JPH10154329A - Apparatus for production of magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the production efficiency of a wire-shaped magnetic material by providing the apparatus with a magnetic material supplying means for supplying the magnetic material into an evaporation source while heating the magnetic material by high-frequency induction heating and evaporating means. SOLUTION: The wire-shaped magnetic material 10 is drawn out of a wire reel 26 and is then guided by a transverse guide roller 28 and a longitudinal guide roller 29 and curling is straightened by a longitudinal direction straightening roller 30 and a transverse direction straightening roller 31, by which rectilinearity is maintained. The magnetic material 10 is thereafter strongly held by a pinch roller 32 and a wire feed roller 33 and is drawn out by the rotation of this wire feed roller 33. The wire feed roller 33 feeds the wire- shaped magnetic material by driving its wire freed motor. The drawn out magnetic material 10 is continuously supplied through the through-hole of a vapor diffusion control means via a guide roller 34 and a positioning roller 35 into a refractory crucible.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a magnetic recording medium, and more particularly to a method for heating and melting a metal material, evaporating the metal material, and depositing the vapor stream on a base material such as a base film. The present invention relates to an apparatus for manufacturing a magnetic recording medium in which a magnetic recording layer is formed by the method described above.

[0002]

2. Description of the Related Art Conventionally, as a magnetic recording medium, γ-Fe
₂ O ₃ , Co-doped Fe ₃ O ₄ , γ-Fe ₂ O
₃ and Fe ₃ O ₄ beltride compound, Co-doped beltride compound, oxide magnetic material such as CrO ₃ , Ba ferrite, or alloy magnetic material mainly composed of Fe, Co, Ni, etc. The particles of the material, together with the additives, are dispersed and mixed in a polymer binder such as a vinyl chloride-vinyl acetate copolymer, a styrene-butadiene copolymer, an epoxy resin, a polyurethane resin, and the dispersion mixture is mixed with polyethylene terephthalate (PET) or the like. A so-called coating type magnetic tape manufactured by applying a base film (substrate) made of a polyolefin such as polyester or polypropylene, and then curing or drying the base film is widely known.

On the other hand, in recent years, the demand for higher recording density has become stronger, and the density of the magnetic material in the magnetic layer of the magnetic recording medium has been increased, the coercive force has been improved, the magnetic layer has been reduced in thickness, or the frequency characteristics have been shortened. Consideration has been given to shifting to the side.

However, in a coating type tape, it is difficult to satisfy the above-described various conditions required for high-density recording because a binder remains in the magnetic layer.

Therefore, attention has been paid to a method of manufacturing a magnetic recording medium by a vapor deposition method such as vacuum deposition, sputtering, or ion plating, or a plating method such as electroplating or electroless plating, and various proposals have been made. According to these methods, the magnetic layer can be formed by depositing and growing a magnetic material directly on a substrate without using a binder, so that the packing density of the magnetic material in the magnetic layer is increased, and Can also be made thinner.

Further, these vapor deposition methods and the like make it easy to adjust and control the thickness of the film formed on the base film, adjust the coating solution of the magnetic layer in the manufacturing process of the coating type tape, and perform drying after coating. This has practically useful advantages such as eliminating the need for processing steps associated with the formation of a magnetic layer.

[0007] In particular, the vapor deposition method has the advantages that the waste liquid treatment required in the plating method is not required and that the growth rate of the deposited magnetic film is high.
A magnetic tape using a magnetic layer formed on a base film by such a vapor deposition method as a recording layer has a much higher reproduction output and a shorter frequency characteristic of a recording signal than a conventional coating type magnetic tape. It is useful as a high-density magnetic recording medium, for example, it is improved on the wavelength side.

It is known that the manufacture of a magnetic recording medium by a vapor deposition method is performed in detail by, for example, a vacuum vapor deposition apparatus 1 shown in FIG. As shown in FIG.
A long base film 3 made of a non-magnetic material such as a polyester film, a polyamide film, or a polyimide film is formed inside a vacuum chamber 2 in a reduced pressure state. The cooling film 4 is wound in the direction Y. The cooling film 4 is rotated in the direction of arrow Y, and the base film 3 which is transferred from the side of the delivery shaft 5 to the side of the winding shaft 6 is provided on the outer peripheral surface of the cylinder. Conveyed.

The inside of the vacuum chamber 2 is controlled by a partition plate 7 to take up and wind up the base film 3 in a winding chamber 8.
And a deposition chamber 9 for depositing a magnetic material on the base film 3. In the vapor deposition chamber 9, Co, CoNi alloy, CoCr alloy, CoC
An evaporation container 11 containing a magnetic material 10 as an evaporation source such as an rNi alloy is provided, and the magnetic material 10 is heated and evaporated by heating means 12 such as electron gun heating, resistance heating, and high frequency induction heating. Particles of the magnetic material 10 (referred to as magnetic particles or evaporating particles), which evaporate and rise, are continuously deposited on the surface of the base film 3 conveyed in the direction of arrow Y with the rotation of the cooling can 4. They collide and deposit there by cooling, thus forming a magnetic layer.

Here, in order to efficiently deposit the evaporated magnetic material particles on the substrate to increase the vapor deposition efficiency, it is sufficient to prevent the evaporated particles from diffusing widely. According to the technique disclosed in Japanese Patent Application Laid-Open No. 2-56730, the portion between the evaporation source and the cooling can, around which the evaporated particles pass, is surrounded by a peripheral wall to regulate the flow path. In order to do so, for example, a steam diffusion control wall (steam diffusion control means) 15 having a cylindrical shape may be provided. The vapor diffusion control wall 15 has a temperature of the inner wall surface in order to re-evaporate or coagulate and collect the evaporated particles of the magnetic material 10 attached to the inner wall surface or to combine re-evaporation and coagulation and recovery. Is provided with means for heating or cooling.

When such a vapor diffusion control wall 15 is provided, it is difficult to use an electron gun heating means generally used as a heating means. That is, in this case, it is necessary to secure a passage of the electron beam from the electron gun to the magnetic material 10 placed in the evaporating vessel 11.
This is because, when the vapor diffusion control wall 15 is provided above the above, it is difficult to secure the passage trajectory of the electron beam. Therefore, high frequency induction heating means is usually used as the heating means.

The magnetic properties of the magnetic thin film formed on the base film by vapor deposition, particularly its coercive force, depend on the angle formed by the base film 3 when the vapor of the magnetic material 10 reaches the base film 3, ie, the evaporation container 11 The base film 3 of the magnetic material 10 scattered from inside toward the base film 3
Is determined by the angle of incidence on For this reason, usually, the cooling can 4 side of the evaporating vessel 11 (below the cooling can 4 in the figure).
Are provided with masks 13 and 14 serving as shielding members at a predetermined distance from the cooling can 4.
The maximum incident angle is regulated by the mask 13 located on the upstream side with respect to the transport direction, and the minimum incident angle is regulated by the mask 14 located on the downstream side, and the vapor of the magnetic material 10
Through the opening 18 formed by the base film 3 and 14, the liquid is supplied to the surface of the base film 3 from obliquely below in the drawing. The angle of incidence refers to an angle between the base film 3 and a straight line perpendicular to the surface of the base film 3.

It has been found that it is effective to spray oxygen during the vapor deposition in order to further improve the coercive force of the magnetic thin film. In the method of blowing oxygen, usually, a gas blowing unit 17 is provided near a mask 14 located on the downstream side in the transport direction of the base film 3 to blow oxygen gas to the evaporated particles of the magnetic material 10. It is done by. For example, according to the technology disclosed in Japanese Patent Publication No. 2-27732, the oxygen gas is blown from the vicinity of the minimum incident angle, and the inert gas is also blown from the vapor deposition start side (the maximum incident angle side). The filling rate and the magnetic filling rate are adjusted.

Although it is different from the purpose of improving the coercive force, oxygen gas is blown into the system during the vapor deposition also for the purpose of improving the corrosion resistance of the magnetic recording medium. For example, according to the technology disclosed in Japanese Patent Publication No. 3-19621, an oxidizing gas is sprayed into the system from a plurality of nozzles arranged in the width direction of a base film as a substrate to form an element constituting a magnetic layer. To form an oxide, and the oxide film of the oxide has a protective effect against corrosion.

[0015]

In the above-described apparatus for manufacturing a magnetic recording medium, a magnetic material is accommodated in an evaporation source, and the magnetic material is evaporated by heating the evaporation source by high-frequency induction heating or the like to evaporate the magnetic material. Although it is manufactured, since the magnetic material in the evaporation source is reduced by evaporation, it is necessary to supply the magnetic material. However, since the vacuum state is maintained in the apparatus, in order to replenish the magnetic material, the vacuum state is once released, the magnetic material in the form of pellets is replenished into the evaporation source, and the inside of the apparatus is evacuated again. It is necessary to evaporate the magnetic material. For this reason, it is necessary to stop the apparatus once each time the magnetic material replenishment operation is performed, so that the magnetic recording medium cannot be manufactured continuously, and the production efficiency is not so good.

In view of the above circumstances, it is an object of the present invention to provide a magnetic recording medium manufacturing apparatus capable of efficiently manufacturing a magnetic recording medium.

[0017]

According to the present invention, there is provided an apparatus for manufacturing a magnetic recording medium, comprising: transport means for transporting a long flexible substrate in a vacuum atmosphere; and a lower means for transporting the substrate. An evaporation source made of a magnetic material, a high-frequency induction heating evaporator for heating and evaporating the evaporation source, and the heating evaporator restricting an incident angle of a vapor flow of the heated and evaporated magnetic material to the flexible substrate. In the apparatus for manufacturing a magnetic recording medium having a magnetic thin film formed on the flexible substrate, the magnetic material having a linear shape is heated by the high-frequency induction heating and evaporating means.
It is characterized in that a magnetic material supply means for supplying the material into the evaporation source is provided.

Note that the diameter dw of the linear magnetic material, and the heat penetration depth δ determined by the resistivity ρ, the magnetic permeability μ, and the oscillation frequency f of the high-frequency induction heating means are d =
It is preferable that w> δ (δ = (ρ / π · f · μ) ^1/2 ).

It is preferable that the oscillation frequency f of the high-frequency induction heating coil is set so as to satisfy the relation of dw> δ at a temperature equal to or higher than the Curie temperature of the magnetic material.

Further, both ends are opened between the high-frequency induction heating and evaporating means and the flexible substrate for regulating and controlling the diffusion direction of the vapor flow of the magnetic material heated and evaporated by the high-frequency induction heating and evaporating means. Further, a cylindrical vapor flow diffusion control means may be further provided, and the magnetic material supply means may be a means for supplying the magnetic material from an upper opening of the cylindrical vapor flow diffusion control means.

Further, a through-hole penetrating the vapor diffusion preventing means may be formed in a portion of the vapor diffusion preventing means close to the evaporation source, and the magnetic material may be supplied to the evaporation source through the through hole. Good.

In this case, it is preferable that the relationship between the diameter dh of the through hole and the diameter dw of the magnetic material is 2.0 × dw> dh, and when the magnetic material in the evaporation source is substantially dissolved, it passes through the through hole. More preferably, the linear magnetic material is continuously supplied to the evaporation source.

The material supply means may supply the magnetic material into the evaporation source by changing the supply speed of the linear magnetic material in accordance with the position of the molten metal surface in the evaporation source. Preferably, in this case, it is preferable to further include a measuring unit for measuring a molten metal surface height of the magnetic material in the evaporation source.

[0024]

In the apparatus for manufacturing a magnetic recording medium according to the present invention, the linear magnetic material is continuously supplied to the evaporation source, so that the vacuum state of the apparatus is released in order to supply the magnetic material. This eliminates the necessity of supplying the magnetic material efficiently, thereby improving the production efficiency. Also,
Since the linear magnetic material is supplied to the evaporation source by passing through the region subjected to the heating action of the high-frequency induction heating means, the low-temperature linear magnetic material is supplied to the magnetic material melted in the evaporation source. The fluctuation of the evaporation rate due to the above can be prevented.

In the apparatus provided with the vapor diffusion control means, the linear magnetic material is supplied from the upper opening of the vapor diffusion control means so that the linear magnetic material can be supplied without changing the structure of the apparatus. It can be supplied to the evaporation source.

In the apparatus provided with the vapor diffusion control means, a through hole is provided in a portion near the evaporation source of the vapor diffusion control means, and a linear magnetic material is supplied through the through hole to prevent the vapor diffusion. Compared with the case where the magnetic material is supplied from the upper opening of the means, since the evaporation region of the magnetic material and the linear magnetic material do not overlap with each other, the fluctuation of the film thickness distribution of the magnetic film formed on the base material is reduced. Can be prevented. The position of the through-hole can be appropriately selected as a design item depending on the power supplied to the high-frequency induction heating evaporator, the size of the linear magnetic material, the supply speed, and the like.

In this case, it is assumed that the relationship between the diameter dh of the through hole and the diameter dw of the magnetic material has a relationship of 2.0 × dw> dh. It is possible to prevent the magnetic material from being scraped by the through-holes, or from causing cracks in the vapor diffusion control means due to the through-holes contacting the linear magnetic material.

Further, by continuously supplying the magnetic material to the evaporation source, the linear magnetic material is stopped, and the magnetic material and the evaporated magnetic material are prevented from adhering to the through holes.
When the magnetic material is moved again, it is possible to prevent the evaporated magnetic material adhering to the magnetic material from contacting the vapor diffusion control means or the evaporation source and damaging them.

[0029]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a magnetic recording medium manufacturing apparatus according to an embodiment of the present invention.
FIG. 1 shows a schematic configuration of a vacuum evaporation apparatus 1 which is a magnetic recording medium manufacturing apparatus of the present invention.

The illustrated vacuum evaporation apparatus 1 includes a cylindrical cooling can 4 inside a vacuum chamber 2, and a cylindrical film (outer peripheral surface) of the cooling can 4 has a base film as a base material of a magnetic recording medium. 3 is wound. The base film 3 is made of a polyester such as polyethylene terephthalate (PET) or polyethylene naphthalate, a polyolefin such as polypropylene, a cellulose dielectric such as cellulose triacetate or cellulose diacetate, a vinyl resin such as polyvinyl chloride,
It is formed by processing a plastic such as polycarbonate, polyamide, or polyphenylene sulfide into a long film, and the thickness thereof is, for example, 3 to 100 μm. In the present embodiment, one having a thickness of 6 μm is used.

An undercoat is applied to the surface of the base film 3 as necessary. The undercoat is made of a binder (cellulose such as methylcellulose, P
Saturated polyesters such as ET, phenoxy resins, polyamides, polyacrylates, etc.) and fillers (silica, titania, alumina, calcium carbonate, etc.) are dissolved and applied, and the surface projections have a height of 5 to 30 nm.
And has projections with a density of 5 to 100 million / mm ² . In this embodiment, the particle size is 18 μm and the density is 55 million pieces / mm ² . The height and density can be appropriately selected depending on the required adhesion performance and the like.

The base film 3 is further provided with a glow discharge treatment, an electron beam irradiation treatment, an ion irradiation treatment, a heat treatment,
Pretreatment of chemical treatment may be performed.

The base film 3 is wrapped around the take-up shaft 6 from the delivery shaft 5 through the cylindrical surface of the cooling can 4, and is rotated on the cylindrical surface of the cooling can 4 by rotating the cooling can 4 in the direction of arrow Y. For example, it is conveyed at a speed of 10 to 100 m / min, and is taken up on a take-up shaft 6. The cooling can 4 has a diameter
This is a cylindrical drum of 800 mm and width of 400 mm. The surface is hard chrome plated and mirror-polished to 0.2 S or less. Cooling water and other refrigerant (ethylene glycol) are circulated inside. For example, it is maintained at -35 to + 25 ° C.

On the surface of the cooling can 4, masks 13 and 14 whose main body is formed of SUS304 or the like are provided at a predetermined distance from the cooling can 4, circulating cooling water or a cooling medium therein. This distance is between 2 and 15 mm, more preferably between 2 and 10 mm, most preferably between 3 and 5 mm. 2mm
If it is narrower, the space for installing the first gas blowing section described later cannot be secured, and if it is more than 15 mm, the vapor flow goes between the mask and the base film and adheres to the cooling can 4, causing contamination. Because. This is because the heat transfer coefficient between the can and the base film changes in the portion where the dirt is generated, or the adhesion of the can to the base film becomes insufficient and the can becomes easily damaged by heat. The maximum incident angle (θmax) is defined by the mask 13 located on the upstream side in the transport direction of the base film 3 and the minimum incident angle (θmin) is defined by the mask 14 located on the downstream side in the transport direction of the base film 3. The angle of incidence is based on the center of the circle of the melted surface in the refractory crucible 11a, which will be described later. The maximum incident angle (θmax) regulated by the mask 13 is limited to 90 °, more preferably 87 °, most preferably 85 °, and the minimum incident angle regulated by the mask 14. It is desirable that the angle (θmin) is set so that the lower limit is 20 °, more preferably 25 °, and most preferably 30 °. This is because a desired coercive force cannot be obtained outside the above range. Mask 13
The opening width in the width direction (direction perpendicular to the transfer direction of the base film 3) of the mask opening 18 formed by the mask film 14 and the mask opening 14 can be arbitrarily set.

The front surfaces of the masks 13 and 14 are curved along the masks 13 and 14, respectively.
And has a function of preventing the evaporated metal particles of the magnetic material 10 from adhering to the surface of the base material 3, circulating cooling water inside, and a movable type having a main body formed of SUS304 or the like. (Not shown).

The vacuum chamber 2 is provided with a winding chamber 8 for feeding and winding the base film 3 by a partition plate 7;
The base film 3 is partitioned into a deposition chamber 9 for depositing a magnetic material 10 thereon. Each of the winding chamber 8 and the vapor deposition chamber 9 is provided with an exhaust system (not shown) for reducing pressure, and the pressure in each chamber can be adjusted individually. In particular, since an oxidizing gas described below is introduced into the vapor deposition chamber 9 from outside the vacuum chamber 2, the pressure in the chamber and the partial pressures of various residual gases are constantly adjusted by a preparation unit (not shown).

The winding film 8 contains the base film 3.
For example, a device for the pre- and post-treatment described above, such as a glow discharge treatment device, an electron beam irradiation treatment device, an ion irradiation treatment device, a heat treatment device, and a CVD treatment device may be provided. Further, the cooling can 4 is not limited to a cylindrical shape.
An endless belt-shaped metal plate that can form a predetermined slope with respect to the evaporation source 11 may be used.

An evaporation source 11 containing a magnetic material 10 is disposed below the cooling can 4 in the vapor deposition chamber 9. Around the evaporation source 11, the inside of the evaporation source 11 for heating the magnetic material 10 is cooled. A high-frequency induction heating coil 12 having a structure in which water circulates is provided. Further, a high frequency power supply 20 for supplying high frequency power to the high frequency induction heating coil 12 and a high frequency power supply feeder 21 for transmitting high frequency power are provided. As shown in FIG. 2, the evaporation source 11 includes a refractory crucible 11a and a filler 11d filled between the refractory crucible 11a and the high-frequency induction heating coil 12.

The magnetic material 10 is linear and is supplied from a material supply means 25 described later, and is made of, for example, Fe, Co, Ni, or Co.
Ni, FeCo, FeCu, FeCr, CoCr, Co
Cu, CoAu, CoPt, CoW, NiCr, Co
V, MnBi, MnAl, CoFeCr, CoNiC
r, CoRh, CoNiPt, CoNiFe, CoNi
It is appropriately selected from ferromagnetic metals and ferromagnetic alloys such as FeB, FeCoNiCr, and CiNiZn.

The refractory crucible 11a containing the magnetic material 10, which is a component of the evaporation source 11, is made of, for example, MgO, Zr
O ₂ , Al ₂ O ₃ , CaO, Y ₂ O ₃ , ThO ₂ , B
N, BeOCaO stabilized ZrO ₂ , Y ₂ O ₃ stabilized Zr
It is appropriately selected from ceramics such as O ₂ , carbon or a carbon compound, and other heat-resistant materials. Also this refractory crucible
The shape of 11a is a container type having a bottom, the horizontal cross-sectional shape may be a perfect circle, an ellipse, an oval, a square, a rectangle, any other shape, and the vertical cross-section may also be a square, a rectangle, a trapezoid, Any other shape may be used. In this embodiment, the main component of the refractory crucible 11a is Y ₂ O ₃ stabilized ZrO ₂ (chemical component (wt%),
ZrO ₂ ; 88.0 to 95.0%, Y ₂ O ₃ ; 5.0 to 12.0%), cup shape (inner diameter φ80mm, outer diameter φ96mm, height 100mm, internal depth 90mm), ferromagnetic material for evaporation Co ₁₀₀ is used as 10.

The filler 11 d is filled between the refractory crucible 11 a and the high-frequency induction heating coil 12 and between the coil turns of the high-frequency induction heating coil 12. The material is powder-like and has a particle size of 0.3 to 1.0 μm.
O ₂ (chemical component (wt%), ZrO ₂ ; 90.0 to 98.0%, C
aO; 2.0 to 7.0%). Then, this is filled while squeezing lightly from the bottom of the refractory crucible 11a.

On the other hand, the high-frequency induction heating coil 12 is made of a Cu pipe having a diameter of φ12 mm through which cooling water circulates,
High frequency induction heating coil 12 has 4 turns and inner diameter φ120 m
m and height h110 mm. Oscillation frequency 20kHz, output
Two 40 KW high frequency power supplies 20 are installed outside the vacuum chamber 2, and a high frequency feeder 21 and a vacuum feedthrough (not shown)
To the two high frequency induction heating coils 12 disposed inside the vacuum chamber 2. The high-frequency feeder 21 is made of a Cu plate, and the extended Cu pipe portions of the high-frequency induction heating coil 12 are each surrounded by an insulating tube made of Al ₂ O ₃ and are electrically insulated from each other. The high frequency induction heating coil
It is preferable that 12 has a shape corresponding to the side surface of the refractory crucible 11a.

The vapor diffusion control means 15 includes a refractory crucible 11a.
Are arranged so as to constitute an evaporative vapor flow path surrounded by a regulating surface extending in a substantially vertical direction in a substantially continuous state, and the lower surface and the upper surface allow passage of evaporative particles of the magnetic material 10 and the directivity thereof. It has a cylindrical shape that is open to enhance and has only a peripheral wall, and the horizontal cross-sectional shape may be circular, elliptical, oval, square, rectangular, or any other shape. The vertical cross section is also square, rectangular, trapezoidal,
Any other shape may be used.

Further, the vapor diffusion control means 15 circulates a coolant such as cooling water, liquid nitrogen, liquid helium, ethylene glycol or the like in the inner wall portion 15a and concentrically from the center of the opening to the outside toward the outside. , Cu, Al, N
The cooling layer 15b is made of two layers, i.e., i, Ti, Mg, Zn and their alloys, stainless steel and the like. As shown in FIG. 3, a through-hole 15c is formed in the vicinity of the refractory crucible 11a of the vapor diffusion control means 15, and the linear magnetic material 10 passes through the through-hole 15c into the refractory crucible 11a. Supplied. In this case, the relationship between the diameter dh of the through hole 15c and the diameter dw of the magnetic material 10 is 2.0 × dw>
dh is preferable. That is, the magnetic material 10 is moved through the through-holes 15 due to the deflection during the supply of the linear magnetic material 10.
c, or the through hole 15c comes into contact with the linear magnetic material 10 so that the vapor diffusion control means 15
Cracks can be prevented.

Further, a heating structure including a heating source such as a resistance heater or a high frequency induction heating coil may be provided on the outer peripheral surface side of the vapor diffusion control means 15.

The vapor diffusion control means 15 includes a refractory crucible 11a.
Evaporated particles of the magnetic material 10 that evaporate from the center point in the melt surface and fly upward from the point set as the reference point are used as a mask 13 for controlling the maximum incident angle and a mask for controlling the minimum incident angle, which will be described later. It is assumed that it is configured so as not to prevent adhesion in a continuous range from the maximum incident angle θmax to the minimum incident angle θmin defined by 14.

The material supply means 25 is configured as follows. FIG. 4 is a diagram for explaining the details of the material supply means 25. As shown in FIG. 4, the material supply means 25 includes a material supply chamber 27 for accommodating a wire reel 26 wound with the magnetic material 10 of Co wire, and a linear magnetic material 10 drawn from the wire reel 26. Guide roller 28 to guide
A vertical guide roller 29, a vertical correction roller 30 for correcting a vertical curl of the magnetic material 10, and a horizontal correction roller 31 for correcting a horizontal curl of the magnetic material 10, It comprises a pinch roller 32 and a feed roller 33 for drawing out the linear magnetic material 10, a guide roller 34 for guiding the magnetic material 10, and a positioning roller 35 for finally positioning the magnetic material 10.

After the linear magnetic material 10 is pulled out from the wire reel 26, it is guided by a horizontal guide roller 28 and a vertical guide roller 29, and is curled by a vertical correction roller 30 and a horizontal correction roller 31. Is corrected and straightness is maintained. Thereafter, the magnetic material 10 is strongly sandwiched between the pinch roller 32 and the wire feed roller 33, and is pulled out by the rotation of the wire feed roller 33. The wire feed roller 33 is connected to a wire feed motor (not shown) via a chain, and feeds the linear magnetic material 10 by driving the wire feed motor. The drawn magnetic material 10 is used as a guide roller.
Vapor diffusion control means 15 via the positioning roller 35
Is continuously supplied into the refractory crucible 11a through the through hole 15c.

In this case, the diameter d of the linear magnetic material 10
w and the heat penetration depth δ determined by the resistivity ρ, the magnetic permeability μ of the magnetic material 10 and the oscillation frequency f of the high-frequency induction heating means are dw> δ (δ = (ρ / π · f · μ) ^{1 / 2} ), and at a temperature equal to or higher than the Curie temperature of the magnetic material (about 1130 ° C. in the case of Co ₁₀₀ ), the oscillation frequency f of the high-frequency induction heating coil is adjusted so as to satisfy the relationship of dw> δ. Preferably, it is set.

As described above, in the magnetic recording medium manufacturing apparatus according to the present embodiment, the linear magnetic material 10 is continuously supplied to the refractory crucible 11a. There is no need to cancel the state, and the production efficiency can be improved by efficiently supplying the magnetic material 10. Further, since the linear magnetic material 10 is supplied to the refractory crucible 11a by passing through the area subjected to the heating action of the high-frequency induction heating and evaporating means, the magnetic material 10 melted in the refractory crucible 11a has a low temperature. The fluctuation of the evaporation rate due to the supply of the linear magnetic material can be prevented.

Further, by continuously supplying the magnetic material 10 to the refractory crucible 11a, the linear magnetic material 10 stops, and the evaporated magnetic material 10 adheres to the magnetic material 10 and the through hole 15c. This prevents the magnetic material 10 adhering when it is moved again from coming into contact with the vapor diffusion control means 15 and the refractory crucible 11a and damaging them.

Further, the magnetic material 10 in the refractory crucible 11a
The supply speed of the supplied magnetic material 10 may be changed in accordance with the molten metal surface level. For example, the melt surface level is measured by a melt surface level detector provided outside the refractory crucible 11a. When the melt surface level is high, the supply speed is relatively low, and when the melt surface level is low, the supply speed is high. Things. By changing the supply speed of the magnetic material 10 in accordance with the molten metal surface level of the magnetic material 10 in this manner, the evaporation rate of the magnetic material 10 evaporated from the evaporation source 11 can be kept constant, and the fluctuation of the evaporation rate As a result, unevenness of the magnetic material deposited on the base film 3 can be prevented.

In the above-described embodiment, FIG.
As shown in (1), a through hole 15c is formed in the vapor diffusion control means 15, and a linear magnetic material 10 is supplied from the through hole 15c into the refractory crucible 11a, but is not limited to this. Instead, for example, the linear magnetic material 10 may be supplied into the refractory crucible 11a from the opening at the upper end of the vapor diffusion control means 15 as shown in FIG. However, the magnetic material 10 inserted through the through hole 15c as in the embodiment shown in FIG.
Compared to supplying magnetic material 10 from the upper opening of
Since the evaporation region of the magnetic material 10 and the linear magnetic material 10 do not overlap with each other, a change in the film thickness distribution of the magnetic film formed on the base film 3 can be prevented.

The magnetic material 10 supplied to the refractory crucible 11a is preferably heated by the high-frequency induction heating coil 12. In this case, the magnetic material 10 is supplied before the magnetic material 10 is supplied to the refractory crucible 11a. A high-frequency induction heating coil 12 ′ for preheating is provided, and the linear magnetic material 10 is passed through the center of the preheating high-frequency induction heating coil 12 ′ to be supplied to the refractory crucible 11 a. May be heated. Here, the preheating high-frequency induction heating coil 12 ′ is supplied with power from a high-frequency power supply (not shown), and has a diameter φ in which cooling water circulates.
It is made of 8mm Cu pipe. The number of turns is three, the oscillation frequency is 20 kHz, and the output is 10 KW.

Further, in this case, as shown in FIG. 7, the number of turns of the high-frequency induction heating coil 12 is increased to extend the coil 12 above the refractory crucible 11a, and this extended portion is connected to a linear magnetic material. Refractory crucible so that 10 passes
The magnetic material 10 supplied into the inside 11a may be heated. In the embodiment shown in FIG. 7, the number of turns of the high-frequency induction heating coil 12 is 6 and the height is 150 mm. In FIGS. 6 and 7, the case where the vapor diffusion control means 15 is not provided has been described. However, the present invention is not limited to this, and similar to the embodiment shown in FIG. 2 or FIG. Also in the apparatus provided with the vapor diffusion control means 15, the preheating high-frequency induction heating coil 12 'may be provided, or the number of turns of the high-frequency induction heating coil 12 may be increased.

In the embodiment shown in FIGS. 3 and 4, the evaporation source provided with the vapor diffusion control means 15 has been described. However, the present invention is not limited to this.
The present invention can be applied to a device without the vapor diffusion control means 15 as shown in FIG.

Note that the refractory crucible 11a, the high-frequency induction heating coil 12, the high-frequency power supply 20, the high-frequency feeder 21 and the like are merely examples of the evaporation source 11, and the base film 3 is moved in the width direction (in the transport direction in the plane of the base film 3). When the width is wide in the direction perpendicular to the base film 3, the shape of the evaporation source 11 is changed according to the width of the base film 3 (for example, when the horizontal cross-sectional shape of the evaporation source 11 is elliptical and the width of the base film 3 is wide). The elongate axis direction of the elliptical shape of the evaporation source 11 is adjusted to the width direction of the base film 3), and a plurality of sets of the evaporation sources 11 may be arranged corresponding to the width direction of the base film 3.
In this case, the evaporation source 11 (including the refractory crucible 11a), the high-frequency induction heating coil 12, the high-frequency power supply 20, the high-frequency feeder
A configuration in which a plurality of sets 21 are independently arranged, a plurality of sets of the evaporation sources 11 are provided, and a high-frequency induction heating coil 12, a high-frequency power supply 2
0, a configuration in which the high-frequency feeder 21 is shared may be adopted.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a diagram showing details of an evaporation source.

FIG. 3 is a diagram illustrating supply of a linear magnetic material to a refractory crucible.

FIG. 4 is a diagram showing details of a material supply device.

FIG. 5 is a diagram illustrating supply of a linear magnetic material to a refractory crucible.

FIG. 6 is a diagram illustrating supply of a linear magnetic material to a refractory crucible.

FIG. 7 is a diagram illustrating supply of a linear magnetic material to a refractory crucible.

FIG. 8 is a diagram showing a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum vapor deposition apparatus 2 Vacuum tank 3 Base film 4 Cooling can 5 Delivery axis 6 Winding axis 7 Partition plate 8 Winding chamber 9 Deposition chamber 10 Magnetic material 11 Evaporation source 11a Refractory crucible 12 High frequency induction heating coil 12 'Preheating High frequency induction heating coils 13, 14 Mask 15 Vapor diffusion control means 15c Through hole 17 First gas spraying part 18 Mask opening 25 Material supply means 26 Wire reel 27 Material supply chamber 28 Horizontal guide roller 29 Vertical guide roller 30 Vertical direction Straightening roller 31 Horizontal straightening roller 32 Pinch roller 33 Wire feed roller 34 Guide roller 35 Positioning roller

Claims (2)

[Claims] 1. A transport means for transporting a long flexible substrate in a vacuum atmosphere, an evaporation source made of a magnetic material disposed below which the substrate is transported, and heating and evaporating the evaporation source. On the flexible substrate, comprising: a high-frequency induction heating and evaporating unit; and an incident angle regulating unit that regulates an incident angle of the vapor flow of the magnetic material heated and evaporated by the heating and evaporating unit to the flexible substrate. A magnetic material supply means for supplying the linear magnetic material into the evaporation source while heating the linear magnetic material by the high-frequency induction heating evaporation means. For manufacturing a magnetic recording medium. 2. Both ends are opened between the high-frequency induction heating evaporator and the flexible substrate to regulate and control the diffusion direction of the vapor flow of the magnetic material heated and evaporated by the high-frequency induction heating evaporator. A cylindrical vapor flow diffusion control means, wherein the magnetic material supply means is a means for supplying the magnetic material from an upper opening of the cylindrical vapor flow diffusion control means. Item 2. An apparatus for manufacturing a magnetic recording medium according to Item 1.