JPH0973101A - Liquid crystal display device and its production - Google Patents

Liquid crystal display device and its production

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Publication number
JPH0973101A
JPH0973101A JP22870695A JP22870695A JPH0973101A JP H0973101 A JPH0973101 A JP H0973101A JP 22870695 A JP22870695 A JP 22870695A JP 22870695 A JP22870695 A JP 22870695A JP H0973101 A JPH0973101 A JP H0973101A
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Japan
Prior art keywords
signal line
liquid crystal
counter electrode
crystal display
counter
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Granted
Application number
JP22870695A
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Japanese (ja)
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JP3474975B2 (en
Inventor
Keiichiro Ashizawa
Nobutake Konishi
Kazuhiro Ogawa
Masuyuki Ota
Kazuhiko Yanagawa
Masahiro Yanai
益幸 太田
和宏 小川
信武 小西
和彦 柳川
雅弘 箭内
啓一郎 芦沢
Original Assignee
Hitachi Ltd
株式会社日立製作所
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Priority to JP22870695A priority Critical patent/JP3474975B2/en
Publication of JPH0973101A publication Critical patent/JPH0973101A/en
Application granted granted Critical
Publication of JP3474975B2 publication Critical patent/JP3474975B2/en
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Abstract

PROBLEM TO BE SOLVED: To improve an opening rate by setting the orientation state of liquid crystals and the polarization state of polarizing plates by the absence of voltage between pixel electrodes and counter electrodes. SOLUTION: This liquid crystal display device is constituted by providing the surface on the liquid crystal layer side of at least one or both of transparent substrates of the transparent substrates arranged to face each other via the liquid crystal layer with the pixel electrodes PX and the counter electrodes CT and is constituted to generate electric fields parallel with the transparent substrates by the application of the voltage between these pixel electrodes PX and the counter electrodes CT. The orientation state of the liquid crystals shielding the light transmission from the one transparent substrate toward the other transparent substrate via the liquid crystals and the polarization state of the polarizing plate are set by the absence of the voltage between the pixel electrodes PX and the counter electrodes CT. At least either of the pixel electrodes PX and the counter electrodes CT are composed of transparent conductive films.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a method of manufacturing the same, and more particularly to a liquid crystal display device of a so-called lateral electric field type and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, a so-called lateral electric field type liquid crystal display device has been known. In contrast, the conventional liquid crystal display device is, by contrast, called a vertical electric field type.

That is, what is called a vertical electric field system is
An electrode is provided on each of the transparent substrates that are arranged to face each other with the liquid crystal layer interposed therebetween, and the light transmittance of the liquid crystal layer is changed by generating an electric field in the direction perpendicular to the transparent substrate by these electrodes. .

On the other hand, in the so-called horizontal electric field method, a pair of electrodes (a pixel electrode and a counter electrode) is provided on one or both of the transparent substrates arranged to face each other with a liquid crystal layer in between. The electrodes are configured to change the light transmittance of the liquid crystal layer by generating an electric field in a direction parallel to the transparent substrate.

The horizontal electric field type liquid crystal display device has an effect that a clear image can be obtained even when the display surface is observed from a large angle direction with respect to the display surface and the image can be recognized in a so-called wide viewing angle. Is.

Such a liquid crystal display device is described in detail, for example, in documents such as Japanese Patent Application Publication No. 5-505247 and Japanese Patent Application Laid-Open No. 6-160878.

[0007]

In the liquid crystal display device having such a structure, the pixel electrode and the counter electrode are usually formed of a metal layer having a relatively small resistance value and correspond to each pixel. A plurality of them are provided in each area, and they are arranged alternately.

However, in such a structure, the so-called aperture ratio (ratio of the aperture region for transmitting light) for each pixel becomes small, and it has been demanded to improve the aperture ratio.

This is because a bright backlight with large power consumption is required to brighten the display screen.

Further, the electrode made of a metal layer causes a factor of causing light reflection when observing from the display surface side, and it is recognized that the view side of the observer is reflected on the display surface. Has been reached.

The present invention has been made under such circumstances, and an object thereof is to provide a liquid crystal display device having an improved aperture ratio and a method for manufacturing the same.

Another object of the present invention is to provide a liquid crystal display device and a method for manufacturing the same in which light reflection on the display surface is reduced.

Another object of the present invention is to provide a liquid crystal display device and a method of manufacturing the liquid crystal display device, in which display with good contrast is achieved.

[0014]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, among the transparent substrates arranged so as to face each other with the liquid crystal layer interposed therebetween, a pixel electrode and a counter electrode are provided on the liquid crystal layer side surface of one or both of the transparent substrates. In a liquid crystal display device in which an electric field is generated in parallel with a transparent substrate by applying a voltage between the transparent electrode and a counter electrode, no voltage is applied between the pixel electrode and the counter electrode from one transparent substrate to the other via the liquid crystal. The alignment state of the liquid crystal that blocks light transmission to the transparent substrate and the polarization state of the polarizing plate are set, and at least one of the pixel electrode and the counter electrode is formed of a transparent conductive film. It is what

[0016]

In the liquid crystal display device having such a structure, at least one of the pixel electrode and the counter electrode is made of a transparent conductive film, so that it is conventionally made of a metal layer which does not transmit light. It becomes possible to improve the aperture ratio for each pixel as compared with.

Further, since the transparent conductive film has an extremely low light reflectance as compared with the metal layer, the viewer's side scene and the like are not reflected on the display surface.

Further, in the liquid crystal display device having such a structure, light transmission from one transparent substrate to the other transparent substrate through the liquid crystal is blocked by applying no voltage between the pixel electrode and the counter electrode. This is a so-called normally black mode in which the alignment state of the liquid crystal and the polarization state of the polarizing plate are set. This means that even if the electrode is made of a transparent conductive film, light is not transmitted through that portion, so that it is possible to achieve a very good black display and improve the contrast.

If, in the normally white mode in which black must be displayed when a voltage is applied, it becomes impossible to completely block light at the electrode portions when a voltage is applied, so that the light transmitted through that portion is transmitted in black display. As a result of pushing up the rate, high quality black cannot be displayed.

[0020]

The invention, further objects of the invention and further features of the invention will be apparent from the following description with reference to the drawings.

(Embodiment 1) << Active Matrix Liquid Crystal Display Device >> An embodiment in which the present invention is applied to an active matrix type color liquid crystal display device will be described below. In the drawings described below, components having the same function are designated by the same reference numeral, and repeated description thereof will be omitted.

<< Plane Configuration of Matrix Part (Pixel Part) >> FIG. 1 is a plan view showing one pixel of the active matrix type color liquid crystal display device of the present invention and its periphery. (The hatched portion in the figure indicates the transparent conductive film g2.) As shown in FIG. 1, each pixel has a scanning signal line (gate signal line or horizontal signal line) GL and a counter voltage signal line (counter electrode wiring) CL. , Are arranged in a region where two adjacent video signal lines (drain signal lines or vertical signal lines) DL intersect (in a region surrounded by four signal lines). Each pixel has a thin film transistor TFT, a storage capacitor Cstg, and a pixel electrode PX.
And a counter electrode CT. In the figure, the scanning signal lines GL and the counter voltage signal lines CL extend in the left-right direction, and a plurality of them are arranged in the vertical direction. The video signal lines DL extend in the up-down direction, and a plurality of video signal lines DL are arranged in the left-right direction. The pixel electrode PX is connected to the thin film transistor TFT via the source electrode SD1, and the counter electrode CT is integrated with the counter voltage signal line CL.

2 vertically adjacent to each other along the video signal line DL.
In the pixel, when bent along the line of FIG. 1A, the planar configurations overlap each other. This is to reduce the resistance of the counter voltage signal line CL by making the counter voltage signal line CL common to two vertically adjacent pixels along the video signal line DL and increasing the electrode width of the counter voltage signal line CL. This is because.
This makes it easy to sufficiently supply a counter voltage from the external circuit to the counter electrode CT of each pixel in the left-right direction.

The pixel electrode PX and the counter electrode CT face each other, and the electric state between each pixel electrode PX and the counter electrode CT controls the optical state of the liquid crystal LC to control the display. The pixel electrode PX and the counter electrode CT are configured in a comb shape and are long and thin electrodes in the vertical direction in the drawing.

The number O (number of comb teeth) of the counter electrode CT in one pixel is equal to the number P (number of comb teeth) of the pixel electrode PX and O =
It is configured to always have the relationship of P + 1 (O = 3, P = 2 in this embodiment). This is because the counter electrodes CT and the pixel electrodes PX are alternately arranged and the counter electrodes CT are always adjacent to the video signal lines DL. As a result, the electric field between the counter electrode CT and the pixel electrode PX is changed to the video signal line DL.
The lines of electric force from the video signal line DL can be shielded by the counter electrode CT so as not to be affected by the electric field generated from. The counter electrode CT is a counter voltage signal line C described later.
Since the potential is always supplied from the outside by L, the potential is stable. Therefore, even if it is adjacent to the video signal line DL, the potential hardly changes. Further, as a result, the geometrical position of the pixel electrode PX from the video signal line DL becomes far, so that the parasitic capacitance between the pixel electrode PX and the video signal line DL is significantly reduced, and the image of the pixel electrode potential Vs is displayed. Fluctuations due to the signal voltage can also be suppressed. Thus, crosstalk (defective image quality called vertical smear) occurring in the vertical direction can be suppressed.

The electrode widths of the pixel electrode PX and the counter electrode CT are each 6 μm. This is set as much as possible in order to apply a sufficient electric field to the entire liquid crystal layer in the thickness direction of the liquid crystal layer, and is set to be sufficiently larger than the thickness 3.9 μm of the liquid crystal layer described later, and to increase the aperture ratio. Make thin. Also,
The electrode width of the video signal line DL is slightly wider than that of the pixel electrode PX and the counter electrode CT to be 8 μm in order to prevent disconnection. Here, the electrode width of the video signal line DL is set to be twice the electrode width of the adjacent counter electrode CT or less. Alternatively, when the electrode width of the video signal line DL is determined from the productivity of the yield, the electrode width of the counter electrode CT adjacent to the video signal line DL is set to 1 / or more of the electrode width of the video signal line DL. . This is because the lines of electric force generated from the video signal line DL are absorbed by the counter electrodes CT on both sides,
In order to absorb the line of electric force generated from a certain electrode width, an electrode having an electrode width equal to or larger than that is required. Therefore, since the lines of electric force generated from half (4 μm each) of the electrodes of the video signal line DL may be absorbed by the counter electrodes CT on both sides, the counter electrodes C adjacent to the video signal line DL may be absorbed.
The electrode width of T is 以上 or more. This prevents crosstalk caused by the influence of the video signal, especially crosstalk generated in the vertical direction (vertical crosstalk).

The width of the scanning signal line GL is set so as to satisfy a resistance value sufficient to apply a scanning voltage to the gate electrode GT of the pixel on the terminal side (opposite to a scanning electrode terminal GTM described later). Further, the counter voltage signal line CL is also the counter electrode C of the pixel on the terminal side (the side opposite to the common bus line CB described later).
The electrode width is set so as to satisfy a resistance value sufficient to apply a counter voltage to T.

On the other hand, the electrode interval between the pixel electrode PX and the counter electrode CT changes depending on the liquid crystal material used. this is,
Since the electric field strength that achieves the maximum transmittance differs depending on the liquid crystal material, the electrode interval is set according to the liquid crystal material, and within the maximum amplitude range of the signal voltage set by the breakdown voltage of the video signal drive circuit (signal side driver) used. , So that the maximum transmittance can be obtained. When a liquid crystal material described later is used, the electrode interval is 16 μm.

<< Cross-Sectional Structure of Matrix (Pixel) >> FIG. 2 is a cross-sectional view taken along the line 3-3 in FIG. 1, and FIG. 3 is a cross-sectional view of the thin film transistor TFT taken along the line 4-4 in FIG. 4 is the storage capacitance C at the section line 5-5 in FIG.
It is a figure which shows the cross section of stg. As shown in FIGS.
A thin film transistor TFT, a storage capacitor Cstg and an electrode group are formed on the lower transparent glass substrate SUB1 side based on the liquid crystal layer LC, and a color filter FIL and a light-shielding black matrix pattern BM are formed on the upper transparent glass substrate SUB2 side. There is.

Further, the transparent glass substrates SUB1, SUB2
Alignment films ORI and ORI2 for controlling the initial alignment of the liquid crystal are provided on the inner surface (the liquid crystal LC side) of each of the transparent glass substrates SUB1 and SUB2. A polarizing plate arranged orthogonally (crossed Nicols arrangement) is provided.

<< TFT Substrate >> First, the configuration of the lower transparent glass substrate SUB1 side (TFT substrate) will be described in detail.

<< Thin Film Transistor TFT >> The thin film transistor TFT operates so that the channel resistance between the source and the drain decreases when a positive bias is applied to the gate electrode GT, and the channel resistance increases when the bias is set to zero.

As shown in FIG. 3, the thin film transistor TFT has a gate electrode GT, a gate insulating film GI, and an i-type (intrinsic, intrinsic, not doped with conductivity type determining impurities) amorphous silicon (Si). Type semiconductor layer A
S, a pair of source electrode SD1 and drain electrode SD2. It should be understood that the source and drain are originally determined by the bias polarity between them, and the polarity is inverted during operation in the circuit of this liquid crystal display device, so it should be understood that the source and drain are switched during operation. However, in the following description, for convenience, one is fixed as the source and the other is fixed as the drain.

<< Gate Electrode GT >> The gate electrode GT is formed continuously with the scanning signal line GL.
Is configured so that a part of the area becomes a gate electrode GT. The gate electrode GT is a portion that exceeds the active region of the thin film transistor TFT, and is formed larger than it so as to completely cover the i-type semiconductor layer AS (as viewed from below). As a result, in addition to the role of the gate electrode GT, it is devised so that the i-type semiconductor layer AS is not exposed to external light or backlight light. In this example, the gate electrode GT is formed of a single-layer conductive film g1. As the conductive film g1, for example, an aluminum (Al) film formed by sputtering is used, and an anodic oxide film AOF of Al is provided thereon.

<< Scanning Signal Line GL >> The scanning signal line GL is formed of the conductive film g1. The conductive film g1 of the scanning signal line GL is formed in the same manufacturing process as the conductive film g1 of the gate electrode GT, and is integrally formed. This scanning signal line G
The gate voltage Vg is applied from the external circuit to the gate electrode G by L.
Supply to T. An anodic oxide film AOF of Al is also provided on the scanning signal line GL. The video signal line DL
The portion that intersects with is narrowed to reduce the probability of short-circuit with the video signal line DL, and even if it is short-circuited, it is bifurcated so that it can be separated by laser trimming.

<< Counter Electrode CT >> The counter electrode CT is composed of the gate electrode GT and the conductive film g1 in the same layer as the scanning signal line GL. An Al anodic oxide film AOF is also provided on the counter electrode CT. A counter voltage Vcom is applied to the counter electrode CT. In this embodiment, the counter voltage Vcom is the minimum level drive voltage Vdmin and the maximum level drive voltage Vdm applied to the video signal line DL.
a thin film transistor TFT
Feed-through voltage Δ that occurs when the power supply is turned off
Although the potential is set to be lower by Vs, if it is desired to reduce the power supply voltage of the integrated circuit used in the video signal drive circuit to about half, an AC voltage may be applied.

<< Counter Voltage Signal Line CL >> Counter Voltage Signal Line C
L is composed of a conductive film g1. The conductive film g1 of the counter voltage signal line CL is formed in the same manufacturing process as the conductive film g1 of the gate electrode GT, the scanning signal line GL and the counter electrode CT, and is formed integrally with the counter electrode CT. By this counter voltage signal line CL, the counter voltage Vcom from the external circuit
Are supplied to the counter electrode CT. In addition, the counter voltage signal line CL
An Al anodic oxide film AOF is also provided on the top. The portion intersecting with the video signal line DL is the scanning signal line GL.
Similarly, the width is narrowed to reduce the probability of short-circuit with the video signal line DL, and even if short-circuited, it is bifurcated so that it can be separated by laser trimming.

<< Insulating Film GI >> The insulating film GI is used as a gate insulating film for applying an electric field to the semiconductor layer AS together with the gate electrode GT in the thin film transistor TFT. The insulating film GI includes the gate electrode GT and the scanning signal line GL.
Is formed in the upper layer. As the insulating film GI, for example, a silicon nitride film formed by plasma CVD is selected.
The thickness is 200 to 2700Å (2400 in this embodiment).
Å) formed. The gate insulating film GI is formed so as to surround the entire matrix portion AR, and the peripheral portion is removed so as to expose the external connection terminals DTM and GTM. The insulating film GI also contributes to electrical insulation between the scanning signal line GL and the counter voltage signal line CL and the video signal line DL.

<< i-type semiconductor layer AS >> i-type semiconductor layer AS
Is amorphous silicon and is formed to a thickness of 200 to 2200Å (in this embodiment, a film thickness of about 2000Å). The layer d0 is a phosphorus (P) -doped N (+)-type amorphous silicon semiconductor layer for ohmic contact, the i-type semiconductor layer AS exists on the lower side, and the conductive layer d1 (d
It is left only where 2) exists.

The i-type semiconductor layer AS is also provided between both the scanning signal line GL and the intersection (crossover portion) of the counter voltage signal line CL and the video signal line DL. The i-type semiconductor layer AS at the intersection reduces the short circuit between the scanning signal line GL and the counter voltage signal line CL and the video signal line DL at the intersection.

<< Source electrode SD1, Drain electrode SD
2 >> Each of the source electrode SD1 and the drain electrode SD2 is composed of a conductive film d1 in contact with the N (+) type semiconductor layer d0 and a conductive film d2 formed thereon.

The conductive film d1 is a chromium (Cr) film formed by sputtering, and is formed to a thickness of 500 to 1000 Å (in this embodiment, about 600 Å). If the Cr film is formed thick, the stress increases, so 2000
It is formed within a range not exceeding the film thickness of about Å. Cr film is N
Adhesion with the (+) type semiconductor layer d0 is improved, and the conductive film d2
Al is used for the purpose of preventing diffusion of Al into the N (+) type semiconductor layer d0 (so-called barrier layer). Conductive film d
In addition to the Cr film, refractory metals (Mo, Ti, T
a, W) film, refractory metal silicide (MoSi 2 , Ti)
A Si 2 , TaSi 2 , WSi 2 ) film may be used.

The conductive film d2 is made of Al by sputtering 30.
The thickness is from 00 to 5000Å (in this embodiment, 4000Å
Formed). The Al film has less stress than the Cr film and can be formed to have a thick film thickness, which reduces the resistance values of the source electrode SD1, the drain electrode SD2 and the video signal line DL, and the gate electrode GT and the i-type semiconductor. Layer AS
It has the function of ensuring that the vehicle is able to climb over steps caused by (improving the step coverage).

After patterning the conductive films d1 and d2 with the same mask pattern, the N (+) type semiconductor layer d0 is removed using the same mask or using the conductive films d1 and d2 as a mask. That is, the i-type semiconductor layer AS
The remaining N (+) type semiconductor layer d0 is removed by self-alignment except the conductive film d1 and the conductive film d2. At this time, since the N (+) type semiconductor layer d0 is etched so that the entire thickness thereof is removed, the surface of the i type semiconductor layer AS is slightly etched, but the degree is controlled by the etching time. do it.

<< Video Signal Line DL >> The video signal line DL is a conductive film d in the same layer as the source electrode SD1 and the drain electrode SD2.
1 and the conductive film d2. Also, the video signal line D
L is formed integrally with the drain electrode SD2.

<< Pixel Electrode PX >> In this embodiment, the pixel electrode PX is formed of the transparent conductive layer g2. The transparent conductive film g2 is made of a transparent conductive film (Indium-Tin-Oxide ITO: Nesa film) formed by sputtering.
With a thickness of 00 to 2000 Å (in this embodiment, 1400 Å
Film thickness).

In this way, the pixel electrode PX is formed into the transparent conductive layer g.
With the configuration of 2, it is possible to improve the maximum transmittance at the time of performing white display by the transmitted light of that portion, and for example, a brighter display can be achieved as compared with the case where the pixel electrode PX is formed of an opaque material layer. Will be able to do.

Further, since the transparent conductive layer has an extremely low light reflectance as compared with the metal layer, the viewer's side scene or the like is not reflected on the display surface.

Further, as will be described later, when no voltage is applied between the pixel electrode PX and the counter electrode CT, the liquid crystal molecules maintain the initial alignment state, and the polarizing plate is arranged so as to display black in that state. Since it is configured (normally black mode), even if the pixel electrode PX is configured by the transparent conductive layer g2, light in that portion is not transmitted at all, and therefore, high-quality black is displayed. Will be able to.

As a result, the maximum transmittance can be improved and the contrast ratio can be sufficiently improved.

<< Storage Capacitance Cstg >> The pixel electrode PX is formed so as to overlap the counter voltage signal line CL at the end opposite to the end connected to the thin film transistor TFT. This superposition is, as is clear from FIG.
The pixel electrode PX is used as one electrode PL2, and the counter voltage signal C
Storage capacitor with L as the other electrode PL1 (electrostatic capacitance element)
Configure Cstg. The dielectric film of the storage capacitor Cstg is composed of an insulating film GI used as a gate insulating film of the thin film transistor TFT and an anodized film AOF.

As shown in FIG. 1, in plan view, the storage capacitance Cst
g is formed in a portion where the width of the conductive film g1 of the counter voltage signal line CL is widened.

<< Protective Film PSV1 >> Thin Film Transistor TF
A protective film PSV1 is provided on T. Protective film PS
V1 is formed mainly for protecting the thin film transistor TFT from moisture and the like, and a material having high transparency and good moisture resistance is used. The protective film PSV1 is formed of, for example, a silicon oxide film or a silicon nitride film formed by a plasma CVD apparatus, and has a film thickness of about 1 μm.

The protective film PSV1 is formed so as to surround the entire matrix portion AR, and the peripheral portion has an external connection terminal DT.
It is removed to expose M and GTM. Protective film PS
Regarding the thickness relationship between V1 and the gate insulating film GI, the former is made thicker in consideration of the protective effect, and the latter is made thinner considering the mutual conductance gm of the transistor. Therefore, the protective film PSV1 having a high protective effect is formed larger than the gate insulating film GI so as to protect the peripheral portion over as wide a range as possible.

<< Color Filter Substrate >> Next, FIGS.
Returning to, the configuration of the upper transparent glass substrate SUB2 side (color filter substrate) will be described in detail.

<< Light-shielding film BM >> Upper transparent glass substrate SUB
On the 2 side, unnecessary gaps (pixel electrode PX and counter electrode CT
Transmitted light from the gaps other than between) is emitted to the display surface side,
The light-shielding film BM (so-called black matrix) is formed so as not to reduce the contrast ratio and the like. Shading film B
M is an i-type semiconductor layer AS for which external light or backlight light is emitted.
It also plays a role in preventing the incidence of light. That is, the i-type semiconductor layer AS of the thin film transistor TFT is sandwiched by the upper and lower light-shielding films BM and the large gate electrode GT so that external natural light or backlight light does not hit.

The light-shielding film BM has a light-shielding property and is formed of a highly insulating film so as not to affect the electric field between the pixel electrode PX and the counter electrode CT. A black pigment is mixed into the resist material to form a thickness of about 1.2 μm.

The light-shielding film BM is formed in a grid around each pixel, and the grid partitions an effective display area of one pixel. Therefore, the outline of each pixel is made clear by the light shielding film BM. That is, the light shielding film BM has two functions of a black matrix and a light shielding for the i-type semiconductor layer AS.

The light-shielding film BM is also formed in a frame shape in the peripheral portion, and its pattern is shown in FIG.
It is formed continuously with the pattern of the matrix portion shown in FIG. The light-shielding film BM in the peripheral portion is extended to the outside of the seal portion SL and prevents leaked light such as reflected light due to a mounting machine such as a personal computer from entering the matrix portion. On the other hand, this light-shielding film BM is about 0.3 to 1.0 from the edge of the substrate SUB2.
It is held inward by about mm, and is formed so as to avoid the cutting region of the substrate SUB2.

<< Color Filter FIL >> The color filter FIL is formed in a stripe shape by repeating red, green, and blue at a position facing the pixel. The color filter FIL is formed so as to overlap the edge portion of the light shielding film BM.

The color filter FIL can be formed as follows. First, a dyeing base material such as an acrylic resin is formed on the surface of the upper transparent glass substrate SUB2, and the dyeing base material other than the red filter forming region is removed by a photolithography technique. Thereafter, the dyed substrate is dyed with a red dye and subjected to a fixing treatment to form a red filter R. Next, the green filter G and the blue filter B are sequentially formed by performing the same process.

<< Overcoat Film OC >> The overcoat film OC prevents the dye of the color filter FIL from leaking to the liquid crystal LC, and prevents the color filter FIL and the light-shielding film BM.
It is provided for flattening the step due to. The overcoat film OC is formed of a transparent resin material such as acrylic resin or epoxy resin.

<< Liquid Crystal Layer and Polarizing Plate >> Next, the liquid crystal layer, the alignment film, the polarizing plate and the like will be described.

<< Liquid Crystal Layer >> As the liquid crystal material LC, the dielectric anisotropy Δε is positive and its value is 13.2, and the refractive index anisotropy Δn.
Is 0.081 (589 nm, 20 ° C.) nematic liquid crystal is used. The thickness (gap) of the liquid crystal layer is 3.9 μm
And the retardation Δn · d is 0.316. The value of this retardation Δn · d makes it possible to obtain the maximum transmittance when the liquid crystal molecules are rotated by 45 ° from the rubbing direction to the electric field direction in combination with the later-described alignment film and the polarizing plate, and the wavelength dependence within the range of visible light. It is possible to obtain transmitted light with almost no property.

The thickness (gap) of the liquid crystal layer is controlled by polymer beads.

The liquid crystal material LC is not particularly limited, and the dielectric anisotropy Δε may be negative. Further, the larger the dielectric anisotropy Δε, the more the driving voltage can be reduced. Further, the smaller the refractive index anisotropy Δn, the larger the thickness (gap) of the liquid crystal layer, the shorter the liquid crystal filling time, and the smaller the gap variation.

<< Orientation Film >> Polyimide is used as the orientation film ORI. The rubbing direction RDR is parallel to each other on the upper and lower substrates, and the angle formed with the applied electric field direction EDR is 75.
Let be °. FIG. 20 shows the relationship.

If the dielectric anisotropy Δε of the liquid crystal material is positive, the angle formed by the rubbing direction RDR and the applied electric field direction EDR is 45 ° C. or more and less than 90 ° C., and the dielectric anisotropy Δε.
If is negative, it must be greater than 0 ° and less than 45 °.

<< Polarizing Plate >> As the polarizing plate POL, G1220DU manufactured by Nitto Denko Corporation was used, and the polarization transmission axis MAX1 of the lower polarizing plate POL1 was matched with the rubbing direction RDR.
The polarization transmission axis MAX2 of the upper deflection plate POL2 is made orthogonal to it. FIG. 19 shows the relationship. Thereby, it is possible to obtain a normally closed characteristic in which the transmittance increases as the voltage (voltage between the pixel electrode PX and the counter electrode CT) applied to the pixel of the present invention is increased, and the voltage imprinting is not performed. When added, high quality black display can be obtained.

<< Structure of Matrix Peripheral >> FIG. 5 is a diagram showing a main part plane around a matrix (AR) of the display panel PNL including the upper and lower glass substrates SUB1 and SUB2. 6 is a diagram showing a cross section near the external connection terminal GTM to which the scanning circuit is to be connected on the left side, and a cross section near the seal portion where there is no external connection terminal on the right side.

[0071] Any For this panel In the manufacture of, if small size divided from simultaneously processing a plurality fraction of the device in one glass substrate for increased throughput, manufacturing facilities if large size shared In each type of product, a standardized glass substrate is processed, and then the size is reduced to a size suitable for each product. In each case, the glass is cut after going through one step. 5 and 6 show an example of the latter case. In both of FIGS. 5 and 6, the upper and lower substrates SUB1 and SUB are shown.
2 shows the state after cutting, and LN indicates the edge before cutting of both substrates. In either case, in the completed state, the external connection terminal group T
The size of the upper substrate SUB2 is limited to the inside of the lower substrate SUB1 so that g, Td and the terminal COT (subscripts omitted) (the upper side and the left side in the figure) are exposed so as to expose them. The terminal groups Tg and Td are respectively a scanning circuit connection terminal GTM and a video signal circuit connection terminal DTM described later.
And their lead-out wiring portions are mounted on the tape carrier package TCP on which the integrated circuit chip CHI is mounted (see FIGS. 16 and 1).
It is named collectively in the unit of 7). The lead wiring from the matrix portion of each group to the external connection terminal portion is inclined toward both ends. This is because the arrangement pitch of the package TCP and the connection terminal pitch of each package TCP are set to the terminals DTM of the display panel PNL,
This is to match the GTM. In addition, the counter electrode terminal CO
T is a terminal for applying a counter voltage to the counter electrode CT from an external circuit. Counter voltage signal line CL of matrix part
Is led out to the side opposite to the scanning circuit terminal GTM (right side in the figure), the respective counter voltage signal lines are grouped together by the common bus line CB and connected to the counter electrode terminal COT.

Between the transparent glass substrates SUB1 and SUB2, along the edge thereof, except for the liquid crystal sealing port INJ, the liquid crystal LC
Is formed to seal the sealing pattern SL. The sealing material is made of epoxy resin, for example.

The layers of the orientation films ORI1 and ORI2 are formed inside the seal pattern SL. Polarizing plates POL1, P
The OL2 is formed on the outer surface of the lower transparent glass substrate SUB1 and the upper transparent glass substrate SUB2, respectively.
The liquid crystal LC is a lower alignment film ORI that sets the orientation of liquid crystal molecules.
1 and the upper alignment film ORI2 are sealed in a region partitioned by the seal pattern SL. Lower alignment film ORI1
Is formed on the protective film PSV1 on the lower transparent glass substrate SUB1 side.

In this liquid crystal display device, various layers are separately stacked on the lower transparent glass substrate SUB1 side and the upper transparent glass substrate SUB2 side, and the seal pattern SL is formed on the substrate SUB2.
Side, the lower transparent glass substrate SUB1 and the upper transparent glass substrate SUB2 are overlapped, liquid crystal LC is injected from the opening INJ of the sealing material SL, the injection port INJ is sealed with epoxy resin or the like, and the upper and lower substrates are sealed. Assembled by cutting.

<< Gate Terminal Portion >> FIGS. 7A and 7B are diagrams showing a connection structure from the scanning signal line GL of the display matrix to the external connection terminal GTM, where FIG. 7A is a plane view and FIG. 7B is a view B of FIG. 4 shows a cross section taken along section line -B. It should be noted that the same drawing corresponds to the lower part of FIG. 5, and the diagonal wiring portions are shown as straight lines for convenience.

AO is a border line for direct drawing of photoresist, in other words, a photoresist pattern of selective anodic oxidation. Therefore, this photoresist is removed after anodization,
The pattern AO shown in the figure does not remain as a finished product, but since the oxide film AOF is selectively formed on the gate line GL as shown in the cross-sectional view, its locus remains. In the plan view, with respect to the photoresist boundary line AO, the left side is a region covered with the resist and not anodized, and the right side is a region exposed from the resist and anodized. Anodized A
The oxide Al 2 O 3 film AOF is formed on the surface of the L layer g1 and the volume of the lower conductive portion is reduced. Of course, anodic oxidation is performed by setting an appropriate time, voltage and the like so that the conductive portion remains.

In the figure, the AL layer g1 is hatched for easy understanding, but the region not anodized is patterned in a comb shape. This is because whiskers are generated on the surface when the width of the Al layer is wide. Therefore, by narrowing the width of each one and arranging a plurality of them in parallel, whiskers can be prevented and wire breakage can be prevented. The aim is to minimize the probability of and the sacrifice of conductivity.

The gate terminal GTM protects the Al layer g1 and the surface thereof, and further, TCP (Tape Carri).
er Package) and a transparent conductive layer g2 for improving the reliability of the connection. The transparent conductive film g2 uses the transparent conductive film ITO formed in the same process as the pixel electrode PX. In addition, the conductive layers d1 and d2 formed on the Al layer g1 and on the side surfaces thereof have good connectivity to both the Al layer and the transparent conductive layer g2 in order to compensate for poor connection between the Al layer and the transparent conductive layer g2. This is for connecting the Cr layer d1 to reduce the connection resistance, and the conductive layer d2 remains because the same mask is formed as the conductive layer d1.

In the plan view, the gate insulating film GI is formed on the right side of the boundary line, the protective film PSV1 is formed on the right side of the boundary line, and the terminal portion GTM located at the left end is formed.
Are exposed from them to allow electrical contact with external circuitry. In the figure, only one pair of the gate line GL and the gate terminal is shown, but in reality, a plurality of such pairs are vertically arranged to form the terminal group Tg (FIG. 5), as shown in FIG. The left end of the gate terminal is
It extends beyond the cutting region of the substrate and is short-circuited by the wiring SHg (not shown). Such a short-circuit line SHg in the manufacturing process is useful for supplying power during anodization and preventing electrostatic breakdown during rubbing of the alignment film ORI1.

<< Drain Terminal DTM >> FIG. 8 is a diagram showing the connection from the video signal line DL to the external connection terminal DTM thereof. (A) shows the plane thereof, and (B) shows B- of (A).
A cross section taken along line B is shown. The drawing corresponds to the vicinity of the upper right of FIG. 5, and although the orientation of the drawing is changed for convenience, the right end direction corresponds to the upper end of the substrate SUB1.

TSTd is an inspection terminal to which an external circuit is not connected, but is wider than a wiring portion so that a probe needle or the like can be contacted. Similarly, the drain terminal D
The width of the TM is wider than that of the wiring portion so that the TM can be connected to an external circuit. The external connection drain terminals DTM are arranged vertically, and the drain terminals DTM form a terminal group Td (subscripts omitted) as shown in FIG. 5 and are further extended beyond the cutting line of the substrate SUB1. All of them are short-circuited to each other by a wiring SHd (not shown) to prevent electric breakdown. The inspection terminal TSTd is formed on every other video signal line DL as shown in FIG.

The drain connection terminal DTM is a transparent conductive layer g2
It is formed of a single layer and is connected to the video signal line DL at a portion where the gate insulating film GI is removed. This transparent conductive film g2 uses the transparent conductive film ITO formed in the same step as the pixel electrode PX, as in the case of the gate terminal GTM. The semiconductor layer AS formed on the end of the gate insulating film GI is for etching the edge of the gate insulating film GI in a tapered shape. Of course, the protective film PSV1 is removed on the drain terminal DTM to connect to an external circuit.

The lead wiring from the matrix portion to the drain terminal portion DTM is a layer d of the same level as the video signal line DL.
1, d2 are formed up to the middle of the protective film PSV1,
It is connected to the transparent conductive film g2 in the protective film PSV1. This is for the purpose of protecting the Al layer d2, which is easily touched, by the protective film PSV1 and the seal pattern SL as much as possible.

<< Counter Electrode Terminal CTM >> FIG. 9 is a diagram showing the connection from the counter voltage signal line CL to the external connection terminal CTM thereof. (A) shows the plane thereof, and (B) shows B of (A). -B shows a cross section taken along the line B. The figure corresponds to the vicinity of the upper left of FIG.

Each common voltage signal line CL is connected to a common bus line C
They are collectively taken out at B and drawn out to the counter electrode terminal CTM. The common bus line CB has a conductive layer d1 and a conductive layer d.
1 has a structure in which a conductive layer d2 is laminated. this is,
This is because the resistance of the common bus line CB is reduced so that the counter voltage is sufficiently supplied from the external circuit to each counter voltage signal line CL. This structure is characterized in that the resistance of the common bus line can be lowered without newly adding a conductive layer. The conductive layer g1 of the common bus line CB is not anodized so as to be electrically connected to the conductive layers d1 and d2. It is also exposed from the gate insulating film GI.

The counter electrode terminal CTM has a structure in which a transparent conductive layer g2 is laminated on a conductive layer g1. This transparent conductive film g2 uses the transparent conductive film ITO formed in the same step as the pixel electrode PX, as in the case of other terminals. The transparent conductive layer g2 covers the conductive layer g1 with a durable transparent conductive layer g2 to protect its surface and prevent electrolytic corrosion and the like.

<< Whole Equivalent Circuit of Display Device >> FIG. 10 shows a connection diagram of an equivalent circuit of the display matrix portion and its peripheral circuits.
Although the figure is a circuit diagram, it is drawn corresponding to the actual geometrical arrangement. AR is a matrix array in which a plurality of pixels are two-dimensionally arranged.

In the figure, X means a video signal line DL, and subscripts G, B and R are added corresponding to green, blue and red pixels, respectively. Y represents the scanning signal line GL, and subscripts 1, 2, 3, ..., End are added according to the order of scanning timing.

The scanning signal line Y (subscript omitted) is connected to the vertical scanning circuit V, and the video signal line X (subscript omitted) is connected to the video signal drive circuit H.

The SUP is a TFT liquid crystal display device that displays information for a CRT (cathode ray tube) from a power supply circuit or a host (upper processing unit) to obtain a plurality of divided and stabilized voltage sources from one voltage source. It is a circuit including a circuit for exchanging information for use.

<< Driving Method >> FIG. 11 shows driving waveforms of the liquid crystal display device of the present invention. The opposite voltage is a binary AC rectangular wave of Vch and Vcl, and the scanning signals Vg (i-1), V are synchronized with it.
The non-selection voltage of g (i) is changed in two values of Vglh and Vgll for each scanning period. The amplitude value of the counter voltage and the amplitude value of the non-selection voltage are the same. The video signal voltage is a voltage obtained by subtracting 1/2 of the amplitude of the counter voltage from the voltage desired to be applied to the liquid crystal layer.

The counter voltage may be direct current, but by making alternating current, the maximum amplitude of the video signal voltage can be reduced and a video signal drive circuit (signal side driver) having a low withstand voltage can be used.

<< Function of Storage Capacity Cstg >> Storage Capacity Cstg
Is provided in order to store the image information written in the pixel (after the thin film transistor TFT is turned off) for a long time.
Unlike the method of applying an electric field perpendicular to the substrate surface, the method of applying an electric field parallel to the substrate surface used in the present invention has almost no capacitance (so-called liquid crystal capacitance) composed of a pixel electrode and a counter electrode. The storage capacitor Cstg cannot store video information in a pixel. Therefore, the storage capacitor Cstg is an essential component in the method of applying the electric field parallel to the substrate surface.

The storage capacitor Cstg also works to reduce the influence of the gate potential change ΔVg on the pixel electrode potential Vs when the thin film transistor TFT switches. This situation is represented by the following equation.

[0095]

[Formula 1] ΔVs = {Cgs / (Cgs + Cstg + Cpix)} × ΔVg where Cgs is the gate electrode G of the thin film transistor TFT.
Parasitic capacitance formed between T and source electrode SD1, C
pix represents a capacitance formed between the pixel electrode PX and the counter electrode CT, and ΔVs represents a change in the pixel electrode potential due to ΔVg, a so-called feedthrough voltage. This variation ΔVs causes a direct current component applied to the liquid crystal LC, but the storage capacitor Cst
The larger g is, the smaller the value can be. The reduction of the direct current component applied to the liquid crystal LC is achieved by the liquid crystal L
The life of C can be improved, and so-called burn-in in which the previous image remains when the liquid crystal display screen is switched can be reduced.

As described above, since the gate electrode GT is made large enough to completely cover the i-type semiconductor layer AS, the overlap area with the source electrode SD1 and the drain electrode SD2 is increased, and thus the parasitic capacitance Cgs is increased. The reverse effect that the pixel electrode potential Vs is easily influenced by the gate (scanning) signal Vg is produced. However, this demerit can be eliminated by providing the storage capacitor Cstg.

<< Manufacturing Method >> Next, a manufacturing method of the substrate SUB1 side of the above-described liquid crystal display device will be described with reference to FIGS.
This will be described with reference to FIG. In the figure, the letters in the center are abbreviations of process names, the left side shows the thin film transistor TFT portion shown in FIG. 3, and the right side shows the processing flow as seen in the sectional shape near the gate terminal shown in FIG. Except for Process B and Process D, Process A to Process I are divided corresponding to each photo processing, and any cross-sectional views of each process show the stage after the photo processing is finished and the photoresist is removed. . In addition,
In the present description, photographic processing refers to a series of operations from application of photoresist to selective exposure using a mask to development thereof, and repeated description will be omitted. A description will be given below according to the divided steps.

Step A, FIG. 12 Al-Pd and Al- having a film thickness of 3000 Å are formed on a lower transparent glass substrate SUB1 made of AN635 glass (trade name).
A conductive film g1 made of Si, Al-Ta, Al-Ti-Ta, or the like is provided by sputtering. After the photographic processing, the conductive film g1 is selectively etched with a mixed acid solution of phosphoric acid, nitric acid and glacial acetic acid. Thereby, the gate electrode GT, the scanning signal line GL, the counter electrode CT, the counter voltage signal line CL, and the electrode P.
L1, gate terminal GTM, first conductive layer of common bus line CB, first conductive layer of counter electrode terminal CTM, gate terminal G
Anodizing bus line SHg (not shown) for connecting TM
And an anodizing pad (not shown) connected to the anodizing bus line SHg.

Step B, FIG. 12 After the formation of the anodic oxidation mask AO by direct drawing, the solution was prepared by diluting 3% tartaric acid with ammonia to pH 6.25 ± 0.05 by 1: 9 with ethylene glycol solution. The substrate SUB1 is dipped in an anodizing solution and adjusted so that the formation current density is 0.5 mA / cm 2 (constant current formation). Next, anodic oxidation is performed until the formation voltage 125 V required to obtain a predetermined Al 2 O 3 film thickness is reached. After that, it is desirable to hold this state for several tens of minutes (constant voltage formation). This is important for obtaining a uniform Al 2 O 3 film. As a result, the conductive film g1 is anodized, and an anodic oxide film AOF having a film thickness of 1800Å is formed on the gate electrode GT, the scanning signal line GL, the counter electrode CT, the counter voltage signal line CL and the electrode PL1.

Step C, FIG. 12 Ammonia gas, silane gas, and nitrogen gas are introduced into the plasma CVD apparatus to provide a SiN nitride film having a film thickness of 2200Å, and silane gas and hydrogen gas are introduced into the plasma CVD apparatus to obtain the film thickness. After forming an i-type amorphous Si film having a thickness of 2000Å, hydrogen gas and phosphine gas are introduced into the plasma CVD apparatus to form an N (+)-type amorphous Si film having a film thickness of 300Å.

Step D, FIG. 13 After photo processing, SF 6 and CC are used as dry etching gas.
Use l 4 N (+) type amorphous Si film, i-type amorphous Si
The island of the i-type semiconductor layer AS is formed by selectively etching the film.

Step E, FIG. 13 After the photo processing, SF 6 is used as a dry etching gas to selectively etch the Si nitride film.

Step F, FIG. 13 A transparent conductive film g2 made of an ITO film having a film thickness of 1400Å is provided by sputtering. After the photo processing, the transparent conductive film g2 is selectively etched with a mixed acid solution of hydrochloric acid and nitric acid as an etching solution to form the uppermost layer of the gate terminal GTM, the second conductive layer of the drain terminal DTM and the counter electrode terminal CTM. To do.

Step G, FIG. 14: A conductive film d1 made of Cr having a film thickness of 600 Å is provided by sputtering, and further Al-P having a film thickness of 4000 Å is provided.
A conductive film d2 made of d, Al-Si, Al-Ta, Al-Ti-Ta, or the like is provided by sputtering. After the photographic processing, the conductive film d2 is etched with the same liquid as in the process B,
The conductive film d1 is etched with the same liquid as in the process A, and the video signal line DL, the source electrode SD1, the drain electrode SD2, the pixel electrode PX, the electrode PL2, the second conductive layer, the third conductive layer, and the drain of the common bus line CB. A bus line SHd (not shown) that short-circuits the terminal DTM is formed. Next, by introducing CCl 4 and SF 6 into the dry etching apparatus,
By etching the (+) type amorphous Si film, the N (+) type semiconductor layer d0 between the source and the drain is selectively removed.

Step H, FIG. 14 Ammonia gas, silane gas, and nitrogen gas are introduced into the plasma CVD apparatus to form a Si nitride film having a thickness of 1 μm. After the photo processing, the protective film PSV1 is formed by selectively etching the Si nitride film by a photo-etching technique using SF 6 as a dry etching gas.

<< Display Panel PNL and Drive Circuit Board PCB
1 >> FIG. 15 is a top view showing a state in which the video signal drive circuit H and the vertical scanning circuit V are connected to the display panel PNL shown in FIG.

CHI is a driving IC chip for driving the display panel PNL (the lower five are driving ICs on the vertical scanning circuit side).
The left and right chips are the driving I on the video signal driving circuit side.
C chip). TCP is a tape carrier package in which a driving IC chip CHI is mounted by a tape automated bonding method (TAB) as will be described later with reference to FIGS. 16 and 17, and PCB1 is a driving circuit in which the TCP, the capacitor and the like are mounted. The board is divided into two parts, one for the video signal drive circuit and one for the scanning signal drive circuit. FG
P is a frame ground pad, and a shield case S
The spring-like shards cut into the HD are soldered. FC is a flat cable that electrically connects the lower drive circuit board PCB1 and the left drive circuit board PCB1. As shown in the drawing, a flat cable FC is used in which a plurality of lead wires (phosphor bronze material plated with Sn) are sandwiched and supported by a striped polyethylene layer and a polyvinyl alcohol layer.

<< TCP Connection Structure >> FIG. 16 is a diagram showing a cross-sectional structure of a tape carrier package TCP in which the integrated circuit chip CHI, which constitutes the scanning signal drive circuit V and the video signal drive circuit H, is mounted on a flexible wiring board. Yes,
FIG. 17 is a cross-sectional view of essential parts showing a state where it is connected to the scanning signal circuit terminal GTM of the liquid crystal display panel in this example.

In the figure, TTB is an input terminal / wiring part of the integrated circuit CHI, and TTM is an output terminal / wiring part of the integrated circuit CHI, which is made of Cu, for example, and has inner ends (commonly called inner leads). ) Is the integrated circuit C
The HI bonding pad PAD is connected by a so-called face-down bonding method. Terminals TTB, T
Outer end portions (commonly called outer leads) of TM correspond to the input and output of the semiconductor integrated circuit chip CHI,
CRT / TFT conversion circuit / power supply circuit S by soldering, etc.
A liquid crystal display panel P is formed on the UP by an anisotropic conductive film ACF.
Connected to NL. The package TCP has a protective film PS whose front end exposes the connection terminal GTM on the panel PNL side.
Since it is connected to the panel so as to cover V1, and therefore the external connection terminal GTM (DTM) is covered by at least one of the protective film PSV1 and the package TCP, it is strong against electric contact.

BF1 is a base film made of polyimide or the like, and SRS is a solder resist film for masking the solder so that it will not stick to unnecessary places during soldering. The gap between the upper and lower glass substrates outside the seal pattern SL is protected by an epoxy resin EPX or the like after cleaning, and a silicone resin SIL is further filled between the package TCP and the upper substrate SUB2 for multiple protection.

<< Drive Circuit Board PCB2 >> Drive Circuit Board P
Electronic components such as an IC, a capacitor, and a resistor are mounted on the CB2. The drive circuit board PCB2 includes a power supply circuit for obtaining a plurality of divided and stabilized voltage sources from one voltage source, and a CR from a host (upper processing unit).
A circuit SUP including a circuit for converting information for T (cathode ray tube) into information for a TFT liquid crystal display device is mounted. C
J is a connector connecting portion to which a connector (not shown) connected to the outside is connected.

Drive circuit board PCB1 and drive circuit board PC
B2 is electrically connected by a flat cable FC.

<< Overall Structure of Liquid Crystal Display Module >> FIG.
[Fig. 3] is an exploded perspective view showing each component of the liquid crystal display module MDL.

SHD is a frame-shaped shield case (metal frame) made of a metal plate, LCW is its display window, PNL.
Is a liquid crystal display panel, SPB is a light diffusion plate, LCB is a light guide, RM is a reflector, BL is a backlight fluorescent tube, and LCA.
Is a backlight case, and the module MDL is assembled by stacking the respective members in a vertical arrangement relationship as shown in the figure.

The module MDL is a shield case SH.
The whole is fixed by a claw and a hook provided on D.

The backlight case LCA includes a backlight fluorescent tube BL, a light diffusion plate SPB, a light guide body LCB, and a reflection plate R.
M has a shape to accommodate M, and the light of the backlight fluorescent tube BL arranged on the side surface of the light guide LCB is transmitted to the light guide LC.
B, a reflection plate RM, and a light diffusion plate SPB form a uniform backlight on the display surface, and the light is emitted to the liquid crystal display panel PNL side.

An inverter circuit board PCB3 is connected to the backlight fluorescent tube BL and serves as a power source for the backlight fluorescent tube BL.

As described above, in this embodiment, the pixel electrode PX is formed of the transparent conductive layer g2 as described above, so that the maximum transmittance at the time of displaying white is about 30% (31. It will be possible to greatly improve it to 8%). Further, the ITO film for improving the reliability of the terminal can be formed at the same time, and the reliability and the productivity can be compatible with each other.

Example 2 This example is the same as Example 1 except for the following requirements. FIG. 20 shows a plan view of the pixel. The shaded area in the figure indicates the transparent conductive film g2.

<< Pixel Electrode PX >> In this embodiment, the pixel electrode PX is composed of a conductive film d1 and a conductive film d2 which are the same layers as the source electrode SD1 and the drain electrode SD2. Further, the pixel electrode PX is formed integrally with the source electrode SD1.

<< Counter Electrode CT >> In this embodiment, the counter electrode CT is composed of the transparent conductive film g2. This transparent conductive film g2
Is formed of a transparent conductive film (Indium-Tin-Oxide ITO: NES film) formed by sputtering, as in Example 1, and is formed to a thickness of 1000 to 2000Å (in this example, a film thickness of about 1400Å). It

<< Counter Voltage Signal Line CL >> Counter voltage signal line C
L is formed of the transparent conductive film g2 and is also formed integrally with the counter electrode CT.

<< Gate Terminal Portion >> In this embodiment, the surface of the Al layer g1 of the gate terminal GTM is protected and the TCP
The transparent conductive layer g2 for improving the reliability of the connection with (Tape Carrier Package) is formed in the same step as the counter electrode CT. The configuration is the same as that of the first embodiment and is as shown in FIG.

<< Drain Terminal DTM >> In this embodiment, the gate terminal G is formed on the transparent conductive layer g2 of the drain connection terminal DTM.
As in the case of TM, the transparent conductive film ITO formed in the same process as the counter electrode CT is used. The configuration is a little different from that of the first embodiment in terms of the vertical relation of layers, but it is not essential, and therefore the drawing is omitted.

<< Counter Electrode Terminal CTM >> Counter Electrode Terminal CT
The transparent conductive layer g2 on the M conductive layer g1 uses the transparent conductive film ITO formed in the same step as the counter electrode CT as in the case of other terminals. The configuration is the same as that of the first embodiment and is as shown in FIG.

<< Manufacturing Method >> In this embodiment, the order of the step F is between the step B and the step C of the first embodiment. As the order of steps, A to H in FIGS.
-C-D-E-G-H order. The mask pattern is
The scanning signal line GL and the scanning electrode GT are separated from the counter voltage signal line CL, and the transparent conductive layer g2 of each terminal and the counter voltage signal line CL are separated.
Pattern is formed on the same mask.

In this way, the counter electrode CT is connected to the transparent conductive layer g.
The effect described in the first embodiment can be obtained also by the configuration of 2. In this case, the maximum transmittance can be improved to about 16% (15.9% in this embodiment).

Although the counter electrode is formed on the side of the substrate having the TFT in this embodiment, the same effect can be obtained even if the counter electrode is formed on the substrate having the C / F (color filter). included. However, manufacturing method, counter electrode terminal CT
The structure of M is different.

Example 3 This example is the same as Example 1 and Example 2 except for the following requirements. FIG. 21 shows a plan view of the pixel. The shaded area in the figure indicates the transparent conductive film g2.

<< Counter Electrode CT >> In this embodiment, the counter electrode CT is formed of the transparent conductive film g2. This transparent conductive film g2
Is composed of a transparent conductive film (Indium-Tin-Oxide ITO: NES film) formed by sputtering as in Example 1, and is formed to a thickness of 1000 to 2000 Å (in this example, a film thickness of about 1400 Å). It

<< Counter Voltage Signal Line CL >> Counter Voltage Signal Line C
L is formed of the transparent conductive film g2 and is also formed integrally with the counter electrode CT.

<< Manufacturing Method >> In this embodiment, the order of adding the step F between the step B and the step C of the first embodiment is as follows. The order of steps is from A to H in FIGS.
The order is B-F-C-D-E-F-G-H. The mask pattern is formed by a mask in which the patterns of the scanning signal lines GL, the scanning electrodes GT, and the counter voltage signal lines CL are independent.

Thus, the pixel electrode PX and the counter electrode CT are
By configuring both of them by the transparent conductive layer g2, the same effects as those shown in the first and second embodiments can be obtained. In this case, the maximum transmittance at the time of displaying white becomes a value higher than that of Example 1 and Example 2, and is about 50.
% (47.7% in this embodiment).

Example 4 This example is the same as Examples 1 and 3 except for the following requirements. FIG. 22 shows a plan view of the pixel. The shaded area in the figure indicates the transparent conductive film g2.

<< Counter Voltage Signal Line CL >> Counter voltage signal line C
L is composed of a conductive film g1. In this embodiment, the conductive film g1
Cr is used for. Further, in order to connect the counter voltage signal line CL and the counter electrode CT, anodization is not performed. Also,
Through holes PH are formed in the gate insulating film GI. In addition to Cr, the conductive film g1 includes Ta, Ti, Mo,
It may be formed of W, Al, an alloy thereof, or a clad structure in which they are laminated.

<< Manufacturing Method >> In this embodiment, the step B of the first embodiment is deleted. Also, during the process E, the through hole PH
Then, in the process F, the pixel electrode PX and the counter electrode CT are simultaneously formed using the same mask.

In the present embodiment, in addition to the effects shown in the first and third embodiments, the resistance of the counter voltage signal line CL is reduced to smooth the transmission of voltage between the counter electrodes,
Voltage distortion can be reduced, and crosstalk (horizontal smear) generated in the horizontal direction can be reduced.

Further, by simultaneously forming the pixel electrode PX and the counter electrode CT with the same mask, the process F which is performed twice in the fourth embodiment is performed once, and the productivity is improved.

(Embodiment 5) This embodiment is the same as Embodiments 1 and 4 except for the following requirements. FIG. 23 shows a plan view of the pixel. The shaded area in the figure indicates the transparent conductive film g2.

<< Counter Electrode CT >> In this embodiment, only the counter electrode CT at the center is formed of the transparent conductive film g2. The counter electrode adjacent to the video signal line is formed of a metal film integrally with the counter voltage signal line.

In the present embodiment, in addition to the effects of Embodiments 1 to 4, by making the counter electrode adjacent to the video signal line opaque, crosstalk due to the video signal can be suppressed.

The reason is as follows. That is,
Since the counter electrode CT is formed adjacent to the video signal line DL, the electric field (electric force line) from the video signal line DL is
Since the electric field from the video signal line DL is absorbed by the counter electrode CT and does not affect the electric field between the pixel electrode PX and the counter electrode CT, crosstalk accompanying the video signal, especially cross in the vertical direction of the substrate. It is possible to suppress the occurrence of talk. However, the behavior of the liquid crystal molecules on the counter electrode CT adjacent to the video signal line DL is unstable due to the fluctuation of the video signal. Crosstalk will be observed by the transmitted light. Therefore, as in the above-described embodiment, by making the counter electrode CT adjacent to the video signal line DL opaque, it becomes possible to suppress crosstalk due to the video signal.

Example 6 Examples 2 and 3 described above
In each of the above, the counter electrode CT and the counter electrode signal line CL are formed of the transparent conductive layer g2.

In this case, in this embodiment, the resistance value of the counter electrode signal line CL is greatly reduced by the structure shown in FIG.

FIG. 24 (a) is a plan view showing a portion of the counter electrode signal line CL of FIG. 20, and FIG. 24 (b) is a sectional view taken along line bb of FIG. 24 (a).

In the same figure, the counter electrode signal line CL has a two-layer structure, and the Al layer 1 having a small resistance value is formed thereunder.
0 is formed, and an ITO film 11 is formed on the upper surface of the Al layer 10 so as to completely cover the Al layer 10. The counter electrode CT is composed of an extended portion obtained by extending a part of the ITO film 11.

In this case, the counter electrode signal line CL
The resistance can be reduced, and an electrical short circuit with another conductive layer (for example, the video signal line DL) via the interlayer insulating film due to a so-called whisker-shaped protrusion generated in the Al layer 10 can be prevented. Like That is, the Al layer 1
No. 0 is known to cause whiskers when the interlayer insulating film for the video signal line DL is formed in the upper layer thereof, which causes the above-mentioned adverse effect. However, the Al film 10 is completely covered to form the ITO film. It has been confirmed that the whiskers do not occur when formed.

[0148]

As is apparent from the above description,
According to the liquid crystal display device and the manufacturing method thereof according to the present invention, it is possible to improve the aperture ratio.

Further, it becomes possible to reduce the light reflection on the display surface.

Further, it becomes possible to achieve a display with good contrast.

[Brief description of drawings]

FIG. 1 is a main part plan view showing one pixel and its periphery of a liquid crystal display unit which is an embodiment (Example 1) of a liquid crystal display device according to the present invention.

FIG. 2 is a sectional view taken along line 3-3 of FIG.

3 is a sectional view taken along line 4-4 of FIG.

4 is a sectional view taken along line 5-5 of FIG.

FIG. 5 is a plan view for explaining the configuration of the matrix peripheral portion of the display panel.

FIG. 6 is a cross-sectional view showing an example of a panel edge portion of a liquid crystal display device according to the present invention.

FIG. 7 is a plan view and a cross-sectional view showing the vicinity of a connecting portion between a gate terminal GTM and a gate wiring GL.

FIG. 8 is a plan view and a cross-sectional view showing the vicinity of a connecting portion between a drain terminal DTM and a video signal line DL.

FIG. 9 is a plan view and a cross-sectional view showing the vicinity of a connection portion of a common electrode terminal CTM, a common bus line CB, and a common voltage signal line CL.

FIG. 10 is a circuit diagram including a matrix portion and its periphery of an active matrix type color liquid crystal display device of the present invention.

FIG. 11 is a diagram showing drive waveforms of an active matrix type color liquid crystal display device of the present invention.

FIG. 12 is a flowchart of a cross-sectional view of a pixel portion and a gate terminal portion showing a manufacturing process of steps A to C on the substrate SUB1 side.

FIG. 13 is a flow chart of a cross-sectional view of a pixel portion and a gate terminal portion showing manufacturing steps of steps D to F on the side of the substrate SUB1.

FIG. 14 is a flow chart of a cross-sectional view of a pixel portion and a gate terminal portion showing manufacturing steps G to H on the substrate SUB1 side.

FIG. 15 is a top view showing a state in which a peripheral drive circuit is mounted on a liquid crystal display panel.

FIG. 16 is a diagram showing a cross-sectional structure of a tape carrier package TCP in which an integrated circuit chip CHI forming a drive circuit is mounted on a flexible wiring board.

FIG. 17 is a cross-sectional view of essential parts showing a state in which the tape carrier package TCP is connected to the scanning signal circuit terminal GTM of the liquid crystal display panel PNL.

FIG. 18 is an exploded perspective view of a liquid crystal display module.

FIG. 19 is a diagram showing a relationship among an applied electric field direction, a rubbing direction, and a polarizing plate transmission axis.

FIG. 20 is a main-portion plan view showing one pixel and its periphery of a liquid crystal display portion which is another embodiment (Embodiment 2) of the liquid crystal display device according to the present invention.

FIG. 21 is a main-portion plan view showing one pixel and its periphery of a liquid crystal display portion which is another embodiment (Embodiment 3) of the liquid crystal display device according to the present invention.

FIG. 22 is a plan view of relevant parts showing one pixel and its periphery of a liquid crystal display unit which is another embodiment (Example 4) of the liquid crystal display device according to the present invention.

FIG. 23 is a main-portion plan view showing one pixel and its periphery of a liquid crystal display portion which is another embodiment (Embodiment 5) of the liquid crystal display device according to the present invention.

FIG. 24 is a plan view and a cross-sectional view of a main part of one pixel of a liquid crystal display unit which is another embodiment (Example 6) of the liquid crystal display device according to the present invention.

[Explanation of symbols]

SUB ... Transparent glass substrate, GL ... Scanning signal line, DL ... Video signal line, CL ... Opposing voltage signal line, PX ... Pixel electrode, C
T ... Counter electrode, GI ... Insulating film, GT ... Gate electrode, AS
... i-type semiconductor layer, SD ... Source electrode or drain electrode, PSV ... Protective film, BM ... Light-shielding film, LC ... Liquid crystal, TF
T: thin film transistor, PH: through hole, g, d ...
Conductive film, Cstg ... Storage capacitor, AOF ... Anodized film, AO
Anodizing mask, GTM ... Gate terminal, DTM ... Drain terminal, CB ... Common bus line, DTM ... Common electrode terminal, SHD ... Shield case, PNL ... Liquid crystal display panel, SPB ... Light diffusion plate, LCB ... Light guide, BL ... Backlight fluorescent tube, LCA ... Backlight case, RM ... Reflector, (subscripts omitted above).

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kazuhiko Yanagawa Kazuhiko Yanagawa 3300 Hayano, Mobara-shi, Chiba Electronic Device Division, Hitachi, Ltd. (72) Masahiro Yanai 3300 Hayano, Mobara-shi, Chiba Hitachi, Ltd. Electronic Device Business In-house (72) Inventor Nobutake Konishi 3300 Hayano, Mobara-shi, Chiba Hitachi, Ltd. Electronic Device Division

Claims (13)

[Claims]
1. A transparent substrate arranged to face each other with a liquid crystal layer in between, a pixel electrode and a counter electrode are provided on a surface of the transparent substrate facing the liquid crystal layer, and a pixel electrode and a counter electrode are provided between the pixel electrode and the counter electrode. In a liquid crystal display device in which an electric field is generated in parallel with a transparent substrate by applying a voltage of, a voltage is not applied between the pixel electrode and the counter electrode to transmit light from one transparent substrate to the other transparent substrate through the liquid crystal. The liquid crystal display device is characterized in that the alignment state of the liquid crystal that shields the light and the polarization state of the polarizing plate are set, and at least one of the pixel electrode and the counter electrode is formed of a transparent conductive film.
2. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to the pixel electrode via the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to the counter electrode. The counter electrode is composed of three or more electrodes including two arranged adjacent to the video signal lines adjacent to each other, and two electrodes adjacent to the video signal line among them are provided. The liquid crystal display device according to claim 1, wherein each electrode is made of a conductive film other than the transparent conductive film, and the other electrodes are made of a transparent conductive film.
3. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to the pixel electrode via the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to the counter electrode. And a counter electrode is formed of a transparent conductive film, and the counter electrode signal line is formed of another conductive film different from the transparent conductive film. The described liquid crystal display device.
4. The liquid crystal display device according to claim 3, wherein the conductive film forming the counter electrode signal line is made of a material having a smaller resistance value than the transparent conductive film forming the counter electrode.
5. The liquid crystal display device according to claim 1, wherein the transparent conductive layer is composed of an indium-tin-oxide (ITO) film.
6. The conductive film forming the counter electrode signal line is C
The liquid crystal display device according to claim 4, wherein the liquid crystal display device is composed of r, Ta, Ti, Mo, W, Al, an alloy thereof, or a laminate of selected materials thereof.
7. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to the pixel electrode via the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to the counter electrode. The counter electrode signal line is composed of an aluminum layer and a laminated body of an ITO film that completely covers the aluminum layer, and the counter electrode partially extends the ITO film. The liquid crystal display device according to claim 1, wherein the liquid crystal display device is configured by an extended portion that is provided.
8. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to the pixel electrode via the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to the counter electrode. Line and the pixel electrode is formed of a transparent conductive film, and at least one of a terminal portion of the video signal line, a terminal portion of the scanning signal line, and a terminal portion of the counter electrode signal line. The liquid crystal display device according to claim 1, wherein the terminal portion is formed of a transparent conductive film.
9. The transparent conductive film forming at least one of the transparent conductive film forming the pixel electrode, the video signal line terminal, the scanning signal line terminal, and the counter signal line terminal, 9. The method of manufacturing a liquid crystal display device according to claim 8, wherein the liquid crystal display device is formed in the same process.
10. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to a pixel electrode via the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to a counter electrode. Line and the counter electrode is formed of a transparent conductive film, and at least one of the terminal portion of the video signal line, the terminal portion of the scanning signal line, and the terminal portion of the counter electrode signal line. The liquid crystal display device according to claim 1, wherein the terminal portion is formed of a transparent conductive film.
11. A transparent conductive film forming at least one of a transparent conductive film forming a counter electrode, a video signal line terminal portion, a scanning signal line terminal portion, and a counter signal line terminal portion, The method for manufacturing a liquid crystal display device according to claim 10, wherein the liquid crystal display device is formed in the same process.
12. A thin film transistor, a scanning signal line for turning on the thin film transistor, a video signal line for supplying a video signal to a pixel electrode through the turned on thin film transistor, and a counter electrode signal for applying a counter voltage to a counter electrode. Line and the pixel electrode and the counter electrode are formed of a transparent conductive film, and among the terminal portion of the video signal line, the terminal portion of the scanning signal line, and the terminal portion of the counter electrode signal line, The liquid crystal display device according to claim 1, wherein at least one terminal portion is formed of a transparent conductive film.
13. A transparent conductive film forming a pixel electrode and a counter electrode, a terminal portion of a video signal line, a terminal portion of a scanning signal line,
13. The method of manufacturing a liquid crystal display device according to claim 12, wherein the transparent conductive films forming at least one of the terminal portions of the counter signal line and the counter signal line are formed in the same step.
JP22870695A 1995-09-06 1995-09-06 Liquid crystal display device and method of manufacturing the same Expired - Lifetime JP3474975B2 (en)

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