JPH10154325A - Apparatus for production of magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To produce a magnetic recording medium of multilayered constitution to a small size at a low cost with an apparatus for production of the magnetic recording medium. SOLUTION: Two evaporation vessels 16A, 16B are heated by high-frequency induction heating and a base film 3 is transported by a cooling endless belt 4 having straight parts. The evaporation magnetic materials diffused from the evaporation vessels 16A, 16B to the straight parts of this cooling endless belt 4 are deposited by evaporation on the base film 3. As a result, the need for assuring the orbit for an electron beam is eliminated even in the case where magnetic thin films are formed of the multilayered constitution and, therefore, the constitution of the apparatus is made compact.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a magnetic recording medium, and more particularly, to heating and melting a magnetic material, evaporating the same, and depositing the vapor stream on a flexible substrate such as a base film. The present invention relates to a magnetic recording medium manufacturing apparatus in which a magnetic recording layer is formed by a so-called evaporation process for growing.

[0002]

2. Description of the Related Art Conventionally, as a magnetic recording medium, γ-Fe
₂ O ₃ , Co-doped Fe ₃ O ₄ , γ-Fe ₂ O ₃
Magnetic material as a berthollide compound of Fe ₃ O _4, berthollide compound doped with Co, from CrO _3, Ba oxide magnetic material such as ferrite, or Fe, Co, an alloy magnetic material mainly composed of Ni or the like Are dispersed and mixed together with additives into a polymer binder such as a vinyl chloride-vinyl acetate copolymer, a styrene-butadiene copolymer, an epoxy resin, or a polyurethane resin, and the dispersion mixture is mixed with polyethylene terephthalate (PET) or the like. 2. Description of the Related Art A so-called coating type magnetic tape which is manufactured by coating a base film (substrate) made of a polyolefin such as polyester or polypropylene and then curing or drying the base film is widely known.

On the other hand, in recent years, the demand for higher recording density has become stronger, and the density of the magnetic material in the magnetic layer of the magnetic recording medium has been increased, the coercive force has been improved, the magnetic layer has been reduced in thickness, or the frequency characteristics have been shortened. Consideration has been given to shifting to the side.

However, in a coating type tape, it is difficult to satisfy the above-described various conditions required for high-density recording because a binder remains in the magnetic layer.

Therefore, attention has been paid to a method of manufacturing a magnetic recording medium by a vapor deposition method such as vacuum deposition, sputtering, or ion plating, or a plating method such as electroplating or electroless plating, and various proposals have been made. According to these methods, the magnetic layer can be formed by depositing and growing a magnetic material directly on a substrate without using a binder, so that the packing density of the magnetic material in the magnetic layer is increased, and Can also be made thinner.

Further, these vapor deposition methods and the like make it easy to adjust and control the thickness of the film formed on the base film, adjust the coating solution of the magnetic layer in the manufacturing process of the coating type tape, and perform drying after coating. This has practically useful advantages such as eliminating the need for processing steps associated with the formation of a magnetic layer.

[0007] In particular, the vapor deposition method has the advantages that the waste liquid treatment required in the plating method is not required and that the growth rate of the deposited magnetic film is high.
A magnetic tape using a magnetic layer formed on a base film by such a vapor deposition method as a recording layer has a much higher reproduction output and a shorter frequency characteristic of a recording signal than a conventional coating type magnetic tape. It is useful as a high-density magnetic recording medium, for example, it is improved on the wavelength side.

It is known that the manufacture of a magnetic recording medium by a vapor deposition method is performed in detail by, for example, a vacuum vapor deposition apparatus 1 shown in FIG. As shown in FIG.
A long base film 3 made of a non-magnetic material such as a polyester film, a polyamide film, or a polyimide film is formed inside a vacuum chamber 2 in a reduced pressure state. The cooling film 4 is wound in the direction Y. The cooling film 4 is rotated in the direction of arrow Y, and the base film 3 which is transferred from the side of the delivery shaft 5 to the side of the winding shaft 6 is provided on the outer peripheral surface of the cylinder. Conveyed.

The inside of the vacuum chamber 2 is controlled by a partition plate 7 to take up and wind up the base film 3 in a winding chamber 8.
And a deposition chamber 9 for depositing a magnetic material on the base film 3. In the vapor deposition chamber 9, Co, CoNi alloy, CoCr alloy, CoC
An evaporation container 11 containing a magnetic material 10 as an evaporation source such as an rNi alloy is provided, and the magnetic material 10 is heated and evaporated by heating means 12 such as electron gun heating, resistance heating, and high frequency induction heating. Particles of the magnetic material 10 (referred to as magnetic particles or evaporating particles), which evaporate and rise, are continuously deposited on the surface of the base film 3 conveyed in the direction of arrow Y with the rotation of the cooling can 4. They collide and deposit there by cooling, thus forming a magnetic layer.

Here, in order to efficiently deposit the evaporated magnetic material particles on the substrate to increase the vapor deposition efficiency, it is sufficient to prevent the evaporated particles from diffusing widely. According to the technique disclosed in Japanese Patent Application Laid-Open No. 2-56730, the portion between the evaporation source and the cooling can, around which the evaporated particles pass, is surrounded by a peripheral wall to regulate the flow path. In order to do so, for example, a steam diffusion control wall (steam diffusion control means) 15 having a cylindrical shape may be provided. The vapor diffusion control wall 15 has a temperature of the inner wall surface in order to re-evaporate or coagulate and collect the evaporated particles of the magnetic material 10 attached to the inner wall surface or to combine re-evaporation and coagulation and recovery. Is provided with means for heating or cooling.

When such a vapor diffusion control wall 15 is provided, it is difficult to use an electron gun heating means generally used as a heating means. That is, in this case, it is necessary to secure a passage of the electron beam from the electron gun to the magnetic material 10 placed in the evaporating vessel 11.
This is because, when the vapor diffusion control wall 15 is provided above the above, it is difficult to secure the passage trajectory of the electron beam. Therefore, high frequency induction heating means is usually used as the heating means.

It has been found that it is effective to spray oxygen during the vapor deposition in order to further improve the coercive force of the magnetic thin film. In the method of blowing oxygen, usually, a gas blowing unit 17 is provided near a mask 14 located on the downstream side in the transport direction of the base film 3 to blow oxygen gas to the evaporated particles of the magnetic material 10. It is done by. For example, according to the technology disclosed in Japanese Patent Publication No. 2-27732, the oxygen gas is blown from the vicinity of the minimum incident angle, and the inert gas is also blown from the vapor deposition start side (the maximum incident angle side). The filling rate and the magnetic filling rate are adjusted.

Although the purpose is different from the purpose of improving the coercive force, oxygen gas is also blown into the system during vapor deposition when the purpose is to improve the corrosion resistance of the magnetic recording medium. For example, according to the technology disclosed in Japanese Patent Publication No. 3-19621, an oxidizing gas is sprayed into the system from a plurality of nozzles arranged in the width direction of a base film as a substrate to form an element constituting a magnetic layer. To form an oxide, and the oxide film of the oxide has a protective effect against corrosion.

[0014]

In the above-described vapor deposition, the magnetic recording medium may have a multilayer structure as a layer structure.
This is to reduce noise of the formed magnetic recording medium. In order to heat the evaporation source with an electron beam in such a multilayer configuration, for example, as shown in FIG. 5, two cooling cans 4A and 4B are provided, and
Electron guns 40A, 40 corresponding to the two cooling cans 4A, 4B.
B and other evaporation source devices need to be provided. When the evaporating vessel is heated by the electron beam as described above, it is necessary to provide the trajectory of the electron beam for two electron guns, which results in an increase in the size of the apparatus. Will be.

The present invention has been made in view of the above circumstances, and has as its object to provide a magnetic recording medium manufacturing apparatus capable of manufacturing a magnetic recording medium in a multilayer structure at a small size and at low cost.

[0016]

According to the present invention, there is provided an apparatus for manufacturing a magnetic recording medium, comprising: transport means for transporting a long flexible substrate in a vacuum atmosphere; An evaporation source made of a magnetic material, an evaporation unit for heating and evaporating the evaporation source, and a diffusion direction disposed between the evaporation unit and the flexible substrate, the diffusion direction being heated and evaporated by the evaporation unit. A magnet for forming a magnetic thin film on the flexible substrate, comprising: a cylindrical vapor flow diffusion control means for controlling; and an incident angle restricting means for restricting an incident angle of the vapor flow to the flexible substrate. In the apparatus for manufacturing a recording medium, at least two evaporation sources are provided along a transport direction of the long flexible substrate, and the evaporation unit is an induction heating unit.

The vapor diffusion control means is formed such that the direction in which the directivity of the vapor flow scattered from the vapor diffusion control means has a maximum value coincides with the angle of incidence of the vapor flow on the substrate. Is preferred.

Preferably, the transfer means is a means for transferring the flexible substrate in a straight line.

Further, the means for linearly conveying the sheet may be an endless belt.

Further, it is preferable that the transfer means is arranged so as to be inclined with respect to the evaporation surface of the evaporation source. In this case, the inclination angle is preferably such that the incident angle of the vapor flow to the substrate and the direction in which the directivity of the scattered vapor flow has the maximum value coincide with each other.

Further, an auxiliary heating device is provided between the evaporation source and the substrate, which comes into contact with a vapor flow other than the substrate, and re-evaporates or recovers the vaporized particles of the vapor flow to the evaporation source. Preferably, means are provided.

The term “evaporation source” used herein means a material formed of a magnetic material, but in this specification, for convenience of explanation,
The evaporation source may be referred to as an evaporation source including the evaporation container containing the magnetic material as the evaporation source.

[0023]

In the apparatus for manufacturing a magnetic recording medium according to the present invention, a plurality of evaporation sources heated by high-frequency induction heating are provided along the direction in which the substrate is transported. In addition, the distance between the evaporation source and the substrate can be reduced as compared with the case where the evaporation source is heated by the electron beam shown in FIG. Therefore, the size of the device can be reduced and the cost of the device can be reduced as compared with a device in which the magnetic recording medium has a multi-layered structure using an electron beam.

Further, by providing the vapor diffusion control means between the plurality of evaporation sources and the base material, the particles of the magnetic material evaporated from the plurality of evaporation sources are not diffused widely. Even when the magnetic material is used to form a multilayer film, the vaporized particles of the magnetic material can be efficiently attached to the base material to improve the vapor deposition efficiency.

Further, the direction in which the directivity of the vapor flow scattered from the vapor diffusion preventing means becomes maximum is matched with the angle of incidence of the vapor flow on the substrate, so that the vapor flow adheres to the substrate as much as possible. As a result, the vapor deposition efficiency of the magnetic material can be improved.

[0026] Further, since the transport means is a means for transporting the base material so that the predetermined path is linear, a plurality of evaporation sources can be arranged along this straight line. The arrangement can be made simpler and more compact, and the configuration of the device can be made smaller.

Further, by using a means for transferring the flexible substrate in a straight line, for example, an endless belt, the structure of the means for transferring the base material can be simplified and the base material can be cooled. Since a place for disposing the cooling means can be easily secured in a predetermined path, the apparatus can be configured more compactly.

Preferably, the conveying means is inclined with respect to the evaporation surface of the evaporation source, and the angle of inclination is preferably such that the incident angle of the vapor flow to the substrate and the directivity of the scattered vapor flow have the maximum value. When the angle is set so as to match with the angle, the surface on which the vapor flow adheres to the base material is increased, and the efficiency of vapor deposition of the magnetic material on the base material can be further improved.

Further, by providing an auxiliary heating means for re-evaporating the evaporated particles in contact with a vapor flow other than the vapor deposited on the substrate or recovering the vaporized particles to the evaporation source, the vapor is not deposited on the substrate and is wasted. Since the resulting steam flow can be evaporated again or returned to the evaporation source, the amount of wasted steam flow can be reduced, and the utilization efficiency of the magnetic material can be improved.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a magnetic recording medium manufacturing apparatus according to the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing a schematic configuration of a vacuum evaporation apparatus 1 which is an apparatus for manufacturing a magnetic recording medium according to the present invention. As shown in FIG. 1, a vacuum evaporation apparatus 1 is provided inside a vacuum chamber 2.
Endless cooling belt 4 driven by drive shafts 7 and 8
It has. This cooling endless belt 4 has a width of 200 m.
SUS 304 metal belt with a thickness of 1.2 mm and a slope length of 800 mm.
Mirror-polished to 3 S or less. Inside the cooling endless belt 4, there is provided a cooling plate 9 circulating a refrigerant (ethylene glycol) and maintaining the surface temperature at −25 ° C. The surface of the cooling plate 9 comes into contact with the cooling endless belt 4. I have.

On the outer peripheral surface of the cooling endless belt 4, a base film 3 as a base material of a magnetic recording medium is provided.
Is wound. The base film 3 is made of polyester such as polyethylene terephthalate (PET) or polyethylene naphthalate, polyolefin such as polypropylene, cellulose dielectric such as cellulose triacetate or cellulose diacetate, vinyl resin such as polyvinyl chloride, polycarbonate, polyamide, polyphenylene. It is formed by processing a plastic such as sulfide into a long film, and its thickness is, for example, 3 to 100 μm. In this embodiment, the one having a thickness of 6 μm is used.

The surface of the base film 3 is undercoated as required. The undercoat is made of a binder (cellulose such as methylcellulose, P
Saturated polyesters such as ET, phenoxy resins, polyamides, polyacrylates, etc.) and fillers (silica, titania, alumina, calcium carbonate, etc.) are dissolved and applied, and the surface projections have a height of 5 to 30 nm.
In those with a protrusion density 5000000-100000000 pieces / mm ^2. In this embodiment, the particle size is 18 nm and the density is 5000
10,000 / mm ² . The height and density can be appropriately selected depending on the required adhesion performance and the like.

Further, the base film 3 may be subjected to a pretreatment such as a glow discharge treatment, an ion irradiation treatment, a heat treatment, and a chemical treatment.

The base film 3 is wrapped around a winding shaft 6 from a delivery shaft 5 via a cylindrical surface of the cooling endless belt 4, and is rotated on the cooling endless belt 4 by rotating the cooling endless belt 4 in the Y direction. For example, 10-100
It is conveyed at a speed of m / min and wound up on the winding shaft 6.

On the surface of the cooling endless belt 4, there are provided masks 13A, 13B and 13C which are separated from the cooling endless belt 4 by a predetermined distance, circulate cooling water or a refrigerant therein, and whose main body is formed of SUS304 or the like. ing. This distance is between 2 and 15 mm, more preferably between 2 and 10 mm, most preferably between 3 and 5 mm. If it is smaller than 2 mm, a space for installing a gas blowing section described later cannot be secured, and if it is larger than 15 mm, the vapor flow goes around between the mask and the base film and adheres to the cooling endless belt 4 to cause contamination. It is. This is because the heat transfer coefficient between the endless belt and the base film changes in the stained portion, and the endless belt is insufficiently adhered to the base film, so that the endless belt is easily damaged by heat. And base film 3
The maximum incident angle (θmax1) of a first evaporation container 16A, which will be described later, by the mask 13A located on the upstream side with respect to the conveyance direction
However, the first evaporation container is provided by the mask 13B located on the downstream side.
A minimum incident angle (θmin1) of 16 A is specified. Further, the maximum incident angle (θmax2) of the second evaporation container 11B described later is changed by the mask 13B to the minimum incident angle (θmax) of the second evaporation container 16B by the mask 13C located on the downstream side.
min2). First evaporation vessel 16A
Is defined as the angle formed by a perpendicular passing through the center of the circle and a normal on the cooling endless belt 4 with reference to the center of the circle of the melted surface in the refractory crucible 11A described later. The central incident angle θ of 16A was set to 50 °. Similarly, the central incident angle θ of the second evaporation container 16B is set to 50 °.
Mask openings formed by masks 13A, 13B, 13C
The opening width in the width direction of 18A and 18B (the direction perpendicular to the direction of transport of the base film 3) is set to 100 mm.

On the front of the masks 13A, 13B, 13C,
Each of the masks 13A, 13B, and 13C has a shape along the masks 13A, 13B, and 13C.
A movable shutter device having a function of preventing the evaporated metal particles from adhering to the surface of the base film 3, circulating cooling water of 18 ° C. inside, and having a main body formed of SUS304 or the like is provided. (Not shown).

The vacuum chamber 2 is provided with a winding chamber 21 for feeding and winding the base film 3 by a partition plate 20;
The base film 3 is partitioned into a deposition chamber 22 for depositing a magnetic material. Each of the winding chamber 21 and the vapor deposition chamber 22 is provided with an exhaust system (not shown) for reducing pressure, and the pressure in each chamber can be individually adjusted. In particular, since an oxidizing gas described later is blown from the outside of the vacuum chamber 2 to the vapor deposition chamber 22, the pressure in the chamber and the partial pressures of various residual gases are constantly adjusted by a preparation unit (not shown).

The take-up chamber 21 contains the base film 3.
For the pre- and post-treatments described above, for example, glow discharge treatment device, ion irradiation treatment device, heat treatment device, C
A VD processing device or the like may be provided.

In the evaporation chamber 22, a first evaporation container 16 containing magnetic materials 10A and 10B is placed below the cooling endless belt 4.
A and a second evaporating vessel 16B are provided.
Around the 16A and 16B, high-frequency induction heating coils 12A and 12B having a tubular structure for circulating cooling water for heating the magnetic materials 10A and 10B are arranged. Further, a high-frequency power supply for supplying high-frequency power to the high-frequency induction heating coils 12A and 12B and a high-frequency power supply feeder for transmitting high-frequency power are provided (not shown).

The magnetic materials 10A and 10B are made of, for example, Fe, C
o, Ni, CoNi, FeCo, FeCu, FeCr,
CoCr, CoCu, CoAu, CoPt, CoW, N
iCr, CoV, MnBi, MnAl, CoFeCr,
CoNiCr, CoRh, CoNiPt, CoNiF
e, CoNiFeB, FeCoNiCr, CiNiZn
And the like are appropriately selected from ferromagnetic metals and ferromagnetic alloys. Then, different magnetic materials 10A and 10B are put in the first and second refractory crucibles 11A and 11B, respectively, to form two magnetic layers.

The refractory crucibles 11A and 11B containing the magnetic materials 10A and 10B, which are the components of the evaporation vessels 16A and 16B.
Is, for example, MgO, ZrO ₂ , Al ₂ O ₃ , CaO, Y
₂ O ₃ , ThO ₂ , BN, BeOCaO stabilized Zr
It is appropriately selected from ceramics such as O ₂ and Y ₂ O ₃ stabilized ZrO ₂ , carbon or carbon compounds, and other heat-resistant materials. The shape of the refractory crucibles 11A and 11B is a container type having a bottom, and the horizontal cross-sectional shape may be a true circle, an ellipse, an oval, a square, a rectangle, or any other shape. Also square, rectangle, trapezoid,
Any other shape may be used. Preferably, the high-frequency induction heating coils 12A and 12B have shapes corresponding to the side surfaces of the refractory crucibles 11A and 11B.

Further, the evaporation chamber 22 is provided between the cooling endless belt 4 and the first and second evaporation vessels 16A and 16B provided with the magnetic materials 10A and 10B, and the magnetic materials 10A and 10B.
First and second steam diffusion control means 15A and 15B as means for preventing the diffusion of steam are provided so as to surround a path through which a steam flow generated by evaporation of B passes, and a cooling endless means. In the vicinity of the belt 4 and in the vicinity of the masks 13A, 13B, 13C, there are provided gas blowing portions 17A, 17B for blowing an acidified gas or a mixed gas of an oxidizing gas and an inert gas toward the base film 3. Have been.

The gas blowing sections 17A and 17B are located downstream with respect to the direction of transport of the base film 3, and include first and second gas blowing sections.
Incident angles (θmin1, θmin2) of the evaporation vessels 16A and 16B
Near the masks 13B and 13C for regulating the
13B and 13C are built in the cooling endless belt 4 side surface. Note that O ₂ gas is used as the blowing gas.
The blowing direction of the gas blowing slit is substantially parallel to the conveying direction on the cooling endless belt 4 at the reference point of the cooling endless belt 4 which defines the minimum incident angle (θmin). Gas blowing unit 17A, O ₂ gas blown by later-described vapor diffusion control means 15A from 17B, with respect to the scattering direction of the evaporation particles that has passed through the opening of 15B, O in substantially diagonal direction
_Two gases are blown to oxidize some of the evaporated metal particles.

The inner peripheral wall surfaces of the vapor diffusion control means 15A, 15B are made of, for example, MgO, ZrO ₂ , Al ₂ O ₃ , CaO, Y
₂ O ₃ , ThO ₂ , BN, BeOCaO stabilized Zr
A regulating surface formed of ceramics such as O ₂ , Y ₂ O ₃ stabilized ZrO ₂ , carbon or a carbon compound, or another heat-resistant material, and extending in a substantially vertical direction substantially continuous with the refractory crucibles 11A, 11B. Are arranged so as to form a steam flow path surrounded by the magnetic material 10A, 10A.
A cylindrical shape having an opening to allow the passage of evaporated particles of B and improve its directivity and having only a peripheral wall, and having a horizontal cross-sectional shape of a circle, an ellipse, an oval, a square, a rectangle, and any other It may be shaped. The vertical cross-section may also be square, rectangular, trapezoidal, or any other shape.

Further, the vapor diffusion control means 15A and 15B are composed of, for example, two layers of an inner wall portion and an outer peripheral portion on a concentric circle from the center of the opening toward the outside.

[0047]

EXAMPLE In this example, refractory crucibles 11A, 11A were used.
B is cup-shaped (inner diameter φ80mm, outer diameter φ96mm, height 100
mm, internal depth 90 mm), and the material is Y ₂ O ₃ stabilized Z
rO ₂ (ZrO ₂ ; 88.0% to 95.0%, Y ₂ O ₃ ; 5.0%
112.0%). Co ₁₀₀ was used as a ferromagnetic material 10 for evaporation inside the refractory crucibles 11A and 11B.

The high-frequency induction heating coils 12A and 12B are made of a Cu pipe having a diameter of φ12 mm through which cooling water circulates. The high-frequency induction heating coils 12A and 12B have eight turns, an inner diameter of φ150 mm and a height h110 mm. Oscillation frequency 100
A high-frequency power supply with a frequency of 60 kHz and a power of 60 kW
It is installed on a table and connected to two high-frequency induction heating coils 12A and 12B disposed inside the vacuum chamber 2 through a high-frequency feeder and a vacuum feed-through (not shown). The high-frequency feeder is made of a Cu plate, and the extended Cu pipes of the high-frequency induction heating coils 12A and 12B are made of Al ₂ O, respectively.
Surrounded by _three insulating tubes and electrically insulated from each other.

The inner walls of the vapor diffusion control means 15A, 15B
Cylindrical (inner diameter φ80mm, outer diameter φ96mm, height h90mm)
CaO-stabilized ZrO ₂ (ZrO ₂ ; 90.0% to 98.0%;
CaO; 2.0% ~7.0%, MgO , Al 2 O 3, SiO
₂ , FeO ₃ and TiO ₂ were used in an amount of 0.0% to 2.0%).

The outer peripheral portion has a cylindrical shape (inner diameter φ 96 mm, outer diameter φ
140 mm, height h90 mm), and a cooling structure in which cooling water of 18 ° C. was circulated therein and whose main body was formed of oxygen-free copper was used.

Next, the operation of the apparatus for manufacturing a magnetic recording medium according to this embodiment will be described.

First, gas such as air in the vapor deposition chamber 22 and the winding chamber 21 is exhausted to the outside by a decompression means (not shown) such as a vacuum pump. For example, 5.0 × 10 ^{-5 to} 4.0 × 10 ^-4 To
The pressure is reduced to rr. In this example, 5.0
× 10 ^-5 Torr. After the insides of the vapor deposition chamber 22 and the winding chamber 21 are depressurized as described above, electric power is supplied to the high-frequency induction heating coils 12A and 12B using a high-frequency power source, whereby the high-frequency induction heating coils 12A and 12B generate heat. Evaporating vessel
The magnetic materials 10A and 10B of 16A and 16B were heated and evaporated.

After the magnetic materials 10A and 10B have completely dissolved and the evaporation rate has become constant, the base film 3 is transported by the delivery shaft 5 at a conveying speed of 60 m / min and a tension of 3.0 kgf / 100 mm.
After the glow discharge treatment using O ₂ gas is performed on the side of the base film 3 on which the magnetic thin film is formed in a pretreatment chamber (not shown), the base film 3 is conveyed on the cooling endless belt 4. Then, the shutter device is driven to an "open" state. At this time, the output of the high-frequency induction heating power supply is, for example, 24 KW. At the same time gas spraying part 17A, 17B
Spray amount 340 cc / on the base film 3 while blowing O ₂ gas at a partial-width by the first vapor stream emanating from the evaporation vessel 16A of the first layer Co-O magnetic thin film (thickness 700 from
Angstroms), and a second layer of Co-O is formed by the steam flow emitted from the second evaporation vessel 16B.
A magnetic thin film (700 angstrom thick) is formed, a two-layer magnetic thin film (1400 angstrom total thickness) is formed, and is wound around the winding shaft 6. After continuously forming a metal magnetic thin film with a length of 3000 m, the shutter device is set to the "closed" state, and at the same time, O ₂ gas is blown from the gas blowing unit 17 and power supply from the high frequency power supply is stopped to form a film. Finished.

After depositing a magnetic thin film on the base film 3 and correcting the curl of the magnetic layer by a heat treatment, the surface of the magnetic thin film is formed as a phosphoric acid monoester compound as C ₁₂ H _25.
A solution of OPO ₃ H ₂ in methyl ethyl ketone was applied so that the coating amount on the magnetic layer was 20 μmol / m ^2, and dried. Subsequently, a resin composition comprising carbon black and a resin binder is applied to the surface opposite to the surface on which the magnetic layer has been formed, and dried to form a backcoat layer.As a fatty acid ester compound on this backcoat layer, C ₈ F ₁₇ COOC ₁₈
Applying a solution of H ₃₇ in ethanol so that the 20 [mu] mol / m ^2, was wound up dry. The above processing was carried out by varying the outputs of the high-frequency induction heating coil 12 and the electron gun 30 to obtain a raw material on which a magnetic thin film was formed.

As described above, when two evaporation containers 16A and 16B are arranged and the magnetic material in the evaporation containers 16A and 16B is heated by high-frequency induction heating to form a layered structure of the magnetic recording medium, The distance between the evaporation container and the base film 3 can be reduced as compared with the case where the evaporation container is heated by the electron beam shown in FIG. In comparison, the size of the device can be reduced, and the cost of the device can be reduced.

The first and second evaporation vessels 16A, 16A
B between the base film 3 and the vapor diffusion control means 15A,
By providing the 15B, the particles of the magnetic material evaporated from the first and second evaporation containers are prevented from being widely diffused. Therefore, even when the magnetic material is formed into a multilayer film using a plurality of evaporation containers. In addition, the evaporation particles of the magnetic material can be efficiently attached to the base material to improve the evaporation efficiency.

Further, by using a transporting means such as an endless belt in which the path on which the magnetic material is deposited is linear, the structure of the means for transporting the base film can be simplified, and a plurality of evaporations can be performed. Since the containers may be arranged along this straight line, a plurality of evaporation containers can be arranged more simply and compactly, and the configuration of the apparatus can be made smaller.

Further, as shown in FIG. 1, the linear portion of the cooling endless belt 4 is inclined with respect to the evaporating surfaces of the evaporating vessels 16A and 16B, and its angle is preferably set to the angle of incidence of the vapor flow on the base film 3. By matching the direction in which the directivity of the scattered vapor flow becomes the maximum value, the surface on which the vapor flow adheres to the base film 3 becomes large, so that the efficiency of vapor deposition of the magnetic material on the base film 3 is improved. Can be improved.

In the above-described embodiment, the base film 3 is transported by using the endless belt 4. However, the present invention is not limited to this. For example, as shown in FIG. The base film 3 is transported by the cooling can 4 '.
The first and second evaporation vessels 16A and 16B are provided below the cylindrical surface of
May be provided. In this case, the base film 3 is transported on the cylindrical surface of the cooling can 4 'by rotating the cooling can 4' in the direction of arrow Y. The cooling can 4 ′ is, for example, a cylindrical drum having a diameter of 600 mm and a width of 220 mm, the surface of which is subjected to hard chrome plating.
It has a structure in which cooling water and other refrigerants (ethylene glycol) are circulated inside, and the surface temperature is, for example, −35 as in the above-described embodiment using the cooling endless belt 4 of the present invention. The temperature is maintained at + 25 ° C (-28 ° C in this example).

Further, when the cooling can 4 'is used as described above, the surface of the cooling can 4' is fixed at a predetermined distance from the cooling can 4 '(this distance) as in the above-described first embodiment of the present invention. Are separated by 2 to 15 mm, more preferably 2 to 10 mm, and most preferably 3 to 5 mm). Cooling water of 18 ° C. is circulated inside, and masks 13A, 13B and 13C whose main body is formed of SUS304 are arranged. Is established. The mask 13 located on the upstream side with respect to the transport direction of the base film 3
The maximum incident angle of the first evaporation container 16A is defined by A, and the minimum incidence angle of the first evaporation container 16A is defined by the mask 13B located on the downstream side, and is located upstream with respect to the transport direction of the base film 3. The second mask 13B
The maximum incident angle of the evaporation container 16B is defined by the mask 13B located on the downstream side, and the minimum incident angle of the second evaporation container 16B is defined by the mask 13B. The angle of incidence is as follows:
With reference to the center of the circle of the melted surface in 11B, the angle is defined by the angle between the line segment from the center of the circle to the edges of the masks 13A and 13B and the normal line at the position of each mask edge on the cooling can 4 '. You.

As described above, by using the cylindrical cooling can 4 'and forming the two-layered magnetic layer along the cylindrical surface by using the two evaporation vessels 16A and 16B, the above-described present invention is achieved. Similarly to the first embodiment, when the magnetic recording medium has a layered structure, the distance between the evaporation container and the base film is set to be smaller than that in the case where the evaporation container is heated by the electron beam shown in FIG. As a result, the size of the device can be reduced, and the cost of the device can be reduced as compared with a device in which the magnetic recording medium has a multilayer structure using an electron beam.

Further, as in the third embodiment of the present invention shown in FIG. 3, the base film 3 is conveyed by using the same cooling endless belt 4 as in the first embodiment of the present invention. Is disposed so as to be horizontal in the same manner as the evaporation surfaces of the magnetic materials 10A and 10B in the evaporation containers 16A and 16B, and the flow of the steam discharged from the first and second steam diffusion control means 15A and 15B. The direction in which the directivity has the maximum value may be made to coincide with the incident angle of this vapor flow on the base film 3. In this case, the steam diffusion control means 15A and 15B may be arranged at a predetermined angle (an angle at which the directivity of the steam flow becomes the maximum value) with respect to the vertical line.

In the conventional example using two cooling cans shown in FIG. 5 described above, high-frequency induction heating may be used as shown in FIG.
Further, above the vapor diffusion control means 15A, 15B, of the vapor flows evaporating from the evaporation containers 16A, 16B, the vapor flows other than those vapor-deposited on the base film 3, that is, the magnetic material 10
A and 10B are contacted with a vapor stream which is not used for vapor deposition and disappears.
Alternatively, auxiliary heating means 30A, 30B may be provided so as to be recovered again in the evaporation containers 16A, 16B. These auxiliary heating means 30A and 30B are steam diffusion control means.
It is preferable that a plurality of layers are formed of the same material as 15A and 15B.
May be provided with a cooling means so as not to overheat.

By providing the auxiliary heating means 30A, 30B in this manner, a steam flow that is not deposited on the base film 3 and wasted can be evaporated again or returned to the evaporation containers 16A, 16B. The amount of waste of the flow can be reduced, and the utilization efficiency of the magnetic material can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an embodiment of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a diagram showing another embodiment of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 3 is a diagram showing another embodiment of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 4 is a diagram showing another embodiment of the apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 5 is a diagram illustrating an example of a conventional magnetic recording medium manufacturing apparatus.

FIG. 6 is a diagram illustrating an example of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum vapor deposition apparatus 2 Vacuum tank 3 Base film 4 Cooling endless belt 4'4A, 4B Cooling can 5 Delivery shaft 6 Winding shaft 7, 8 Drive shaft 9 Cooling means 10A, 10B Magnetic material 11A, 11B Refractory crucible 12A, 12B High-frequency induction heating coil 13A, 13B, 13C, 13D Mask 15A, 15B Vapor diffusion control means 17, 17A, 17B Gas blowing unit 18, 18A, 18B Mask opening 20 Partition plate 21 Winding room 22 Evaporation room 30A, 30B Auxiliary Heating means 40A, 40B Electron gun 41A, 41B Electron beam

Claims (1)

[Claims] 1. A transport means for transporting a long flexible substrate in a vacuum atmosphere, an evaporation source made of a magnetic material disposed below which the substrate is transported, and heating and evaporating the evaporation source. Evaporating means, and a cylindrical vapor flow diffusion control means disposed between the evaporating means and the flexible substrate, for regulating and controlling the diffusion direction of the vapor flow heated and evaporated by the evaporating means,
An apparatus for manufacturing a magnetic recording medium for forming a magnetic thin film on the flexible substrate, the apparatus comprising: an incident angle regulating unit that regulates an incident angle of the vapor flow to the flexible substrate; An apparatus for manufacturing a magnetic recording medium, wherein at least two elongate flexible substrates are provided along the transport direction of the long flexible substrate, and the evaporating means is induction heating means.