JP4111200B2 - Film laminating method and apparatus - Google Patents

Description

  The present invention relates to a method and an apparatus for laminating a film on a substrate surface, and in particular, between each substrate conveyed on a carrying path at a fixed interval and a laminating roller installed on the carrying path with a film fed from a film supply roll. The present invention relates to a film laminating method and an apparatus for laminating a film on each substrate surface by passing the film.

  Conventionally, in liquid crystal production lines and semiconductor production lines that attach resist films to glass substrates and semiconductor substrates, an optical monitoring device has been installed downstream of the film laminating device to monitor the substrate surface after film lamination. Then, the film laminating condition in which a void exists between the substrate and the film or the film surface condition in which wrinkles are present in the film is inspected due to light reflection. And when a defective location etc. are detected, the means which removes the said defective board | substrate from a manufacturing line and does not perform a further process process with respect to a defective board is taken.

  Examples of the film laminating apparatus include those described in Patent Document 1 and Patent Document 2.

JP-A-5-338041 JP-A-6-210595

  The substrate before film lamination is a normal product, but a defective substrate taken out from the production line after lamination is difficult to reuse because the surface of the substrate remains dirty even if the film is peeled off and reused.

  Then, when examining the defective substrate, it was found that the occurrence of voids caused by the film laminate was not caused by the film laminate, and the defect was not caused by the film laminate. That is, when the film was fed from the film supply roll, it was confirmed that the film already contained a defective part.

An object of the present invention is to provide a film laminating method and apparatus capable of reducing the number of discarded normal substrates by attaching a good region of a film fed from a film supply roll to the substrate.

A feature of the present invention that achieves the above object is that a film management file that monitors the state of the film before laminating the film on the substrate, determines whether or not the film includes a defective portion, and stores the determination result. when that indicates a failed portion in is the defective portion so as to discard the defective portion region of the film comprising, on the film laminate method and apparatus has only good area pasted to the substrate .

  As described above, according to the present invention, it is possible to reduce the number of normal substrates discarded by attaching only the good region of the film fed from the film supply roll to the substrate.

Hereinafter, the present invention will be described in detail based on the embodiments shown in the drawings.
In FIG. 1, reference numeral 1 denotes a film supply roll for the film 2, and the film 2 is formed by stacking a base film 2a, a resist film 2b, and a cover film 2c in a three-layer structure as shown in FIG.

The film 2 is fed out from the film supply roll 1, and immediately, the cover film 2 c is peeled off and collected on the take-up roll 3. The film supply roll 1 holds a torque opposite to the direction in which the film 2 is fed out, and a constant tension is applied to the film 2 regardless of the amount of the film fed out.
4 is a guide roll, and 5 is a monitoring device for the film surface state.

  The monitoring device 5 has an optical sensor for monitoring the state of the film surface being fed out at an arbitrary sampling period, and performs digital color discrimination by color component (RGB) detection and brightness / darkness detection. The defective portions of the film 2 are uneven thickness and discoloration in the resist film 2b, and the color components and brightness are different from those of the non-defective film. Therefore, thickness unevenness, discoloration, and the like are detected by the optical sensor, and the measurement result is transferred to the control device 6. The determination unit in the control device 6 determines how close the film color is to a non-defective product with the degree of coincidence (0 to 999). An arbitrary threshold value is provided for the degree of coincidence, and at each sampling, when it is larger than the threshold value, it is judged as good, and when it is smaller, it is judged as bad, and the judgment result is stored in a film management data file described later. deep. Reference numeral 6 a denotes an operation panel attached to the control device 6.

  Reference numeral 7 denotes an inter-substrate processing apparatus, in which two rows of cuts are provided in the width direction of the resist film 2b in the film 2, and the resist film 2b between the cuts is peeled off to expose the base film 2a.

  The resist film 2b remaining on the base film 2a is attached to the substrate. Therefore, the interval between the two rows of cuts is the sum of the interval between the substrates conveyed continuously and the length at which the resist film of each substrate is not desired to be attached.

  A film tension holding roller 8 has a slit on the roller surface, sucks the film 2 and rotates in the direction opposite to the film conveyance (feeding out) direction, and the film tension from the downstream laminating roller 9 to the film tension holding roller 8. Is kept constant. Reference numeral 10 denotes a guide roller having a torque sensor for measuring the film tension value from the laminating roller 9 to the film tension holding roller 8, and the detected torque is sent to the control device 6 to hold the film tension so that the film tension is always constant. The rotational speed of the roller 8 is controlled by the control device 6.

  Reference numeral 11 denotes a guide roller for avoiding contact between the laminating roller 9 and the film 2 when the substrate 12 is not transported from the upstream on the transport path for a predetermined time or more. In the state of waiting for substrate conveyance from the upstream machine, the guide roller 11 descends to avoid contact between the film 2 and the laminating roller 9. At the time of film lamination, the guide roller 11 rises and conveys the film only between the rolls from the guide roller 10 to the laminating roller 9. In addition, 9a is a backup roll which keeps the pressurization amount (linear pressure) of the lamination roller 9 uniform.

  13 is a heat retaining device for keeping the substrate 12 continuously transported at a constant interval, 14 is a transport device for transporting the substrate from the upstream device to this apparatus, 15 is a substrate transport support roller, and 16 is First substrate nip roller for transporting the substrate after lamination, 17 is a film nip roller for transporting the film, 18 is a substrate 12 and the substrate 12 that are continuously laminated and connected by the film 2, and a laser cutter, etc. A substrate separating apparatus 19 for separating the substrate, 19 is a substrate transport supporting roller capable of moving up and down, 20 is a film discarding roller, and 21 is a second substrate nip roller for transporting the laminated substrate.

  As will be described later, the film discarding roller 20 can move in the range of the downstream position of the film nip roller 17 from the position shown in the drawing in the transport direction of the substrate 12 or the film 2 in the transport direction. When moving in the upstream or downstream direction, the substrate transporting support roller 19 is lowered by the control device 6 so as not to obstruct the movement.

  Reference numeral 22 denotes a discharging device for discharging the separated substrate, 23 a waste film guide, 24 a waste film winding roll, and 25 a pressing roller for attaching the waste film to the winding roll 24.

  Since the film 2 is the resist film 2b on the take-up roll 24 side, when the waste film is pressed against the take-up roll 24 by the pressing roller 25, it can be attached and wound by the adhesiveness of the resist film 2a.

  The control device 6 includes a RAM for storing various data such as a teaching result for the laminating process input from the operation panel 6a and a device dependent data, and a ROM storing a laminating process flow program. , A hard disk, a central processing unit composed of an interface for communicating signals between them, a driver device for sending an operation signal to each drive unit, a display screen for various data, and the like.

  The substrate 12 is subjected to a film laminating process using a plurality of substrates having the same length in the transport direction as a lot. If there is a change in the lot, the controller 6 transports the substrate and the film according to the length of the substrate. The setting can be made by slightly moving the position of each roller in the conveying direction.

Next, the film lamination to the board | substrate 12 is demonstrated along the flow program of FIG.
First, the control device 6 is turned on and a teaching process in step (hereinafter abbreviated as S) 100 is performed.

  In the teaching process S100, the width L1 of the substrate 12, the length L2 of the substrate 13, the tip position P1 of the film 2 applied to the substrate 13, the attachment length D1 of the film 2 to the substrate 12, the substrate at the time of continuous lamination Input the data regarding the length D2 subjected to the interval processing, the set temperature data of the laminating roller 9 and the backup roller 9a, the data of the tension applied to the film 2, the number of substrates to be attached in the same lot, etc. It is stored in the RAM of the control device 6. In addition, the length of the film 2 from the inter-substrate processing apparatus 7 to the laminating roller 9 is an integral multiple of the length D1 of the film 2 attached to the substrate 12 and the length D2 subjected to the inter-substrate spacing process during continuous lamination. In this manner, the length of the resist film 2b to be attached remaining on the film 2 is matched with the attachment length D1 of each substrate 12 conveyed continuously with reference to the attachment tip position P1. ing. Each time the substrate spacing processing is performed by the inter-substrate processing device 7, each substrate to be pasted on the resist management film 2b of the length D1 on the film management data file F in the RAM of the control device 6 as shown in FIG. The film number n is attached in correspondence with 12 and stored.

  In the next operation preparation process S200, the control device 6 starts the operation preparation operation by the start button in the operation panel 6a. In preparation for operation, the position of each roller is slightly moved in the transport direction by the conveyor 26 shown in FIG. 6 so as to match the length of the substrate 12 input in the teaching process S100. Thereafter, the film supply roll 1, the take-up roll 3 and the film tension holding roller 8 are rotationally driven to hold the tension of the film set in the apparatus, and the film 2 is nipped by the film nip roller 17. Further, the film discard roller 20 and the take-up roll 24 are driven to rotate at a constant torque to prepare for discarding the film. The substrate carrying support roller 19 is raised for carrying in the substrate, then the guide roll 11 is lowered, and the laminating roller 9 and the backup roller 9a are retracted in the vertical direction from the carrying path position to avoid contact with the film 2. Then, temperature control is performed so that the laminating roller 9, the backup roller 9a, and the heat retaining device 13 are set to the temperature set in S100.

  In order to create the data of the film management file F, the film disposal roller 20 is moved to the vicinity of the film nip roller 17 by the conveyor 27 (see FIG. 6) to nip the film 2 and then drive downstream to transport the film 2. .

  At this time, the film number (No) n in the film management file F has the film number at the laminating roller entrance position as the first n = 1 and the rear part up to the inter-substrate processing apparatus 7 as n = n. The film position may be n = n. While the film is being transported, the surface state of the film 2 is monitored by the monitoring device 5, and as described above, if the degree of coincidence is equal to or less than the threshold value in the determination unit of the control device 6, Flag 1 is set in the film status column corresponding to n, and a defect detection display and a buzzer call are performed on the operation panel 6a or on the monitor screen. If no defect is detected, no flag is set and 0 is set in the film status column corresponding to film number n. As the film 2 is conveyed, the film number column and the film state column of the film management file F are stepped (shifted) toward the laminating roller entrance position as shown in FIG. In addition, during film conveyance in a preparation stage, the excess film 2 ahead of the winding roll 24 is wound up.

Then, in the film state confirmation process S300, reads the film number n = 1 of the film state data in the film management file F in the first sheet substrate loading before starting. Next, the process proceeds to the film defect determination process S400, where it is confirmed whether the read film state data is 0. If it is 0, the first board carry-in process S600 is started assuming that the film to be attached is in a non-defective state. To do.

  On the other hand, if the film state data is 1 in the film defect determination process S400, this means that there is a defective part in the film to be pasted. Therefore, the process proceeds to the film disposal process S500 and the film nip roller 17 uses the laminate amount D1. A film having a length corresponding to one substrate including the defective portion = the defective portion region is fed, and the film 2 is wound around the take-up roll 24. If the film 2 is transported, the monitoring device 5 monitors the surface state of the film 2, sends the detection result to the control device 6, stores it in its RAM, and prepares the film management file F.

  When the disposal of the defective portion area of the film 2 including the defective portion at the laminating roller entrance position is completed, the process returns to the film state confirmation processing S300, and the film number n = 1 to be pasted that has reached the laminating roller entrance (immediately before) For film 2, the film state data is read out and the film defect determination process S400 determines again whether there is a defective portion. Proceed to the first substrate carrying-in process S500, and if there is, go to the film discarding process S500 and repeat the above process.

Here, as advances to first sheet substrate loading process S 6 00, describes this process.

In first sheet substrate loading process S 6 00, conveys the width direction of the tilt of the substrate 12 from the correction with respect to the angle of the laminating roller 9 by the transfer device 14, to any position below the laminate rollers 9.

  Thereafter, in the first laminating process S700, the substrate 12 is nipped by the laminating roller 9 and the backup roller 9a, the guide roller 11 is lifted, and the film 2 is pasted on the substrate 12 for the amount of laminating length D1 taught in advance. Since the film 2 is being transported during the lamination, the surface state of the film 2 is monitored by the monitoring device 5 as described above. Further, the inter-substrate processing apparatus 7 performs the above-described inter-substrate processing for removing the resist film 2b having the teach data amount D2 every time the film 2 corresponding to one substrate (teach data amount D1) is conveyed.

  When the film 2 attachment is completed, the process proceeds to the first substrate separation process S800. As shown in FIG. 7, the substrate 12 on which the film is attached is nipped by the first substrate nip roller 16, and the lamination roller 9 and the backup roller 9a. Retreat and guide roller 11 is lowered. Subsequently, the substrate separation device 18 cuts the substrate 12 and excess film, opens the film discard roller 20, and releases the film holding. Simultaneously with the opening, the excess film 2 is collected on the take-up roll 24.

  On the other hand, the substrate 12 is conveyed downstream by the amount of teach data D2 by the first substrate nip roll 16 and waits for the next substrate loading. Further, the film state data corresponding to each film number n in the film management file F is shifted by one film number. FIG. 7 shows a situation in which the film 2 is cut by the substrate separating device 18.

  Thereafter, the process proceeds to a film state confirmation process S900, and similarly to the film state confirmation process S300, the film state data of the film n = 1 in the film management file F is read out before starting the second and subsequent substrate loading, and the film defect judgment process S1000. It is confirmed whether or not flag 1 is present in the film status data.

  If the flag 1 is not present and the film 2 with the film number n = 1 is satisfactory, the process proceeds to the second and subsequent substrate carry-in processing S1200. In the second and subsequent substrate laminating processes S1300 and the second and subsequent substrate separating processes S1400, the same processes as the first and second substrate separating processes S700 and S800 are performed. The substrate 12 already laminated and staying in the apparatus is conveyed to the downstream separation position by the first substrate nip roller 16 and the second substrate nip roller 21 in synchronization with the laminating speed. FIG. 8 shows this state.

  The laminated substrate 12 separated in the second and subsequent substrate separation processes S1400 is transferred to the discharge device 22 by the second substrate nip roller 21, and the substrate is carried out to the downstream machine.

  If 1 is set in the film status data of the film number n = 1 in the film management file F in the film defect determination process S1000, the laminated substrate 12 is discharged in the substrate discharge process S1100.

  In the substrate discharge processing S1100, the second substrate is not carried in, but the substrate 12 that has been laminated by the first substrate nip roller 16 and the second substrate nip roller 21 as shown in FIG. Then, the film disposal roller 20 is moved to the vicinity of the film nip roller 17 by the conveyor 27, the film is nipped, and the film tension is maintained. Even during transport to the substrate separation position, the monitoring device 5 detects and monitors the film surface state. Then, the film 2 having a length corresponding to one substrate including the defective portion moves from the exit side of the laminating roller 9 to the substrate separating device 18 to prepare for disposal.

  The film separation device 18 is separated from the film 2 and the laminated substrate 12, and the laminated substrate is discharged.

  If the laminated substrate is discharged in the substrate discharge or the second and subsequent substrate separation processing S1400 in this case, the remaining number of the substrates input in the teaching processing S100 is reduced by one for each discharge.

  In the substrate discharge state, there is no substrate 12 between the exit side of the laminating roller 9 and the substrate separating device 18, so the process returns to the film state confirmation processing S300 and the above processing is repeated.

  After separating the substrates in the second and subsequent substrate separation processing S1400, a continuous laminate judgment processing S1500 is executed, and it is determined whether there is a subsequent substrate by checking the remaining number of substrates inputted in the teaching processing S100. Then, the process returns to the film state confirmation process S900 and the above process is repeated until the remaining number of sheets becomes zero.

  As described above, according to the present embodiment, if there is a defective portion in the film 2, the film 2 in the region to be attached to the substrate including the defective portion is discarded as a defective portion region before being attached to the substrate 12. It is possible to avoid handling a defective substrate by attaching a film including a defective portion to a normal substrate 12, and to reduce the production cost.

  Since the monitoring device 5 is upstream of the inter-substrate processing apparatus, the monitoring result of the film surface state does not depend on the inter-substrate processing.

  In the film surface state monitoring by the monitoring device 5, when the defective part exists in the inter-substrate part (the part of the teach data D2 amount) described in FIG. 4, the inter-substrate part is the film management file F in FIG. Therefore, the film state column is set to 0 so that no record is left. By doing so, the consumption of the film 2 can also be reduced.

  The substrate separating apparatus 18 in FIG. 1 is arranged at a position where separation of laminated substrates and cutting of a film including a defective portion are possible, and the structure is simplified, but the film cutting including the defective portion is performed. If a dedicated cutter is provided in the vicinity of the downstream side of the film nip roller 17 or the like, the amount of defective parts that can be discarded can be reduced to the length of removal of defective parts from one substrate shown in FIG.

  In the embodiment of FIG. 1, the monitoring device 5 monitors the film itself fed out from the film supply roll 1, but an operator inspects the film in advance and detects a defective part display mark or the like. It may be a thing. In the embodiment of FIG. 1, a film is laminated on the upper surface of the substrate, but there are film supply rolls, a monitoring device, an inter-substrate processing device, etc. symmetrically with respect to the conveyance path, and there is a film on the lower surface of the substrate. May be laminated.

  Although the example of removing the resist film has been described as the inter-substrate processing apparatus, even if the tape is applied in the width direction on the resist film in the inter-substrate portion so that the resist film does not contact the front and rear end portions of the substrate. Good.

It is the schematic which shows the lamination apparatus which becomes one Embodiment of this invention. It is a figure which shows the structure of the film used with the laminating apparatus shown in FIG. It is a figure which shows the flow program of the film lamination performed with the control apparatus of the lamination apparatus shown in FIG. It is a figure explaining the data input by the teaching process in the flow program of FIG. It is a figure explaining the film management file created with a control apparatus based on the detection result obtained with the monitoring apparatus in the laminating apparatus of FIG. It is the schematic which shows the driving | running preparation status of the lamination apparatus of FIG. It is the schematic which shows the stay state of the 1st board | substrate laminated | stacked with the laminating apparatus of FIG. It is the schematic which shows the state laminated | stacked also on the 2nd board | substrate after the 1st board | substrate laminated | stacked with the laminating apparatus of FIG. It is the schematic which shows the condition which discards a film, when a defective part exists in the film after laminating | stacking on the 1st board | substrate with the laminating apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Film supply roll, 2 ... Film, 2a ... Base film, 2b ... Resist film, 2c ... Cover film, 3,24 ... Winding roll, 5 ... Monitoring apparatus, 6 ... Control apparatus, 6a ... Operation panel, 7 ... the substrate between the processing unit, 9 ... laminating roller, 9a ... backup roller, 12 ... substrate, 16 ... first substrate nip roller, 17 ... film nip roller, 18 ... substrate separator, 2 0 ... film waste roller, 2 1 ... second substrate Nip roller, 22 ... discharge device.

Claims (6)

In a method of pasting a film on the surface of each substrate by passing between each substrate transported on the transport path at a fixed interval and a film fed from a film supply roll between laminating rollers installed on the transport path. The film condition is monitored before film lamination to the substrate to determine whether or not the film contains a defective portion, and the determination result indicates that the defective portion is present in the stored film management file. When the film laminating method in which the region including the defective portion of the film is discarded and the good region is attached to the substrate,
When indicating that there is a previous SL defective portion, the feed a film comprising a failed portion in a state where avoid contact with the film lamination roller is retracted, by winding the winding roll the film A film laminating method comprising: performing a film discard process in an area including the defective portion, and then returning to a confirmation process of a film state to be attached next to proceed to the film defect determination. In a method of pasting a film on the surface of each substrate by passing between each substrate transported on the transport path at a fixed interval and a film fed from a film supply roll between laminating rollers installed on the transport path. The film condition is monitored before film lamination to the substrate to determine whether or not the film contains a defective portion, and the determination result indicates that the defective portion is present in the stored film management file. When the film laminating method in which the region including the defective portion of the film is discarded and the good region is attached to the substrate,
When there is a laminated substrate with the film attached in the conveyance path, and when the defective portion is present on the film to be attached next, the laminated substrate is discharged and the lamination roller The film including the defective portion is sent in a state in which the film is retracted and contact with the film is avoided, and the film is disposed on the take-up roll to dispose of the film in the region including the defective portion, and then pasted. The film laminating method characterized by returning to the film state confirmation process for the film to be attached and proceeding to the film defect determination. According to claim 1 or 2, film laminate method characterized by loading the substrate into the transport path when made determines that there is no defective portion performs film defect determination after the previous SL film disposal.   3. The film laminating method according to claim 1, wherein the film has a multilayer structure including a resist film and a base film that supports the resist film. A device that attaches a film on the surface of each substrate by passing each substrate transported on the transport path at a fixed interval and a film fed from a film supply roll between laminating rollers installed on the transport path. There,
Stores the monitoring means for monitoring the state of the film before laminating the film on the substrate, the judging means for judging whether or not the film contains a defective portion from the detection result obtained by the monitoring means, and the judgment result by the judging means is stored. When the film management file indicates that the defective portion is present, the film laminating apparatus having means for discarding the region including the defective portion of the film and attaching the good region to the substrate,
It is sometimes indicate that there is a pre-Symbol defective portion and the contact avoidance means with the film forming conditions to avoid contact with the film is retracted the lamination roller, the defective portion in a state of avoiding the contact Conveying means for conveying the film to a take-up roller that winds up the film in the area including the film, and determination means for performing a confirmation process of a film state to be attached next after the film discarding process in the area including the defective portion by the take-up roller. And a means for proceeding to the failure determination by the film laminating apparatus. A device that attaches a film on the surface of each substrate by passing each substrate transported on the transport path at a fixed interval and a film fed from a film supply roll between laminating rollers installed on the transport path. There,
The monitoring means for monitoring the state of the film before film lamination to the substrate, the judgment means for judging whether or not the film contains a defective portion from the detection result obtained by the monitoring means, and the judgment result by the judgment means are stored. In the film laminating apparatus having the means for discarding the area including the defective part of the film and pasting the good area on the substrate when the defective part is indicated in the film management file ,
In the presence of lamination already substrate on which the film is stuck on the conveying path, and means for discharging the laminate pre substrate at showing that the next paste the film is pre-Symbol defective portion attached to, a region including a contact avoiding means with the film forming conditions to avoid contact with the film is retracted and at the laminating roller have shown that there is a defective portion, the defective portion in a state of avoiding the contact A conveyance means for conveying the film to a take-up roller for winding the film, and a defect by the determination means for performing a confirmation process of a film state to be applied next after the film discarding process of the area including the defective portion by the take-up roller. And a means for proceeding to the determination.

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