JPH10128602A - Coated cutting tool - Google Patents

Coated cutting tool

Info

Publication number
JPH10128602A
JPH10128602A JP28875496A JP28875496A JPH10128602A JP H10128602 A JPH10128602 A JP H10128602A JP 28875496 A JP28875496 A JP 28875496A JP 28875496 A JP28875496 A JP 28875496A JP H10128602 A JPH10128602 A JP H10128602A
Authority
JP
Japan
Prior art keywords
layer
tin
film
tialn
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28875496A
Other languages
Japanese (ja)
Inventor
Yukiyasu Aoyama
幸保 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP28875496A priority Critical patent/JPH10128602A/en
Publication of JPH10128602A publication Critical patent/JPH10128602A/en
Pending legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve wear resistance by forming a double compound solid solution layer composed of a nitride or an oxinitride of Ti and an oxide or an oxinitride of Al outside of a layer composed of TiN, Ti nitride of TiC or TiCN, carbide or carbonitride. SOLUTION: A multilayer hard film is formed as a base material of a cutting tool made of ceramics by CVD method. Film formation is TiN+TiAlN+(Ti, Al) (N, O)+TiN+TiAlN+(Ti, Al) (N, O)+TiC, that is, TiC film is formed on two layers of TiN+TiAlN+(Ti, Al) (N, O), to have a film thickness of about 3.5μm. TiAlN layer is interposed between both layers. Thus, the film formation condition of (Ti, Al) (N, O) is made favorable.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、フライス加工工具
等の切削工具であって窒化珪素質材料からなる切削工具
に関し、特に窒化珪素質の母材表面に、耐摩耗性の優れ
た硬質被覆膜を形成した被覆切削工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting tool, such as a milling tool, made of a silicon nitride material, and more particularly to a hard coating excellent in wear resistance on the surface of a silicon nitride base material. The present invention relates to a coated cutting tool having a film formed thereon.

【0002】[0002]

【従来の技術】切削工具には、サーメット工具や超硬工
具などのように耐摩耗性を向上させるため工具母材表面
にTi等の窒化物や炭化物よりなる硬質被覆膜を形成す
ることが行われているものがある。
2. Description of the Related Art A cutting tool, such as a cermet tool or a cemented carbide tool, has a hard coating film made of a nitride or carbide such as Ti on the surface of a tool base material for improving wear resistance. Something is going on.

【0003】その方法としては、CVD法(化学的蒸着
法)及びPVD法(物理的蒸着法)の他、イオンプレー
ティング法やスパッタリング法によりTiN,TiAl
N,,TiAlC,或いはTiAlCN等の被覆が行わ
れてきた。
[0003] As the method, in addition to the CVD method (chemical vapor deposition method) and the PVD method (physical vapor deposition method), TiN, TiAl is used by an ion plating method or a sputtering method.
Coatings such as N, TiAlC or TiAlCN have been performed.

【0004】特公平4−53642号は、このような被
覆切削工具に関連した発明で、WC基超硬合金またはT
iCN基サーメットで構成された基体部材の表面に、
(Ti,Al)C,(Ti,Al)N,および(Ti,
Al)CNのうちの1種の単層または2種以上の被覆か
らなる硬質被覆層をCVD法やPVD法などを用いて、
0.5〜10μm の平均層厚で蒸着してなる耐摩耗性の
すぐれた表面被覆工具を内容としたものであった。
Japanese Patent Publication No. 4-53642 discloses an invention related to such a coated cutting tool.
On the surface of the base member composed of iCN-based cermet,
(Ti, Al) C, (Ti, Al) N, and (Ti,
Al) A hard coating layer consisting of one single layer or two or more coatings of CN is formed by a CVD method, a PVD method, or the like.
The surface-coated tool had excellent wear resistance and was deposited with an average layer thickness of 0.5 to 10 μm.

【0005】ところで、切削工具として、セラミック工
具は、その優れた高温特性、化学的安定性により、一般
鋼、高硬度材の高速・高能率加工に優れた性能を発揮し
ている。特に、耐摩耗性、耐クレータ性にも優れている
ため超高速切削加工が可能であるとともに、被削材との
親和性が極めて低いため、長時間安定した仕上げ面が維
持されるという特徴をもっている。
As a cutting tool, a ceramic tool exhibits excellent performance in high-speed and high-efficiency machining of general steel and high-hardness materials due to its excellent high-temperature characteristics and chemical stability. In particular, it has excellent wear resistance and crater resistance, making it possible to perform ultra-high-speed cutting, and has a very low affinity with the work material, so it maintains a stable finished surface for a long time. I have.

【0006】その中でも、窒化珪素質セラミックは、強
靱であり、耐欠損性に優れるので、鋳鉄、耐熱合金など
の高速荒加工(V=250m/min〜)に用いられ、
湿式加工にも、乾式加工のどちらにも対応可能なもので
あった。
[0006] Among them, silicon nitride ceramics are tough and have excellent fracture resistance, so they are used for high-speed rough machining (V = 250 m / min or more) of cast iron, heat-resistant alloys, and the like.
Both wet processing and dry processing were possible.

【0007】このようなセラミック工具は、通常、硬質
皮膜を表面に形成することなく用いられている。
[0007] Such a ceramic tool is usually used without forming a hard coating on the surface.

【0008】[0008]

【発明が解決しようとする課題】しかしながら近年、切
削速度の一層の高速化が要望されており、切削条件がよ
り過酷化する傾向にある為、従来の切削工具よりもさら
に耐摩耗性を向上せしめた切削工具が望まれており、こ
れは窒化珪素質工具でも例外でなかった。。
However, in recent years, there has been a demand for higher cutting speeds, and cutting conditions tend to be more severe. Therefore, wear resistance has been further improved than conventional cutting tools. Cutting tools have been desired, and this is no exception for silicon nitride tools. .

【0009】[0009]

【課題を解決するための手段】そこで、本発明者は、上
述のような観点から、従来の被覆超硬合金の耐摩耗性を
向上させるべく鋭意検討を続けた結果、Ti,Alの複
合化合物固溶体層に変更を加え、耐摩耗性を顕著に向上
させることができることを見出した。すなわち、Ti,
Alの複合化合物固溶体層をTiの窒化物または酸窒化
物およびAlの酸化物または酸窒化物からなるものと
し、Al2 3 、Al2 3 N中にTi化合物を分散固
溶させたことによって、耐酸化性に加え、耐欠損性およ
び耐摩耗性が優れ、しかも、この複合化合物固溶体層を
母材表面に形成したTiN,TiC或いはTiCNのT
iの窒化物、炭化物又は炭窒化物からなる第1層よりも
外側に形成することによって耐摩耗性を顕著に向上す
る。
Accordingly, the present inventors have made intensive studies to improve the wear resistance of the conventional coated cemented carbide from the above-mentioned viewpoints. It has been found that by changing the solid solution layer, the wear resistance can be significantly improved. That is, Ti,
The composite compound solid solution layer of Al is made of a nitride or oxynitride of Ti and an oxide or oxynitride of Al, and a Ti compound is dispersed and dissolved in Al 2 O 3 or Al 2 O 3 N. Thus, in addition to oxidation resistance, excellent fracture resistance and abrasion resistance are obtained, and the TN, TiC or TiCN of TiN having this composite compound solid solution layer formed on the base metal surface
By forming the i layer outside the first layer made of nitride, carbide or carbonitride, the wear resistance is remarkably improved.

【0010】そして、このような構成に加え、上記T
i,Alの複合化合物固溶体層と第1層の間にアルミニ
ウム化合物を介在させることにより、この効果をさらに
助長することができ、アルミミウム化合物としては、特
に酸化アルミニウムが耐摩耗性の向上に有効である。
[0010] In addition to such a configuration, the above T
By interposing an aluminum compound between the i and Al composite compound solid solution layer and the first layer, this effect can be further promoted. As an aluminum compound, aluminum oxide is particularly effective for improving wear resistance. is there.

【0011】この発明は、上記研究結果にもとづいてな
われたものであって、窒化珪素質母材表面に、Tiの窒
化物、炭化物又は炭窒化物からなる第1層、アルミニウ
ム化合物からなる第2層、Tiの窒化物または酸窒化物
とAlの酸化物または酸窒化物の複合化合物固溶体層
〔以下、(Ti,Al)(N,O)層という〕の第3層
を順次配した硬質被覆膜を備えてなる被覆切削工具に特
徴を有するものである。
The present invention has been made on the basis of the above research results, and includes a first layer made of a nitride, carbide or carbonitride of Ti and a first layer made of an aluminum compound on a surface of a silicon nitride base material. A hard layer in which two layers, a third layer of a compound nitride solid solution layer of Ti nitride or oxynitride and Al oxide or oxynitride [hereinafter referred to as (Ti, Al) (N, O) layer] The present invention is characterized by a coated cutting tool provided with a coating film.

【0012】また、このような上記(Ti,Al)
(N,O)層において、母材表面側にTiを多く存在せ
しめ、外側に離れていくほどTiが減少し、最外部分で
はAlが主となるような構成とすることにより、複合化
合物固溶体層とその下のTi化合物層との密着性を高め
ることができ、結果として耐欠損性を高めることができ
る。
In addition, the above (Ti, Al)
In the (N, O) layer, a large amount of Ti is present on the surface side of the base material, and the amount of Ti decreases toward the outside, and Al is mainly used in the outermost portion. The adhesion between the layer and the underlying Ti compound layer can be increased, and as a result, the fracture resistance can be increased.

【0013】なお、上記硬質被覆膜としては、前記第1
層〜第3層を同じ順で2回以上積層するのが、一回積層
のものよりも耐摩耗性が高い傾向がある。
It is to be noted that the hard coating film includes the first
Laminating the layer to the third layer two or more times in the same order tends to have higher abrasion resistance than a single layer.

【0014】また、硬質被覆膜の厚みとしては3.0〜
6.0μm の範囲であることが好ましい。すなわち、上
記厚みが3.0μm 未満では耐摩耗性および耐欠損性に
低くなる恐れがあり、他方6.0μm 以上では、被覆膜
の固着力が小さくなり、剥離の恐れがある。
Further, the thickness of the hard coating film is 3.0 to 3.0.
It is preferably in the range of 6.0 μm. That is, if the thickness is less than 3.0 μm, the abrasion resistance and chipping resistance may be low, while if the thickness is more than 6.0 μm, the adhesion of the coating film may be small and the coating may be peeled off.

【0015】[0015]

【実施例】つぎに、この発明の被覆切削工具を実施例に
より具体的に説明する。
Next, the coated cutting tool of the present invention will be specifically described with reference to examples.

【0016】実施例1 JIS CNGN120408に適合した形状であり且
つ京セラ製SN6000材種のセラミック製の切削工具
(以下チップと呼ぶ)を母材として、公知のCVD法に
よって多層硬質膜を形成し、これを実施例品1とした。
膜構成をTiN+TiAlN+(Ti,Al)(N,
O)+TiN+TiAlN+(Ti,Al)(N,O)
+TiC,すなわちTiN+TiAlN+(Ti,A
l)(N,O)の膜構成を2段積み重ねた上にTiC膜
を形成し、膜厚を約3.5μmとした。
Example 1 A multilayer hard film was formed by a known CVD method using a ceramic cutting tool (hereinafter referred to as a chip) of SN6000 grade made by Kyocera as a base material and having a shape conforming to JIS CNGN120408. Was designated as Example Product 1.
The film configuration was changed to TiN + TiAlN + (Ti, Al) (N,
O) + TiN + TiAlN + (Ti, Al) (N, O)
+ TiC, ie, TiN + TiAlN + (Ti, A
1) A TiC film was formed on two layers of the (N, O) film configuration, and the film thickness was about 3.5 μm.

【0017】このチップを用い以下の条件で切削試験を
行って主切刃VB 摩耗量と主切刃VB MAX 摩耗量を測定
した。
[0017] was measured main cutting edge V B worn amount and the main cutting edge V B MAX wear amount by performing a cutting test under the following conditions using the chip.

【0018】 その結果、主切刃VB 摩耗量が0.16mmで、主切刃
B MAX 摩耗量が0.19mmであった。
[0018] As a result, the main cutting edge V B wear amount at 0.16 mm, the main cutting edge V B MAX wear amount was 0.19 mm.

【0019】比較例1 実施例1と同様に、膜構成をTiN+(Ti,Al)
(N,O)+TiN+(Ti,Al)(N,O)+Ti
C,すなわちTiN+(Ti,Al)(N,O)の膜構
成を2段積み重ねた上にTiC膜を形成し、膜厚を約
3.0μmとしたチップを作製し、これを比較例品1と
した。この比較例品1を用いて、実施例1と同様の試験
を行った。
Comparative Example 1 As in Example 1, the film configuration was changed to TiN + (Ti, Al).
(N, O) + TiN + (Ti, Al) (N, O) + Ti
C, that is, a TiC film was formed on a stack of two layers of TiN + (Ti, Al) (N, O), and a chip having a thickness of about 3.0 μm was manufactured. And The same test as in Example 1 was performed using this comparative example 1.

【0020】この結果、主切刃VB 摩耗量が0.22m
mで、主切刃VB MAX 摩耗量が0.33mmと、いずれ
も実施例品1よりも摩耗量が多かった。
[0020] As a result, the main cutting edge V B the amount of wear is 0.22m
m, the wear amount of the main cutting edge V B MAX was 0.33 mm, and the wear amount was larger than that of the product of Example 1 in all cases.

【0021】これは、本比較例ではTiN層上に(T
i,Al)(N,O)層を直接形成したため(Ti,A
l)(N,O)の成膜状態が若干不良となり、他方前記
実施例1では両層の間にTiAlN層を介在させたこと
により(Ti,Al)(N,O)の成膜状態が良好であ
ったためではないかと推測される。
This is because (T) is formed on the TiN layer in this comparative example.
(i, Al) (N, O) layer was directly formed (Ti, A
l) The film formation state of (N, O) is slightly poor, while in the first embodiment, the film formation state of (Ti, Al) (N, O) is reduced by interposing a TiAlN layer between both layers. It is presumed that the reason was good.

【0022】実施例2 JIS CNGN120408に適合した形状であり且
つ京セラ製SN6000材種のセラミック製の切削工具
(以下チップと呼ぶ)を母材として、公知のCVD法に
よって多層硬質膜を形成し、これを実施例品2とした。
膜構成をTiN+Al2 3 +(Ti,Al)(N,
O)+TiN+Al2 3 +(Ti,Al)(N,O)
+TiC,すなわちTiN+TiAlN+(Ti,A
l)(N,O)の膜構成を2段積み重ねた上にTiC膜
を形成し、膜厚を約3.5μmとした。
Example 2 A multilayer hard film was formed by a known CVD method using a ceramic cutting tool (hereinafter, referred to as a chip) of a SN6000 grade made by Kyocera as a base material and having a shape conforming to JIS CNGN120408. Was designated as Example Product 2.
The film configuration was changed to TiN + Al 2 O 3 + (Ti, Al) (N,
O) + TiN + Al 2 O 3 + (Ti, Al) (N, O)
+ TiC, ie, TiN + TiAlN + (Ti, A
1) A TiC film was formed on two layers of the (N, O) film configuration, and the film thickness was about 3.5 μm.

【0023】このチップを用い、以下の条件で切削試験
を行って主切刃VB 摩耗量と主切刃VB MAX 摩耗量を測
定した。
[0023] Using this chip was measured main cutting edge V B worn amount and the main cutting edge V B MAX wear amount by performing a cutting test under the following conditions.

【0024】 その結果、主切刃VB 摩耗量が0.10mmで、主切刃
B MAX 摩耗量が0.16mmで、いずれも実施例1よ
りも少ない摩耗量であった。
[0024] As a result, the main cutting edge V B wear amount at 0.10 mm, with the main cutting edge V B MAX wear amount 0.16 mm, was wear amount less than either Example 1.

【0025】これは、TiN層と(Ti,Al)(N,
O)層の間に形成する層を実施例1のTiAlNに対し
て酸化アルミニウムで構成したことによるものと思われ
る。
This is because a TiN layer and (Ti, Al) (N,
This is probably because the layer formed between the O) layers was composed of aluminum oxide with respect to the TiAlN of Example 1.

【0026】実施例3 実施例2のチップにおいて硬質被覆膜をそれぞれ2.8
μm と6.5μm とした2種類のチップを形成し、実施
例2と同一条件で加工試験を行った。
EXAMPLE 3 The hard coating film of the chip of Example 2 was 2.8 each.
Two types of chips having a size of μm and 6.5 μm were formed, and a processing test was performed under the same conditions as in Example 2.

【0027】その結果、被覆膜厚み2.8μm のチップ
は、主切刃VB 摩耗量が0.18mmで、主切刃V
B MAX 摩耗量が0.22mmと実施例1,2よりも大き
かった。
[0027] As a result, the chip of the coating film thickness 2.8μm is a main cutting edge V B the amount of wear 0.18 mm, the major cutting edge V
The B MAX wear amount was 0.22 mm, which was larger than Examples 1 and 2.

【0028】また、被覆膜厚み6.5μm のチップで
は、被覆膜が剥離する場合があった。
In the case of a chip having a coating film thickness of 6.5 μm, the coating film sometimes peeled off.

【0029】なお、実施例品1、2、3および実験例品
について硬質被覆膜のEPMA組成分析を行ったとこ
ろ、実施例品2について、上記(Ti,Al)(N,
O)層において、母材表面側にTiを多く存在せしめ、
外側に離れていくほどTiが減少し、最外部分ではAl
が主となるような構成となっていることが確認された。
実施例品2の耐摩耗性が優れていたことの理由として、
このようなTiの傾斜的分布があることも考えられる。
In addition, when the EPMA composition analysis of the hard coating film was carried out for the products of Examples 1, 2, and 3 and the experimental product, the (Ti, Al) (N,
In the O) layer, a large amount of Ti is present on the base material surface side,
Ti further decreases toward the outside, and in the outermost part, Al decreases.
Has been confirmed to be the main configuration.
The reason that the wear resistance of the product of Example 2 was excellent was as follows.
It is conceivable that there is such a gradient distribution of Ti.

【0030】なお、本発明はこれら実施例の形態に限定
されるものでなく、例えば表面にさらにTiN膜を形成
するなど、本発明の目的を逸脱しない限り、任意の形態
にすることができるのは言うまでもない。
It should be noted that the present invention is not limited to the embodiments described above, but may be of any other form without departing from the object of the present invention, such as forming a TiN film on the surface. Needless to say.

【0031】[0031]

【発明の効果】叙上のように、本発明によれば、窒化珪
素質母材表面に、Tiの窒化物、炭化物又は炭窒化物か
らなる第1層、アルミニウム化合物からなる第2層、T
iの窒化物または酸窒化物とAlの酸化物または酸窒化
物の複合化合物固溶体層〔(Ti,Al)(N,O)
層〕の第3層を順次配した硬質被覆膜を形成したことに
より、切削工具の耐摩耗性、耐欠損性が顕著に向上させ
た。したがって、経済的であるとともに、切削速度の一
層の高速化にも十分対応していくことができる。
As described above, according to the present invention, the first layer made of nitride, carbide or carbonitride of Ti, the second layer made of aluminum compound,
Composite compound solid solution layer of nitride or oxynitride of i and oxide or oxynitride of Al [(Ti, Al) (N, O)
), The wear resistance and chipping resistance of the cutting tool were remarkably improved. Therefore, it is economical and can sufficiently cope with a further increase in the cutting speed.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】窒化珪素質母材表面に、Tiの窒化物、炭
化物又は炭窒化物からなる第1層、アルミニウム化合物
からなる第2層、Tiの窒化物または酸窒化物とAlの
酸化物または酸窒化物の複合化合物固溶体からなる第3
層を順次配した硬質被覆膜を備えてなる被覆切削工具。
1. A first layer made of a nitride, carbide or carbonitride of Ti, a second layer made of an aluminum compound, a nitride or an oxynitride of Ti and an oxide of Al on a surface of a silicon nitride base material. Or a third compound solid solution of oxynitride
A coated cutting tool comprising a hard coating film in which layers are sequentially arranged.
【請求項2】上記第2層が酸化アルミニウムからなるこ
とを特徴とする請求項1の被覆切削工具。
2. The coated cutting tool according to claim 1, wherein said second layer is made of aluminum oxide.
JP28875496A 1996-10-30 1996-10-30 Coated cutting tool Pending JPH10128602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28875496A JPH10128602A (en) 1996-10-30 1996-10-30 Coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28875496A JPH10128602A (en) 1996-10-30 1996-10-30 Coated cutting tool

Publications (1)

Publication Number Publication Date
JPH10128602A true JPH10128602A (en) 1998-05-19

Family

ID=17734279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28875496A Pending JPH10128602A (en) 1996-10-30 1996-10-30 Coated cutting tool

Country Status (1)

Country Link
JP (1) JPH10128602A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0947607A2 (en) * 1998-03-16 1999-10-06 Hitachi Tool Engineering, Ltd. Members with multi-layer coatings
DE102008013966A1 (en) * 2008-03-12 2009-09-17 Kennametal Inc. Hard material coated body

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0947607A2 (en) * 1998-03-16 1999-10-06 Hitachi Tool Engineering, Ltd. Members with multi-layer coatings
EP0947607A3 (en) * 1998-03-16 2000-01-19 Hitachi Tool Engineering, Ltd. Members with multi-layer coatings
DE102008013966A1 (en) * 2008-03-12 2009-09-17 Kennametal Inc. Hard material coated body

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