JPH10151717A - Film bonding method and apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the slackening of a film at the time of biting of a substrate when the film is to be continuously bonded to the substrate being conveyed intermittently. SOLUTION: In a film bonding apparatus 10, when a laminate film 16 is continuously bonded to a plurality of substrates 12 fed along a substrate feed surface I-I by lamination rolls 20A, 20B, a tension control roll 26 sending into the laminate film 16 while sucking the same is arranged on the inlet side of the lamination roll 20B and, when each substrate 12 is intruded into the nip between the lamination rolls 20A, 20B and the tension of the laminate film 16 lowers, the rotational speed of the tension control roll 26 is lowered to increase the tension of the film.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film for attaching a laminated film having a photosensitive resin layer to the surface of a substrate exemplified by a substrate for a printed wiring board, a glass substrate for a liquid crystal panel, and a substrate for a plasma display. The present invention relates to a sticking method and device.

[0002]

2. Description of the Related Art A laminate film having a photosensitive resin layer is stretched on a substrate surface such as a substrate for printed wiring, a glass substrate for a liquid crystal panel or a glass substrate for a plasma display so that the photosensitive resin layer faces the substrate. There is a process of attaching.

There are two types of film sticking machines: one is to cut the laminated film according to the length of the board and then to stick it to the board. There is a type in which a film is cut between the rear end and the front end of an adjacent substrate after being attached.

[0004] This type of laminated film is constituted by coating a photosensitive resin layer on a translucent support film and covering it with a cover film. The laminated film is continuously rolled from a roll of the laminated film. After the film is unwound and the cover film is peeled off, the photosensitive resin layer side is aligned with the surface of the substrate, and the film is passed between a pair of lamination rolls.

In the latter type of film sticking apparatus for continuously sticking a film, when a laminated film is supplied to a lamination roll, the film is fed in a film feeding direction to prevent wrinkles and bubbles from being generated during thermocompression bonding. A constant tensile force.

[0006]

In the film sticking apparatus of the type in which the film is continuously stuck as described above, the film is continuously and sequentially conveyed while applying a constant tensile force to the film. The laminating roll is used for thermocompression bonding on the surface of the incoming substrate, but at the position of the gap between the trailing end of the preceding substrate and the leading end of the succeeding substrate, the film pressing force by the pair of lamination rolls decreases, and at that moment, the film This also causes a problem that the tensile force is reduced, which causes wrinkles and bubbles when the film is thermocompression-bonded to a subsequent substrate.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and abruptly decreases the tensile force applied to a film when the film is thermocompression-bonded to the surface of a substrate which is intermittently sequentially conveyed. It is an object of the present invention to provide a method and an apparatus for sticking a film, which prevent wrinkles and bubbles from being generated.

[0008]

According to the present invention, there is provided a roll of a laminate film comprising at least a translucent support film, a photosensitive resin layer, and a cover film which covers and protects the photosensitive resin layer. While continuously unwinding the laminated film from the above, the substrate is intermittently transported intermittently along the substrate transport surface, and the laminated film unwound from the roll is peeled off the cover film, and then exposed to light. Facing the one surface of the substrate, along the substrate transport surface, and while applying a tensile force in the film feeding direction, in synchronization with the substrate, is disposed with the substrate transport surface sandwiched. In a film bonding method in which a film is thermocompression-bonded to a substrate while rotating the pair of lamination rolls while continuously feeding the pair of lamination rolls, Fixed time from the start biting of the substrate by Deployment roll, by increasing the pulling force applied to the laminate film at the inlet side of said lamination roll, it is to achieve the above object.

According to a second aspect of the present invention, in the first aspect of the present invention, the start timing of the control for increasing the pulling force after the second and subsequent substrates among the sequentially conveyed substrates have been engaged is set at a preceding timing. When the bottom of the substrate to be removed from the lamination roll is removed from the lamination roll, the tensile force of the film starts to increase when the time for the portion between adjacent substrates to elapse from the bottom of the lamination roll.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the tensile force in the film feeding direction on the laminated film at the entry side of the lamination roll is measured, and the substrate and the laminated film are laminated. The tensile force of the laminated film is increased when a sudden change of the laminated film caused by being caught between the rolls is detected or after a predetermined time based on the rapid fluctuation.

According to a fourth aspect of the present invention, in the first, second or third aspect of the present invention, the time for increasing the tensile force after the first substrate of the series of sequentially conveyed substrates has been engaged is set to two.
This is longer than the time required for increasing the tensile force after the first and subsequent substrates have been engaged.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects of the present invention, a tension control roll around which the laminated film is wound is disposed on the entry side of the lamination roll. The tensile force of the laminated film is controlled by increasing or decreasing the rotation resistance of the laminated film.

According to the present invention, a laminate film is continuously formed from a roll of a laminate film comprising at least a translucent support film, a photosensitive resin layer, and a cover film which covers and protects the photosensitive resin layer. A film supply device that unwinds the substrate, a substrate transport device that transports a plurality of substrates intermittently and sequentially along the substrate transport surface, and a pair of lamination rolls that are arranged with the substrate transport surface interposed therebetween; After peeling off the cover film from the laminated film unwound from, the photosensitive resin layer is directed toward one surface of the substrate, along the substrate transport surface, and a tensile force in the film feeding direction. While applying, synchronously with the substrate, continuously fed between the pair of lamination rolls, while rotating the pair of lamination rolls, continuously with the plurality of substrates. In a film sticking apparatus for thermocompression bonding, the laminated film disposed near the entry side of the lamination roll is wound at a constant contact angle with the photosensitive resin layer facing up, and rotated at a film feed speed. Tension control roll, when the substrate together with the laminated film is bitten between the pair of lamination rolls, for a fixed time from the start of the bite, the tension control roll, the lamination roll entrance side of the laminated film By providing a control device for controlling the tensile force to be increased, the above object is achieved.

According to a seventh aspect of the present invention, in the sixth aspect, the tension control roll is provided with a cylindrical member that rotates while sucking the wound film by negative pressure. It is.

According to an eighth aspect of the present invention, in the invention of the sixth or seventh aspect, the tension control rolls of the tension control roll are slowed down from the film speed by the control device, whereby the tensile force of the laminated film is increased. Is to be increased.

According to a ninth aspect of the present invention, in the sixth, seventh or eighth aspect of the present invention, the lamination roll is disposed in contact with the laminated film on the entry side thereof, and a tensile force applied to the laminated film is detected. A tension detection device that outputs the detected value to the control device, and the control device controls the timing of increasing or decreasing the tensile force applied to the laminated film based on the detection value of the tension detection device. It is what was constituted.

According to the present invention, in the process of intermittently transporting a substrate being sandwiched between a lamination roll and a film, the tensile force applied to the film is increased for a certain period of time after the leading end in the substrate transport direction is bitten by the lamination roll. This is based on the finding that wrinkling of the film, bubbles after pressure bonding, and the like can be prevented.

[0018]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a first embodiment of the present invention;

As shown in FIG. 1, the film sticking apparatus 10 according to the embodiment of the present invention comprises a substrate transport apparatus 1 for sequentially transporting substrates 12 at regular intervals along a substrate transport plane II.
4, a film supply device 18 that continuously unwinds the laminated film 16 from the laminated film roll 15, a pair of lamination rolls 20A and 20B disposed across the substrate transport surface II, and the roll 15 and the laminated film 14 unwound from the cover film 16A
Then, the photosensitive resin layer 16 </ b> B (see FIG. 2) faces the upper surface of the substrate 12 and the substrate transfer surface II is removed.
And a tension control roll 26 continuously fed between the pair of lamination rolls 20A and 20B along with the feeding speed of the substrate 12.

Here, the laminate film 16 is formed as shown in FIG.
As shown in FIG. 7, a photosensitive resin layer 16B is applied to a translucent support film 16C, and a cover film 16 covering the photosensitive resin layer 16B.
A is laminated.

Also, lamination rolls 20A and 20B
Is rotated while being heated by a heater (not shown),
The substrate 12 and the laminated film 16 fed during the rotation are thermocompression-bonded while rotating.

The tension control roll 26 is disposed at a position further below the lower lamination roll 20B, and rotates the laminated film 16 from the direction of the film supply device 18 to approximately 120 ° with the photosensitive resin layer 16B outside. And is sent in the direction of the lamination roll 20B.

This tension control roll 26 is shown in FIG.
As shown in FIG. 4 in an enlarged manner, an outer cylindrical member 28 rotated at a film feed speed, and bearings 27 on the inner side of the outer cylindrical member 28 with respect to the inner circumferences at both axial ends of the outer cylindrical member 28. The space between the inner cylindrical member 30 and the outer cylindrical member 28, which are rotatably fitted through the space, and the space between the inner cylindrical member 30 and the outer cylindrical member 28 are moved to the negative pressure chamber 29A along the central axis of these cylinders. A pair of partition members 34 and 36 in the center axis direction, which are divided into two chambers 29B;
And a partitioning and moving device 38 for driving the positions 4 and 36 in directions opposite to each other in synchronization with the center axis direction to adjust the position. Both ends of the inner cylindrical member 30 are fixed to a frame 32 on the side of the apparatus main body (all not shown).

The outer cylindrical member 28 has a large number of suction holes 28A formed through the peripheral wall over substantially the entire outer peripheral surface of the cylindrical member, and is attached to the output shaft of the motor 40 at a gear 28B at one end. The gear 40A is driven to rotate in the film feed direction in synchronization with the film feed speed.

The inner cylindrical member 30 has an inner space 3
At 0A, a negative pressure from a negative pressure source (not shown) is applied via a negative pressure line 42, and three portions of the outer peripheral wall 30B facing the negative pressure chamber 29A and near the center in the axial direction. Is provided, so that the negative pressure of the negative pressure source is transmitted to the negative pressure chamber 29A via the inner space 30A.

The partition moving device 38 includes a feed screw 38A disposed on the center axis of the inner cylindrical member 30 so as to penetrate the inner cylindrical member 30, and the outer cylindrical member 28 of the inner cylindrical member 30. And a motor 38B for driving the feed screw 38A to rotate, which is connected to the distal end of the feed screw 38A further projecting from the end face protruding from the feed screw 38A.

The partition members 34 and 36 are respectively fitted to the outside of the inner cylindrical member 30 so as to be coaxial and slidable in the axial direction. Of the inner cylindrical member 30 is integrally provided at an inner end of the inner cylindrical member 30 at the axial center.
, A disk-shaped partition wall 3 that separates the outer cylindrical member 28 in the axial direction.
4B, 36B, and the disk-shaped partition walls 34B, 36B are integrally provided on the opposite sides of the cylindrical portions 34A, 36A,
In FIG. 3, the cylindrical space between the outer cylindrical member 28 and the inner cylindrical member 30 is vertically divided into a negative pressure chamber 29 </ b> A and an atmospheric chamber 29.
And B-shaped partition walls 34C and 36C.

A slit-shaped through hole 30C extending in the axial direction within a certain range is provided at a position adjacent to the inner cylindrical member 30 on both axial sides of the disk-shaped partition walls 34B and 36B.
A pair is formed in the axial direction.

The inner cylindrical member 3 is inserted into these through holes 30C.
0, said disk-shaped partitions 34B, 36 fitted outside
B, the connecting piece 34 extends toward the center of the inner cylindrical member 30.
D and 36D are respectively extended and screwed with the feed screw 38A. The feed screw 38A has a right-hand screw 39 in a direction opposite to the axial center position of the outer cylindrical member 28.
A and the left-hand thread 39B are formed respectively,
4D is screwed into the right screw 39A, and the connecting piece 36D is screwed into the left screw 39B, respectively.
When A is driven to rotate, the connecting pieces 34D, 36D and the partition members 34, 36 integral therewith are driven synchronously in opposite directions.

Here, the plate-like partitions 34C, 36C are:
As shown in FIG. 3, the outer cylindrical member 28 is disposed so as to overlap within a certain range from the axial center position, and the partition member 34,
When the cylinder 36 moves synchronously in opposite directions within a certain range as a whole, the separation between the negative pressure chamber 29A and the atmosphere chamber 29B can be maintained.

The rotation speed of the motor 40 is controlled by the control device 46.

A tension sensor 48 is disposed between the tension control roll 26 and the lower lamination roll 20B and close to the tension control roll 26, and the lamination roll 20B and the tension control roll 26 The tension of the laminated film 16 is detected between the two.

As shown in an enlarged view in FIG. 5, the tension sensor 48 has a contact roll 48A rotatably in contact with the laminated film 16, a rotatable support of the contact roll 48A at the tip, and a base roll. Shaft 48 at the end
The swing lever 48C swingably supported by B, the pressing portion 48D of the swing lever 48C integrally projecting from a position near the shaft 48B, and the swing lever 48C are counterclockwise in FIGS. And a load cell 48E that is pressed by the pressing portion 48D when it is swung in the direction and outputs a signal in accordance with the pressing force. Load cell 48 in the tension sensor 48
The output of E is input to the control device 46.

The lamination rolls 20A and 20A are located near the entry side of the lower lamination roll 20B.
A film guide roll 52 for guiding the film 16 so that the film 16 does not contact the film B is provided.

Here, the upper lamination roll 2 of the pair of lamination rolls 20A and 20B is used.
OA is driven between a pressing position where the other lamination roll 20B is pressed by the roll opening / closing device 54 and a retreat position where the separation lamination is in non-contact.

The film guide roll 52 is provided with a swing lever 56 near the lower lamination roll 20B.
The swing lever 56 is rotatably supported by a swing shaft 56A.

The swing lever 56 is driven by a lever driving device 58 composed of an air cylinder, is driven upward in the figure, and when it comes into contact with a stopper 58A as shown by a two-dot chain line in FIG. The center of the film guide roll 52 at the leading end is set to a position (retreat position) on the substrate transfer surface II, and when the film guide roll 52 is swung downward in the drawing, the film guide roll 52 is wound around the lamination roll 20B. It is driven so as to be at a position (feed position) where it does not come into contact with the film.

The pair of lamination rolls 20A,
A pair of upper and lower nip rolls 60A and 60B are disposed on the substrate transfer surface II on the output side of the substrate 20B, and a state where a constant tension is applied to the film 16 between the lamination rolls 20A and 20B during thermocompression bonding. The film 16 is maintained substantially parallel to the substrate transfer surface II.

The control device 46 includes a roll opening / closing device 54
When the upper lamination roll 20A is driven in the opening direction from the lower lamination roll 20B, the swing lever 56 is driven to the retracted position, and when the lamination roll 20A is pressed by the lamination roll 20B, the swing lever 56 is driven to the feed position.

Reference numeral 54A in the figure denotes a roll lever for supporting the upper lamination roll 20A so as to swing freely within a certain range, and 54B drives the roll lever 54A to move the lamination roll 20A to the lamination roll 20B. An air cylinder device 54C driven to a pressing position and a separating position indicates a pivot center axis of the roll lever 24A.

The reference numeral 64 in the figure denotes the upper nip roll 60A of the pair of nip rolls 60A and 60B.
5 shows a nip roll driving device for driving the lower nip roll 60B so as to press it. The nip roll driving device 64 includes a substantially L-shaped nip roll lever 6.
The nip roll 60A at the other end of the L-shape is pressed against the nip roll 60B by swinging one end of the L-shape with the air cylinder 64C around the swing shaft 64B of the L-shaped corner portion of the 4A.

In FIG. 1, reference numeral 66 denotes a guide roll for guiding the film, 68 denotes a take-up roll for winding the cover film 16A separated from the film 16, and 70 denotes a cover for separating the cover film 16A from the film 16. The film peeling member 72 is disposed near the entry side of the lamination roll 20B, and
, A reference numeral 14A denotes a transfer roller in the substrate transfer device 14, and 14B denotes a transfer belt.

Next, the operation of the film sticking apparatus 10 will be described with reference to a flowchart (FIG. 7).

The outer periphery of the outer cylindrical member 28 of the tension control roll 26 is wound on the laminate film 16 unwound from the film supply device 18 with the cover film 16A peeled off and the photosensitive resin layer 16B turned outward. And set it between the lamination rolls 20A and 20B.
A and 20B are rotated while heating. At this time, the laminated film 16 is clamped by the nip rolls 60A and 60B (see step S101 in FIG. 7).

Next, the automatic operation is started as in step S102 of FIG. 7, and in step S103, the nip rolls 60A and 60B are driven to rotate, and at the same time, the lever driving device 58 is operated, so that The film guide roll 52 is driven clockwise in FIGS.
2 is in a non-contact state with the laminated film 16.

Next, in step S104, the outer cylindrical member 28 of the tension control roll 26 is rotated by the motor 40 in the film feeding direction.

In step S105, a negative pressure from the negative pressure pipe 42 is applied to the inner space 30A of the inner cylindrical member 30 in the tension control roll 26. At this time, the section to which the negative pressure is applied in the inner space 30A is selected by moving the partition members 34 and 36 in the axial direction by the partition moving device 38 according to the width of the laminated film 16 so that the negative pressure does not leak. Keep it.

Next, in step S106, the gap between the pair of lamination rolls 20A and 20B is reduced so as to be in the first stage closed state.
When the leading end of the substrate 12 is detected by the
At 107, the lamination rolls 20A, 20B
The gap is further closed, and the apparatus is driven to the clamp state.

In this state, while transporting the substrate 12 in the direction of the lamination rolls 20A and 20B by the substrate transport means 14, the laminated film 16 is fed between the lamination rolls 20A and 20B at the same speed. Therefore, the laminate film 16 is thermocompression-bonded to the surface of the substrate 12 by the lamination rolls 20A and 20B.

Since a predetermined negative pressure is applied to the inner space 30A of the inner cylindrical member 30 of the tension control roll 26, the outer cylindrical member 28
When rotating in the film feed direction with respect to 0, a negative pressure is applied to the suction pores 28A on the side of the negative pressure chamber 29A around which the laminated film 16 is wound, via the negative pressure communication line 42. become. Therefore, without negative pressure leaking,
The laminated film 16 can be sucked by the suction holes 44 of the outer cylindrical member 28.

As a result, the coefficient of friction between the laminate film 16 and the tension control roll 26 is increased, and the tensile force of the laminate film 16 transmitted from the upstream side is interrupted. Only the tensile force between the lamination rolls 20A and 20B is applied to the laminate film 16.

Therefore, by controlling the magnitude of the negative pressure applied to the laminated film 16 by the outer cylindrical member 28, it is possible to optimize the film tension between the tension control roll 26 and the lamination rolls 20A and 20B. it can.

Here, the photosensitive resin layer 16B of the laminated film 16 is wound around the tension control roll 26 with the photosensitive resin layer 16B facing outward, and the light-transmitting support film 16C The side of the photosensitive resin layer 16 is sucked by the suction hole 28A.
B is not damaged by contact with a roll or the like.

Next, with reference to FIG. 8, an example of the optimum control of the film tensile force based on the negative pressure (vacuum) control of the tension control roll 26 in the present invention will be described.

As shown in FIG. 8, the rotation speed of the outer cylindrical member 28 in the tension control roll 26 (the surface in contact with the film in the film feeding direction) is initially
At the same speed as the lamination rolls 20A and 20B, after starting the tension control roll suction (vacuum) in step S105 described above, step S107 is performed.
At the moment, when the lamination rolls 20A and 20B strongly sandwich the substrate 12 and the laminate film 16,
The rotation speed of the outer cylindrical member 28 in the tension control roll 26 is reduced to a low speed state by reducing the speed of the motor 40 via the control device 46.

At this time, as shown in FIG. 8, the tensile force applied to the laminate film 16 is controlled by the tension control roll 2.
6 and the nip rolls 60A, 60B, the tension applied to the laminate film 16 is interrupted, so that it drops rapidly, and this is detected by the tension sensor 48,
The detection signal is output to the control device 46.

The control device 46 controls the motor 40 so that the rotation speed of the tension control roll 26 is reduced for a predetermined time, for example, one second from the start of the rapid reduction of the film tension from the tension sensor 48.

Accordingly, during this time, the tension of the laminated film 16 is increased.

Next, a plurality of substrates 1 conveyed
2, the second substrate 12 is a lamination roll 2
When biting between 0A and 20B, the rotation speed of the tension control roll 26 is reduced for about 0.1 second from the start of biting. The same applies to the third and subsequent bites.

The reason for the long decrease time of the film tensile force at the time of the first biting of the substrate 12 is that the tensile force applied to the laminated film 16 before that is due to the tension control roll 26 and the nip rolls 60A and 60B. This is because the tensile force is suddenly interrupted by sandwiching the film for a long distance between the two, and it takes more time to recover the tensile force.

The control for increasing the pulling force by lowering the speed of the tension control roll 26 for the second and subsequent times is set to be about 0.1 second from the start of the engagement of the substrate 12. The tension sensor 48 detects a sharp decrease in the film tensile force at the time of detachment, and the speed of the tension control roll 26 is reduced for 0.1 second from the detection timing after a lapse of time during which the gap between the substrates is sent. Good.

As described above, when the film sticking to the final substrate 12 is completed while compensating for the decrease in the film pulling force at the time of the substrate biting, the result of the judgment as to whether or not the substrate is loaded is NO in step S109. S110
And the automatic operation is stopped.

In the film sticking apparatus 10, the control of decreasing the speed of the tension control roll 26 to increase the tensile force of the laminated film 16 is performed by controlling the tension sensor 48 to detect the tensile force of the laminated film 16. However, the present invention is not limited to this, and a tension control roll may be used as long as the film attaching speed to the substrate 12 and the distance of the gap between the substrates 12 can be accurately controlled. The start point of the speed reduction control 26 may be set in advance. In this case, the tension sensor 48 is unnecessary.

Further, the film sticking apparatus 10 comprises the substrate 1
2, when the film is not stuck, the film guide roll 52 moves the laminated film 16 to the neutral point so that the contact with the lamination rolls 20A and 20B that are idle is avoided. The present invention is not limited to this, and is naturally applied to a case where the film guide roll 52 is not provided.

The laminated film 16 is bonded to the lower surface (back surface) of the substrate 12 by thermocompression bonding.
The present invention is also applicable to a case where the laminate film 16 is thermocompression-bonded to the upper surface or both surfaces of the substrate 12.

Further, in the film sticking apparatus 10, the tension control roll 26 is composed of an outer cylindrical member 28 and an inner cylindrical member 30. The configuration of the tension control roll 26 is not limited as long as the tension applied to the laminated body film 16 can be controlled by changing the tension.

[0067]

According to the present invention, as described above, the tensile force applied to the laminate film when the substrate and the film are bitten between the pair of lamination rolls in the continuous-stretching type film sticking apparatus. And has an excellent effect that wrinkles and bubbles can be prevented from being generated when the laminate film is attached to the substrate.

[Brief description of the drawings]

FIG. 1 is a schematic side view including a partial block diagram showing a film sticking apparatus according to the present invention.

FIG. 2 is an enlarged cross-sectional view showing a configuration of a film to be attached to a substrate by the film attaching apparatus.

FIG. 3 is a sectional view including a partial block diagram showing a tension control roll in the film sticking apparatus.

FIG. 4 is an enlarged sectional view taken along the line IV-IV in FIG. 3;

FIG. 5 is an enlarged side view showing a tension sensor in the film sticking apparatus.

FIG. 6 is an enlarged schematic side view showing a film guide roll, a driving device thereof, and a nip roll in the film sticking apparatus.

FIG. 7 is a flowchart showing the operation of the film sticking apparatus.

FIG. 8 is a timing chart showing the same operation.

[Explanation of symbols]

 II: substrate transport surface 10: film sticking device 12: substrate 14: substrate transport device 16: laminated film 16A: cover film 16B: photosensitive resin layer 16C: translucent resin layer 18: film supply device 20A 20B ... Lamination roll 24 ... Film feeding device 26 ... Tension control roll 28 ... Outer cylindrical member 28A ... Suction pore 29A ... Negative pressure chamber 30 ... Inner cylindrical member 46 ... Control device 48 ... Tension sensor

Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI H05K 3/06 H05K 3/06 J // B29L 9:00 (72) Inventor Yoji Wakizaki 4-11-2 Ginza, Chuo-ku, Tokyo Somer (72) Inventor Osamu Ozawa 4-11-2 Ginza, Chuo-ku, Tokyo

Claims (9)

[Claims] 1. A laminate film is continuously wound from a roll of a laminate film comprising at least a light-transmitting support film, a photosensitive resin layer, and a cover film which covers and protects the photosensitive resin layer. Out, and sequentially and intermittently transport the substrate along the substrate transport surface, and, after peeling off the cover film from the laminated film unwound from the roll, a photosensitive resin layer is formed on one of the substrates. Toward the surface, along the substrate transport surface, and while applying a tensile force in the film feeding direction, in synchronization with the substrate, continuously between a pair of lamination rolls disposed across the substrate transport surface. In a film sticking method in which a film is thermocompression bonded to a substrate while rotating the pair of lamination rolls, the pair of lamination rolls A film sticking method, comprising: increasing a tensile force applied to the laminated film on the entry side of the lamination roll for a certain time from the start of biting. 2. The control method according to claim 1, wherein the control start timing for increasing the pulling force after the second and subsequent substrates in the series of sequentially conveyed substrates are engaged.
A film tensioning step, wherein the trailing edge of the preceding substrate is removed from the lamination roll, and the tensile force of the film starts to increase when a time period in which a portion between adjacent substrates advances from the trailing edge removal. How to attach. 3. The method according to claim 1, wherein a tensile force in a film feeding direction on the laminated film at an entrance side of the lamination roll is measured, and the substrate and the laminated film are bitten between the lamination rolls. A method for attaching a film, comprising: increasing a tensile force of a laminated film when a sudden change of the laminated film is detected or after a predetermined time based on the rapid fluctuation. 4. The pulling force according to claim 1, 2 or 3, wherein the time for increasing the tensile force after the first substrate of the series of sequentially conveyed substrates is engaged is the tensile force after the second and subsequent substrates are engaged. A film sticking method characterized in that the time is longer than the increasing time. 5. The tension control roll according to claim 1, wherein a tension control roll around which the laminated film is wound is arranged on an entrance side of the lamination roll, and a rotational resistance of the tension control roll is increased or decreased. A film sticking method, comprising controlling a tensile force of the laminated film. 6. A laminate film is continuously wound from a laminate film roll comprising at least a translucent support film, a photosensitive resin layer, and a cover film which covers and protects the photosensitive resin layer. An unloading film supply device, a substrate transport device for intermittently transporting a plurality of substrates along the substrate transport surface, and a pair of lamination rolls disposed with the substrate transport surface interposed therebetween, and unwinding from the roll After the laminated film was peeled off the cover film, the photosensitive resin layer was directed toward one surface of the substrate,
Along the substrate transport surface, and while applying a tensile force in the film feed direction, synchronously with the substrate, continuously fed between the pair of lamination rolls, while rotating the pair of lamination rolls, In a film sticking device that is continuously thermocompression-bonded to the plurality of substrates, the laminated film disposed near the entry side of the lamination roll is wound around the photosensitive resin layer on the front side at a constant contact angle, and A tension control roll rotated at a film feed speed, and when the substrate is bitten between the pair of lamination rolls together with the laminated film, the tension control roll is a lamination roll for a certain period of time from the start of biting. And a control device for controlling the tensile force of the laminated film on the entry side to be increased. Characteristic film sticking device. 7. The film sticking apparatus according to claim 6, wherein the tension control roll includes a cylindrical member that rotates while sucking the wound laminated film by negative pressure. 8. The tension control roll according to claim 6, wherein a rotation speed of the tension control roll is reduced by the control device to be lower than a film feed speed, so that a tensile force of the laminated film is increased. A film sticking device, characterized in that: 9. The lamination roll according to claim 6, 7 or 8, wherein the lamination roll is disposed in contact with the lamination film in contact with the lamination roll, and a tensile force applied to the lamination film is detected, and the detected value is detected by the lamination roll. A tension detecting device for outputting to the control device is provided, and the control device is configured to control a timing of increasing or decreasing a tensile force applied to the laminated film based on a detection value of the tension detecting device. Film sticking device.