JPH10146557A - Substrate-holding system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To hold a substrate which is rotated at high speed without occurring breakage in the substrate or a spin base. SOLUTION: A substrate holding part 10 is attached on a spin base 4 capable of taking a turn around a vertical axis J1. Movable holding parts 10 are provided with rotary members 11 set on the spin base 4 rotatably around vertical axes J2, swinging members 12, holding arms 13, and holding parts 14 attached on the holding arms 13, wherein the swinging members 12 are extended toward a side way inserting and facing the rotary members 11, set swingably on the rotary members 11, having rotary axis centers J2 of the rotary members 11 as swinging fulcrums. When the swinging members 12 are urged for swinging to the direction that the points of swinging actin of the swinging members 12 are separated from the rotation center J1 of the spin base 4, a substrate W is held by the holding parts 14. When the swinging members 12 are swung so that the point of swinging actin is returned to the side of the rotation center J1, the holding of the substrate is released.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a resist coating process and a developing process in which substrates such as a semiconductor wafer, a glass substrate for a liquid crystal display, a glass substrate for a photomask, and a substrate for an optical disk are rotated about a vertical axis. The present invention relates to a substrate holding mechanism provided in a rotary substrate processing apparatus that performs an appropriate process such as a cleaning process.

[0002]

2. Description of the Related Art As a conventional substrate holding mechanism of a rotary type substrate processing apparatus of this kind, there is, for example, one shown in FIGS. FIG. 13 is a plan view showing a configuration of a conventional substrate holding mechanism provided in a rotary substrate processing apparatus. FIG. 14A is a plan view of a main part showing a state where a substrate is held.
FIG. 14B is a main part plan view showing a state where the holding of the substrate is released.

[0003] A spin base 100 is provided at the upper end of a rotating shaft (not shown) that stands upright so as to be rotatable about a vertical axis J1, and the spin base 100 is configured to be rotatable about the axis J1. The spin base 100 includes three or more arm portions 101 provided radially.
The substrate holding unit 200 is provided at the tip of the device 01. In the figure, all the substrate holding units 200 are configured as movable holding units.

[0004] The substrate holding section 200 includes a holding member 201 and a swing member 202. The holding member 201 is provided in a notch shape with a columnar substrate mounting portion 203 provided on the arm portion 101 so as to be rotatable around a vertical axis J2, and a stepped upper surface of the substrate mounting portion 203. The holding part 204 is formed integrally. The swing member 202 includes the holding member 2
01, and is provided on the substrate mounting portion 203 so as to be swingable about the axis J2 of the substrate mounting portion 203 as a fulcrum. A link member 205 is provided at the tip end side of the swinging member 202.
Of the swing member 202 and the link member 205 is connected to the swing member 20 in a pivotable manner.
2 are the points for the swing operation. The base end of each link member 205 is rotatably connected to the upper end of the drive shaft 210.

A rotating shaft for rotating the spin base 100 around the axis J1 is formed in a cylindrical shape, and a driving shaft 210 is penetrated through a hollow portion of the rotating shaft so as to be rotatable relative to the rotating shaft around the axis J1. The urging means (not shown) is provided so as to rotationally urge the drive shaft 210 clockwise (around the solid arrow in FIG. 13) with respect to the rotation shaft with the axis J1 as the rotation center axis. By the urging of the urging means, the rocking member 202 is rocked and biased via the link member 205 in a direction in which the rocking operation point of the rocking member 202 moves away from the rotation center (J1) of the spin base 100. As a result, the holding member 201 is urged to rotate counterclockwise about the axis J2 as the rotation center axis, and as shown in FIG. 13 and FIG.
04 presses and urges the outer peripheral edge of the substrate W to hold the substrate W.

[0006] On the other hand, a releasing means (not shown) counterclockwise rotates the driving shaft 210 with respect to the rotating shaft and the axis J1 as a rotation center axis (around the arrow indicated by the two-dot chain line in FIG. 13) against the urging means. It is provided so as to be rotated. Due to the rotation of the drive shaft 210 by the releasing means, the swinging point of the swinging member 202 is set via the link member 205 to the spin base 10.
The swing member 202 is swung in a direction in which the swing member 202 is pulled back to the rotation center (J1) side of the shaft 0, and the holding member 201 is moved along the axis J.
14 is rotated clockwise around the rotation center axis 2 as shown in FIG.
As shown in (b), the holding unit 204 is separated from the outer peripheral edge of the substrate W, and the holding of the substrate W is released.

By rotating the spin base 100 about the axis J1 while holding the substrate W as described above, the held substrate W is rotated about the axis J1, and an appropriate Processing is performed.

[0008]

However, the prior art having such a structure has the following problems. When the substrate W is rotated around the axis J1 by holding the substrate W by the conventional substrate holding mechanism, the swinging operation point of the swinging member 202 due to centrifugal force (the connecting portion between the swinging member 202 and the link member 205) In addition, the force acting in the direction of arrow F in FIG. 13 acts, and the swing member 202 is swung in a direction further away from the rotation center (J1) of the spin base 100 than when the rotation is stopped, and is held as compared with when the rotation is stopped. The part 204 presses the outer peripheral edge of the substrate W more strongly.

If the pressing force of the holding section 204 becomes too strong, the substrate W held above the buckling load of the substrate W itself will be damaged. Further, when the spin base 100 and the holding member 200 are made of a chemical resistant material such as silicon carbide (SiC), the bending strength of the silicon carbide is low.
1) is damaged or the holding member 200 is broken from the root.

The pressing force of the holding section 204 increases as the number of rotations of the substrate W and the spin base 100 increases.
In order to prevent the substrate W, the spin base 100 and the holding member 200 from being damaged, the structure of the conventional example
Cannot be increased to a certain value or more, the number of rotations of the substrate W is limited, and it is not possible to rotate the substrate W at a speed higher than the limited number of rotations for processing.

Further, as the size of the substrate W increases, the force acting on the swinging point of the swinging member 202, that is, the force acting on the connecting portion between the swinging member 202 and the link member 205, increases due to the centrifugal force. Substrate W and spin base 10
0, the number of rotations of the substrate W, which is a limit for preventing the holding member 200 from being damaged, becomes lower, and as the substrate W becomes larger, it is difficult to perform the processing by rotating the substrate W at a high speed. Was.

The present invention has been made in view of such circumstances, and a substrate holding mechanism capable of rotating a substrate at a high speed without causing damage to the substrate or a spin base regardless of the size of the substrate. The purpose is to provide.

[0013]

The present invention has the following configuration in order to achieve the above object. That is, the invention according to claim 1 is a substrate holding mechanism for holding a substrate, comprising a spin base rotatable around a vertical axis, and three or more spin holders for holding the outer peripheral end of the substrate at three or more places. A substrate holding unit in which at least one of the three or more is a movable holding unit; first displacement means for displacing the movable holding unit to a side for holding the substrate; and a side for releasing the holding of the substrate. A second displacement unit for displacing the movable holding unit; and a connecting unit for connecting the movable holding unit to the first displacement unit and the second displacement unit. A rotating member provided on the spin base and rotatable about a vertical axis; and a rotating member extending to the side of the rotating member and swingably pivotable about a rotating shaft center of the rotating member. A swing provided on the member and connected to the connecting means. A member, extending to the side opposite to the swing member with the rotating member interposed therebetween, and provided on the rotating member so as to be swingable around a rotation axis of the rotating member as a fulcrum; And a holding member having a holding surface in contact with an outer peripheral end of the substrate.

According to a second aspect of the present invention, in a substrate holding mechanism for holding a substrate, three spin bases rotatable around a vertical axis and three spin holders for holding an outer peripheral end of the substrate at three or more locations are provided. A substrate holding unit in which at least one of the three or more is a movable holding unit, first displacement means for displacing the movable holding unit to a side for holding the substrate, and holding of the substrate. A second displacement unit for displacing the movable holding unit to a side to be released; and a connecting unit for connecting the movable holding unit to the first displacement unit and the second displacement unit; A pivot member provided on the spin base and rotatable about a vertical axis, and extending to the side of the pivot member, pivoting about a pivot axis of the pivot member as a pivot point. Is provided on the rotating member so as to be connected to the connecting means. The oscillating member and the rotation member are rotatably provided on the rotation member with the rotation axis of the rotation member serving as a rotation fulcrum, and the substrate can be held and released in accordance with forward and reverse rotation of the rotation member. Wherein the holding member holds the substrate, and the swing operation point of the swing member and the swing fulcrum are the radius of an imaginary circle centered on the rotation center of the spin base. It is characterized in that it is arranged so as to be aligned on a straight line along the direction.

According to a third aspect of the present invention, in the substrate holding mechanism for holding a substrate, three spin bases rotatable around a vertical axis and three spin holders for holding the outer peripheral end of the substrate at three or more locations are provided. A substrate holding unit in which at least one of the three or more is a movable holding unit, first displacement means for displacing the movable holding unit to a side for holding the substrate, and holding of the substrate. A second displacement unit for displacing the movable holding unit to a side to be released; and a connecting unit for connecting the movable holding unit to the first displacement unit and the second displacement unit; A rotating member provided on the spin base and rotatable about a vertical axis, and extending to both sides with the rotating member interposed therebetween, one side serving as a swing operation point and a counterweight provided on the other side. Having the rotation of the rotation member A swing member that is swingably provided about a core as a fulcrum, and is provided on the swing member so as to be swingable about a swing axis of the swing member, the swing member being connected to the connecting means; And a holding member capable of holding and releasing the substrate according to the forward / reverse rotation of the rotating member.

The invention described in claim 4 is the first invention.
4. The substrate holding mechanism according to claim 3, wherein the connection unit is provided along the spin base, and is provided on the link member and a link member connected to a swing member. A drive shaft inserted through the rotation shaft of the base; and a rotation member provided on the drive shaft, wherein the first displacement unit moves the rotation member in one direction so that the substrate is held by the holding member. , And the second displacement means rotates the rotating member in the other direction so as to release the holding of the substrate by the holding member.

The invention described in claim 5 is the same as the invention in claim 4.
In the substrate holding mechanism described in the above, the first displacement means,
A spring mechanism is provided, and the second displacement means is provided with an air cylinder.

[0018]

The operation of the first aspect of the invention is as follows. When the swinging member of the movable holding unit is swung in one direction by the first displacement unit via the connecting unit, the holding member extended to the side opposite to the swinging member across the rotating member. Swings about the rotation axis of the rotation member as a fulcrum, and the holding surface of the holding member contacts the outer peripheral end of the substrate to hold the substrate. When the spin base is rotated around the vertical axis while the substrate is held by the substrate holding portion, a force is exerted to displace the swinging member away from the center of rotation of the spin base due to centrifugal force, and the holding member is also moved. Also, a force acting in a direction away from the rotation center of the spin base acts. Therefore, the force acting on the swing member and the force acting on the holding member cancel each other, and the rotating member hardly rotates. Accordingly, the force with which the holding surface of the holding member abuts on the outer peripheral edge of the substrate is substantially the same as when the spin base is stopped, and holds the substrate with a force corresponding to the displacement force of the first displacement means. . When the rotation of the spin base is stopped and the swinging member is swung in the other direction by the second displacement means, the holding member swings around the rotation axis of the rotation member as a fulcrum, thereby holding the holding member. The surface is separated from the outer peripheral edge of the substrate, and the holding of the substrate is released.

The operation of the invention described in claim 2 is as follows. When the swinging member of the movable holding portion is swung in one direction by the first displacement means via the connecting means, the holding member rotatably provided on the rotating member with the rotating shaft center of the rotating member as a rotation fulcrum. A member holds the substrate according to the forward rotation of the rotating member. At this time, the swing operation point of the swing member and the swing fulcrum are aligned on a straight line along the radial direction of the virtual circle centered on the rotation center of the spin base. When the spin base is rotated about a vertical axis while the substrate is held by the substrate holding unit, the swinging point of the swinging member and the swinging fulcrum are aligned. The force acting on the pivot point of the member acts in the direction of the pivot point, the pivot member is not pivoted, and the rotating member and the holding member do not rotate. Thus, the force of the holding member for holding the substrate is substantially the same as when the spin base is stopped, and the substrate is held with a force corresponding to the displacement force of the first displacement means. Then, when the rotation of the spin base is stopped, the swing member is swung in the other direction by the second displacement means, and the holding member is caused to rotate around the rotation axis of the rotation member in accordance with the reverse rotation of the rotation member. It rotates, and the holding of the substrate by the holding member is released.

The operation of the invention described in claim 3 is as follows. When the swinging member of the movable holding unit is swung in one direction by the first displacement means via the connecting means, the holding member rotatably provided on the turning member with the turning axis of the turning member as a fulcrum. Holds the substrate in accordance with the forward rotation of the rotating member.
When the spin base is rotated around a vertical axis while the substrate is held by the substrate holding unit, a force acts by the centrifugal force to displace the swinging point of the swing member in a direction away from the rotation center of the spin base. However, since the swing member has a counterweight on the side opposite to the swing operation point, the swing member does not swing. Thus, the force of the holding member for holding the substrate is substantially the same as when the spin base is stopped, and the substrate is held with a force corresponding to the displacement force of the first displacement means. Then, when the rotation of the spin base is stopped, the swinging member is swung in the other direction by the second displacement means, and the holding member rotates around the rotation axis of the rotation member in accordance with the reverse rotation of the rotation member. And
The holding of the substrate by the holding member is released.

The operation of the invention described in claim 4 is as follows. The displacement force by the first displacement means and the second displacement means rotates the rotating member in one direction or the other direction, and is transmitted to the swinging member via the driving shaft and the link member inserted through the rotating shaft of the spin base. .

The operation of the invention described in claim 5 is as follows. The displacement of the movable holding unit to the side for holding the substrate is performed by a spring mechanism, and the displacement of the movable holding unit to the side for releasing the holding of the substrate is performed by an air cylinder.

[0023]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a first embodiment of the present invention. FIG. 1A shows a state where a substrate is held, and FIG. (b) shows a state where the holding of the substrate is released. FIG. 2 is a perspective view illustrating a configuration of the movable holding unit, and FIG. 3 is a diagram illustrating an exemplary configuration of the first displacement unit and the second displacement unit.

The cylindrical rotary shaft 1 is operatively connected to a motor 3 by a belt transmission mechanism 2 or the like, and is erected so as to be rotatable about a vertical axis J1. A spin base 4 is provided at an upper end of the rotating shaft 1, and the spin base 4 is configured to be rotatable around an axis J1. Spin base 4 is 3
More than one arm 5 is provided radially, and a substrate holding unit 10 is provided at the tip of each arm 5. In the figure, all the substrate holding units 10 are configured as movable holding units.

The substrate holding unit 10 includes a rotating member 11, a swinging member 12, a holding arm 13 as a holding member, and a holding unit 14.
It has.

The rotating member 11 is provided on the arm 5 of the spin base 4 so as to be rotatable around a vertical axis J2. In this embodiment, the rotating member 11 is also used as a substrate mounting portion, and the lower surface of the outer peripheral end of the substrate W to be held is attached to the rotating member 1.
1 on the upper surface.

The swing member 12 extends to the side of the swing member 11, and is swingably provided on the swing member 11 with the swing axis J2 of the swing member 11 as a swing fulcrum. A distal end side of a link member 16 is rotatably connected to a distal end side of the swing member.
Is a point for the rocking operation of the rocking member 12.

The holding arm 13 extends to the side opposite to the swinging operation point of the swinging member 12 (the connecting portion between the swinging member 12 and the link member 16) with the rotating member 11 interposed therebetween. The pivot member 11 is pivotally provided on the pivot member 11 with the pivot axis J2 of the moving member 11 as a pivot point. The swinging member 12 and the holding arm 13 may be formed as separate members as shown in FIG. 2A, or may be formed as an integral member 15 as shown in FIG. You may.

The holding portion 14 is provided on the upper surface of the holding arm 13 on the distal end side, and the holding surface 1 is in contact with the outer peripheral edge of the substrate W.
4a.

The first displacement means and the second displacement means are, for example, as shown in FIG.
It is configured as follows. In the hollow part of the rotating shaft 1, the shaft J
A drive shaft 20 is inserted so as to rotate relative to the rotation shaft 1 around one rotation. The rotating shaft 1 is provided with a flange portion 21, and the driving shaft 20 is also provided with a flange portion 22 as a rotating member so as to face the flange portion 21. A pin 23 is provided on the flange portion 21 toward the flange portion 22.
4 are provided. The first between these pins 23 and 24 is
A coil spring 25 as a displacement means is bridged, and the drive shaft 20 is urged to rotate clockwise with respect to the rotation shaft 1 about the shaft J1 as a rotation center axis.

A stopper 26 is provided to stop the clockwise rotation of the drive shaft 20 with respect to the rotary shaft 1 by the coil spring 25 at an appropriate position. The position at which the rotation of the drive shaft 20 is stopped by the stopper 26 is determined by the coil spring 25 so that the holding portion 14
The holding portion 14 is slightly more than the position of the holding portion 14 when the outer peripheral edge of the spin base 4 is pressed and urged.
1) It is set to the position pulled back to the side. Thereby, as described later, the holding portion 1 is held by the coil spring 25.
When the substrate 4 is pulled back to the rotation center (J1) side of the spin base 4, the holding portion 14 urges the outer peripheral edge of the substrate W when the substrate W is present, and the stopper 2 when the substrate W is absent.
6, the holding unit 14 is stopped at an appropriate position.

An air cylinder 27 as a second displacement means is provided in the vicinity of the flange portion 22, and a member 28 provided on the flange portion 22 by extending a rod 27a of the air cylinder 27 is shown in FIG. ) Is displaced as indicated by the two-dot chain line, so that the rotating shaft 1 is opposed to the coil spring 25.
In contrast, the drive shaft 20 is configured to rotate counterclockwise in the figure with the axis J1 as the rotation center axis.

A base end of the link member 16 is rotatably connected to the upper end of the drive shaft 20.
, The swinging bias of the swinging member 12 by the coil spring 25 and the release thereof by the air cylinder 27 are performed.

When the rod 27a of the air cylinder 27 is extended, the drive shaft 20 is rotated counterclockwise with respect to the rotary shaft 1 around the axis J1 as a rotation center axis. As shown by a two-dot chain line in FIG. 1B, the swing operation point of the swing member 12 (the connecting portion between the swing member 12 and the link member 16) is connected to the spin base 4 via the link member 16.
Swing member 1 in the direction of being pulled back to the rotation center (J1) side of
2 is rocked. As a result, the pivot member 11 extends to the side opposite to the pivot point for the pivot member 11 with the pivot member 11 therebetween, and pivots about the pivot axis J2 of the pivot member 11 as the pivot point. The holding arm 13 provided on the moving member 11 is swung in a direction away from the rotation center (J1) of the spin base 4, and the holding surface 14a of the holding unit 14 provided on the holding arm 13 is moved from the outer peripheral edge of the substrate W. The holding of the substrate W is released.

As described above, the air cylinder 27
The holding of the substrate W is released by extending the rod 27a of
When the rod 27a of the air cylinder 27 is contracted in a state where the lower surface of the outer peripheral end of the substrate W is placed on the upper surface of the rotating member 11, the driving shaft 20 is moved relative to the rotating shaft 1 by the restoring force of the coil spring 25. Rotating clockwise around the axis J1 as the rotation center axis, the point for the rocking operation of the rocking member 12 is linked via the link member 16 to the spin base 4 as shown by the solid line in FIG. The swinging member 12 is urged to swing away from the rotation center (J1) of the swinging member. As a result, the pivot member 11 extends to the side opposite to the pivot point for the pivot member 11 with the pivot member 11 therebetween, and pivots about the pivot axis J2 of the pivot member 11 as the pivot point. The holding arm 13 provided on the moving member 11 is oscillated in the direction of being pulled back toward the rotation center (J1) of the spin base 4, and the holding surface 14a of the holding portion 14 urges the outer peripheral edge of the substrate W. Thus, the substrate W is held.

When the motor 3 rotates the rotating shaft 1 about the axis J1 while the substrate W is held, the held substrate W is rotated about the axis J1, and a predetermined Is performed.

When the substrate W is held and rotated about the axis J1, a centrifugal force causes the swinging member 12 to swing to the swinging point (the connecting portion between the swinging member 12 and the link member 16) as shown in FIG. A force acting in the direction of the arrow F1 acts, but at the same time, extends to the side opposite to the swinging operation point of the swinging member 12 with the rotating member 11 interposed therebetween. Arm 1 provided on pivoting member 11 so as to be pivotable with pivoting pivot
3 also exerts a force acting in the direction of arrow F2 in FIG. 1A due to the centrifugal force. Therefore, the force acting on the swing operation point of the swing member 12 is canceled by the force acting on the holding arm 13, and the swing is performed. The member 12 and the holding arm 13 do not swing from the state at the time of the rotation stop, and the rotating member 11 does not rotate. Therefore, the substrate W
Is rotated around the axis J1, the force by which the holding surface 14a of the holding portion 14 provided on the holding arm 13 presses the outer peripheral edge of the substrate W is the same as when the rotation is stopped, and the size and the number of rotations of the substrate W Irrespective of, the holding surface 14a is always the coil spring 25
Urges the outer peripheral edge of the substrate W with a force corresponding to the urging force of the substrate W, and does not press the outer peripheral edge with a force greater than that. Therefore, regardless of the size of the substrate W, the substrate W and the spin base 4 (particularly, the arm portion 5) are not damaged, and the rotating member 11 is not broken from the base, and the substrate W can be moved at a high speed. Can be rotated.

The following modifications can be similarly applied to the devices of the second to fourth embodiments described later. In the above embodiment, all the substrate holding units 10 are configured as movable holding units. However, at least one substrate holding unit 10 may be configured as a movable holding unit, and the rest may be configured as fixed holding units. The substrate holding unit 10 is, for example, as shown in FIG.
As shown in (a) and (b), the substrate mounting portion 17 fixedly provided to the tip of the arm portion 5 of the spin base 4 and the upper surface of the substrate mounting portion 17 are provided with steps. Holder 18
It is composed of The substrate W is a rotating member 1 of the substrate holding unit 10.
1 and on the stepped portion of the upper surface of the substrate mounting portion 17 of the substrate holding portion 10, and when the holding portion 14 of the substrate holding portion 10 presses and urges the outer peripheral edge of the substrate W, the substrate W The other part of the outer peripheral edge is pressed by the holding part 18 to hold the substrate W.

As shown in FIGS. 4C and 4D,
The substrate holding unit 10 may be configured by the substrate mounting pins 19 and the holding unit 18.

In the above embodiment, three substrate holders 10 are provided. However, three or more substrate holders 10 may be provided, and one or more of the substrate holders 10 may be a movable holder.

In the above embodiment, the rotating member 11 is configured as a substrate mounting portion. However, as in FIGS. 4C and 4D, the substrate mounting pins 19 for mounting the lower surface of the substrate W are provided. May be separately provided so that the lower surface of the substrate W is mounted on the substrate mounting pins 19 without mounting the substrate W on the rotating member 11.

Although the spin base 4 of the above embodiment has the arm portions 5 provided radially, the spin base 4 may be formed in a disk shape as shown in FIG.

Next, the structure of the second embodiment of the present invention will be described with reference to FIGS. FIG. 6 is a plan view illustrating a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a second embodiment of the present invention, FIG. 7 is a diagram illustrating a configuration of a substrate holding unit, and FIG. 8B is a plan view of a main part showing a state where the substrate is held, and FIG. 8B is a plan view of a main part showing a state where the holding of the substrate is released.

The structure of the spin base 4 and the structure for rotating the spin base 4 around the axis J1 are the same as those of the first embodiment, and therefore, the detailed description thereof is omitted. Further, the configuration of the first displacement means, the second displacement means, and the like, that is, the drive shaft 2
0, flange portions 21, 22, pins 23, 24, coil spring 25, stopper 26, air cylinder 27, member 28
The configuration such as that described above is the same as that of the first embodiment (see FIG. 3), and thus the detailed description is omitted.

A substrate holding section 40 is provided at the tip of each arm section 5 of the spin base 4. In the figure, all the substrate holders 40 are configured as movable holders.

The substrate holding section 40 includes a rotating member 41, a swing member 42, and a holding section 43.

The rotating member 41 is provided on the arm 5 of the spin base 4 so as to be rotatable around the vertical axis J2. The holding portion 43 is provided on the upper surface of the rotating member 41 so as to form a stepped portion 41 a on the upper surface of the rotating member 41. Although the rotating member 41 and the holding portion 43 may be joined to separate members, they are formed as an integral member, for example, the holding portion 43 and the stepped portion 41a are formed by cutting out the upper part of a columnar member. May be. In this embodiment, the stepped portion 41 of the rotating member 41 is used.
a is used as a substrate mounting portion.

The swing member 42 extends to the side of the swing member 41 and is swingably provided on the swing member 41 with the swing axis J2 of the swing member 41 as a swing fulcrum.

A pin 42 a is provided at the tip end of the swing member 42, and the pin 42 a is locked and connected to the notch 51 at the tip end of the link member 50. In this embodiment, the pin 42a serves as a swing operation point of the swing member 42.

Each link member 50 is arranged in the radial direction of an imaginary circle centered on the rotation center (J1) of the spin base. In addition, the base end side of each link member 50 is a drive shaft 2.
The spin base 4 is fixedly connected to an upper end of the spin base 4 and is rotated coaxially with the rotation center axis J1 of the spin base 4.

Each link member 50 may be formed as a separate member as shown in FIG. 6A, or may be formed as a separate member as shown in FIG.
As shown in FIG.

Then, as will be described later, with the substrate W held, along the radial direction of the imaginary circle centered on the rotation center (J1) of the spin base 4, the swing fulcrum of the swing member 42 ( J2) and the swing operation point (pin 42a) are arranged in a straight line (see FIGS. 6 and 8A).

When the rod 27a of the air cylinder 27 is extended, the drive shaft 20 is rotated counterclockwise with respect to the rotation shaft 1 around the axis J1 as a rotation center axis. 4 is rotated counterclockwise about the rotation center (J1) as the rotation center axis. Accordingly, the swing member 42 swings in the opposite direction (clockwise) around the swing fulcrum (J2), and the rotating member 41 rotates in the opposite direction (clockwise) around the axis J2. By the rotation of the rotating member 41 in the reverse direction, the holding portion 43 is separated from the outer peripheral edge of the substrate W, and the holding of the substrate W is released, as shown in FIG.

Further, the holding of the substrate W is released by extending the rod 27a of the air cylinder 27, and the lower surface of the outer peripheral end of the substrate W is placed on the stepped portion 41a on the upper surface of the rotating member 41. When the rod 27a of the air cylinder 27 is contracted, the driving shaft 20 is urged to rotate clockwise about the rotation shaft 1 with the axis J1 as the rotation center axis by the restoring force of the coil spring 25. The member 50 is urged to rotate clockwise about the rotation center (J1) of the spin base 4 as the rotation center axis. Accordingly, the swing member 42 is urged to swing in the forward direction (counterclockwise) around the swing fulcrum (J2), and the rotating member 41 rotates in the forward direction (counterclockwise) around the axis J2. Be energized. As shown in FIGS. 6 and 8A, the holding portion 43 presses and urges the outer peripheral edge of the substrate W to hold the substrate W by the rotation of the rotating member 41 in the forward direction. . At this time, as shown in FIG. 6 and FIG.
The fulcrum (J2) of the oscillating member 42 along the radial direction of the virtual circle centered on the rotation center (J1) of the spin base 4
And the swing operation point (pin 42a) are aligned on a straight line.

When the motor 3 rotates the rotating shaft 1 about the axis J1 while the substrate W is held, the held substrate W is rotated about the axis J1, and a predetermined Is performed.

When the substrate W is held and rotated about the axis J1, a centrifugal force acts on the pivoting point (pin 42a) of the pivoting member 42. Are arranged in a straight line along the radial direction of the virtual circle centered on the rotation center (J1) of the spin base 4, so that the force acting on the swing operation point of the swing member 42 due to centrifugal force is Working in the direction of the fulcrum (J2), the swing member 42 does not swing, and the rotating member 41 does not rotate. Therefore, even when the substrate W is rotated around the axis J1, the force by which the holding unit 43 presses the outer peripheral edge of the substrate W is the same as when the rotation is stopped, and regardless of the size and the number of rotations of the substrate W, the holding unit 43 Always presses and urges the outer peripheral edge of the substrate W with a force corresponding to the urging force of the coil spring 25, and does not press with more force. Therefore, regardless of the size of the substrate W, the substrate W and the spin base 4 (particularly, the arm portion 5) are not damaged, and the rotating member 41 is not broken from the root, and the substrate W can be moved at a high speed. Can be rotated.

Next, the structure of a device according to a third embodiment of the present invention will be described with reference to FIGS. FIG. 9 shows a third embodiment of the present invention.
FIG. 10A is a plan view illustrating a configuration of a substrate holding mechanism of the rotary substrate processing apparatus according to the embodiment. FIG. 10A is a main part plan view illustrating a state where the substrate is held, and FIG. FIG. 6 is a plan view of a main part showing a state in which the holding of is released.

The structure of the spin base 4 and the structure for rotating the spin base 4 about the axis J1 are the same as those in the first embodiment, and therefore, the detailed description thereof is omitted. Further, the configuration of the first displacement means, the second displacement means, and the like, that is, the drive shaft 2
0, flange portions 21, 22, pins 23, 24, coil spring 25, stopper 26, air cylinder 27, member 28
The configuration such as that described above is the same as that of the first embodiment (see FIG. 3), and thus the detailed description is omitted.

A substrate holder 60 is provided at the tip of each arm 5 of the spin base 4. In the figure, all the substrate holders 60 are configured as movable holders.

The substrate holding section 60 includes a rotating member 61, a swinging member 62, a counterweight 63, and a holding section 64.

The rotating member 61 and the holding portion 64 have the same configuration as the rotating member 41 and the holding portion 43 of the above-described second embodiment, so that the detailed description is omitted.

The swinging member 62 extends to the left and right with the rotating member 61 interposed therebetween, and is provided on the rotating member 61 so as to be swingable about the rotation axis J2 of the rotating member 61 as a swing fulcrum. Have been. A link member 7 is provided on one side of the swing member 62.
The leading end side of the pivot member 0 is rotatably connected, and the connecting portion between the swing member 62 and the link member 70 is a swing operation point. A counter weight 63 is provided on the other side surface of the swing member 62 (the side surface opposite to the swing operation point of the swing member 62 with the swing member 61 interposed therebetween) connected to the swing member 61. ing.

Although the counterweight 63 is provided on the swinging member 62 in the drawing, the swinging member 62 is formed as in the first embodiment, and the holding arm 13 of the first embodiment is connected to the counterweight 63. A similar member may be provided on the rotating member 61, and the counterweight 63 may be provided on this member.

The base end side of each link member 70 is
0, and is rotatably connected to the upper end of the coil spring 25 via the link member 70 as in the first embodiment.
Of the air cylinder 27 and the release of the
It is configured to act on the rocking operation point of.

When the rod 27a of the air cylinder 27 is extended, the drive shaft 20 is rotated counterclockwise with respect to the rotary shaft 1 around the axis J1 as a rotation center axis. The rocking member 62 is rocked and turned in a direction in which the rocking operation point of the rocking member 62 (the connecting portion between the rocking member 62 and the link member 70) is pulled back toward the rotation center (J1) of the spin base 4. The member 61 is rotated in the opposite direction (clockwise) around the axis J2. By the rotation of the rotating member 61 in the reverse direction, the holding portion 64 is separated from the outer peripheral edge of the substrate W, and the holding of the substrate W is released, as shown in FIG.

As described above, the air cylinder 27
The holding of the substrate W is released by extending the rod 27a of
With the lower surface of the outer peripheral end of the substrate W placed on the stepped portion on the upper surface of the rotating member 61, the rod 2 of the air cylinder 27 is
When the coil spring 7a is contracted, the drive shaft 20 is rotated clockwise about the rotation shaft 1 with the axis J1 as the rotation center axis by the restoring force of the coil spring 25.
The pivoting point of the pivoting member 62 through the spin base 4
The swing member 62 is urged to swing away from the center of rotation (J1), and the rotating member 61 is rotated in the forward direction (counterclockwise) around the axis J2. By the rotation of the rotating member 61 in the forward direction, the holding portion 64 presses and biases the outer peripheral edge of the substrate W to hold the substrate W as shown in FIGS.

Then, while the substrate W is held, the motor 3 rotates the rotating shaft 1 about the axis J1, so that the held substrate W is rotated about the axis J1. Is performed.

When the substrate W is rotated around the axis J1 while holding the substrate W, the arrow F in FIG.
Although a force acting in the direction acts, the counterweight 63 is provided on the side opposite to the swinging point of the swinging member 62 with the counterweight 63 interposed therebetween. The point for the swing operation of the moving member 62 (the swing member 62 and the link member 7
The force F acting on the portion connected to 0) is the count weight 63
The swing member 62 does not swing displace from the state at the time of the rotation stop, and the rotating member 61 does not rotate. Therefore,
Even when the substrate W is rotated, the force with which the holding portion 64 provided on the rotating member 61 presses the outer peripheral edge of the substrate W is the same as when the rotation is stopped, and regardless of the size and the number of rotations of the substrate W, the holding force is maintained. The portion 64 always presses and urges the outer peripheral edge of the substrate W with a force corresponding to the urging force of the coil spring 25, and does not press with an excessive force. Therefore, regardless of the size of the substrate W,
The substrate W can be rotated at high speed without causing damage to the substrate W, the spin base 4 (particularly, the arm portion 5), and the like, and without causing the rotating member 61 to be broken from the root.

Next, the structure of a device according to a fourth embodiment of the present invention will be described with reference to FIGS. FIG. 11 is a view showing the configuration of the first displacement means and the second displacement means of the device of the fourth embodiment of the present invention, and FIG. 12 (a) is a plan view of a main part showing a state where the substrate is held, FIG. 12B is a main part plan view showing a state where the holding of the substrate is released.

In the third embodiment, the coil spring 25 is urged so that the swinging point of the swinging member 62 moves away from the center of rotation (J1) of the spin base 4. Then, the holding portion 64 presses and urges the outer peripheral edge of the substrate W, and the air cylinder 27 causes the swinging point of the swinging member 62 to rotate against the rotation of the spin base 4 against the biasing of the coil spring 25. Although the holding of the substrate W is released by swinging the swinging member 62 in the direction of being pulled back to the (J1) side, in the fourth embodiment, the swinging member 62 swings. The point is the center of rotation (J
1) When the coil spring 25 is urged to swing the swing member 62 in the direction of being pulled back to the side, the holding portion 64 presses and urges the outer peripheral edge of the substrate W. The holding of the substrate W is released by the swing member 62 being swung in a direction in which the swing operation point of the swing member 62 is away from the rotation center (J1) of the spin base 4 against the bias of 25. It is configured as follows.

More specifically, for example, as shown in FIG. 11, the mounting positions of the pins 23 and 24 provided on the flange portions 21 and 22 are reversed from those in FIG. 20 is the axis J with respect to the rotation axis 1.
1 is rotated counterclockwise about the rotation center axis, and accordingly, the swing operation point of the swing member 62 (the connecting portion between the swing member 62 and the link member 70) is rotated by the rotation center of the spin base 4. The swing member 62 is urged to swing in the direction of being pulled back to the (J1) side.

The holding portion 64 provided on the rotating member 61
Is shifted clockwise about the axis J2 as compared with the device of the third embodiment, as shown in FIG.
By the restoring force of the coil spring 25, the swing member 62 is urged to swing in a direction in which the swing operation point of the swing member 62 is pulled back to the rotation center (J1) side of the spin base 4, whereby the holding portion 64 is moved. The outer peripheral edge of the substrate W can be pressed and urged.

Also, by reversing the mounting position of the air cylinder 27 and the member 28 from the configuration shown in FIG. 3, if the rod 27 a of the air cylinder 27 is extended, the drive shaft 20 will resist the urging of the coil spring 25. With respect to the rotation shaft 1, the rotation member is rotated clockwise around the axis J1 as a rotation center axis, and accordingly, the swing operation point of the swing member 62 swings away from the rotation center (J1) of the spin base 4. The member 62 is swung, and the holding of the substrate W can be released (see FIG. 12B).

The forward direction (reverse direction) of the rotation of the rotating member 61 in the fourth embodiment is rotated clockwise (counterclockwise) about the axis J2, contrary to the third embodiment. Direction is set. The other configuration is the same as that of the third embodiment, and the detailed description is omitted.

When the substrate W is held and rotated around the axis J1 by the apparatus of the fourth embodiment, the swing member 62 is rotated by centrifugal force.
A force acts such that the rocking member 62 rocks in a direction in which the rocking operation point (the connecting portion between the rocking member 62 and the link member 70) moves away from the rotation center (J1) of the spin base 4. Since the swinging member 62 is in the direction opposite to the direction in which the swinging member 62 is urged by the coil spring 25, the pressing force for holding the substrate W by the holding portion 64 does not increase due to the centrifugal force.
Irrespective of the size and the number of rotations, the rotation member 61 does not damage the substrate W or the spin base 4 (particularly, the arm portion 5).
Is not broken from the root.

However, due to the centrifugal force, the swing member 6
By swinging in the direction opposite to the direction in which the substrate 2 is biased, the rotating member 61 is rotated in the direction opposite to the direction in which the substrate is released, and rotates the substrate W around the axis J1. Accordingly, the holding of the substrate W by the holding unit 64 is weakened, and when the substrate W is rotated at a high speed, the holding of the substrate W is released. However, in the device of the fourth embodiment, the counterweight 63 is provided by being connected to the pivoting member 61 on the side opposite to the pivoting point of the pivoting member 62 with the pivoting member 61 interposed therebetween. The force acting on the rocking operation point of the rocking member 62 due to the centrifugal force is canceled by the counterweight 63, so that the rocking member 62 does not rock and displace from the state when the rotation is stopped, and the rotating member 61 does not rotate. Therefore, the substrate W is
Even if it rotates one turn, the force with which the holding unit 64 presses the outer peripheral edge of the substrate W is the same as when the rotation is stopped, and the holding of the substrate W by the holding unit 64 is not weakened.

[0077]

As is apparent from the above description, according to the first aspect of the present invention, the holding surface that abuts on the outer peripheral end of the substrate is on the opposite side to the swing member with the rotating member interposed therebetween. Is provided on the holding member provided on the rotating member so as to be swingable with the rotation axis of the rotating member as a fulcrum, so that the substrate is held and rotated about the vertical axis. Sometimes, the force acting on the swinging point of the swinging member due to the centrifugal force is offset by the force acting on the holding member due to the centrifugal force, so that the holding surface contacts the outer peripheral end of the substrate regardless of the size and the number of rotations of the substrate. The contact force can always be constant. Therefore, regardless of the size of the substrate, the substrate can be rotated at high speed without damaging the substrate, the spin base, and the like.

According to the second aspect of the present invention, while the substrate is held, the swinging fulcrum of the swinging member and the swinging motion along the radial direction of the virtual circle centered on the rotation center of the spin base. Since the points of use are arranged in a straight line, when the substrate is held and rotated about a vertical axis, the centrifugal force acting on the point of the rocking motion of the rocking member acts in the direction of the rocking fulcrum, The member does not swing, and the rotating member rotated by the swing of the swing member does not rotate. Therefore, regardless of the size of the substrate and the number of rotations, the holding member provided on the rotating member can always maintain a constant force for holding the substrate, regardless of the size of the substrate without causing damage to the substrate or the spin base. The substrate can be rotated at high speed.

According to the third aspect of the present invention, the counterweight is provided on the side opposite to the swing operation point of the swing member with the counterweight interposed therebetween. When the substrate is held and rotated about a vertical axis, the force acting on the swinging point of the swinging member due to the centrifugal force is canceled by the counterweight, and the holding member is moved regardless of the size and the number of rotations of the substrate. Can be kept constant at all times.
Therefore, regardless of the size of the substrate, the substrate can be rotated at a high speed without causing damage to the substrate or the spin base, or without weakening the holding of the substrate.

According to the fourth aspect of the present invention, the displacement force generated by the first displacement means and the second displacement means rotates the rotating member, and causes the driving shaft and the link member inserted through the rotating shaft of the spin base to rotate. To the swinging member via
The displacement force by the displacement means and the second displacement means can be reliably transmitted to the holding member that holds the substrate.

According to the fifth aspect of the present invention, the displacement of the movable holding portion toward the side for holding the substrate is performed by the spring mechanism, and the displacement of the movable holding portion toward the side for releasing the holding of the substrate is performed by the air cylinder. Because of this, the holding and release of the substrate by the holding member can be performed by a simple drive system.

[Brief description of the drawings]

FIG. 1 is a plan view showing a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a first embodiment of the present invention, showing a state where a substrate is held and a state where the holding of a substrate is released. It is.

FIG. 2 is a perspective view illustrating a configuration of a movable holding unit of the first embodiment.

FIG. 3 is a diagram illustrating a configuration of an example of a first displacement unit and a second displacement unit.

FIG. 4 is a diagram illustrating a configuration of an example of a fixed holding unit.

FIG. 5 is a diagram showing a configuration of a modification in which the spin base is formed in a disk shape.

FIG. 6 is a plan view illustrating a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a second embodiment of the present invention.

FIG. 7 is a diagram illustrating a configuration of a substrate holding unit of the second embodiment apparatus.

FIG. 8 is a plan view of a main part showing a state where the substrate is held by the apparatus of the second embodiment and a state where the holding of the substrate is released.

FIG. 9 is a plan view illustrating a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a third embodiment of the present invention.

FIG. 10 is a plan view of a main part showing a state where the substrate is held by the apparatus of the third embodiment and a state where the holding of the substrate is released.

FIG. 11 is a diagram showing a configuration of a first displacement unit and a second displacement unit of the device according to the fourth embodiment of the present invention.

FIG. 12 is a main part plan view showing a state where the substrate is held by the apparatus of the fourth embodiment and a state where the holding of the substrate is released.

FIG. 13 is a plan view illustrating a configuration of a substrate holding mechanism of a rotary substrate processing apparatus according to a conventional example.

FIG. 14 is a main part plan view showing a state where the substrate is held by the conventional device and a state where the holding of the substrate is released.

[Explanation of symbols]

 4: spin base 10, 40, 60: substrate holding part 11, 41, 61: rotating member 12, 42, 62: swing member 13: holding arm 14, 43, 64: holding part 14a: holding surface of holding part 16, 50, 70: link member 20: drive shaft 25: coil spring 27: air cylinder 63: counterweight W: substrate J1: substrate rotation center axis J2: rotation member rotation center axis (swing member swing) fulcrum)

────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. ⁶ Identification code FI H01L 21/30 569C (72) Inventor Kunio Yamada 322 Hashizushi Furukawa-cho, Fushimi-ku, Kyoto-shi, Kyoto Japan Nippon Screen Manufacturing Co., Ltd. (72) Inventor Yoshihiro Koyama 322, Hazushi Furukawacho, Fushimi-ku, Kyoto, Japan Nippon Screen Manufacturing Co., Ltd. (72) Inventor Jun Watanabe 322 Hashizushi Furukawa-cho, Fushimi-ku, Kyoto, Kyoto Nippon Screen Manufacturing Co., Ltd. Rakusai Office

Claims (5)

[Claims] 1. A substrate holding mechanism for holding a substrate, comprising: a spin base rotatable around a vertical axis; and three or more spin holders for holding an outer peripheral end of the substrate at three or more positions. A substrate holding unit, at least one of which is a movable holding unit; first displacement means for displacing the movable holding unit to a side for holding the substrate; and a movable holding unit on the side for releasing the holding of the substrate. A second displacing means for displacing; and a connecting means for connecting the movable holding part to the first displacing means and the second displacing means, wherein the movable holding part is provided on the spin base, A turning member rotatable around a vertical axis, and extending to the side of the turning member, provided on the turning member so as to be swingable about a turning axis of the turning member as a fulcrum,
A swinging member connected to the connecting means, and extending to the side opposite to the swinging member with the rotating member interposed therebetween, and capable of swinging about a rotation axis of the rotating member as a fulcrum. A holding member provided on the rotating member and having a holding surface in contact with an outer peripheral end of the substrate. 2. A substrate holding mechanism for holding a substrate, comprising: a spin base rotatable around a vertical axis; and three or more spin holders for holding an outer peripheral end of the substrate at three or more positions. A substrate holding unit, at least one of which is a movable holding unit; first displacement means for displacing the movable holding unit to a side for holding the substrate; and a movable holding unit on the side for releasing the holding of the substrate. A second displacing means for displacing; and a connecting means for connecting the movable holding part to the first displacing means and the second displacing means, wherein the movable holding part is provided on the spin base, A rotating member rotatable around a vertical axis; a rotating member that extends to the side of the rotating member and is swingably provided on the rotating member with a rotating shaft center of the rotating member as a swing fulcrum. A swing member connected to the connecting means; A holding member rotatably provided on the turning member with the turning shaft center of the turning member as a rotation fulcrum, and capable of holding and releasing the substrate in accordance with forward and reverse rotation of the turning member. When the holding member holds the substrate, the swing operation point of the swing member and the swing fulcrum are aligned on a straight line along the radial direction of an imaginary circle centered on the rotation center of the spin base. A substrate holding mechanism configured as described above. 3. A substrate holding mechanism for holding a substrate, comprising: a spin base rotatable around a vertical axis; and three or more spin holders for holding an outer peripheral end of the substrate at three or more positions. A substrate holding unit, at least one of which is a movable holding unit; first displacement means for displacing the movable holding unit to a side for holding the substrate; and a movable holding unit on the side for releasing the holding of the substrate. A second displacing means for displacing; and a connecting means for connecting the movable holding part to the first displacing means and the second displacing means, wherein the movable holding part is provided on the spin base, A rotating member rotatable around a vertical axis, extending on both sides with the rotating member interposed therebetween, one side being a swing operation point and having a counter weight on the other side,
A swinging member provided on the rotating member so as to be swingable about a rotation axis of the rotation member as a fulcrum, and a swinging member connected to the connecting means; and a rotation about the rotation axis of the rotation member as a fulcrum. A holding member provided on the rotating member so as to be able to hold and release the substrate in accordance with forward and reverse rotation of the rotating member. 4. The substrate holding mechanism according to claim 1, wherein said connecting means is arranged along said spin base and connected to a swing member, said link member comprising: A drive shaft provided on the link member and inserted through the rotation shaft of the spin base; and a rotation member provided on the drive shaft, wherein the first displacement means causes the holding member to hold the substrate. Thus, the rotating member is rotated in one direction, and the second displacement means is configured to rotate the rotating member in another direction so as to release the holding of the substrate by the holding member. 5. The substrate holding mechanism according to claim 4, wherein said first displacement means comprises a spring mechanism, and said second displacement means comprises an air cylinder.