating film forming apparatus and coating film forming method
JPS6412522A (en) Semiconductor crystal epitaxy method
JPS57153757A (en) Painting apparatus
JPS57201571A (en) Production of outside painted steel pipe
EP0922487A3 (en) Method and apparatus for modifying particles
JPS5253770A (en) Multiple effect evaorator for making water
JPS54147783A (en) Cvd device
GB1319441A (en) Production of coated carrier particles
JPS5253947A (en) Method for coting circumference of bottle
JP2004035981A5 (cg-RX-API-DMAC7.html)
KR890001411A (ko) 플라즈마 표면처리 장치와 박막층 제조방법