JPH10177949A5 - - Google Patents

Info

Publication number
JPH10177949A5
JPH10177949A5 JP1996353268A JP35326896A JPH10177949A5 JP H10177949 A5 JPH10177949 A5 JP H10177949A5 JP 1996353268 A JP1996353268 A JP 1996353268A JP 35326896 A JP35326896 A JP 35326896A JP H10177949 A5 JPH10177949 A5 JP H10177949A5
Authority
JP
Japan
Prior art keywords
stage
thrust
control device
amplification method
power amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996353268A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10177949A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35326896A priority Critical patent/JPH10177949A/ja
Priority claimed from JP35326896A external-priority patent/JPH10177949A/ja
Publication of JPH10177949A publication Critical patent/JPH10177949A/ja
Publication of JPH10177949A5 publication Critical patent/JPH10177949A5/ja
Pending legal-status Critical Current

Links

JP35326896A 1996-12-16 1996-12-16 ステージ制御装置 Pending JPH10177949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35326896A JPH10177949A (ja) 1996-12-16 1996-12-16 ステージ制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35326896A JPH10177949A (ja) 1996-12-16 1996-12-16 ステージ制御装置

Publications (2)

Publication Number Publication Date
JPH10177949A JPH10177949A (ja) 1998-06-30
JPH10177949A5 true JPH10177949A5 (enExample) 2004-12-02

Family

ID=18429686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35326896A Pending JPH10177949A (ja) 1996-12-16 1996-12-16 ステージ制御装置

Country Status (1)

Country Link
JP (1) JPH10177949A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001251879A (ja) * 2000-03-02 2001-09-14 Yaskawa Electric Corp 電動機制御装置とその制御方法
JP2010080863A (ja) * 2008-09-29 2010-04-08 Nikon Corp 転写装置及びデバイス製造方法

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