JPH0961211A - Temperature sensing resistor - Google Patents

Temperature sensing resistor

Info

Publication number
JPH0961211A
JPH0961211A JP7213726A JP21372695A JPH0961211A JP H0961211 A JPH0961211 A JP H0961211A JP 7213726 A JP7213726 A JP 7213726A JP 21372695 A JP21372695 A JP 21372695A JP H0961211 A JPH0961211 A JP H0961211A
Authority
JP
Japan
Prior art keywords
coat
sensitive resistor
mounting portion
temperature
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7213726A
Other languages
Japanese (ja)
Inventor
Kingo Omura
金吾 大村
Yuichi Takaoka
祐一 高岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP7213726A priority Critical patent/JPH0961211A/en
Publication of JPH0961211A publication Critical patent/JPH0961211A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a temperature sensing resistor that the mechanical strength of a mounting part is improved without lowering the thermal response of the resistor. SOLUTION: A reinforcing coat 11 of glass or resin is formed at the mounting part 1a of a temperature sensing resistor (insulating board 1). Since the coat 11 is formed, the effective thickness of the part 1a concentrated at the most mechanical stress at the time of mounting is increased, and the mechanical strength of the part 1a is enhanced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、流速センサ等に用
いられる感温抵抗体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature sensitive resistor used in a flow velocity sensor or the like.

【0002】[0002]

【従来の技術】空気等の流体の流量(流速)を測定する
流量センサのセンサ素子として、図3あるいは図4に示
すような感温抵抗体が用いられている。図3は、取付部
に抵抗膜が形成されていない感温抵抗体、図4は、取付
部に抵抗膜が形成されているものである。
2. Description of the Related Art As a sensor element of a flow rate sensor for measuring the flow rate (flow velocity) of a fluid such as air, a temperature sensitive resistor as shown in FIG. 3 or 4 is used. FIG. 3 shows a temperature-sensitive resistor in which a resistance film is not formed on the attachment portion, and FIG. 4 shows a resistance film formed on the attachment portion.

【0003】この種の感温抵抗体は、例えばアルミナ等
の長方形の絶縁基板1上に白金等の抵抗膜2からなる抵
抗パターン4が形成されており、絶縁基板1の長手方向
の一端側であって、抵抗パターン4の回路上での両端部
に電気的に接続された状態で引出電極5a,5bが形成
され、引出電極5a,5bにリード線6が溶接等の手段
により接続されている。抵抗パターン4は、抵抗膜2を
レーザトリマー等で溝3を形成することにより形成され
ている。
In this type of temperature-sensitive resistor, a resistance pattern 4 made of a resistance film 2 made of platinum or the like is formed on a rectangular insulating substrate 1 made of alumina or the like, and one end side in the longitudinal direction of the insulating substrate 1 is formed. Therefore, the extraction electrodes 5a and 5b are formed in a state of being electrically connected to both ends of the resistance pattern 4 on the circuit, and the lead wire 6 is connected to the extraction electrodes 5a and 5b by means such as welding. . The resistance pattern 4 is formed by forming the groove 3 in the resistance film 2 with a laser trimmer or the like.

【0004】そして、抵抗膜2上には、抵抗膜2を湿
気、ごみ、ほこり等から保護するとともに、抵抗膜2の
機械的な補強のためにガラス、樹脂等の保護コート7が
形成されている。保護コート7は印刷、スプレー、スピ
ンナー等により付与された後、焼成して形成される。ま
た、リード線6の接続箇所は、ガラス、樹脂等の補強材
8で被覆され、それによってリード線6の補強が行われ
ている。
A protective coat 7 made of glass, resin or the like is formed on the resistance film 2 to protect the resistance film 2 from moisture, dust, dust and the like and to mechanically reinforce the resistance film 2. There is. The protective coat 7 is formed by applying it by printing, spraying, a spinner or the like and then firing it. Further, the connecting portion of the lead wire 6 is covered with a reinforcing material 8 such as glass or resin, whereby the lead wire 6 is reinforced.

【0005】上記感温抵抗体は、流量センサの公知の抵
抗ブリッジ回路の発熱用抵抗体として用いられ、使用状
態(実装時)において、絶縁基板1の引出電極5a,5
b側を取付部1aとして、破線で示す筒状の支持部材2
0に取付けられ、空気等の流路に配置される。
The temperature sensitive resistor is used as a heating resistor of a known resistance bridge circuit of a flow sensor, and in the use state (when mounted), the extraction electrodes 5a, 5 of the insulating substrate 1 are used.
A cylindrical support member 2 indicated by a broken line with the side b as the mounting portion 1a
It is attached to 0 and is arranged in a flow path such as air.

【0006】このように、特に発熱用素子として用いら
れる感温抵抗体は、熱応答特性を改善するために、その
熱容量を極力小さくする必要があり、絶縁基板1はでき
る限り薄いもの(現行約150μm)が求められる。
As described above, in particular, the temperature sensitive resistor used as a heat generating element needs to have its heat capacity as small as possible in order to improve the thermal response characteristics, and the insulating substrate 1 is as thin as possible (currently 150 μm) is required.

【0007】[0007]

【発明が解決しようとする課題】上記のように、この種
の感温抵抗体は、細長く、薄い長方形状の絶縁基板が用
いられ、かつ、長手方向の端部を取付部として支持部材
に取付けられているので、感温抵抗体に外力が加わった
ときに、取付部の支持部近傍に機械的な外部応力が集中
し、特に、感温抵抗体の先端部に大きな外力が加わった
場合、取付部の応力が集中する部分にクラック等の亀裂
が生じる等の問題があった。
As described above, this type of temperature-sensitive resistor uses an elongated and thin rectangular insulating substrate, and is attached to a supporting member with its longitudinal end portion as a mounting portion. Therefore, when an external force is applied to the temperature-sensitive resistor, mechanical external stress concentrates near the support part of the mounting part, especially when a large external force is applied to the tip of the temperature-sensitive resistor, There has been a problem that cracks such as cracks occur in a portion of the mounting portion where stress is concentrated.

【0008】特に、図3に示す感温抵抗体では、取付部
に抵抗体及び保護コートが形成されておらず、取付部は
他の部位よりも機械的強度が低いという問題があった。
また、図4に示す感温抵抗体においても、取付部の機械
的強度をより一層向上させることが要求されている。
In particular, the temperature-sensitive resistor shown in FIG. 3 has a problem that the resistor and the protective coat are not formed on the mounting portion, and the mounting portion has lower mechanical strength than other portions.
Further, also in the temperature sensitive resistor shown in FIG. 4, it is required to further improve the mechanical strength of the mounting portion.

【0009】そこで、本発明の目的は、感温抵抗体の熱
応答性を低下させることなく、取付部の機械的強度を向
上した感温抵抗体を提供することにある。
Therefore, an object of the present invention is to provide a temperature-sensitive resistor having an improved mechanical strength of the mounting portion without lowering the thermal response of the temperature-sensitive resistor.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、絶縁基板と前記絶縁基板に形成された抵
抗パターン及び引出電極とを備え、前記絶縁基板の所定
の部分を取付部とする感温抵抗体において、前記取付部
に取付部の機械的強度を高めるための補強用コートが形
成されていることを特徴とするものである。
To achieve the above object, the present invention comprises an insulating substrate, a resistance pattern and a lead electrode formed on the insulating substrate, and a predetermined portion of the insulating substrate is attached to a mounting portion. In the temperature-sensitive resistor of the present invention, a reinforcing coat for increasing the mechanical strength of the mounting portion is formed on the mounting portion.

【0011】上記の構成によれば、感温抵抗体の取付部
にあらたに補強用コートが形成されており、支持部材に
取付けられた状態で最も機械的応力の集中する部分の実
効厚さを増加させているので、取付部の機械的強度を向
上することができる。
According to the above construction, the reinforcing coat is newly formed on the mounting portion of the temperature sensitive resistor, and the effective thickness of the portion where the mechanical stress is most concentrated when mounted on the support member is set. Since the number is increased, the mechanical strength of the mounting portion can be improved.

【0012】[0012]

【発明の実施の形態】以下、本発明をその実施例を示す
図面に基づいて説明する。以下の各実施例の感温抵抗体
では、絶縁基板は約150μm、抵抗膜は1〜2μm、
保護コートは5〜30μmの厚みで形成されている。図
において、従来例と同一または相当する部分、同一機能
のものについては同一符号を付す。また、以下の図にお
いて、2点鎖線は実装時における支持部材の保持面を示
す線である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the drawings showing embodiments thereof. In the temperature sensitive resistor of each of the following examples, the insulating substrate is about 150 μm, the resistive film is 1 to 2 μm,
The protective coat is formed with a thickness of 5 to 30 μm. In the figure, the same or corresponding parts and those having the same functions as those in the conventional example are designated by the same reference numerals. Further, in the following figures, the chain double-dashed line is a line showing the holding surface of the supporting member at the time of mounting.

【0013】本発明の第1実施例に係る感温抵抗体の構
成を図1に示す。図1は従来例の図3に対応するもので
あり、(a)は平面図、(b)は断面図である。
FIG. 1 shows the structure of the temperature sensitive resistor according to the first embodiment of the present invention. FIG. 1 corresponds to FIG. 3 of the conventional example, in which (a) is a plan view and (b) is a sectional view.

【0014】図1(a)及び図1(b)に示すように、
本実施例の感温抵抗体では、抵抗膜2が形成されていな
い取付部1aに補強用コート11が形成されている。つ
まり、従来例の図3に示した抵抗膜2の保護用としてい
た保護コート7を取付部1aにも延設して形成して、補
強用コート11が形成され、保護コート7と補強用コー
ト11はスクリーン印刷により同時に形成されている。
As shown in FIGS. 1 (a) and 1 (b),
In the temperature-sensitive resistor of this embodiment, the reinforcing coat 11 is formed on the mounting portion 1a where the resistance film 2 is not formed. That is, the protective coat 7 used to protect the resistive film 2 shown in FIG. 3 of the conventional example is extended to the mounting portion 1a to form the reinforcing coat 11, and the protective coat 7 and the reinforcing coat are formed. 11 is formed simultaneously by screen printing.

【0015】補強用コート11は、ガラス、樹脂等から
なり、実装時に最も機械的応力が集中する取付部1aの
実効厚みを増して、取付部1aの機械的強度を向上する
ためのものである。補強用コート11以外の構成につい
ては、図3に示す従来例のものと同様の構成であり、そ
の説明を省略する。
The reinforcing coat 11 is made of glass, resin or the like, and is for increasing the effective thickness of the mounting portion 1a where the mechanical stress is most concentrated at the time of mounting to improve the mechanical strength of the mounting portion 1a. . The configuration other than the reinforcing coat 11 is the same as that of the conventional example shown in FIG. 3, and the description thereof is omitted.

【0016】この構成においては、実装時に最も機械的
応力の加わる取付部1aにのみあらたに補強用コート1
1が形成されているので、感温抵抗体の熱応答性を低下
させることなく、従来例のものに比べ、取付部1aの支
持部及び支持部近傍の機械的強度を高めることができ
る。
In this structure, the reinforcing coat 1 is newly provided only on the mounting portion 1a to which the most mechanical stress is applied during mounting.
Since 1 is formed, the mechanical strength of the supporting portion of the mounting portion 1a and the vicinity of the supporting portion can be increased as compared with the conventional example without deteriorating the thermal response of the temperature sensitive resistor.

【0017】なお、本実施例では、保護コート7と補強
用コート11は同じ材質で形成したが、補強用コート1
1を保護コート7よりも機械的強度の強い材質のガラ
ス、樹脂で形成するようにしてもよい。また、補強用コ
ート11の厚みを保護コートよりも厚く形成するように
してもよい。このような場合は、保護コート7を形成し
た後、補強用コート11が形成される。
Although the protective coat 7 and the reinforcing coat 11 are made of the same material in this embodiment, the reinforcing coat 1
1 may be formed of glass or resin of a material having a mechanical strength higher than that of the protective coat 7. Further, the reinforcing coat 11 may be formed thicker than the protective coat. In such a case, after forming the protective coat 7, the reinforcing coat 11 is formed.

【0018】次ぎに、本発明の第2実施例に係る感温抵
抗体の構成を図2に示す。図2は従来例の図4に対応す
るものであり、(a)は平面図、(b)は断面図であ
る。
Next, FIG. 2 shows the structure of the temperature sensitive resistor according to the second embodiment of the present invention. FIG. 2 corresponds to FIG. 4 of the conventional example, where (a) is a plan view and (b) is a sectional view.

【0019】図2(a)及び図2(b)に示すように、
本実施例の感温抵抗体では、絶縁基板1の取付部1aの
保護コート7上に補強用コート11が形成されている。
つまり、従来例の図4に示した抵抗膜2の保護用として
いた保護コート7の上であって、取付部1a部のみに、
保護コート7と同一厚み、同材質の補強用コート11が
形成されている。すなわち、絶縁基板1の取付部1aに
は5〜30μm厚の保護コート7と約15μm厚の補強
用コート11が積層されて形成されている。補強用コー
ト11以外の構成については、図4に示す従来例のもの
と同様の構成であり、その説明を省略する。
As shown in FIGS. 2 (a) and 2 (b),
In the temperature sensitive resistor of this embodiment, the reinforcing coat 11 is formed on the protective coat 7 of the mounting portion 1a of the insulating substrate 1.
That is, on the protective coat 7 used to protect the resistance film 2 shown in FIG. 4 of the conventional example, only the mounting portion 1a is
A reinforcing coat 11 having the same thickness and the same material as the protective coat 7 is formed. That is, the mounting portion 1a of the insulating substrate 1 is formed by laminating the protective coat 7 having a thickness of 5 to 30 μm and the reinforcing coat 11 having a thickness of about 15 μm. The configuration other than the reinforcing coat 11 is the same as that of the conventional example shown in FIG. 4, and the description thereof is omitted.

【0020】この構成においては、実装時に最も機械的
応力の加わる取付部1aの保護コート7上にのみあらた
に補強用コート11が形成されているので、感温抵抗体
の熱応答性を低下させることなく、従来例のものに比
べ、取付部1aの支持部及び支持部近傍の機械的強度を
高めることができる。
In this structure, since the reinforcing coat 11 is newly formed only on the protective coat 7 of the mounting portion 1a to which the most mechanical stress is applied at the time of mounting, the thermal response of the temperature sensitive resistor is deteriorated. Without this, the mechanical strength of the supporting portion of the mounting portion 1a and the vicinity of the supporting portion can be increased as compared with the conventional example.

【0021】なお、本実施例においても、補強用コート
11を保護コート7よりも機械的強度の強い材質のガラ
ス、樹脂等で形成するようにしてもよい。また、補強用
コート11の厚みは所望の機械的強度により適宜設定さ
れる。
Also in this embodiment, the reinforcing coat 11 may be formed of glass, resin, or the like, which is a material having a mechanical strength higher than that of the protective coat 7. Further, the thickness of the reinforcing coat 11 is appropriately set according to the desired mechanical strength.

【0022】また、上記各実施例では、引出電極5a,
5bが絶縁基板1の長手方向の一端側に形成されたもの
で説明したが、これに限るものではなく、引出電極5
a,5bを両端部側に対向して形成し、両端部側を取付
部とした感温抵抗体にも本発明を適用できる。この場合
は、両取付部の所定の部分に補強用コートが形成され
る。
In each of the above embodiments, the extraction electrodes 5a,
Although the description has been given of the case where 5b is formed on one end side in the longitudinal direction of the insulating substrate 1, the present invention is not limited to this, and the extraction electrode 5
The present invention can also be applied to a temperature sensitive resistor in which a and 5b are formed so as to face both ends, and both ends are attached. In this case, a reinforcing coat is formed on a predetermined portion of both mounting portions.

【0023】[0023]

【発明の効果】以上説明したように、本発明に係る感温
抵抗体によれば、感温抵抗体の取付部にあらたに補強用
コートが形成され、実装時に最も機械的応力の集中する
部分の実効厚さを増加させているので、取付部の支持部
及び支持部近傍の機械的強度をより一層向上することが
できる。したがって、感温抵抗体に外力が加わった場合
の取付部でのクラック等の破損の発生を、従来のものに
比べ大幅に低減することができる。
As described above, according to the temperature sensitive resistor of the present invention, the reinforcing coat is newly formed on the mounting portion of the temperature sensitive resistor, and the portion where the mechanical stress is most concentrated at the time of mounting. Since the effective thickness is increased, the mechanical strength of the supporting portion of the mounting portion and the vicinity of the supporting portion can be further improved. Therefore, the occurrence of damage such as cracks in the mounting portion when an external force is applied to the temperature sensitive resistor can be significantly reduced as compared with the conventional one.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は本発明の第1実施例に係る感温抵抗体
の平面図、(b)は断面図である。
FIG. 1A is a plan view of a temperature sensitive resistor according to a first embodiment of the present invention, and FIG. 1B is a sectional view.

【図2】(a)は本発明の第2実施例に係る感温抵抗体
の平面図、(b)は断面図である。
2A is a plan view of a temperature sensitive resistor according to a second embodiment of the present invention, and FIG. 2B is a sectional view thereof.

【図3】(a)は従来の感温抵抗体の平面図、(b)は
断面図である。
3A is a plan view of a conventional temperature-sensitive resistor, and FIG. 3B is a sectional view.

【図4】(a)は従来の他の感温抵抗体の平面図、
(b)は断面図である。
FIG. 4A is a plan view of another conventional temperature-sensitive resistor,
(B) is a sectional view.

【符号の説明】[Explanation of symbols]

1 絶縁基板 1a 取付部 2 抵抗膜 3 溝 4 抵抗パターン 5a,5b 引出電極 6 リード線 7 保護コート 8 補強材 11 補強用コート 20 支持部材 DESCRIPTION OF SYMBOLS 1 Insulating substrate 1a Attachment part 2 Resistive film 3 Groove 4 Resistance pattern 5a, 5b Lead electrode 6 Lead wire 7 Protective coat 8 Reinforcing material 11 Reinforcing coat 20 Supporting member

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 絶縁基板と前記絶縁基板に形成された抵
抗パターン及び引出電極とを備え、前記絶縁基板の所定
の部分を取付部とする感温抵抗体において、 前記取付部に取付部の機械的強度を高めるための補強用
コートが形成されていることを特徴とする感温抵抗体。
1. A temperature-sensitive resistor comprising an insulating substrate, a resistance pattern formed on the insulating substrate, and a lead electrode, wherein a predetermined portion of the insulating substrate serves as a mounting portion. A temperature-sensitive resistor, characterized in that a reinforcing coat is formed to increase its mechanical strength.
JP7213726A 1995-08-22 1995-08-22 Temperature sensing resistor Pending JPH0961211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7213726A JPH0961211A (en) 1995-08-22 1995-08-22 Temperature sensing resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7213726A JPH0961211A (en) 1995-08-22 1995-08-22 Temperature sensing resistor

Publications (1)

Publication Number Publication Date
JPH0961211A true JPH0961211A (en) 1997-03-07

Family

ID=16643987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7213726A Pending JPH0961211A (en) 1995-08-22 1995-08-22 Temperature sensing resistor

Country Status (1)

Country Link
JP (1) JPH0961211A (en)

Similar Documents

Publication Publication Date Title
KR100426939B1 (en) Gas sensor
JPH08219900A (en) Platinum-based temperature sensor
JPH06326246A (en) Thick film circuit board and production thereof
KR0165714B1 (en) Acceleration sensor and method for producing the same
JPH0961211A (en) Temperature sensing resistor
US5958606A (en) Substrate structure with adhesive anchoring-seams for securely attaching and boding to a thin film supported thereon
JPH0953967A (en) Flow rate sensor
JPH11354302A (en) Thin-film resistor element
JP3408910B2 (en) Gas sensor and manufacturing method thereof
JP5453179B2 (en) Gas sensor
JP2001056257A (en) Temperature sensor element, manufacture thereof and temperature sensor
JP3924460B2 (en) Platinum thin film element
JPH0632267B2 (en) Electric heater
JPS60253280A (en) Semiconductor pressure sensor
JPH1194649A (en) Platinum temperature sensor
KR20020009506A (en) Thermal head
JPS58147141A (en) Electronic parts
JP2537919Y2 (en) Ceramic heater
JPH10172806A (en) Temperature sensor and its manufacture
JPS6176378A (en) Thermal head
JP2996161B2 (en) Platinum temperature sensitive resistor
JP2000121449A (en) Temperature-sensitive element
JPH10221144A (en) Micro heater and its manufacture
JP3476961B2 (en) Thermal head
JPS63298066A (en) Gas rate sensor main body